CN109100884A - Optical modulator and the laser radar for using it - Google Patents
Optical modulator and the laser radar for using it Download PDFInfo
- Publication number
- CN109100884A CN109100884A CN201811177943.6A CN201811177943A CN109100884A CN 109100884 A CN109100884 A CN 109100884A CN 201811177943 A CN201811177943 A CN 201811177943A CN 109100884 A CN109100884 A CN 109100884A
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- conducting layer
- layer
- heat
- optical modulator
- modulation unit
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133382—Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The present invention provides a kind of optical modulator, comprising: the first light modulation unit, first light modulation unit include first substrate and the first transparency conducting layer and the first heat-conducting layer that are set on the first substrate；Second light modulation unit, it is oppositely arranged with first light modulation unit, second light modulation unit includes the second substrate and the second transparency conducting layer and the second heat-conducting layer that are set in the second substrate, and second heat-conducting layer and first heat-conducting layer are used to pass through incident light generated heat derives when the optical modulator；And liquid crystal layer, the liquid crystal layer are set between first light modulation unit and second light modulation unit, are modulated for the deflection by liquid crystal molecule to the incident light.Optical modulator provided by the invention avoids the heat and has an impact to liquid crystal layer, destroys liquid crystal property, is conducive to the stability for improving optical modulator.
Description
Technical field
The present invention relates to a kind of optical modulator and use its laser radar.
Background technique
Laser radar has become unmanned indispensable key sensor.Current vehicle-mounted laser visible on the market
Radar has optical path debugging difficulty, assembly complicated based on mechanical laser radar and solid-state laser radar, the production cycle
Long, cost occupies the disadvantages of high.
Therefore, based on the above issues, novel solid-state laser radar uses liquid crystal light modulator to laser radar more at present
In laser light source issue laser be modulated.But the light due to injecting liquid crystal light modulator is laser, and the liquid crystal light
Tin indium oxide (Indium Tin Oxide, ITO) layer generally is configured in liquid crystal layer two sides in modulator, when liquid crystal layer is shone by laser
When penetrating, it is excessively high to absorb laser and the glass bad regional area heat for leading to liquid crystal layer that radiates because of ITO, damages liquid in liquid crystal layer
The primary characteristic of brilliant molecule, so that the function to optical modulator has an impact.
Summary of the invention
One aspect of the present invention provides a kind of optical modulator, comprising:
First light modulation unit, first light modulation unit include first substrate and be set on the first substrate
One transparency conducting layer and the first heat-conducting layer；
Second light modulation unit is oppositely arranged with first light modulation unit, and second light modulation unit includes the second substrate
And it is set to the second transparency conducting layer and the second heat-conducting layer in the second substrate, second heat-conducting layer and described first
Heat-conducting layer is used to pass through incident light generated heat derives when the optical modulator；And
Liquid crystal layer, the liquid crystal layer is set between first light modulation unit and second light modulation unit, for leading to
The deflection for crossing liquid crystal molecule is modulated the incident light.
Another aspect of the present invention provides a kind of laser radar, comprising:
Laser light source, for issuing laser；And
Optical modulator is set on the exit path for the laser that the laser light source issues, and the optical modulator is as weighed
Benefit requires optical modulator described in 1-8 any one.
Optical modulator provided in this embodiment, by the first transparency conducting layer and the second transparency conducting layer, thoroughly by first
The heat for the laser that bright conductive layer and the second transparency conducting layer absorb distributes, and avoids the heat and generates shadow to liquid crystal layer
It rings, destroys the property of liquid crystal molecule in liquid crystal layer, be conducive to the stability for improving optical modulator.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of optical modulator provided in an embodiment of the present invention.
Fig. 2 is the diagrammatic cross-section for the optical modulator that the embodiment of the present invention one provides.
Fig. 3 is that the status architecture of first hole and the second hole is illustrated under different oxidation voltages provided in an embodiment of the present invention
Figure.
Fig. 4 is that the status architecture of first hole and the second hole shows under different electrolytes concentration provided in an embodiment of the present invention
It is intended to.
Fig. 5 is the schematic diagram that current density provided in an embodiment of the present invention changes with reaction temperature.
Fig. 6 is the schematic diagram of the section structure of optical modulator provided by Embodiment 2 of the present invention.
Fig. 7 is the module diagram of laser radar provided in an embodiment of the present invention.
Main element symbol description
The present invention that the following detailed description will be further explained with reference to the above drawings.
Specific embodiment
Embodiment one
Referring to FIG. 1, optical modulator 100 provided in this embodiment, including the first light modulation unit 110, the second light modulation unit
120 and liquid crystal layer 130.Wherein, the first light modulation unit 110 and the second light modulation unit 120 are oppositely arranged, the liquid crystal layer 130 setting
Between the first light modulation unit 110 and the second light modulation unit 120.
As shown in Fig. 2, the first light modulation unit 110 include first substrate 111 and be set on first substrate 111 first
Transparency conducting layer 112 and the first heat-conducting layer 113.
First transparency conducting layer 112 is formed by transparent conductive material, in an embodiment, the first transparency conducting layer 112
For tin indium oxide (Indium Tin Oxide, ITO).
As shown in Fig. 2, the first heat-conducting layer 113 include the first metal layer 1132 and be formed on the first metal layer 1132 the
One anodic oxide layer 1133.The first anode oxide skin(coating) 1133 after carrying out anodized to metal by forming.First
Multiple first holes 1131 are formed in anodic oxide layer 1133, the first hole 1131 is process shape of the metal in anodic oxidation
At specific shape and aperture are related to technological parameter (such as oxidation voltage, the concentration of electrolyte etc.) of anodic oxidation.First
Hole 1131 makes first anode oxide skin(coating) 1133 have biggish specific surface area, so that the first transparency conducting layer 112
With good heat dissipation performance.The metal can be aluminium, or aluminium alloy, magnesium alloy or stainless steel etc. can be into
The metal or alloy of row anodized.In the present embodiment, the metal is aluminium, and the first anode oxide skin(coating) 1133 is
Aluminium is formed after anodized.
First heat-conducting layer 113 is formed on the surface of the second light modulation unit 120 of direction of first substrate 111, and first is transparent
Conductive layer 112 is formed directly on the first surface of the heat-conducting layer 113 far from first substrate 111, the first sun of the first heat-conducting layer 113
Pole oxide skin(coating) 1133 is directly contacted with the first transparency conducting layer 112, by the heat derives on the first transparency conducting layer 112.
With continued reference to FIG. 2, the second light modulation unit 120 includes the second substrate 121 and is set in the second substrate 121
Second transparency conducting layer 122 and the second heat-conducting layer 123.
Second transparency conducting layer 122 is formed by transparent conductive material, in an embodiment, the second transparency conducting layer 122
For tin indium oxide (Indium Tin Oxide, ITO).
As shown in Fig. 2, the second heat-conducting layer 123 include second metal layer 1232 and be formed in second metal layer 1232 the
Two anodic oxide layer 1233.The second plate oxide skin(coating) 1233 after carrying out anodized to metal by forming.Second
Multiple second holes 1231 are formed in anodic oxide layer 1233, the second hole 1231 is process shape of the metal in anodic oxidation
At specific shape and aperture are related to technological parameter (such as oxidation voltage, the concentration of electrolyte etc.) of anodic oxidation.Second
Hole 1231 makes second plate oxide skin(coating) 1233 have biggish specific surface area, so that the second transparency conducting layer 122
With good heat dissipation performance.The metal can be aluminium, or aluminium alloy, magnesium alloy or stainless steel etc. can be into
The metal or alloy of row anodized.In the present embodiment, the metal is aluminium, and the second plate oxide skin(coating) 1233 is
Aluminium is formed after anodized.
Second heat-conducting layer 123 is formed on the surface of the first light modulation unit 110 of direction of the second substrate 121, and second is transparent
Conductive layer 122 is formed directly on the second surface of the heat-conducting layer 123 far from the second substrate 121, the second sun of the second heat-conducting layer 123
Pole oxide skin(coating) 1233 is directly contacted with the second transparency conducting layer 122, by the heat derives on the second transparency conducting layer 122.
In other embodiments, it is all aoxidized when forming the metal of the first heat-conducting layer 113 in anodized, this
When, the first heat-conducting layer 113 does not include the first metal layer 1132, only includes first anode oxide skin(coating) 1133.Likewise, when being formed
The metal of second heat-conducting layer 123 is all aoxidized in anodized, at this point, the second heat-conducting layer 123 does not include the second gold medal
Belong to layer 1232, only includes second plate oxide skin(coating) 1233.
Referring to FIG. 2, optical modulator 100 further includes being set to the first transparency conducting layer 112 and liquid crystal in an embodiment
Layer 130 between the first oriented film 114 and be set to the second oriented film between the second transparency conducting layer 122 and liquid crystal layer 130
124, the first oriented film 114 and the second oriented film 124 are used to position an inceptive direction for the liquid crystal molecule in liquid crystal layer 130.
Wherein, doped with conductive particle, in an embodiment, thermally conductive grain in the first oriented film 114 and the second oriented film 124
Son can be AlN (aluminium nitride), Graphene, BN etc., then adulterate the first oriented film 114 and the second orientation after conductive particle
Film 124 further improves the heat dissipation performance of optical modulator 100.
Can refer to Fig. 3~Fig. 5, in an embodiment, can by adjust to the oxidation voltage of metallic aluminium, concentration of electrolyte and
The conditions such as reaction temperature adjust the depth and diameter of the first hole 1131 and the second hole 1231, wherein reaction temperature is main
To influence the current density in oxidation process.
It is the form of the first hole 1131 and the second hole 1231 formed under different oxidation voltages in Fig. 3, wherein figure a,
B, the state of the first hole 1131 and the second hole 1231 that are formed when respectively voltage is 20V, 30V, 40V, 50V in c, d.
It is the form of the first hole 1131 and the second hole 1231 formed under different concentration of electrolyte in Fig. 4, wherein
Be respectively 0.3 mole every liter shown in figure a, b, c, the concentration of oxalic acid of 0.5 every liter of More and 1 every liter of More when formed first
The state of hole 1131 and the second hole 1231.
It is current density in Fig. 5 with the variation tendency of reaction temperature, wherein abscissa is reaction temperature, and ordinate is electricity
Current density, it is seen then that when reaction temperature is between 15~50 DEG C, current density becomes larger with the raising of reaction temperature.
Optical modulator 100 in the present embodiment is for being modulated incident light, and the incident light is from the first light modulation unit 110
Incidence, and be emitted from the second light modulation unit 120.When the first conductive layer 112 and the second conductive layer 122 are not applied to voltage, liquid
Liquid crystal molecule in crystal layer 130 is located at inceptive direction, which passes through the first oriented film 114 and the second oriented film 124
It is arranged to determine.Liquid crystal molecule hair when the first conductive layer 112 and the second conductive layer 122 are applied voltage, in liquid crystal layer 130
Raw deflection, then incident light passes through liquid crystal layer 130, and when being emitted from the second light modulation unit 120, phase can change, above-mentioned mistake
Journey is the modulation completed to incident light.
Optical modulator 100 provided in this embodiment passes through the first transparency conducting layer 112 and the second transparency conducting layer 122,
The heat for the laser that first transparency conducting layer 112 and the second transparency conducting layer 122 absorb is distributed, the heat pair is avoided
Liquid crystal layer 130 has an impact, and destroys the property of liquid crystal molecule in liquid crystal layer 130, and the performance for being conducive to improve optical modulator 100 is steady
It is qualitative.
Embodiment two
Be illustrated in figure 6 optical modulator 100 provided in this embodiment, in the present embodiment, only to in embodiment one
Difference part is described in detail, other are just repeated no more.
Optical modulator 100 in the present embodiment, the first transparency conducting layer 112 are formed in first substrate 111 towards the second light
The surface of modulation portion 120, the first heat-conducting layer 113 are formed directly into the first table of the transparency conducting layer 112 far from first substrate 111
Face, the first metal layer 1132 directly contact for 112 layers with the first electrically conducting transparent.
Second transparency conducting layer 122 is formed in the second substrate 121 towards the surface of the first light modulation unit 110, and second is thermally conductive
Layer 123 is formed directly into the second surface of the transparency conducting layer 122 far from the second substrate 121, and second metal layer 1232 and second is thoroughly
Bright conductive layer 122 directly contacts.
First oriented film 114 is set between the first transparency conducting layer 112 and liquid crystal layer 130, the setting of the second oriented film 124
Between the second transparency conducting layer 122 and liquid crystal layer 130, the first oriented film 114 and the second oriented film 124 are used to be liquid crystal layer
Liquid crystal molecule in 130 positions an inceptive direction.
It is similar with corresponding principles illustrated in embodiment one for the working principle of optical modulator 100, herein just no longer
It repeats.
It should be appreciated that the optical modulator 100 in the present embodiment, may be implemented all beneficial to effect as described in embodiment one
Fruit.
Referring to FIG. 7, the present embodiment also provides a kind of laser radar 200, which includes laser light source 210 and light
Modulator 100, the laser which issues are modulated by optical modulator 100, modulated laser emitting to mesh
Mark object is simultaneously reflected back laser radar 200, it can be achieved that carrying out ranging to target object, and the optical modulator in the present embodiment is as above
It states.All beneficial effects of above-mentioned optical modulator 100 may be implemented in laser radar 200 provided in this embodiment.
Those skilled in the art it should be appreciated that more than embodiment be intended merely to illustrate the present invention,
And be not used as limitation of the invention, as long as within spirit of the invention, it is to the above embodiments
Appropriate change and variation are all fallen within the scope of protection of present invention.
Claims (9)
1. a kind of optical modulator characterized by comprising
First light modulation unit, first light modulation unit include first substrate and be set on the first substrate first thoroughly
Bright conductive layer and the first heat-conducting layer；
Second light modulation unit is oppositely arranged with first light modulation unit, second light modulation unit include the second substrate and
The second transparency conducting layer and the second heat-conducting layer being set in the second substrate, second heat-conducting layer and described first thermally conductive
Generated heat derives when layer is for by incident light by the optical modulator；And
Liquid crystal layer, the liquid crystal layer is set between first light modulation unit and second light modulation unit, for passing through liquid
The deflection of brilliant molecule is modulated the incident light.
2. optical modulator as described in claim 1, which is characterized in that first heat-conducting layer includes the first metal layer and formation
First anode oxide skin(coating) on the first metal layer surface；Second heat-conducting layer include second metal layer and be formed in this
The second plate oxide skin(coating) of two layer on surface of metal；Form multiple first holes on the first anode oxide skin(coating), described
Multiple second holes are formed in two anodic oxide layer.
3. optical modulator as claimed in claim 2, which is characterized in that first heat-conducting layer is formed in the first substrate court
To the surface of second light modulation unit, first transparency conducting layer is formed in first heat-conducting layer far from first base
The surface of plate, the first anode oxide skin(coating) are directly contacted with first transparency conducting layer；
Second heat-conducting layer is formed in the second substrate towards the surface of first light modulation unit, and described second transparent leads
Electric layer is formed directly into the surface of second heat-conducting layer far from the second substrate, the second plate oxide skin(coating) with it is described
The contact of second transparency conducting layer.
4. optical modulator as claimed in claim 3, which is characterized in that each described first hole and each described second
Hole all has an inner wall；
First transparency conducting layer also covers the inner wall of all first holes on the first anode oxide skin(coating), and described second
Transparency conducting layer also covers the inner wall of all second holes on the second plate oxide skin(coating).
5. optical modulator as claimed in claim 2, which is characterized in that first transparency conducting layer is formed in first base
For plate towards the surface of second light modulation unit, first heat-conducting layer is formed directly into first transparency conducting layer far from institute
The surface of first substrate is stated, the first metal layer is directly contacted with first transparency conducting layer；
First transparency conducting layer is formed in the second substrate and leads towards the surface of first light modulation unit, described second
Thermosphere is formed directly into the surface of second transparency conducting layer far from the second substrate, the second metal layer and described the
Two transparency conducting layers directly contact.
6. optical modulator as claimed in claim 3, which is characterized in that further include:
First oriented film, first oriented film are set between first transparency conducting layer and the liquid crystal layer；And
Second oriented film, second oriented film are set between second transparency conducting layer and the liquid crystal layer；
First oriented film and second oriented film are used to position an inceptive direction for the liquid crystal molecule.
7. optical modulator as claimed in claim 5, which is characterized in that further include:
First oriented film, first oriented film are set between first heat-conducting layer and the liquid crystal layer；And
Second oriented film, second oriented film are set between second heat-conducting layer and the liquid crystal layer；
First oriented film and second oriented film are used to position an inceptive direction for the liquid crystal molecule.
8. optical modulator as claimed in claims 6 or 7, which is characterized in that first oriented film and second oriented film
In doped with conductive particle.
9. a kind of laser radar characterized by comprising
Laser light source, for issuing laser；And
Optical modulator is set on the exit path for the laser that the laser light source issues, and the optical modulator is as right is wanted
Seek optical modulator described in 1-8 any one.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811177943.6A CN109100884B (en) | 2018-10-10 | 2018-10-10 | Optical modulator and laser radar using the same |
| TW107136617A TWI671915B (en) | 2018-10-10 | 2018-10-17 | Light modulator and laser radar using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811177943.6A CN109100884B (en) | 2018-10-10 | 2018-10-10 | Optical modulator and laser radar using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109100884A true CN109100884A (en) | 2018-12-28 |
| CN109100884B CN109100884B (en) | 2021-06-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811177943.6A Active CN109100884B (en) | 2018-10-10 | 2018-10-10 | Optical modulator and laser radar using the same |
Country Status (2)
| Country | Link |
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| CN (1) | CN109100884B (en) |
| TW (1) | TWI671915B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102479915A (en) * | 2010-11-24 | 2012-05-30 | 财团法人工业技术研究院 | Heat dissipation element and processing method thereof |
| CN102593314A (en) * | 2011-01-13 | 2012-07-18 | 吴耀铨 | Heat radiation substrate |
| WO2013035298A1 (en) * | 2011-09-08 | 2013-03-14 | シャープ株式会社 | Display device and method for manufacturing same |
| CN107688243A (en) * | 2017-10-20 | 2018-02-13 | 上海天马微电子有限公司 | A kind of display device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4420037B2 (en) * | 2007-02-14 | 2010-02-24 | エプソンイメージングデバイス株式会社 | Liquid crystal panel and projection type liquid crystal display device |
| JP2009075503A (en) * | 2007-09-25 | 2009-04-09 | Seiko Epson Corp | Electro-optical device and electronic equipment equipped therewith |
-
2018
- 2018-10-10 CN CN201811177943.6A patent/CN109100884B/en active Active
- 2018-10-17 TW TW107136617A patent/TWI671915B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102479915A (en) * | 2010-11-24 | 2012-05-30 | 财团法人工业技术研究院 | Heat dissipation element and processing method thereof |
| CN102593314A (en) * | 2011-01-13 | 2012-07-18 | 吴耀铨 | Heat radiation substrate |
| WO2013035298A1 (en) * | 2011-09-08 | 2013-03-14 | シャープ株式会社 | Display device and method for manufacturing same |
| CN107688243A (en) * | 2017-10-20 | 2018-02-13 | 上海天马微电子有限公司 | A kind of display device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202015248A (en) | 2020-04-16 |
| TWI671915B (en) | 2019-09-11 |
| CN109100884B (en) | 2021-06-22 |
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