CN109103048B - MEMS inertial switch based on three-section type long oblique beam bistable structure - Google Patents
MEMS inertial switch based on three-section type long oblique beam bistable structure Download PDFInfo
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- CN109103048B CN109103048B CN201811065759.2A CN201811065759A CN109103048B CN 109103048 B CN109103048 B CN 109103048B CN 201811065759 A CN201811065759 A CN 201811065759A CN 109103048 B CN109103048 B CN 109103048B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
Abstract
The invention discloses an MEMS inertial switch based on a three-section type long oblique beam bistable structure. The method comprises the following steps: switch shell, bistable mechanism and switch complementary unit. The switch auxiliary mechanism and the bi-stable mechanism are sequentially arranged inside the switch shell in the acceleration direction, the switch auxiliary mechanism comprises a spring body and a first mass block, the bi-stable mechanism comprises a three-section type long oblique beam structure and a second mass block, a switch contact is arranged at the position, opposite to the second mass block, of the switch shell, the first mass block and the second mass block are oppositely arranged, the mass of the first mass block is larger than that of the second mass block, when the MEMS inertial switch is subjected to set acceleration, the first mass block collides with the second mass block under the action of inertia to enable the second mass block to move in the acceleration direction, and the bi-stable mechanism is changed from one stable state to another stable state to press the switch contact to conduct a circuit. The MEMS inertial switch provided by the invention has the advantages of high sensitivity, strong anti-electromagnetic interference capability and strong mechanical vibration resistance capability.
Description
Technical Field
The invention relates to the field of micro-electro-mechanical systems, in particular to an MEMS inertial switch based on a three-section type long oblique beam bistable structure.
Background
Micro-electro-mechanical systems (MEMS) refer to high-tech mechanical electronic devices with dimensions of several millimeters or even smaller, and their internal structures are typically on the order of micrometers or even nanometers, and the dimensions of common MEMS products are typically on the order of millimeters or even hundreds of micrometers. The MEMS mainly comprises three parts, namely a sensor, an actuator (actuator) and a micro energy source. The MEMS acceleration switch is a MEMS device integrating a miniature sensor and an actuator, and can complete the On-Off function of the switch under the excitation of ambient acceleration. At present, a common MEMS inertial sensing and actuating device is mainly an accelerometer, the structure of the MEMS inertial sensing and actuating device is composed of an induction mass block, a supporting beam system and a control feedback circuit, the structure is very complex, and the processing difficulty is high. The control feedback circuit needs to work under the condition of power-on, is easy to generate misoperation under the condition of strong electromagnetic interference, and is not suitable for anti-electromagnetic interference equipment. In addition, there are some micro-acceleration switches having a purely mechanical structure, but these switches do not have a locking function after being closed, and thus have insufficient resistance to external environmental disturbances such as mechanical vibration.
Disclosure of Invention
The invention aims to provide an MEMS inertial switch based on a three-section type long oblique beam bistable structure, which has the advantages of high sensitivity, strong anti-electromagnetic interference capability and strong mechanical vibration resistance capability.
In order to achieve the purpose, the invention provides the following scheme:
a MEMS inertial switch based on a three-section type long oblique beam bistable structure comprises: the switch comprises a switch shell, a bistable mechanism and a switch auxiliary mechanism, wherein the switch auxiliary mechanism and the bistable mechanism are arranged in the switch shell and are sequentially arranged in the acceleration direction;
the switch auxiliary mechanism comprises a spring body and a first mass block, and two ends of the spring body are respectively connected with the first mass block and the inner wall of the switch shell;
the bistable mechanism comprises a three-section long oblique beam structure and a second mass block, the three-section long oblique beam structure comprises a first beam structure and a second beam structure, the first beam structure comprises a first flexible beam, a second flexible beam and a rigid beam, when the bistable mechanism is in a first stable position, the first flexible beam, the second flexible beam and the rigid beam are collinear oblique beams, one end of the first flexible beam is fixedly connected with the inner side wall of the switch shell, the other end of the first flexible beam is fixedly connected with one end of the rigid beam, the other end of the rigid beam is fixedly connected with one end of the second flexible beam, the other end of the second flexible beam is fixedly connected with one side of the second mass block, the first beam structure and the second beam structure are symmetrically arranged relative to the central axis of the second mass block, and the first flexible beam and the second flexible beam are long beams, the long beam is a beam with a flexibility value of more than or equal to 50.
The switch shell is provided with a switch contact at a position opposite to the second mass block;
the first mass block and the second mass block are arranged oppositely, the mass of the first mass block is larger than that of the second mass block, when the MEMS inertial switch is subjected to set acceleration, the first mass block is in contact with the second mass block under the action of inertia to generate an acting force in an acceleration direction on the second mass block, and the second mass block moves in the acceleration direction to press the switch contact.
Optionally, the number of the three-section long oblique beam structure is 4N1Root, 4N1The three-section type long oblique beam structure is arranged in parallel, wherein N is1Is a positive integer.
Optionally, the length of the first flexible beam is smaller than that of the rigid beam, and the length of the first flexible beam is the same as that of the second flexible beam.
Optionally, the number of the spring body is a plurality of, the spring body is in the both sides wall symmetry setting of first quality piece, the spring body is folding spring roof beam, folding spring roof beam's one end with switch housing's lateral wall fixed connection, the other end with the lateral wall fixed connection of first quality piece, folding spring roof beam will first quality piece support is fixed inside the switch housing.
Optionally, the spring body is composed of N2A root of a folded spring beam, wherein N2Is a positive integer.
Optionally, the number of the spring bodies is 4, and the spring bodies are symmetrically arranged on the upper portion and the lower portion of the two opposite side walls of the first mass block.
Optionally, the side wall of the first mass block and the inner side wall of the switch housing are both in a tooth comb type structure, the tooth comb type structure of the first mass block and the tooth comb type structure of the switch housing are matched with each other, and the matching mode is in clearance fit.
Optionally, the switch auxiliary mechanism is formed by processing an SOI silicon wafer through a double-sided etching process, wherein the spring body is formed by processing a device layer on the SOI silicon wafer, and the first mass block is formed by etching the device layer and the bottom layer of the SOI silicon wafer on two sides.
Optionally, the bistable mechanism is formed by processing an SOI silicon wafer by a double-sided etching process, wherein the three-section type long oblique beam structure is formed by processing a device layer of the SOI silicon wafer, and the second mass block is formed by etching the device layer and a bottom layer of the SOI silicon wafer on two sides.
Optionally, the switch housing is formed by processing an SOI silicon wafer by a double-sided etching process.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects: the MEMS inertial switch based on the three-section type long oblique beam bistable structure comprises a switch shell, a bistable mechanism and a switch auxiliary mechanism, wherein the switch auxiliary mechanism and the bistable mechanism are arranged in the switch shell and are sequentially arranged in the acceleration direction; the switch auxiliary mechanism comprises a spring body and a first mass block, the bistable mechanism comprises a three-section type long oblique beam structure and a second mass block, the first mass block and the second mass block are arranged oppositely, and the mass of the first mass block is greater than that of the second mass block; a switch contact is arranged at the position of the switch shell opposite to the second mass block; when the MEMS inertial switch is subjected to certain acceleration, the first mass block is in contact with the second mass block under the action of inertia to generate acting force in the acceleration direction on the second mass block, the second mass block moves along the acceleration direction, the bistable mechanism is changed from one stable state to another stable state, the switch contact is pressed, and the switch is switched on. The MEMS inertial switch provided by the invention is a switch which is completely dependent on a mechanical structure to complete the opening and closing functions, so that the MEMS inertial switch has good electromagnetic interference resistance, can sense and act on small acceleration due to the switch auxiliary mechanism, has the characteristic of high sensitivity, and has two stable states, a self-locking function after an electric shock is pressed down and strong mechanical vibration resistance.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an MEMS inertial switch with a three-stage long oblique beam bistable structure according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an auxiliary switch mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a switch housing according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a bistable mechanism according to an embodiment of the present invention;
FIG. 5 is a bistable diagram of a three-section long oblique beam bistable structure according to an embodiment of the present invention;
FIG. 6 is a force-displacement relationship diagram of a bistable mechanism according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an MEMS inertial switch based on a three-section type long oblique beam bistable structure, which has the advantages of high sensitivity, strong anti-electromagnetic interference capability and strong mechanical vibration resistance capability.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Fig. 1 is a schematic structural diagram of an MEMS inertial switch based on a three-section long oblique beam bistable structure according to an embodiment of the present invention, and as shown in fig. 1, the MEMS inertial switch based on a three-section long oblique beam bistable structure provided by the present invention includes: the switch comprises a switch shell 1, a switch auxiliary mechanism and a bi-stable mechanism, wherein the switch auxiliary mechanism and the bi-stable mechanism are arranged in the switch shell 1 and are sequentially arranged in the acceleration direction;
the switch auxiliary mechanism is of a spring-damping structure, as shown in fig. 2, and comprises a spring body 3 and a first mass block 2, wherein two ends of the spring body 3 are respectively connected with the first mass block 2 and the inner wall of the switch shell 1; the spring body 3 is symmetrically arranged on two side walls of the first mass block 2, the spring body 3 can be a folding spring beam, one end of the folding spring beam is fixedly connected with the side wall of the switch shell 1, the other end of the folding spring beam is fixedly connected with the side wall of the first mass block 2, the folding spring beam supports and fixes the first mass block 2 in the switch shell, and the spring body 3 is formed by N2A root folding spring beam. The stiffness of the folded spring beam is a set value.
The number of the spring bodies 3 can be 4, and the spring bodies are symmetrically arranged at the upper part and the lower part of two opposite side walls of the first mass block 2. The switch auxiliary mechanism can sense the environmental acceleration to assist the switch to complete the closing.
The lateral wall of the first mass block 2 and the inner lateral wall of the switch shell 1 are both in a tooth comb type structure, the tooth comb type structure of the first mass block 2 and the tooth comb type structure of the switch shell 1 are matched, and the matching mode is in clearance fit. Enough air damping can be provided for the motion of the first mass block 2 to achieve the shock absorption effect, meanwhile, the comb-tooth-shaped structure can limit the position of the first mass block 2, and the structure diagram of the switch shell 1 is shown in fig. 3.
The bistable mechanism comprises a three-section long oblique beam structure 4 and a second mass block 6, the three-section long oblique beam structure 4 comprises a first beam structure and a second beam structure, as shown in fig. 4, the first beam structure and the second beam structure are symmetrically arranged about the central axis of the second mass block 6, the first beam structure comprises a first flexible beam, a second flexible beam and a rigid beam, when the bistable mechanism is at a first stable position, the first flexible beam, the second flexible beam and the rigid beam are collinear oblique beams, one end of the first flexible beam is fixedly connected with the inner side wall of the switch shell, the other end of the first flexible beam is fixedly connected with one end of the rigid beam, the other end of the rigid beam is fixedly connected with one end of the second flexible beam, the other end of the second flexible beam is fixedly connected with one side of the second mass block 6, the first beam structure and the second beam structure are symmetrically arranged about the central axis of the second mass block 6, and the first beam structure and the second beam structureThe flexible beam and the second flexible beam are long beams, the long beams are beams with the flexibility value (the length-thin ratio of the rod pieces) larger than or equal to 50, the lengths of the first flexible beam and the second flexible beam are equal, and the length of the first flexible beam is smaller than that of the rigid beam; the number of the three-section type long oblique beam structure 4 is 4N1Root (wherein, N1A positive integer), a plurality of three-section type long oblique beam structures 4 are arranged in parallel. In order to improve the anti-interference capability of the structure in the direction perpendicular to the acceleration sensitive direction, 4N can be adopted1The three-segment long oblique beam structure 4 supports the second mass block 6. The second mass 6 is made of highly doped polysilicon and can be electrically conductive.
The bistable mechanism is used for realizing the closing and locking functions of the switch, a metal electrode is processed on the switch shell 1, a switch contact 5 is arranged at the position opposite to the second mass block 6, when the second mass block 6 collides with the switch contact 5, a switch circuit is conducted, and when the second mass block 6 is acted by threshold acceleration, the second mass block 6 leaves the switch contact 5, and the switch is disconnected.
The mass of the first mass block 2 is larger than that of the second mass block 5, the first mass block 2 and the second mass block 6 are arranged oppositely, the bistable mechanism comprises two stable states, when the MEMS inertial switch is subjected to set acceleration, the first mass block 2 is in contact with the second mass block 6 under the action of inertia to generate an acting force in the acceleration direction on the second mass block 6, the second mass block 6 moves in the acceleration direction, the bistable mechanism is changed from one stable state to the other stable state, the switch contact 5 is pressed to conduct the MEMS inertial switch circuit, after the MEMS inertial switch circuit is subjected to reverse threshold acceleration, the second mass block 6 leaves the switch contact 5, and the switch is disconnected.
The switch auxiliary mechanism consists of a first mass 2 and 4N of comb-tooth type2The spring beam is formed by processing an SOI silicon chip by a double-sided etching process, wherein 4N is2The root folding spring beam is formed by etching and processing an SOI silicon chip device layer, and the first mass block 2 is formed by etching and processing the device layer and the bottom layer of the SOI silicon chip.
The bistable mechanism is composed of a second mass 5 and N1For the three-section long oblique beam structure 4, the bistable mechanism is processed on the SOI silicon chip by adopting a double-sided etching processWherein N is1The three-section type long oblique beam structure 4 is formed by etching and processing an SOI silicon chip device layer, the second mass block 5 is formed by etching and processing an SOI silicon chip device layer and a bottom layer, and the second mass block 5 is a rectangular mass block.
The switch shell 1 is also processed and formed into a structure on the SOI silicon chip device layer and the bottom layer by adopting a double-sided etching process.
The bistable schematic diagram of the bistable mechanism of the present invention is shown in fig. 5, wherein the solid line is the first stable state of the structure, the dotted line is the second stable state of the structure, and F is the driving force applied to the second mass block at the center of the structure, which is the vertical movement displacement of the second mass block. The bistable force-displacement relationship is shown in fig. 6, where the origin in fig. 6 is the first stable position of the structure, point D is the second stable position, and point B is the unstable equilibrium position. Force F at point A1Critical force for the bistable structure to jump from the first stable state to the second (i.e. the applied external force must be greater than F)1) Point C, point F2Is the critical force for the structure to jump from the second stable state to the first stable state. In order to ensure the maximum contact force after the switch is closed, the contact closing position is arranged at the displacement position corresponding to the point C when the mass block moves to the point C.
The working process of the MEMS inertial switch based on the three-section type long oblique beam bistable structure provided by the invention is as follows:
when MEMS inertial switch is subjected to external threshold acceleration aonAfter the action, the inertia force generated by the first mass block 2 and the second mass block 6 overcomes the elastic force of the spring body 3 to drive the bistable mechanism, and the second mass block 6 is pressed down to touch the switch contact 5 on the switch shell 1, so that a circuit is conducted, and the switch finishes the closing action.
After the applied acceleration is removed, the first mass 2 is pulled back by the folded beam of the spring body 3, and the second mass 6 ensures that the switch contacts 5 continue to maintain the closed state due to the negative stiffness provided by the bistable system.
The MEMS inertial switch is subjected to reverse acceleration aoffThe second mass 6 can be disengaged from the switch contact 5 when aoffWhen the switch cutoff threshold is reached, the switch is turned off.
The MEMS inertial switch based on the three-section type long oblique beam bistable structure provided by the invention has the following structure
Has the advantages that:
(1) the MEMS inertial switch based on the three-section long oblique beam bistable structure provided by the invention has the advantages that the on-off function of the switch is completed by a pure mechanical structure, and the auxiliary switch function of other devices such as static electricity, electromagnetism or electric heat and the like is not adopted in the working process of the switch, so that the MEMS inertial switch has the characteristic of strong anti-electromagnetic interference capability;
(2) the MEMS inertial switch based on the three-section type long oblique beam bistable structure has a self-locking function, the switch is locked after being closed by adopting the bistable mechanism, the excitation acceleration is removed after the switch is closed, the switch can still keep the contact closed stably, and the MEMS inertial switch has strong mechanical vibration resistance;
(3) under the action of given reverse acceleration, the switch can complete the unlocking function and can be repeatedly used;
(4) the first mass block is of a structure with comb teeth, and can provide enough air damping for the movement of the first mass block, so that the shock absorption effect is achieved. Simultaneously, the comb-tooth-shaped structure can limit the first-stage mass block.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (9)
1. A MEMS inertial switch based on a three-section type long oblique beam bistable structure is characterized by comprising: the switch comprises a switch shell, a bistable mechanism and a switch auxiliary mechanism, wherein the switch auxiliary mechanism and the bistable mechanism are arranged in the switch shell and are sequentially arranged in the acceleration direction;
the switch auxiliary mechanism comprises a spring body and a first mass block, and two ends of the spring body are respectively connected with the first mass block and the inner wall of the switch shell;
the bistable mechanism comprises a three-section long oblique beam structure and a second mass block, the three-section long oblique beam structure comprises a first beam structure and a second beam structure, the first beam structure comprises a first flexible beam, a second flexible beam and a rigid beam, when the bistable mechanism is in a first stable position, the first flexible beam, the second flexible beam and the rigid beam are collinear oblique beams, one end of the first flexible beam is fixedly connected with the inner side wall of the switch shell, the other end of the first flexible beam is fixedly connected with one end of the rigid beam, the other end of the rigid beam is fixedly connected with one end of the second flexible beam, the other end of the second flexible beam is fixedly connected with one side of the second mass block, the first beam structure and the second beam structure are symmetrically arranged relative to the central axis of the second mass block, and the first flexible beam and the second flexible beam are long beams, the long beam is a beam with a flexibility value of more than or equal to 50;
a metal electrode is processed on the switch shell, and a switch contact is arranged at the position of the switch shell, which is opposite to the second mass block; when the second mass block collides with the switch contact, the switch circuit is conducted; when the second mass block is acted by the threshold acceleration, the second mass block leaves the switch contact, and the switch is disconnected;
the first mass block and the second mass block are arranged oppositely, the mass of the first mass block is larger than that of the second mass block, when the MEMS inertial switch is subjected to set acceleration, the first mass block is in contact with the second mass block under the action of inertia, acting force in the acceleration direction is generated on the second mass block, and the second mass block moves in the acceleration direction to press the switch contact; the MEMS inertial switch circuit is switched on, and when the MEMS inertial switch circuit is subjected to the action of reverse threshold acceleration, the second mass block leaves the switch contact, and the switch is switched off;
the side wall of the first mass block and the inner side wall of the switch shell are both of a tooth comb type structure, the tooth comb type structure of the first mass block and the tooth comb type structure of the switch shell are matched in arrangement, and the matching mode is clearance fit.
2. The MEMS inertial switch based on the three-section long oblique beam bistable structure, according to claim 1, wherein the number of the three-section long oblique beam structures is 4N1, 4N1 three-section long oblique beam structures are arranged in parallel, wherein N1 is a positive integer.
3. The MEMS inertial switch of claim 1, wherein the first flexible beam length is less than the length of the rigid beam, and the first flexible beam length and the second flexible beam length are the same.
4. The MEMS inertial switch based on the three-section long oblique beam bistable structure is characterized in that the number of the spring bodies is multiple, the spring bodies are symmetrically arranged on two side walls of the first mass block, the spring bodies are folding spring beams, one ends of the folding spring beams are fixedly connected with the side walls of the switch shell, the other ends of the folding spring beams are fixedly connected with the side walls of the first mass block, and the folding spring beams support and fix the first mass block inside the switch shell.
5. The MEMS inertial switch of claim 4, wherein the spring body is composed of N2 folded spring beams, wherein N2 is a positive integer.
6. The MEMS inertial switch based on the three-section long oblique beam bistable structure of claim 5, wherein the number of the spring bodies is 4, and the spring bodies are symmetrically arranged at the upper part and the lower part of two opposite side walls of the first mass block.
7. The MEMS inertial switch based on the three-section type long oblique beam bistable structure of claim 1, wherein the switch auxiliary mechanism is processed on an SOI silicon wafer by a double-sided etching process, wherein the first mass block is processed by a bottom layer and a device layer of the SOI silicon wafer, and the spring body is processed by the device layer of the SOI silicon wafer.
8. The MEMS inertial switch of claim 1, wherein the bistable mechanism is fabricated on an SOI silicon wafer by a double-sided etching process, wherein the second mass block is fabricated from a bottom layer and a device layer of the SOI silicon wafer, and the three-segment long-oblique-beam structure is fabricated from the device layer of the SOI silicon wafer.
9. The MEMS inertial switch based on the three-section long oblique beam bistable structure of claim 1, wherein the switch shell is formed by processing a bottom layer and a device layer of an SOI silicon wafer by a double-sided etching process.
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