CN109100884B - Optical modulator and laser radar using the same - Google Patents
Optical modulator and laser radar using the same Download PDFInfo
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- CN109100884B CN109100884B CN201811177943.6A CN201811177943A CN109100884B CN 109100884 B CN109100884 B CN 109100884B CN 201811177943 A CN201811177943 A CN 201811177943A CN 109100884 B CN109100884 B CN 109100884B
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- layer
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- liquid crystal
- light modulation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133382—Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The present invention provides an optical modulator comprising: a first light modulation section including a first substrate, and a first transparent conductive layer and a first heat conductive layer provided on the first substrate; the second light modulation part is arranged opposite to the first light modulation part, the second light modulation part comprises a second substrate, and a second transparent conducting layer and a second heat conducting layer which are arranged on the second substrate, and the second heat conducting layer and the first heat conducting layer are used for conducting out heat generated when incident light passes through the light modulator; and a liquid crystal layer disposed between the first light modulation part and the second light modulation part, for modulating the incident light by deflection of liquid crystal molecules. The optical modulator provided by the invention avoids the influence of the heat on the liquid crystal layer, damages the liquid crystal property and is beneficial to improving the performance stability of the optical modulator.
Description
Technical Field
The present invention relates to an optical modulator and a laser radar using the same.
Background
Lidar has become an indispensable key sensor for unmanned driving. At present, the visible vehicle-mounted laser radar in the market mainly comprises a mechanical laser radar and a solid laser radar, but has the defects of difficult light path debugging, complex assembly, long production period, high cost and the like.
Therefore, in view of the above problems, the liquid crystal optical modulator is often used in the present novel solid-state laser radar to modulate the laser light emitted from the laser light source in the laser radar. However, since the light incident on the liquid crystal light modulator is a laser light, and in the liquid crystal light modulator, Indium Tin Oxide (ITO) layers are generally disposed on both sides of the liquid crystal layer, when the liquid crystal layer is irradiated with the laser light, the ITO absorbs the laser light and the glass fails to radiate heat, which causes excessive heat in a local region of the liquid crystal layer, which deteriorates the original characteristics of liquid crystal molecules in the liquid crystal layer, thereby affecting the function of the light modulator.
Disclosure of Invention
One aspect of the present invention provides an optical modulator comprising:
a first light modulation section including a first substrate, and a first transparent conductive layer and a first heat conductive layer provided on the first substrate;
the second light modulation part is arranged opposite to the first light modulation part, the second light modulation part comprises a second substrate, and a second transparent conducting layer and a second heat conducting layer which are arranged on the second substrate, and the second heat conducting layer and the first heat conducting layer are used for conducting out heat generated when incident light passes through the light modulator; and
and the liquid crystal layer is arranged between the first light modulation part and the second light modulation part and is used for modulating the incident light through the deflection of liquid crystal molecules.
Another aspect of the present invention provides a lidar comprising:
a laser light source for emitting laser light; and
an optical modulator disposed on an exit path of laser light emitted from the laser light source, the optical modulator according to any one of claims 1 to 8.
The light modulator that this embodiment provided, it distributes away the heat of the laser that first transparent conducting layer and second transparent conducting layer absorbed through first transparent conducting layer and second transparent conducting layer, has avoided this heat to produce the influence to the liquid crystal layer, destroys the nature of liquid crystal molecule in the liquid crystal layer, is favorable to improving light modulator's stability of performance.
Drawings
Fig. 1 is a schematic perspective view of an optical modulator according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view of an optical modulator according to an embodiment of the present invention.
FIG. 3 is a schematic diagram illustrating a state structure of a first hole and a second hole under different oxidation voltages according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of states of the first hole and the second hole under different electrolyte concentrations according to an embodiment of the present invention.
FIG. 5 is a schematic representation of the current density as a function of reaction temperature as provided by an embodiment of the present invention.
Fig. 6 is a schematic cross-sectional structure diagram of an optical modulator according to a second embodiment of the present invention.
Fig. 7 is a schematic block diagram of a lidar according to an embodiment of the present invention.
Description of the main elements
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
Example one
Referring to fig. 1, the optical modulator 100 of the present embodiment includes a first optical modulation portion 110, a second optical modulation portion 120, and a liquid crystal layer 130. The first light modulation part 110 and the second light modulation part 120 are disposed opposite to each other, and the liquid crystal layer 130 is disposed between the first light modulation part 110 and the second light modulation part 120.
As shown in fig. 2, the first light modulation part 110 includes a first substrate 111, and a first transparent conductive layer 112 and a first heat conductive layer 113 disposed on the first substrate 111.
The first transparent conductive layer 112 is made of a transparent conductive material, and in one embodiment, the first transparent conductive layer 112 is Indium Tin Oxide (ITO).
As shown in fig. 2, the first thermally conductive layer 113 includes a first metal layer 1132 and a first anodic oxide layer 1133 formed on the first metal layer 1132. The first anodic oxide layer 1133 is formed by anodizing a metal. The first anodic oxide layer 1133 has a plurality of first holes 1131 formed therein, and the first holes 1131 are formed during the anodic oxidation process, and the specific shape and the hole diameter thereof are related to the process parameters (such as the oxidation voltage, the electrolyte concentration, etc.) of the anodic oxidation. The first holes 1131 allow the first anodic oxide layer 1133 to have a larger specific surface area, so that the first transparent conductive layer 112 has good heat dissipation performance. The metal may be aluminum, or may be a metal or an alloy that can be anodized, such as an aluminum alloy, a magnesium-aluminum alloy, or stainless steel. In this embodiment, the metal is aluminum, and the first anodic oxide layer 1133 is formed by anodizing aluminum.
The first heat conduction layer 113 is formed on the surface of the first substrate 111 facing the second light modulation part 120, the first transparent conductive layer 112 is directly formed on the surface of the first heat conduction layer 113 away from the first substrate 111, and the first anodic oxide layer 1133 of the first heat conduction layer 113 is in direct contact with the first transparent conductive layer 112 to conduct heat away from the first transparent conductive layer 112.
With reference to fig. 2, the second light modulation portion 120 includes a second substrate 121, and a second transparent conductive layer 122 and a second heat conductive layer 123 disposed on the second substrate 121.
The second transparent conductive layer 122 is made of a transparent conductive material, and in an embodiment, the second transparent conductive layer 122 is Indium Tin Oxide (ITO).
As shown in fig. 2, the second thermally conductive layer 123 includes a second metal layer 1232 and a second anodic oxide layer 1233 formed on the second metal layer 1232. The second anodic oxide layer 1233 is formed by anodizing a metal. The second anodic oxide layer 1233 has a plurality of second holes 1231 formed therein, where the second holes 1231 are formed during the anodic oxidation process, and the specific shape and aperture thereof are related to the process parameters (such as oxidation voltage, electrolyte concentration, etc.) of the anodic oxidation. The second holes 1231 allow the second anodic oxide layer 1233 to have a larger specific surface area, so that the second transparent conductive layer 122 has good heat dissipation performance. The metal may be aluminum, or may be a metal or an alloy that can be anodized, such as an aluminum alloy, a magnesium-aluminum alloy, or stainless steel. In this embodiment, the metal is aluminum, and the second anodic oxide layer 1233 is formed by anodizing aluminum.
The second heat conduction layer 123 is formed on the surface of the second substrate 121 facing the first light modulation part 110, the second transparent conductive layer 122 is directly formed on the surface of the second heat conduction layer 123 away from the second substrate 121, and the second anodic oxide layer 1233 of the second heat conduction layer 123 is in direct contact with the second transparent conductive layer 122 to conduct heat away from the second transparent conductive layer 122.
In other embodiments, when the metal forming the first thermally conductive layer 113 is fully oxidized during the anodization process, the first thermally conductive layer 113 does not include the first metal layer 1132, and only includes the first anodic oxide layer 1133. Similarly, when the metal forming the second heat conductive layer 123 is completely oxidized in the anodizing process, the second heat conductive layer 123 does not include the second metal layer 1232 and only includes the second anodic oxide layer 1233.
Referring to fig. 2, in an embodiment, the light modulator 100 further includes a first alignment film 114 disposed between the first transparent conductive layer 112 and the liquid crystal layer 130 and a second alignment film 124 disposed between the second transparent conductive layer 122 and the liquid crystal layer 130, wherein the first alignment film 114 and the second alignment film 124 are used for aligning liquid crystal molecules in the liquid crystal layer 130 in an initial direction.
In an embodiment, the first alignment film 114 and the second alignment film 124 are doped with heat conductive particles, and in the embodiment, the heat conductive particles may be AlN (aluminum nitride), Graphene, BN, or the like, so that the heat dissipation performance of the light modulator 100 is further improved by the first alignment film 114 and the second alignment film 124 after the heat conductive particles are doped.
Referring to fig. 3 to 5, in an embodiment, the depth and diameter of the first hole 1131 and the second hole 1231 can be adjusted by adjusting conditions such as an oxidation voltage, an electrolyte concentration, and a reaction temperature of the aluminum metal, wherein the reaction temperature mainly affects a current density during the oxidation process.
Fig. 3 shows the form of the first hole 1131 and the second hole 1231 formed under different oxidation voltages, wherein fig. a, b, c, and d show the states of the first hole 1131 and the second hole 1231 formed under the voltages of 20V, 30V, 40V, and 50V, respectively.
In fig. 4, the shapes of the first and second holes 1131 and 1231 formed under different electrolyte concentrations are shown, where states of the first and second holes 1131 and 1231 formed when oxalic acid concentrations are 0.3 mol per liter, 0.5 mol per liter, and 1 mol per liter are shown in fig. a, b, and c, respectively.
In FIG. 5, the variation trend of current density with reaction temperature is shown, wherein the abscissa is reaction temperature and the ordinate is current density, and it can be seen that the current density becomes larger with the increase of reaction temperature when the reaction temperature is between 15 ℃ and 50 ℃.
The optical modulator 100 in the present embodiment is used to modulate incident light that enters from the first optical modulation section 110 and exits from the second optical modulation section 120. When the first and second conductive layers 112 and 122 are not applied with a voltage, liquid crystal molecules in the liquid crystal layer 130 are positioned in an initial direction, which is determined by the arrangement of the first and second alignment films 114 and 124. When a voltage is applied to the first conductive layer 112 and the second conductive layer 122, liquid crystal molecules in the liquid crystal layer 130 are deflected, and when incident light passes through the liquid crystal layer 130 and exits from the second light modulation part 120, the phase of the incident light is changed, thereby completing the modulation of the incident light.
In the optical modulator 100 provided by this embodiment, the first transparent conductive layer 112 and the second transparent conductive layer 122 dissipate heat of the laser absorbed by the first transparent conductive layer 112 and the second transparent conductive layer 122, so as to avoid the heat from affecting the liquid crystal layer 130, damage properties of liquid crystal molecules in the liquid crystal layer 130, and improve performance stability of the optical modulator 100.
Example two
As shown in fig. 6, the optical modulator 100 provided in this embodiment is shown, in this embodiment, only the difference between the first embodiment and the second embodiment is described in detail, and the description of the other parts is omitted.
In the optical modulator 100 of this embodiment, the first transparent conductive layer 112 is formed on the surface of the first substrate 111 facing the second optical modulation portion 120, the first thermal conductive layer 113 is directly formed on the surface of the first transparent conductive layer 112 away from the first substrate 111, and the first metal layer 1132 is in direct contact with the first transparent conductive layer 112.
The second transparent conductive layer 122 is formed on the surface of the second substrate 121 facing the first light modulation part 110, the second thermal conductive layer 123 is directly formed on the surface of the second transparent conductive layer 122 away from the second substrate 121, and the second metal layer 1232 is in direct contact with the second transparent conductive layer 122.
The first alignment film 114 is disposed between the first transparent conductive layer 112 and the liquid crystal layer 130, the second alignment film 124 is disposed between the second transparent conductive layer 122 and the liquid crystal layer 130, and the first alignment film 114 and the second alignment film 124 serve to align liquid crystal molecules in the liquid crystal layer 130 in an initial direction.
The operation principle of the optical modulator 100 is similar to that described in the first embodiment, and therefore, the detailed description thereof is omitted here.
It is to be understood that the optical modulator 100 in the present embodiment can achieve all the advantages as described in the first embodiment.
Referring to fig. 7, the present embodiment further provides a laser radar 200, where the laser radar includes a laser light source 210 and an optical modulator 100, a laser emitted from the laser light source 210 is modulated by the optical modulator 100, and the modulated laser is emitted to a target object and reflected back to the laser radar 200, so as to implement ranging of the target object. The laser radar 200 provided in this embodiment can achieve all the advantageous effects of the optical modulator 100 described above.
It will be appreciated by those skilled in the art that the above embodiments are illustrative only and not intended to be limiting, and that suitable modifications and variations may be made to the above embodiments without departing from the true spirit and scope of the invention.
Claims (4)
1. An optical modulator, comprising:
the first light modulation part comprises a first substrate, a first transparent conducting layer and a first heat conducting layer, wherein the first transparent conducting layer and the first heat conducting layer are arranged on the first substrate;
the second light modulation part is arranged opposite to the first light modulation part, the second light modulation part comprises a second substrate, and a second transparent conducting layer and a second heat conducting layer which are arranged on the second substrate, the second heat conducting layer comprises a second metal layer and a second anodic oxide layer formed on the surface of the second metal layer, a plurality of second holes are formed in the second anodic oxide layer, and the second heat conducting layer and the first heat conducting layer are used for guiding out heat generated when incident light passes through the light modulator; and
a liquid crystal layer disposed between the first light modulation part and the second light modulation part, for modulating the incident light by deflection of liquid crystal molecules;
the first heat conduction layer is formed on the surface, facing the second light modulation part, of the first substrate, and the first transparent electric conduction layer is formed on the surface, far away from the first substrate, of the first heat conduction layer; the second heat conduction layer is formed on the surface, facing the first light modulation part, of the second substrate, and the second transparent conductive layer is directly formed on the surface, far away from the second substrate, of the second heat conduction layer;
each of the first holes and each of the second holes has an inner wall; the first transparent conducting layer further covers the inner walls of all the first holes in the first anodic oxide layer, and the second transparent conducting layer further covers the inner walls of all the second holes in the second anodic oxide layer.
2. The optical modulator of claim 1, further comprising:
a first orientation film disposed between the first transparent conductive layer and the liquid crystal layer; and
a second alignment film disposed between the second transparent conductive layer and the liquid crystal layer;
the first and second alignment films are used to align the liquid crystal molecules in an initial direction.
3. The light modulator of claim 2, wherein the first and second orientation films are doped with thermally conductive particles.
4. A lidar, comprising:
a laser light source for emitting laser light; and
an optical modulator disposed on an exit path of laser light emitted from the laser light source, the optical modulator according to any one of claims 1 to 3.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811177943.6A CN109100884B (en) | 2018-10-10 | 2018-10-10 | Optical modulator and laser radar using the same |
| TW107136617A TWI671915B (en) | 2018-10-10 | 2018-10-17 | Light modulator and laser radar using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811177943.6A CN109100884B (en) | 2018-10-10 | 2018-10-10 | Optical modulator and laser radar using the same |
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| Publication Number | Publication Date |
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| CN109100884A CN109100884A (en) | 2018-12-28 |
| CN109100884B true CN109100884B (en) | 2021-06-22 |
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| CN201811177943.6A Active CN109100884B (en) | 2018-10-10 | 2018-10-10 | Optical modulator and laser radar using the same |
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| TW (1) | TWI671915B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102479915A (en) * | 2010-11-24 | 2012-05-30 | 财团法人工业技术研究院 | Heat dissipation element and processing method thereof |
| CN102593314A (en) * | 2011-01-13 | 2012-07-18 | 吴耀铨 | Heat radiation substrate |
| WO2013035298A1 (en) * | 2011-09-08 | 2013-03-14 | シャープ株式会社 | Display device and method for manufacturing same |
| CN107688243A (en) * | 2017-10-20 | 2018-02-13 | 上海天马微电子有限公司 | Display device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4420037B2 (en) * | 2007-02-14 | 2010-02-24 | エプソンイメージングデバイス株式会社 | Liquid crystal panel and projection type liquid crystal display device |
| JP2009075503A (en) * | 2007-09-25 | 2009-04-09 | Seiko Epson Corp | Electro-optical device and electronic equipment equipped therewith |
-
2018
- 2018-10-10 CN CN201811177943.6A patent/CN109100884B/en active Active
- 2018-10-17 TW TW107136617A patent/TWI671915B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102479915A (en) * | 2010-11-24 | 2012-05-30 | 财团法人工业技术研究院 | Heat dissipation element and processing method thereof |
| CN102593314A (en) * | 2011-01-13 | 2012-07-18 | 吴耀铨 | Heat radiation substrate |
| WO2013035298A1 (en) * | 2011-09-08 | 2013-03-14 | シャープ株式会社 | Display device and method for manufacturing same |
| CN107688243A (en) * | 2017-10-20 | 2018-02-13 | 上海天马微电子有限公司 | Display device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202015248A (en) | 2020-04-16 |
| CN109100884A (en) | 2018-12-28 |
| TWI671915B (en) | 2019-09-11 |
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