CN109099871A - A kind of interference detection alignment methods based on target disc - Google Patents
A kind of interference detection alignment methods based on target disc Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention discloses a kind of, and the interference based on target disc detects alignment methods, which comprises the following steps: (1) in optical mirror surface mount target disc；(2) interference detection is carried out to optical mirror, interference testing result is denoted as Maptest；(3) to MaptestMiddle corresponding target target area is demarcated, and Target is denoted astest；(4) optical mirror is moved into machining tool, demarcates the position coordinates that each target center is cross hairs focal point respectively using machining tool gauge head, obtains Targetprocess；(5) testing result Map is interfered to optical mirrortestCarry out distortion correction be aligned, obtain result Mapcorrect；(6) based on interpolation calculation to MapcorrectIn correspond to target target area carry out data filling obtain Mapinterp.The present invention is improved by the alignment flow setting to alignment methods entirety, can effectively solve the problem that the problem of testing result in reflecting mirror manufacturing process is aligned with following process compared with prior art.
Description
Technical field
The invention belongs to optical alignment technique fields, more particularly, to a kind of interference detection pair based on target disc
Quasi- method, which can be registered to the interference testing result of optical mirror in machining tool coordinate system, to complete
The further polishing of optical mirror, is completed based on target disc.
Background technique
Large-aperture optical reflecting mirror is increasingly used in optical system, such as ground heavy foundation telescope, day
Literary telescope etc.；At present in TMT (Thirty meter telescope, 30 meters of U.S. telescope project) project, system master
Mirror has reached 30m magnitude, is made of the optical mirror of 82 pieces of 2m magnitudes, in the processing and manufacturing of each piece of reflecting mirror
In, it requires for the interference testing result of reflecting mirror to be transformed into machining tool coordinate system, to complete reflecting mirror further
Processing, until reflecting mirror surface shape processing result meets design requirement.At abroad, the size of monolithic reflecting mirror has reached 8.4m,
In China, the size of monolithic optical reflecting mirror is also up to 4m magnitude at present.During among reflecting mirror, realizing will reflection
It is reflecting mirror surface shape finally one of convergent core procedure that the interference testing result of mirror, which is transformed into machine tooling coordinate system, for anti-
The manufacture for penetrating mirror is of great significance.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the purpose of the present invention is to provide one kind to be based on target disc
Interference detect alignment methods, wherein being improved by the alignment flow setting to alignment methods entirety, with prior art phase
Than can effectively solve the problem that the problem of testing result in reflecting mirror manufacturing process is aligned with following process, which can
Mirror interference testing result is transformed into machining tool coordinate system, surface testing result can be transformed into machining tool coordinate
In system, guarantee is provided for the following process of optical mirror plane, ensures that the convergence of the final face shape of optical mirror plane obtains；Also, the present invention
Also by the quantity and their arrangement mode of control target, it can effectively ensure to be aligned the accuracy of conversion.
To achieve the above object, it is proposed, according to the invention, a kind of interference detection alignment methods based on target disc are provided,
It is characterized in that, comprising the following steps:
(1) in optical mirror surface mount target disc, the center of the target disc is cross hairs, which glues
It pastes quantity and is not less than 3, the center of projection of these targets on the plane perpendicular to the optical mirror optical axis is not same
On straight line；
(2) interference detection is carried out to the optical mirror, interference testing result is denoted as Maptest；
(3) Map that the step (2) is obtainedtestMiddle corresponding target target area is demarcated, and determines these targets pair
The marginal position in region is answered, then for any one of target disc, in interference testing result MaptestIt is middle to mark respectively
Remember the max pixel value x of pixel level X-direction corresponding with the target disc outmaxWith minimum pixel value xmin, the vertical side Y of pixel
To max pixel value ymaxWith minimum pixel value ymin, obtain central point pixel coordinate corresponding with the target disc center
((xmax+xmin)/2, (ymax+ymin)/2)；By being demarcated one by one to all target discs, obtain in interferometer CCD coordinate
It is lower location position corresponding with all target disc centers as a result, remembering that the calibration result is Targettest；
(4) optical mirror is moved into machining tool, demarcates each target center respectively using machining tool gauge head
For the position coordinates of cross hairs focal point, obtains the position corresponding with all target disc centers under machining tool coordinate system and sit
Mark is as a result, the result is denoted as Targetprocess；
(5) Target obtained using the step (3)testThe Target obtained with the step (4)process, to optics
Mirror interference testing result MaptestCarry out distortion correction be aligned, and the result after distortion correction and alignment is denoted as
Mapcorrect；
(6) the result Map after the distortion correction and alignment obtained based on interpolation calculation to the step (5)correctIn it is right
Data filling should be carried out in target target area, fill up rear result and be denoted as Mapinterp；Result MapinterpAs optical mirror
Thus face shape result after being registered to machining tool completes interference detection alignment.
As present invention further optimization, when the optical mirror is non-spherical reflector, in the step (2)
The interference be detected as the zero testing using compensating element, the MaptestMiddle corresponding target target area shows as ellipse
Shape；
The interference testing result MaptestIn, the interference detection corresponding to any one position in non-target sticking area
Its form of result data is (x, y, z), wherein x, and y is pixel coordinate in interferometer, and z is at corresponding pixel points coordinate (x, y)
Phase value；Its form of interference testing result data of any one position is (x, y, No data) in corresponding target target area,
Wherein x, y are still pixel coordinate in interferometer.
As present invention further optimization, aspherical mirror equation is remembered are as follows:
Wherein, c is aspherical female mirror vertex curvature, and K is circular cone coefficient, S2=x2+y2, wherein z is optical axis direction, and x, y are
With optical axis vertical plane coordinate system, then the normal vector of aspherical upper point (x, y, z) beWherein:
Then, the distortion correction in the step (5) meets following distortion correction equation with being aligned:
In the equation (5), d is preset non-spherical reflector vertex along optical axis and compensating element, plane focal point line
Segment length；α is the angle of preset aspheric surface reflector and compensating element, interplanar；K is that interference testing result turns
Change to the enlargement ratio of machining tool coordinate system；θinterferometerThe rotation of machining tool coordinate system is transformed into for interference testing result
Gyration；xcompensatorFor mirror surface X-direction coordinate transform to the x coordinate of compensating element, plane；ycompensatorFor mirror surface Y-direction
Y-coordinate of the coordinate transform to compensating element, plane；(xmir,ymir,zmir) it is some coordinates of mirror surface under machine tooling coordinate system；
(0,ypo,zpo) it is coordinate value of the aspherical mirror coordinate origin under machine tooling coordinate system；(xinterferometer,
yinterferometer) it is a bit (x of mirror surface under machine tooling coordinate systemmir,ymir) transform to pixel under interferometer CCD coordinate system
Coordinate；(xinterferometer0,yinterferometer0) it is that mirror surface center origin transforms to interferometer CCD under machine tooling coordinate system
Pixel coordinate under coordinate system；
The Target that the step (3) is obtainedtestThe Target obtained with the step (4)processDescribed in substitution
In equation (5), is calculated according to least square fitting and solve k and θinterferometer, and substitute into the equation (5), it is updated
Equation (5) afterwards；
Then, using the updated equation (5) to the Map for obtaining the step (2)testDistortion is carried out to rectify
Just with alignment, thus obtain distortion correction and alignment after result Mapcorrect。
As present invention further optimization, remember that the total quantity of target is N, the then Target that the step (3) obtainstest
Including (xi,yi), i=1,2,3..., N；
The Target that the step (4) obtainsprocessIncluding (Xi,Yi), i=1,2,3..., N；
Preferably, N >=5.
As present invention further optimization, in the step (6), the data filling is to be based on interpolation calculation, described
Interpolation calculation is preferably triangulation interpolation.
Contemplated above technical scheme through the invention, compared with prior art, due to having spider using center
The target disc of silk finds aligned relationship with the target disc of crosshair by center, and by the control of target quantity for extremely
Few 3 (preferably at least 5), these targets be arranged on non-same straight line (when target quantity is 3, just can be right
Should have situation of the target outside straight line), it ensure that interference testing result is transformed into enlargement ratio k and the rotation of machining tool coordinate system
Gyration θinterferometerFitting accuracy, provide guarantee for the acquisition of subsequent aligned relationship, it is ensured that alignment precision.This hair
It is bright to carry out analytical calculation particular by detected optical path, corresponding distortion correction relational expression is found, as shown in formula (5).Benefit
Parametric solution is carried out to it with target, after completing to solve, result can be will test and carry out distortion correction, to complete detection knot
Data conversion of the fruit from detection coordinate system to machining tool coordinate system.After obtaining change data result, the present invention can also be right
Wherein missing data carries out interpolation calculation, and interpolation method preferably uses triangulation interpolation, to obtain optical mirror alignment
Complete face shape result after to machining tool.
To sum up, will interfere under testing result transition alignment to machining tool coordinate system based on target disc in the present invention
Alignment methods are found between interference detection coordinate system and machine tooling coordinate system by center with the target disc of crosshair
Aligned relationship finds corresponding distortion correction relational expression, i.e., such as equation (5) institute by carrying out analytical calculation to detected optical path
The relational expression shown.Parametric solution is carried out to the relational expression using target, after completing to solve, result can be will test and distorted
Correction then carries out interpolation calculation (interpolation method preferably uses triangulation interpolation) to face shape result after distortion correction, complete
It is converted at alignment of the interference detection data from detection coordinate system to machine tooling coordinate system is completed after interpolation calculation.The present invention
Result can be completed to will test and transform to operation in machining tool coordinate system, provide safeguard, have for final restrain of face shape
The advantages that alignment precision is high, demarcating steps are simple.
Detailed description of the invention
Fig. 1 is target disc schematic diagram.
Fig. 2 is interference light path schematic diagram.
Fig. 3 is that target interferes schematic diagram in testing result.
Fig. 4 is target in reflector position schematic diagram.
Fig. 5 is result of interference by shape schematic diagram behind distortion correction.
Fig. 6 is shape result schematic diagram behind interpolation calculation.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
On the whole, splicing alignment methods include the following steps: the present invention
One, in optical mirror surface mount target disc, target disc center is cross hairs, and it is not small that target pastes quantity
In 3 (especially be not less than 5), at the same guarantee each target be not arranged on the same straight line (by taking non-spherical reflector as an example, due to
The non-spherical reflector is curved surface, then projection of each target in the plane perpendicular to optical axis, is not arranged on the same straight line；
That is, there is target outside straight line)；
Two, interference detection is completed to optical mirror, interference testing result is denoted as Maptest；
Three, target position in testing result 1 is demarcated, target disc shown as in interference testing result it is round or
Ellipse (for non-spherical reflector, interferes testing result to there is distortion, therefore target disc shows in interference testing result
For ellipse), which can be read (by taking ellipse as an example, for circle display as a result, it can be with by interference testing result
Regard a kind of long axis ellipse equal with short axle as, without loss of generality) marginal position, target disc is in interference testing result
It is respectively x that its maximum and minimum pixel value in horizontal X direction can be marked respectivelymaxWith xmin；The maximum of vertical Y-direction with
Minimum pixel value is respectively ymaxWith ymin.Then the pixel coordinate at the target disc center is ((xmax+xmin)/2,(ymax+ymin)/
2), this calibration result is denoted as Targettest；
Four, reflecting mirror is moved into machining tool, demarcating each target center respectively using machining tool gauge head is that cross hairs is burnt
Position coordinates at point, this calibration result are denoted as Targetprocess；
Five, the Target in step 3 is utilizedtestWith the Target in step 4process, complete to interfere optical mirror
Testing result MaptestDistortion correction and alignment, distortion correction and alignment after result be denoted as Mapcorrect；
Six, to result Map after distortion correction and alignmentcorrectIn target at carry out data filling, this is filled up based on three
Angle subdivision interpolation is completed, and is filled up rear result and is denoted as Mapinterp；
Seven, after completing step 6 interpolation calculation, as a result MapinterpFace shape result after being as registered to machining tool, it is complete
At alignment.
Using this method, the interference testing result of reflecting mirror can be transformed into machining tool coordinate system.
Embodiment 1
As shown in Figure 1, being target disc schematic diagram, target disc center has cross hairs；It is done to aspherical mirror
Before relating to detection, above-mentioned target disc is pasted in specular surface, target quantity is no less than five, while guaranteeing each target not same
On straight line；
For non-spherical reflector, interfere light path can be as shown in Fig. 2, needing to utilize compensating element, in interference detection
Aspherical mirror is compensated to realize that (i.e. every incident ray enters along aspherical mirror normal zero testing to aspherical mirror
It penetrates, while along normal emergence).Compensation is detected, distortion can be introduced by interfering in testing result, i.e., for circular reflector
Face shows as elliptical shape in interference testing result.For the target disc of circular reflector surface mount, interfering
The black hole of ellipse is shown as in testing result；In the data format form of expression, interferes and do not pasted at target in testing result
Data mode is (x, y, z), wherein x, and y is pixel coordinate in interferometer, and z is the phase at corresponding pixel points coordinate (x, y)
Value；For pasting at target in interference testing result, data format is (x, y, No data), i.e., at target corresponding pixel points
Without detection data；
Interference detection is completed to non-spherical reflector, after obtaining corresponding interference testing result, as shown in Figure 3 (in figure
Black portions are represented at position without detection data, indicate there is qualified detection data at this at non-blacking), interference inspection need to be read
Survey the pixel coordinate (x, y) in result at each target center.By taking target 1 as an example, at x pixel orientation left side edge
Pixel coordinate is xmin, the pixel coordinate at x pixel orientation right side edge is xmax, then 1 center of target is in the pixel side x
To coordinate be (xmax+xmin)/2；Similarly, pixel coordinate of the target 1 at y pixel orientation lower edge is ymin, in y picture
The pixel coordinate of plain direction upper edge is ymax, then 1 center of target is (y in the coordinate of y pixel orientationmax+ymin)/2。
Read each target center location of pixels (x in interference testing resulti,yi), i=1, after 2,3..., by optical frames
Face moves to machining tool, reads position coordinates of each target cross hairs center under machining tool coordinate system using lathe gauge head
(Xi,Yi), i=1,2,3....
After completing to read each target center, need to carry out distortion correction to interference testing result.
Aspherical mirror equation may be expressed as:
Wherein c is aspherical female mirror vertex curvature, and K is circular cone coefficient, S2=x2+y2, wherein z is optical axis direction, and x, y are
With optical axis vertical plane coordinate system, then the normal vector of aspherical upper point (x, y, z) beWherein:
For compensating element, can indicate are as follows:
Ysin α+α=0 (z-d) cos (4)
Wherein d is aspherical mirror vertex along optical axis and compensating element, plane focal point line segment length；α is aspherical mirror optical axis
With the angle of compensating element, interplanar；It can preset；
By deriving, based on above-mentioned basic definition, distortion correction equation can be obtained:
Wherein, k is the enlargement ratio for interfering testing result to be transformed into machining tool coordinate system；θinterferometerFor interference inspection
Survey the rotation angle that result is transformed into machining tool coordinate system；xcompensatorIt is flat to compensating element, for the coordinate transform of mirror surface X-direction
The x coordinate in face；ycompensatorFor mirror surface Y-direction coordinate transform to the y-coordinate of compensating element, plane；(xmir,ymir,zmir) it is mirror
Some coordinates in face；(0,ypo,zpo) it is that coordinate value of the aspherical mirror coordinate origin under machine tooling coordinate system (can be by preparatory
Setting, it is ensured that 0) aspherical mirror coordinate origin, i.e. mirror surface center origin, the x coordinate value under machine tooling coordinate system are；
(xinterferometer,yinterferometer) it is mirror surface a bit (xmir,ymir) transform to pixel coordinate in interferometer CCD；
(xinterferometer0,yinterferometer0) it is that mirror surface center origin transforms to interferometer CCD coordinate under machine tooling coordinate system
Pixel coordinate under system；
Mirror surface coordinate system and lathe coordinate system both correspond to Descartes right angle space coordinates, can be all made of one it is specific
Lathe coordinate system；In addition to θinterferometerOutside, subscript has interferometer (interferometer) then corresponding to dry in formula (5)
The CCD coordinate system of interferometer, i.e. pixel coordinate.
The test knot of transformation relation and target in interference detection coordinate system and machining tool coordinate system according to formula (5)
Fruit calculates according to least square fitting, can find out the k and θ in (5) formulainterferometer。
According to above-mentioned solving result and the transformation relation of formula (5), interference testing result is transformed into machining tool coordinate system
Result afterwards is as shown in figure 5, as seen from Figure 5, oval target shape becomes and true form phase after distortion correction
Consistent circle, while mirror surface test shape is also corrected as mirror surface true shape.In Fig. 5, the data point at target is still lacked,
It needs to fill up it using interpolation method, interpolation method uses Delaunay Triangulation interpolation.First to Fig. 5 institute registration
According to Delaunay Triangulation calculating is carried out, after completing triangulation and calculating, each pixel at target position exists
Within one triangle, by taking a certain pixel (x, y) in target as an example, it is located at (x1,y1,z1), (x2,y2,z2), (x3,y3,
z3) three points are formed by plane, then plane equation is constructed using above three coordinate points:
Ax+by+z+d=0 (6)
By (x1,y1,z1), (x2,y2,z2), (x3,y3,z3) 3 coordinates are brought into formula (6) can acquire plane equation system
Number a, b, d, as shown in formula (7).
Corresponding pixel points coordinate (x, y) in target is brought into the plane equation (6) acquired, the pixel can be acquired
Corresponding phase value z, to complete corresponding interpolation calculation.
After all the points complete interpolation calculation in target, obtained correspondence reflecting mirror surface shape alignment result is as shown in Figure 6.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (5)
1. a kind of interference based on target disc detects alignment methods, which comprises the following steps:
(1) in optical mirror surface mount target disc, the center of the target disc is cross hairs, the stickup number of the target
Amount is not less than 3, and the center of projection of these targets on the plane perpendicular to the optical mirror optical axis is straight not in same
On line；
(2) interference detection is carried out to the optical mirror, interference testing result is denoted as Maptest；
(3) Map that the step (2) is obtainedtestMiddle corresponding target target area is demarcated, and determines that these targets correspond to area
The marginal position in domain, then for any one of target disc, in interference testing result MaptestIt is middle to mark respectively
The max pixel value x of pixel level X-direction corresponding with the target discmaxWith minimum pixel value xmin, the vertical Y-direction of pixel
Max pixel value ymaxWith minimum pixel value ymin, obtain central point pixel coordinate (x corresponding with the target disc centermax+
xnnn)/2/(ymax+ymin)/2)；By being demarcated one by one to all target discs, obtain under interferometer CCD coordinate system with
The corresponding location position in all target disc centers is as a result, remember that the calibration result is Targettest；
(4) optical mirror is moved into machining tool, demarcating each target center respectively using machining tool gauge head is ten
The position coordinates of wordline focal point obtain the position coordinates knot corresponding with all target disc centers under machining tool coordinate system
Fruit, the result are denoted as Targetprocess；
(5) Target obtained using the step (3)testThe Target obtained with the step (4)process, to optical reflection
Mirror interferes testing result MaptestCarry out distortion correction be aligned, and the result after distortion correction and alignment is denoted as
Mapcorrect；
(6) the result Map after the distortion correction and alignment obtained based on interpolation calculation to the step (5)correctIn correspond to target
Target area carries out data filling, fills up rear result and is denoted as Mapinterp；Result MapinterpAs optical mirror is registered to
Thus face shape result after machining tool completes interference detection alignment.
2. the interference based on target disc detects alignment methods as described in claim 1, which is characterized in that when the optical reflection
When mirror is non-spherical reflector, the interference in the step (2) is detected as the zero testing using compensating element, described
MaptestMiddle corresponding target target area shows as ellipse；
The interference testing result MaptestIn, the interference testing result corresponding to any one position in non-target sticking area
Its form of data is (x, y, z), wherein x, and y is pixel coordinate in interferometer, and z is the phase at corresponding pixel points coordinate (x, y)
Place value；Its form of interference testing result data of any one position is (x, y, No data) in corresponding target target area, wherein
X, y are still pixel coordinate in interferometer.
3. the interference based on target disc detects alignment methods as claimed in claim 2, which is characterized in that note aspherical mirror equation
Are as follows:
Wherein, c is aspherical female mirror vertex curvature, and K is circular cone coefficient, S2=x2+y2, wherein z is optical axis direction, and x, y are and light
Axis vertical plane coordinate system, then the normal vector of aspherical upper point (x, y, z) beWherein:
Then, the distortion correction in the step (5) meets following distortion correction equation with being aligned:
In the equation (5), d is preset non-spherical reflector vertex along optical axis and compensating element, plane focal point length along path
Degree；α is the angle of preset aspheric surface reflector and compensating element, interplanar；K is that interference testing result is transformed into
The enlargement ratio of machining tool coordinate system；θinterferometerThe rotation angle of machining tool coordinate system is transformed into for interference testing result
Degree；xcompensatorFor mirror surface X-direction coordinate transform to the x coordinate of compensating element, plane；ycompensatorFor mirror surface Y-direction coordinate
Transform to the y-coordinate of compensating element, plane；(xmir,ymir,zmir) it is some coordinates of mirror surface under machine tooling coordinate system；(0,
ypo,zpo) it is coordinate value of the aspherical mirror coordinate origin under machine tooling coordinate system；(xinterferometer,yinterferometer) be
A bit (x of mirror surface under machine tooling coordinate systemmir,ymir) transform to pixel coordinate under interferometer CCD coordinate system；
(xinterferometer0,yinterferometer0) it is that mirror surface center origin transforms to interferometer CCD coordinate under machine tooling coordinate system
Pixel coordinate under system；
The Target that the step (3) is obtainedtestThe Target obtained with the step (4)processSubstitute into the equation
(5) it in, is calculated according to least square fitting and solves k and θinterferometer, and substitute into the equation (5), it obtains updated
Equation (5)；
Then, using the updated equation (5) to the Map for obtaining the step (2)testCarry out distortion correction with
Alignment, to obtain the result Map after distortion correction and alignmentcorrect。
4. the interference based on target disc detects alignment methods as described in claim 1, which is characterized in that remember the total quantity of target
For N, the then Target that the step (3) obtainstestIncluding (xi,yi), i=1,2,3..., N；
The Target that the step (4) obtainsprocessIncluding (Xi,Yi), i=1,2,3..., N；
Preferably, N >=5.
5. the interference based on target disc detects alignment methods as described in claim 1, which is characterized in that in the step (6),
The data filling is based on interpolation calculation, and the interpolation calculation is preferably triangulation interpolation.
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| CN110553586A (en) * | 2019-09-11 | 2019-12-10 | 吉林大学 | method for detecting object surface data point set based on machine vision |
| CN111678672A (en) * | 2020-05-20 | 2020-09-18 | 西安昆仑工业（集团）有限责任公司 | Rapid alignment method for optical autocollimator target |
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| CN110553586B (en) * | 2019-09-11 | 2020-12-25 | 吉林大学 | Method for detecting object surface data point set based on machine vision |
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