CN109099848A - Three-D displacement measurement sensor based on polymer optical fiber - Google Patents
Three-D displacement measurement sensor based on polymer optical fiber Download PDFInfo
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- CN109099848A CN109099848A CN201811118080.5A CN201811118080A CN109099848A CN 109099848 A CN109099848 A CN 109099848A CN 201811118080 A CN201811118080 A CN 201811118080A CN 109099848 A CN109099848 A CN 109099848A
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Abstract
The three-D displacement measurement sensor based on polymer optical fiber that the invention discloses a kind of, the measurement just shifted up for three, including X, Y, Z-direction, the corresponding passive fiber in each direction, passive fiber on three directions carries out multiple twin and forms multiple twin fiber with Active Optical Fiber, and multiple twin fiber on three directions it is respective wherein one section be fixed on the movable plate in tri- directions XYZ, remaining part has respectively bent to three macrobend coupled structures of round formation, effect is that the light in Active Optical Fiber is allow to be coupled into each passive fiber, the corresponding light power meter in passive fiber end is set to can detecte out light intensity, pass through the movement of three direction upper shifting boards, the increase of displacement reduces the bending radius of each macrobend coupled structure, to make Active Optical Fiber be coupled into more light to passive fiber, make three light The light intensity that power meter detects changes, to measure the change in displacement on three directions, light intensity is transformed into displacement.
Description
Technical field
The present invention relates to the application field of optical fiber macrobend coupling, specially a kind of multi-dimensional displacement based on polymer optical fiber is surveyed
Quantity sensor, suitable for industrially detecting the displacement on three-dimensional.
Background technique
Have some obvious problems in industrial application, need use direction displacement sensor to measure two dimension, it is three-dimensional or
Multi-dimensional displacement.Traditional displacement sensor has magnetic induction, photoelectricity, potentiometer, transformer, Hall type, winding, condenser type type
Deng.These traditional displacement sensors have all been the technology of comparative maturity, and are deployed in different industrial uses.However,
Conventional method in addition to have the advantages that it is some other than, also there are many insufficient, and the compatible technique of this traditional technology is based on optical fiber
System.These fibre optical sensors have the following prominent advantages: non-electrical, explosion-proof, small in size, light-weight, high-precision, accuracy
Height is not influenced by electromagnetic interference EMI and radio frequency interference RFI, be can be convenient moreover, fibre optical sensor has the advantages that breakthrough
Distributed sensing.
In past research several times, very big success is achieved in terms of research and implementation of the FOS in actual environment.Greatly
Majority research is all to carry out on one-dimensional (1D) displacement measurement sensor, and invented many relevant technologies.For
One-dimensional sensing technology used in business system is based on intensity sensor, triangular measuring transducer, time-of-flight sensor, altogether
Burnt sensor, interferometry sensor, the measurement of speed and vibration are based on continuous range measurement and direct tachometric survey -- and it is how general
Strangle sensing.And some measurements based on optical system be multi-wavelength and scanning interferometer measurement, the CW with frequency modulation flight time and from
Mixed interference measurement.The method of all these reports is all based on non-contacting one dimension displacement system, and the optical fiber of macrobending
Bragg grating FBG is contact one dimension displacement sensor.But still need another side of one-dimensional measurement under certain conditions
To for example, measurement x-axis and y-axis.
For two-dimensional measurement, a kind of simple method is to realize two-dimension displacement using two one dimension displacement sensor suites
Measurement.But the external member of two one-dimentional structures is disposed, system will be more complicated and crowded, and transports as two different settings
Row.This concept uses inconvenience, and increases the cost of whole system.Two-dimension displacement is measured, it is most of to grind
Study carefully and has been completed that, based on optical method, including speckle pattern interferometry, image processing algorithm, laser-Doppler and authorization are dry
Relate to measurement.These systems are suitable for two dimension, and need to measure in three directions when needs sense in actual physical situation
Still to lack a direction in two-dimension displacement measurement when completing three axis (x, y and z-axis) measurement.The present invention proposes multidimensional
Displacement measurement system solves this problem.
Traditional three-dimension sensor is based on piezoelectric semiconductor PSC method, is proposed first by Hutson.At him
Afterwards, the technology for proposing several extension PSC ranges of sensors extends displacement discontinuity element such as expanding element method (XFEM)
(EDD), boundary element method (BEM), distributed dislocation method.The sensitivity with higher of these methods and accuracy, but these are
Uniting has complicated mathematics and numerical model.3 shaft platforms (XYZ) are widely used in semiconductors manufacture and detection machine scans probe is aobvious
Micro mirror, in optical microscopy and Myocardial revascularization bylaser system.In selection high-resolution, quickly, when small measurement range, laser interferometer tool
It has many advantages, but these systems are easily affected by environment, such as air humidity, air pressure and temperature.Another kind measurement three-D displacement
System is the combination of XY network encoder, which measures x-y axis, and third direction z-axis is measured by capacitive displacement transducer.
In order to avoid environmental disturbances, the displacement sensor based on optical fiber is to obtain high-resolution, high-precision and sensitivity
Optimal selection.In a sense, there are two types of well-known optical fiber, i.e. crystal optical fibre and polymer optical fiber.With standard crystalline substance
Body optical fiber is compared, polymer optical fiber have the advantages that it is flexible, cheap, be readily bent.However, grating fibers are used for some research people
Member's three peacekeeping multi-dimensional displacements of measurement.This method needs three FBG and three optical filters, to guarantee to transport at different frequencies
Row.But this method is more expensive, needs to carry out signal processing, cannot be widely used.
Based on drawbacks described above, the cost for needing one kind novel is low, precision is high and the multi-dimensional displacement sensor of high sensitivity.
Summary of the invention
The present invention is in order to solve existing multi-dimensional displacement sensor perhaps vulnerable to interference or precision be low or higher cost
The problem of, provide a kind of three-D displacement measurement sensor based on polymer optical fiber.
The present invention is achieved by the following technical solution: a kind of three-D displacement measurement sensing based on polymer optical fiber
Device, including X-axis, Y-axis and Z axis, the first passive fiber, the second passive fiber, third passive fiber and Active Optical Fiber, described first
Passive fiber, the second passive fiber, third passive fiber with Active Optical Fiber multiple twin, one end of the Active Optical Fiber and LED light
After the connection of source, first with the first passive fiber multiple twin, the first multiple twin fiber is formed, one section of starting of the first multiple twin fiber is solid
It is scheduled in X-axis moving plate, remainder is formed by bending round, forms the first macrobend coupled structure, the first macrobend coupling
Structure is located in X/Y plane, and starting one end that the first passive fiber is located at the first multiple twin fiber is idle, the other end and the first smooth function
The connection of rate meter；Multiple twin is carried out with the second passive fiber after the Active Optical Fiber and the first passive fiber multiple twin, forms second
The starting point of multiple twin fiber, the second multiple twin fiber is fixed by the first clip, one section of ring of starting of the second multiple twin fiber
Around the first multiple twin fiber circle segments rotation turn around after form the second macrobend coupled structure, then pass through under the first multiple twin fiber
One section of the end in portion, the second multiple twin fiber is fixed in Y-axis moving plate, second passive fiber and the second light at end end
Power meter connection, the second macrobend coupled structure are located in X/Y plane；The Active Optical Fiber and the second passive fiber multiple twin knot
Shu Houzai and third passive fiber carry out multiple twin, form third multiple twin fiber, the starting point of the third multiple twin fiber is by second
Clip is fixed, and the third multiple twin fiber bending forms third macrobend coupled structure, the third macrobend coupled structure at circle
In XZ plane, one section of the end of the third multiple twin fiber is fixed on Z axis movable plate, the third passive light at end end
Fibre is connect with third light power meter.
The three-D displacement measurement sensor based on polymer optical fiber that the present invention provides a kind of, shifts up for three sides
Measurement, including X-direction, Y direction and Z-direction, the corresponding passive fiber in each direction is passive on three directions
Optical fiber and Active Optical Fiber carry out multiple twin formation multiple twin fiber (Active Optical Fiber is connect with LED light source, sends the light of LED light source
To Active Optical Fiber), and the respective wherein one section of movement for being fixed on tri- directions XYZ of three multiple twin fibers being just upwardly formed
On plate, in order to make it in the movement in three directions, remaining part has respectively bent to three macrobends couplings of round formation
Structure acts on to allow the light in Active Optical Fiber to be coupled into each passive fiber, makes the corresponding smooth function in passive fiber end
Rate meter can detecte out light intensity, and by the movement of three direction upper shifting boards, the increase of displacement makes each macrobend coupled structure
Bending radius reduces, so that Active Optical Fiber is made to be coupled into more light to passive fiber, the light for detecting three light power meters
It changes by force, to measure the change in displacement on three directions, light intensity is transformed into displacement；First in X-direction is macro
The second macrobend coupled structure in curved coupled structure and Y-direction is located in X/Y plane, the third macrobend coupled structure position in Z-direction
In in XZ plane.The displacement measurement on three directions is influenced each other or is interfered in order to prevent, the starting of the multiple twin fiber of Y-direction
End is fixed by the first clip, and the multiple twin origin of fibers end of Z-direction is fixed by the second clip, and two starting points are two sides
To passive fiber and Active Optical Fiber multiple twin optical fiber replacement at.
Concrete operations of the present invention are as follows: the displacement measurement method of the three-D displacement measurement sensor based on polymer optical fiber, packet
Include following steps
1. LED light source issues light, in the first multiple twin fiber, the light intensity of Active Optical Fiber is coupled into the first passive fiber, the first smooth function
Light intensity initial value is detected in rate meter；In second multiple twin fiber, the light intensity of Active Optical Fiber is coupled into the second passive fiber, the second light
Light intensity initial value is detected in power meter；In third multiple twin fiber, the light intensity of Active Optical Fiber is coupled into third passive fiber, third
Light intensity initial value is detected in light power meter；
2. X-axis moving plate is located in X-axis, Y-axis moving plate is located in Y-axis, and Z axis movable plate is located on Z axis, keeps Y-axis moving plate
Fixed with Z axis movable plate, pull X-axis moving plate, then the macrobending radius of the first multiple twin fiber with the increase that X-axis is displaced and
Reduce, then the light intensity detected in the first light power meter starts to increase, when X-axis displacement from large to small when, then the first light power meter
The light intensity inside detected starts to reduce, and detects the variation of X-axis displacement by detecting light intensity variation in the first light power meter；
3. X-axis moving plate and Z axis movable plate is kept to fix, Y-axis moving plate is pulled, then the macrobending radius of the second multiple twin fiber
Reduce with the increase of Y-axis displacement, then the light intensity detected in the second light power meter starts to increase, when Y-axis is displaced by becoming greatly
Hour, then the light intensity detected in the second light power meter starts to reduce, by detected in the second light power meter light intensity variation come
Detect the variation of Y-axis displacement；
4. X-axis moving plate and Y-axis moving plate is kept to fix, Z axis movable plate is pulled, then the macrobending radius of third multiple twin fiber
Reduce with the increase of Z axis displacement, then the light intensity detected in third light power meter starts to increase, when X-axis is displaced by becoming greatly
Hour, then the light intensity detected in third light power meter starts to reduce, by detected in third light power meter light intensity variation come
Detect the variation of Y-axis displacement；
5. Z axis movable plate is kept to fix, while X-axis moving plate and Y-axis moving plate are pulled, then the first multiple twin fiber and the second multiple twin
The macrobending radius of fiber reduces, inspection in the first light power meter and the second light power meter with the increase that X-axis and Y-axis are displaced
The light intensity measured starts to increase, and detects X-axis by detecting light intensity variation in the first light power meter and the second light power meter
With the variation of Y-axis displacement；If the displacement one or both of them of X-axis and Y-axis is from large to small, corresponding light can be passed through
Power meter detects corresponding light intensity variation to detect the change in displacement of all directions；
6. X-axis moving plate is kept to fix, while Y-axis moving plate and Z axis movable plate are pulled, then the second multiple twin fiber and third multiple twin
The macrobending radius of fiber reduces, inspection in the second light power meter and third light power meter with the increase that Y-axis and Z axis are displaced
The light intensity measured starts to increase, and detects Y-axis by detecting light intensity variation in the second light power meter and third light power meter
With the variation of Z axis displacement；If Y-axis and the displacement one or both of them of Z axis are from large to small, corresponding light can be passed through
Power meter detects corresponding light intensity variation to detect the change in displacement of all directions；
7. Y-axis moving plate is kept to fix, while X-axis moving plate and Z axis movable plate are pulled, then the first multiple twin fiber and third multiple twin
The macrobending radius of fiber reduces, inspection in the first light power meter and third light power meter with the increase that X-axis and Z axis are displaced
The light intensity measured starts to increase, and detects X-axis by detecting light intensity variation in the first light power meter and third light power meter
With the variation of Z axis displacement；If X-axis and the displacement one or both of them of Z axis are from large to small, corresponding light can be passed through
Power meter detects corresponding light intensity variation to detect the change in displacement of all directions；
8. pulling X-axis moving plate, Y-axis moving plate and Z axis movable plate simultaneously, then the first multiple twin fiber, the second multiple twin fiber and the
The macrobending radius of three multiple twin fibers reduces, the first light power meter, the second light with the increase that X-axis, Y-axis and Z axis are displaced
The light intensity detected in power meter and third light power meter starts to increase, by the first light power meter, the second light power meter and
Light intensity variation is detected in third light power meter to detect the variation of X-axis, Y-axis and Z axis displacement；If the displacement of X-axis, Y-axis and Z axis
One or both of them or three from large to small, then can pass through corresponding light power meter and detect corresponding light intensity variation
To detect the change in displacement of all directions；
Compared with prior art the invention has the following advantages: the invention proposes a kind of new three-D displacements to measure sensing
Device system: carrying out multi-dimensional displacement measurement using POF for the first time, which can be used for macrobending phenomenon, it is ensured that bending increases or decreases
When optical power loss；Double-twisted structure is for receiving data to measure the optical powers of all directions；In addition, fine in single light transmission for the first time
It is upper to carry out multiple twin three times, to realize that three-dimensional measurement or even the present invention can extend to multidimensional measure.Measurable range of the present invention compared with
Width, and there is good sensitivity and accuracy, structure is simple and is easy to construct, and control at low cost, easily operated is not required to
Additional signal processing is wanted to obtain displacement information.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the displacement performance plot corresponding with optical power of X-direction when the movable plate in three directions is mobile.
Fig. 3 is the displacement performance plot corresponding with optical power of Y direction when the movable plate in three directions is mobile.
Fig. 4 is the displacement performance plot corresponding with optical power of Z-direction when the movable plate in three directions is mobile.
It is marked in figure as follows:
1-LED light source, the first light power meter of 2-, the second light power meter of 3-, 4- third light power meter, the first clip of 5-, 6- second
Clip, 7-X axis movable plate, 8-Y axis movable plate, 9-Z axis movable plate, 10- Active Optical Fiber, the first passive fiber of 11-, 12- second
Passive fiber, 13- third passive fiber, 14- the first multiple twin fiber, 15- the second multiple twin fiber, 16- third multiple twin fiber.
Specific embodiment
Below in conjunction with specific embodiment, the invention will be further described.
A kind of three-D displacement measurement sensor based on polymer optical fiber includes X-axis, Y-axis and Z axis, the as shown in Figure 1:
One passive fiber 11, the second passive fiber 12, third passive fiber 13 and Active Optical Fiber 10, first passive fiber 11,
Two passive fibers 12, third passive fiber 13 with 10 multiple twin of Active Optical Fiber, one end of the Active Optical Fiber 10 and LED light source 1
After connection, first with 11 multiple twin of the first passive fiber, the first multiple twin fiber 14, the starting one of the first multiple twin fiber 14 are formed
Section is fixed in X-axis moving plate 7, and remainder is formed by bending round, forms the first macrobend coupled structure, first macrobend
Coupled structure is located in X/Y plane, and starting one end that the first passive fiber 11 is located at the first multiple twin fiber 14 is idle, the other end with
The connection of first light power meter 2；After 11 multiple twin of the Active Optical Fiber 10 and the first passive fiber with the second passive fiber 12 into
Row multiple twin forms the second multiple twin fiber 15, and the starting point of the second multiple twin fiber 15 is fixed by the first clip 5, and described second
The circle segments rotation that one section of starting of multiple twin fiber 15 surround the first multiple twin fiber 14 forms the second macrobend coupled structure after turning around,
14 lower part of the first multiple twin fiber is then passed through, one section of the end of the second multiple twin fiber 15 is fixed in Y-axis moving plate 8,
Second passive fiber 12 at end end is connect with the second light power meter 3, and the second macrobend coupled structure is located in X/Y plane；Institute
Multiple twin is carried out with third passive fiber 13 again after stating 12 multiple twin of Active Optical Fiber 10 and the second passive fiber, forms third multiple twin
The starting point of fiber 16, the third multiple twin fiber 16 is fixed by the second clip 6, and the third multiple twin fiber 16 bends to circle
Third macrobend coupled structure is formed, the third macrobend coupled structure is located in XZ plane, the end of the third multiple twin fiber 16
One section of tail is fixed on Z axis movable plate 9, and the third passive fiber 13 at end end is connect with third light power meter 4.
Preferred embodiment, the first passive fiber 11, the second passive fiber 12, third passive fiber 13 are used in the present embodiment
Multimodal polymer optical fiber MMPOF is all made of with Active Optical Fiber 10.
The displacement measurement method of three-D displacement measurement sensor based on polymer optical fiber, includes the following steps
1. LED light source 1 issues light, in the first multiple twin fiber 14, the light intensity of Active Optical Fiber 10 is coupled into the first passive fiber 11, the
Light intensity initial value is detected in one light power meter 2；In second multiple twin fiber 15, it is passive that the light intensity of Active Optical Fiber 10 is coupled into second
Optical fiber 12 detects light intensity initial value in second light power meter 3；In third multiple twin fiber 16, the light intensity of Active Optical Fiber 10 is coupled
Enter third passive fiber 13, light intensity initial value is detected in third light power meter 4；
2. X-axis moving plate 7 is located in X-axis, Y-axis moving plate 8 is located in Y-axis, and Z axis movable plate 9 is located on Z axis, keeps Y-axis mobile
Plate 8 and Z axis movable plate 9 are fixed, pull X-axis moving plate 7, then the macrobending radius of the first multiple twin fiber 14 is displaced with X-axis
Increase and reduce, then the light intensity detected in the first light power meter 2 starts to increase, when X-axis displacement from large to small when, then first
The light intensity detected in light power meter 2 starts to reduce, and detects X-axis position by detecting light intensity variation in the first light power meter 2
The variation of shifting；
3. keeping X-axis moving plate 7 and Z axis movable plate 9 fixed, Y-axis moving plate 8 is pulled, then the macroscopic view of the second multiple twin fiber 15 is curved
Bilge radius reduces with the increase that Y-axis is displaced, then the light intensity detected in the second light power meter 3 starts to increase, when Y-axis is displaced
When from large to small, then the light intensity detected in the second light power meter 3 starts to reduce, by detecting light in the second light power meter 3
It is strong to change to detect the variation of Y-axis displacement；
4. keeping X-axis moving plate 7 and Y-axis moving plate 8 fixed, Z axis movable plate 9 is pulled, then the macroscopic view of third multiple twin fiber 16 is curved
Bilge radius reduces with the increase that Z axis is displaced, then the light intensity detected in third light power meter 4 starts to increase, when X-axis is displaced
When from large to small, then the light intensity detected in third light power meter 4 starts to reduce, by detecting light in third light power meter 4
It is strong to change to detect the variation of Y-axis displacement；
5. keeping Z axis movable plate 9 fixed, while X-axis moving plate 7 and Y-axis moving plate 8 are pulled, then the first multiple twin fiber 14 and the
The macrobending radius of two multiple twin fibers 15 reduces, the first light power meter 2 and the second light with the increase that X-axis and Y-axis are displaced
The light intensity detected in power meter 3 starts to increase, by detecting light intensity in the first light power meter 2 and the second light power meter 3
Change to detect the variation of X-axis and Y-axis displacement；If the displacement one or both of them of X-axis and Y-axis is from large to small, can
The change in displacement of all directions is detected to detect corresponding light intensity variation by corresponding light power meter；
6. keeping X-axis moving plate 7 fixed, while Y-axis moving plate 8 and Z axis movable plate 9 are pulled, then the second multiple twin fiber 15 and the
The macrobending radius of three multiple twin fibers 16 reduces, the second light power meter 3 and third light with the increase that Y-axis and Z axis are displaced
The light intensity detected in power meter 4 starts to increase, by detecting light intensity in the second light power meter 3 and third light power meter 4
Change to detect the variation of Y-axis and Z axis displacement；If Y-axis and the displacement one or both of them of Z axis are from large to small, can
The change in displacement of all directions is detected to detect corresponding light intensity variation by corresponding light power meter；
7. keeping Y-axis moving plate 8 fixed, while X-axis moving plate 7 and Z axis movable plate 9 are pulled, then the first multiple twin fiber 14 and the
The macrobending radius of three multiple twin fibers 16 reduces, the first light power meter 2 and third light with the increase that X-axis and Z axis are displaced
The light intensity detected in power meter 4 starts to increase, by detecting light intensity in the first light power meter 2 and third light power meter 4
Change to detect the variation of X-axis and Z axis displacement；If X-axis and the displacement one or both of them of Z axis are from large to small, can
The change in displacement of all directions is detected to detect corresponding light intensity variation by corresponding light power meter；
8. pulling X-axis moving plate 7, Y-axis moving plate 8 and Z axis movable plate 9 simultaneously, then the first multiple twin fiber 14, the second multiple twin fiber
15 and the macrobending radius of third multiple twin fiber 16 reduce, the first light power meter with the increase that X-axis, Y-axis and Z axis are displaced
2, the light intensity detected in the second light power meter 3 and third light power meter 4 starts to increase, and passes through the first light power meter 2, second
Light intensity variation is detected in light power meter 3 and third light power meter 4 to detect the variation of X-axis, Y-axis and Z axis displacement；If X-axis, Y
The displacement one or both of them of axis and Z axis or three from large to small, then can be detected by corresponding light power meter
Corresponding light intensity changes to detect the change in displacement of all directions.
The present embodiment is while pulling X-axis moving plate 7, Y-axis moving plate 8 and Z axis movable plate 9 come the position that measures three directions
Move: the output power of LED light source 1 is set as 30mW, and the resolution ratio of the LED light source 1 is 1nW, operation wavelength 660nm；Work as XYZ
When the displacement in three directions is 0mm, initial coupled power is 42nW in X-axis, is 62nW in Y-axis, is 88nW, this reality in Z axis
It applies in example, the moving step length in each direction is set as 10mm, and range is that each direction is 0 ~ 140mm, then obtains X-direction
Be displaced corresponding with optical power performance plot as shown in Fig. 2, Y direction displacement with the corresponding performance plot of optical power as shown in figure 3, Z axis
The displacement in direction performance plot corresponding with optical power is as shown in Figure 4.Three figures represent in the displacement process of 140mm, light function
Rate and displacement have good consistency and repeatability.
The scope of protection of present invention is not limited to the above specific embodiment, and for those skilled in the art and
Speech, the present invention can there are many deformation and change, it is all within design and principle of the invention it is made it is any modification, improve and
Equivalent replacement should be all included within protection scope of the present invention.
Claims (3)
1. a kind of three-D displacement measurement sensor based on polymer optical fiber, it is characterised in that: including X-axis, Y-axis and Z axis, first
Passive fiber (11), the second passive fiber (12), third passive fiber (13) and Active Optical Fiber (10), first passive fiber
(11), the second passive fiber (12), third passive fiber (13) with Active Optical Fiber (10) multiple twin, the Active Optical Fiber (10)
After one end is connect with LED light source (1), first with the first passive fiber (11) multiple twin, the first multiple twin fiber (14) is formed, described the
One section of starting of one multiple twin fiber (14) is fixed on X-axis moving plate (7), and remainder is formed by bending round, forms first
Macrobend coupled structure, the first macrobend coupled structure are located in X/Y plane, and the first passive fiber (11) is located at the first multiple twin fibre
The starting one end for tieing up (14) is idle, and the other end is connect with the first light power meter (2)；The Active Optical Fiber (10) and the first passive light
Multiple twin is carried out with the second passive fiber (12) after fine (11) multiple twin, forms the second multiple twin fiber (15), second multiple twin
The starting point of fiber (15) is fixed by the first clip (5), and one section of starting of the second multiple twin fiber (15) is around the first multiple twin
The circle segments rotation of fiber (14) forms the second macrobend coupled structure after turning around, and then passes through first multiple twin fiber (14) lower part,
One section of the end of the second multiple twin fiber (15) is fixed on Y-axis moving plate (8), second passive fiber (12) at end end
It is connect with the second light power meter (3), the second macrobend coupled structure is located in X/Y plane；The Active Optical Fiber (10) and second
Multiple twin is carried out with third passive fiber (13) again after passive fiber (12) multiple twin, is formed third multiple twin fiber (16), it is described
The starting point of third multiple twin fiber (16) is fixed by the second clip (6), and the third multiple twin fiber (16) bends to round formation
Third macrobend coupled structure, the third macrobend coupled structure are located in XZ plane, the end of the third multiple twin fiber (16)
One section is fixed on Z axis movable plate (9), and the third passive fiber (13) at end end is connect with third light power meter (4).
2. the three-D displacement measurement sensor according to claim 1 based on polymer optical fiber, it is characterised in that: the first nothing
Source optical fiber (11), the second passive fiber (12), third passive fiber (13) and Active Optical Fiber (10) are all made of multimodal polymerisation object light
Fine MMPOF.
3. the displacement measurement method of the three-D displacement measurement sensor described in claim 1 based on polymer optical fiber, feature
It is: includes the following steps
1. LED light source (1) issues light, the first multiple twin fiber (14) is interior, and the light intensity of Active Optical Fiber (10) is coupled into the first passive light
Fine (11), the first light power meter (2) is interior to detect light intensity initial value；In second multiple twin fiber (15), the light of Active Optical Fiber (10)
Close coupling enters the second passive fiber (12), detects light intensity initial value in the second light power meter (3)；Third multiple twin fiber (16)
Interior, the light intensity of Active Optical Fiber (10) is coupled into third passive fiber (13), detects that light intensity is initial in third light power meter (4)
Value；
2. X-axis moving plate (7) is located in X-axis, Y-axis moving plate (8) is located in Y-axis, and Z axis movable plate (9) is located on Z axis, keeps Y
Axis movable plate (8) and Z axis movable plate (9) are fixed, pull X-axis moving plate (7), then the macrobending of the first multiple twin fiber (14) half
Diameter reduces with the increase that X-axis is displaced, then the light intensity detected in the first light power meter (2) starts to increase, when X-axis displacement by
When becoming smaller greatly, then the light intensity detected in the first light power meter (2) starts to reduce, by detecting in the first light power meter (2)
Light intensity changes to detect the variation of X-axis displacement；
3. keeping X-axis moving plate (7) and Z axis movable plate (9) fixed, pull Y-axis moving plate (8), then the second multiple twin fiber (15)
Macrobending radius reduce with the increase that Y-axis is displaced, then the light intensity detected in the second light power meter (3) starts to increase
Greatly, when Y-axis is displaced from large to small, then the light intensity detected in the second light power meter (3) starts to reduce, and passes through the second optical power
Light intensity variation is detected in meter (3) to detect the variation of Y-axis displacement；
4. keeping X-axis moving plate (7) and Y-axis moving plate (8) fixed, pull Z axis movable plate (9), then third multiple twin fiber (16)
Macrobending radius reduce with the increase that Z axis is displaced, then the light intensity detected in third light power meter (4) starts to increase
Greatly, when X-axis is displaced from large to small, then the light intensity detected in third light power meter (4) starts to reduce, and passes through third optical power
Light intensity variation is detected in meter (4) to detect the variation of Y-axis displacement；
5. it is fixed to keep Z axis movable plate (9), while pulling X-axis moving plate (7) and Y-axis moving plate (8), then the first multiple twin fiber
(14) reduce, the first light power meter with the macrobending radius of the second multiple twin fiber (15) with the increase that X-axis and Y-axis are displaced
(2) and in the second light power meter (3) light intensity detected starts to increase, and passes through the first light power meter (2) and the second optical power
Light intensity variation is detected in meter (3) to detect the variation of X-axis and Y-axis displacement；If the displacement of X-axis and Y-axis one of them or two
It is a from large to small, then can detect the variation of corresponding light intensity by corresponding light power meter and become to detect the displacement of all directions
Change；
6. it is fixed to keep X-axis moving plate (7), while pulling Y-axis moving plate (8) and Z axis movable plate (9), then the second multiple twin fiber
(15) reduce, the second light power meter with the macrobending radius of third multiple twin fiber (16) with the increase that Y-axis and Z axis are displaced
(3) and in third light power meter (4) light intensity detected starts to increase, and passes through the second light power meter (3) and third optical power
Light intensity variation is detected in meter (4) to detect the variation of Y-axis and Z axis displacement；If the displacement of Y-axis and Z axis one of them or two
It is a from large to small, then can detect the variation of corresponding light intensity by corresponding light power meter and become to detect the displacement of all directions
Change；
7. it is fixed to keep Y-axis moving plate (8), while pulling X-axis moving plate (7) and Z axis movable plate (9), then the first multiple twin fiber
(14) reduce, the first light power meter with the macrobending radius of third multiple twin fiber (16) with the increase that X-axis and Z axis are displaced
(2) and in third light power meter (4) light intensity detected starts to increase, and passes through the first light power meter (2) and third optical power
Light intensity variation is detected in meter (4) to detect the variation of X-axis and Z axis displacement；If the displacement of X-axis and Z axis one of them or two
It is a from large to small, then can detect the variation of corresponding light intensity by corresponding light power meter and become to detect the displacement of all directions
Change；
8. pulling X-axis moving plate (7), Y-axis moving plate (8) and Z axis movable plate (9) simultaneously, then the first multiple twin fiber (14), second
The macrobending radius of multiple twin fiber (15) and third multiple twin fiber (16) reduces with the increase that X-axis, Y-axis and Z axis are displaced,
The light intensity detected in first light power meter (2), the second light power meter (3) and third light power meter (4) starts to increase, and passes through
Detect light intensity variation to detect X-axis, Y-axis in first light power meter (2), the second light power meter (3) and third light power meter (4)
With the variation of Z axis displacement；It, can be with if the displacement one or both of them of X-axis, Y-axis and Z axis or three are from large to small
Corresponding light intensity variation is detected by corresponding light power meter to detect the change in displacement of all directions.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112729127A (en) * | 2021-01-18 | 2021-04-30 | 胡彦君 | Wide-range polymer optical fiber displacement sensor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19913113A1 (en) * | 1999-03-23 | 2000-10-12 | Geso Ges Fuer Sensorik Geotech | Deformation measuring device for anchor bars in mining has fibre grating sensors with fibre windings having twist angles based on compensation conditions for simultaneous linear extension and transversal contraction |
| CN101074867A (en) * | 2007-06-13 | 2007-11-21 | 哈尔滨工程大学 | Sagnac optical-fiber deformation sensor of low-coherent twisted torqued |
| CN102997848A (en) * | 2012-10-18 | 2013-03-27 | 中国计量学院 | Two-dimensional displacement sensor based on three-core single-mode fiber Bragg grating |
| CN103471517A (en) * | 2013-09-09 | 2013-12-25 | 中铁西北科学研究院有限公司深圳南方分院 | Method and device for automatic monitoring and early warning of slope safety |
| CN204228235U (en) * | 2014-10-01 | 2015-03-25 | 中北大学 | Based on the optical fiber continous way liquid level sensor system of CMFTIR effect |
| CN105043264A (en) * | 2015-05-07 | 2015-11-11 | 中北大学 | Fiber optic displacement sensor based on macro-bending loss effect |
-
2018
- 2018-09-26 CN CN201811118080.5A patent/CN109099848B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19913113A1 (en) * | 1999-03-23 | 2000-10-12 | Geso Ges Fuer Sensorik Geotech | Deformation measuring device for anchor bars in mining has fibre grating sensors with fibre windings having twist angles based on compensation conditions for simultaneous linear extension and transversal contraction |
| CN101074867A (en) * | 2007-06-13 | 2007-11-21 | 哈尔滨工程大学 | Sagnac optical-fiber deformation sensor of low-coherent twisted torqued |
| CN102997848A (en) * | 2012-10-18 | 2013-03-27 | 中国计量学院 | Two-dimensional displacement sensor based on three-core single-mode fiber Bragg grating |
| CN103471517A (en) * | 2013-09-09 | 2013-12-25 | 中铁西北科学研究院有限公司深圳南方分院 | Method and device for automatic monitoring and early warning of slope safety |
| CN204228235U (en) * | 2014-10-01 | 2015-03-25 | 中北大学 | Based on the optical fiber continous way liquid level sensor system of CMFTIR effect |
| CN105043264A (en) * | 2015-05-07 | 2015-11-11 | 中北大学 | Fiber optic displacement sensor based on macro-bending loss effect |
Non-Patent Citations (1)
| Title |
|---|
| 侯钰龙: "光纤包层模受抑全内反射传感机制及液位探头设计", 《发光学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112729127A (en) * | 2021-01-18 | 2021-04-30 | 胡彦君 | Wide-range polymer optical fiber displacement sensor |
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