CN109141145B - Dexterous detonator based on low-temperature co-fired ceramic - Google Patents
Dexterous detonator based on low-temperature co-fired ceramic Download PDFInfo
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- CN109141145B CN109141145B CN201710498087.3A CN201710498087A CN109141145B CN 109141145 B CN109141145 B CN 109141145B CN 201710498087 A CN201710498087 A CN 201710498087A CN 109141145 B CN109141145 B CN 109141145B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C19/00—Details of fuzes
- F42C19/08—Primers; Detonators
- F42C19/0807—Primers; Detonators characterised by the particular configuration of the transmission channels from the priming energy source to the charge to be ignited, e.g. multiple channels, nozzles, diaphragms or filters
Abstract
The invention discloses a smart detonator based on low-temperature co-fired ceramic. The top of the ceramic base is provided with a cavity for embedding and fixing a pyroMEMS security layer substrate, and a ceramic output medicine loading layer is arranged to be bonded with the ceramic base so as to seal the pyroMEMS security layer substrate; an initiating explosive hole and an ignition explosive hole are arranged below the cavity of the ceramic base; the bottom of the initiating explosive hole and the bottom of the ignition explosive hole are correspondingly provided with ignition elements; the ceramic output medicine-loading layer is provided with an output medicine hole; the embedded pyroMEMS security layer substrate forms a partition structure for preventing the primary explosive hole and the output explosive hole from propagating and exploding. The invention utilizes the advanced mixed integration technology of low-temperature co-fired ceramic and the characteristic of one-time firing, not only improves the assembly density, but also simplifies the process, combines the MEMS technology with the low-temperature co-fired ceramic technology, leads the integration of the initiator to be higher, is more miniaturized, and improves the safety and the reliability of the initiator.
Description
Technical Field
The invention belongs to the field of MEMS initiating explosive devices, and particularly relates to a smart detonator prepared by utilizing a low-temperature co-fired ceramic technology and an MEMS technology.
Background
The invention relates to a smart detonator based on low-temperature co-fired ceramic, which mainly comprises an MEMS security mechanism and a micro-detonation train. MEMS security technology is being proposed with the development of high-tech weapons. Because the traditional safety and safety relief mechanism is difficult to meet the development requirements of a new generation of information and intelligent weapon system, in order to improve the combat efficiency, a novel safety protection mechanism is urgently needed to be developed, and the safety protection mechanism can realize the functions of timing, distance, high-precision initiation, self-destruction and the like of the weapon. The safety protection mechanism in the weapon system is subjected to chip formation and miniaturization by adopting an MEMS advanced manufacturing technology, is placed in the detonator, and is combined with a microelectronic circuit, a microsensor and a micro-detonation sequence, so that the functions can be well realized, the volume of the detonating device can be greatly reduced, and the safety and reliability of weapon equipment can be further improved.
Pyromems (pyromems) is a micro pyrotechnic device based on MEMS technology loaded with solid energetic materials as functional fuel. The pyrotechnic composition has the characteristics of high energy density, stronger power provided by unit volume and the like, so that the pyrotechnic composition is used as a power source to complete the security mechanism with the security function, and compared with driving modes such as electromagnetic driving, electrostatic driving, memory alloy driving and the like, the pyrotechnic composition can realize larger displacement.
The low-temperature co-fired ceramic has excellent electrical, mechanical, thermal and technological properties. The low-temperature co-fired ceramic is an advanced mixed integration technology, is sintered at one time, not only improves the assembly density, but also simplifies the process. The low-temperature co-fired ceramic is used as an advanced MCM substrate, and can enable the whole machine to be more miniaturized, light and multifunctional by the obvious advantages of high integration, high performance, high reliability and the like. And high-conductivity conductor materials such as Ag and Au are adopted, the number of wiring layers is not limited, and the high-frequency loss is small.
Disclosure of Invention
The invention aims to provide a smart initiator applied to detonator ammunition based on low-temperature co-fired ceramic.
The invention is realized by the following technical scheme:
a smart detonator based on low temperature co-fired ceramic for use in detonator ammunition comprising: a ceramic base, the top of which is provided with a cavity for embedding and fixing a pyroMEMS security layer substrate,
a ceramic output medicine loading layer is bonded with the ceramic base, and the pyroMEMS security layer substrate is sealed;
a primary explosive hole and an ignition explosive hole are arranged below the cavity of the ceramic base; the bottom of the initiating explosive hole and the bottom of the ignition explosive hole are correspondingly provided with ignition elements;
the ceramic output medicine-loading layer is provided with an output medicine hole; the embedded pyroMEMS security layer substrate forms a partition structure for preventing the primary explosive hole and the output explosive hole from propagating and exploding.
Furthermore, a pyroMEMS security layer substrate is adopted, and two same grooves penetrating through the pyroMEMS security layer substrate, a solid cantilever beam, a security slide block and a gas generating agent hole are arranged on the pyroMEMS security layer substrate; the notch is used for internally arranging an elastic sheet, and the elastic sheet can limit the security slide block in a safe and safety-relief state; the security slide block is connected with the pyroMEMS security layer substrate into a whole through the solid cantilever beam, and an explosion transfer channel used as a flyer acceleration chamber is arranged on the security slide block; two same grooves are arranged on two sides of the security slide block, and the explosion propagation channel is a circular through hole.
Further, the flying plate is arranged between the explosion transfer channel and the initiating explosive hole. The flyer is made of titanium or stainless steel and has a diameter of 30-50 μm.
Furthermore, a pyroMEMS security layer substrate is adopted, and two same grooves penetrating through the pyroMEMS security layer substrate, a solid cantilever beam, a security slide block and a gas generating agent hole are arranged on the pyroMEMS security layer substrate; the notch is used for internally arranging an elastic sheet, and the elastic sheet can limit the security slide block in a safe and safety-relief state; the security slide block is connected with the pyroMEMS security layer substrate into a whole through the solid cantilever beam, and the security slide block is provided with an explosion-propagating explosive hole for filling an explosion-propagating explosive column; two identical grooves are arranged on two sides of the security slide block, and the booster explosive hole is a slotted hole.
The firing element in the flexible detonator is a planar resistance transducer element and a bonding pad which are connected through a conductor.
Furthermore, the planar resistance transducer element is printed by ruthenium dioxide materials in a parallel printing mode and is S-shaped, and the conductor and the bonding pad are printed by Pb/Ag materials through micropore grouting and precise conductor slurry.
Further, the pyroMEMS security layer substrate is processed by adopting a silicon material and is manufactured by utilizing an ICP dry etching method.
Furthermore, the elastic sheet material is made of stainless steel or manganese steel, the elastic sheet is V-shaped, the included angle is 30-50 degrees, the length of the elastic sheet is 8-10 mm, the width of the elastic sheet is 0.4-0.8 mm, the thickness of the elastic sheet is 0.3-0.5 mm, and the thickness of the elastic sheet is not more than the thickness of the security layer substrate.
Furthermore, the ceramic output charge substrate is manufactured by a low-temperature co-firing ceramic technology, output medicine holes are formed in the green ceramic tapes by laser drilling, and finally the green ceramic tapes are laminated together and sintered together in a sintering furnace at the temperature lower than 1000 ℃ to form the ceramic output medicine layer substrate.
Compared with the prior art, the invention has the advantages that:
1. the ceramic base and the output powder layer substrate are processed by using a low-temperature co-fired ceramic technology, and subsequent packaging is carried out, so that the smart detonator has higher integration degree, is more miniaturized, and is beneficial to batch production.
2. The safety protection device has the advantages that the pyrotechnic composition is used as a power source for driving the safety protection slide block, the safety protection can be removed without depending on inertia force, the practicability of the detonator is improved, and the driving displacement of the pyrotechnic composition is larger.
3. The security function and the explosion propagation sequence are combined by adopting the MEMS technology, and the design requirement of initiating explosive device integration is met.
Drawings
FIG. 1 is a perspective view of the smart initiator based on low temperature co-fired ceramic of the present invention after integration.
FIG. 2 is a layered structure diagram of a flying plate detonation train of the smart detonator based on low-temperature co-fired ceramic.
Fig. 3 is a perspective view of a PyroMEMS security layer in a flying chip explosion sequence of the smart initiator based on low-temperature co-fired ceramic according to the present invention.
FIG. 4 is a schematic view of a ceramic base in a flying chip detonation train of the smart detonator based on low temperature co-fired ceramic of the present invention.
FIG. 5 is a schematic diagram of a planar resistive transducer element in the smart low-temperature co-fired ceramic-based initiator of the present invention.
FIG. 6 is a schematic plan view of a ceramic output charge layer substrate in the low temperature co-fired ceramic based smart initiator of the present invention.
FIG. 7 is a layered structure diagram of the detonation train of the smart detonator based on low temperature co-fired ceramic of the present invention.
Fig. 8 is a perspective view of a PyroMEMS security layer in the detonation train of the smart detonator based on low-temperature co-fired ceramic of the present invention.
FIG. 9 is a schematic view of a ceramic base in the detonation train of the low temperature co-fired ceramic based smart initiator charge of the present invention.
FIG. 10 is a sectional view along A-A of the flying plate detonation train of the low temperature co-fired ceramic based smart initiator of the present invention.
FIG. 11 is a cross-sectional view along A-A of the detonation train of the smart detonator of the present invention based on low temperature co-fired ceramic.
The structure comprises a 1-ceramic base, a 2-PyroMEMS security layer substrate, a 3-ceramic output powder layer substrate, a 4-initiating powder hole, a 5-igniting powder hole, a 6-igniting powder column, a 7-initiating powder column, an 8-bonding pad, a 9-flying piece, a 10-gas generating powder column, an 11-output powder hole, a 12-output powder column, a 13-plane resistance transducer, a 14-cavity, a 15-elastic piece, a 16-gas generating powder hole, a 17-solid cantilever beam, an 18-groove, a 19-accelerating chamber, a 20-security slide block, a 21-booster powder column, a 22-booster powder column, a 23-booster powder hole, a 24-conductor and a 25-notch.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but the scope of the present invention is not limited to the following examples.
Lead azide Pb (N) is adopted as the initiating explosive column 73)2Silver azide AgN3And one or two of stefanic acid lead LTNR; the ignition charge column 6 is silicon red lead (Si/Pb)3O4) Or Al/CuO, in which lead silicide (Si/Pb) is present3O4) The mass ratio is 1: 5-1: 12; the gas generating grain 10 is potassium picrate/potassium perchlorate (C)6H2(NO2)3OK/KClO4) Also known as K1K medicine, the mass ratio is 3:1-1: 3; the output cartridge 12 is made of hexanitrostilbene HNS-IV. Booster charge 21 is hexanitrostilbene HNS-IV.
Example 1
A smart detonator based on a low-temperature co-fired ceramic flyer detonation train.
With reference to fig. 1, 2 and 6, the smart initiator based on a low-temperature co-fired ceramic flyer detonation train of the invention structurally comprises: the device comprises a ceramic base 1, a pyroMEMS security layer substrate 2, a ceramic output powder layer substrate 3, an initiating explosive hole 4, an igniting powder hole 5, an igniting powder column 6, an initiating explosive column 7, a bonding pad 8, a flying sheet 9, a gas generating powder column 10, an output powder hole 11, an output powder column 12 and a cavity 14; referring to fig. 3, the PyroMEMS security layer substrate 2 includes a gas generating hole 16, a solid cantilever 17, a groove 18, an acceleration bore 19, a security slider 20, and an engraved groove 25, wherein the engraved groove 25 is used for embedding an elastic sheet 15. Referring to fig. 4 and 5, the ceramic base 1 includes a planar resistive transducer element 13 and a conductor 24, the planar resistive transducer element 13 is located right below the primary explosive hole 4 and the ignition explosive hole 5, and the primary explosive hole 4 and the ignition explosive hole 5 are on the same axis.
The ceramic base 1 is formed by laminating raw ceramic tapes and co-sintering the raw ceramic tapes in a sintering furnace at the temperature lower than 1000 ℃, the total height is 2.5mm, the height of the cavity 14 is 0.5mm, the heights of the primary explosive hole 4 and the ignition explosive hole 5 are both 1mm, the diameter of the primary explosive hole 4 is 1mm-2mm, and the diameter of the ignition explosive hole 5 is 1mm-3 mm;
the diameter of the gas generating medicine hole 16 is 3mm-5mm, the height is the same as the thickness of the pyroMEMS security layer substrate 2, and the gas generating medicine column is potassium picrate/potassium perchlorate (C)6H2(NO2)3OK/KClO4)；
The length of the solid cantilever beam 17 is 500mm-600mm, and the width is 300mm-500 mm;
the diameter of the accelerating chamber 19 is 1mm-2mm, and the height is equal to the thickness of the pyroMEMS security layer substrate 2;
the length of the groove 18 is 1mm-2mm, the width is 0.5mm-1mm, and the height is the same as the thickness of the pyroMEMS security layer substrate 2;
the elastic sheet 15 is made of stainless steel or manganese steel, the shape of the elastic sheet is V-shaped, the included angle is 30-50 degrees, the length of the elastic sheet 15 is 8-10 mm, the width is 0.4-0.8 mm, and the thickness is 0.3-0.5 mm, so that the thickness of the elastic sheet is not more than the thickness of the substrate of the security layer;
the pyroMEMS security layer substrate 2 is made of silicon materials, an ICP dry etching method is used for manufacturing the substrate, the size is 14mm multiplied by 0.5mm, and the pyroMEMS security layer substrate 2 is arranged in a cavity 14 on the ceramic base 1.
The planar resistance transducer element 13 is printed by ruthenium dioxide material in a parallel printing mode and is S-shaped;
the conductor 24 and the bonding pad 8 are made of Pb/Ag materials through micropore grouting and printing of precise conductor slurry;
the flyer 9 is made of titanium or stainless steel and has a diameter of 30-50 μm.
With reference to fig. 3 and 10, the smart initiator based on the low-temperature co-fired ceramic flying piece detonation sequence of the invention functions as follows:
the first step is as follows: the initial state of the smart detonator is a safe state, namely the primary explosive column 7 is separated from the output explosive column 12 right above through the security slide block 20 in the pyroMEMS security layer substrate 2, so that the failure of the smart detonator caused by accidental firing of the primary explosive column 7 is prevented, and the safety of the smart detonator is ensured.
The second step is that: when the flexible detonator needs to act for output, the voltage required for relieving the safety is supplied to the detonator from the outside, and the firing sequence starts to act. An external voltage acts on the planar resistance transducer 13 right below the ignition charge column 6, the planar resistance transducer 13 excites the ignition charge column 6 in the ceramic base, and the ignition charge column 6 is ignited to excite the gas generation charge column 10 in the pyroMEMS security layer substrate 2. The gas generating grain 10 generates local high-pressure gas after being ignited, and when the pressure of the generated gas exceeds the internal stress of the solid double cantilever beam 17, the solid cantilever beam 17 can generate elastic deformation and plastic deformation until brittle fracture. After the solid cantilever beam 17 is broken, the security slide block 20 is separated from the substrate to become a free slide block, and the gas continuously pushes the security slide block to move to the top end of the notch 25. At this time, the elastic piece 15 is clamped into the groove 18 to fix the security slide block 20, so that the security mode is realized, and the initiating explosive column 7, the flying piece 9 and the output explosive column 12 are aligned.
The third step: after the detonation transfer sequence is aligned, the plane resistance energy conversion element 13 right below the initiating explosive column 7 excites the initiating explosive column 7 under the action of external voltage, the initiating explosive column 7 explodes to shear the flying sheet 9, the flying sheet 9 accelerates in the acceleration chamber 19, and finally the detonation output explosive column 12 is impacted, so that the flexible detonator completes the output action.
Example 2
A smart detonator based on a low-temperature co-fired ceramic explosive booster sequence.
With reference to fig. 1, 6 and 7, the invention relates to a smart initiator based on a low-temperature co-fired ceramic explosive detonating sequence, which structurally comprises: the device comprises a ceramic base 1, a pyroMEMS security layer substrate 2, a ceramic output explosive layer substrate 3, an initiating explosive hole 4, an igniting explosive hole 5, an igniting explosive column 6, an initiating explosive column 7, a bonding pad 8, a booster explosive column 21, a booster explosive column 22, a gas generating explosive column 10, an output explosive hole 11, an output explosive column 12 and a cavity 14; referring to fig. 8, the PyroMEMS security layer substrate 2 includes a gas generating hole 16, a solid cantilever 17, a groove 18, a booster charge hole 23, a security slider 20, and an engraved groove 25, where the engraved groove 25 is used for embedding an elastic sheet 15. Referring to fig. 4 and 9, the ceramic base 1 includes a planar resistive transducer element 13 and a conductor 24, the planar resistive transducer element 13 is located right below the primary explosive hole 4 and the ignition explosive hole 5, and the primary explosive hole 4 and the ignition explosive hole 5 are not on the same axis.
The ceramic base 1 is formed by laminating raw ceramic tapes and co-sintering the raw ceramic tapes in a sintering furnace at the temperature lower than 1000 ℃, the total height is 2.5mm, the height of the cavity 14 is 0.5mm, the heights of the primary explosive hole 4 and the ignition explosive hole 5 are both 1mm, the diameter of the primary explosive hole 4 is 1mm-2mm, and the diameter of the ignition explosive hole 5 is 1mm-3 mm;
the diameter of the gas generating medicine hole 16 is 3mm-5mm, the height is the same as the thickness of the pyroMEMS security layer substrate 2, and the gas generating medicine column is potassium picrate/potassium perchlorate (C)6H2(NO2)3OK/KClO4)；
The length of the solid cantilever beam 17 is 500mm-600mm, and the width is 300mm-500 mm;
the length of the booster charge hole 23 is 2.5mm, the width is 1mm, and the height is the same as the thickness of the pyroMEMS security layer substrate 2;
the length of the groove 18 is 1mm-2mm, the width is 0.5mm-1mm, and the height is the same as the thickness of the pyroMEMS security layer substrate 2;
the elastic sheet 15 is made of stainless steel or manganese steel, the shape of the elastic sheet is V-shaped, the included angle is 30-50 degrees, the length of the elastic sheet 15 is 8-10 mm, the width is 0.4-0.8 mm, and the thickness is 0.3-0.5 mm, so that the thickness of the elastic sheet is not more than the thickness of the substrate of the security layer;
the pyroMEMS security layer substrate 2 is processed by adopting a silicon material, an ICP dry etching method is utilized to manufacture the substrate, the size is 14mm multiplied by 0.5mm, and the pyroMEMS security layer substrate 2 is arranged in the cavity 14;
the planar resistance transducer element 13 is printed by ruthenium dioxide material in a parallel printing mode and is S-shaped;
the conductor 24 and the bonding pad 8 are made of Pb/Ag materials through micropore grouting and printing of precise conductor slurry;
with reference to fig. 8 and 11, the smart initiator based on the low-temperature co-fired ceramic explosive detonating sequence of the invention functions as follows:
the first step is as follows: the initial state of the smart initiator is a safe state, namely the initiation explosive column 7 and the output explosive column 12 are separated by the security slide block 20 in the pyroMEMS security layer substrate 2, so that the failure of the smart initiator caused by accidental ignition of the initiation explosive column 7 is prevented, and the safety of the smart initiator is ensured.
The second step is that: when the flexible detonator needs to act for output, the voltage required for relieving the safety is supplied to the detonator from the outside, and the firing sequence starts to act. An external voltage acts on the planar resistance transducer 13 right below the ignition charge column 6, the planar resistance transducer 13 excites the ignition charge column 6 in the ceramic base, and the ignition charge column 6 is ignited to excite the gas generation charge column 10 in the pyroMEMS security layer substrate 2. The gas generating grain 10 generates local high-pressure gas after being ignited, and when the pressure of the generated gas exceeds the internal stress of the solid double cantilever beam 17, the solid cantilever beam 17 can generate elastic deformation and plastic deformation until brittle fracture. After the solid cantilever beam 17 is broken, the security slide block 20 is separated from the substrate to become a free slide block, and the gas continuously pushes the security slide block to move to the top end of the notch 25. At this time, the elastic piece 15 is clamped into the groove 18 to fix the security slide block 20, so that the security mode is realized, and the explosion propagation sequence is aligned.
The third step: after the detonation transfer sequence is aligned, the plane resistance energy conversion element 13 below the primary explosive column 7 excites the primary explosive column 7 under the action of external voltage, the primary explosive column 7 excites the primary explosive column 21 hexanitrostilbene HNS-IV in the detonation transfer explosive hole 23 of the security slide block 20 after detonation, the primary explosive column 21 continues to be conducted to the other primary explosive column 22 in the ceramic output explosive layer substrate 3 after detonation, and finally the output explosive column 12 is detonated, so that the flexible detonator completes the output action.
Claims (9)
1. A dexterous initiator based on low temperature co-fired ceramic, comprising:
a ceramic base (1), the top of which is provided with a cavity (14) for embedding and fixing a pyroMEMS security layer substrate (2),
a ceramic output medicine loading layer (3) is bonded with the ceramic base (1) to seal the pyroMEMS security layer substrate (2);
a primary explosive hole (4) and an ignition explosive hole (5) are formed below the cavity of the ceramic base (1); the bottom of the primary explosive hole (4) and the bottom of the ignition explosive hole (5) are correspondingly provided with ignition elements;
the ceramic output medicine-loading layer (3) is provided with an output medicine hole (11); the pyroMEMS security layer substrate (2) forms a partition structure for preventing the primary explosive hole (4) and the output explosive hole (11) from propagating and exploding;
the pyroMEMS security layer substrate (2) is provided with two same notches (25) penetrating through the pyroMEMS security layer substrate (2), a solid cantilever beam (17), a security slide block (20) and a gas generating medicine hole (16); the notch groove (25) is used for internally arranging the elastic sheet (15), and the elastic sheet (15) can limit the safety slide block (20) in a safe and safety-relief state; the security slide block (20) is connected with the pyroMEMS security layer substrate (2) into a whole through the solid cantilever beam (17), and an explosion transfer channel (19) used as an accelerating chamber of the flyer (9) is arranged on the security slide block (20); two identical grooves (18) are arranged on two sides of the security slide block (20), and the explosion propagation channel (19) is a circular through hole.
2. The smart low-temperature co-fired ceramic based initiator according to claim 1, wherein the flyer (9) is disposed between the booster channel (19) and the initiator hole (4).
3. The low temperature co-fired ceramic based smart initiator of claim 2, wherein: the flying piece (9) is made of titanium or stainless steel and has a diameter of 30-50 μm.
4. The smart low-temperature co-fired ceramic based initiator according to claim 1, wherein the firing elements are planar resistive transducers (13) and pads (8) connected by conductors (24).
5. The smart detonator based on low-temperature co-fired ceramic as claimed in claim 4, wherein the planar resistive transducer (13) is printed by ruthenium dioxide material in parallel printing mode and is S-shaped, and the conductor (24) and the pad (8) are printed by Pb/Ag material through micropore grouting and precise conductor paste.
6. The smart low-temperature co-fired ceramic-based initiator according to claim 1, wherein the ceramic output charge layer (3) is made by low-temperature co-fired ceramic technology, the ceramic output charge layer (3) is made by laser drilling output charge holes (11) on green ceramic tapes, and finally the green ceramic tapes are laminated together and co-sintered in a sintering furnace below 1000 ℃.
7. A dexterous detonator based on low-temperature co-fired ceramic is characterized in that,
a ceramic base (1), the top of which is provided with a cavity (14) for embedding and fixing a pyroMEMS security layer substrate (2),
a ceramic output medicine loading layer (3) is bonded with the ceramic base (1) to seal the pyroMEMS security layer substrate (2);
a primary explosive hole (4) and an ignition explosive hole (5) are formed below the cavity of the ceramic base (1); the bottom of the primary explosive hole (4) and the bottom of the ignition explosive hole (5) are correspondingly provided with ignition elements;
the ceramic output medicine-loading layer (3) is provided with an output medicine hole (11); the pyroMEMS security layer substrate (2) forms a partition structure for preventing the primary explosive hole (4) and the output explosive hole (11) from propagating and exploding;
the pyroMEMS security layer substrate (2) is provided with two same notches (25) penetrating through the pyroMEMS security layer substrate (2), a solid cantilever beam (17), a security slide block (20) and a gas generating medicine hole (16); the notch groove (25) is used for internally arranging the elastic sheet (15), and the elastic sheet (15) can limit the safety slide block (20) in a safe and safety-relief state; the security slide block (20) is connected with the pyroMEMS security layer substrate (2) into a whole through the solid cantilever beam (17), and an explosion-propagating medicine hole (23) filled with an explosion-propagating medicine column (21) is formed in the security slide block (20); two identical grooves (18) are arranged on two sides of the security slide block (20), and the booster explosive hole (23) is a slotted hole.
8. The smart initiator based on low-temperature co-fired ceramic according to claim 1 or 7, characterized in that the pyroMEMS security layer substrate (2) is made of silicon material by ICP dry etching method.
9. The smart initiator based on low-temperature co-fired ceramic according to claim 1 or 7, characterized in that the elastic sheet (15) is made of stainless steel or manganese steel, the shape of the elastic sheet is V-shaped, the included angle is 30-50 degrees, the length of the elastic sheet (15) is 8-10 mm, the width is 0.4-0.8 mm, the thickness is 0.3-0.5 mm, and the thickness is ensured not to exceed the thickness of the safety protection layer substrate.
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