CN109062268A - A kind of nanometer displacement platform scan time delay system and its implementation - Google Patents
A kind of nanometer displacement platform scan time delay system and its implementation Download PDFInfo
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Abstract
The invention discloses a kind of nanometer displacement platform scan time delay system and its implementation, belong to micro-nano manipulation field.The system comprises DSP main control board, X-axis signal synthesizer, Y-axis signal synthesizer and position signal feedback units, the DSP main control board includes dsp chip and dsp bus interface etc., and the X-axis signal synthesizer and Y-axis signal synthesizer respectively include main DA unit, gain DA unit, translation DA unit, rotation DA unit and summation amplifier unit；The DSP main control board sends X-axis signal by dsp bus interface, for X-axis signal synthesizer, sends Y-axis signal for Y-axis signal synthesizer；X-axis feedback signal and Y-axis feedback signal from the position signal feedback unit are received simultaneously.Scanning area translational movement can be accurately adjusted using the present invention, also ensures that scanning area uses 16 DA fan-out capabilities always, effectively increases scanning motion resolving power.
Description
Technical field
The invention belongs to micro-nano manipulation technical fields, and in particular to a kind of nanometer applied to high resolution imaging process
Displacement platform scan time delay system and its implementation.
Background technique
Movement and positioning device of the nanometer displacement platform as micro-nano manipulation field, are widely used in material analysis, life
In the scanning imagery instrument in the fields such as object, the scanning probe microscopy of the nanometer displacement platform production of flexible hinge principle is such as utilized
Deng.This nanometer displacement platform driven by piezoelectric ceramic stack, the smallest moving step pitch can achieve sub-nanometer precision.It is common to receive
The control circuit of rice displacement platform uses the movement of single 16 DA chip drives X-axis or Y direction.To drive a total travel
For range is the nanometer displacement platform of the i.e. 500000nm of 500um, the minimum step that nanometer displacement platform can be realized be it is fixed, such as
Shown in following formula:
(500000nm/65536)=7.6nm
Under this single 16 DA chip drives mode, within the scope of the nanometer displacement platform total travel, regardless of specific
Scanning range be it is how small, its minimum step will not be less than 7.6nm, therefore cannot give full play to the sub-nanometer essence of nanometer displacement platform
The potentiality of degree.When the region using this nanometer displacement platform to scanning imagery range less than total travel 500um is scanned imaging,
For example 10um range, then the DA code value that can be utilized only have (10/500) * 65536=1310 code value, cannot give full play to 16
The effect of DA chip whole code value.And in the scanning range of 10um, due to there is no to play whole code values of DA, every a line
The number of scan points limit is exactly 1310, cannot be closeer.
In practical applications, user wishes when scanning range is smaller, it is desirable that minimum step is also smaller, so
It is able to achieve high-resolution imaging.The hardware system of this fixed minimum step of above-mentioned common nanometer displacement platform limits high-resolution
The application of imaging.And if although improving resolving power using the nanometer displacement platform of too small stroke, but will lead to entire scan
Range is unsatisfactory for need of work.
When being placed on nanometer displacement platform due to test sample, it may appear that angular error leads to the figure on the sample,
Such as direction of lines, rectangle regular shape and the XY axis direction of motion of nanometer displacement platform are inconsistent, and there are angles.This can sweep
After retouching imaging, carry out bringing measurement difficult when dimension measurement of micro structure in sample.Meanwhile nanometer displacement platform is in scanning motion
When, scanning area is frequently necessary to carry out integrated regulation on X/Y plane.Common single DA chip drives mode can only use single
A part of code value of one 16 DA chips carries out partial sweep movement.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of nanometer displacement platform scan time delay system and its realization side
Method, the shortcomings that overcoming nanometer displacement platform movement control technology in the prior art not to be able to satisfy high resolution scanning imaging demand.
Present invention firstly provides a kind of nanometer displacement platform scan time delay system, the control system includes DSP master control
Making sheet, X-axis signal synthesizer, Y-axis signal synthesizer and position signal feedback unit are scanned using the nanometer displacement platform and are transported
Autocontrol system realizes the motion control to nanometer displacement platform.
The DSP main control board sends X-axis signal by dsp bus interface, for X-axis signal synthesizer, closes for Y-axis signal
It grows up to be a useful person and sends Y-axis signal；The X-axis feedback signal and Y-axis feedback signal of the position signal feedback unit output are received simultaneously, and
The X-axis feedback signal and Y-axis feedback signal are output to host computer.
The X-axis signal synthesizer receives the X-axis signal of the DSP main control board output, and carries out to the X-axis signal
Processing generates X-axis position data, the X-axis position data is output to nanometer displacement platform.
The Y-axis signal synthesizer receives the Y-axis signal of the DSP main control board output, and carries out to the Y-axis signal
Processing generates Y-axis position data, the Y-axis position data is output to nanometer displacement platform.
The nanometer displacement platform has X-axis position signal output interface and Y-axis position signal output interface, the X-axis position
It sets signal output interface and exports X-axis position signal to the position signal feedback unit, the Y-axis position signal output interface is defeated
Y-axis position signal gives the position signal feedback unit out；The position signal feedback unit is to X-axis position signal and Y-axis position
The X-axis feedback signal and Y-axis feedback signal that confidence number generates respectively, are input to DSP main control board.
The nanometer displacement platform has X-axis analog interface and Y-axis analog interface, and the X-axis analog interface receives
The X-axis position data exported by X-axis signal synthesizer, the Y-axis analog interface receive the Y exported by Y-axis signal synthesizer
Shaft position data, the nanometer displacement platform are scanned movement according to the X-axis position data and the Y-axis position data, together
When nanometer displacement platform generate X-axis position signal and Y-axis position signal, X-axis position signal and Y-axis position signal are passed through into X respectively
Shaft position signal output interface and Y-axis position signal output interface are transferred to position signal feedback unit.
The DSP main control board includes that dsp chip, CPLD chip, eeprom chip, two DDR2 chips, FLASH are deposited
Reservoir, dsp bus interface and network interface chip, the eeprom chip, two DDR2 chips and network interface chip
It is connect respectively with the dsp chip, the CPLD chip and FLASH memory pass through EMIF interface and the dsp chip respectively
Connection.It is connected between the CPLD chip and dsp bus interface by 16 position datawires and 20 bit address buses, dsp bus
Interface is separately connected with X-axis signal synthesizer, Y-axis signal synthesizer and position signal feedback unit.
The X-axis signal synthesizer includes four DA units and X-axis summation amplifier unit, four DA units point
It Wei not the main DA unit of X-axis, X-axis gain DA unit, X-axis translation DA unit, X-axis rotation DA unit；The Y-axis signal synthesizer
It sums amplifier unit including four DA units and Y-axis, four DA units are respectively the main DA unit of Y-axis, Y-axis gain DA mono-
Member, Y-axis translation DA unit, Y-axis rotate DA unit, and four of four DA units of X-axis signal synthesizer and Y-axis signal synthesizer
DA unit is all the analog-digital chip using 16.
The present invention also provides a kind of nanometer displacement platform scan time delay network system realization, the method specifically includes step
It is rapid:
Step 1: DSP main control board receive driving nanometer displacement platform transmit by host computer move required rotation angle,
Scaling and translation distance.
Step 2: DSP main control board handles the rotation angle, scaling and translation distance, X-axis side is obtained
To data and Y direction data, the main DA cell data of the X-axis that X-direction data are resolved into X-direction, X-axis gain DA unit
Data, X-axis translation DA cell data and X-axis rotate DA cell data, are re-used as X-axis signal and are transferred in X-axis signal synthesizer
Portion's each DA unit accordingly；Simultaneously Y direction data are resolved into Y direction the main DA cell data of Y-axis, Y-axis gain DA
Cell data, Y-axis translation DA cell data and Y-axis rotate DA cell data, by the main DA cell data of Y-axis, Y-axis gain DA unit
Data, Y-axis translation DA cell data and Y-axis rotation DA cell data are transferred to phase inside Y-axis signal synthesizer as Y-axis signal
The each DA unit answered.
Step 3: DSP main control board starts scanning process, X-axis signal synthesizer and Y-axis signal synthesizer carry out complete 16
Code value output operation；X-axis signal synthesizer to the X-axis position data and Y-axis signal synthesizer pair exported after X-axis signal processing
The Y-axis position data exported after Y-axis signal processing is output to nanometer displacement platform；
Step 4: DSP main control board receives the X-axis feedback signal and Y-axis feedback letter fed back by position signal feedback unit
Number；The position signal feedback unit receives the X-axis position signal and Y-axis position signal of the output of nanometer displacement platform, and is located
Reason generates X-axis feedback signal and Y-axis feedback signal, exports to DSP main control board；
Step 5: DSP main control board is by received X-axis feedback signal and Y-axis feedback signal back to host computer.
Advantages of the present invention:
(1) it may be implemented using the method that the variable gain mode in the present invention controls scanning range each in stroke
The scanning range of size all keeps the minimum step of 16 resolving powers to move.
(2) using the X-axis signal synthesizer and Y-axis signal synthesizer in the present invention, the connection of X-axis, Y-axis can be effectively realized
The angle of dynamic control adjustment scanning motion, has saved chip operation time, has improved dynamic response capability.
(3) using the X-axis signal synthesizer and Y-axis signal synthesizer in the present invention, scanning area both can accurately be adjusted
Domain translational movement also ensures that scanning area uses 16 DA fan-out capabilities always, effectively increases scanning motion resolving power.
Detailed description of the invention
Fig. 1 is that scanning area rotates front and back contrast schematic diagram；
Fig. 2 is the scanning area enlarged diagram after rotating；
Fig. 3 is that amplified scanning area translates schematic diagram；
Fig. 4 is the Control system architecture composition schematic diagram of nanometer displacement platform provided by the invention；
Fig. 5 is DSP main control board structure composition schematic diagram；
Fig. 6 is the structure composition schematic diagram of X-axis signal synthesizer；
Fig. 7 is the structure composition schematic diagram of Y-axis signal synthesizer；
Fig. 8 is position signal feedback unit structure composition schematic diagram.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Nanometer displacement platform during scanning motion to the control of the rotation angle of scanning area, scaling (i.e. gain) control and
Translational movement control can be decomposed into three steps to describe.It derives one by one below, is then integrated into a mathematic(al) representation, finally utilizes
The combinational circuit of four DA units of four DA units of X-axis and Y-axis realizes specific control function.
1. the rotation of scanning area；
As shown in Figure 1, being laterally X-axis, longitudinal is Y-axis, and solid box rectangle is original scanning area, the geometric center of rectangle
For origin, dotted line frame rectangle is scanning area of the original scanning area after origin rotation alpha angle counterclockwise.Original point
(x0,y0) a bit taken of taking up an official post for original scanning area, x0For original point abscissa, y0For original point ordinate, original point (x0,
y0) reach the point of rotation after rotation alpha angle, (x1,y1) be point of rotation position coordinate, x1For abscissa, y1For ordinate；α
For rotation angle, β is original point (x0,y0) with the angle of X-axis；R is original point (x0,y0) radius of turn, have:
x1=rcos (alpha+beta)
y1=rsin (alpha+beta)
According to two corners in trigonometric function and formula:
Cos (alpha+beta)=cos α cos β-sin α sin β
Sin (alpha+beta)=sin α cos β+cos α sin β
For original point (x0,y0) have:
Then:
It can further obtain:
x1=cos α x0-sinα·y0
y1=sin α x0+cosα·y0
Thus formula can obtain:
When being rotated there is only scanning area, in the scanning area before scanning area and rotation after rotation, the point of rotation
Abscissa x1With ordinate y1Relationship can write a Chinese character in simplified form are as follows:
x1=a1x0+b1y0 (-1≤a1≤ 1, -1≤b1≤1)
y1=d1x0+e1y0 (-1≤d1≤ 1, -1≤e1≤1)
a1=e1=cos α, b1=-d1=sin α, a1、e1、b1And d1It is intermediate variable.
2. scanning area scales；
When needing to scale (amplification and diminution) by postrotational scanning area, as shown in Fig. 2, by taking amplification as an example, it is real
Wire frame rectangle is the scanning area before postrotational scanning area namely amplification, and dotted line frame rectangle is amplified scanning area:
In Fig. 2, amplify point (x2,y2) it is the point of rotation (x1,y1) it is scanned position after the amplification of region, due to scanning
Region amplification, the abscissa of every bit and ordinate all change identical multiple in scanning area before amplifying.Specifically, for putting
A little bigger abscissa x2With amplification point ordinate y2Have:
x2=t (a1x0+b1y0) (-1≤a1≤ 1, -1≤b1≤ 1, t ﹥ 0)
y2=t (d1x0+e1y0) (-1≤d1≤ 1, -1≤e1≤ 1, t ﹥ 0)
It is also writeable are as follows:
x2=a2x0+b2y0
y2=d2x0+e2y0
Wherein, a2=e2=ta1=te1、b2=-d2=tb1=-td1, t is amplification factor.
3. scanning area translates；
As shown in figure 3, solid box rectangle is the scanning area before amplified scanning area translates, dotted line frame rectangle is
Scanning area after translation, (m, n) are unit translation vector, and length unit can be micron in actual use, translate point (x3,
y3) it is amplification point (x2,y2) move position after p unit translation vector, then have:
(x3,y3)=(x2+p·m,y2+ pn) translation point abscissa x3With translation point ordinate y3It is then writeable are as follows:
x3=a2x0+b2y0+p·m
y3=d2x0+e2y0+p·n
Wherein translation point abscissa x3For original point abscissa x in original scanning area0By rotation, amplification and translate it
Abscissa afterwards；Translation point ordinate y3For original point ordinate y in original scanning area0After rotation, amplification and translation
Ordinate.
Above-mentioned x3And y3In formula, a2The gain parameter of corresponding X-axis gain DA unit, b2The rotation of corresponding X-axis rotation DA unit
Turn parameter, pm corresponds to the displacement parameter that X-axis is displaced DA unit；d2The gain parameter of corresponding Y-axis gain DA unit, e2Corresponding Y-axis
Rotation parameter, the pn of rotation DA unit correspond to the displacement parameter of Y-axis displacement DA unit.
Corresponding above-mentioned x3And y3Rotation parameter, gain parameter in formula, displacement parameter carry out control system circuit design with
It realizes.X-axis signal synthesizer includes that the main DA unit of X-axis, X-axis gain DA unit, X-axis displacement DA unit and X-axis rotate DA unit,
Y-axis signal synthesizer includes the main DA unit of Y-axis, Y-axis gain DA unit, Y-axis displacement DA unit and Y-axis rotation DA unit.
A kind of nanometer displacement platform scan time delay system provided by the present invention, utilizes the control method tune of variable gain
The scanning range of whole nanometer displacement platform passes through the gain parameter a to X-axis gain DA unit2With the gain of Y-axis gain DA unit
Parameter d2Carry out setting realization.And the code value for being sent to the scanning signal of the main DA unit of X-axis and the main DA unit of Y-axis remains complete
16 output accuracies.Such method ensure that the diminution with scanning range, and the minimum step of nanometer displacement platform is also year-on-year
Example reduces, that is, realizes the imaging of more high resolution scanning.Traditional nanometer displacement platform can only be sent to DA (number by host computer is reduced
Mould conversion) digital code value range come realize small range scanning movement, this cannot reduce the minimum step of nanometer displacement platform, also
The resolution ratio of scanning imagery cannot be improved.Similarly, DA unit is rotated using this control system setting X-axis rotation DA unit and Y-axis
Rotation parameter b2And e2, displacement parameter pm and pn the realization scanning of setting X-axis displacement DA unit and Y-axis displacement DA unit
Rotation and displacement operation in the process.Above-mentioned all parameters are disposably to be set before scanning motion starts by this control system
It is fixed to complete, it does not need to set point by point again after scanning starts.Conventional nano displacement platform is avoided to need in scanning to each
A motor point all carries out the troublesome calculation of sine and cosine operation, has saved the time, has improved whole efficiency.
As shown in figure 4, a kind of nanometer displacement platform scan time delay system provided by the present invention includes DSP (number letter
Number processing) master board, X-axis signal synthesizer, Y-axis signal synthesizer, position signal feedback unit, utilize the nanometer displacement
Platform scan time delay system realizes the motion control to nanometer displacement platform.
The DSP main control board sends X-axis signal by dsp bus interface, for X-axis signal synthesizer, closes for Y-axis signal
It grows up to be a useful person and sends Y-axis signal, while receiving the X-axis feedback signal and Y-axis feedback signal of the position signal feedback unit output, and
The X-axis feedback signal and Y-axis feedback signal are output to host computer.
The X-axis signal synthesizer receives the X-axis signal of the DSP main control board output, and carries out to the X-axis signal
Processing generates X-axis position data, the X-axis position data is output to nanometer displacement platform.
The Y-axis signal synthesizer receives the Y-axis signal of the DSP main control board output, and carries out to the Y-axis signal
Processing generates Y-axis position data, the Y-axis position data is output to nanometer displacement platform.
The transmitting of X-axis, Y-axis main scanning signal is realized between the X-axis signal synthesizer and the Y-axis signal synthesizer.X
Axis master sweeps signal and refers to 16 precision analogue signals generated by the main DA unit of X-axis, Y-axis master sweep signal refer to it is mono- by the main DA of Y-axis
16 precision analogue signals that member generates.Specially X-axis main scanning signal is output to Y-axis rotation DA unit by the main DA unit of X-axis,
Y-axis main scanning signal is output to X-axis rotation DA unit by the main DA unit of Y-axis；
The nanometer displacement platform has X-axis position signal output interface and Y-axis position signal output interface, the X-axis position
It sets signal output interface and exports X-axis position signal to the position signal feedback unit, the Y-axis position signal output interface is defeated
Y-axis position signal gives the position signal feedback unit out；The position signal feedback unit is to X-axis position signal and Y-axis position
The X-axis feedback signal and Y-axis feedback signal that confidence number generates respectively, are input to DSP main control board.
The nanometer displacement platform (NS-XY200Z20) has X-axis analog interface and Y-axis analog interface, the X-axis mould
The X-axis position data that analog quantity interface is exported by X-axis signal synthesizer, the Y-axis analog interface reception are closed by Y-axis signal
It grows up to be a useful person the Y-axis position data of output, the nanometer displacement platform is carried out according to the X-axis position data and the Y-axis position data
Scanning motion, while nanometer displacement platform generates X-axis position signal and Y-axis position signal, and X-axis position signal and Y-axis position are believed
Number position signal feedback unit is transferred to by X-axis position signal output interface and Y-axis position signal output interface respectively.
The X-axis signal and Y-axis signal is that DSP main control board is sent to X-axis signal synthesizer and Y-axis signal closes respectively
The digital signal for the nanometer displacement platform target position to be moved to grown up to be a useful person；The X-axis position data and Y-axis position data
The analog signal for the target position that nanometer displacement platform to be moved to is respectively included, which is directly inputted to nanometer displacement platform
X-axis analog interface and Y-axis analog interface；The X-axis main scanning signal and Y-axis main scanning signal is that driving is received respectively
The primary simulation signal of rice displacement platform movement；The X-axis position signal and Y-axis position signal is respectively that nanometer displacement platform is current
The X axis coordinate of moment position and the analog signal of Y axis coordinate；The X-axis feedback signal and Y-axis feedback signal be respectively
The X-axis position signal and the Y-axis position signal carry out the digital signal after analog-to-digital conversion.
As shown in figure 5, the DSP main control board includes: to be responsible for the data calculating and order control of all DA units
The lookup data of dsp chip, the address decoding for being responsible for all DA units with the CPLD chip of data transmission, for storing static state
Eeprom chip, the FLASH memory for storing embedded program, is used two DDR2 chips for expanding operation memory
In the network interface chip and dsp bus interface that carry out data transmission with host computer, the eeprom chip, two DDR2 cores
Piece and network interface chip are connect with the dsp chip respectively, and the CPLD chip and FLASH memory pass through EMIF respectively
Interface is connect with the dsp chip, and the dsp chip has dedicated new command using kernel and is based on the advanced C64X+DSP frame of TI
The TMS320C6455ZTZ7 chip of structure code；CPLD chip uses EPM3256AQC208-10 chip；Eeprom chip uses
AT24C256BN chip, two DDR2 chips are all made of MT47H128M16BT chip, and network interface chip uses PHY
DJLXT971ALE chip realizes the data communication with host computer；
Pass through 16 position datawires and 20 ground between CPLD chip in the DSP main control board and dsp bus interface
The connection of location bus, dsp bus interface divide with X-axis signal synthesizer, Y-axis signal synthesizer and position signal feedback unit respectively
It does not connect.
The X-axis signal synthesizer includes four DA units and X-axis summation amplifier unit, four DA units point
It Wei not the main DA unit of X-axis, X-axis gain DA unit, X-axis translation DA unit, X-axis rotation DA unit；The Y-axis signal synthesizer
It sums amplifier unit including four DA units and Y-axis, four DA units are respectively the main DA unit of Y-axis, Y-axis gain DA mono-
Member, Y-axis translation DA unit, Y-axis rotate DA unit, and four of four DA units of X-axis signal synthesizer and Y-axis signal synthesizer
DA unit is all made of 16 analog-digital chips.
As shown in fig. 6, the input of X-axis signal synthesizer is connect with the output of dsp bus interface, the main DA unit of X-axis is used
LTC1597 chip is respectively adopted in AD768 chip, X-axis gain DA unit, X-axis translation DA unit and X-axis rotation DA unit.X-axis master
The X-axis main scanning signal of DA unit output is output to 1 port of reference voltage Vref of X-axis gain DA unit, external reference electricity
The port potential source VR1 is connect with 2 port of reference voltage Vref of X-axis translation DA unit.The reference voltage of X-axis rotation DA unit
The port Vref3 receives the Y-axis main scanning signal of the main DA unit output of Y-axis, and X-axis gain DA unit output end, X-axis translate DA unit
Output end and X-axis rotation DA unit output end are connect with the input terminal of X-axis summation amplifier unit；X-axis summation amplifier unit
X-axis position data is transferred to nanometer displacement platform by X-axis analog interface by output end.
As shown in fig. 7, the input of Y-axis signal synthesizer is connect with the output of dsp bus interface, the main DA unit chip of Y-axis
Using AD768 chip, LTC1597 chip is respectively adopted in Y-axis gain DA unit, Y-axis translation DA unit and Y-axis rotation DA unit.Y
The Y-axis main scanning signal of the main DA unit output of axis is output to 4 port of reference voltage Vref of Y-axis gain DA unit, external ginseng
The port voltage source VR2 is examined to connect with 5 port of reference voltage Vref of Y-axis translation DA unit.The reference voltage of Y-axis rotation DA unit
The port Vref6 receives the X-axis main scanning signal of the main DA unit output of X-axis.Y-axis gain DA unit output end, Y-axis translate DA unit
Output end and Y-axis rotation DA unit output end are connect with the input terminal of Y-axis summation amplifier unit；Y-axis summation amplifier unit
Y-axis position data is transferred to nanometer displacement platform by Y-axis analog interface by output end.
As shown in figure 8, the position signal feedback unit includes X-axis AD (analog-to-digital conversion) unit, Y-axis AD unit, mould
Analog quantity input interface and digital-quantity output interface.Wherein, the dsp bus interface of digital-quantity output interface and DSP main control board connects
It connects；Analog input interface connects with the X-axis position signal output interface and Y-axis position signal output interface for connecting nanometer displacement platform
It connects, X-axis AD unit generates X-axis feedback signal by corresponding analog input interface X-axis position signal, and X-axis is anti-
Feedback signal is transferred to dsp bus interface by corresponding digital-quantity output interface, and Y-axis AD unit passes through corresponding analog input
Interface Y-axis position signal, and Y-axis feedback signal is generated, Y-axis feedback signal is passed by corresponding digital-quantity output interface
It is defeated by dsp bus interface.
The present invention also provides a kind of nanometer displacement platform scan time delay network system realization, the method is specifically included
Following steps:
Step 1: DSP main control board receive the driving nanometer displacement platform scanning motion transmitted as host computer needed for rotation
Angle, scaling and translation distance.
Step 2: DSP main control board handles the rotation angle, scaling and translation distance, X-axis side is obtained
To data and Y direction data, the main DA cell data of the X-axis that X-direction data are resolved into X-direction, X-axis gain DA unit
Data, X-axis translation DA cell data and X-axis rotate DA cell data, are re-used as X-axis signal and are transferred in X-axis signal synthesizer
Portion's each DA unit accordingly；Simultaneously Y direction data are resolved into Y direction the main DA cell data of Y-axis, Y-axis gain DA
Cell data, Y-axis translation DA cell data and Y-axis rotate DA cell data, by the main DA cell data of Y-axis, Y-axis gain DA unit
Data, Y-axis translation DA cell data and Y-axis rotation DA cell data are transferred to phase inside Y-axis signal synthesizer as Y-axis signal
The each DA unit answered.
Step 3: DSP main control board starts scanning process, X-axis signal synthesizer and Y-axis signal synthesizer carry out complete 16
Code value output operation；X-axis signal synthesizer to the X-axis position data and Y-axis signal synthesizer pair exported after X-axis signal processing
The Y-axis position data exported after Y-axis signal processing is output to nanometer displacement platform.
Step 4: DSP main control board receives the X-axis feedback signal and Y-axis feedback letter fed back by position signal feedback unit
Number；The position signal feedback unit receives the X-axis position signal and Y-axis position signal of the output of nanometer displacement platform, and is located
Reason generates X-axis feedback signal and Y-axis feedback signal, exports to DSP main control board.
Step 5: DSP main control board is by received X-axis feedback signal and Y-axis feedback signal back to host computer.
It is said so that one full stroke range of control system provided by the invention driving is the nanometer displacement platform of 500um as an example below
State the control process realized using control system of the present invention.
(1) the high resolution scanning fortune of arbitrary scan size is realized by adjusting X-axis gain DA unit and Y-axis gain DA unit
It is dynamic.When nanometer displacement platform carries out total travel scanning motion, i.e., scanning range is 500um × 500um.At this point, in Fig. 6, DSP
Master board is exported by the main DA unit of dsp bus interface setting X-axis using all-key value, is added to 65535 one by one from 0.DSP master
Control panel sends the gain command in X-axis signal to X-axis signal synthesizer by dsp bus interface, sets X-axis gain DA unit
Gain parameter be maximum value 1.It realizes with Vref1 voltage signal magnitude as reference, X-axis gain DA unit exports maximum amplitude
Signal gives X-axis summation amplifier unit, is then output to the X-axis analog interface of nanometer displacement platform, finally realizes X-direction
The full stroke of 500um exports.The minimum step of nanometer displacement platform at this time are as follows:
The minimum step of this 7.63nm is suitable for preliminary scanning imagery, carries out preliminary observation.It is big what is tentatively obtained
After determining the regional area for needing to further look in dimensional graphics, small-scale scanning imagery is carried out in this regional area, into
The more high-resolution details observation of row.
Such as need to carry out more detailed scanning imagery to the 50um range at above-mentioned 500um full figure center, then it carries out following
Operation can be realized.The main DA unit of X-axis still uses all-key value to export at this time, is added to 65535 one by one from 0.Realize 500um's
Full stroke output.DSP main control board sends the gain command in X-axis signal to X-axis signal synthesizer by dsp bus interface,
The gain parameter of X-axis gain DA unit is set as 0.1.Realize that with Vref1 voltage signal magnitude be reference, X-axis gain DA unit
Output signal amplitude is 0.1 times of maximum output amplitude signal amplitude.Therefore the output signal of X-axis summation amplifier unit is also full
0.1 times of stroke output, the final small stroke output for realizing X-direction 50um.Because the main DA unit of X-axis is still 16 all-keys
Output, so the minimum step of nanometer displacement platform are as follows:
Shown in example as above, it is arbitrarily large in the carry out of X-direction full stroke range that nanometer displacement platform may be implemented using the present invention
When small scanning area scanning motion, 16 highest resolution fan-out capabilities are remained.
It can be derived and be judged by above formula, the scanning motion range of setting is smaller, and the minimum step of theory output is also smaller,
This has complied fully with smaller to scanning range in practical application, it is desirable that the higher objective requirement of resolution ratio.And X-axis gain DA is mono-
Member itself is also 16 digital-to-analogue chips, therefore resolution ratio (1/65536) is arranged in the gain coefficient with very high degree of precision.
Similarly, using Y-axis signal synthesizer shown in Fig. 7, nanometer displacement platform may be implemented in Y direction full stroke range
Carry out arbitrary size scanning area scanning motion campaign when, remain 16 highest resolution fan-out capabilities.And Y-axis
Gain DA unit itself is also 16 digital-to-analogue chips, therefore resolution ratio (1/ is arranged in the gain coefficient with very high degree of precision
65536)。
(2) DA unit is rotated by adjusting X-axis and Y-axis rotation DA cell parameters realize scanning motion area at any angle
Domain.For continuing 50um × 50um scanning area in the above example, the gain parameter of X-axis and Y-axis before this is remained unchanged.In order to
This scanning area is rotated by a certain angle into α to be suitble to the imaging and observation demand of user, Y-axis is believed by connecting cable first
The Y-axis main scanning signal of number synthesizer is transferred to the reference end entrance Vref3 of the X-axis rotation DA unit of X-axis signal synthesizer.
Rotation instruction in X-axis signal is sent to X-axis rotation DA unit by DSP main control board, and progress is with Y-axis main scanning signal amplitude
The output of reference controls, this output signal is transmitted to nanometer displacement platform X-axis analog quantity after X-axis sums amplifier cell processing and connects
Mouthful, the rotation adjustment of the X axis coordinate of each location point during the scanning motion of realization nanometer displacement platform.
Similarly, in Y direction, the X-axis main scanning signal of X-axis signal synthesizer is transferred to by connecting cable by Y-axis letter
The reference end entrance Vref6 of the Y-axis rotation DA unit of number synthesizer.Dsp controller is sent to the rotation instruction in Y-axis signal
Y-axis rotates DA unit, carries out taking X-axis main scanning signal amplitude as the output control referred to, this output signal is by Y-axis summation fortune
It is transmitted to nanometer displacement platform Y-axis analog interface after putting cell processing, realizes each position during the scanning motion of nanometer displacement platform
Set the rotation adjustment of Y axis coordinate a little.
Under the control of the synchronous matching of X-axis signal synthesizer and Y-axis signal synthesizer, realize that the entirety of nanometer displacement platform is swept
Retouch moving region rotation.When practical operation, before single pass movement, according to specific scanning range and scan position, only
The rotation parameter of X-axis rotation DA unit and Y-axis rotation DA unit need to disposably be respectively set, nanometer displacement platform stroke can be realized
Within the scope of specific rotation angle scanning motion, without in DSP main control board to each motor point carry out rotation angle
The real-time operation time is saved in the calculating of degree.
(3) DA unit is displaced by adjusting X-axis and Y-axis displacement DA cell parameters realize the translation in scanning motion region.After
For continuing 50um × 50um scanning area in the above example, the gain parameter and rotation parameter of X-axis, Y-axis before this can be protected
It holds constant.The gain in the above-mentioned scanning motion region to nanometer displacement platform and rotation process are carried out in a manner of centrosymmetric
's.The region of scanning motion is encountered in real work not at nanometer displacement platform central area, then it is mono- to translate DA by X-axis
Member and Y-axis translate DA unit to realize.
It is according to specific X-axis translation distance requirement first, DSP main control board is by dsp bus interface in X-axis signal
Translation instruction be sent to X-axis signal synthesizer X-axis translation DA unit, carry out with reference voltage source VR1 voltage signal magnitude
It is controlled for the output of reference, this output signal is transmitted to nanometer displacement platform X-axis analog quantity after X-axis sums amplifier cell processing and connects
Mouthful, the translation adjustment of the X axis coordinate of each location point during the scanning motion of realization nanometer displacement platform.
Similarly, it in Y direction, is required according to specific Y-axis translation distance, DSP main control board passes through dsp bus interface handle
Translation instruction in Y-axis signal is sent to the Y-axis translation DA unit of Y-axis signal synthesizer, carries out with reference voltage source VR2 voltage
Signal amplitude is the output control of reference, this output signal is transmitted to nanometer displacement platform Y-axis after Y-axis sums amplifier cell processing
Analog interface, the translation adjustment of the Y axis coordinate of each location point during the scanning motion of realization nanometer displacement platform.
Under the control of the synchronous matching of X-axis signal synthesizer and Y-axis signal synthesizer, realize that the entirety of nanometer displacement platform is swept
Retouch the translation of moving region.
After the setting of the scanning motions region parameter such as above-mentioned gain, rotation and translation, DSP main control board passes through DSP
The main DA unit of X-axis of bus interface control X-axis signal synthesizer and the main DA unit of Y-axis of Y-axis signal synthesizer carry out 16 always
The output scanning signal operation of position all-key value, respectively after X-axis sums amplifier unit and Y-axis summation amplifier unit output to being received
Rice displacement platform, finally realizes nanometer displacement platform and completes scanning motion always with 16 high-resolution.
(4) the X-axis position signal and Y-axis position signal of the transmission of nanometer displacement platform are obtained by position signal feedback unit.
During above-mentioned scanning motion, the X-axis position signal and Y-axis position signal of nanometer displacement platform are fed back by position signal respectively
The analog input interface of unit exports respectively carries out analog-to-digital conversion to X-axis AD unit and Y-axis AD unit, and the X-axis after conversion is anti-
Feedback signal and Y-axis feedback signal pass through digital-quantity output interface respectively and are transferred to dsp bus interface, and DSP main control board is to reception
Two kinds of signals handled, realize the real-time monitoring to the scan position of nanometer displacement platform.User can be according to DSP master control
Making sheet is back to the X-axis feedback signal of host computer and Y-axis feedback signal carries out rotation angle, scaling and translation distance
Optimization amendment.
The present invention provides a kind of control system and its realization that can be controlled nanometer displacement platform and carry out high resolution scanning movement
Method.On hardware in such a way that multiple DA units combine, by once setting gain parameter, in the feelings that scanning range reduces
Always ensure that scan time delay signal keeps 16 high-precision fan-out capabilities under condition.Nanometer displacement platform is effectively increased in small model
Enclose scanning motion resolution ratio when scanning motion.Meanwhile it can once be set in nanometer displacement platform stroke range using the present invention
Determine rotation parameter and translation parameters, i.e., controllable nanometer displacement platform moves distance with specific rotation angle peace and is scanned movement angle
The adjustment for spending orientation and scanning area, the calculating without carrying out rotation angle to each motor point in DSP main control board, section
The about real-time operation time.
Claims (8)
1. a kind of nanometer displacement platform scan time delay system, which is characterized in that the control system includes DSP main control board, X
Axis signal synthesizer, Y-axis signal synthesizer and position signal feedback unit utilize the nanometer displacement platform scan time delay
System realizes the scan time delay to nanometer displacement platform；
The DSP main control board sends X-axis signal by dsp bus interface, for X-axis signal synthesizer, is Y-axis signal synthesizer
Send Y-axis signal；The X-axis feedback signal and Y-axis feedback signal of the position signal feedback unit output are received simultaneously；
The X-axis signal synthesizer receives the X-axis signal of DSP main control board output, and to the X-axis signal at
Reason generates X-axis position data, the X-axis position data is output to nanometer displacement platform；
The Y-axis signal synthesizer receives the Y-axis signal of DSP main control board output, and to the Y-axis signal at
Reason generates Y-axis position data, the Y-axis position data is output to nanometer displacement platform；
The nanometer displacement platform has X-axis position signal output interface and Y-axis position signal output interface, the X-axis position letter
Number output interface exports X-axis position signal to the position signal feedback unit, and the Y-axis position signal output interface exports Y
Shaft position signal gives the position signal feedback unit；The position signal feedback unit believes X-axis position signal and Y-axis position
Number the X-axis feedback signal and Y-axis feedback signal that generate respectively, are input to DSP main control board；
The nanometer displacement platform has X-axis analog interface and Y-axis analog interface, and the X-axis analog interface is received by X-axis
The X-axis position data of signal synthesizer output, the Y-axis analog interface receive the Y-axis position exported by Y-axis signal synthesizer
Data, the nanometer displacement platform are scanned movement, while nanometer according to the X-axis position data and the Y-axis position data
Displacement platform generates X-axis position signal and Y-axis position signal, and X-axis position signal and Y-axis position signal are passed through X-axis position respectively
Signal output interface and Y-axis position signal output interface are transferred to position signal feedback unit.
2. nanometer displacement platform scan time delay system as described in claim 1, which is characterized in that the DSP main control
Plate includes dsp chip, CPLD chip, eeprom chip, two DDR2 chips, FLASH memory, dsp bus interface and net
Network interface chip, the eeprom chip, two DDR2 chips and network interface chip are connect with the dsp chip respectively,
The CPLD chip passes through EMIF interface with FLASH memory respectively and connect with the dsp chip；The CPLD chip with
It is connected between dsp bus interface by 16 position datawires and 20 bit address buses, dsp bus interface and X-axis signal synthesizer, Y
Axis signal synthesizer and position signal feedback unit are separately connected.
3. nanometer displacement platform scan time delay system as claimed in claim 2, which is characterized in that the dsp chip uses
TMS320C6455ZTZ7 chip；CPLD chip uses EPM3256AQC208-10 chip；Eeprom chip uses AT24C256BN
Chip, two DDR2 chips are all made of MT47H128M16BT chip, and network interface chip uses PHY DJLXT971ALE chip.
4. nanometer displacement platform scan time delay system as described in claim 1, which is characterized in that the X-axis signal closes
It grows up to be a useful person including four DA units and X-axis summation amplifier unit, four DA units are respectively the main DA unit of X-axis, X-axis gain
DA unit, X-axis translation DA unit, X-axis rotate DA unit；The Y-axis signal synthesizer includes that four DA units and Y-axis are summed
Amplifier unit, four DA units are respectively the main DA unit of Y-axis, Y-axis gain DA unit, Y-axis translation DA unit, Y-axis rotation
Turn DA unit, four DA units of X-axis signal synthesizer and four DA units of Y-axis signal synthesizer are all made of 16 digital-to-analogues
Conversion chip.
5. nanometer displacement platform scan time delay system as claimed in claim 4, which is characterized in that X-axis signal synthesizer
Input is connect with the output of dsp bus interface, and the main DA unit of X-axis uses AD768 chip, and X-axis gain DA unit, X-axis translate DA
LTC1597 chip is respectively adopted in unit and X-axis rotation DA unit, and the X-axis main scanning signal of the main DA unit output of X-axis is output to X
1 port of reference voltage Vref of axis gain DA unit, the reference of the external port reference voltage source VR1 and X-axis translation DA unit
The connection of the port voltage Vref2,3 port of reference voltage Vref that X-axis rotates DA unit receive the Y-axis master of the main DA unit output of Y-axis
Scanning signal, X-axis gain DA unit output end, X-axis translation DA unit output end and X-axis rotation DA unit output end are and X-axis
The output end of the input terminal connection of summation amplifier unit, X-axis summation amplifier unit connects X-axis position data by X-axis analog quantity
Port transmission is to nanometer displacement platform.
6. nanometer displacement platform scan time delay system as claimed in claim 4, which is characterized in that Y-axis signal synthesizer
Input is connect with the output of dsp bus interface, and the main DA unit chip of Y-axis uses AD768 chip, and Y-axis gain DA unit, Y-axis are flat
It moves DA unit and LTC1597 chip, the Y-axis main scanning signal output of the main DA unit output of Y-axis is respectively adopted in Y-axis rotation DA unit
To 4 port of reference voltage Vref of Y-axis gain DA unit, the ginseng of the external port reference voltage source VR2 and Y-axis translation DA unit
The connection of the port voltage Vref5 is examined, 6 port of reference voltage Vref that Y-axis rotates DA unit receives the X-axis of the main DA unit output of X-axis
Main scanning signal, Y-axis gain DA unit output end, Y-axis translation DA unit output end and Y-axis rotation DA unit output end are and Y
Y-axis position data is passed through Y-axis analog quantity by the output end of the input terminal connection of axis summation amplifier unit, Y-axis summation amplifier unit
Interface is transferred to nanometer displacement platform.
7. nanometer displacement platform scan time delay system as described in claim 1, which is characterized in that the position signal is anti-
Feedback unit includes X-axis AD unit, Y-axis AD unit, analog input interface and digital-quantity output interface, digital-quantity output interface with
The dsp bus interface of DSP main control board connects, and the X-axis position signal output of analog input interface connection nanometer displacement platform connects
Mouth and Y-axis position signal output interface, X-axis AD unit are given birth to by corresponding analog input interface X-axis position signal
At X-axis feedback signal, X-axis feedback signal is transferred to dsp bus interface by corresponding digital-quantity output interface, Y-axis AD is mono-
Member generates Y-axis feedback signal by corresponding analog input interface Y-axis position signal, and Y-axis feedback signal is passed through
Corresponding digital-quantity output interface is transferred to dsp bus interface.
8. a kind of nanometer displacement platform scan time delay network system realization, it is characterised in that: the method specifically includes following
Step:
Step 1: DSP main control board receive the driving nanometer displacement platform scanning motion transmitted as host computer needed for rotation angle,
Scaling and translation distance；
Step 2: DSP main control board handles the rotation angle, scaling and translation distance, X-direction number is obtained
According to Y direction data, the main DA cell data of the X-axis that X-direction data are resolved into X-direction, X-axis gain DA unit number
DA cell data is rotated according to, X-axis translation DA cell data and X-axis, X-axis signal is re-used as and is transferred to inside X-axis signal synthesizer
Corresponding each DA unit；The main DA cell data of Y-axis that Y direction data are resolved into Y direction, Y-axis gain DA are mono- simultaneously
Metadata, Y-axis translation DA cell data and Y-axis rotate DA cell data, by the main DA cell data of Y-axis, Y-axis gain DA unit number
It is transferred to inside Y-axis signal synthesizer accordingly according to, Y-axis translation DA cell data and Y-axis rotation DA cell data as Y-axis signal
Each DA unit；
Step 3: DSP main control board starts scanning process, X-axis signal synthesizer and Y-axis signal synthesizer carry out complete 16 code values
Output operation；X-axis signal synthesizer to the X-axis position data and Y-axis signal synthesizer that are exported after X-axis signal processing to Y-axis
The Y-axis position data exported after signal processing is output to nanometer displacement platform；
Step 4: DSP main control board receives the X-axis feedback signal and Y-axis feedback signal fed back by position signal feedback unit；Institute
It states position signal feedback unit and receives the X-axis position signal and Y-axis position signal of the output of nanometer displacement platform, and carry out processing generation
X-axis feedback signal and Y-axis feedback signal are exported to DSP main control board；
Step 5: DSP main control board is by received X-axis feedback signal and Y-axis feedback signal back to host computer.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114917969A (en) * | 2022-05-07 | 2022-08-19 | 中山大学·深圳 | Micro-nano machine control system and method based on five-microelectrode alternating current electroosmosis |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104586511A (en) * | 2015-02-04 | 2015-05-06 | 长春理工大学 | Universal magnetic force micromanipulation system and method for gas and liquid |
| CN106124472A (en) * | 2016-07-26 | 2016-11-16 | 中国科学院苏州生物医学工程技术研究所 | A kind of face battle array detecting stimulated radiation loss imaging system |
| CN106229013A (en) * | 2016-07-28 | 2016-12-14 | 中国计量科学研究院 | There is the two-dimensional nano displacement platform of millimeter stroke |
| CN108036729A (en) * | 2017-12-19 | 2018-05-15 | 中国科学院光电技术研究所 | Correction method for nano displacement measurement |
-
2018
- 2018-08-21 CN CN201810953777.8A patent/CN109062268B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104586511A (en) * | 2015-02-04 | 2015-05-06 | 长春理工大学 | Universal magnetic force micromanipulation system and method for gas and liquid |
| CN106124472A (en) * | 2016-07-26 | 2016-11-16 | 中国科学院苏州生物医学工程技术研究所 | A kind of face battle array detecting stimulated radiation loss imaging system |
| CN106229013A (en) * | 2016-07-28 | 2016-12-14 | 中国计量科学研究院 | There is the two-dimensional nano displacement platform of millimeter stroke |
| CN108036729A (en) * | 2017-12-19 | 2018-05-15 | 中国科学院光电技术研究所 | Correction method for nano displacement measurement |
Non-Patent Citations (5)
| Title |
|---|
| BOHUA YIN等: ""A Novel Atomic Force Microscope Control System Based on PC104 and DSP Embedded System"", 《PHYSICS PROCEDIA》 * |
| SAEED OLYAEE等: ""Correction of Nonlinearity in High-Resolution Nano-Displacement Measurements"", 《2008 INTERNATIONAL SYMPOSIUM ON HIGH CAPACITY OPTICAL NETWORKS AND ENABLING TECHNOLOGIES》 * |
| 张瑞军等: ""计量型扫描电子显微镜测控系统研究"", 《计量学报》 * |
| 殷伯华等: ""小型微纳米图形电子束曝光制作系统(英文)"", 《纳米技术与精密工程》 * |
| 赵贤云等: ""二维纳米位移台测量系统的搭建和实验研究"", 《计量学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114917969A (en) * | 2022-05-07 | 2022-08-19 | 中山大学·深圳 | Micro-nano machine control system and method based on five-microelectrode alternating current electroosmosis |
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