CN109141208A - A kind of highly sensitive and high linearity sensor - Google Patents

A kind of highly sensitive and high linearity sensor Download PDF

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Publication number
CN109141208A
CN109141208A CN201811267933.1A CN201811267933A CN109141208A CN 109141208 A CN109141208 A CN 109141208A CN 201811267933 A CN201811267933 A CN 201811267933A CN 109141208 A CN109141208 A CN 109141208A
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CN
China
Prior art keywords
coil
frame member
sensor
highly sensitive
high linearity
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Pending
Application number
CN201811267933.1A
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Chinese (zh)
Inventor
武丽花
张青青
裴闯
郑淑娜
刘莹
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707th Research Institute of CSIC
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707th Research Institute of CSIC
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Publication date
Application filed by 707th Research Institute of CSIC filed Critical 707th Research Institute of CSIC
Priority to CN201811267933.1A priority Critical patent/CN109141208A/en
Publication of CN109141208A publication Critical patent/CN109141208A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The present invention relates to a kind of highly sensitive and high linearity sensors, including coil, skeleton part, shell and cable, frame member is formed after coil is adhesively fixed on skeleton part upper surface and colloid sealing, frame member is fitted into shell, and it is fixed using gluing method, frame member bottom surface produces mounting groove, and installation switching weld tabs, cable are welded in frame member using soldering method and transfer on weld tabs accordingly in the mounting groove.The present invention improves the sensitivity and quality factor of sensor, realizes the good end face flatness of single layer coil and the coiling uniformity, reduces distributed inductance, improve the linearity of sensor;In addition, improving the quality factor of sensor, and then improve the sensitivity of sensor this invention ensures that dimensional accuracy while effectively reduces the dielectric loss under high-frequency excitation.

Description

A kind of highly sensitive and high linearity sensor
Technical field
The present invention relates to sensor technical field, especially one kind, and sensor spirit is improved under wide range, big bandwidth condition Sensitivity, the method for the linearity are a kind of design schemes suitable for high precision electro eddy displacement sensor.
Background technique
Since eddy current displacement sensor has, small in size, range is big, frequency response is fast, the advantage of high reliablity, non-contact Vibration, displacement measurement field have good application.
The basic principle of current vortex sensor is according to faraday electromagnetic induction principle, and reguline metal conductor is placed in variation When making cutting magnetic line movement in magnetic field or in magnetic field, the induced current in vortex shape, i.e. current vortex will be generated in conductor, with Upper phenomenon is known as eddy current effect.And the scales according to made of eddy current effect are eddy current sensor.Current vortex passes Sensor mainly includes probe segment and fore-lying device part, and fore-lying device provides high frequency oscillating current and enters probe coil, produces in coil The magnetic field of raw alternation.When tested metallic object is close to this magnetic field, then current vortex is generated in this metal surface, at the same time the electricity whirlpool Flow field, which also generates a direction alternating magnetic field contrary with head coil, makes coil high-frequency electric current due to its reaction Amplitude and phase are changed (effective impedance of coil), this variation and metal bulk permeability, conductivity, coil geometric form Shape, geometric dimension, power frequency and head coil are effectively hindered to relating to parameters such as the distances on metallic conductor surface, using coil Resistance and coil to metallic conductor surface distance change between the sensor that measures of relationship be that current vortex displacement passes Sensor.
Currently, the method for improving eddy current displacement sensor sensitivity mainly passes through line optimization means and realizes, such as specially It is exactly that the sensitive of sensor is improved by the method for coil boosting, fixed ampllitude excitation, Amplitude Compensation in benefit 201610328082.1 Degree.
After the main deficiency of the prior art is line optimization to certain level, Improvement is limited, and the adjustment of line parameter circuit value It is readily incorporated new system disturbance, forms new interference source, for example while coil boosting measure raising sensitivity, also increase Biosensor power consumption changes temperature field and the electromagnetic field situation of application system, introduces new problem.
Summary of the invention
In place of making up the deficiencies in the prior art, Potential model is carried out from sonde configuration angle, is mentioned For a kind of sensitivity that can be further improved current vortex displacement sensing, the sensor of the linearity.
The purpose of the present invention is what is realized by following technological means:
A kind of highly sensitive and high linearity sensor, it is characterised in that: including coil, skeleton part, shell and line Cable forms frame member after coil is adhesively fixed on skeleton part upper surface and colloid sealing, and frame member is fitted into shell, And fixed using gluing method, frame member bottom surface produces mounting groove, and installation switching weld tabs, cable utilize tin in the mounting groove Soldering method is welded in frame member and transfers on weld tabs accordingly.
Moreover, the coil is designed as single layer densely packed coil using the flat enameled wire in small section.
Moreover, 4~6 millimeters of the internal diameter of the coil, 8~10 millimeters of outer diameter, the number of turns 45~60.
Moreover, the skeleton part selects the processable micro-crystalline ceramic material of low-dielectric loss to be made.
The advantages and positive effects of the present invention are:
1, the present invention is based on the design of the simple squamous enamel wire coil in small section, line is effectively increased in a limited space The circle density of circle, reduces coil thickness, and then improves the sensitivity and quality factor of sensor.
2, the present invention is based on flat enameled wire single layer densely packed coil structures to carry out technological design, and it is good to realize single layer coil End face flatness and the coiling uniformity, reduce distributed inductance, improve the linearity of sensor.
3, the present invention is based on the skeleton structure design that processable micro-crystalline ceramic carries out, guarantee effectively to drop while dimensional accuracy Dielectric loss under low high-frequency excitation, improves the quality factor of sensor, and then improve the sensitivity of sensor.
Detailed description of the invention
Fig. 1 is electric vortex displacement sensor probe structure chart;
Fig. 2 is the bottom view of Fig. 1.
In figure, 1 be coil, 2 be skeleton part, 3 be shell, 4 be cable, 5 be switching weld tabs.
Specific embodiment
With reference to the accompanying drawing in detail narration the embodiment of the present invention, it should be noted that the present embodiment be it is narrative, no It is restrictive, this does not limit the scope of protection of the present invention.
A kind of highly sensitive and high linearity sensor, including coil 1, skeleton part 2, shell 3 and cable 4, skeleton Part selects the processable micro-crystalline ceramic material of low-dielectric loss to be made, and coil is adhesively fixed on skeleton part upper surface and glue Frame member is formed after body sealing, frame member is fitted into shell, and is fixed using gluing method, and frame member bottom surface is produced Mounting groove, the interior installation switching weld tabs 5 of the mounting groove, switching weld tabs is two, and cable is welded in frame member using soldering method On corresponding switching weld tabs.
The molding of coil is realized by special tooling, it is desirable that coil has very high planarization, symmetry and consistency.Coil Single layer densely packed coil is designed as using the flat enameled wire in small section.4~6 millimeters of the internal diameter of coil, 8~10 millimeters of outer diameter, circle Number 45~60.
The core of the technical solution is to solve the problems, such as high sensitivity, and main designed by coil design is realized.It is limiting Under the conditions of fixed bulk, in order to reach expected sensitivity index, sonde configuration is designed using coil design as point of penetration. First is that being designed as single layer densely packed coil using the flat enameled wire in small section, the inside and outside diameter ruler of coil is adjusted in the space of restriction When very little and circle density realizes expected sensitivity and range, technological design and preparation, reduced by control coil uniform ground degree Its distributed inductance, and improve the linearity and quality factor;Second is that improving the product of sensor by the dielectric loss for reducing skeleton Prime factor improves sensitivity in turn, and the processable micro-crystalline ceramic material of low-dielectric loss has been selected in the present invention.

Claims (4)

1. a kind of highly sensitive and high linearity sensor, it is characterised in that: including coil, skeleton part, shell and cable, Frame member is formed after coil is adhesively fixed on skeleton part upper surface and colloid sealing, frame member is fitted into shell, and It is fixed using gluing method, frame member bottom surface produces mounting groove, and installation switching weld tabs, cable utilize soldering in the mounting groove Method is welded in frame member and transfers on weld tabs accordingly.
2. a kind of highly sensitive and high linearity sensor according to claim 1, it is characterised in that: the coil Single layer densely packed coil is designed as using the flat enameled wire in small section.
3. a kind of highly sensitive and high linearity sensor according to claim 1, it is characterised in that: the coil 4~6 millimeters of internal diameter, 8~10 millimeters of outer diameter, the number of turns 45~60.
4. a kind of highly sensitive and high linearity sensor according to claim 1, it is characterised in that: the skeleton Part selects the processable micro-crystalline ceramic material of low-dielectric loss to be made.
CN201811267933.1A 2018-10-29 2018-10-29 A kind of highly sensitive and high linearity sensor Pending CN109141208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811267933.1A CN109141208A (en) 2018-10-29 2018-10-29 A kind of highly sensitive and high linearity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811267933.1A CN109141208A (en) 2018-10-29 2018-10-29 A kind of highly sensitive and high linearity sensor

Publications (1)

Publication Number Publication Date
CN109141208A true CN109141208A (en) 2019-01-04

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811267933.1A Pending CN109141208A (en) 2018-10-29 2018-10-29 A kind of highly sensitive and high linearity sensor

Country Status (1)

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CN (1) CN109141208A (en)

Citations (11)

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Publication number Priority date Publication date Assignee Title
US3826886A (en) * 1971-04-15 1974-07-30 Fujitsu Ltd Contact material
CN201331328Y (en) * 2008-12-26 2009-10-21 中国船舶重工集团公司第七○七研究所 Barrel-shaped movable coil angle sensor
CN101709985A (en) * 2009-11-05 2010-05-19 广州市番禺奥迪威电子有限公司 Plesoelectric ultrasonic flow sensor
CN102049733A (en) * 2010-07-26 2011-05-11 清华大学 Eddy current metal film thickness end point detection device
CN102359801A (en) * 2011-09-26 2012-02-22 中环天仪股份有限公司 Abraded plate alarming device of electromagnetic flow gauge and installation process
CN103245394A (en) * 2013-03-29 2013-08-14 北京遥测技术研究所 Point-type liquid level sensor based on multilayer annular capacitor structure
CN103900617A (en) * 2014-04-14 2014-07-02 上海瑞视仪表电子有限公司 Method for manufacturing electrical vortex sensor probe
CN104729396A (en) * 2015-03-24 2015-06-24 浙江大学 High-temperature eddy-current displacement sensor temperature compensation method based on temperature online measurement and sensing device
CN105157869A (en) * 2015-05-21 2015-12-16 浙江大学 High-temperature sensing device based on eddy current
CN105415101A (en) * 2015-11-26 2016-03-23 东北大学 Determining method for surface roughness of grinding of microcrystallite glass ceramic
CN105783692A (en) * 2016-05-17 2016-07-20 广东省自动化研究所 Wide-range high-precision high dynamic response eddy current displacement sensor and implementation method

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3826886A (en) * 1971-04-15 1974-07-30 Fujitsu Ltd Contact material
CN201331328Y (en) * 2008-12-26 2009-10-21 中国船舶重工集团公司第七○七研究所 Barrel-shaped movable coil angle sensor
CN101709985A (en) * 2009-11-05 2010-05-19 广州市番禺奥迪威电子有限公司 Plesoelectric ultrasonic flow sensor
CN102049733A (en) * 2010-07-26 2011-05-11 清华大学 Eddy current metal film thickness end point detection device
CN102359801A (en) * 2011-09-26 2012-02-22 中环天仪股份有限公司 Abraded plate alarming device of electromagnetic flow gauge and installation process
CN103245394A (en) * 2013-03-29 2013-08-14 北京遥测技术研究所 Point-type liquid level sensor based on multilayer annular capacitor structure
CN103900617A (en) * 2014-04-14 2014-07-02 上海瑞视仪表电子有限公司 Method for manufacturing electrical vortex sensor probe
CN104729396A (en) * 2015-03-24 2015-06-24 浙江大学 High-temperature eddy-current displacement sensor temperature compensation method based on temperature online measurement and sensing device
CN105157869A (en) * 2015-05-21 2015-12-16 浙江大学 High-temperature sensing device based on eddy current
CN105415101A (en) * 2015-11-26 2016-03-23 东北大学 Determining method for surface roughness of grinding of microcrystallite glass ceramic
CN105783692A (en) * 2016-05-17 2016-07-20 广东省自动化研究所 Wide-range high-precision high dynamic response eddy current displacement sensor and implementation method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
戴焯主编: "《传感与检测技术》", 30 August 2003, 武汉理工大学出版社 *

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