CN1090796C - Method for measuring real space length by camera shooting and optical system correcting method and datum gauge - Google Patents
Method for measuring real space length by camera shooting and optical system correcting method and datum gauge Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Abstract
The invention establishs a method for precisely measuring the actual space length per picture element, with which it is possible to make measurement and adjustment of the photographing range, measure the distortion of the image, and make correction of the distorted image by means of feedback of the obtained results. The mean number of lattices per picture element row in a photographing means is calculated for any arbitrary region in the inspection region of a lattice image, and the resultant is multiplied by the lattice pitch, and the obtained value is divided by the number of picture elements in that direction so as to give the actual space length per picture element of the lattice image. This enables calculation of the photographing means, adjustment of the photographing range, calculation of the distortion distribution of the image obtained, and correction of the image using these, so that it is practicable to precisely measure the object through calibration in the optical system in use.
Description
The present invention relates to the correction of the optical system of image processing system, the image that particularly relates to the regional master gage of taking by optical system with camera head is the real space length assay method that carries out of basis and the bearing calibration and the regional master gage of optical system.
In recent years because the high speed of image processing apparatus and the progress of low price, image processing system in exploitation on-the-spot and make on-the-spot mensuration and check in use many get up.Figure 18 is the structural drawing of general disposal system.
In the drawings, the sample (not shown) that is arranged at position regulator 27 can install 27 its positions of adjustment with this.Camera head 24 specifically is exactly ccd video camera and linear transducer etc., is that image is made a video recording with the sample.Optical system 23 makes the shooting surface imaging of sample at camera head.Video memory 25 is preserved the image that obtains.The processing that 26 pairs of images that obtain of arithmetic unit are scheduled to.
Take the image of sample with such structure, handle the image that obtains, item such as measure.
For example have as the bearing calibration of the optical system 23 of such system length known line chart or scale are made a video recording, carry out the Calculation Method of multiplying power according to the length of this picture.But because the pattern distortion that the optical system of using in the shooting 23 causes is intactly measured the image that obtains, measurement result includes error.Therefore be necessary distortion is revised.In the Jap.P. spy opened clear 63-222247 number described technology, the absorption pattern distortion modification method of revising X-ray imaging apparatus was disclosed.In the method, take the gained image and become dot pattern, the distortion with radioactive ray absorption coefficient measures member.The image point position of the image that obtains and real image point position that should imaging are compared, made the distortion correction chart, image is revised with carrying out the method that interpolation handles.
And in recent years, audiovisual appliances as the trend as shown in portable tape playback set, the film, is being carried out equipment miniaturization.On the other hand, particularly film, the such recording apparatus of fixed VTR have proposed requirement to non-volatile recording.The important technology that satisfies such requirement has the high density recording of phonotape and videotape.For the interchangeability between the maintenance recording/displaying device in all sizes such as VTR and DAT, and realize high density recording, how carrying out high linear track recording is a kind of important techniques.Therefore, the method for the linearity of inspection magnetic track is important.Japanese patent laid-open 3-222102 communique is described, the prior art of magnetic recording track check apparatus is, recording track is regarded as grating, the bending of magnetic track is regarded as the distortion of grating, and the method for taking diffraction fringe-raster image to resolve is carried out the method for magnetic track linear determination.The structure example of the basic structure of existing magnetic recording track check apparatus and image processing system shown in Figure 180 is roughly the same.
In the correct operation of so existing magnetic recording track check apparatus, a pixel suitable real space length can try to achieve by the setting multiplying power of optical system 23.Here said real space length means the physical length of the subject of the image that obtains in the image processing system of magnetic recording track check apparatus etc.And in magnetic recording track check apparatus, need make image pickup scope meet the effective range of the magnetic track striped of tape (not shown).The adjustment of image pickup scope is operated, and sees the image pickup scope of the image that camera head 24 is taken, and carries out adjustment substantially.
Again, it is as follows to implement the confirmation method of mensuration precision of the magnetic recording track check apparatus that the result of such correct operation obtains.
At first, measure the Displacements Distribution of magnetic track striped on the tape width direction on the actual tape with magnetic recording track check apparatus.Then, use the microscope inspection checking method to measure the Displacements Distribution at the same measured place of same tape.The microscope inspection checking method uses microscope with the magnetic track marginal position on the visual mensuration tape width direction.This result and desirable magnetic track marginal position are relatively obtained the Displacements Distribution of magnetic track striped.These two measurement results are compared, estimated the affirmation of precision.
But the setting multiplying power of the optical system 23 of Figure 18 and the multiplying power of the actual image that obtains not are strict conformance.Therefore, for example in the such debatable mensuration of the order of magnitude below 1 micron of the linear determination of magnetic track striped, can not get the average real space length of the multiplying power or a pixel of enough accuracy.And in the multiplying power of carrying out with the shooting of line chart and scale is measured, can only obtain the data on 1 line.
Again, in existing image pickup scope method of adjustment, image pickup scope can only be adjusted roughly.
Also have, about the correction of pattern distortion, use the Jap.P. spy to open during pattern distortion that clear 63-222247 number described such dot pattern carry out measures, the number that data obtain in measuring the zone is restricted, owing to can only increase these interpolated points, precision is bad.
And, in Japanese patent laid-open 3-222102 number described technology, do not narrate about bearing calibration.When precision confirmation, use tape as measuring to picture.Because the Displacements Distribution of the tape striped on the tape is not known, must use microscope to measure in advance.But, using microscopical inspection method, it measures the mobile accuracy that precision depends on the platform that tape is set.Therefore, measure precision at most only ± 0.3 micron about, can not carry out than this high inspection.Again because tape is extremely thin, if during processing in addition excessive load will deform.Therefore, problems such as Displacements Distribution change are arranged, Displacements Distribution is not talkative known.Therefore, the correct mensuration precision of magnetic recording track check apparatus can't be confirmed.
The object of the invention is, at above-mentioned existing problems, the method of the average real space length of a pixel of micrometric measurement is provided, the mensuration of the mensuration of carrying out image pickup scope or adjustment and pattern distortion is provided and carries out the bearing calibration of optical system of the correction of pattern distortion with its result's feedback.
The present invention also aims to provides, be used for by means of the mensuration of the mensuration of the average real space length of a pixel and image pickup scope or adjustment and pattern distortion and realize not having the bearing calibration and the regional master gage of the magnetic recording track check apparatus that the magnetic recording track of pattern distortion influence checks with its result's feedback.
The present invention also aims to provide the method for the bearing calibration of the bearing calibration that realizes these optical systems accurately and magnetic recording track check apparatus.
The regional master gage that uses when the present invention also aims to provide high-precision mensuration precision confirmation method and measuring precision confirmation.
The real space length assay method of use camera head of the present invention, the direction that is parallel to grid line and/or perpendicular to the direction of grid line as horizontal scan direction, grid figure to the grid line that contains regulation makes a video recording with camera head with the optical system imaging, obtains the grid picture.In the arbitrary region in the inspection area of this grid picture, to each pixel column calculate with the vertical direction of graticule on the bar number of the corresponding grid line of a pixel column of camera head, then that it is average, calculate the mean value of grid number of lines.With the average grid spacing on duty of grid bar number, calculate the real space length of the arbitrary region on the direction vertical with grid line.The number of pixels of described real space length, calculate in the grid picture, at average real space length perpendicular to a pixel on the direction of graticule divided by equidirectional.Average real space length with a pixel obtaining like this serves as according to proofreading and correct optical system.
Again, as the track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, the regional master gage of using with camera head shooting, the magnetic recording track check apparatus checked, have on its surface, as the line chart of the benchmark of the coordinate system of regional master gage, and draw to such an extent that have the grid figure of predetermined angular with respect to the reference direction of line chart with equidistant from distance.Employed regional master gage, the thickness that these patterns have makes when being provided with on magnetic recording track check apparatus their surface this height and position above tape when on magnetic recording track check apparatus tape being set equate in fact.By means of this, can measure the affirmation of precision accurately.
Fig. 1 is the structural drawing of the corrective system of the optical system in the embodiments of the invention.
Fig. 2 represents the example of the grid figure of embodiments of the invention.
Fig. 3 is the block scheme of function of bearing calibration of the optical system of expression embodiments of the invention.
Fig. 4 is the diagram of the grid picture of embodiments of the invention.
Fig. 5 is the key diagram of the lines thinning processing of embodiments of the invention.
Fig. 6 is the example of the grid figure of expression embodiments of the invention
Fig. 7 is the example of the grid figure of expression embodiments of the invention.
Fig. 8 is the key diagram of modification method of the image of embodiments of the invention.
Fig. 9 is the structural drawing of the magnetic recording track check apparatus of embodiments of the invention.
Figure 10 represents the pattern on the regional master gage of embodiments of the invention.
Figure 11 is the functional-block diagram of bearing calibration of optical system of the magnetic recording track check apparatus of embodiments of the invention.
Figure 12 represents the example of magnetic track stripe pattern of the tape of embodiments of the invention.
Figure 13 represents the example that the briliancy of a certain line in the grid picture of embodiments of the invention distributes.
Figure 14 represents that the briliancy of a certain line in the grid picture of embodiments of the invention carries out the result's of Fourier Tranform the example of power spectrum on distributing.
Figure 15 is the key diagram of the modification method that distributes of the magnetic track stripe displacement of embodiments of the invention.
Figure 16 represents to be used in the embodiments of the invention confirm to measure the regional master gage of precision.
Figure 17 is the example of the pattern on the regional master gage of embodiments of the invention.
Figure 18 is the structural drawing of general image processing system.
The real space length assay method of employing camera head of the present invention, comprise the 1st step: be horizontal scan direction the direction that is parallel to described grid line and/or perpendicular to the direction Zuo of described grid line, the Shan figure Yong optical system imaging Yong camera head that contains the grid line that equidistantly disposes take given value as spacing is made a video recording, obtain the Shan picture, arbitrary region Zhong in the inspection area of this Shan picture of the 2nd step: Zai, each pixel column is calculated on the vertical direction of Zai Yu described grid line Yu the number of grid line corresponding to a pixel column of described camera head, the 3rd step: the grid line number to each pixel column that described the 2nd step is tried to achieve is average, calculate the mean value of grid line number, the 4th step: grid number mean value be multiply by described Shan spacing, calculate the real space length of the described arbitrary region on the direction vertical Yu described grid line, the 5th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate described Shan as the average real space length of Zhong Zai perpendicular to a pixel on the direction of described grid line.
Described the 2nd step also can comprise, in the described inspection area of Zai, the vertical direction of Zai Shan figure Zhong grid line is carried out Fourier Tranform, from the frequency spectrum that obtains take out fundamental component step, the fundamental component that takes out is carried out anti-Fourier Tranform, from its result's real part Yu the ratio of imaginary part calculates the step of the phase value distribution of described Shan figure, and Yong described PHASE DISTRIBUTION, calculate in the arbitrary region of the described inspection area of Zai, perpendicular to the step of the grid line number of each pixel column of described grid line.
Real space length assay method on the magnetic recording track of employing camera head of the present invention, it is the track patterns that magnetic recording/reproducing device is recorded and carried out magnetic recording track on the tape of visualization processing, the bearing calibration of the optical system when making a video recording by optical system Yong camera head, has the 1st step: equidistantly dispose take given value as the Shan spacing containing and be parallel to the horizontal scan direction of described camera head and/or perpendicular to the Shan figure of the grid line of this direction, be arranged in fact identical Yu the camera position of the described tape position, the 2nd step: the described camera head of described Shan figure Yong is made a video recording to obtain the Shan picture, in the described Shan picture of the 3rd step: Zai, arbitrary region Zhong in the inspection area of described magnetic recording track check apparatus, each pixel column is calculated on the vertical direction of Zai Yu described grid line Yu the number of grid line corresponding to a pixel column of described camera head, the 4th step: the number to the grid line of each pixel column that described the 3rd step is tried to achieve is average, calculate the mean value of grid line number, the 5th step: grid line number mean value be multiply by described Shan spacing, calculate the real space length of the described arbitrary region on the direction vertical Yu described grid line, the 6th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate described Shan as Zhong, Zai is perpendicular to the average real space length of a pixel on the direction of described grid line.
Described the 3rd step also can comprise, in the described inspection area of Zai, the vertical direction of Zai Shan figure Zhong grid line is carried out Fourier Tranform, from the frequency spectrum that obtains take out fundamental component step, the fundamental component that takes out is carried out anti-Fourier Tranform, from its result's real part Yu the ratio of imaginary part calculates the step of the phase value distribution of described Shan picture, and Yong described PHASE DISTRIBUTION, calculate in the arbitrary region of the described inspection area of Zai, perpendicular to the step of the grid line number of each pixel column on the direction of described grid line.
The real space length assay method of employing camera head of the present invention, comprise the 1st step: be horizontal scan direction the direction that is parallel to described grid line and/or perpendicular to the direction Zuo of described grid line, the Shan figure Yong optical system imaging Yong camera head that contains the grid line that equidistantly disposes take given value as spacing is made a video recording, obtain the Shan picture, arbitrary region Zhong in the inspection area of this Shan picture of the 2nd step: Zai, to each pixel column calculate Yu on the vertical direction of described graticule Yu the number of grid line corresponding to a pixel column of described camera head, the 3rd step: the number for the grid line of each pixel column that described the 2nd step is tried to achieve is in addition average, calculate the mean value of grid line number, the 4th step: grid line number mean value be multiply by described Shan spacing, calculate the real space length of the described arbitrary region on the Zai direction vertical Yu described grid line, the 5th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate described Shan as the average real space length of Zhong Zai perpendicular to a pixel on the direction of described grid line, the 6th step: described real space length be multiply by the number of pixels on the direction vertical Yu described grid line of described inspection area, calculate the image pickup scope of the described inspection area Zhong of Zai.
Described the 2nd step can comprise: in the described inspection area of Zai, the vertical direction of the described Shan figure of Zai Zhong grid line is carried out Fourier Tranform, from the frequency spectrum that obtains extract fundamental component step, the fundamental component that extracts is carried out anti-Fourier Tranform, according to its result's real part and the ratio of imaginary part, calculate the step of the PHASE DISTRIBUTION of described Shan picture, and Yong described PHASE DISTRIBUTION, calculate the step of the grid line number of each pixel column on direction arbitrary region Zhong, vertical Yu described grid line of the described inspection area of Zai.
Described the 6th step can comprise the real space length of a described pixel be multiply by number of pixels on the direction vertical with described grid line of described inspection area, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
Also can be that described the 2nd step comprises: in described inspection area, with described grid figure in carry out Fourier Tranform on the grid line vertical direction, extract the step of fundamental component from the frequency spectrum that obtains, the fundamental component that extracts is carried out anti-Fourier Tranform, according to its result's the real part and the ratio of imaginary part, calculate the step of the PHASE DISTRIBUTION of described grid picture, and use described PHASE DISTRIBUTION, calculate the step of bar number of the grid line of each pixel column on the direction vertical in the arbitrary region in the described inspection area with described grid line, described the 6th step comprises the real space length of a described pixel be multiply by number of pixels on the direction vertical with described grid line of described inspection area, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
Real space length assay method on the magnetic recording track of employing camera head of the present invention, it is the track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, the bearing calibration of the optical system when making a video recording with camera head by optical system, have the 1st step: containing with the given value is that the grid spacing equidistantly disposes and is parallel to the horizontal scan direction of described camera head and/or perpendicular to the grid figure of the grid line of this direction, be arranged on identical with the camera position of the described tape in fact position, the 2nd step: described grid figure is made a video recording to obtain the grid picture with described camera head, the 3rd step: in described grid picture, in the arbitrary region in the inspection area of described magnetic recording track check apparatus, to on the direction that each pixel column calculates and described graticule is vertical with the bar number of the corresponding grid line of a pixel column of described camera head, the 4th step: the grid number of lines to each pixel column that described the 3rd step is tried to achieve is average, calculate the mean value of grid number of lines, the 5th step: described grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line, the 6th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line, the 7th step: the average real space length of a described pixel be multiply by the number of pixels on the direction vertical of described inspection area, calculate the image pickup scope of described inspection area with described grid line.
Described the 3rd step also can comprise: in described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, from the frequency spectrum that obtains take out fundamental component step, the fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and use described phase value distribution, calculate the arbitrary region of described inspection area, perpendicular to the step of the grid number of lines of each pixel column on the direction of described grid line.
Described the 7th step also can comprise the average real space length of a described pixel be multiply by number of pixels on the direction vertical with described graticule of described inspection area, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
Also can be that described the 3rd step comprises: in described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, take out the step of fundamental component from the frequency spectrum that obtains, the fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and use described phase value distribution, calculating is at the arbitrary region of described inspection area, step perpendicular to the grid number of lines of each pixel column on the direction of described grid line, described the 7th step comprises the average real space length of a described pixel be multiply by number of pixels on the direction vertical with described grid line of described inspection area, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
Optical system bearing calibration of the present invention has, the 1st step: the direction that is parallel to described grid line and/or perpendicular to the direction of described grid line as horizontal scan direction, to contain with the given value be spacing equidistantly the grid figure of the grid line of configuration make a video recording with camera head with the optical system imaging, obtain the grid picture, the 2nd step: in the arbitrary region in the inspection area of this grid picture, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head, the 3rd step: the grid number of lines to each pixel column that described the 2nd step is tried to achieve is average, calculate the mean value of grid number of lines, the 4th step: grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line, the 5th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described graticule, and the 6th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, thereby the distortion that obtains this direction in whole described inspection area distributes.
Also can be that described the 2nd step comprises: in described inspection area, on the direction vertical, carry out Fourier Tranform with grid line among the grid figure, extract the step of fundamental component from the frequency spectrum that obtains, the fundamental component composition that extracts is carried out anti-Fourier Tranform, according to its result's the real part and the ratio of imaginary part, calculate the step of the PHASE DISTRIBUTION of described grid picture, and use described PHASE DISTRIBUTION, calculate in the arbitrary region in the described inspection area, the step of the bar number of the grid line of each pixel column on the direction vertical with described graticule, the 6th step comprises: use described phase value distribution, calculate in described inspection area, the step of the Displacements Distribution on the direction vertical with described grid line.
The optical system bearing calibration of magnetic recording track shooting usefulness of the present invention, it is the track patterns that magnetic recording/reproducing device is write down and carried out the magnetic recording track on the visualization processing tape, by optical system with the make a video recording bearing calibration of optical system in the magnetic recording track check apparatus of checking of camera head, has the 1st step: equidistantly dispose as lattice spacing and be parallel to the horizontal scan direction of described camera head and/or perpendicular to the grid figure of the grid line of this direction containing with given value, be arranged on identical with the camera position of the described tape in fact position, the 2nd step: described grid figure is made a video recording to obtain the grid picture with described camera head, the 3rd step: in described grid picture, in the arbitrary region in the inspection area of described magnetic recording track check apparatus, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head, the 4th step: the grid number of lines for each pixel column that described the 3rd step is tried to achieve is average, calculate the mean value of grid number of lines, the 5th step: described grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line, the 6th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line, the 7th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, thereby the optical system that obtains described magnetic recording track check apparatus in whole described inspection area distributes in the distortion of this direction.
Also can be that described the 3rd step comprises: in described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, take out the step of fundamental component from the frequency spectrum that obtains, the fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and use described phase value distribution, calculating is at the arbitrary region of described inspection area, step perpendicular to the grid number of lines of each pixel column on the direction of described grid line, described the 7th step comprises: use described phase value distribution, calculate in the described grid picture step of the Displacements Distribution on the vertical direction of the described grid line of described inspection area.
Optical system bearing calibration of the present invention has, the 1st step: the direction that is parallel to described grid line and/or perpendicular to the direction of described grid line as horizontal scan direction, to contain with the given value be spacing equidistantly the grid figure of the grid line of configuration make a video recording with camera head with the optical system imaging, obtain the grid picture, the 2nd step: in the arbitrary region in the inspection area of described grid picture, to on the direction that each pixel column calculates and described grid line is vertical with the bar number of the corresponding grid line of a pixel column of described camera head, the 3rd step: the grid number of lines to each pixel column that described the 2nd step is tried to achieve is average, calculate the mean value of grid number of lines, the 4th step: grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line, the 5th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate described grid picture, at average real space length perpendicular to a pixel on the direction of described grid line, the 6th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, distribute in the distortion of this direction thereby obtain described optical system in whole described inspection area, the 7th step: revise described optical system imaging with described distortion distribution.
Also can be that described the 2nd step comprises: in described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, take out the step of fundamental component from the frequency spectrum that obtains, the fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and use described phase value distribution, calculating is at the arbitrary region of described inspection area, step perpendicular to the grid number of lines of each pixel column on the direction of described grid line, described the 6th step comprises: use described phase value distribution, calculate in described inspection area, the step of the Displacements Distribution on the direction vertical with described grid line.
The optical system bearing calibration of magnetic recording track shooting usefulness of the present invention, it is the track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, by optical system with the make a video recording bearing calibration of optical system in the magnetic recording track check apparatus of checking of camera head, has the 1st step: equidistantly dispose as lattice spacing and be parallel to the horizontal scan direction of described camera head and/or perpendicular to the grid figure of the grid line of this direction containing with given value, be arranged on identical with the camera position of the described tape in fact position, the 2nd step: described grid figure is made a video recording to obtain the grid picture with described camera head, the 3rd step: in described grid picture, in the arbitrary region in the inspection area of described magnetic recording track check apparatus, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head, the 4th step: the grid number of lines to each pixel column that described the 3rd step is tried to achieve is average, calculate the mean value of grid number of lines, the 5th step: described grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line, the 6th step: the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region, calculate in the described grid picture, at average real space length perpendicular to a pixel on the direction of described grid line, the 7th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, thereby the optical system that obtains described magnetic recording track check apparatus in whole described inspection area distributes in the distortion of this direction, the 8th step: with described camera head the track patterns that writes down on the tape is made a video recording, calculate the Displacements Distribution of the described track patterns of revising with described distortion distribution.
Also can be that described the 3rd step comprises: in described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, take out the step of fundamental component from the frequency spectrum that obtains, the fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and use described phase value distribution, calculating is at the arbitrary region of described inspection area, step perpendicular to the grid striped bar number of each pixel column on the direction of described grid line, described the 7th step comprises: use described phase value distribution, calculate in the described grid picture step of the Displacements Distribution on the vertical direction of the described grid line of described inspection area.
Regional master gage of the present invention, it is the track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, make a video recording with camera head, the regional master gage that the magnetic recording track check apparatus of checking is used, have on its surface as the line chart of the benchmark of the coordinate system of this regional master gage with equidistantly to draw the grid figure that has the angle of regulation with respect to the reference direction of described line chart, described line chart and described grid figure have such thickness, make when being provided with on magnetic recording track check apparatus their surface this height and position above tape when on magnetic recording track check apparatus tape being set equate in fact.
In fact the spacing of described grid figure also can equate with the spacing of track patterns on the described tape.
Regional master gage of the present invention, it is the track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, make a video recording with camera head, the regional master gage that the magnetic recording track check apparatus of checking is used, has line chart as the benchmark of the coordinate system of this regional master gage on its surface, in fact with in described magnetic recording/reproducing device respectively by in the plural ideal track pattern of azimuthal head records on tape with regulation, with the track patterns with an azimuthal head records is bright portion, and the simulation track patterns that the track patterns that obtains when being dark portion with the track patterns with another azimuthal head records is identical, the determining displacement line more than at least one on the described simulation track patterns, described simulation track patterns is known to the Displacements Distribution of described ideal track pattern.
Described line image and described simulation track patterns have such thickness, make when being provided with on described magnetic recording track check apparatus their surface height and position of this tape upper surface when on described magnetic recording track check apparatus tape being set equate in fact.
The optical system bearing calibration of magnetic recording track shooting usefulness of the present invention, it is the track patterns that magnetic recording/reproducing device is write down and carried out the magnetic recording track on the tape of visualization processing, make a video recording with camera head by optical system, the bearing calibration of the optical system of the magnetic recording track check apparatus of checking, wherein be provided as the line chart of the benchmark of coordinate system, in fact with in described magnetic recording/reproducing device respectively by in the plural ideal track pattern of azimuthal head records on tape with regulation, with the track patterns with an azimuthal head records is bright portion, the track patterns that obtains when being dark portion with the track patterns with another azimuthal head records is identical in fact, and is known simulation track patterns along the determining displacement line more than at least one with respect to the Displacements Distribution of described ideal track pattern, make that the height and position of the surface of this two pattern upper surface of described tape when on described magnetic recording track check apparatus described tape being set is identical in fact, measure the Displacements Distribution of described simulation track patterns with described magnetic recording track check apparatus to the ideal track pattern, described Displacements Distribution and described Displacements Distribution measurement result are compared, detected the measuring accuracy of described magnetic recording track check apparatus.
Described Displacements Distribution is measured, can be in the image of described simulation track patterns, on displacement measure of spread direction, carry out Fourier Tranform, take out fundamental component from the frequency spectrum that obtains, it is carried out anti-Fourier Tranform, calculate the phase value distribution of the image of described simulation track patterns according to its result's the real part and the ratio of imaginary part, use described phase value distribution, calculate the Displacements Distribution of the image of described simulation track patterns.
Again, regional master gage of the present invention is the track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, pass through optical system, make a video recording with camera head, the regional master gage that the magnetic recording track check apparatus of checking is used, the surface has thereon, line chart as the benchmark of the coordinate system of this regional master gage, and equidistantly to draw the grid figure that has an angle of regulation with respect to described line chart also to have with in described magnetic recording/reproducing device, in the ideal track pattern of azimuthal head records more than 2 on tape that has regulation respectively, with the track patterns with an azimuthal head records is bright portion, and the identical simulation magnetic track of track patterns that obtains when being dark portion with the track patterns with another azimuthal head records; The determining displacement line more than at least one on the described simulation track patterns, described simulation track patterns is known to the Displacements Distribution of described ideal track pattern, described line chart, described grid figure and described simulation track patterns have such thickness, make when being provided with on described magnetic recording track check apparatus their surface equate in fact with the position of this tape upper surface when on described magnetic recording track check apparatus described tape being set.
Below with reference to Fig. 1～Fig. 8 the 1st embodiment is illustrated.
Fig. 1 is the structural drawing of the corrective system of optical system.Grid Fig. 7 of regulation described below is drawn on the surface of regional master gage 1 in the drawings.The optical system 2 that camera head ccd video camera 3 is configured to constitute with single lens or lens combination has common optical axis, and optical system 2 imagings are made a video recording.Video memory 4 storages are from the image of ccd video camera 3, and the image of 5 pairs of video memories of arithmetic unit, 4 storages is handled.The position regulator 6 of regional master gage 1 is an XY θ platform for example.
Fig. 2 represents the details of above-mentioned grid Fig. 7.As shown in Figure 2, form many grid line 7a equally spacedly, this spacing is a given value.
Be illustrated according to the functional-block diagram of Fig. 3 program below the bearing calibration of the optical system 2 in the corrective system of optical system 2 with said structure.
At first the shooting (step 101) to the grid picture is illustrated.At first, the position with XY θ platform 6 adjustment regional master gages 1 makes the grid line 7a (Fig. 2) of regional master gage shown in Figure 11 parallel with the horizontal scan direction of ccd video camera.Make a video recording with 3 pairs of regional master gages 1 of ccd video camera then.Fig. 4 is that the expression grid are as 8 figure.Grid are made a video recording by the grid Fig. 7 on 3 pairs of regional master gages 1 of ccd video camera as 8 and are obtained, and are stored in video memory 4.And as shown in Figure 4, as 8, be defined as directions X corresponding to the horizontal scan direction of the ccd video camera among Fig. 13 at grid, be defined as the Y direction corresponding to the direction of vertical scanning direction.In the calculating that the real space length of a pixel, image pickup scope and distortion distribute, the grid number of lines in the inspection area 9 is relevant with resolution, and the grid number of lines is the precision height at most.Therefore, during regional master gage 1 shooting, preferably grid line 7a one by one shoots as much as possible in the exploring degree of ccd video camera 3.For example under grid as the number of pixels of the orthogonal directions (is the Y direction at Fig. 4) of 8 grid line 7a were 512 situation, grid line was preferably about 128.
Grid line number calculating (step 102) to Fig. 3 is illustrated below.At first the grid of Fig. 4 as 8 decisions as benchmark to the zone of picture, be inspection area 9.The average real space length of 1 pixel of this inspection area, image pickup scope and distortion distribution etc. all be proofread and correct to picture.Thereby this inspection area 9 in the optical system imaging of Fig. 1, is set in main use zone and gets final product.For example, if be the optical system of determinator of packing into, then be determined as and take the zone that its determination object uses and get final product.In inspection area 9, set arbitrary region 10 again.Calculate the average real space length of a pixel in this zone.The grid line number is the computational accuracy height of the average real space length of a pixel at most.Therefore preferably, the bar number of the grid line 7a that arbitrary region 10 is comprised is under the situation in the exploring degree of ccd video camera as much as possible at grid line 7a one by one.Also can be that inspection area 9 and arbitrary region 10 are the same area.
As the arbitrary region 10 in 8 the inspection area 9, calculate the grid line number that each pixel column comprised of Y direction at the grid of video memory 4 storage by arithmetic unit 5.Arithmetic unit 5 use-cases method as described below is calculated the grid line number.
At first, the image to arbitrary region 10 carries out 2 values processing.Carrying out that 2 values are handled is as follows.At first determine the threshold value that briliancy distribute at arbitrary region 10.Threshold value can be the mean value that briliancy distributes in the arbitrary region 10.The pixel that is higher than threshold value is as bright portion, and the pixel that is lower than threshold value is as dark portion.Make the image of arbitrary region 10 become bright 2 value images with dark portion by means of above processing.The common contrast of image that shooting regional master gage 1 obtains is good, and noise is also little, therefore, handles in case carry out 2 values, and its briliancy is distributed as complete square wave.Can calculate the bar number of grid line according to the number of this square wave.
Also having, is being unit when calculating grid line and counting with integer bar number like this, preferably as far as possible arbitrary region 10 set this zone is comprised the grid line number be integer.
The grid line that the following describes Fig. 3 is counted mean value calculation (step 103).In the arithmetic unit 5 of Fig. 1, calculate the mean value of the grid line number of resulting each pixel column, calculate average grid line number in view of the above.
Because the influence of pattern distortion, the grid line number is different because of the difference in place, and in the average grid number of lines of step 103 calculates, calculates arbitrary region 10 these 2 average grid line numbers of tieing up in zones of Fig. 4.Such assay method is compared with ask the such method for measuring on lines of multiplying power with line chart and scale, the average real space length of a pixel of calculating in the calculating (step 106) for the calculating (step 105) of the average real space length of the pixel of Fig. 3 and image pickup scope and image pickup scope etc. can access these grid of exact expression more as 8 typical value.
The real space length that the following describes Fig. 3 calculates (step 104).In the arithmetic unit 5 of Fig. 1, calculate the product of the known gap length of the grid Fig. 7 on average grid line number and the regional master gage, calculate the real space length on the Y direction of arbitrary region 10 of Fig. 4 in view of the above.
The following describes the calculating (step 105) of average real space length of the pixel of Fig. 3.In the arithmetic unit 5 of Fig. 1, the real space length on the Y direction of the arbitrary region 10 of Fig. 4 of obtaining just now divided by the number of pixels on the Y direction of arbitrary region 10, is calculated the average real space length of a pixel in view of the above.
The following describes the calculating (step 106) of the image pickup scope of Fig. 3.In the arithmetic unit 5 of Fig. 1, the average real space length of a pixel be multiply by the number of pixels on the Y direction of inspection area 9 of Fig. 4, therefore can calculate the real space length on the Y direction of inspection area 9, i.e. the image pickup scope of inspection area.
As stereo microscope, during continuous variation, also can carry out the multiplying power adjustment in the multiplying power of the optical system 2 that can make Fig. 1 according to the image pickup scope that calculates again.Under the predefined situation of the image pickup scope of wanting, calculate multiplying power according to the real space length of the imaging apparatus of the real space length of this image pickup scope and ccd video camera 3.After being set in this multiplying power, optical system calculates image pickup scope.Because influences such as pattern distortions, the result of calculation and the desirable image pickup scope of image pickup scope are inconsistent usually.The multiplying power of repeated calculation optical system 2 and image pickup scope can make one cause to carry out the adjustment of image pickup scope.
The calculating (step 107) that the distortion of Fig. 3 is distributed is illustrated below.In the arithmetic unit 5 of Fig. 1, the grid that the average real space length of a pixel that draws with the calculating (step 105) according to the average real space length of a pixel calculates Fig. 4 are as the Displacements Distribution in 8 the inspection area 9, and promptly the distortion in images that causes of the optical system 2 of Fig. 1 distributes.The computing method of Displacements Distribution for example have the image to inspection area 9 carry out 2 values to handle.Carry out lines thinning processing as shown in Figure 5 in addition, according to pixels the center of grid line 7a is asked in the unit.In the image of Fig. 5, two lines on grid figure top have some bendings, and this is that distortion by optical system 2 causes.In the present embodiment, as following detailed description, distribute with distortion and optical system 2 imagings to be revised the pattern distortion that optical system causes in the time of can revising ccd video camera 3 by optical system 2 shootings.The position distribution that obtains be multiply by the average real space length of a pixel, can obtain the position distribution of the grid line 7a of real space length unit.The comparison of the real position distribution that goes out according to the position distribution that obtains with by the distance computation of grid Fig. 7 of Fig. 2 calculates grid shown in Figure 4 as the Displacements Distribution on 8 the Y direction.The displacement data that obtains in the above-mentioned processing is the data of the center of the grid line 7a in the inspection area 9.In order to obtain the Displacements Distribution between the grid line 7a, carry out interpolation processing such as spline interpolation.
In the mensuration of such pixel cell, the mensuration precision of Displacements Distribution depends on the average real space length of the grid spacing and a pixel of regional master gage 1.The grid spacing is narrow more, and the resolution of displacement is high more, and the average real space length of a pixel is short more, and the resolution of the position of grid line 7a is also high more.On the other hand, the grid spacing can only be narrow in the optical system degree that can discern of grid line 7a one by one, or till the limit of the making precision of regional master gage 1.And cooperate therewith, need guarantee the number of pixels of ccd video camera 3.To consider these together the number of pixels of camera heads such as the grid spacing of decision regional master gage 1 and ccd video camera 3.For example if the resolution of the optical system 2 of usefulness is 8 microns.In this case, the grid spacing of regional master gage 1 must be more than 16 microns at least.For example, the grid spacing is got 32 microns, and the number of pixels of employed ccd video camera 3 is distributed as 512 pixels on level, vertical direction, and preferably about 128, therefore, image pickup scope is approximately 4 millimeters square zones to the bar number of the grid line that then is taken.
Above explanation all is about the processing on the Y direction of the inspection area of Fig. 4.Position with 6 pairs of regional master gages 1 of XY θ platform is adjusted, make the grid line 7a of the regional master gage 1 of Fig. 1 become parallel with the vertical scanning direction of ccd video camera 3, behind ccd video camera 3 shooting regional master gages 1, carry out program same as described above repeatedly, real space length, image pickup scope and the distortion that can calculate a pixel of directions X distribute.Also have, also can draw orthogonal grid figure shown in Figure 6 at regional master gage 1 in advance.Can make grid figure the grid of the such both direction of Fig. 7 again, the grid to this both direction of photographing look like to carry out the processing of X, Y direction simultaneously.
Shooting (step 108) to the image of Fig. 3 is illustrated below.In the image taking, take the image of measuring the picture object with optical system 2 and the ccd video camera 3 of Fig. 1.
Correction (step 109) to the image of Fig. 3 is illustrated below.In the arithmetic unit 5 of Fig. 1, use the X that obtains, the distortion distribution of Y direction to implement image correction.Becoming correction is the arbitrary image that photographs in image taking step (step 108) to the image of picture.
Fig. 8 is the mode chart that the modification method of the brightness value of a certain pixel of explanation is used.P (0,0), P (1,0), P (0,1) and P (1,1) are each pixel.Below the briliancy with pixel P (0,0) is illustrated for situation about revising picture.The position vector of each pixel is continued to use the label of this pixel, is taken as P (0,0), P (1,0), P (0,1), P (1,1).And D (0,0), D (1,0), D (0,1) and D (1,1) are respectively the vector of the amount of distortion that is illustrated in each pixel P (0,0), P (1,0), P (0,1) and P (1,1).At this moment the briliancy distribution at P (0,0), P (1,0), P (0,1) and P (1,1) is designated as B (0,0), B (1,0), B (0,1) and B (1,1), is designated as Bt (0,0) and revise the back in the briliancy of P (0,0).Each pixel P (0,0), P (1,0), P (0,1) and the revised correspondence position of P (1,1) distortion are designated as Pt (0,0), Pt (1,0), Pt (0,1) and Pt (1,1) respectively.Again, each position vector Pt (0,0), Pt (1,0), Pt (0,1) and Pt (1,1) are tried to achieve by following formula respectively.
Pt(0，0)＝P(0，0)-D(0，0)
Pt(1，0)＝P(1，0)-D(1，0)
Pt(0，1)＝P(0，1)-D(0，1)
Pt(1，1)＝P(1，1)-D(1，1)
Here the distance from Pt (0,0), Pt (1,0), Pt (0,1) and Pt (1,1) to P (0,0) is designated as d (0,0), d (1,0), d (0,1) and d (1,1) respectively, then draw,
d(0，0)＝|P(0，0)-Pt(0，0)|
d(1，0)＝|P(0，0)-Pt(1，0)|
d(0，1)＝|P(0，0)-Pt(0，1)|
d(1，1)＝|P(0，0)-Pt(1，1)|
Again, K, L, M and N are defined by following formula.
K＝(1/d(0，0))/(1/d(0，0)+1/d(1，0)+1/d(0，1)+1/d(1，1))
L＝(1/d(1，0))/(1/d(0，0)+1/d(1，0)+1/d(0，1)+1/d(1，1))
M＝(1/d(0，1))/(1/d(0，0)+1/d(1，0)+1/d(0，1)+1/d(1，1))
N＝(1/d(1，1))/(1/d(0，0)+1/d(1，0)+1/d(0，1)+1/d(1，1))
At this moment, Bt (0,0) is tried to achieve by following formula.
Bt(0，0)＝K×B(0，0)+L×B(1，0)+M×B(0，1)+N×B(1，1)
As mentioned above, in each pixel of inspection area 9, utilize in the revised pixel that goes out by the distortion Distribution calculation and to calculate, can implement the correction of image with this to carrying out briliancy as 4 of the next door of pixel.
Like this, adopt the 1st embodiment, the average real space length of a pixel in the time of can critically calculating the formed picture of ccd video camera 3 photographing optical system 2.The average real space length of a pixel be multiply by the number of pixels of vertical direction of the grid line 7a of inspection area 9, in the time of can calculating the formed picture of ccd video camera 3 photographing optical system 2 corresponding to the image pickup scope of the part of inspection area 9.
Again, the average real space length of a pixel be multiply by the number of pixels of vertical direction of the grid line 7a of inspection area 9, calculate the image pickup scope of ccd video camera 3 in inspection area 9, adjust the multiplying power of optical system 2, make image pickup scope value up to specification, in the time of can adjusting ccd video camera 3 photographing optical system 2 formed pictures with this corresponding to the image pickup scope of the part of inspection area 9.
Again, average real space length with a pixel, ask the Displacements Distribution of orthogonal directions of the grid line 7a of inspection area 9, the distortion of orthogonal directions that obtains the grid line 7a of optical system 2 in whole inspection area 9 distributes, and the distortion corresponding to the part of inspection area 9 in the time of can calculating the formed picture of ccd video camera 3 photographing optical system 2 distributes.
Again, by means of distribute revising optical system 2 formed pictures with distortion, can revise with ccd video camera 3 photographing optical system 2 formed as the time image that obtains.
In the arbitrary region in the inspection area of grid picture, calculate the average grid line number of each pixel column of camera head, multiply by the grid spacing to calculate the real space length of the described arbitrary region on the prescribed direction, it divided by the number of pixels on this direction, can be obtained the average real space length of a pixel of grid picture with this.By means of this, can calculate image pickup scope, adjust image pickup scope, the distortion of the picture that calculates distributes, and uses this distortion to distribute picture is revised, and therefore, can proofread and correct optical system, to measuring picture is carried out accurate mensuration.And these all can carry out a series of processing from the shooting of grid picture.
Describe below with reference to Figure 13,14 couples of the 2nd embodiment.At present embodiment, in the correction of optical system 2, utilized the phase analysis that uses Fourier Tranform.
The device that uses at the 2nd embodiment is identical with the corrective system of the optical system 2 of the 1st embodiment use.And the program of the bearing calibration of optical system 2 also the program with the bearing calibration of the optical system 2 of the 1st embodiment is identical.But,, in the grid line number calculating (step 102) of Fig. 3, utilized and used the phase information of Fourier Tranform to handle at the 2nd embodiment.Below this is illustrated.
At first, as the arbitrary region 10 in the inspection area 9 among 8 (Fig. 4), calculate the grid line number that each pixel column comprised on the Y direction at the grid of video memory 4 storage of Fig. 1 by arithmetic unit 5.Arithmetic unit 5 uses the grid of employing Fourier Tranform of following explanation as 8 phase information treatment technology.
Figure 13 be routine grid as on directions Xs or the Y direction grid line 7a orthogonal directions in the inspection area 9 in 8, the briliancy distribution waveform figure of a certain line.This is carried out Fourier Tranform, can obtain frequency spectrum.
Figure 14 is the real part of gained frequency spectrum when Fourier Tranform is carried out in the briliancy distribution of Figure 13 and the skeleton diagram of imaginary part quadratic sum power spectrum.Only from this frequency spectrum, take out the fundamental component (the oblique line part that is equivalent to Figure 14) of expression original waveform 1 order harmonic components, carry out anti-Fourier Tranform, then the waveform that can get smoothly at real part replaces original waveform, can get the waveform of real part waveform skew half-wavelength in imaginary part.Imaginary part divided by real part institute total negate tangent, is promptly obtained the phase value of original waveform 1 subharmonic on each pixel.Calculate in the phase value distribution of the grid that obtain like this phase value variable quantity in the arbitrary region 10 as 8 inspection area 9.The phase value variable quantity is that 2 π are equivalent to a grid line, and therefore, the phase value variable quantity promptly can the following accuracy computation of radix point go out the grid line number that arbitrary region 10 is comprised divided by 2 π.Thereby can obtain than handling such high numerical value of method precision with 2 values.
Then, in the distortion Distribution calculation step (step 107) of Fig. 3, utilize the phase information of carrying out Fourier Tranform to handle.Be explained below.
At arithmetic unit 5, calculate in the step (step 105) of average real space length of a pixel, with the average real space length of a pixel of trying to achieve, calculate the Displacements Distribution of grid as 8 inspection area 9, i.e. the pattern distortion that causes of optical system 2 distributes.When calculating grid line number (step 102),, just use this result of calculation if calculated in the phase place of grid as 8 inspection area 9.If do not calculate phase place as yet, just be used in the grid number of lines and calculate in (step 102), the program of explanation is calculated this phase place when utilizing the phase information of carrying out Fourier Tranform to handle, and calculates in the PHASE DISTRIBUTION of grid as 8 inspection area 9.Get each location of pixels that the average real space length by a pixel calculates and distribute, resulting PHASE DISTRIBUTION be multiply by the two poor of the resulting value of grid spacing after divided by 2 π, calculate the Displacements Distribution of grid as the orthogonal directions of 8 grid line 7a in each pixel.In the calculation process of the Fourier Tranform of stating in the use, displacement data can obtain by all pixels in inspection area 9, there is no need to carry out interpolation and handles.Can calculate position distribution with the precision below the pixel cell again, therefore, even distortion also can go out distortion with good accuracy computation less than under the such situation of pixel.For example, the real space length of individual pixel is when making a video recording under 5 microns the condition, also can calculate the amount of distortion below 5 microns.
Adopt the 2nd embodiment like this, then utilize grid figure, can make the calculating of grid line number and Displacements Distribution can reach the following precision of radix point with the phase information facture of carrying out Fourier Tranform as regional master gage.Thereby, the calculating that the distortion of the average real space length of a pixel and the calculating of image pickup scope, the adjustment of image pickup scope, resulting picture distributes, and the correction of use distortion distribution etc., higher precision can be arranged.
Below with reference to Fig. 9～Figure 12 and Figure 15～Figure 17 the 3rd embodiment is illustrated.
Fig. 9 is the structural drawing of expression magnetic recording track check apparatus 20.Drawing the pattern 41～43 of regulation on the surface of regional master gage 21.The said pattern 41～43 that should stipulate, as shown in figure 10, it is line chart 41 as the benchmark of pattern, lattice spacing equates and is known, preferably this grid spacing equals spacing (for example the DVC form is 20 microns) grid Figure 42 such, that be parallel to line chart 41 of same azimuthal magnetic track of tape, and perpendicular to grid Figure 43 of line chart 41.
The program of bearing calibration that has as mentioned above the optical system 2 of the magnetic recording track check apparatus that constitutes is illustrated according to the functional-block diagram of Figure 11.
At first the setting (step 201) to the regional master gage among Figure 11 is illustrated.The regional master gage 21 of Fig. 9 is arranged on sample and is provided with on the platform 22.For height and the flatness that makes regional master gage 21 and tape (not shown) equates that it is identical with tape with flatness good that regional master gage 21 is made thickness.But in fact the thickness of tape is extremely thin, has only several microns to tens microns, regional master gage 21 do so thin being difficult to.So, do regional master gage 21 than the thick certain thickness of tape.Offset this difference in height for platform 22 is set with sample, at sample platform 22 is set and assembles the plate that thickness equals the difference in height of tape and regional master gage 21, when tape was set, this plate pad was below tape.Perhaps the mechanism (not shown) that platform 22 is provided in the optical axis direction lifting of optical system 2 is set for sample.
Shooting step (step 202) to the grid picture of Figure 11 is illustrated below.At first, adjust the position of regional master gage 21, make the line chart 41 (Figure 10) of the regional master gage 21 of Fig. 9 be parallel to the horizontal scan direction of ccd video camera 3, then, take grid Figure 42 and 43 on the regional master gage 21 respectively with ccd video camera 3 with XY θ platform.For example,, take with ccd video camera 3 for grid Figure 42, the image that is stored in video memory for as shown in Figure 4 grid as 8.At this moment, regional master gage 21 is arranged on the position identical with tape.Again, the grid spacing of regional master gage 21 is identical with the track pitch of tape.Like this, the grid that obtain are as distribute the briliancy distribution when approaching tape make a video recording of 8 briliancy.Thereby, can proofread and correct with condition near practical measurement, be desirable as bearing calibration.
The grid that obtain when taking grid Figure 42 are illustrated as 8 processing below, are illustrated to the situation of carrying out at Y thereby grid line counted processing such as calculating.Change to read on the directions X and get final product handling direction when taking pattern 43.
Grid line number calculating (step 203) to Figure 11 is illustrated below.Grid at Fig. 4 determine that as 8 promptly the inspection area 9 as the zone of proofreading and correct picture.The real space length of this inspection area, image pickup scope and distortion distribution etc. all be proofread and correct to picture.In the magnetic recording track check apparatus 20, with this inspection area 9 set for haply with as measure the effective coverage of the tape of picture, promptly to draw the track patterns zone consistent.For example, the DVC form is 5.24 millimeters.The grid spacing is got 20 microns, and then the number of the grid line 7a that comprised of inspection area 9 is 262.Thereby the number of pixels of inspection area 9 is preferably more than 1000.In inspection area 9, set arbitrary region 10 below.Calculate the average real space length of a pixel at this arbitrary region 10.Arbitrary region 10 is set at identically with inspection area 9 also can.
Arbitrary region 10 in the grid of the video memory 4 storage inspection area 9 in as 8 calculates the grid line number that each pixel column on the Y direction comprises with the arithmetic unit of Fig. 9.Arithmetic unit 5 is used in the method that illustrates in the grid line number calculating (step 102) of embodiment 1 and calculates the grid line number.
Average grid line number calculating (step 204) to Figure 11 is illustrated below.The processing of calculating (step 103) with the average grid line number of embodiment 1 is identical, in the arithmetic unit of Fig. 9, calculates the mean value of the grid line number in resulting each pixel column, calculates average grid line number with this.
Real space length calculating (step 205) to Figure 11 describes below.The processing of calculating (step 104) with the real space length of embodiment 1 is identical, in the arithmetic unit of Fig. 9, average grid line number be multiply by the known spacing of the grid Figure 42 on the regional master gage 21, calculates real space length on the Y direction of arbitrary region 10 with this.
Calculating (step 206) to the average real space length of the pixel of Figure 11 is illustrated below.Identical with the processing of the calculating (step 105) of the average real space length of the pixel of embodiment 1, in the arithmetic unit 5 of Fig. 9, at first with the real space length on the Y direction of the arbitrary region 10 of trying to achieve divided by the number of pixels on the Y direction of arbitrary region 10, calculate the average real space length of a pixel with this.
Calculating (step 207) to the image pickup scope of Figure 11 is illustrated below.Identical with the processing of the calculating (step 106) of the image pickup scope of embodiment 1, in the arithmetic unit 5 of Fig. 9, the average real space length of the pixel that the calculating (step 206) of the average real space length of pixel is tried to achieve multiply by the number of pixels on the Y direction of inspection area 9, can calculate real space length on the Y direction of inspection area 9, the i.e. image pickup scope of inspection area with this.
Again, identical with the situation of embodiment 1, can be according to the image pickup scope that calculates, the multiplying power of the optical system 2 of variable power is adjusted, make image pickup scope consistent with the effective coverage of tape.
The calculating (step 208) that the distortion of Figure 11 is distributed is illustrated below.The processing of the calculating (step 107) that distributes with the distortion of embodiment 1 is identical, in the arithmetic unit 5 of Fig. 9, the average real space length of a pixel of trying to achieve with the calculating (step 206) of the average real space length of pixel, the grid of calculating chart 4 are as 8 Displacements Distribution in inspection area 9, and promptly the distortion in images that is caused by optical system 2 distributes.
Also can replace the grid Figure 42,43 (Figure 10) on the regional master gage 21 with the grid of the such both direction of Fig. 7, look like to carry out the processing of directions X and Y direction to taking the resulting grid of these grid simultaneously.
Shooting (step 209) to the track patterns image of Figure 11 is illustrated below.At first, at the sample of Fig. 9 platform 22 is set tape is set.At this moment, tape is in the position identical with regional master gage 21.Tape has carried out visualization processing in advance.Carry out the position adjustment with XY θ platform 6, make the edge of tape parallel with the horizontal scan direction of ccd video camera 3.On tape with the position angle, be the parallel record that carries out of magnetic track of 2 kinds of different head records of the angle of head gap.When throwing light on, make that to have a kind of azimuthal magnetic track be bright portion, having another kind of azimuthal magnetic track is dark portion.Therefore just in time become the such LO-pattern of grid figure.Make a video recording with 3 pairs of these patterns of ccd video camera.Magnetic track carries out record slightly obliquely with respect to the length direction of tape, and therefore the image 28 of resulting track patterns as shown in figure 12.As shown in figure 12, the length direction of tape is X, and the Width of tape is Y.The image 28 of tape pattern is stored in storer 4.
Calculating (step 210) to the track patterns Displacements Distribution of rejection image distortion effects among Figure 11 is illustrated below.At first,, calculate, calculate the Displacements Distribution of the Y direction of track patterns according to the Displacements Distribution of magnetic recording track check apparatus 20 with the image 28 of resulting track patterns in the image taking (step 209) of track patterns.At this moment resulting Displacements Distribution also comprises the influence of pattern distortion.
Figure 15 is the key diagram of modification method of the Displacements Distribution of track patterns.Vector S
EXAnd S
EYX component and the Y component of representing pattern distortion among certain pixel P of image 28 of track patterns respectively.These all are the displacements of Eulerian coordinates systems, and remarked pixel P is displacement wherefrom and coming.And vector S
LXAnd S
LYThe displacement of pattern distortion in Largrangian coordinates systems among the remarked pixel P, the point that promptly should be present in pixel P is displacement toward where.Here the differential value that supposition distortion distributes is very little, vector S
LXAnd S
LYRespectively with vector S
EXAnd S
EYApproximate representation.
Owing to use such method, the influence of the Y durection component of the pattern distortion that track patterns is comprised at the vector D of the displacement of Y direction (not shown) among the remarked pixel P is exactly S
EYItself.Because the differential value that the supposition distortion distributes is very little, the influence of the directions X component of vector pattern distortion that D comprises is with the vector S among Figure 15
EXYApproximate representation.θ among Figure 15 is the pitch angle of magnetic track.Thereby the vector Dt of the Y direction displacement of the track patterns of expression correction Hou is shown below.
Dt＝D-S
EY+S
EX×Tanθ
At arithmetic unit 5, in whole pixel the Displacements Distribution that comprises pattern distortion influence is carried out this calculatings, with the Displacements Distribution of the track patterns that calculates the influence that rejection image distorts.
Also have, the additive method as the calculating (step 210) of the track patterns Displacements Distribution of rejection image distortion effects also can carry out processing as follows with arithmetic unit 5.
That is, to the resulting track patterns image 28 of the shooting (step 209) of track patterns image,, use the distortion distribution of X and Y direction to revise with the method for explanation in the image correction (step 109) of embodiment 1.Track patterns image 28 to resulting correction Hou carries out 2 value processing and graph thinning processing, and according to pixels the center of grid line is asked in the unit.Resulting position distribution be multiply by the average real space length of a pixel, obtain the position distribution of the track patterns of real space length unit.According to the comparison of the position distribution of the position distribution of resulting track patterns and ideal track pattern, calculate the Displacements Distribution of track patterns image 28.In order to obtain the Displacements Distribution between the grid line, carry out interpolation processing such as spline interpolation.
The mensuration precision confirmation method of the resulting magnetic recording track check apparatus of result that calculating, the adjustment of image pickup scope and the calculating that distortion distributes etc. of the average real space length of up to now a pixel are proofreaied and correct is illustrated below.
At first, identical with the setting (step 201) of the regional master gage of Figure 11, the sample that the regional master gage 44 that mensuration precision confirmation shown in Figure 16 is used is arranged at magnetic recording track check apparatus 20 is provided with platform 22.Also the situation with regional master gage 21 is the same for the regional master gage 44 that the mensuration precision confirmation is used, thickness is identical with the thickness of tape, or than the thick certain thickness of tape, therefore, the position that the position of tape upper surface and the pattern of measuring the regional master gage 44 that precision confirmation uses are drawn face when magnetic recording track check apparatus 20 is provided with tape is identical.
Drawing pattern shown in Figure 16 at the regional master gage 44 that the mensuration precision confirmation is used.This pattern comprises line chart 41 and simulation track patterns 45.The spacing of simulation track patterns 45 drawn for, the desired pitch of magnetic track that is recorded in the same orientation angle of the track patterns on the tape with magnetic recording/reproducing device equates.And simulation track patterns 45 is selected as with respect to the angle (θ of Figure 16) of line chart 41, and the ideal track angle that is recorded in the track patterns on the tape with magnetic recording/reproducing device equates.If be the DVC form, then spacing is 20 microns, and the magnetic track angle is 9.166809 °.When carrying out the position adjustment when simulation track patterns 45 is made a video recording, uses line chart 41 as benchmark.
Then, measure the image of the regional master gage 44 that precision confirmation uses by 20 pairs of magnetic recording track check apparatus and make a video recording, calculate the Displacements Distribution of the simulation track patterns 45 of rejection image distortion effects.In case the image of measuring the regional master gage 44 that precision confirmation uses is made a video recording, promptly obtain the simulation track patterns image (not shown) similar to the image 28 of track patterns.This simulation track patterns image is carried out the identical processing of calculating (step 210) with the Displacements Distribution of the track patterns of the pattern distortion influence of getting rid of Figure 11, with the Displacements Distribution (Displacements Distribution of the Y direction of Figure 16) of 45 pairs of ideal track patterns of simulation track patterns of calculating the rejection image distortion effects.
Also have, the calculating of the Displacements Distribution of simulation track patterns 45 also can utilize the phase information of the described use Fourier Tranform of explanation of the distortion Distribution calculation (step 107) of embodiment 2 to handle to carry out.
And the Displacements Distribution of 45 pairs of ideal track patterns of simulation track patterns is measured with other mensuration means in advance.The data that these mensuration means obtain become the master data that is used for precision confirmation.Thereby the mensuration means must be better to install than the mensuration precision of magnetic recording track check apparatus.Measure the regional master gage 44 usefulness operation making identical that precision confirmation is used with the production process of the mask of semiconductor applications use.At this moment, the dark portion of simulation track patterns 45 is formed by the chromium of system film on glass substrate.And do not do any processing in the simulation bright of track patterns 45.Thereby can see glass substrate.The surveying instrument that the position of the lines of drawing on glass substrate that high-precision measuring is such is used is an optical interference formula Coordinate Measuring Machine.Measure the marginal position of mask pattern repeatedly with this, can be to measure less than 0.01 micron precision.Use this surveying instrument to measure the position distribution of grid line of the simulation track patterns 45 of the regional master gage 44 that precision confirmation uses, calculate Displacements Distribution with respect to desirable mensuration pattern.Following Displacements Distribution above-mentioned gained calls basis displacement and distributes.Basis displacement distributes and has enough mensuration precision with the mensuration precision with ultra micro rice evaluation magnetic recording track check apparatus.The regional master gage 44 that the mensuration precision confirmation is used is produced on the glass substrate, can keep the Displacements Distribution of simulation track patterns 45 with this.Thereby, obtain basic Displacements Distribution as mentioned above, make the Displacements Distribution of simulation track patterns 45 become known.
Then, from the Displacements Distribution that magnetic recording track check apparatus obtains, take out and the corresponding data of basis displacement distribution, the data on the promptly same mensuration lines.Be referred to as the sample Displacements Distribution.Sample Displacements Distribution and basis displacement distribution are compared, can be with the mensuration precision of the precision confirmation magnetic recording track check apparatus below the ultra micro rice.
And, as shown in figure 17, also grid Figure 42 of line chart 41, Y direction, the grid Figure 43 and the simulation track patterns 45 of directions X can be drawn on a regional master gage.Use such regional master gage can calculate average real space length, calculating and adjustment image pickup scope, a calculating distortion of pixel and distribute and affirmation mensuration precision, and needn't change regional master gage.
Adopt the 3rd embodiment like this, can calculate a real space length that pixel is average of the image that magnetic recording track check apparatus 20 obtains.
Again, an average real space length of pixel be multiply by the number of pixels of orthogonal directions of the grid line of inspection area 9, can calculate the image pickup scope in the inspection area 9, calculate the image pickup scope of the corresponding part in the inspection area 9 of the image that obtains with magnetic recording track check apparatus 20.
Again, an average real space length of pixel be multiply by the number of pixels of orthogonal directions of the grid line of inspection area 9, calculate the image pickup scope in the inspection area 9 of ccd video camera 3, it is setting that the multiplying power of adjusting optical system 2 makes image pickup scope, can adjust the image pickup scope of the corresponding part in the inspection area 9 of the image that obtains with magnetic recording track check apparatus 20 with this.
With a real space length that pixel is average, ask the Displacements Distribution of grid as the orthogonal directions of grid line in 8 the inspection area 9, the optical system 2 that draws magnetic recording track check apparatus 20 in whole inspection area 9 with the direction of grid line quadrature on distortion distribute, distribute with this distortion that can calculate the corresponding part in the inspection area 9 of the image that obtains with magnetic recording track check apparatus 20.
Again, make a video recording with the track patterns that is write down on 3 pairs of tapes of ccd video camera, the Displacements Distribution of the track patterns of go out revising with the distortion Distribution calculation can obtain the check result of rejection image distortion effects at magnetic recording track check apparatus 20 with this.
Can proofread and correct magnetic recording track check apparatus with the regional master gage of regulation again.
And because the spacing of the magnetic track at the same orientation angle on spacing and the tape of the grid figure on the regional master gage equates that the briliancy distribution of resulting grid picture approaches the briliancy distribution of the image of track patterns.Thereby can proofread and correct with the condition that approaches practical measurement.
Again, use regulation to measure the regional master gage that precision confirmation is used, can be embodied in the mensuration precision confirmation of more high-precision correct operation Hou.
Again, on a regional master gage, set in advance and comprise the multiple pattern of simulating track patterns, can calculate average real space length, calculating and adjustment image pickup scope, a calculating distortion of pixel and distribute and affirmation mensuration precision, needn't change regional master gage and just can implement a series of processing.
Below with reference to Figure 13, Figure 14 the 4th embodiment is illustrated.To in the correction of the optical system of magnetic recording track check apparatus, utilizing the situation of the phase analysis that carries out Fourier Tranform to be illustrated.
The employed magnetic recording track check apparatus of the employed device of the 4th embodiment and the 3rd embodiment 20 is identical.And the program of the bearing calibration of the optical system of magnetic recording track check apparatus also the program with the bearing calibration of the optical system of the magnetic recording track check apparatus of the 3rd embodiment is identical.In the present embodiment, in the calculating (step 203) of the grid line number of Figure 11, utilized use Fourier Tranform phase information handle.To be illustrated this.
Figure 14 represents the distribute skeleton diagram of power spectrum of the real part of gained frequency spectrum when carrying out Fourier Tranform and imaginary part quadratic sum of the briliancy of Figure 13.Only take out the fundamental component (the oblique line part that is equivalent to Figure 14) of expression original waveform 1 order harmonic components in this frequency spectrum, carry out anti-Fourier Tranform, then can get smooth waveform and replace original waveform, can be offset the waveform of real part waveform half-wavelength in imaginary part at real part.Imaginary part divided by real part institute total negate tangent, is promptly obtained the phase value of original waveform 1 subharmonic in each pixel.Calculate in the phase value distribution of the grid that obtain like this variable quantity of the phase value in the arbitrary region 10 as 8 inspection area 9.The phase value variable quantity is that 2 π are equivalent to a grid line, and therefore, the phase value variable quantity promptly can the following accuracy computation of radix point go out the grid line number that arbitrary region 10 is comprised divided by 2 π.Thereby can obtain than handling such high numerical value of method precision with 2 values.
Then, the situation of utilizing the phase information processing of carrying out Fourier Tranform in the distortion Distribution calculation step (step 208) of Figure 11 is described.At arithmetic unit 5, in the step (step 206) of the average real space length of a pixel of calculating, with the average real space length of a pixel of trying to achieve, calculate the Displacements Distribution of grid as 8 inspection area 9, promptly the distortion in images that causes of optical system 2 distributes.When calculating grid line number (step 203), just use this result of calculation in the phase calculation of grid as 8 inspection area 9 if carried out.If do not calculate phase place as yet, just be used in the grid line number and calculate in (step 203), the program of explanation is carried out this phase calculation when utilizing the phase information of carrying out Fourier Tranform to handle, and calculates in the PHASE DISTRIBUTION of grid as 8 inspection area 9.Get each locations of pixels that the average real space length by a pixel calculates and distribute, resulting PHASE DISTRIBUTION be multiply by the two poor of the resulting value of grid spacing after divided by 2 π, calculate the Displacements Distribution of grid as the orthogonal directions of 8 grid line in each pixel.In the calculation process of above-mentioned use Fourier Tranform, displacement data can obtain by all pixels in inspection area 9, there is no need to carry out interpolation and handles.Can calculate position distribution with the precision below the pixel unit again, therefore, distortion also can go out distortion with good accuracy computation less than under the such situation of pixel.And as magnetic recording track check apparatus, the grid line number determines that it is effective can not improving under the situation of measuring precision with the method that increases the grid line number.
Like this, adopt the 4th embodiment, then when counting, the calculating grid line use the phase information of carrying out Fourier Tranform to handle, can try to achieve the grid line number with the high precision that reaches decimal unit with this, therefore, the mensuration of the average real space length of a pixel, the calculating of image pickup scope and adjustment can have higher precision.
Again, when distributing, distortion use the phase information of carrying out Fourier Tranform to handle calculating, with this, can be distributing less than the pixel cell displacement calculating, and can distribute and utilize distortion to distribute and revise Displacements Distribution with high precision computation distortion more.
Claims (22)
1. the real space length determination method with camera head is characterized in that having
The 1st step: the direction that is parallel to described grid line and/or perpendicular to the direction of this grid line as horizontal scan direction, make a video recording with camera head with the optical system imaging to containing with the grid figure of given value as the grid line of the equidistant configuration of grid spacing, obtain the grid picture
The 2nd step: in the arbitrary region in the inspection area of described grid picture, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head,
The 3rd step: with described the 2nd step try to achieve in addition average for the bar number of the grid line of each pixel column, calculate the mean value of the bar number of grid line,
The 4th step: described grid number of lines mean value be multiply by the grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line, and
The 5th step:, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line the number of pixels of described real space length divided by the orthogonal directions of the described grid line of described arbitrary region.
2. the real space length determination method with camera head according to claim 1 is characterized in that described step 2 comprises:
In described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture from its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate arbitrary region in described inspection area, perpendicular to the step of the grid number of lines of each pixel column of the direction of described grid line.
3. one kind with real space length determination method on the magnetic recording track of camera head, it is a kind of track patterns that magnetic recording/reproducing device is write down and carried out magnetic recording track on the tape of visualization processing, the bearing calibration of the optical system when making a video recording with camera head by optical system, it is characterized in that having
The 1st step: containing with the given value is that the grid spacing equidistantly disposes and is parallel to the horizontal scan direction of described camera head and/or perpendicular to the grid figure of the grid line of this direction, is arranged on identical with the camera position of the described tape in fact position,
The 2nd step: described grid figure is made a video recording obtaining the grid picture with described camera head,
The 3rd step: in the arbitrary region in the inspection area in described grid picture, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head,
The 4th step: with described the 3rd step try to achieve in addition average for the bar number of the grid line of each pixel column, calculate the mean value of the bar number of grid line,
The 5th step: the bar of described grid line is counted mean value multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 6th step:, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line the number of pixels of described real space length divided by the vertical direction of the described grid line of described arbitrary region.
4. the real space length determination method with camera head according to claim 3 is characterized in that described the 3rd step comprises,
In described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture from its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate arbitrary region in described inspection area, perpendicular to the step of the grid number of lines of each pixel column on the direction of described grid line.
5. the real space length assay method with camera head is characterized in that, comprises
The 1st step: the direction that is parallel to described grid line and/or perpendicular to the direction of described grid line as horizontal scan direction, to contain with the given value be the grid spacing equidistantly the grid figure of the grid line of configuration make a video recording with camera head with the optical system imaging, obtain the grid picture
The 2nd step: in the arbitrary region in the inspection area of this grid picture, on the direction that each pixel column calculates and described grid line is vertical with the bar number of the corresponding grid line of a pixel column of described camera head,
The 3rd step: with described the 2nd step try to achieve in addition average for the bar number of the grid line of each pixel column, calculate the mean value of the bar number of grid line,
The 4th step: grid line is counted mean value multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 5th step: described real space length divided by the described grid line of the described arbitrary region number of pixels in vertical direction, is calculated in the described grid picture at the average real space length perpendicular to a pixel on the direction of described grid line,
The 6th step: described real space length be multiply by number of pixels on described inspection area and the vertical direction described grid line, calculate the image pickup scope in described inspection area.
6. the real space length determination method with camera head according to claim 5 is characterized in that described the 2nd step comprises:
In described inspection area, on the direction vertical, carry out Fourier Tranform with grid line among the described grid figure, extract the step of fundamental component from the frequency spectrum that obtains,
The fundamental component that extracts is carried out anti-Fourier Tranform,, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described PHASE DISTRIBUTION, calculate in the arbitrary region of described inspection area, the step of the bar number of the grid line of each pixel column on the direction vertical with described grid line.
7. the real space length determination method with camera head according to claim 5 is characterized in that described the 6th step comprises:
A described average real space length of pixel be multiply by the number of pixels on the direction vertical of described inspection area with described grid line, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
8. the real space length determination method with camera head according to claim 5 is characterized in that described the 2nd step comprises:
In described inspection area, on the direction vertical, carry out Fourier Tranform with grid line among the described grid figure, extract the step of fundamental component from the frequency spectrum that obtains,
The fundamental component that extracts is carried out anti-Fourier Tranform,, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, the step of the bar number of the grid line of each pixel column on the direction in the arbitrary region of calculating in described inspection area, vertical with described grid line, described the 6th step comprises:
The average real space length of a described pixel be multiply by the number of pixels on the direction vertical of described inspection area with described grid line, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of predetermined value.
9. one kind with real space length determination method on the magnetic recording track of camera head, it is the track patterns that magnetic recording/reproducing device is write down and carried out the magnetic recording track on the tape of visualization processing, the bearing calibration of the optical system when making a video recording with camera head by optical system, it is characterized in that having
The 1st step: containing with the given value is that the grid spacing equidistantly disposes and is parallel to the horizontal scan direction of described camera head and/or perpendicular to the grid figure of the grid line of this direction, is arranged on identical with the camera position of the described tape in fact position,
The 2nd step: described grid figure is made a video recording obtaining the grid picture with described camera head,
The 3rd step: in the arbitrary region in the described inspection area in described grid picture, on the direction that each pixel column calculates and described grid line is vertical with the bar number of the corresponding grid line of a pixel column of described camera head,
The 4th step: with described the 3rd step try to achieve in addition average for the bar number of the grid line of each pixel column, calculate the mean value of the bar number of grid line,
The 5th step: described grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 6th step: the number of pixels of described real space length, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line divided by the vertical direction of the described grid line of described arbitrary region, and
The 7th step: the average real space length of a described pixel be multiply by the number of pixels on the direction vertical of described inspection area, calculate the image pickup scope of described inspection area with described grid line.
10. the real space length determination method with camera head according to claim 9 is characterized in that described the 3rd step comprises:
In described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate in the arbitrary region of described inspection area, perpendicular to the step of the bar number of the grid line of each pixel column on the direction of described grid line.
11. the real space length determination method with camera head according to claim 9 is characterized in that described the 7th step comprises:
The average real space length of a described pixel be multiply by the number of pixels on the direction vertical of described inspection area with described grid line, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
12. the real space length determination method with camera head according to claim 9 is characterized in that described the 3rd step comprises:
In described inspection area, on the vertical direction of the grid line of grid figure, carry out Fourier Tranform, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate in the arbitrary region of described inspection area, perpendicular to the step of the bar number of the grid line of each pixel column on the direction of described grid line,
Described the 7th step comprises
The average real space length of a described pixel be multiply by the number of pixels on the direction vertical of described inspection area with described grid line, calculate the image pickup scope of described camera head in described inspection area, adjust the multiplying power of optical system, making this image pickup scope is the step of setting.
13. an optical system correction method is characterized in that having,
The 1st step: the direction that is parallel to described grid line and/or perpendicular to the direction of described grid line as horizontal scan direction, to contain with the given value be spacing equidistantly the grid figure of the grid line of configuration make a video recording with camera head with the optical system imaging, obtain the grid picture
The 2nd step: in the arbitrary region in the inspection area of described grid picture, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head,
The 3rd step: with described the 2nd step try to achieve in addition average to the number of lines of the grid line of each pixel column, calculate the mean value of the bar number of grid line,
The 4th step: grid line is counted mean value multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 5th step: the number of pixels of described real space length, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line divided by the vertical direction of the described grid line of described arbitrary region, and
The 6th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, thereby the distortion that obtains this direction in whole described inspection area distributes.
14. optical system correction method according to claim 13 is characterized in that, described the 2nd step comprises:
In described inspection area, on the direction vertical, carry out Fourier Tranform with grid line among the grid figure, extract the step of fundamental component from the frequency spectrum that obtains,
The fundamental component that extracts is carried out anti-Fourier Tranform,, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described PHASE DISTRIBUTION, calculate the step of bar number of the grid line of each pixel column on the direction in the arbitrary region in the described inspection area, vertical with described grid line,
The 6th step comprises: use described phase value distribution, calculate the step of the Displacements Distribution on described inspection area, vertical with described grid line direction.
15. the optical system correction method of a magnetic recording track shooting usefulness, it is the track patterns that magnetic recording/reproducing device is write down and carried out the magnetic recording track on the tape of visualization processing, the bearing calibration of the optical system of the magnetic recording track check apparatus of making a video recording, checking with camera head by optical system, it is characterized in that having
The 1st step: equidistantly dispose as the grid spacing and be parallel to the horizontal scan direction of described camera head and/or, be arranged on identical with the camera position of the described tape in fact position containing perpendicular to the grid figure of the grid line of this direction with given value,
The 2nd step: described grid figure is made a video recording obtaining the grid picture with described camera head,
The 3rd step: in the arbitrary region in the inspection area in described grid picture, described magnetic recording track check apparatus, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head,
The 4th step: with described the 3rd step try to achieve in addition average to the bar number of the grid line of each pixel column, calculate the mean value of grid number of lines,
The 5th step: described grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 6th step: the number of pixels of described real space length, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line divided by the vertical direction of the described grid line of described arbitrary region,
The 7th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, thereby the optical system that obtains described magnetic recording track check apparatus in whole described inspection area distributes in the distortion of this direction.
16. optical system correction method according to claim 15 is characterized in that, described the 3rd step comprises:
In described inspection area, in grid figure, carry out Fourier Tranform on the vertical direction of grid line, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate the arbitrary region of described inspection area, perpendicular to the step of the bar number of the grid line of each pixel column on the direction of described grid line,
Described the 7th step comprises: use described phase value distribution, calculate in the described grid picture step of the Displacements Distribution on the vertical direction of the described grid line of described inspection area.
17. an optical system correction method is characterized in that having
The 1st step: the direction that is parallel to described grid line and/or perpendicular to the direction of described grid line as horizontal scan direction, to contain with the given value be spacing equidistantly the grid figure of the grid line of configuration make a video recording with camera head with the optical system imaging, obtain the grid picture
The 2nd step: in the arbitrary region in the inspection area of described grid picture, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head,
The 3rd step: the bar number to the grid line of each pixel column that described the 2nd step is tried to achieve is average, calculate the mean value of the bar number of grid line,
The 4th step: grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 5th step: the number of pixels of described real space length, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line divided by the vertical direction of the described grid line of described arbitrary region,
The 6th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, distribute in the distortion of this direction thereby obtain described optical system in whole described inspection area,
The 7th step: revise described optical system imaging with described distortion distribution.
18. optical system correction method according to claim 17 is characterized in that, described the 2nd step comprises:
In described inspection area, on the vertical direction of the grid line of grid figure, carry out Fourier Tranform, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate the arbitrary region of described inspection area, perpendicular to the step of the bar number of the grid line of each pixel column on the direction of described grid line,
Described the 6th step comprises: use described phase value distribution, calculate the step of the Displacements Distribution on described inspection area, vertical with described grid line direction.
19. the optical system correction method of a magnetic recording track shooting usefulness, it is the track patterns that magnetic recording/reproducing device is write down and carried out the magnetic recording track on the tape of visualization processing, by optical system with the make a video recording bearing calibration of optical system of the magnetic recording track check apparatus checked of camera head, it is characterized in that having
The 1st step: equidistantly dispose as the grid spacing and be parallel to the horizontal scan direction of described camera head and/or, be arranged on identical with the camera position of the described tape in fact position containing perpendicular to the grid figure of the grid line of this direction with given value,
The 2nd step: described grid figure is made a video recording obtaining the grid picture with described camera head,
The 3rd step: in the arbitrary region in the inspection area in described grid picture, described magnetic recording track check apparatus, to each pixel column calculate with the vertical direction of described grid line on the bar number of the corresponding grid line of a pixel column of described camera head,
The 4th step: with described the 3rd step try to achieve in addition average for the bar number of the grid line of each pixel column, calculate the mean value of grid number of lines,
The 5th step: described grid number of lines mean value be multiply by described grid spacing, calculate the real space length of the described arbitrary region on the direction vertical with described grid line,
The 6th step: the number of pixels of described real space length, calculate in the described grid picture at average real space length perpendicular to a pixel on the direction of described grid line divided by the vertical direction of the described grid line of described arbitrary region,
The 7th step: use described real space length, obtain in the described grid picture Displacements Distribution on the vertical direction of the described grid line of described inspection area, thereby the optical system that obtains described magnetic recording track check apparatus in whole described inspection area distributes in the distortion of this direction
The 8th step: with described camera head the track patterns that writes down on the tape is made a video recording, calculate the Displacements Distribution of the described track patterns of revising with described distortion distribution.
20. optical system correction method according to claim 19 is characterized in that, described the 3rd step comprises:
In described inspection area, on the vertical direction of the grid line of grid figure, carry out Fourier Tranform, the step of taking out fundamental component from the frequency spectrum that obtains,
The fundamental component that takes out is carried out anti-Fourier Tranform, calculate the step of the phase value distribution of described grid picture according to its result's the real part and the ratio of imaginary part, and
Use described phase value distribution, calculate the arbitrary region of described inspection area, perpendicular to the step of the bar number of the grid line of each pixel column on the direction of described grid line,
Described the 7th step comprises: use described phase value distribution, calculate in the described grid picture step of the Displacements Distribution on the vertical direction of the described grid line of described inspection area.
21. the optical system correction method of a magnetic recording track shooting usefulness, it is the track patterns of the magnetic recording track on the tape that magnetic recording/reproducing device is write down, carried out visualization processing, optical system correction method when making a video recording with camera head by optical system is characterized in that
Be provided as the line chart of the benchmark of coordinate system, with with in described magnetic recording/reproducing device respectively by in the plural ideal track pattern of azimuthal head records on tape with regulation, with the track patterns with an azimuthal head records is bright portion, the track patterns that obtains when being dark portion with the track patterns with another azimuthal head records is practically identical, and along the determining displacement line more than at least one, Displacements Distribution with respect to described ideal track pattern is known simulation track patterns, make that the height and position of the surface of described line chart and described simulation track patterns upper surface of described tape when on described magnetic recording track check apparatus described tape being set is practically identical
Measure the Displacements Distribution of described simulation track patterns with described magnetic recording track check apparatus to described ideal track pattern,
Described Displacements Distribution and described Displacements Distribution measurement result are compared, detected the mensuration precision of described magnetic recording track check apparatus.
22. optical system correction method according to claim 21 is characterized in that,
Described Displacements Distribution is measured, and in the image of described simulation track patterns, carries out Fourier Tranform on displacement measure of spread direction, takes out fundamental component from the frequency spectrum that obtains,
The fundamental component that is taken out is carried out anti-Fourier Tranform, calculates the phase value distribution of the image of described simulation track patterns according to its result's the real part and the ratio of imaginary part,
Use described phase value distribution, calculate the Displacements Distribution of the image of described simulation track patterns.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06184796A JP3672371B2 (en) | 1996-02-23 | 1996-02-23 | Method for measuring actual space length by imaging means, optical system calibration method, and reference gauge used for optical system calibration |
| JP061847/96 | 1996-02-23 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011252790A Division CN100401376C (en) | 1996-02-23 | 1997-01-23 | Reference gauge for magnetic recording track check apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1163390A CN1163390A (en) | 1997-10-29 |
| CN1090796C true CN1090796C (en) | 2002-09-11 |
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ID=13182902
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011252790A Expired - Fee Related CN100401376C (en) | 1996-02-23 | 1997-01-23 | Reference gauge for magnetic recording track check apparatus |
| CN97102342A Expired - Fee Related CN1090796C (en) | 1996-02-23 | 1997-01-23 | Method for measuring real space length by camera shooting and optical system correcting method and datum gauge |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011252790A Expired - Fee Related CN100401376C (en) | 1996-02-23 | 1997-01-23 | Reference gauge for magnetic recording track check apparatus |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3672371B2 (en) |
| KR (1) | KR100267809B1 (en) |
| CN (2) | CN100401376C (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003065725A (en) * | 2001-08-24 | 2003-03-05 | Rohm Co Ltd | Thickness measuring device |
| KR100870999B1 (en) * | 2006-08-29 | 2008-11-27 | 김원섭 | Method for Inputting Size Information Automatically in Editing Image and Computer Readable Medium for the Same |
| JPWO2008105463A1 (en) * | 2007-02-28 | 2010-06-03 | 株式会社ニコン | Manufacturing method of inspection device |
| KR100889872B1 (en) * | 2007-11-08 | 2009-03-24 | (주)와이티에스 | The align system's display glass substrate of align straight line degree automatic camera adjusted methods |
| JP4416827B1 (en) * | 2008-09-10 | 2010-02-17 | シャープ株式会社 | Evaluation apparatus, calibration method, calibration program, and recording medium |
| JP2010160051A (en) * | 2009-01-08 | 2010-07-22 | Mitsutoyo Corp | Correcting pattern for image devices |
| JP4907725B2 (en) * | 2010-03-23 | 2012-04-04 | シャープ株式会社 | Calibration device, defect detection device, defect repair device, display panel, display device, calibration method |
| CN104567664A (en) * | 2013-10-29 | 2015-04-29 | 鸿富锦精密工业（深圳）有限公司 | Image measuring system, application method of image measuring system and terminal device |
| JP6871561B2 (en) * | 2016-08-15 | 2021-05-12 | 国立大学法人福井大学 | How to measure displacement |
| CN107352241B (en) * | 2017-07-19 | 2023-09-01 | 天奇自动化工程股份有限公司 | Lifting device with belt breakage early warning function and function implementation method thereof |
| CN108459419B (en) * | 2018-01-17 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | Filter pinhole alignment adjusting device and method based on grating diffraction |
| CN109683547A (en) * | 2018-12-28 | 2019-04-26 | 中铝瑞闽股份有限公司 | A kind of plate center support system and its working method based on discrete control |
| CN115014142A (en) * | 2022-05-27 | 2022-09-06 | 河南大学 | Steel tape scale error measuring method based on machine vision |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2084604U (en) * | 1991-03-06 | 1991-09-11 | 中国科学院光电技术研究所 | Precision detector for surveyor's rod grating |
-
1996
- 1996-02-23 JP JP06184796A patent/JP3672371B2/en not_active Expired - Fee Related
-
1997
- 1997-01-23 CN CNB011252790A patent/CN100401376C/en not_active Expired - Fee Related
- 1997-01-23 CN CN97102342A patent/CN1090796C/en not_active Expired - Fee Related
- 1997-01-23 KR KR1019970001896A patent/KR100267809B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1163390A (en) | 1997-10-29 |
| KR100267809B1 (en) | 2001-01-15 |
| CN1404034A (en) | 2003-03-19 |
| KR970062737A (en) | 1997-09-12 |
| JP3672371B2 (en) | 2005-07-20 |
| CN100401376C (en) | 2008-07-09 |
| JPH09229635A (en) | 1997-09-05 |
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