CN109073549A - Scatter angle measuring device and scattering angle measuring method - Google Patents
Scatter angle measuring device and scattering angle measuring method Download PDFInfo
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- CN109073549A CN109073549A CN201880000919.7A CN201880000919A CN109073549A CN 109073549 A CN109073549 A CN 109073549A CN 201880000919 A CN201880000919 A CN 201880000919A CN 109073549 A CN109073549 A CN 109073549A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
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Abstract
This application discloses a kind of scattering angle measuring devices, which includes: laser, for emitting light to part to be measured, to obtain the scattering light that the light is formed after the part to be measured；Signal acquisition unit, for being moved in the plane of incidence of the light, to acquire the scattering light on multiple scattering directions in the plane of incidence；Processing unit, for determining the angle of scattering of the part to be measured according to the scattered light intensity on the multiple scattering direction.Therefore, signal acquisition unit acquires the scattering light on each scattering direction by movement on multiple scattering directions in plane of incidence, and calculates the angle of scattering of the part to be measured according to the scattered light intensity on the collected multiple scattering direction of the signal acquisition unit by processing unit.Since the signal acquisition unit can be moved in plane of incidence, only needs a signal acquisition unit that can collect the scattering light on each scattering direction, greatly reduce the cost of measuring device.
Description
Technical field
This application involves field of optical measurements, and survey more particularly, to a kind of scattering angle measuring device and angle of scattering
Amount method.
Background technique
It is microcosmic existing that light scattering phenomenon can be used for detecting the molecular morphosis of material, Polymer Solution crystallization, absorption etc.
As being used widely in physics, biology, chemistry, meteorology etc. perhaps various researchs.Light can be sent out after penetrating sample
Raw scattering, is formed by angle of scattering and usually requires dedicated measuring device.But current scattering angle measuring device usually requires to make
With a large amount of photoelectric detector, structure is complex, and installation cost is higher.
Summary of the invention
The embodiment of the present application provides a kind of scattering angle measuring device and scattering angle measuring method, can reduce angle of scattering survey
The complexity of device is measured, the cost of scattering angle measuring device is reduced.
In a first aspect, providing a kind of scattering angle measuring device, the scattering angle measuring device includes: laser, is used for
Emit light to part to be measured, to obtain the scattering light that the light is formed after the part to be measured；Signal acquisition unit is used for
It is moved in the plane of incidence of the light, to acquire the scattering light on multiple scattering directions in the plane of incidence；
Processing unit, for determining the angle of scattering of the part to be measured according to the scattered light intensity on the multiple scattering direction.
Therefore, the signal acquisition unit in the scattering angle measuring device passes through on multiple scattering directions in plane of incidence
It is mobile to acquire the scattering light on each scattering direction, and according to the signal acquisition unit, collected this is more by processing unit
Scattered light intensity on a scattering direction, calculates the angle of scattering of the part to be measured.Since the signal acquisition unit can be in plane of incidence
It is inside moved, therefore only needs a signal acquisition unit that can collect the scattering light on each scattering direction, significantly
Reduce the cost of measuring device.
With reference to first aspect, in a kind of possible implementation of first aspect, the signal acquisition unit is specifically used
In: in the plane of incidence, rotated centered on the incidence point on the part to be measured by the light, it is the multiple to acquire
Scatter the scattering light on direction.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the multiple scattering direction includes incident direction and N number of scattering direction positioned at the incident direction side, described N number of
Scatter direction in i-th scattering direction and the incident direction between angle be less than i+1 scatter direction with it is described enter
Penetrate the angle between direction, 1≤i≤N.
Wherein, the processing unit is specifically used for: if the incident direction and the 1st scattering direction are to M1A scattering
The ratio of scattered light intensity summation on the sum of scattered light intensity on direction, with the multiple scattering direction reaches preset value, then really
The fixed M1Angle between a scattering direction and the incident direction is the angle of scattering of the part to be measured, 1≤M1≤N。
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the multiple scattering direction includes incident direction and is symmetrically located in the incident direction about the incident direction
N number of scattering direction in N number of scattering direction of the first side and second side positioned at the incident direction, the N scattering of first side
I-th of scattering direction in direction and the angle between the incident direction are less than i+1 scattering direction and the incidence side
Angle between, i-th of scattering direction in N number of scattering direction of described second side and the angle between the incident direction
The angle between direction and the incident direction, 1≤i≤N are scattered less than i+1.
Wherein, the processing unit is specifically used for: if the incident direction, first side the 1st scattering direction extremely
M2A scattering direction and the 1st scattering direction of described second side are to the M2Scattered light intensity on a scattering direction it
With reach preset value with the ratio of scattered light intensity summation on the multiple scattering direction, it is determined that the M2A scattering side
It is the angle of scattering of the part to be measured, 1≤M to the angle between the incident direction2≤N。
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the scattering angle measuring device further includes execution unit, and the signal acquisition unit is arranged on the execution unit, institute
Execution unit is stated for driving the signal acquisition unit to move in the plane of incidence, to acquire the multiple scattering direction
On the scattering light.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, before the scattering light that the signal acquisition unit acquires on the multiple scattering direction, the execution unit is also
For: drive the signal acquisition unit to be moved to the incident direction of the light, the signal acquisition unit it is described enter
Penetrating the position on direction is the initial position that the signal acquisition unit moves in the plane of incidence.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the execution unit includes rotary shaft and rotating arm, and the signal acquisition unit is arranged on the rotating arm, the rotation
Pivoted arm is used to rotate around the rotary shaft, to drive the signal acquisition unit on the rotating arm in the plane of incidence
It is interior to be rotated centered on the incidence point on the part to be measured by the light, it is described scattered on the multiple scattering direction to acquire
Penetrate light.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the rotary shaft is vertical with the plane of incidence, the rotating arm be right angle arm, a right-angle side of the right angle arm with
The rotation axis connection and vertically with the rotary shaft, another right-angle side of the right angle arm is parallel with the rotary shaft, institute
Signal acquisition unit is stated to be arranged on the right-angle side parallel with the rotary shaft.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the signal acquisition unit includes a photoelectric sensor, and the photoelectric sensor in the plane of incidence for moving
It is dynamic, to acquire the scattering light on the multiple scattering direction, and by the scattering light on the multiple scattering direction
Optical signal is converted into electric signal.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the signal acquisition unit includes a fibre optical sensor, and the fibre optical sensor in the plane of incidence for moving
It is dynamic, to acquire the scattering light on the multiple scattering direction, and by the scattering light on the multiple scattering direction
Optical signal is converted into electric signal, and carries out spectrum analysis to the scattering light on the multiple scattering direction.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the scattering angle measuring device further includes the data collecting card being connected with the signal acquisition unit, the data acquisition
Block the electric signal for obtaining the scattering light on the multiple scattering direction from the signal acquisition unit, and will be described more
The electric signal of the scattering light on a scattering direction is sent to the processing unit.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the incident direction of the light is vertical with the surface of the part to be measured.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the part to be measured is high-molecular organic material or Organic Light Emitting Diode OLED screen.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the processing unit is also used to: according to the angle of scattering of the part to be measured, determining the material property of the part to be measured.
With reference to first aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of first aspect
In formula, the processing unit is specifically used for: if the angle of scattering of the part to be measured is less than preset threshold, it is determined that the part to be measured
Material property is qualification.
Second aspect provides a kind of scattering angle measuring method, and the method is executed by scattering angle measuring device, described to dissipate
Firing angle measuring device includes laser, signal acquisition unit and processing unit, which comprises laser emits to part to be measured
Light, to obtain the scattering light that the light is formed after the part to be measured；Incidence of the signal acquisition unit in the light
It is moved in plane, to acquire the scattering light on multiple scattering directions in the plane of incidence；Processing unit is according to
Scattered light intensity on multiple scattering directions determines the angle of scattering of the part to be measured.
Therefore, the scattering angle measuring method of the embodiment of the present application can be only by a signal acquisition unit in plane of incidence
Movement on interior multiple scattering directions, to collect the scattering light on each scattering direction, and by processing unit according to this
Scattered light intensity on the collected multiple scattering direction of signal acquisition unit, calculates the angle of scattering of the part to be measured.Due to the letter
Number acquisition unit can be moved in plane of incidence, therefore it is each only to need a signal acquisition unit that can collect
The scattering light on direction is scattered, the cost of measuring device is greatly reduced.
In conjunction with second aspect, in a kind of possible implementation of second aspect, the signal acquisition unit is described
It is moved in the plane of incidence of light, to acquire the scattering light on multiple scattering directions in the plane of incidence, comprising: the letter
Number acquisition unit is rotated centered on the incidence point on the part to be measured in the plane of incidence by the light, with acquisition
The scattering light on the multiple scattering direction.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the multiple scattering direction includes incident direction and N number of scattering direction positioned at the incident direction side, described N number of
Scatter direction in i-th scattering direction and the incident direction between angle be less than i+1 scatter direction with it is described enter
Penetrate the angle between direction, 1≤i≤N.
Wherein, the processing unit determines dissipating for the part to be measured according to the scattered light intensity on the multiple scattering direction
Firing angle, comprising: if the incident direction and the 1st scattering direction are to M1The sum of scattered light intensity on a scattering direction, with
The ratio of scattered light intensity summation on the multiple scattering direction reaches preset value, it is determined that the M1A scattering direction and institute
State the angle of scattering that the angle between incident direction is the part to be measured, 1≤M1≤N。
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the multiple scattering direction includes incident direction and is symmetrically located in the incident direction about the incident direction
N number of scattering direction in N number of scattering direction of the first side and second side positioned at the incident direction, the N scattering of first side
I-th of scattering direction in direction and the angle between the incident direction are less than i+1 scattering direction and the incidence side
Angle between, i-th of scattering direction in N number of scattering direction of described second side and the angle between the incident direction
The angle between direction and the incident direction, 1≤i≤N are scattered less than i+1.
Wherein, the processing unit determines dissipating for the part to be measured according to the scattered light intensity on the multiple scattering direction
Firing angle, comprising: if the incident direction, first side the 1st scattering direction to M2A scattering direction and described
1st scattering direction of two sides is to the M2On the sum of scattered light intensity on a scattering direction, with the multiple scattering direction
The ratio of scattered light intensity summation reach preset value, it is determined that the M2Folder between a scattering direction and the incident direction
Angle is the angle of scattering of the part to be measured, 1≤M2≤N。
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, before the scattering light that the signal acquisition unit acquires on the multiple scattering direction, the method also includes:
The signal acquisition unit is moved in the incident direction of the light, wherein the signal acquisition unit is in the incidence side
Upward position is the initial position that the signal acquisition unit moves in the plane of incidence.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the signal acquisition unit includes a photoelectric sensor, plane of incidence of the signal acquisition unit in the light
Interior movement, to acquire the scattering light on multiple scattering directions in the plane of incidence, comprising: the photoelectric sensor exists
It is moved in the plane of incidence, to acquire the scattering light on the multiple scattering direction, and by the multiple scattering direction
On the optical signal of the scattering light be converted into electric signal.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the signal acquisition unit includes a fibre optical sensor, plane of incidence of the signal acquisition unit in the light
Interior movement, to acquire the scattering light on multiple scattering directions in the plane of incidence, comprising: the fibre optical sensor exists
It is moved in the plane of incidence, to acquire the scattering light on the multiple scattering direction, and by the multiple scattering direction
On the optical signal of the scattering light be converted into electric signal, and light is carried out to the scattering light on the multiple scattering direction
Spectrum analysis.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the scattering angle measuring device further includes the data collecting card being connected with the signal acquisition unit, and the method is also wrapped
Include: the data collecting card obtains the telecommunications of the scattering light on the multiple scattering direction from the signal acquisition unit
Number, and the electric signal of the scattering light on the multiple scattering direction is sent to the processing unit.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the incident direction of the light is vertical with the surface of the part to be measured.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the part to be measured is high-molecular organic material or Organic Light Emitting Diode OLED screen.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the method also includes: the processing unit determines the material of the part to be measured according to the angle of scattering of the part to be measured
Energy.
In conjunction with second aspect or any of the above-described kind of possible implementation, in the alternatively possible realization side of second aspect
In formula, the processing unit determines the material property of the part to be measured, comprising: if described according to the angle of scattering of the part to be measured
The angle of scattering of part to be measured is less than preset threshold, and the processing unit determines the material property of the part to be measured for qualification.
Detailed description of the invention
Fig. 1 is the schematic block diagram that light forms scattering light after part to be measured in the embodiment of the present application.
Fig. 2 is the schematic diagram of the scattering angle measuring device of the embodiment of the present application.
Fig. 3 is the schematic diagram of the measurement angle of scattering of the embodiment of the present application.
Fig. 4 is the schematic diagram of the measurement angle of scattering of the embodiment of the present application.
Fig. 5 is the schematic diagram of the execution unit of the embodiment of the present application.
Fig. 6 is the schematic diagram of the measurement angle of scattering of the embodiment of the present application.
Fig. 7 is the schematic diagram of the scattering Angle Measurements of the embodiment of the present application.
Fig. 8 is the schematic diagram of the measurement angle of scattering of the embodiment of the present application.
Fig. 9 is the schematic diagram of the scattering Angle Measurements of the embodiment of the present application.
Figure 10 is the schematic block diagram of the scattering angle measuring device of the embodiment of the present application.
Figure 11 is a kind of possible structure chart of the scattering angle measuring device of the embodiment of the present application.
Figure 12 is the schematic flow chart of the scattering angle measuring method of the embodiment of the present application.
Specific embodiment
Below in conjunction with attached drawing, technical solutions in the embodiments of the present application is described.
Existing scatterometry device generallys use a large amount of photoelectric sensors and constitutes sensor array at present, and passes through multichannel
Data acquisition and procession obtains the light distribution of different location, or acquires light using a large amount of optical lenses and optical imaging device
Dispersion image information, and the light distribution of scattering light is obtained by algorithm process.Although these measuring devices may be implemented to treat
The measurement of the angle of scattering of part is surveyed, but its group is typically more complicated, needs a large amount of elements, not only increases installation cost, and survey
Accuracy of measurement is not also high.
To reduce device complexity, the embodiment of the present application proposes a kind of scattering angle measuring device, scattering angular measurement dress
It can only include a signal acquisition unit in setting for example only including a photoelectric sensor or fibre optical sensor, the signal acquisition
Unit by mobile to acquire the scattering light on each scattering direction on multiple scattering directions in plane of incidence, and by
Unit is managed according to the scattered light intensity on the collected multiple scattering direction of the signal acquisition unit, calculates the scattering of the part to be measured
Angle.It is fixed for not being due to the signal acquisition unit, but can be moved in plane of incidence, therefore only need one
Signal acquisition unit can collect the scattered light signal on multiple scattering directions, reduce the cost of measuring device.
Fig. 1 is the schematic diagram that light forms scattering light after part to be measured in the embodiment of the present application.The light that light source issues
When being incident to part to be measured, since the effect of laser electric field makes the material of part to be measured generate polarization, occur by external electric field induction and shape
At dipole moment.Since laser electric field is time variable, therefore dipole moment also changes over time and is formed the radiation of an electromagnetic wave
Thus source generates scattering light.Angle, θ shown in Fig. 1 is the angle of scattering of the part to be measured, the scattered light intensity within the scope of angle, θ
The percentage for accounting for the total scattering light intensity of the part to be measured need to reach certain threshold value such as 90%.
Fig. 2 is the schematic diagram of the scattering angle measuring device of the embodiment of the present application.Device 200 shown in Fig. 2 can be used for pair
The angle of scattering of part to be measured measures.Optionally, which can be Organic Light Emitting Diode (Organic Light
Emitting Diode, OLED) display screen, liquid crystal display (Liquid Crystal Display, LCD) or other materials example
Such as high-molecular organic material.The container body of outer cover of the scattering angle measuring device 200 can do blackening process, to avoid extraneous ring
Influence of the border veiling glare to measurement result.As shown in Fig. 2, the scattering angle measuring device 200 may include that laser 210, signal are adopted
Collect unit 220 and processing unit 230, in which:
Laser 210 is dissipated for emitting light to part to be measured with obtain that the light formed after the part to be measured
Penetrate light.
Signal acquisition unit 220, it is multiple in the plane of incidence to acquire for being moved in the plane of incidence of the light
Scatter the scattering light on direction.
Processing unit 230, for determining the angle of scattering of the part to be measured according to the scattered light intensity on multiple scattering direction.
Specifically, laser 210 emits light to part to be measured, and the incident direction of the light can be with the table of the part to be measured
Face is vertical.The light forms scattering light for example shown in FIG. 1 after the scattering of part to be measured.Signal acquisition unit 220 can be
It moves, such as is moved on the different scattering directions in the plane of incidence in one plane of incidence of the light, to acquire this not
With the scattering light on scattering direction.It, can be by the scattering after signal acquisition unit 220 acquires the scattering light on each scattering direction
The information of light passes to processing unit 230, thus after processing unit 230 obtains the scattered light intensity on each scattering direction, according to
Scattered light intensity on multiple scattering direction, determines the angle of scattering of the part to be measured.
After the angle of scattering for determining the part to be measured, optionally, processing unit 230 can also dissipating according to the part to be measured
Firing angle determines the material property of the part to be measured.
When material property such as molecular structure, molecules align mode due to part to be measured etc. is different, the part to be measured is to incidence
The scattering power of light is also different, therefore the material property of the part to be measured can be determined by the angle of scattering of the part to be measured.For example,
By taking OLED display screen as an example, preset if the measurement result of OLED display screen to be measured shows that the angle of scattering of the OLED display screen is less than
Threshold value, it may be considered that the OLED display screen is qualified, it, can if the angle of scattering of the OLED display screen is greater than the preset threshold
To think that the OLED display screen is underproof.
In the current existing scattering instrument based on light scattering principle, signal acquisition unit be always arranged in be fixed on it is specific
Position on, therefore, in order to acquire it is multiple scattering directions scattering light when, it is necessary to multiple signal acquisition units are respectively to difference
The scattering light in scattering direction is acquired, to increase the complexity of apparatus structure, improves the cost of measuring device.And this
Apply in embodiment, the signal acquisition unit 220 scattered in angle measuring device 200 can press in the plane of incidence of incident ray
It is moved according to certain rule, therefore a signal acquisition unit can be only set in the scattering angle measuring device, it will be able to is logical
The signal acquisition unit is crossed in the movement in the plane of incidence to collect on multiple scattering directions in the plane of incidence
Scatter light, and also do not need the optical elements such as other imaging lens, thus greatly reduce the scattering angle measuring device at
This.
Optionally, which further includes execution unit 240, which is arranged at this
On execution unit 240, the execution unit 240 is for driving the signal acquisition unit 220 to move in the plane of incidence, with acquisition
Scattering light on multiple scattering direction.
When the executing agency 240 drives signal acquisition unit 220 to move in the plane of incidence, signal acquisition unit 220
The collection point for being scattered light collection respectively on multiple scattering direction can be located at straight line.Such as shown in Fig. 3, signal
Acquisition unit 220 can acquire the scattering light on this five scattering directions respectively on collection point 1 to collection point 5.
Under this mode, the movement rail of signal acquisition unit 220 is only simply linear motion, therefore execution unit 240
Structure can be designed relatively simple.But, it is contemplated that scattering light is lost in communication process with the increase of transmission path
It will increase.Therefore, the intensity loss of collected scattering light will be higher than collection point 1 at the collection point 2 and collection point 4 in Fig. 3
Locate it is collected scattering light intensity loss, equally, at collection point 3 and collection point 5 it is collected scattering light intensity loss just
The intensity loss of collected scattering light at collection point 2 and collection point 4 can be higher than.It is dissipated in view of collected at different acquisition point
The error for penetrating light intensity is different, may will affect the measurement accuracy of angle of scattering.
Therefore, in the embodiment of the present application, which can also drive the signal acquisition unit 220 in the incidence
It in plane, is pivoted about with incidence point of the incident ray on part to be measured, so that signal acquisition unit 220 can
Acquire the scattering light on multiple scattering direction.
Such as shown in Fig. 4, signal acquisition unit 220 can acquire this five scatterings respectively on collection point 1 to collection point 5
Scattering light on direction.Signal acquisition unit 220 is pivoted about with incidence point of the incident ray on part to be measured, successively
Scattering light on the scattering direction acquired after reaching each collection point where the collection point.Due in collection point 1 to collection point 5
Distance of each collection point apart from incidence point A is identical, therefore the loss on propagation path of light is also identical.This mode compared to
Mode shown in Fig. 3 can significantly improve the measurement accuracy of angle of scattering.
It is multiple in the plane of incidence to acquire in order to enable signal acquisition unit 220 to rotate centered on the incidence point
The scattering light on direction is scattered, the embodiment of the present application also provides a kind of structures of possible execution unit 240.
Optionally, which may include rotary shaft and rotating arm, which is arranged at this
On rotating arm, which is used to be rotated around the axis of the rotary shaft, to drive the signal acquisition on the rotating arm
Unit 220 is rotated centered on the incidence point on the part to be measured in the plane of incidence by the light, to acquire multiple scattering
Scattering light on direction.
For example, the execution unit 240 can be as shown in Figure 5.In Fig. 5, the rotary shaft is vertical with the plane of incidence, the rotation
Pivoted arm is right angle arm, a right-angle side of the right angle arm and the rotation axis connection and perpendicular to the rotary shaft, the right angle arm it is another
One right-angle side is parallel with the rotary shaft, which is arranged on the right-angle side parallel with the rotary shaft.
The rotary shaft is perpendicular to for the mobile plane of incidence with collection of scattered light of signal acquisition unit 220, the right angle arm
A right-angle side (being denoted as the first right-angle side) be vertically connected in the rotary shaft so that another right-angle side of the right angle arm
(being denoted as the second right-angle side) is parallel with the rotary shaft, i.e., second right-angle side also vertically with the plane of incidence.It therefore, as long as should
Signal acquisition unit 220 is arranged on the second right-angle side, and second right-angle side is arranged in signal acquisition unit 220 and is put down with incidence
The position of face intersection, then when rotated, the second right-angle side is just able to drive the signal acquisition unit 220 in the incidence to the right angle arm
It is moved on multiple scattering directions in plane.And since the length of the first right-angle side is fixed, and the second right-angle side is with
One right-angle side is what radius was rotated around rotary shaft, and therefore, which drives signal acquisition unit 220 to be moved to
When on each scattering direction in the plane of incidence, collection point distance of the signal acquisition unit 220 on each scattering direction
The linear distance of rotary shaft is the same.
Two sides of the right angle arm can be integrally formed, can also by other connectors by the two right-angle sides vertically
It links together.In the embodiment of the present application, which can also have other forms, adopt as long as being able to drive signal
Collection unit 220 pivots about movement in the plane of incidence with incidence point.
It should also be understood that the rotating arm is rotated around the axis of the rotary shaft, can be realized by different modes.Example
Such as, it can be fixedly connected between rotating arm and rotary shaft, i.e., relative motion be not present between rotating arm and rotary shaft, therefore rotate
Axis when rotated, will drive rotating arm and rotate together；Alternatively, rotary shaft is also possible to fix not during scattering light collection
Dynamic, and rotating arm can be rotated around the rotary shaft of the fixation.The embodiment of the present application does not do any restriction, energy to this
Enough realize that the rotating arm is rotated around the axis of the rotary shaft, so that the signal acquisition unit on rotating arm be driven to exist
The scattering light of part to be measured is acquired on different angle direction in the plane of incidence.
Ideally, the position that incidence point of the incident ray on part to be measured should be made, positioned at straight where rotary shaft
On line, i.e. the surface of part to be measured shown in Fig. 5 and rotary shaft are located at sustained height.But in practical operation, since part to be measured is thick
It is different that degree may cause incidence point position of the light on part surface to be measured, or due to there is height between rotary shaft and objective table
Spend the reasons such as error, signal acquisition unit 220 may not be to rotate centered on incidence point, but only centered on rotary shaft
It is rotated.It should be understood that as long as the difference in height between rotary shaft and the position of light incidence point is within the acceptable range, all
It is to carry out moving in rotation around incidence point that signal acquisition unit 220, which can be approximately considered, all meets measurement request.
Signal acquisition unit 220 can move in the plane of incidence and acquire the scattering light on multiple scattering directions, can
Selection of land, multiple scattering direction are multiple scattering directions in some predetermined angle, i.e., each scattering in multiple scattering direction
Angle between direction and the incident direction is respectively less than or is equal to the predetermined angle.Signal acquisition unit 220 can only acquisition should
Scattering light on the scattering direction of incident direction side, such as the scattering of clockwise direction side scattered on direction can be acquired
Scattering light on the scattering direction of light or counter clockwise direction side；Signal acquisition unit 220 can also acquire the incidence side simultaneously
Scattering light on the scattering direction of two sides, such as the scattering side of clockwise direction side and counter clockwise direction side can be acquired
Upward scattering light.Both modes are described respectively below with reference to Fig. 6 and Fig. 7.
Mode 1
Such as shown in Fig. 6, multiple scattering direction that signal acquisition unit 220 acquires includes incident direction and enters positioned at this
N number of scattering direction of direction side is penetrated, the angle between i-th of scattering direction and the incident direction in N number of scattering direction
The angle between direction and the incident direction, 1≤i≤N are scattered less than i+1.
Wherein, processing unit 230 is specifically used for: if the incident direction and the 1st scattering direction are to M1A scattering side
The ratio of scattered light intensity summation on the sum of upward scattered light intensity, with multiple scattering direction reaches preset value, it is determined that should
M1Angle between a scattering direction and the incident direction is the angle of scattering of the part to be measured, 1≤M1≤N。
Assuming that the preset value is 90%, the angle that n-th scatters between direction and incident direction is 20 °.Signal acquisition list
After member 220 acquires the scattering light on incident direction and N number of scattering direction, processing unit 230 can be according to this N number of scattering side
Upward scattered light intensity obtains scattered light intensity distribution map for example shown in Fig. 7.Processing unit 230 can be in N number of scattering direction
Scattered light intensity in the corresponding angular range in each scattering side is integrated to obtain integral light intensity.For example, i-th of scattering direction
Corresponding integral light intensity includes the sum of the scattered light intensity on incident direction and the 1st scattering direction to i-th of scattering direction, the
The corresponding light intensity that integrates in N number of scattering direction is the scattered light intensity summations all scattered on directions.
Assuming that M1A percentages for scattering the scattered light intensity summation that the corresponding integral light in direction is seized on all scattering directions
Than reaching the preset value 90%, then processing unit 230 then can be by M1Angle between a scattering direction and incident direction is true
It is set to the angle of scattering of the part to be measured.Such as shown in Fig. 7, M1The angle of a scattering direction and incident direction is 13 °, then this is to be measured
The angle of scattering of part is 13 °.
Mode 2
Such as shown in Fig. 8, signal acquisition unit 220 acquire multiple scattering direction include incident direction and about
The incident direction is symmetrically located in the N number of scattering direction of the first side of the incident direction and second side positioned at the incident direction
N number of scattering direction, the N of first side scatter i-th of scattering direction in direction and the angle between the incident direction less than i-th
Angle between+1 scattering direction and the incident direction, i-th of scattering direction in N number of scattering direction of the second side and this
Angle between incident direction is less than the angle between i+1 scattering direction and the incident direction, 1≤i≤N.
Wherein, processing unit 230 is specifically used for: if the incident direction, first side the 1st scattering direction to M2It is a
The 1st scattering direction of direction and the second side is scattered to the M2The sum of scattered light intensity on a scattering direction is more with this
The ratio of scattered light intensity summation on a scattering direction reaches preset value, it is determined that the M2A scattering direction and the incident direction
Between angle be the part to be measured angle of scattering, 1≤M2≤N。
Assuming that the preset value is 95%, the angle between the n-th scattering direction of the first side and incident direction is 20 °, the
Angle between the n-th scattering direction of two sides and incident direction is 20 °.Signal acquisition unit 220 acquires incident direction, first
After scattering light on N number of scattering direction of side and N number of scattering direction of second side, processing unit 230 can be adopted according to signal
Scattered light intensity on collection unit 220 these scattering directions collected obtains scattered light intensity distribution map for example shown in Fig. 9.
Processing unit 230 can to the scattered light intensity in the corresponding angular range in each scattering side in these scattering directions into
Row integral obtains integral light intensity.For example, the corresponding integral light intensity in i-th of scattering direction includes incident direction, the 1st of the first side
Scatter the 1st scattering direction to i-th of scattering direction of the scattered light intensity that direction scatters on direction to i-th and second side
On the sum of scattered light intensity, it is whole scattered light intensity summations on scattering directions that n-th, which scatters the corresponding integral light intensity in direction,.
Assuming that the M of the first side2A M for scattering direction to second side2On each scattering direction between a scattering direction
The sum of scattered light intensity, the percentages of the scattered light intensity summation accounted on all scattering directions reach the preset value 95%, then handle
Unit 230 then can be by M2Angle between a scattering direction and incident direction is determined as the angle of scattering of the part to be measured.Such as
Shown in Fig. 9, M2The angle of a scattering direction and incident direction is 14 °, then the angle of scattering of the part to be measured is 14 °.
It should be understood that signal acquisition unit 220, which can acquire, to be spaced apart from each other as the multiple of unit angle in the embodiment of the present application
The scattering light on direction is scattered, i.e., differs the unit angle between i-th scattering direction and i+1 scattering direction.The unit
Angle is smaller, shows that the density between the collection point in all directions of signal acquisition unit 220 is bigger, the part to be measured of measurement
Angle of scattering it is more accurate, in general, the unit angle for example can be less than 1 °.
Optionally, signal acquisition unit 220 includes a photoelectric sensor, which is used in the plane of incidence
Interior movement to acquire the scattering light on multiple scattering directions, and the optical signal of the scattering light on multiple scattering direction is converted
For electric signal.It may include conditioning circuit in the photoelectric sensor, for converting electric signal for the optical signal of the scattering light.
Alternatively, optionally, signal acquisition unit 220 includes a fibre optical sensor, which is used to enter at this
It penetrates in plane and moves, to acquire the scattering light on multiple scattering directions, and the light of the scattering light on multiple scattering direction is believed
Number it is converted into electric signal.Also, after the photoelectric sensor is substituted for the fibre optical sensor, optionally, the fibre optical sensor is also
Spectrum analysis can be carried out to the scattering light on multiple scattering direction, such as true to the absorption of different-waveband according to the part to be measured
Molecular structure, density and the distribution etc. of the fixed material.
Laser 210 can issue the light with some specific wavelength, or issue the light with a wavelength range
Line.When the wavelength for the light that laser 210 issues is, for example, 532 ± 10nm, the spectral response range of photoelectric sensor be should be
Visible-range.When the signal acquisition unit 220 is a fibre optical sensor, which, which can issue, has centainly
The incident ray of wave-length coverage.
Figure 10 show a kind of specific schematic block diagram of scattering angle measuring device 200.Optionally, as shown in Figure 10,
The scattering angle measuring device 200 can also include the data collecting card 250 being connected with signal acquisition unit 220, data acquisition
Card 250 is for obtaining the electric signals of the scattering light on multiple scattering directions from signal acquisition unit 220, and by multiple scattering side
The electric signal of upward scattering light is sent to processing unit 230.Preferably, which uses high-precision data
Capture card, to improve the precision of scattering angular measurement.
Optionally, as shown in Figure 10, scattering angle measuring device 200 can also include electronic control unit 260, electronic control unit 260
Corresponding operating is executed with control execution unit 240 for sending instruction to execution unit 240, is set to the execution list to drive
Signal acquisition unit 220 in member 240 moves on multiple scattering directions in plane of incidence with collection of scattered light.It can be set
The unit angle that rotary shaft in execution unit 240 rotates every time, to drive the signal acquisition unit 220 on rotating arm each
The unit angle is rotated to be moved on next scattering direction.
For example, Figure 11 is a kind of possible concrete structure diagram of the scattering angle measuring device of the embodiment of the present application.It surveys
Test agent can be placed on objective table.Before being scattered angle detection, it is right that electronic control unit 260 can control execution unit 240
Signal acquisition unit 220 carries out zero adjustment, such as signal acquisition unit 220 is adjusted to the incidence side for being located at laser 210
Upwards, as the signal acquisition position of starting.Laser 210 is opened, laser 210 emits beam and vertical incidence is to be measured to this
Part surface is to generate scattering light.Signal acquisition unit 220 is under the drive of execution unit 240, with incidence in plane of incidence
It is rotated centered on point according to predetermined order, to acquire the scattering light on multiple scattering directions in the plane of incidence.It is wherein every
After acquiring the scattering light on a direction, the scattered light signal after acquisition can be converted to electric signal by signal acquisition unit 220
And it is transferred to data collecting card 250, the light intensity data received is sent to processing unit 230 by data collecting card 250, to locate
Unit 230 is managed to send instruction and drive the signal acquisition unit 220 on execution unit 240 to rotate under by electronic control unit 260
On one scattering direction.When in the rotation to the scattering direction for being in predetermined angle with incident direction of signal acquisition unit 220, stop
Scatter the acquisition of light, post-processing unit 230 carry out data processing, display, the operation such as storage, to obtain the scattering of part to be measured
Angle.
The scattering angle measuring device according to the embodiment of the present application has been described in detail above, has described root below in conjunction with Figure 12
According to the scattering angle measuring method of the embodiment of the present application, technical characteristic described in Installation practice is implemented suitable for following methods
Example.
Figure 12 is the schematic flow chart of the scattering angle measuring method of the embodiment of the present application.Method 1200 can shown in Figure 12
To be measured for the angle of scattering to part to be measured.Optionally, the part to be measured can be O LED display, LCD display or its
His material such as high-molecular organic material etc..This method 1200 can be executed by scattering angle measuring device 200, the scattering angular measurement
Device 200 may include laser 210, signal acquisition unit 220 and processing unit 230.As shown in Fig. 2, this method 1200 can
To include following part or all of step.
In 1210, laser 210 emits light to part to be measured, is dissipated with obtain that the light formed after the part to be measured
Penetrate light.
Optionally, the incident direction of the light is vertical with the surface of the part to be measured.
In 1220, signal acquisition unit 220 moves in the plane of incidence of the light, to acquire in the plane of incidence
The scattering light on multiple scattering directions.
In 1230, processing unit 230 determines the scattering of the part to be measured according to the scattered light intensity on multiple scattering direction
Angle.
Therefore, the scattering angle measuring method of the embodiment of the present application can be only by a signal acquisition unit in plane of incidence
Movement on interior multiple scattering directions, to collect the scattering light on each scattering direction, and by processing unit according to this
Scattered light intensity on the collected multiple scattering direction of signal acquisition unit, calculates the angle of scattering of the part to be measured.Due to the letter
Number acquisition unit is not fixed in scattering angle measuring device, but can be moved in plane of incidence according to pre-defined rule
It is dynamic, therefore only need a signal acquisition unit that can collect the scattered light signal on multiple scattering directions, it substantially reduces
The cost of measuring device.
Optionally, in 1220, which moves in the plane of incidence of the light, is entered with acquiring this
Penetrate the scattering light on multiple scattering directions in plane, comprising: the signal acquisition unit 220 is in the plane of incidence, with this
Light rotates centered on the incidence point on the part to be measured, to acquire the scattering light on multiple scattering direction.
Optionally, multiple scattering direction includes incident direction and N number of scattering direction positioned at the incident direction side, is somebody's turn to do
I-th of scattering direction in N number of scattering direction and the angle between the incident direction are less than i+1 scattering direction and the incidence
Angle between direction, 1≤i≤N.
Wherein, in 1230, which determines that this is to be measured according to the scattered light intensity on multiple scattering direction
The angle of scattering of part, comprising: if the incident direction and the 1st scattering direction are to M1Scattered light intensity on a scattering direction it
With reach preset value with the ratio of scattered light intensity summation on multiple scattering direction, it is determined that the M1A scattering direction with
Angle between the incident direction is the angle of scattering of the part to be measured, 1≤M1≤N。
Optionally, multiple scattering direction includes incident direction and is symmetrically located in the incidence side about the incident direction
To the first side N number of scattering direction and second side positioned at the incident direction N number of scattering direction, first side N scattering
Angle between i-th in direction scattering direction and the incident direction be less than i+1 scattering direction and the incident direction it
Between angle, i-th of scattering direction in N number of scattering direction of the second side and the angle between the incident direction less than i-th+
Angle between 1 scattering direction and the incident direction, 1≤i≤N.
Wherein, in 1230, which determines that this is to be measured according to the scattered light intensity on multiple scattering direction
The angle of scattering of part, comprising: if the incident direction, first side the 1st scattering direction to M2A scattering direction and this
1st scattering direction of two sides is to the M2Dissipating on the sum of the scattered light intensity on a scattering direction, with multiple scattering direction
The ratio for penetrating light intensity summation reaches preset value, it is determined that the M2Angle between a scattering direction and the incident direction be this to
Survey the angle of scattering of part, 1≤M2≤N。
Optionally, which includes a photoelectric sensor, in 1220, the signal acquisition unit 220
It is moved in the plane of incidence of the light, to acquire the scattering light on multiple scattering directions in the plane of incidence, comprising: should
Photoelectric sensor moves in the plane of incidence, to acquire the scattering light on multiple scattering direction, and by multiple scattering
The optical signal of the scattering light on direction is converted into electric signal.
Optionally, which includes a fibre optical sensor, in 1220, the signal acquisition unit 220
It is moved in the plane of incidence of the light, to acquire the scattering light on multiple scattering directions in the plane of incidence, comprising: should
Fibre optical sensor moves in the plane of incidence, to acquire the scattering light on multiple scattering direction, and by multiple scattering
The optical signal of the scattering light on direction is converted into electric signal, and carries out spectrum to the scattering light on multiple scattering direction
Analysis.
Optionally, which further includes the data collecting card being connected with the signal acquisition unit 220,
This method further include: the data collecting card obtains the scattering light on multiple scattering direction from the signal acquisition unit 220
Electric signal, and the electric signal of the scattering light on multiple scattering direction is sent to the processing unit 230.
Optionally, this method further include: the processing unit 230 determines the part to be measured according to the angle of scattering of the part to be measured
Material property.
Further, optionally, which determines the material of the part to be measured according to the angle of scattering of the part to be measured
Performance, comprising: if the angle of scattering of the part to be measured is less than preset threshold, which determines the material property of the part to be measured
For qualification.
Optionally, it before being scattered angular measurement, can also return to zero to the signal acquisition unit 220, that is, make this
Signal acquisition unit 220 is located in the incident direction of light, executes above-mentioned 1210 to 1230 again later.The signal acquisition unit
220 position in incident direction is that signal acquisition unit 220 moves in plane of incidence and is scattered rising for light collection
Beginning position.
It should be understood that the associated description of the scattering angle measuring method 1200 can be with reference to aforementioned to scattering angle measuring device 200
Associated description, for sake of simplicity, which is not described herein again.
Those of ordinary skill in the art may be aware that list described in conjunction with the examples disclosed in the embodiments of the present disclosure
Member and algorithm steps can be realized with the combination of electronic hardware or computer software and electronic hardware.These functions are actually
It is implemented in hardware or software, the specific application and design constraint depending on technical solution.Professional technician
Each specific application can be used different methods to achieve the described function, but this realization is it is not considered that exceed
Scope of the present application.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In several embodiments provided herein, it should be understood that disclosed systems, devices and methods, it can be with
It realizes by another way.For example, the apparatus embodiments described above are merely exemplary, for example, the unit is drawn
Point, only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components can
To combine or be desirably integrated into another system, or some features can be ignored or not executed.Another point, it is shown or beg for
The mutual coupling, direct-coupling or communication connection of opinion can be through some interfaces, the INDIRECT COUPLING of device or unit
Or communication connection, it can be electrical property, mechanical or other forms.
Unit may or may not be physically separated as illustrated by the separation member for this, show as unit
Component may or may not be physical unit, it can it is in one place, or may be distributed over multiple nets
On network unit.It can select some or all of unit therein according to the actual needs to realize the mesh of this embodiment scheme
's.
It, can also be in addition, can integrate in a detection unit in each functional unit in each embodiment of the application
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.
More than, the only specific embodiment of the application, but the protection scope of the embodiment of the present application is not limited thereto, and is appointed
What those familiar with the art can readily occur in variation or replace in the technical scope that the embodiment of the present application discloses
It changes, should all cover within the protection scope that the application is suitble to private interests.Therefore, the protection scope of the embodiment of the present application should be with power
Subject to the protection scope that benefit requires.
Claims (26)
1. a kind of scattering angle measuring device, which is characterized in that the scattering angle measuring device includes:
Laser, for emitting light to part to be measured, to obtain the scattering light that the light is formed after the part to be measured；
Signal acquisition unit is multiple scattered in the plane of incidence to acquire for moving in the plane of incidence of the light
Penetrate the scattering light on direction；
Processing unit, for determining the angle of scattering of the part to be measured according to the scattered light intensity on the multiple scattering direction.
2. scattering angle measuring device according to claim 1, which is characterized in that the signal acquisition unit is specifically used for:
In the plane of incidence, rotated centered on the incidence point on the part to be measured by the light, it is described more to acquire
The scattering light on a scattering direction.
3. scattering angle measuring device according to claim 1 or 2, which is characterized in that the multiple scattering direction include into
Penetrate direction and N number of scattering direction positioned at the incident direction side, i-th of scattering direction in N number of scattering direction and
Angle between the incident direction is less than i+1 and scatters angle between direction and the incident direction, 1≤i≤N,
Wherein, the processing unit is specifically used for:
If the incident direction and the 1st scattering direction are to M1The sum of scattered light intensity on a scattering direction, and it is the multiple
The ratio of scattered light intensity summation on scattering direction reaches preset value, it is determined that the M1A scattering direction and the incidence side
Angle between is the angle of scattering of the part to be measured, 1≤M1≤N。
4. scattering angle measuring device according to claim 1 or 2, which is characterized in that the multiple scattering direction include into
It penetrates direction and is symmetrically located in N number of scattering direction of the first side of the incident direction about the incident direction and is located at
N number of scattering direction of second side of the incident direction, the N of first side scatter i-th of scattering direction and institute in direction
State the angle that the angle between incident direction is less than between i+1 scattering direction and the incident direction, the N of described second side
Angle between i-th in a scattering direction scattering direction and the incident direction be less than i+1 scatter direction with it is described
Angle between incident direction, 1≤i≤N,
Wherein, the processing unit is specifically used for:
If the incident direction, first side the 1st scattering direction to M2A scattering direction and described second side
1st scattering direction is to the M2Scattering on the sum of scattered light intensity on a scattering direction, with the multiple scattering direction
The ratio of light intensity summation reaches preset value, it is determined that the M2Angle between a scattering direction and the incident direction is institute
State the angle of scattering of part to be measured, 1≤M2≤N。
5. scattering angle measuring device according to any one of claim 1 to 4, which is characterized in that the scattering angular measurement
Device further includes execution unit, and the signal acquisition unit is arranged on the execution unit, and the execution unit is for driving
The signal acquisition unit moves in the plane of incidence, to acquire the scattering light on the multiple scattering direction.
6. scattering angle measuring device according to claim 5, which is characterized in that described in signal acquisition unit acquisition
Before the scattering light on multiple scattering directions, the execution unit is also used to:
The signal acquisition unit is driven to be moved in the incident direction of the light, the signal acquisition unit is in the incidence
Position on direction is the initial position that the signal acquisition unit moves in the plane of incidence.
7. scattering angle measuring device according to claim 5 or 6, which is characterized in that the execution unit includes rotary shaft
And rotating arm, the signal acquisition unit are arranged on the rotating arm,
The rotating arm is used to be rotated around the axis of the rotary shaft, to drive the signal on the rotating arm to adopt
Collection unit is rotated centered on the incidence point on the part to be measured in the plane of incidence by the light, described more to acquire
The scattering light on a scattering direction.
8. scattering angle measuring device according to claim 7, which is characterized in that the rotary shaft and the plane of incidence hang down
Directly, the rotating arm is right angle arm, a right-angle side of the right angle arm and the rotation axis connection and vertical with the rotation
Another right-angle side of axis, the right angle arm is parallel with the rotary shaft, signal acquisition unit setting with the rotation
On the parallel right-angle side of axis.
9. scattering angle measuring device according to any one of claim 1 to 8, which is characterized in that the signal acquisition list
Member includes a photoelectric sensor, and the photoelectric sensor in the plane of incidence for moving, to acquire the multiple dissipate
The scattering light on direction is penetrated, and converts electric signal for the optical signal of the scattering light on the multiple scattering direction.
10. scattering angle measuring device according to any one of claim 1 to 8, which is characterized in that the signal acquisition list
Member includes a fibre optical sensor, and the fibre optical sensor in the plane of incidence for moving, to acquire the multiple dissipate
The scattering light on direction is penetrated, and converts electric signal for the optical signal of the scattering light on the multiple scattering direction,
And spectrum analysis is carried out to the scattering light on the multiple scattering direction.
11. scattering angle measuring device according to claim 9 or 10, which is characterized in that the scattering angle measuring device is also
Including the data collecting card being connected with the signal acquisition unit, the data collecting card from the signal acquisition unit for obtaining
Take the electric signal of the scattering light on the multiple scattering direction, and by the scattering light on the multiple scattering direction
Electric signal is sent to the processing unit.
12. scattering angle measuring device according to any one of claim 1 to 11, which is characterized in that the institute of the light
It is vertical with the surface of the part to be measured to state incident direction.
13. scattering angle measuring device according to any one of claim 1 to 12, which is characterized in that the part to be measured is
High-molecular organic material or Organic Light Emitting Diode OLED screen.
14. scattering angle measuring device according to any one of claim 1 to 13, which is characterized in that the processing unit
It is also used to:
According to the angle of scattering of the part to be measured, the material property of the part to be measured is determined.
15. scattering angle measuring device according to claim 14, which is characterized in that the processing unit is specifically used for:
If the angle of scattering of the part to be measured is less than preset threshold, it is determined that the material property of the part to be measured is qualification.
16. a kind of scattering angle measuring method, which is characterized in that the method is executed by scattering angle measuring device, the angle of scattering
Measuring device includes laser, signal acquisition unit and processing unit, which comprises
Laser emits light to part to be measured, to obtain the scattering light that the light is formed after the part to be measured；
Signal acquisition unit moves in the plane of incidence of the light, to acquire multiple scattering directions in the plane of incidence
On the scattering light；
Processing unit determines the angle of scattering of the part to be measured according to the scattered light intensity on the multiple scattering direction.
17. according to the method for claim 16, which is characterized in that the signal acquisition unit is flat in the incidence of the light
It is moved in face, to acquire the scattering light on multiple scattering directions in the plane of incidence, comprising:
The signal acquisition unit is revolved centered on the incidence point on the part to be measured in the plane of incidence, by the light
Turn, to acquire the scattering light on the multiple scattering direction.
18. method according to claim 16 or 17, which is characterized in that the multiple scattering direction include incident direction and
I-th of scattering direction and the incidence positioned at N number of scattering direction of the incident direction side, in N number of scattering direction
Angle between direction is less than i+1 and scatters angle between direction and the incident direction, 1≤i≤N,
Wherein, the processing unit determines the angle of scattering of the part to be measured according to the scattered light intensity on the multiple scattering direction,
Include:
If the incident direction and the 1st scattering direction are to M1The sum of scattered light intensity on a scattering direction, and it is the multiple
The ratio of scattered light intensity summation on scattering direction reaches preset value, it is determined that the M1A scattering direction and the incidence side
Angle between is the angle of scattering of the part to be measured, 1≤M1≤N。
19. method according to claim 16 or 17, which is characterized in that the multiple scattering direction include incident direction with
And N number of scattering direction of the first side of the incident direction is symmetrically located in about the incident direction and is located at the incidence side
To second side N number of scattering direction, i-th scattering direction and the incident direction in the N scattering direction of first side
Between angle be less than i+1 and scatter angle between direction and the incident direction, N number of scattering direction of described second side
In i-th scattering direction and the incident direction between angle be less than i+1 scattering direction and the incident direction it
Between angle, 1≤i≤N,
Wherein, the processing unit determines the angle of scattering of the part to be measured according to the scattered light intensity on the multiple scattering direction,
Include:
If the incident direction, first side the 1st scattering direction to M2A scattering direction and described second side
1st scattering direction is to the M2Scattering on the sum of scattered light intensity on a scattering direction, with the multiple scattering direction
The ratio of light intensity summation reaches preset value, it is determined that the M2Angle between a scattering direction and the incident direction is institute
State the angle of scattering of part to be measured, 1≤M2≤N。
20. method described in any one of 6 to 19 according to claim 1, which is characterized in that the signal acquisition unit includes one
A photoelectric sensor,
The signal acquisition unit moves in the plane of incidence of the light, to acquire multiple scatterings in the plane of incidence
The scattering light on direction, comprising:
The photoelectric sensor moves in the plane of incidence, to acquire the scattering light on the multiple scattering direction,
And electric signal is converted by the optical signal of the scattering light on the multiple scattering direction.
21. method described in any one of 6 to 19 according to claim 1, which is characterized in that the signal acquisition unit includes one
A fibre optical sensor,
The signal acquisition unit moves in the plane of incidence of the light, to acquire multiple scatterings in the plane of incidence
The scattering light on direction, comprising:
The fibre optical sensor moves in the plane of incidence, to acquire the scattering light on the multiple scattering direction,
And electric signal is converted by the optical signal of the scattering light on the multiple scattering direction, and to the multiple scattering direction
On the scattering light carry out spectrum analysis.
22. the method according to claim 20 or 21, which is characterized in that the scattering angle measuring device further include with it is described
The connected data collecting card of signal acquisition unit, the method also includes:
The data collecting card obtains the telecommunications of the scattering light on the multiple scattering direction from the signal acquisition unit
Number, and the electric signal of the scattering light on the multiple scattering direction is sent to the processing unit.
23. method described in any one of 6 to 22 according to claim 1, which is characterized in that the incident direction of the light
It is vertical with the surface of the part to be measured.
24. method described in any one of 6 to 23 according to claim 1, which is characterized in that the part to be measured is organic polymer
Material or Organic Light Emitting Diode OLED screen.
25. method described in any one of 6 to 24 according to claim 1, which is characterized in that the method also includes:
The processing unit determines the material property of the part to be measured according to the angle of scattering of the part to be measured.
26. according to the method for claim 25, which is characterized in that the processing unit is according to the scattering of the part to be measured
Angle determines the material property of the part to be measured, comprising:
If the angle of scattering of the part to be measured is less than preset threshold, the processing unit determines the material property of the part to be measured to close
Lattice.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2018/093431 WO2020000319A1 (en) | 2018-06-28 | 2018-06-28 | Scattering angle measuring device and scattering angle measuring method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109490271A (en) * | 2018-12-26 | 2019-03-19 | 华讯方舟科技有限公司 | A kind of test device and test method of fluorescence spectrum |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06323991A (en) * | 1984-11-15 | 1994-11-25 | Wyatt Technol Corp | Method for normalizing scattering intensity of light |
| CN102419315A (en) * | 2011-09-08 | 2012-04-18 | 苏州汉朗光电有限公司 | Smectic liquid crystal space scattering measurement method and device |
| JP5141419B2 (en) * | 2008-07-24 | 2013-02-13 | いすゞ自動車株式会社 | Soot concentration measuring device |
| CN204405543U (en) * | 2014-11-04 | 2015-06-17 | 湖南科技大学 | Rotary Variable multi-angle laser light scattering instrument |
| CN105891063A (en) * | 2016-03-31 | 2016-08-24 | 华中科技大学 | Multi-angle dynamic light scattering particle size distribution measuring device and method |
| CN107345893A (en) * | 2017-07-24 | 2017-11-14 | 哈尔滨工业大学 | A kind of KPT Scatter phase function measurement apparatus and measuring method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2310625A1 (en) * | 1997-11-19 | 1999-05-27 | Otsuka Electronics Co., Ltd. | Apparatus for measuring characteristics of optical angle |
| CN100460861C (en) * | 2005-08-01 | 2009-02-11 | 中国科学院化学研究所 | Time resolving two-dimensional laser light scattering apparatus with small and large angle |
| CN201622228U (en) * | 2009-11-26 | 2010-11-03 | 上海理工大学 | Dynamic polarized light scattered grain measuring device |
| CN105043946B (en) * | 2015-07-08 | 2017-12-15 | 浙江大学 | Angle of scattering self-calibration whole audience rainbow measuring method and device based on dual wavelength |
| KR102462995B1 (en) * | 2016-01-06 | 2022-11-03 | 엘지이노텍 주식회사 | Light receiving module and Dust sensor including thereof |
-
2018
- 2018-06-28 WO PCT/CN2018/093431 patent/WO2020000319A1/en active Application Filing
- 2018-06-28 CN CN201880000919.7A patent/CN109073549A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06323991A (en) * | 1984-11-15 | 1994-11-25 | Wyatt Technol Corp | Method for normalizing scattering intensity of light |
| JP5141419B2 (en) * | 2008-07-24 | 2013-02-13 | いすゞ自動車株式会社 | Soot concentration measuring device |
| CN102419315A (en) * | 2011-09-08 | 2012-04-18 | 苏州汉朗光电有限公司 | Smectic liquid crystal space scattering measurement method and device |
| CN204405543U (en) * | 2014-11-04 | 2015-06-17 | 湖南科技大学 | Rotary Variable multi-angle laser light scattering instrument |
| CN105891063A (en) * | 2016-03-31 | 2016-08-24 | 华中科技大学 | Multi-angle dynamic light scattering particle size distribution measuring device and method |
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| CN109490271A (en) * | 2018-12-26 | 2019-03-19 | 华讯方舟科技有限公司 | A kind of test device and test method of fluorescence spectrum |
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