Display base plate and its manufacturing method and display device
Technical field
The present invention relates to field of display technology more particularly to a kind of display base plate and its manufacturing methods and display device.
Background technique
The display technology of maturation is LCD (liquid crystal display) technology on the market at present, and OLED (ORGANIC ELECTROLUMINESCENCE DISPLAYS
Device), the novel display technology such as QLED (quanta point electroluminescent display) with high contrast brought by self-luminous, high colour gamut,
Wide viewing angle, low energy consumption, low reaction time and its more frivolous advantage are of interest by everybody.
The OLED display of volume production is based on small size on the market, large scale negligible amounts, and limitation large scale OLED is shown
The principal element of device is the preparation of OLED device.The OLED display device of volume production is prepared using the mode of vapor deposition at present
OLED device, and as shown in Figure 1, vapor deposition mode can not make high PPI (per inch pixel due to the use of vapor deposition mask plate 02
Number) display, and in large-sized monitor manufacturing process, mask plate 02 is excessive will appear buckling phenomenon for vapor deposition, influences to be deposited
Effect causes colour mixture.
Inkjet printing (IJP, Ink-jet Print) technology is to solve the problems, such as this effective way, without using exposure mask
Version, goes out layout by software control precise Printing.And quantum dot characteristics will affect for the temperature of QLED display vapor deposition, therefore
The mode for not being available vapor deposition carries out production QLED device, and inkjet printing technology is equally the preparation side for being best suited for QLED device
Formula;
As shown in Fig. 2, inkjet printing technology accurately controls nozzle 03 by software, sprays ink and fall in designated position, dry
Predetermined pattern is formed after being roasted into film.Therefore need to design dykes and dams 041 (Bank) and each subpixel area is isolated, and dykes and dams 041
Material requirements it is hydrophobic, guarantee drippage ink in the groove 042 that dykes and dams 041 surround.OLED display uses at present
Pixel defining layer is hydrophilic material, dike needed for can not directly constituting OLED the QLED display of inkjet printing processing procedure
Dam 041.
Major material manufacturer in exploitation hydrophobicity dykes and dams material, but should meet hydrophobic requirement, meet again OLED,
The characteristics such as low ease gas rate (Outgas) that QLED display needs, relatively difficult, the hydrophobicity dykes and dams material without volume production on the market at present
Material.As shown in Fig. 3~Fig. 6, there is manufacturer using hydrophily dykes and dams material 051 at present, adulterate Hydrophobic small molecules 052 wherein,
When prebake conditions are completed in coating, Hydrophobic small molecules 052 are diffused into surface, form hydrophobic layer 053, carry out exposure development afterwards, to be formed
The hydrophobic dykes and dams 041 in dykes and dams upper surface 043.But it is hydrophilic surface, the ink of drippage that dykes and dams, which crowd around the groove inner wall 044 to be formed,
It can not be slided when falling in bevel edge, influence film-formation result.
Summary of the invention
In order to solve the above technical problems, the invention discloses a kind of display base plate, dykes and dams upper surface and recessed in display base plate
Slot inner wall is hydrophobic surface, optimizes the film-formation result of inkjet printing.
Technical solution provided by the invention is as follows:
The invention discloses a kind of display base plates, comprising:
Underlay substrate;
Anode on underlay substrate;
Pixel defining layer on anode, the pixel defining layer are equipped with multiple through-holes, and through-hole connects the anode;
Hydrophobic material layer in the pixel defining layer, the hydrophobic material layer is in the correspondence position of via bottoms
Opening is installed;
The pixel defining layer and hydrophobic material layer constitute dykes and dams, and the dykes and dams crowd around to form groove, dykes and dams upper surface
It is hydrophobic surface with groove inner wall.
Preferably, the hydrophobic material layer includes silica, and the silica has after active silane is handled
Hydrophobicity.
Preferably, the active silane includes chlorosilane or hexamethyldisilazane.
Preferably, the upper surface of the pixel defining layer and the through-hole wall are hydrophilic surface.
Preferably, it is crowded around after the groove to be formed carries out inkjet printing in the dykes and dams and forms hole transmission layer, luminescent layer
Or electron transfer layer.
The invention also discloses a kind of manufacturing methods of display base plate, comprising steps of
Step 1: forming the first metal layer on underlay substrate, patterning is carried out to the first metal layer and forms anode;
Step 2: forming pixel defining layer on the first metal layer;
Step 3: carrying out light blockage coating, exposure, development, etching to pixel defining layer to form multiple through-holes, through-hole connection
The anode;
Step 4: forming hydrophobic material layer in pixel defining layer;
Step 5: to hydrophobic material layer progress light blockage coating, exposure, development, etching to form multiple openings, opening
Position is corresponding with the bottom of the through-hole.
Preferably, the 4th step includes: that hydrophilic materials are formed in pixel defining layer, the hydrophilic materials
Comprising silica, the hydrophilic materials are handled using active silane, are changed into hydrophilic materials described
Hydrophobic material layer.
Preferably, it includes: that will form hydrophily material that the use active silane, which carries out processing to the hydrophilic materials,
Display base plate after the bed of material is put into container, and the gas containing active silane is passed through into container.
Preferably, it includes: that will contain active silane that the use active silane, which carries out processing to the hydrophilic materials,
Solution be instilled into the display base plate surface after forming hydrophilic materials.
The invention also discloses a kind of display devices, including display base plate described in any of the above embodiments.
Compared with prior art, the present invention can bring it is at least one of following the utility model has the advantages that
1, use common hydrophilic material and manufacture pixel defining layer, without developing new hydrophobic material, exploitation at
This and manufacturing cost are lower;
2, by being laid with hydrophilic materials on the surface of pixel defining layer, and with active silane to the hydrophilic materials
Carrying out processing makes it be changed into hydrophobic material layer to reach dykes and dams upper surface and groove inner wall is the effect of hydrophobic surface
Fruit optimizes film-formation result.
Detailed description of the invention
Below by clearly understandable mode, preferred embodiment is described with reference to the drawings, the present invention is given furtherly
It is bright.
Fig. 1 is the step schematic diagram that processing procedure is deposited in existing display;
Fig. 2 is the structural schematic diagram of dykes and dams and groove in organic light emitting display substrate;
Fig. 3~Fig. 6 is a kind of existing manufacturing step schematic diagram of display base plate;
Fig. 7~Figure 12 is that the invention shows the manufacturing step schematic diagrames of substrate;
Figure 13 is that the invention shows the structural schematic diagrams of substrate.
Specific embodiment
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, Detailed description of the invention will be compareed below
A specific embodiment of the invention.It should be evident that drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing, and obtain other embodiments.
To make simplified form, part related to the present invention is only schematically shown in each figure, they are not represented
Its practical structures as product.In addition, there is identical structure or function in some figures so that simplified form is easy to understand
Component only symbolically depicts one of those, or has only marked one of those.Herein, "one" is not only indicated
" only this ", can also indicate the situation of " more than one ".
Fig. 7~Figure 12 shows the manufacturing step the invention shows substrate, specifically includes:
Step 1: forming the first metal layer on underlay substrate 01, patterning is carried out to the first metal layer and forms anode
061;
Step 2: pixel defining layer 062 (as shown in Figure 7) is formed on the first metal layer, the pixel defining layer 062 1
As be made of hydrophilic material, and meet the characteristics such as low ease gas rate (Outgas) required for OLED, QLED display base plate;
Step 3: carrying out light blockage coating, exposure, development, etching to pixel defining layer 062 to form multiple through-holes 0621
(as shown in Fig. 8~Fig. 9), (that is: through-hole connects the sun to the anode 061 that the bottom contact the first metal layer of through-hole 0621 is constituted
Pole 061), the inner wall of through-hole 0621 is in ramped shaped, and slope is acute angle close to the side of underlay substrate 01, pixel defining layer 062
The inner wall of upper surface and through-hole 0621 is hydrophilic surface;The pixel arrangement of display base plate is defined according to the arrangement of through-hole;
Step 4: hydrophilic materials 063 (as shown in Figure 10) is formed in pixel defining layer 062, the hydrophilic material
Layer 063 is preferably silica (SiO2), hydrophilic materials 063 are handled using active silane, make hydrophily material
The bed of material 063 is changed into the hydrophobic material layer 064 (as shown in figure 11) of surface hydrophobicity;
Wherein, active silane, which refers to react with silicone hydroxyl (Si-OH) key, makes the surface of the materials such as silica
It is converted into the silane reagent of hydrophobic surface, the active silane in the present invention includes but is not limited to chlorosilane or hmds
The chemical reagent such as alkane, the material in the present invention in hydrophilic materials 063 include but is not limited to silica etc. (and in air point
After son reaction) material containing silicone hydroxyl (Si-OH) key.
Wherein, hydrophilic materials 063 are handled and can be referred to using active silane: hydrophilic materials will be formed
Display base plate after 063 is put into sealing container, is passed through the gas containing active silane to sealing container, is made hydrophilic materials
Active silane in the material molecule and gas on 063 surface reacts;
Carrying out processing to hydrophilic materials 063 using active silane may also mean that: by the solution containing active silane
Be instilled into the display base plate surface after forming hydrophilic materials 063, make the material molecule on 063 surface of hydrophilic materials with it is molten
Active silane in liquid reacts;
Step 5: carrying out light blockage coating, exposure, development, etching to hydrophobic material layer 064 to form multiple openings
0631, be open 0631 position it is corresponding with 0621 bottom of through-hole of pixel defining layer 062 (as shown in figure 12).
It should be noted that the manufacturing method of display base plate and attached drawing merely illustrate step related to the present invention in the present invention
Suddenly, before above-mentioned steps, later, among may further include other steps.
The display substrate structure formed by above-mentioned steps is as shown in figure 13, and display base plate of the invention includes underlay substrate
01, on underlay substrate 01 and the anode 061 formed is patterned by the first metal layer, the pixel on the first metal layer is determined
Adopted layer 062 and the hydrophobic material layer 064 being laid in pixel defining layer 062.
Pixel defining layer 062 is equipped with multiple through-holes 0621, and the bottom of through-hole 0621 is contacted with anode 061, i.e. through-hole
The 0621 connection anode 061, the inner wall of through-hole 0621 are in ramped shaped, and slope is acute angle close to the side of underlay substrate 01;Root
The pixel arrangement of display base plate is defined according to the arrangement of through-hole.
Hydrophobic material layer 064 is formed after active silane is handled by former hydrophilic materials 063, hydrophobic material layer
064 via bottoms corresponding position be equipped with opening.
Pixel defining layer 062 and hydrophobic material layer 063 constitute dykes and dams 041, and dykes and dams 041 crowd around to form groove 042, groove
042 inner wall is in ramped shaped, and groove 042 is acute angle close to the side of underlay substrate 01;Dykes and dams upper surface 043 and groove inner wall
044 is hydrophobic surface.
The invention also discloses a kind of display devices, including above-mentioned display base plate, crowd around the groove to be formed in dykes and dams 041
Hole transmission layer, luminescent layer or electron transfer layer are formed after carrying out inkjet printing at 042.
Display base plate of the invention uses common hydrophilic material and manufactures pixel defining layer 062, without developing newly
Hydrophobic material, by being laid with hydrophilic materials 063 on the surface of pixel defining layer 062, and it is hydrophilic to this with active silane
Property material layer 062 carry out processing so that it is changed into hydrophobic material layer 064, to reach dykes and dams upper surface 043 and groove inner wall
044 is the effect of hydrophobic surface, optimizes film-formation result;Development cost and manufacturing cost are lower.
It should be noted that above-described embodiment can be freely combined as needed.The above is only of the invention preferred
Embodiment, it is noted that for those skilled in the art, in the premise for not departing from the principle of the invention
Under, multiple improvements and modifications can also be made, these modifications and embellishments should also be considered as the scope of protection of the present invention.