CN109141145A - Dexterous initiator based on low-temperature co-fired ceramics - Google Patents
Dexterous initiator based on low-temperature co-fired ceramics Download PDFInfo
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- CN109141145A CN109141145A CN201710498087.3A CN201710498087A CN109141145A CN 109141145 A CN109141145 A CN 109141145A CN 201710498087 A CN201710498087 A CN 201710498087A CN 109141145 A CN109141145 A CN 109141145A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C19/00—Details of fuzes
- F42C19/08—Primers; Detonators
- F42C19/0807—Primers; Detonators characterised by the particular configuration of the transmission channels from the priming energy source to the charge to be ignited, e.g. multiple channels, nozzles, diaphragms or filters
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Abstract
The invention discloses a kind of dexterous initiator based on low-temperature co-fired ceramics.One ceramic base, top are equipped with cavity for embedding and fixing PyroMEMS security laminar substrate, are additionally provided with a ceramics output powder charge layer and are bonded with ceramic base, PyroMEMS security laminar substrate is sealed；The cavity of ceramic base has priming hole and ignition charge hole；The bottom in priming hole and ignition charge hole is correspondingly arranged on ignition element；There is defeated medicine outlet hole on ceramics output powder charge layer；Embedded PyroMEMS security laminar substrate, which is formed, prevents priming hole and defeated medicine outlet hole from carrying out the partition-type structures of propagation of explosion.The present invention utilizes the advanced hybrid integrated technology of low-temperature co-fired ceramics, the characteristics of once-firing, both improve packing density, simplify technique again, MEMS technology is combined with LTCC Technology, keeps initiator integrated higher, it more minimizes, improves initiator safety, reliability.
Description
Technical field
The invention belongs to MEMS priming system fields, and in particular to a kind of to utilize LTCC Technology and MEMS technology system
Standby dexterous initiator.
Background technique
The present invention is based on the dexterous initiators of low-temperature co-fired ceramics to be mainly made of MEMS security mechanism and micro- Explosive sequence.
MEMS security technology is the development with advanced technology weapon and proposes.Since traditional fuze safety and arming device mechanism is difficult to completely
The demand for development of sufficient generation information, intelligent Weapons, it is a kind of novel there is an urgent need to develop to improve fighting efficiency
Security mechanism, this security mechanism will can be realized the various functions such as timing, spacing, high-precision detonation and the self-destruction of weapon.It adopts
With MEMS advanced manufacturing technology by security mechanism chip and miniaturization in weapon system, be placed in initiator, and with micro- electricity
Sub-line road, microsensor and micro- Explosive sequence combine, it will be able to realize above-mentioned function well, while can not only make to detonate
The volume of device greatly reduces, and the security reliability of weaponry can be made to further increase.
PyroMEMS (Pyrotechnical Microelectro Mechanical System) is a kind of based on MEMS
Technology, miniature Pyrotechnic devices of the loading solid energetic material as function fuel.Firework medicament is due to energy density
Height, unit volume provide power it is stronger the features such as, therefore using firework medicament as power source come complete security act on security
Biggish displacement may be implemented compared to the driving methods such as electromagnetic drive or electrostatic drive, memorial alloy driving in mechanism.
Low-temperature co-fired ceramics has excellent electricity, machinery, calorifics and operational characteristic.Low-temperature co-fired ceramics is advanced mixed
Integrated technology is closed, once-firing not only improves packing density, but also simplifies technique.Low-temperature co-fired ceramics is as a kind of advanced MCM base
Plate can be such that complete machine more minimizes, is lightweight, multi-functional with the apparent advantage such as its high integration, high-performance, high reliability
Change.Using the high conductivity conductor material such as Ag, Au, the wiring number of plies is unrestricted, and high-frequency loss is small.
Summary of the invention
The dexterous detonation being applied in fuse ammunition based on low-temperature co-fired ceramics that the purpose of the present invention is to provide a kind of
Device.
The invention is realized by the following technical scheme:
The dexterous initiator being applied in fuse ammunition based on low-temperature co-fired ceramics a, comprising: ceramic base, top are set
There is cavity for embedding and fixing PyroMEMS security laminar substrate,
It is additionally provided with a ceramics output powder charge layer to be bonded with ceramic base, PyroMEMS security laminar substrate is sealed；
The cavity of the ceramic base has priming hole and ignition charge hole；The bottom in priming hole and ignition charge hole
It is correspondingly arranged on ignition element；
There is defeated medicine outlet hole on ceramics output powder charge layer；The embedded PyroMEMS security laminar substrate formation prevents from detonating
Medicine hole and defeated medicine outlet hole carry out the partition-type structures of propagation of explosion.
Further, it is equipped with using PyroMEMS security laminar substrate and penetrates two identical quarters of PyroMEMS security laminar substrate
Slot, solid-state cantilever beam, security sliding block and gas generant composition in accordance hole；The cutting is used for built-in elastic piece, and elastic piece is in safety and releases guarantor
Security sliding block can be limited under dangerous state；The security sliding block is connected by solid-state cantilever beam and PyroMEMS security laminar substrate
It is integrated, there is one to be used as the propagation of explosion channel that film flying accelerates thorax on security sliding block；There are two identical groove, institutes for security sliding block two sides
The propagation of explosion channel stated is circular through hole.
Further, above-mentioned film flying is arranged between propagation of explosion channel and priming hole.Film flying uses titanium or stainless steel,
30 μm -50 μm of diameter.
Further, it is equipped with using PyroMEMS security laminar substrate and penetrates two identical quarters of PyroMEMS security laminar substrate
Slot, solid-state cantilever beam, security sliding block and gas generant composition in accordance hole；The cutting is used for built-in elastic piece, and elastic piece is in safety and releases guarantor
Security sliding block can be limited under dangerous state；The security sliding block is connected by solid-state cantilever beam and PyroMEMS security laminar substrate
It is integrated, there is the booster explosive hole of a filling booster gains on security sliding block；There are two identical grooves for security sliding block two sides, described
Booster explosive hole be slot.
Ignition element is the planar resistor transducing member connected by conductor and pad in above-mentioned dexterity initiator.
Further, planar resistor transducing member is printed using ruthenic oxide material by parallel mode of printing, shape
For S-shaped, conductor and pad are printed using Pb/Ag material by micropore slip casting, accurate conductor paste.
Further, PyroMEMS security laminar substrate is processed using silicon materials, is made using ICP dry etching method.
Further, elastic piece material is stainless steel or manganese steel, and elastic plate shape is V-arrangement, and angle is 30 degree of -50 degree,
Elastic piece a length of 8mm-10mm, width 0.4mm-0.8mm with a thickness of 0.3mm-0.5mm, and guarantee that its thickness is no more than security layer
The thickness of substrate.
Further, ceramics output powder charge substrate is to be made by LTCC Technology, using sharp on green band
Defeated medicine outlet hole is produced in light punching, finally overlaps together green band, is sintered jointly in the sintering furnace lower than 1000 DEG C
Ceramics output medicine laminar substrate.
Compared with the prior art, the advantages of the present invention are as follows:
1. making spirit using LTCC Technology processing ceramic pedestal and output medicine laminar substrate and subsequent encapsulation
Skilful initiator integration degree is higher, more minimizes, and is conducive to batch production.
2. can be improved not against inertia force arming using firework medicament as the power source of driving security sliding block
The practicability of initiator, and the drive displacement of firework medicament is bigger.
3. being combined security function with Explosive sequence using MEMS technology, realizes the integrated design of priming system and want
It asks.
Detailed description of the invention
Fig. 1 is the perspective view the present invention is based on the dexterous initiator of low-temperature co-fired ceramics after integrated.
Fig. 2 is the dexterous initiator film flying Explosive sequence hierarchical diagram the present invention is based on low-temperature co-fired ceramics.
Fig. 3 is that PyroMEMS security layer is made in the dexterous initiator film flying Explosive sequence the present invention is based on low-temperature co-fired ceramics
With the perspective view of front and back.
Fig. 4 is ceramic base schematic diagram in the dexterous initiator film flying Explosive sequence the present invention is based on low-temperature co-fired ceramics.
Fig. 5 is planar resistor transducing member schematic diagram in the dexterous initiator the present invention is based on low-temperature co-fired ceramics.
Fig. 6 is ceramics output medicine laminar substrate floor map in the dexterous initiator the present invention is based on low-temperature co-fired ceramics.
Fig. 7 is the dexterous initiator explosive Explosive sequence hierarchical diagram the present invention is based on low-temperature co-fired ceramics.
Fig. 8 is that PyroMEMS security layer is made in the dexterous initiator explosive Explosive sequence the present invention is based on low-temperature co-fired ceramics
With the perspective view of front and back.
Fig. 9 is ceramic base schematic diagram in the dexterous initiator explosive Explosive sequence the present invention is based on low-temperature co-fired ceramics.
Figure 10 is that the present invention is based on the dexterous initiator film flying Explosive sequences of low-temperature co-fired ceramics along A-A directional profile figure.
Figure 11 is that the present invention is based on the dexterous initiator explosive Explosive sequences of low-temperature co-fired ceramics along A-A directional profile figure.
Wherein, 1- ceramic base, 2-PyroMEMS security laminar substrate, 3- ceramics export medicine laminar substrate, 4- priming hole, 5-
Ignition charge hole, 6- igniting powder column, 7- primary explosive column, 8- pad, 9- film flying, 10- gas production charge column, the defeated medicine outlet hole of 11-, 12- output
Powder column, 13- planar resistor transducing member, 14- cavity, 15- elastic piece, 16- gas generant composition in accordance hole, 17- solid-state cantilever beam, 18- groove,
19- accelerates thorax, 20- security sliding block, 21- booster gains, 22- booster gains, 23- booster explosive hole, 24- conductor, 25- cutting.
Specific embodiment
It elaborates with reference to the accompanying drawings and detailed description to the present invention, but protection scope of the present invention is not limited to
Following embodiments.
Primary explosive column 7 uses lead azide Pb (N3)2, silver azide AgN3And one of lead styphnate LTNR or
Two kinds；Igniting powder column 6 is silicon red lead (Si/Pb3O4) or Al/CuO, wherein silicon red lead (Si/Pb3O4) quality proportioning be 1:5-
1:12；Gas production charge column 10 is potassium picrate/potassium hyperchlorate (C6H2(NO2)3OK/KClO4), also known as K1K medicine, quality proportioning 3:1-
1:3；It exports powder column 12 and uses hexanitro Di HNS-IV.Booster gains 21 is hexanitro Di HNS-IV.
Embodiment 1
Dexterous initiator based on low-temperature co-fired ceramics film flying Explosive sequence.
In conjunction with Fig. 1, Fig. 2 and Fig. 6, the present invention is based on the dexterous initiator of low-temperature co-fired ceramics film flying Explosive sequence,
Structure include: ceramic base 1, PyroMEMS security laminar substrate 2, ceramics output medicine laminar substrate 3, priming hole 4, ignition charge hole 5,
Igniting powder column 6, primary explosive column 7, pad 8, film flying 9, gas production charge column 10, defeated medicine outlet hole 11, output powder column 12 and cavity 14；Knot
Fig. 3 is closed, the PyroMEMS security laminar substrate 2 includes gas generant composition in accordance hole 16, solid-state cantilever beam 17, groove 18, accelerates thorax 19, security
Sliding block 20 and cutting 25, the cutting 25 are used for built-in elastic piece 15.In conjunction with Fig. 4, Fig. 5, comprising flat on the ceramic base 1
Surface resistance transducing member 13 and conductor 24, under the planar resistor transducing member 13 is located at priming hole 4 and ignition charge hole 5 just
Side, priming hole 4 and ignition charge hole 5 are on the same axis.
Above-mentioned ceramic base 1 is overlapped together using green band, is sintered jointly in the sintering furnace lower than 1000 DEG C,
The height in total height 2.5mm, a height of 0.5mm of hollow cavity 14, priming hole 4 and ignition charge hole 5 is 1mm, and priming hole 4 is straight
Diameter is 1mm-2mm, and 5 diameter of ignition charge hole is 1mm-3mm；
Above-mentioned 16 diameter of gas generant composition in accordance hole is 3mm-5mm, highly with 2 thickness of PyroMEMS security laminar substrate, gas production charge column choosing
With potassium picrate/potassium hyperchlorate (C6H2(NO2)3OK/KClO4)；
Above-mentioned 17 size of solid-state cantilever beam a length of 500mm-600mm, width 300mm-500mm；
Above-mentioned 19 diameter of acceleration thorax is 1mm-2mm, highly with 2 thickness of PyroMEMS security laminar substrate；
Above-mentioned groove 18 a length of 1mm-2mm, width 0.5mm-1mm, highly with 2 thickness of PyroMEMS security laminar substrate；
Above-mentioned 15 material of elastic piece is stainless steel or manganese steel, and elastic plate shape is V-arrangement, and angle is 30 degree of -50 degree, elasticity
Piece 15 a length of 8mm-10mm, width 0.4mm-0.8mm guarantee that its thickness is no more than security laminar substrate with a thickness of 0.3mm-0.5mm
Thickness；
Above-mentioned PyroMEMS security laminar substrate 2 is processed using silicon materials, makes substrate, ruler using ICP dry etching method
Very little is 14mm × 14mm × 0.5mm, in the cavity 14 on 2 built-in ceramic pedestal 1 of PyroMEMS security laminar substrate.
Above-mentioned planar resistor transducing member 13 is printed using ruthenic oxide material by parallel mode of printing, shape S
Shape；
Above-mentioned conductor 24 and pad 8 are printed using Pb/Ag material by micropore slip casting, accurate conductor paste；
The above-mentioned use of film flying 9 titanium or stainless steel, 30 μm -50 μm of diameter.
In conjunction with Fig. 3 and Figure 10, the work of the dexterous initiator of the present invention based on low-temperature co-fired ceramics film flying Explosive sequence
It is as follows with process:
Step 1: dexterous initiator original state is safe condition, i.e. the output powder column 12 of primary explosive column 7 and surface is logical
The security sliding block 20 crossed in PyroMEMS security laminar substrate 2 separates, and prevents from causing dexterous detonation due to 7 accidental ignition of primary explosive column
Device failure, ensure that dexterous initiator safety.
Step 2: when dexterous initiator needs are acted on and being exported, it is extraneous to electricity needed for one arming of initiator at this time
Pressure passes fiery sequence and starts to act on.Applied voltage acts on the planar resistor transducing member 13 immediately below igniting powder column 6, planar resistor
Transducing member 13 excites in PyroMEMS security laminar substrate 2 after exciting the igniting powder column 6 in ceramic base, igniting powder column 6 to be ignited
Gas production charge column 10.Gas production charge column 10 generates partial high pressure gas after being ignited, when the pressure for generating gas is more than Solid Double cantilever
Flexible deformation, plastic deformation will occur for the internal stress of beam 17, solid-state cantilever beam 17 until brittle fracture.Solid-state cantilever beam 17 is disconnected
After splitting, security sliding block 20 is detached from from substrate becomes free slide block, and gas continues to press on security slide block movement to 25 top of cutting.
At this point, elastic piece 15 is caught in groove 18 security sliding block 20 is fixed, realization solution guarantor's mode, to make primary explosive column 7, film flying 9
With output powder column 12 to just.
Step 3: Explosive sequence is to after just, the planar resistor transducing member 13 immediately below primary explosive column 7 is acted in external voltage
Film flying 9 is sheared in lower excitation primary explosive column 7,7 detonation of primary explosive column, and film flying 9 accelerates in accelerating thorax 19, last Impact Initiation output
Powder column 12, dexterous initiator complete output action.
Embodiment 2
Dexterous initiator based on low-temperature co-fired ceramics explosive Explosive sequence.
In conjunction with Fig. 1, Fig. 6 and Fig. 7, the present invention is based on the dexterous initiator of low-temperature co-fired ceramics explosive Explosive sequence,
Structure include: ceramic base 1, PyroMEMS security laminar substrate 2, ceramics output medicine laminar substrate 3, priming hole 4, ignition charge hole 5,
Igniting powder column 6, primary explosive column 7, pad 8, booster gains 21, booster gains 22, gas production charge column 10, defeated medicine outlet hole 11, output medicine
Column 12 and cavity 14；In conjunction with Fig. 8, the PyroMEMS security laminar substrate 2 includes gas generant composition in accordance hole 16, solid-state cantilever beam 17, recessed
Slot 18, booster explosive hole 23, security sliding block 20 and cutting 25, the cutting 25 are used for built-in elastic piece 15.In conjunction with Fig. 4, Fig. 9,
Comprising planar resistor transducing member 13 and conductor 24 on the ceramic base 1, the planar resistor transducing member 13 is located at priming
Immediately below hole 4 and ignition charge hole 5, priming hole 4 and ignition charge hole 5 are not on the same axis.
Above-mentioned ceramic base 1 is overlapped together using green band, is sintered jointly in the sintering furnace lower than 1000 DEG C,
The height in total height 2.5mm, a height of 0.5mm of hollow cavity 14, priming hole 4 and ignition charge hole 5 is 1mm, and priming hole 4 is straight
Diameter is 1mm-2mm, and 5 diameter of ignition charge hole is 1mm-3mm；
Above-mentioned 16 diameter of gas generant composition in accordance hole is 3mm-5mm, highly with 2 thickness of PyroMEMS security laminar substrate, gas production charge column choosing
With potassium picrate/potassium hyperchlorate (C6H2(NO2)3OK/KClO4)；
Above-mentioned 17 size of solid-state cantilever beam a length of 500mm-600mm, width 300mm-500mm；
Above-mentioned 23 length of booster explosive hole is 2.5mm, width 1mm, highly with 2 thickness of PyroMEMS security laminar substrate；
Above-mentioned groove 18 a length of 1mm-2mm, width 0.5mm-1mm, highly with 2 thickness of PyroMEMS security laminar substrate；
Above-mentioned 15 material of elastic piece is stainless steel or manganese steel, and elastic plate shape is V-arrangement, and angle is 30 degree of -50 degree, elasticity
Piece 15 a length of 8mm-10mm, width 0.4mm-0.8mm guarantee that its thickness is no more than security laminar substrate with a thickness of 0.3mm-0.5mm
Thickness；
Above-mentioned PyroMEMS security laminar substrate 2 is processed using silicon materials, makes substrate, ruler using ICP dry etching method
Very little is 14mm × 14mm × 0.5mm, in 2 build-in cavities 14 of PyroMEMS security laminar substrate；
Above-mentioned planar resistor transducing member 13 is printed using ruthenic oxide material by parallel mode of printing, shape S
Shape；
Above-mentioned conductor 24 and pad 8 are printed using Pb/Ag material by micropore slip casting, accurate conductor paste；
In conjunction with Fig. 8 and Figure 11, the work of the dexterous initiator of the present invention based on low-temperature co-fired ceramics explosive Explosive sequence
It is as follows with process:
Step 1: dexterous initiator original state is safe condition, i.e., primary explosive column 7 passes through with output powder column 12
Security sliding block 20 in PyroMEMS security laminar substrate 2 separates, and prevents from causing dexterous initiator due to 7 accidental ignition of primary explosive column
Failure, ensure that dexterous initiator safety.
Step 2: when dexterous initiator needs are acted on and being exported, it is extraneous to electricity needed for one arming of initiator at this time
Pressure passes fiery sequence and starts to act on.Applied voltage acts on the planar resistor transducing member 13 immediately below igniting powder column 6, planar resistor
Transducing member 13 excites in PyroMEMS security laminar substrate 2 after exciting the igniting powder column 6 in ceramic base, igniting powder column 6 to be ignited
Gas production charge column 10.Gas production charge column 10 generates partial high pressure gas after being ignited, when the pressure for generating gas is more than Solid Double cantilever
Flexible deformation, plastic deformation will occur for the internal stress of beam 17, solid-state cantilever beam 17 until brittle fracture.Solid-state cantilever beam 17 is disconnected
After splitting, security sliding block 20 is detached from from substrate becomes free slide block, and gas continues to press on security slide block movement to 25 top of cutting.
At this point, elastic piece 15 is caught in groove 18 security sliding block 20 is fixed, realization solution guarantor's mode, to make Explosive sequence to just.
Step 3: Explosive sequence is to after just, the planar resistor transducing member 13 of 7 lower section of primary explosive column is under external voltage effect
Primary explosive column 7 is excited, the 21 hexanitro Di of booster gains in the booster explosive hole 23 of security sliding block 20 is excited after 7 detonation of primary explosive column
HNS-IV, 21 detonation of booster gains is subsequent to resume another booster gains 22 being directed in ceramics output medicine laminar substrate 3, finally rises
Quick-fried output powder column 12, dexterous initiator complete output action.
Claims (10)
1. a kind of dexterous initiator based on low-temperature co-fired ceramics characterized by comprising
One ceramic base (1), top are equipped with cavity (14) and are used to embedding and fixing PyroMEMS security laminar substrate (2),
It is additionally provided with ceramics output powder charge layer (3) to be bonded with ceramic base (1), PyroMEMS security laminar substrate (2) is sealed；
The cavity of the ceramic base (1) has priming hole (4) and ignition charge hole (5)；Priming hole (4) and ignition charge
The bottom in hole (5) is correspondingly arranged on ignition element；
There are defeated medicine outlet hole (11) in ceramics output powder charge layer (3)；The embedded PyroMEMS security laminar substrate (2)
Formation prevents the partition-type structures of priming hole (4) and defeated medicine outlet hole (11) progress propagation of explosion.
2. the dexterous initiator according to claim 1 based on low-temperature co-fired ceramics, which is characterized in that the PyroMEMS
Security laminar substrate (2) be equipped with penetrate PyroMEMS security laminar substrate (2) two identical cuttings (25), solid-state cantilever beam (17),
Security sliding block (20) and gas generant composition in accordance hole (16)；The cutting (25) is used for built-in elastic piece (15), elastic piece (15) in safety and
Security sliding block (20) can be limited under uninsured state；The security sliding block (20) by solid-state cantilever beam (17) with
PyroMEMS security laminar substrate (2) is linked together, and has one to be used as the propagation of explosion channel that film flying (9) accelerate thorax on security sliding block (20)
(19)；There are two identical groove (18), the propagation of explosion channel (19) is circular through hole for security sliding block (20) two sides.
3. the dexterous initiator according to claim 1 based on low-temperature co-fired ceramics, which is characterized in that the film flying
(9) it is arranged between propagation of explosion channel (19) and priming hole (4).
4. the dexterous initiator according to claim 2 or 3 based on low-temperature co-fired ceramics, it is characterised in that: film flying (9) is adopted
With titanium or stainless steel, 30 μm -50 μm of diameter.
5. the dexterous initiator according to claim 1 based on low-temperature co-fired ceramics, which is characterized in that the PyroMEMS
Security laminar substrate (2) be equipped with penetrate PyroMEMS security laminar substrate (2) two identical cuttings (25), solid-state cantilever beam (17),
Security sliding block (20) and gas generant composition in accordance hole (16)；The cutting (25) is used for built-in elastic piece (15), elastic piece (15) in safety and
Security sliding block (20) can be limited under uninsured state；The security sliding block (20) by solid-state cantilever beam (17) with
PyroMEMS security laminar substrate (2) is linked together, and has the booster explosive hole of a filling booster gains (21) on security sliding block (20)
(23)；There are two identical groove (18), the booster explosive hole (23) is slot for security sliding block (20) two sides.
6. the dexterous initiator according to claim 1 based on low-temperature co-fired ceramics, which is characterized in that the ignition member
Part is the planar resistor transducing first (13) connected by conductor (24) and pad (8).
7. the dexterous initiator according to claim 6 based on low-temperature co-fired ceramics, which is characterized in that the plane electricity
Resistance transducing first (13) is printed using ruthenic oxide material by parallel mode of printing, and shape is S-shaped, conductor (24) and pad
(8) it is printed using Pb/Ag material by micropore slip casting, accurate conductor paste.
8. according to claim 1, the dexterous initiator described in 2 or 5 based on low-temperature co-fired ceramics, which is characterized in that
PyroMEMS security laminar substrate (2) is processed using silicon materials, is made using ICP dry etching method.
9. the dexterous initiator according to claim 2 or 5 based on low-temperature co-fired ceramics, which is characterized in that the bullet
Property piece (15) material be stainless steel or manganese steel, elastic plate shape is V-arrangement, and angle is 30 degree of -50 degree, and elastic piece (15) is a length of
8mm-10mm, width 0.4mm-0.8mm with a thickness of 0.3mm-0.5mm, and guarantee that its thickness is no more than the thickness of security laminar substrate
Degree.
10. the dexterous initiator according to claim 1 based on low-temperature co-fired ceramics, which is characterized in that the ceramics
Output powder charge substrate (3) is to be made by LTCC Technology, produces defeated medicine outlet hole using laser boring on green band
(11), finally green band is overlapped together, sintering forms ceramics output medicine layer base jointly in the sintering furnace lower than 1000 DEG C
Plate (3).
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| CN113218257A (en) * | 2020-01-21 | 2021-08-06 | 北京理工大学重庆创新中心 | Embedded electromagnetic drive planar MEMS safety system and control method thereof |
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| 邹振游: "火工品安保一体化设计及制备方法研究", 《中国优秀硕士学位论文全文数据库 工程科技II辑》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113218257A (en) * | 2020-01-21 | 2021-08-06 | 北京理工大学重庆创新中心 | Embedded electromagnetic drive planar MEMS safety system and control method thereof |
| CN113218257B (en) * | 2020-01-21 | 2022-10-04 | 北京理工大学重庆创新中心 | Embedded electromagnetic drive planar MEMS safety system and control method thereof |
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| Publication number | Publication date |
|---|---|
| CN109141145B (en) | 2021-06-29 |
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