CN109099848B - Three-dimensional displacement measuring sensor based on polymer optical fiber - Google Patents
Three-dimensional displacement measuring sensor based on polymer optical fiber Download PDFInfo
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- CN109099848B CN109099848B CN201811118080.5A CN201811118080A CN109099848B CN 109099848 B CN109099848 B CN 109099848B CN 201811118080 A CN201811118080 A CN 201811118080A CN 109099848 B CN109099848 B CN 109099848B
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Abstract
The invention discloses a three-dimensional displacement measuring sensor based on polymer optical fibers, which is used for measuring displacement in three directions, and comprises X, Y, Z shaft directions, wherein each direction corresponds to a passive optical fiber, the passive optical fibers in the three directions are twisted with active optical fibers to form twisted-pair optical fibers, one section of each of the twisted-pair optical fibers in the three directions is fixed on a movable plate in the three directions of XYZ, the rest parts are respectively bent to form a circle to form three macrobend coupling structures, the action is that light in the active optical fibers can be coupled into each passive optical fiber, an optical power meter corresponding to the end part of the passive optical fibers can detect the light intensity, the bending radius of each macrobend coupling structure is reduced by the movement of the movable plate in the three directions and the increase of the displacement, so that the active optical fibers couple more light into the passive optical fibers, and the light intensity detected by the three optical power meters is changed, thereby measuring the displacement change in three directions and converting the light intensity into displacement.
Description
Technical Field
The invention relates to the application field of optical fiber macrobend coupling, in particular to a multidimensional displacement measuring sensor based on polymer optical fibers, which is suitable for industrially detecting displacement in a three-dimensional direction.
Background
There are some obvious problems in industrial applications that require the use of directional displacement sensors to measure two, three or more dimensional displacements. Conventional displacement sensors are of the magnetic induction, photoelectric, potentiometer, transformer, hall type, winding, capacitive type, etc. These conventional displacement sensors are relatively mature technologies and are deployed in various industrial applications. However, the conventional method has many disadvantages in addition to some advantages, and a compatible technique of such conventional techniques is an optical fiber-based system. These fiber optic sensors have the following outstanding advantages: the optical fiber sensor has the advantages of non-electrical property, explosion resistance, small volume, light weight, high precision and high accuracy, is not influenced by electromagnetic interference (EMI) and Radio Frequency Interference (RFI), and can facilitate distributed sensing.
Of the last few studies, FOS has met with great success in research and implementation in real-world environments. Most studies have been conducted on one-dimensional (1D) displacement measuring sensors, and many related technologies have been invented. One-dimensional sensing techniques used in commercial systems are based on intensity sensors, triangulation sensors, time-of-flight sensors, confocal sensors, interferometric sensors, measurements of velocity and vibration, based on continuous distance measurements and direct velocity measurements-doppler sensing. While some optical system-based measurements are multi-wavelength and scanning interferometry, frequency modulated continuous wave time-of-flight and self-mixing interferometry. All these reported methods are based on a non-contact one-dimensional displacement system, whereas the macrocurved fiber bragg grating FBG is a contact one-dimensional displacement sensor. However, under certain conditions it may still be desirable to measure one dimension in another direction, for example, the x-axis and the y-axis.
For two-dimensional measurement, a simple method is to use two one-dimensional displacement sensor suites to realize two-dimensional displacement measurement. However, deploying a suite of two one-dimensional structures, the system would be more complex and crowded and would operate as two different arrangements. This concept is inconvenient to use and increases the cost of the overall system. For two-dimensional displacement measurements, most studies have completed optical-based methods, including speckle pattern interferometry, image processing algorithms, laser doppler, and authorized interferometry. These systems are suitable for two-dimensional applications, and when sensing is required in a real physical environment but measurements in three directions are required to complete three-axis (x, y and z-axis) measurements, there is still a lack of one direction in two-dimensional displacement measurements. The present invention proposes a multi-dimensional displacement measurement system to solve this problem.
The conventional three-dimensional sensor is based on the piezoelectric semiconductor PSC method, which was first proposed by Hutson. After he, several techniques for extending the range of PSC sensors have been proposed, such as extended cell method (XFEM), extended displacement discontinuity method (EDD), Boundary Element Method (BEM), distributed dislocation method. These methods have high sensitivity and accuracy, but these systems have complex mathematical and numerical models. The 3-axis stage (XYZ) is widely used in semiconductor manufacturing and inspection machines scanning probe microscopes, optical microscopes and laser writing systems. Laser interferometers have many advantages in selecting high resolution, fast, small measurement ranges, but these systems are susceptible to environmental influences such as air humidity, air pressure and air temperature. Another system for measuring three-dimensional displacement is a combination of XY network encoders that measure the x-y axes, with the third direction, the z-axis, being measured by a capacitive displacement sensor.
To avoid environmental interference, fiber-based displacement sensors are the best choice to achieve high resolution, high accuracy and sensitivity. In a sense, there are two well-known types of optical fibers, crystal fibers and polymer fibers. Compared with standard crystal optical fiber, the polymer optical fiber has the advantages of flexibility, low cost and easy bending. However, grating fibers are used by some researchers to measure three-dimensional and multi-dimensional displacements. This method requires three FBGs and three optical filters to ensure operation at different frequencies. However, this method is expensive, requires signal processing, and cannot be widely used.
Based on the above drawbacks, a new type of multidimensional displacement sensor with low cost, high precision and high sensitivity is needed.
Disclosure of Invention
The invention provides a three-dimensional displacement measuring sensor based on a polymer optical fiber, aiming at solving the problems that the existing multi-dimensional displacement sensor is easy to interfere, or has low precision or higher cost.
The invention is realized by the following technical scheme: a three-dimensional displacement measurement sensor based on polymer optical fibers comprises an X axis, a Y axis, a Z axis, first passive optical fibers, second passive optical fibers, third passive optical fibers and active optical fibers, wherein the first passive optical fibers, the second passive optical fibers and the third passive optical fibers are twisted with the active optical fibers in a twisted mode, one end of each active optical fiber is connected with an LED light source and then is twisted with the first passive optical fibers in a twisted mode to form first twisted-pair optical fibers, the initial section of each first twisted-pair optical fiber is fixed on an X-axis moving plate, the rest of each first twisted-pair optical fiber is bent to form a circular shape to form a first macro-bend coupling structure, the first macro-bend coupling structure is located in an XY plane, the initial end of each first passive optical fiber is idle, and the other end of each first twisted-pair optical fiber is connected with a first optical power meter; the active optical fiber and the first passive optical fiber are twisted in a twisted manner with the second passive optical fiber after being twisted in a twisted manner to form a second twisted fiber, the starting end of the second twisted fiber is fixed by a first clamp, the starting section of the second twisted fiber rotates around the circular section of the first twisted fiber for one circle to form a second macrobend coupling structure, then the second macrobend coupling structure penetrates through the lower part of the first twisted fiber, the tail section of the second twisted fiber is fixed on a Y-axis moving plate, the second passive optical fiber at the tail end of the second twisted fiber is connected with a second optical power meter, and the second macrobend coupling structure is positioned in an XY plane; the active optical fiber and the second passive optical fiber are twisted in a twisted mode after being twisted in a twisted mode to form a third twisted fiber, the starting end of the third twisted fiber is fixed through a second hoop, the third twisted fiber is bent into a round shape to form a third macro-bending coupling structure, the third macro-bending coupling structure is located in an XZ plane, the tail end section of the third twisted fiber is fixed on a Z-axis moving plate, and the third passive optical fiber at the tail end of the third twisted fiber is connected with a third optical power meter.
The invention provides a three-dimensional displacement measuring sensor based on polymer optical fibers, which is used for measuring displacement in three directions, including an X-axis direction, a Y-axis direction and a Z-axis direction, wherein each direction corresponds to a passive optical fiber, the passive optical fibers in the three directions are twisted with active optical fibers to form twisted-pair optical fibers (the active optical fibers are connected with an LED light source, so that light of the LED light source is sent to the active optical fibers), one section of each of the twisted-pair optical fibers formed in the three directions is fixed on a movable plate in the three directions of XYZ, in order to move the twisted-pair optical fibers in the three directions, the rest parts are respectively bent into a circle to form three macrobend coupling structures, the function is to enable the light in the active optical fibers to be coupled into each passive optical fiber, an optical power meter corresponding to the end part of the passive optical fibers can detect the light intensity, and the displacement is increased through the movement of the, the bending radius of each macro-bending coupling structure is reduced, so that more light is coupled into the passive optical fiber by the active optical fiber, the light intensity detected by the three optical power meters is changed, the displacement change in three directions is measured, and the light intensity is converted into displacement; the first macrobend coupling structure in the X direction and the second macrobend coupling structure in the Y direction are located in an XY plane, and the third macrobend coupling structure in the Z direction is located in an XZ plane. In order to prevent mutual influence or interference of displacement measurement in three directions, the starting ends of the twisted-pair fibers in the Y direction are fixed through the first clamp, the starting ends of the twisted-pair fibers in the Z direction are fixed through the second clamp, and the two starting ends are optical fiber replacement positions where the passive optical fibers and the active optical fibers in two directions are twisted.
The invention has the following specific operations: the displacement measuring method of the three-dimensional displacement measuring sensor based on the polymer optical fiber comprises the following steps
① LED light source emits light, in the first twisted pair fiber, the light intensity of the active fiber is coupled into the first passive fiber, and the light intensity initial value is detected in the first optical power meter;
② an X-axis moving plate is located on an X axis, a Y-axis moving plate is located on a Y axis, a Z-axis moving plate is located on a Z axis, the Y-axis moving plate and the Z-axis moving plate are kept fixed, the X-axis moving plate is pulled, the macroscopic bending radius of the first twisted fiber is reduced along with the increase of the X-axis displacement, the light intensity detected in the first optical power meter begins to increase, when the X-axis displacement is reduced from large to small, the light intensity detected in the first optical power meter begins to reduce, and the change of the X-axis displacement is detected through the change of the light intensity detected in the first optical power meter;
③, fixing the X-axis moving plate and the Z-axis moving plate, pulling the Y-axis moving plate, reducing the macroscopic bending radius of the second twisted fiber along with the increase of the Y-axis displacement, increasing the light intensity detected in the second optical power meter, reducing the light intensity detected in the second optical power meter when the Y-axis displacement is changed from big to small, and detecting the change of the Y-axis displacement through the change of the light intensity detected in the second optical power meter;
④, the X-axis moving plate and the Y-axis moving plate are kept fixed, the Z-axis moving plate is pulled, the macroscopic bending radius of the third twisted-pair fiber is reduced along with the increase of the Z-axis displacement, the light intensity detected in the third optical power meter starts to increase, when the X-axis displacement is reduced, the light intensity detected in the third optical power meter starts to decrease, and the change of the Y-axis displacement is detected through the change of the light intensity detected in the third optical power meter;
⑤ keeping the Z-axis moving plate fixed, pulling the X-axis moving plate and the Y-axis moving plate simultaneously, the macroscopic bending radius of the first twisted fiber and the second twisted fiber decreases along with the increase of the X-axis displacement and the Y-axis displacement, the light intensity detected in the first optical power meter and the second optical power meter starts to increase, and the change of the X-axis displacement and the Y-axis displacement is detected by the light intensity detected in the first optical power meter and the second optical power meter;
⑥ keeping the X-axis moving plate fixed, pulling the Y-axis moving plate and the Z-axis moving plate simultaneously, the macroscopic bending radius of the second twisted-pair fiber and the third twisted-pair fiber decreases along with the increase of the displacement of the Y-axis and the Z-axis, the light intensity detected in the second optical power meter and the third optical power meter starts to increase, and the change of the displacement of the Y-axis and the Z-axis is detected by the light intensity detected in the second optical power meter and the third optical power meter;
⑦ keeping the Y-axis moving plate fixed, pulling the X-axis moving plate and the Z-axis moving plate at the same time, the macroscopic bending radius of the first twisted-pair fiber and the third twisted-pair fiber decreases with the increase of the X-axis and Z-axis displacement, the light intensity detected in the first optical power meter and the third optical power meter starts to increase, and the change of the X-axis and Z-axis displacement is detected by the light intensity detected in the first optical power meter and the third optical power meter;
⑧ pulling the X-axis moving plate, the Y-axis moving plate and the Z-axis moving plate at the same time, the macrobend radius of the first twisted fiber, the second twisted fiber and the third twisted fiber decreases with the increase of the displacement of the X-axis, the Y-axis and the Z-axis, the light intensity detected in the first optical power meter, the second optical power meter and the third optical power meter starts to increase, and the change of the displacement of the X-axis, the Y-axis and the Z-axis is detected by the change of the light intensity detected in the first optical power meter, the second optical power meter and the third optical power meter;
compared with the prior art, the invention has the following beneficial effects: the invention provides a new three-dimensional displacement measurement sensor system which comprises the following components: the POF is used for multi-dimensional displacement measurement for the first time, and the system can be used for macro bending phenomenon, so that optical power loss when bending is increased or reduced is ensured; the twisted pair structure is used for receiving data to measure the optical power in all directions; in addition, three twinning processes are carried out on a single light-transmitting fiber for the first time to realize three-dimensional measurement, and even the invention can be extended to multi-dimensional measurement. The invention has wider measurable range, good sensitivity and accuracy, simple structure, easy construction, low cost and easy operation control, and does not need additional signal processing to obtain displacement information.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a characteristic diagram of displacement in the X-axis direction versus optical power when the moving plate moves in three directions.
Fig. 3 is a characteristic diagram of displacement in the Y-axis direction versus optical power when the moving plate in three directions moves.
Fig. 4 is a characteristic diagram of displacement in the Z-axis direction versus optical power when the moving plate moves in three directions.
The figures are labeled as follows:
1-LED light source, 2-first optical power meter, 3-second optical power meter, 4-third optical power meter, 5-first clamp, 6-second clamp, 7-X axis moving plate, 8-Y axis moving plate, 9-Z axis moving plate, 10-active optical fiber, 11-first passive optical fiber, 12-second passive optical fiber, 13-third passive optical fiber, 14-first twisted fiber, 15-second twisted fiber and 16-third twisted fiber.
Detailed Description
The present invention is further illustrated by the following specific examples.
A three-dimensional displacement measuring sensor based on polymer optical fiber, as shown in fig. 1: the active fiber structure comprises an X axis, a Y axis, a Z axis, a first passive fiber 11, a second passive fiber 12, a third passive fiber 13 and an active fiber 10, wherein the first passive fiber 11, the second passive fiber 12 and the third passive fiber 13 are twisted with the active fiber 10 in a twisted manner, one end of the active fiber 10 is connected with an LED light source 1 and then twisted with the first passive fiber 11 to form a first twisted-pair fiber 14, the initial section of the first twisted-pair fiber 14 is fixed on an X axis moving plate 7, the rest part of the first twisted-pair fiber 14 is bent to form a round shape to form a first macro-bend coupling structure, the first macro-bend coupling structure is located in an XY plane, the initial end of the first twisted-pair fiber 14, of the first passive fiber 11 is idle, and the other end of the first twisted-pair fiber is connected with a first optical power meter 2; the active optical fiber 10 and the first passive optical fiber 11 are twisted in a twisted manner with the second passive optical fiber 12 after being twisted in a twisted manner to form a second twisted-pair fiber 15, the starting end of the second twisted-pair fiber 15 is fixed by the first clamp 5, the starting section of the second twisted-pair fiber 15 rotates around the circular section of the first twisted-pair fiber 14 for one circle to form a second macrobend coupling structure, then the second macrobend coupling structure penetrates through the lower part of the first twisted-pair fiber 14, the tail section of the second twisted-pair fiber 15 is fixed on the Y-axis moving plate 8, the second passive optical fiber 12 at the tail end of the second twisted-pair fiber is connected with the second optical power meter 3, and the second macrobend coupling structure is located in the XY plane; the active optical fiber 10 and the second passive optical fiber 12 are twisted in pairs after being twisted in pairs to form a third twisted-pair fiber 16, the starting end of the third twisted-pair fiber 16 is fixed by a second hoop 6, the third twisted-pair fiber 16 is bent into a round shape to form a third macrobend coupling structure, the third macrobend coupling structure is located in an XZ plane, the tail end of the third twisted-pair fiber 16 is fixed on the Z-axis moving plate 9, and the third passive optical fiber 13 at the tail end of the third twisted-pair fiber is connected with the third optical power meter 4.
In this embodiment, a preferable scheme is adopted, and the first passive optical fiber 11, the second passive optical fiber 12, the third passive optical fiber 13, and the active optical fiber 10 all adopt a multimode polymer optical fiber MMPOF.
The displacement measuring method of the three-dimensional displacement measuring sensor based on the polymer optical fiber comprises the following steps
① LED light source 1 emits light, in the first twisted pair fiber 14, the light intensity of the active optical fiber 10 is coupled into the first passive optical fiber 11, and the initial value of the light intensity is detected in the first optical power meter 2, in the second twisted pair fiber 15, the light intensity of the active optical fiber 10 is coupled into the second passive optical fiber 12, and the initial value of the light intensity is detected in the second optical power meter 3;
② an X-axis moving plate 7 is located on an X axis, a Y-axis moving plate 8 is located on a Y axis, a Z-axis moving plate 9 is located on a Z axis, the Y-axis moving plate 8 and the Z-axis moving plate 9 are kept fixed, the X-axis moving plate 7 is pulled, the macroscopic bending radius of the first twisted fiber 14 is reduced along with the increase of the X-axis displacement, the light intensity detected in the first optical power meter 2 begins to increase, when the X-axis displacement is reduced from large to small, the light intensity detected in the first optical power meter 2 begins to reduce, and the change of the X-axis displacement is detected through the change of the light intensity detected in the first optical power meter 2;
③, the X-axis moving plate 7 and the Z-axis moving plate 9 are kept fixed, the Y-axis moving plate 8 is pulled, the macrobending radius of the second twisted fiber 15 is reduced along with the increase of the Y-axis displacement, the light intensity detected in the second optical power meter 3 starts to increase, when the Y-axis displacement is reduced from large to small, the light intensity detected in the second optical power meter 3 starts to reduce, and the change of the Y-axis displacement is detected through the change of the light intensity detected in the second optical power meter 3;
④, the X-axis moving plate 7 and the Y-axis moving plate 8 are kept fixed, the Z-axis moving plate 9 is pulled, the macroscopic bending radius of the third twisted-pair fibers 16 is reduced along with the increase of the Z-axis displacement, the light intensity detected in the third optical power meter 4 starts to increase, when the X-axis displacement is reduced from large to small, the light intensity detected in the third optical power meter 4 starts to decrease, and the change of the Y-axis displacement is detected through the change of the light intensity detected in the third optical power meter 4;
⑤ keeping the Z-axis moving plate 9 fixed, pulling the X-axis moving plate 7 and the Y-axis moving plate 8 at the same time, the macrobending radius of the first twisted fiber 14 and the second twisted fiber 15 decreases with the increase of the X-axis and Y-axis displacement, the light intensity detected in the first optical power meter 2 and the second optical power meter 3 starts to increase, the change of the X-axis and Y-axis displacement is detected by the light intensity change detected in the first optical power meter 2 and the second optical power meter 3;
⑥ keeping the X-axis moving plate 7 fixed, pulling the Y-axis moving plate 8 and the Z-axis moving plate 9, the macrobend radius of the second twisted-pair fiber 15 and the third twisted-pair fiber 16 decreases with the increase of the Y-axis and Z-axis displacement, the light intensity detected in the second optical power meter 3 and the third optical power meter 4 starts to increase, the change of the Y-axis and Z-axis displacement is detected by the light intensity change detected in the second optical power meter 3 and the third optical power meter 4;
⑦ keeping the Y-axis moving plate 8 fixed, pulling the X-axis moving plate 7 and the Z-axis moving plate 9, the macrobend radius of the first twisted fiber 14 and the third twisted fiber 16 decreases with the increase of the X-axis and Z-axis displacement, the light intensity detected in the first optical power meter 2 and the third optical power meter 4 starts to increase, the change of the X-axis and Z-axis displacement is detected by the light intensity change detected in the first optical power meter 2 and the third optical power meter 4, if one or both of the X-axis and Z-axis displacement is decreased, the corresponding light intensity change can be detected by the corresponding optical power meter to detect the displacement change in each direction;
⑧, the X-axis moving plate 7, the Y-axis moving plate 8 and the Z-axis moving plate 9 are pulled simultaneously, the macro bending radii of the first twisted fiber 14, the second twisted fiber 15 and the third twisted fiber 16 decrease with the increase of the X-axis displacement, the Y-axis displacement and the Z-axis displacement, the light intensities detected in the first optical power meter 2, the second optical power meter 3 and the third optical power meter 4 start to increase, the changes of the X-axis displacement, the Y-axis displacement and the Z-axis displacement are detected by the changes of the light intensities detected in the first optical power meter 2, the second optical power meter 3 and the third optical power meter 4, and if one or two or three of the X-axis displacement, the Y-axis displacement and the Z-axis displacement are decreased, the corresponding light intensity changes are detected by the corresponding optical power meters to detect the changes of the displacements in all directions.
In this embodiment, the displacement in three directions is measured by pulling the X-axis moving plate 7, the Y-axis moving plate 8, and the Z-axis moving plate 9 at the same time: the output power of the LED light source 1 is set to be 30mW, the resolution of the LED light source 1 is 1nW, and the working wavelength is 660 nm; when the displacements in the three directions of XYZ are all 0mm, the initial coupling power is 42nW on the X axis, 62nW on the Y axis, and 88nW on the Z axis, in this embodiment, the moving step length in each direction is set to 10mm, and the measuring range is 0 to 140mm in each direction, then the characteristic diagram corresponding to the displacement in the X axis direction and the optical power is obtained as shown in fig. 2, the characteristic diagram corresponding to the displacement in the Y axis direction and the optical power is obtained as shown in fig. 3, and the characteristic diagram corresponding to the displacement in the Z axis direction and the optical power is obtained as shown in fig. 4. All three figures show good consistency and repeatability of optical power and displacement over a 140mm displacement.
The scope of the invention is not limited to the above embodiments, and various modifications and changes may be made by those skilled in the art, and any modifications, improvements and equivalents within the spirit and principle of the invention should be included in the scope of the invention.
Claims (3)
1. A three-dimensional displacement measurement sensor based on polymer optical fiber is characterized in that: the active optical fiber and the LED light source are characterized by comprising an X axis, a Y axis, a Z axis, a first passive optical fiber (11), a second passive optical fiber (12), a third passive optical fiber (13) and an active optical fiber (10), wherein the first passive optical fiber (11), the second passive optical fiber (12) and the third passive optical fiber (13) are twisted with the active optical fiber (10), after one end of the active optical fiber (10) is connected with the LED light source (1), the first passive optical fiber (11) and the first passive optical fiber (11) are twisted with each other firstly to form a first twisted fiber (14), the initial section of the first twisted fiber (14) is fixed on an X axis moving plate (7), the rest part of the first twisted fiber (14) is bent to form a circular shape to form a first macro-bend coupling structure, the first macro-bend coupling structure is located in the XY plane, the initial end, located on the first twisted fiber (14), of the first passive optical fiber (11) is idle, and the other end of; the active optical fiber (10) and the first passive optical fiber (11) are twisted in a twisted manner and then twisted with the second passive optical fiber (12) to form a second twisted fiber (15), the starting end of the second twisted fiber (15) is fixed by a first clamp (5), the starting section of the second twisted fiber (15) rotates around the circular section of the first twisted fiber (14) for one turn to form a second macrobend coupling structure, then the second twisted fiber passes through the lower part of the first twisted fiber (14), the tail section of the second twisted fiber (15) is fixed on a Y-axis moving plate (8), the second passive optical fiber (12) at the tail end of the second twisted fiber is connected with a second optical power meter (3), and the second macrobend coupling structure is located in an XY plane; the active optical fiber (10) and the second passive optical fiber (12) are twisted in pairs after being twisted in pairs, and then twisted in pairs with the third passive optical fiber (13) to form a third twisted-pair fiber (16), the starting end of the third twisted-pair fiber (16) is fixed by a second hoop (6), the third twisted-pair fiber (16) is bent into a round shape to form a third macrobend coupling structure, the third macrobend coupling structure is located in an XZ plane, the tail end section of the third twisted-pair fiber (16) is fixed on a Z-axis moving plate (9), and the third passive optical fiber (13) at the tail end of the third twisted-pair fiber is connected with a third optical power meter (4).
2. The polymer optical fiber-based three-dimensional displacement measuring sensor according to claim 1, wherein: the first passive optical fiber (11), the second passive optical fiber (12), the third passive optical fiber (13) and the active optical fiber (10) are all multimode polymer optical fibers MMPOF.
3. The displacement measuring method of the polymer optical fiber-based three-dimensional displacement measuring sensor according to claim 1, wherein: comprises the following steps
①, the LED light source (1) emits light, in the first twisted pair fiber (14), the light intensity of the active optical fiber (10) is coupled into the first passive optical fiber (11), and the initial value of the light intensity is detected in the first optical power meter (2), in the second twisted pair fiber (15), the light intensity of the active optical fiber (10) is coupled into the second passive optical fiber (12), and the initial value of the light intensity is detected in the second optical power meter (3), in the third twisted pair fiber (16), the light intensity of the active optical fiber (10) is coupled into the third passive optical fiber (13), and the initial value of the light intensity is detected in the third optical power meter (4);
② an X-axis moving plate (7) is located on an X axis, a Y-axis moving plate (8) is located on a Y axis, a Z-axis moving plate (9) is located on a Z axis, the Y-axis moving plate (8) and the Z-axis moving plate (9) are kept fixed, the X-axis moving plate (7) is pulled, the macroscopic bending radius of the first twisted fiber (14) is reduced along with the increase of the X-axis displacement, the light intensity detected in the first optical power meter (2) begins to increase, when the X-axis displacement is reduced from large to small, the light intensity detected in the first optical power meter (2) begins to decrease, and the change of the X-axis displacement is detected through the change of the light intensity detected in the first optical power meter (2);
③, the X-axis moving plate (7) and the Z-axis moving plate (9) are kept fixed, the Y-axis moving plate (8) is pulled, the macrobending radius of the second twisted fiber (15) is reduced along with the increase of the Y-axis displacement, the light intensity detected in the second optical power meter (3) begins to increase, when the Y-axis displacement is reduced from large to small, the light intensity detected in the second optical power meter (3) begins to decrease, and the change of the Y-axis displacement is detected through the change of the light intensity detected in the second optical power meter (3);
④, the X-axis moving plate (7) and the Y-axis moving plate (8) are kept fixed, the Z-axis moving plate (9) is pulled, the macrobend radius of the third twisted fiber (16) is reduced along with the increase of the Z-axis displacement, the light intensity detected in the third optical power meter (4) begins to increase, when the X-axis displacement is reduced from large to small, the light intensity detected in the third optical power meter (4) begins to decrease, and the change of the Y-axis displacement is detected through the change of the light intensity detected in the third optical power meter (4);
⑤ keeping the Z-axis moving plate (9) fixed, pulling the X-axis moving plate (7) and the Y-axis moving plate (8) at the same time, the macroscopic bending radius of the first twisted-pair fiber (14) and the second twisted-pair fiber (15) is reduced along with the increase of the X-axis and Y-axis displacement, the light intensity detected in the first optical power meter (2) and the second optical power meter (3) is increased, the change of the X-axis and Y-axis displacement is detected by the light intensity change detected in the first optical power meter (2) and the second optical power meter (3), if one or two of the X-axis and Y-axis displacement is reduced, the displacement change of each direction can be detected by the corresponding light intensity change detected by the corresponding optical power meters;
⑥ keeping the X-axis moving plate (7) fixed, pulling the Y-axis moving plate (8) and the Z-axis moving plate (9) at the same time, the macroscopic bending radius of the second twisted-pair fiber (15) and the third twisted-pair fiber (16) decreases along with the increase of the displacement of the Y-axis and the Z-axis, the light intensity detected in the second optical power meter (3) and the third optical power meter (4) starts to increase, the change of the displacement of the Y-axis and the Z-axis is detected by the change of the light intensity detected in the second optical power meter (3) and the third optical power meter (4), if one or both of the displacement of the Y-axis and the Z-axis is decreased, the displacement change of each direction can be detected by the corresponding light intensity change detected by the corresponding optical power meter;
⑦ keeping the Y-axis moving plate (8) fixed, pulling the X-axis moving plate (7) and the Z-axis moving plate (9) at the same time, the macroscopic bending radius of the first twisted-pair fiber (14) and the third twisted-pair fiber (16) decreases along with the increase of the X-axis and Z-axis displacement, the light intensity detected in the first optical power meter (2) and the third optical power meter (4) starts to increase, and the change of the X-axis and Z-axis displacement is detected by detecting the light intensity change in the first optical power meter (2) and the third optical power meter (4);
⑧, the X-axis moving plate (7), the Y-axis moving plate (8) and the Z-axis moving plate (9) are pulled simultaneously, the macroscopic bending radiuses of the first twisted-pair fiber (14), the second twisted-pair fiber (15) and the third twisted-pair fiber (16) are reduced along with the increase of the displacements of the X-axis, the Y-axis and the Z-axis, the detected light intensities in the first optical power meter (2), the second optical power meter (3) and the third optical power meter (4) are increased, the displacements of the X-axis, the Y-axis and the Z-axis are detected by detecting the changes of the light intensities in the first optical power meter (2), the second optical power meter (3) and the third optical power meter (4), and if one or two or three of the displacements of the X-axis, the Y-axis and the Z-axis are reduced greatly, the corresponding displacement changes in each direction can be detected by the corresponding optical power meters.
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