CN109115470A - A kind of light source detection apparatus and light source detection method - Google Patents
A kind of light source detection apparatus and light source detection method Download PDFInfo
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- CN109115470A CN109115470A CN201811146188.5A CN201811146188A CN109115470A CN 109115470 A CN109115470 A CN 109115470A CN 201811146188 A CN201811146188 A CN 201811146188A CN 109115470 A CN109115470 A CN 109115470A
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- light source
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- detection apparatus
- lead screw
- shield device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention provides a kind of light source detection apparatus and detection method.The detection device includes electric cabinet base, middle part light shield device, work area assembly and upper cover light shield device.The electric cabinet base, middle part light shield device and work area assembly are cascading from bottom to top, and the upper cover light shield device is located on the work area assembly；The work area assembly includes X-axis motor lead screw system, intensity of illumination data acquisition board, light source clamping and fixing device, light source clamping fixture, inclinometer slide unit, hand Z axis lead screw device, R axis revolution slide unit and y-axis motor screw systems.The compatible different shape of this detection device, different size of standard sources expand the range of test object；Good leak tightness, interferes without veiling glare when test, and test result is more acurrate；The depth of parallelism between standard sources and daylighting component is adjustable, and test result is more accurate；Automatic operation, testing efficiency is high, motor lead screw system drive, and precision is high；It is highly-safe.
Description
Technical field
The invention belongs to light source detection fields, more particularly, to a kind of light source detection apparatus and light source detection method, mainly
For detecting the consistency of semicon industry standard sources intensity of illumination.
Background technique
The standard sources that the test of optics chip volume production needs, using standard sources, to make is using preceding and use process
Require periodic detection.All it is that light source is fixed on certain altitude based on detecting manually currently on the market, passes through the mobile light of hand
It is acquired according to intensity of illumination parameter of the intensity data collection plate to light source.
But there are following major defects for manual test: 1. due to manual, so testing efficiency is slow, low precision；2. by
In manual, so operating environment not can guarantee as hermetically sealed environment, other light will affect test result；3. light source and intensity of illumination
The distance between data acquisition board is non-adjustable, leads to not the light source product of compatible various specifications.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of light source detection apparatus and light source detection method, concrete scheme
It is as follows:
A kind of light source detection apparatus, the detection device include electric cabinet base, middle part light shield device, work area assembly and
Upper cover light shield device；
The electric cabinet base, middle part light shield device and work area assembly are cascading from bottom to top, the upper cover
Light shield device is located on the work area assembly；
The work area assembly includes that X-axis motor lead screw system, intensity of illumination data acquisition board, light source are fixedly clamped dress
It sets, inclinometer slide unit, hand Z axis lead screw device, R axis turn round slide unit and y-axis motor screw systems.
Preferably, the light source clamping and fixing device turns round slide unit by the R axis and inclinometer slide unit is fixed at
In hand Z axis lead screw device, the light source clamping and fixing device is used for fixed standard light source；The intensity of illumination data acquisition board
It is set to below the standard sources；
The hand Z axis lead screw device being capable of the distance between adjustment criteria light source and intensity of illumination data acquisition board；Institute
It states inclinometer slide unit and R axis revolution slide unit being capable of the depth of parallelism between adjustment criteria light source and intensity of illumination data acquisition board；Institute
The movement of intensity of illumination data acquisition board can be driven by stating X-axis motor lead screw system and y-axis motor screw systems, and to standard sources
Carry out step-by-step movement automatic lighting.
Preferably, the middle part light shield device includes the left hood and right hood mutually fastened.
Preferably, the side of the middle part light shield device is provided with operation panel, and the operation panel includes outer patches
Seat, emergency stop switch and two gear switch.
Preferably, the external socket includes external communication RS232 socket and USB socket.
Preferably, the upper cover light shield device includes preceding hood, rear hood, clamp button of the spring and handle, the bullet
Spring buckle will tense mutually between preceding hood, rear hood and middle part light shield device.
Preferably, black light-absorbing foam is posted in the left hood and right hood upper surface, inside upper cover light shield device
Post black light-absorbing foam.
Preferably, the open edge position of the preceding hood, rear hood and middle part light shield device is provided with sealing
Item.
Preferably, the light source detection apparatus further includes having light source clamping fixture, the light source clamping fixture
It is detachably connected with R axis revolution slide unit.
Preferably, a kind of light source detection method based on above-mentioned light source detection apparatus, the light source detection method are specifically wrapped
It includes,
(1) operator selects the fixed device of suitable light source according to the concrete type of standard sources, and good mark is fixedly mounted
Quasi-optical source；
(2) according to the measurement height of standard sources, standard sources is adjusted to accordingly by the hand Z axis lead screw device
Scale；If the measurement height of the standard sources is unknown, the measurement height to standard sources is needed to demarcate, and it is high to record measurement
The scale of degree；
(3) it is closed upper cover light shield device, it will be mutual between preceding hood, rear hood and middle part light shield device with clamp button of the spring
Mutually tense；
(4) external socket connects PC control computer, and power outlet powers on, and opens two gear switch, sets to detection
It is standby to carry out energization booting；
(5) it is operated in upper computer software, intensity of illumination data acquisition board is in X-axis motor lead screw system and y-axis motor
Daylighting region is captured under the driving of screw systems, determines the illumination range of light source；
(6) daylighting region captures and finishes, and the intensity of illumination data acquisition board returns to measurement origin, and starts by setting
Stride value carries out gradually daylighting, until entire illumination range has been adopted；
(7) entire illumination range daylighting finishes, and is analyzed by upper computer software above-mentioned daylighting data, judgment criteria light
Whether each parameter in source is accurate；
(8) detection finishes, and shuts down, and takes out standard sources, collecting apparatus.
The advantageous effects of the above technical solutions of the present invention are as follows:
(1) light source detection apparatus of the invention is equipped with light source clamping and fixing device and light source clamping fixture, compatible
Different shape, different size of standard sources expand the range of test object.
(2) mutual cooperation for passing through sealing strip, extinction foam and clamp button of the spring, makes light source detection apparatus airtightness of the present invention
Well, interfere when test without veiling glare, test result is more acurrate.
(3) depth of parallelism between light source detection apparatus standard sources of the invention and daylighting component is adjustable, and test result is more
Add precisely.
(4) light source detection apparatus automatic operation in the application, testing efficiency is high, motor lead screw system drive, and precision is high.
(5) when detection device is operating abnormally, staff can realize promptly stopping for detection device by emergency stop switch
Machine improves the safety of the light source detection apparatus.
Detailed description of the invention
Fig. 1 is the perspective view of light source detection apparatus of the present invention；
Fig. 2 is the explosive view of light source detection apparatus of the present invention；
Fig. 3 is the front view of area assembly 23 of working in the embodiment of the present invention one；
Fig. 4 is the front view of area assembly 23 of working in the embodiment of the present invention two；
Fig. 5 is the front view of operation of the present invention panel 26.
Wherein, hood before 01-；Hood after 02-；03- clamp button of the spring；04- handle；Light shield device in the middle part of 05-；06-X
Spindle motor screw systems；07- intensity of illumination data acquisition board；08- light source clamping and fixing device；09- cylindricality standard sources；10-
Inclinometer slide unit；The hand Z axis lead screw device of 11-；12-R axis turns round slide unit；13-Y spindle motor screw systems；The rectangular standard light of 14-
Source；15- light source clamping fixture；16- external communication RS232 socket；17-USB socket；18- emergency stop switch；Two grades of 19- are opened
It closes；The left hood of 21-；22- upper cover light shield device；23- work area assembly；The right hood of 24-；25- electric cabinet base；26- behaviour
Make panel
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
Personnel's every other embodiment obtained, shall fall within the protection scope of the present invention.
Embodiment one
A kind of light source detection apparatus, including electric cabinet base 25, middle part light shield device 05, work area assembly 23 and upper cover hide
Optical assembly 22.
The electric cabinet base 25 includes control circuit, power outlet, thermovent and maintenance door.The control circuit setting
Inside the electric cabinet base 25；The power outlet, thermovent and maintenance door are all set in 25 side of Electric Appliance Cabinet pedestal, institute
State power outlet be connected with circumscripted power line give light source detection apparatus power supply, the thermovent be used for the electric cabinet base
25 heat dissipations, the maintenance door is convenient to overhaul the electric cabinet base 25.25 bottom of electric cabinet base is provided with band
The universal wheel of locking device.
25 top of electric cabinet base is provided with middle part light shield device 05, and the middle part light shield device 05 includes mutually detaining
The left hood 21 and right hood 24 closed.The side of the middle part light shield device 05 is provided with operation panel 26, the operation
Panel 26 includes external socket, emergency stop switch 18 and two gear switch 19.The external control computer of external socket, passes through control
The upper computer software of computer carries out step motion control to the light source detection apparatus and daylighting operates；Two gear switch 19 is used for institute
State the switching on and shutting down of light source detection apparatus.
The emergency stop switch 18 is used for the emergency shutdown of entire detection device, in measurement process, if staff exists
Hear there is abnormal sound inside detection device outside barn door, it, can be with the case where judging detection device there may be operation irregularities
The emergency shutdown that emergency stop switch 18 realizes detection device is pressed, failure criteria light source and detection device are avoided.
The main function of the middle part light shield device 05 are as follows: block electronic component in electric cabinet base 25 issue it is faint
Light provides the environment of a complete shading for work area assembly 23, improves the precision of measurement.
Preferably, the external socket includes external communication RS232 socket 16 and USB socket 17.
The work area assembly 23 is set to 05 top of middle part light shield device, and the work area assembly 23 includes: X-axis
Motor lead screw system 06, intensity of illumination data acquisition board 07, light source clamping and fixing device 08, cylindricality standard sources 09, inclinometer
Slide unit 10, hand Z axis lead screw device 11, R axis revolution slide unit 12 and y-axis motor screw systems 13.The cylindricality standard sources 09
It is placed on light source clamping and fixing device 08, the light source clamping and fixing device 08 turns round slide unit 12 and inclinometer by the R axis
Slide unit 10 is fixed in hand Z axis lead screw device 11, and the intensity of illumination data acquisition board 07 passes through X-axis motor lead screw system
System 06 and y-axis motor screw systems 13 are set to 09 lower section of cylindricality standard sources.Pass through the hand Z axis lead screw device 11
The distance between cylindricality standard sources 09 and intensity of illumination data acquisition board 07 can be adjusted.Pass through inclinometer slide unit 10 and R axis
Slide unit 12 is turned round, the depth of parallelism between cylindricality standard sources 09 and intensity of illumination data acquisition board 07 is adjusted.Intensity of illumination number
Can be driven by X-axis motor lead screw system 06 and y-axis motor screw systems 13 according to collection plate 07, and to cylindricality standard sources 09 into
Row step-by-step movement automatic lighting.
X-axis motor lead screw system 06 and y-axis motor screw systems 13 form an X-Y coordinate in light source detection apparatus
System, and a measurement origin is specified in the X-Y coordinate；Intensity of illumination data acquisition board 07 forms one in X-Y coordinate
A coordinate points.
The upper cover light shield device 22 is located on the work area assembly 23, before the upper cover light shield device 22 includes
Hood 01, rear hood 02, clamp button of the spring 03 and handle 04.The clamp button of the spring 03 is by preceding hood 01, rear hood 02
It is tensed mutually between middle part light shield device 05, guarantees that the upper cover light shield device 22 in closed state, avoids between three
Gap light leakage.
Preferably, central control unit of the control circuit as the light source detection apparatus is distinguished by conducting wire
It is connected to power outlet, X-axis motor lead screw system 06, intensity of illumination data acquisition board 07, the rectangular standard of cylindricality standard sources 09/
Light source 14, inclinometer slide unit 10, R axis turn round slide unit 12, y-axis motor screw systems 13, operation panel 26.
Preferably, energy supply element of the power outlet as the light source detection apparatus, is separately connected by conducting wire
To control circuit, X-axis motor lead screw system 06, intensity of illumination data acquisition board 07,14/ cylindricality standard sources of rectangular standard sources
09, inclinometer slide unit 10, R axis turn round slide unit 12, y-axis motor screw systems 13, operation panel 26.
Preferably, black light-absorbing foam, upper cover light shield device are posted in the left hood 21 and 24 upper surface of right hood
Black light-absorbing foam is similarly posted in 22 inside, guarantees upper cover light shield device 22 in closed state, work area assembly 23 is in
The environment of complete shading.
Preferably, the edge of the preceding hood 01, rear hood 02 and middle part light shield device 05 is provided with close
Strip of paper used for sealing improves the tightness in gap between three, avoids light leakage.
Preferably, the handle 04 is embedded handle, and upper cover light shield device 22 is made to facilitate pick-and-place, installation, and complete appearance,
It is easy to carry and store.
Preferably, scale is provided in the hand Z axis lead screw device 11.Because different types of standard test of light source is high
Degree is different, when measuring certain type standard light source for the first time, adjusts test by hand Z axis lead screw device 11 and obtains this type mark
The test height in quasi-optical source, and the scale value of the height is recorded, when measuring this type standard sources again later, according to record
Scale value directly adjust the standard sources to its reasonable test height, do not need to demarcate its test height again.
Preferably, the light source clamping and fixing device 08 includes two clamp jaws, the distance between described two clamp jaws
It is adjustable, to adapt to the cylindricality standard sources 09 of different-diameter.
Preferably, each cover light shield device collocation extinction cotton and sealing strip, in the case that internal light source is closed when realizing daylighting,
Intensity of illumination < 0.001lux.
Preferably, slide unit 12 is turned round by inclinometer slide unit 10 and R axis, cylindricality standard sources 09 and intensity of illumination is adjusted
The depth of parallelism between data acquisition board 07, the depth of parallelism is up to +/- 0.1mm.
Preferably, the hand Z axis lead screw device 11 is cooperated using screw rod and optical axis device, resolution ratio 1mm；Institute
It states X-axis motor lead screw system 06 and y-axis motor screw systems 13 to cooperate using stepper motor and screw systems, resetting
Precision is up to +/- 0.02mm.
Preferably, the electric cabinet base 25, middle part light shield device 05 and work area assembly 23 pass through screw from bottom to top
It is connected with each other.
Embodiment two
On the basis of the above embodiments, different in order to guarantee the compatible detection different shape of the light source detection apparatus
The test of size criteria light source.
The light source detection apparatus further includes having light source clamping fixture 15.The light source clamping fixture 15 and institute
R axis revolution slide unit 12 is stated to be detachably connected.
When needing to test rectangular standard sources 14, light source clamping fixture 15 is installed on R axis revolution slide unit 12, then
The rectangular standard sources 14 is placed on two clamp jaws of the light source clamping and fixing device 08, described two clampings are made
Two sides that pawl supports the rectangular standard sources 14 opposite respectively, then by the light source clamping fixture 15 from rectangular mark
Rectangular standard sources 14 described in side compression on quasi-optical source 14.
Preferably, the light source clamping fixture 15 includes support rod and compact heap, and the compact heap passes through screw thread knot
Structure is realized on support rod and is moved up and down.
On the basis of the above embodiments, the detection method of the light source detection apparatus is specific as follows.
(1) operator selects the fixed device of suitable light source according to the concrete type of standard sources, and good mark is fixedly mounted
Quasi-optical source；
(2) according to the measurement height of standard sources, standard sources is adjusted to by phase by the hand Z axis lead screw device 11
Answer scale；If the measurement height of the standard sources is unknown, the measurement height to standard sources is needed to demarcate, and record measurement
The scale of height；
(3) it is closed upper cover light shield device 22, with clamp button of the spring 03 by preceding hood 01, rear hood 02 and middle part shading group
It is tensed mutually between part 05；
(4) external socket connects PC control computer, and power outlet powers on, and two gear switch 19 is opened, to detection
Equipment carries out energization booting；
(5) it is operated in upper computer software, intensity of illumination data acquisition board is in X-axis motor lead screw system 06 and Y-axis electricity
Daylighting region is captured under the driving of machine screw systems 13, determines the illumination range of light source；
(6) daylighting region captures and finishes, and the intensity of illumination data acquisition board returns to measurement origin, and starts by setting
Stride value carries out gradually daylighting, until entire illumination range has been adopted；
(7) entire illumination range daylighting finishes, and is analyzed by upper computer software above-mentioned daylighting data, judgment criteria light
Whether each parameter in source is accurate；
(8) detection finishes, and shuts down, and takes out standard sources, collecting apparatus.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of light source detection apparatus, which is characterized in that the detection device includes electric cabinet base (25), middle part light shield device
(05), work area assembly (23) and upper cover light shield device (22)；
The electric cabinet base (25), middle part light shield device (05) and work area assembly (23) are cascading from bottom to top,
The upper cover light shield device (22) is located on the work area assembly (23)；
The work area assembly (23) includes X-axis motor lead screw system (06), intensity of illumination data acquisition board (07), light source folder
Fasten device (08), inclinometer slide unit (10), hand Z axis lead screw device (11), R axis revolution slide unit (12) and y-axis motor silk
Lever system (13).
2. a kind of light source detection apparatus according to claim 1, which is characterized in that the light source clamping and fixing device (08)
It is fixed on hand Z axis lead screw device (11) by R axis revolution slide unit (12) and inclinometer slide unit (10), the light
Source clamping and fixing device (08) is used for fixed standard light source；The intensity of illumination data acquisition board (07) is set to the standard light
Below source；
The hand Z axis lead screw device (11) can between adjustment criteria light source and intensity of illumination data acquisition board (07) away from
From；The inclinometer slide unit (10) and R axis revolution slide unit (12) being capable of adjustment criteria light source and intensity of illumination data acquisition boards
(07) depth of parallelism between；The X-axis motor lead screw system (06) and y-axis motor screw systems (13) can drive intensity of illumination
Data acquisition board (07) is mobile, and carries out step-by-step movement automatic lighting to standard sources.
3. a kind of light source detection apparatus according to claim 1, which is characterized in that the middle part light shield device (05) includes
The left hood (21) and right hood (24) mutually fastened.
4. a kind of light source detection apparatus according to claim 1, which is characterized in that the side of the middle part light shield device (05)
Face is provided with operation panel (26), and the operation panel (26) includes external socket, emergency stop switch (18) and two gear switch
(19)。
5. a kind of light source detection apparatus according to claim 4, which is characterized in that the external socket includes external communication
RS232 socket (16) and USB socket (17).
6. a kind of light source detection apparatus according to claim 3, which is characterized in that the upper cover light shield device (22) includes
Have preceding hood (01), rear hood (02), clamp button of the spring (03) and handle (04), the clamp button of the spring (03) is by preceding hood
(01), it is tensed mutually between rear hood (02) and middle part light shield device (05).
7. a kind of light source detection apparatus according to claim 3, which is characterized in that the left hood (21) and right shading
Black light-absorbing foam is posted in cover (24) upper surface, posts black light-absorbing foam inside upper cover light shield device (22).
8. a kind of light source detection apparatus according to claim 6, which is characterized in that the preceding hood (01), rear shading
The open edge position of cover (02) and middle part light shield device (05) is provided with sealing strip.
9. a kind of light source detection apparatus according to claim 1, which is characterized in that the light source detection apparatus further includes having
Light source clamping fixture (15), the light source clamping fixture (15) are detachably connected with R axis revolution slide unit (12).
10. the light source detection method of light source detection apparatus according to claim 6, which is characterized in that the light source detection side
Method specifically includes,
(1) operator selects the fixed device of suitable light source according to the concrete type of standard sources, and standard light has been fixedly mounted
Source；
(2) according to the measurement height of standard sources, standard sources is adjusted to accordingly by the hand Z axis lead screw device (11)
Scale；If the measurement height of the standard sources is unknown, the measurement height to standard sources is needed to demarcate, and it is high to record measurement
The scale of degree；
(3) upper cover light shield device (22) are closed, are hidden preceding hood (01), rear hood (02) and middle part with clamp button of the spring (03)
Optical assembly tenses mutually between (05)；
(4) external socket connects PC control computer, and power outlet powers on, and opens two gear switch, to detection device into
Row, which is powered, to be switched on；
(5) it is operated in upper computer software, intensity of illumination data acquisition board (07) is in X-axis motor lead screw system (06) and Y-axis
Daylighting region is captured under the driving of motor lead screw system (13), determines the illumination range of light source；
(6) daylighting region captures and finishes, and the intensity of illumination data acquisition board (07) returns to measurement origin, and starts by setting
Stride value carries out gradually daylighting, until entire illumination range has been adopted；
(7) entire illumination range daylighting finishes, and is analyzed by upper computer software above-mentioned daylighting data, judgment criteria light source
Whether each parameter is accurate；
(8) detection finishes, and shuts down, and takes out standard sources, collecting apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811146188.5A CN109115470A (en) | 2018-09-29 | 2018-09-29 | A kind of light source detection apparatus and light source detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811146188.5A CN109115470A (en) | 2018-09-29 | 2018-09-29 | A kind of light source detection apparatus and light source detection method |
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| Publication Number | Publication Date |
|---|---|
| CN109115470A true CN109115470A (en) | 2019-01-01 |
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ID=64857447
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| CN201811146188.5A Pending CN109115470A (en) | 2018-09-29 | 2018-09-29 | A kind of light source detection apparatus and light source detection method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110702382A (en) * | 2019-09-27 | 2020-01-17 | 苏州精濑光电有限公司 | Display panel overhauls mechanism |
| CN110793457A (en) * | 2019-10-31 | 2020-02-14 | 安徽三弟电子科技有限责任公司 | Electronic measuring instrument structure for highlight environment |
-
2018
- 2018-09-29 CN CN201811146188.5A patent/CN109115470A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110702382A (en) * | 2019-09-27 | 2020-01-17 | 苏州精濑光电有限公司 | Display panel overhauls mechanism |
| CN110793457A (en) * | 2019-10-31 | 2020-02-14 | 安徽三弟电子科技有限责任公司 | Electronic measuring instrument structure for highlight environment |
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