CN100442005C - Fixed-frequency AM electric vortex displacement sensor of linear automatic compensation - Google Patents

Fixed-frequency AM electric vortex displacement sensor of linear automatic compensation Download PDF

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Publication number
CN100442005C
CN100442005C CNB2006101487015A CN200610148701A CN100442005C CN 100442005 C CN100442005 C CN 100442005C CN B2006101487015 A CNB2006101487015 A CN B2006101487015A CN 200610148701 A CN200610148701 A CN 200610148701A CN 100442005 C CN100442005 C CN 100442005C
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circuit
frequency
compensation
displacement sensor
probe
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CNB2006101487015A
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CN101000229A (en
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朱杰
朱久阔
李定飞
黄小丽
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Shanghai Chijie Electronic Co ltd
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Shanghai Chijie Electronic Co ltd
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Abstract

The invention relates to linearity auto-compensation fixed frequency amplitude modulation electrical eddy current displacement transducer. It includes probe, coaxial cable, and preamplifier circuit. The coil of the probe adopts palladium-silver enameled wire. The coaxial cable structure includes inner conductor, inner insulating layer, inner shielding layer, isolating layer, outer shielding layer and isolating protective sleeve. The inner conductor is formed by many Mn, Cu, and Ag alloy wires. Inner and outer shielding layers are formed by gold-plate copper wire net. The others are made by polytetrafluoroethylene. The preamplifier circuit includes high frequency oscillating circuit, linearity compensation circuit, high frequency oscillating control circuit, linearity correcting circuit, detection circuit, filter circuit, temperature compensation circuit, amplification circuit, and follower. The invention has outstanding temperature compensation character, can ensure transducer precision in big temperature difference range by stabilizing its non-linear degree in small area.

Description

A kind of fixed-frequency AM electric vortex displacement sensor of linear automatic compensation
Technical field
The present invention relates to a kind of fixed-frequency AM electric vortex displacement sensor, particularly a kind of fixed-frequency AM electric vortex displacement sensor that can carry out linear automatic compensation.
Background technology
What current vortex sensor adopted is the induced electricity vortex principle, and when the coil that has high-frequency current during near tested metal, the electromagnetic field of high frequency that high-frequency current produced on the coil just produces induction current on the metal surface, be called current vortex on the electromagnetics.Relating to parameters such as the geometric configuration of current vortex and tested intermetallic distance and conductivity, magnetic permeability, coil, physical dimension, power frequency.Can be by modulate circuit with the changing voltage of the variable in distance linearity between eddy current probe and the tested metal covering or the variation of electric current, thus realize the non-cpntact measurement of non electrical quantities such as vibration, displacement to tested metal covering.
The current vortex displacement vibration transducer is simple in structure, highly sensitive with it, measurement range is big, the work primary clearance is big, antijamming capability is strong, frequency response characteristic good, the advantage such as untouchable of low cost of manufacture and measurement, be widely used in departments such as electric power, petrochemical industry, machinery, aviation, metallurgy, be suitable for the measurement and the supervision of rotating machinery operational factor especially.
But, the major defect of current vortex sensor is that temperature characterisitic is poor, use in or the environment that temperature variation is bigger higher and will produce bigger error in temperature, therefore seek the effective method that reduces warm float, further improve the performance and the measuring accuracy of current vortex sensor, expanding the application of current vortex sensor, prolong the serviceable life of current vortex sensor, is the development trend of current vortex sensing technology.According to the record of relevant document, improve the temperature characterisitic of current vortex sensor on a large scale after, accident rate can reduce by 75%, maintenance cost can reduce 25%~50%.Some new materials and new technology have been applied in the manufacturing of current vortex sensor.But fundamentally do not solve stability, the nonlinear problem of sensor.
Summary of the invention
Technical matters of the present invention is that a kind of fixed-frequency AM electric vortex displacement sensor that can carry out linear automatic compensation under big temperature difference condition will be provided, and solves the non-linear and stability problem of eddy current displacement sensor under big temperature difference condition.
In order to solve above technical matters, the invention provides a kind of fixed-frequency AM electric vortex displacement sensor of linear automatic compensation, comprise eddy current probe, concentric cable and preamplifier circuit, probe is connected with concentric cable, palladium-silver coil in the probe produces high-frequency current, adopt temperature-compensation circuit, the temperature of compensation probe and concentric cable is floated error.
Eddy current probe is made of palladium-silver coil, skeleton body, protective cover, Stainless Steel Shell.The palladium-silver coil adopts the palladium-silver line to do raw material, and through fully-automatic intelligent winder coiling moulding, through assembling skeleton body, protective cover, technologies such as encapsulating encapsulation complete again.According to the skin effect principle, the line of palladium-silver line footpath is between 0.11~0.35mm, and resistivity is between 0.6~3.5 Ω .m, and the temperature coefficient of resistivity is in 50ppm/ ℃.The palladium-silver line wraps lacquer with the high-temperature insulation lacquer and handles, and its working temperature can reach 250 ℃.
The coaxial cable for high frequency structure is inner wire, inner insulating layer, internal shield, dielectric isolation layer, external shielding layer and insulation protective jacket from inner wire to layer structure successively.
Inner wire is that 7 manganese, copper, silver alloy wire are made, and characteristic impedance is 75 Ω, and the temperature coefficient of characteristic impedance is in 70ppm/ ℃.Inside and outside screen layer is the gold plated copper silk net, and inner insulating layer, dielectric isolation layer and insulation protective jacket are teflon.Temperature coefficient is in 70ppm/ ℃.
Preamplifier circuit is to be made of high-frequency oscillating circuits, linear compensation circuit, higher-order of oscillation control circuit, linearity circuit, detecting circuit, filtering circuit, temperature-compensation circuit, amplifying circuit and follower.
Described higher-order of oscillation control circuit be at operational amplifier in-phase input end string by two resistance, regulate the resistance ratio-voltage, the control oscillation circuit starting condition for oscillation.
Described linear compensation circuit be behind two electric capacity of collector series connection of a triode again and connect a resistance, electric capacity, adjust three capacitance size, may command oscillation frequency and feedback proportional, compensation are caused the variation of eddy current probe quality factor q by temperature variation.
Described temperature-compensation circuit is in the pi type filter back and connects a diode and a resistance, utilizes the diode temperature characteristic,, compensate the temperature drift of elements such as its generator triode, detector diode, resistance.
Superior effect of the present invention is:
1) the palladium-silver line has stable resistivity and mechanical property.The eddy current probe coil that adopts the palladium-silver line to make, the stability of its quality factor q improves a lot.
2) determine the line footpath of palladium-silver line according to the principle of skin effect, can be under big temperature difference condition automatically compensation change by the palladium-silver line resistance rate that temperature causes.
3) inner wire of coaxial cable for high frequency is defined as the copper-manganese silver alloy wire of 7 0.12mm~0.15mm according to the frequency 1MHz of oscillating current, can drop to temperature minimum to the influence of coaxial cable for high frequency;
4) linear compensation circuit is made compensation according to the temperature characterisitic of eddy current probe and concentric cable to the linearity of sensor.
5) temperature-compensation circuit utilizes the diode temperature characteristic, compensates the difference variation of its front triode.
6) the present invention has outstanding temperature compensation characteristic.In big temperature range, the stabilizing its non-linear degree of this sensor has guaranteed the precision of sensor in very little interval.
Description of drawings
Fig. 1 is a theory diagram of the present invention;
Fig. 2 is the structural representation of coaxial cable for high frequency of the present invention;
Fig. 3 is a circuit block diagram of the present invention;
Fig. 4 is compensating circuit figure of the present invention;
Fig. 4 A is high-frequency oscillating circuits figure of the present invention;
Fig. 4 B is linear compensation circuit figure of the present invention;
Fig. 4 C is temperature-compensation circuit figure of the present invention;
Fig. 5 is the structural representation of eddy current probe of the present invention.
The number in the figure explanation
The 1-probe;
The 11-protective cover; The 12-coil;
The 13-skeleton body; The 14-housing;
The 2-concentric cable;
The 21-inner wire; The 22-inner insulating layer;
The 23-internal shield; The 24-dielectric isolation layer;
The 25-external shielding layer; The 26-insulation protective jacket;
The 3-preamplifier circuit;
The 31-high-frequency oscillating circuits;
311-triode N1; The 312-P1 that pops one's head in;
313-resistance R 3; 314-resistance R 4;
The 32-linear compensation circuit;
321-resistance R 5; 322-capacitor C 2;
323-capacitor C 5; 324-capacitor C 7;
33-higher-order of oscillation control circuit;
The 331-operational amplifier; 332-resistance R 1;
333-resistance R 2;
The 34-linearity circuit;
The 35-envelope detection circuit; 36-π type filtering circuit;
The 37-temperature-compensation circuit;
371-diode D2; 372-resistance R 6;
The 38-amplifying circuit;
The 39-follower;
The tested metal of 4-;
Embodiment
See also shown in the accompanying drawing, the invention will be further described.
As shown in Figure 1, the invention provides a kind of fixed-frequency AM electric vortex displacement sensor of linear automatic compensation.Comprise eddy current probe 1, concentric cable 2 and preamplifier circuit 3, probe 1 is connected with concentric cable 2, and the palladium-silver coil in the probe 1 produces high-frequency current, adopts temperature-compensation circuit, compensate pop one's head in 1 and the temperature of concentric cable 2 float error.
As shown in Figure 5, eddy current probe 1 is made of probe coil 12, skeleton body 13, protective cover 11, Stainless Steel Shell 14, concentric cable 2.Probe coil 12 adopts the palladium-silver line to do raw material, and the formula rate of palladium-silver line is a palladium constituent content 75~85%, silver element content 15~25%.Palladium and silver are adjacent element on the periodic table of elements, and atomic weight is very approaching, through fusing together behind 800 ℃ the high melt.It is low, stable that palladium and the alloy wire made of silver have resistivity, and material is even, physical strength height, advantage such as cold draw is good.The line footpath of palladium-silver line is defined as following three kinds of specifications according to difference probe specification: φ 8mm probe 1 adopts 0.13mm line footpath, and φ 11mm probe 1 adopts 0.17mm line footpath, and φ 25mm probe 1 adopts 0.32mm line footpath.The palladium-silver line is made eddy current probe coil 12 through operations such as automatic winding, typing, oven dry, the demouldings.Then, finished product eddy current probe coil 12 is fixed on the skeleton body 13, connects concentric cable 2, protective cover 11 is installed, pour into resistant to elevated temperatures electronic isolation packaging plastic.The eddy current probe parameters temperature variation of making is: inductance<0.005%/℃, resistance<0.01%/℃, Q value<0.006%/℃.
As shown in Figure 2, coaxial cable for high frequency 2 structures are inner wire 21, inner insulating layer 22, internal shield 23, dielectric isolation layer 34, external shielding layer 35 and insulation protective jacket 26 from inner wire 21 to layer structure successively.Coaxial cable for high frequency 2 by the double layer screen concentric cable of anti-75 Ω of characteristic, gold-platedly make from latching connector.
Inner wire 21 is that 7 0.12mm manganese, copper, silver alloy wire are made, and characteristic impedance is 75 Ω, and the formula rate of manganese, copper, silver alloy wire is: manganese 1.5%, copper 60%, silver 38.5%.Coaxial cable for high frequency 2 screen layers adopt double-layer shielding structure, and inside and outside screen layer is the gold plated copper silk net, and inner insulating layer, dielectric isolation layer and insulation protective jacket are teflon, and temperature coefficient is in 70ppm/ ℃.
Preamplifier circuit 3 is high-frequency oscillating circuits 31, linear compensation circuit 32, higher-order of oscillation control circuit 33, linearity circuit 34, detecting circuit 35, filtering circuit 36, temperature-compensation circuit 37, amplifying circuit 38 and follower 39.
Described higher-order of oscillation control circuit 33 be at operational amplifier 331 in-phase input end strings by two resistance, i.e. resistance R 1 332 and resistance R 2 332 are regulated the ratio-voltage of resistance R 1, R2, control oscillation circuit starting condition for oscillation.
Described linear compensation circuit 32 be after two capacitor C 5 323 of collector series connection, C7 324 at a triode N1 311 again and connect a resistance R 5 321, capacitor C 2 322, adjust the size of three capacitor C 2, C5, C7, the influence of compensation probe 1 interior loop difference variation can be made accurately compensation to eddy current probe 1 temperature variation.Triode N1 311, probe P1 312 and linear compensation circuit 32 can produce 1M Hz left and right sides oscillation frequency, by adjusting capacitor C 2 322, C5 323, C7 324 change oscillation frequency, by regulating the enlargement factor of resistance R 3 313 control triode N1 311, regulate the purpose that resistance R 4 314 Control and Feedback ratio of damping reach linearity correction.
Described temperature-compensation circuit 37 is in pi type filter 36 back and connects a diode D2 371 and a resistance R 6 372, utilizes diode D2 371 temperature characterisitics, compensates the difference variation of its front triode N1 311, influences enlargement factor.

Claims (7)

1, a kind of fixed-frequency AM electric vortex displacement sensor of linear automatic compensation, comprise probe, concentric cable and preamplifier circuit, it is characterized in that: probe is connected with concentric cable, palladium-silver coil in the probe produces high-frequency current, adopt temperature-compensation circuit, the temperature of compensation probe and concentric cable is floated error, and the formula rate of described palladium-silver line is a palladium constituent content 75~85%, silver element content 15~25%.
2, the fixed-frequency AM electric vortex displacement sensor of a kind of linear automatic compensation according to claim 1 is characterized in that: coaxial cable structure is inner wire, inner insulating layer, internal shield, dielectric isolation layer, external shielding layer and insulation protective jacket from inner wire to layer structure successively.
3, according to the fixed-frequency AM electric vortex displacement sensor of described a kind of linear automatic compensation of claim 2; it is characterized in that: inner wire is that many manganese, copper, silver alloy wire are made; inside and outside screen layer is the gold plated copper silk net, and inner insulating layer, dielectric isolation layer and insulation protective jacket are teflon.
4, the fixed-frequency AM electric vortex displacement sensor of a kind of linear automatic compensation according to claim 1, it is characterized in that: described preamplifier circuit, it is to be made of high-frequency oscillating circuits, linear compensation circuit, higher-order of oscillation control circuit, linearity circuit, detecting circuit, filtering circuit, temperature-compensation circuit, amplifying circuit and follower.
5, the fixed-frequency AM electric vortex displacement sensor of a kind of linear automatic compensation according to claim 4, it is characterized in that: described higher-order of oscillation control circuit, it is at two resistance of operational amplifier in-phase input end serial connection, regulate the resistance ratio-voltage, the control oscillation circuit starting condition for oscillation.
6, the fixed-frequency AM electric vortex displacement sensor of a kind of linear automatic compensation according to claim 4, it is characterized in that: described linear compensation circuit, its be behind two electric capacity of collector series connection of a triode again and connect a resistance, electric capacity, adjust three capacitance size, the influence of compensation probe interior loop difference variation.
7, the fixed-frequency AM electric vortex displacement sensor of a kind of linear automatic compensation according to claim 4, it is characterized in that: described temperature-compensation circuit, it is in the pi type filter back and connects a diode and a resistance, utilize the diode temperature characteristic, compensate the difference variation of its front triode, influence enlargement factor.
CNB2006101487015A 2006-12-30 2006-12-30 Fixed-frequency AM electric vortex displacement sensor of linear automatic compensation Expired - Fee Related CN100442005C (en)

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CN101561243B (en) * 2009-05-25 2011-01-26 济南铁路天龙高新技术开发有限公司 Frequency-modulation variable area eddy current displacement sensor
CN102255610A (en) * 2010-05-20 2011-11-23 鸿富锦精密工业(深圳)有限公司 Signal filtering circuit with compensating property
CN103389116A (en) * 2012-05-09 2013-11-13 姚泳 Automatic temperature compensation eddy current sensor
CN103471641B (en) * 2013-09-03 2015-12-23 中国科学技术大学 A kind of temperature drift auto-correction method of current vortex sensor
FR3031588B1 (en) * 2015-01-13 2018-11-16 Hutchinson INDUCTIVE DISPLACEMENT SENSORS
CN106441378B (en) * 2016-10-19 2019-03-05 珠海格力电器股份有限公司 Current vortex sensor and its material gear adjust resistance determining method, test method
CN107084659B (en) * 2017-05-31 2018-01-26 北京航空航天大学 A kind of high temperature follows the differential variable frequency AM electric vortex displacement sensor of grading compensation certainly
CN108917571B (en) * 2018-05-07 2024-06-07 江苏利核仪控技术有限公司 Method for exchanging probe and preamplifier of eddy current sensor
CN109916285A (en) * 2018-07-04 2019-06-21 珠海格力电器股份有限公司 A kind of wide range eddy current displacement sensor
DK3654532T3 (en) * 2018-11-16 2022-06-07 Bently Nevada Llc PROXIMITY REGISTRATION SYSTEM WITH COMPONENT COMPATIBILITY TEST
CN109470130B (en) * 2018-12-29 2024-02-27 湖南开启时代科技股份有限公司 Transmitting-receiving differential type eddy current displacement detection device
CN114577105A (en) * 2022-04-01 2022-06-03 南京航空航天大学 Motor displacement sensor based on eddy current principle

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US4518439A (en) * 1981-12-14 1985-05-21 The Foundation: The Research Institute Of Electric And Magnetic Alloys Alloy with small change of electric resistance over wide temperature range and method of producing the same
US5126664A (en) * 1990-12-18 1992-06-30 Bently Nevada Corporation Wire composition for a small diameter temperature stable proximity coil
JP2005197130A (en) * 2004-01-08 2005-07-21 Yazaki Corp Coaxial cable
CN1773211A (en) * 2005-11-01 2006-05-17 上海瑞视仪表电子有限公司 Ultra-low temperature drift electric vortex vibrating/displacement sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374679A (en) * 1980-05-20 1983-02-22 The Foundation: The Research Institute Of Electric And Magnetic Alloys Electrical resistant article having a small temperature dependence of electric resistance over a wide temperature range and a method of producing the same
US4518439A (en) * 1981-12-14 1985-05-21 The Foundation: The Research Institute Of Electric And Magnetic Alloys Alloy with small change of electric resistance over wide temperature range and method of producing the same
US5126664A (en) * 1990-12-18 1992-06-30 Bently Nevada Corporation Wire composition for a small diameter temperature stable proximity coil
JP2005197130A (en) * 2004-01-08 2005-07-21 Yazaki Corp Coaxial cable
CN1773211A (en) * 2005-11-01 2006-05-17 上海瑞视仪表电子有限公司 Ultra-low temperature drift electric vortex vibrating/displacement sensor

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