CN109060228A - Rigid microcavity body structural member - Google Patents
Rigid microcavity body structural member Download PDFInfo
- Publication number
- CN109060228A CN109060228A CN201810911421.8A CN201810911421A CN109060228A CN 109060228 A CN109060228 A CN 109060228A CN 201810911421 A CN201810911421 A CN 201810911421A CN 109060228 A CN109060228 A CN 109060228A
- Authority
- CN
- China
- Prior art keywords
- structural member
- plate body
- microcavity
- rigid
- body structural
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Radiation (AREA)
Abstract
The invention discloses a kind of rigid microcavity body structural members, including using plate body made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body, array is provided with several through-holes or blind hole on the plate body, forms supporting beam between the adjacent through-hole or blind hole of each column.By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account high sensitivity and arrangement spacing is small.
Description
Technical field
The present invention relates to a kind of rigid microcavity body structural members.
Background technique
TCM pulse diagnosis is modernized, core element is to simulate the human body wrist position radial artery that Chinese medicine finger is experienced to fight
Dynamic state.
And the sensory nerve arrangement spacing very little induction sensitivity of finger surface is fine.
The diameter of radial artery substantially again 2.5-4mm, if wanting the vertical vessel directions of precise measurement radial artery, i.e. vascular cross-section
Pressure distribution, sensor sensing point spacing is at least less than 1mm.Current existing various pressure sensors are difficult to take into account spirit
Sensitivity height and arrangement spacing are small.
Summary of the invention
The purpose of the present invention is to provide a kind of rigid microcavity body structural members, to solve above-mentioned skill existing in the prior art
Art problem.
Rigidity microcavity body structural member provided by the invention, including using plate body made of rigid material, the bullet of the plate body
Property modulus > 2Gpa, array is provided with several through-holes or blind hole on the plate body, between the adjacent through-hole or blind hole of each column
Form supporting beam.
Further, the plate body surface is equipped with front glue-line, and the plate body bottom surface is equipped with back side glue-line.
Further, the thickness < 0.05mm of the front glue-line, the thickness < 0.05mm of the back side glue-line.
Further, the rigid material is ceramics, plastics or metal.
Further, the rigid material is metal, needs to deposit a layer insulating on the plate body.
Further, 5 μm of the thickness < of the insulating layer.
Further, the ceramics are aluminium oxide ceramics or zirconia ceramics.
Further, the through-hole or blind hole are rectangular, round or polygon.
Further, the through-hole or blind hole are rectangular, short side dimension < 0.8mm, the support cantilever thickness <
0.1mm。
Further, the thickness < 0.2mm of the plate body.
Rigidity microcavity body structural member provided by the invention, has the advantages that
Plate body is made of rigid material, the elastic modulus G T.GT.GT 2Gpa of plate body, on plate body array be provided with several through-holes or
Blind hole forms supporting beam between the adjacent through-hole or blind hole of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram for the rigid microcavity body structural member that the embodiment of the present invention one provides.
Appended drawing reference: 1- plate body;2- through-hole or blind hole;3- supporting beam;The front 4- glue-line;The back side 5- glue-line.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can
To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning in the present invention.
Embodiment one:
Fig. 1 is the structural schematic diagram for the rigid microcavity body structural member that the embodiment of the present invention one provides;As shown in Figure 1, this hair
The rigid microcavity body structural member that bright embodiment one provides, including using plate body 1 made of rigid material, the elasticity of the plate body 1
Modulus > 2Gpa, array is provided with several through-holes or blind hole 2 on the plate body 1, between the adjacent through-hole or blind hole 2 of each column
Form supporting beam 3.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Embodiment two:
The rigid microcavity body structural member that the present embodiment two provides is the rigid microcavity body structural member provided embodiment one
It is further improved, on the basis of embodiment one and Fig. 1, the rigid microcavity body structural member that the present embodiment two provides, including adopt
Plate body 1 made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body 1, array is provided with several through-holes on the plate body 1
Or blind hole 2, supporting beam 3 is formed between the adjacent through-hole or blind hole 2 of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Specifically, the thickness < 0.05mm of the front glue-line 4, the thickness < 0.05mm of the back side glue-line 5.
Embodiment three:
The rigid microcavity body structural member of the present embodiment three offers is the rigid microcavity body structural member provided embodiment one
Further improvement, on the basis of embodiment one and Fig. 1, the present embodiment three provide rigid microcavity body structural member, including
Using plate body 1 made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body 1, array is provided with several logical on the plate body 1
Hole or blind hole 2 form supporting beam 3 between the adjacent through-hole or blind hole 2 of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Specifically, the thickness < 0.05mm of the front glue-line 4, the thickness < 0.05mm of the back side glue-line 5.
Specifically, rigid material is stated as ceramics, plastics or metal.
Specifically, the rigid material is metal, needs to deposit a layer insulating on the plate body 1.
Example IV:
The rigid microcavity body structural member that the present embodiment four provides is the rigid microcavity body structural member provided embodiment one
It is further improved, on the basis of embodiment one and Fig. 1, the rigid microcavity body structural member that the present embodiment four provides, including adopt
Plate body 1 made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body 1, array is provided with several through-holes on the plate body 1
Or blind hole 2, supporting beam 3 is formed between the adjacent through-hole or blind hole 2 of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Specifically, the thickness < 0.05mm of the front glue-line 4, the thickness < 0.05mm of the back side glue-line 5.
Specifically, rigid material is stated as ceramics, plastics or metal.
Specifically, the rigid material is metal, needs to deposit a layer insulating on the plate body 1.
Specifically, 5 μm of the thickness < of the insulating layer.
Embodiment five:
The rigid microcavity body structural member that the present embodiment five provides is the rigid microcavity body structural member provided embodiment one
It is further improved, on the basis of embodiment one and Fig. 1, the rigid microcavity body structural member that the present embodiment five provides, including adopt
Plate body 1 made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body 1, array is provided with several through-holes on the plate body 1
Or blind hole 2, supporting beam 3 is formed between the adjacent through-hole or blind hole 2 of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Specifically, the thickness < 0.05mm of the front glue-line 4, the thickness < 0.05mm of the back side glue-line 5.
Specifically, rigid material is stated as ceramics, plastics or metal.
Specifically, the rigid material is metal, needs to deposit a layer insulating on the plate body 1.
Specifically, 5 μm of the thickness < of the insulating layer.
Specifically, the ceramics are aluminium oxide ceramics or zirconia ceramics.
Embodiment six:
The rigid microcavity body structural member that the present embodiment six provides is the rigid microcavity body structural member provided embodiment one
It is further improved, on the basis of embodiment one and Fig. 1, the rigid microcavity body structural member that the present embodiment six provides, including adopt
Plate body 1 made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body 1, array is provided with several through-holes on the plate body 1
Or blind hole 2, supporting beam 3 is formed between the adjacent through-hole or blind hole 2 of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Specifically, the thickness < 0.05mm of the front glue-line 4, the thickness < 0.05mm of the back side glue-line 5.
Specifically, rigid material is stated as ceramics, plastics or metal.
Specifically, the rigid material is metal, needs to deposit a layer insulating on the plate body 1.
Specifically, 5 μm of the thickness < of the insulating layer.
Specifically, the ceramics are aluminium oxide ceramics or zirconia ceramics.
Specifically, the through-hole or blind hole 2 are rectangular, round or polygon.
Embodiment seven:
The rigid microcavity body structural member that the present embodiment seven provides is the rigid microcavity body structural member provided embodiment one
It is further improved, on the basis of embodiment one and Fig. 1, the rigid microcavity body structural member that the present embodiment seven provides, including adopt
Plate body 1 made of rigid material, the elastic modulus G T.GT.GT 2Gpa of the plate body 1, array is provided with several through-holes on the plate body 1
Or blind hole 2, supporting beam 3 is formed between the adjacent through-hole or blind hole 2 of each column.
By above-mentioned setting, so that the sensor of the rigid microcavity body structural member using the application, can take into account sensitive
Degree is high and arrangement spacing is small.
Specifically, each electrode zone is corresponding with 1-100 through-hole or blind hole 2.
Specifically, 1 surface of plate body is equipped with front glue-line 4, and 1 bottom surface of plate body is equipped with back side glue-line 5.
Specifically, the thickness < 0.05mm of the front glue-line 4, the thickness < 0.05mm of the back side glue-line 5.
Specifically, rigid material is stated as ceramics, plastics or metal.
Specifically, the rigid material is metal, needs to deposit a layer insulating on the plate body 1.
Specifically, 5 μm of the thickness < of the insulating layer.
Specifically, the ceramics are aluminium oxide ceramics or zirconia ceramics.
Specifically, the through-hole or blind hole 2 are rectangular, round or polygon.
Specifically, the through-hole or blind hole 2 are rectangular, short side dimension < 0.8mm, the 3 thickness < of supporting beam
0.1mm, to improve sensitivity.
Specifically, the thickness < 0.2mm of the plate body 1, to improve sensitivity.
Embodiment eight:
The rigid microcavity body structural member of the application, preparation method is according to metal or nonmetallic there are two types of preparation method;
When rigid microcavity body structural member is metal material, through-hole or blind hole 2 are using laser-induced thermal etching or chemical etching or electricity
The method of chemical etching,
The method that the metal material of thin slice processes through-hole to it can be used high-precision in the method wherein laser machined
The ultraviolet light or infrared laser of degree, the processing graphic pattern that sight is editted input process equipment, directly pass through metal surface
Laser high temperature melting is cut into through-hole, retains supporting beam 3;The rigid microcavity body structural member just processed.
There is the metal material of through-hole again for existing blind hole, using chemical etching or the method for chemical etching;Chemistry erosion
Carving technology is the pattern production film that will need to etch, and makes web plate with the film, then etching ink is printed onto sheet metal surface,
Etching ink directly rinses out after being dissolved in solvent with metal reaction, formation metal salt, just retains the blind hole or logical of needs later
Hole.It is the pattern production film that will do not need etching supporting beam 3 using electrochemical etching process, makes web plate with the film, will protect
Shield ink is printed onto sheet metal surface, and sheet metal is then entered etching solution, unprotected surface and etching solution after metal electrification
Electrochemical reaction occurs, metal becomes metal salt, is dissolved into etching solution;After ink cleaning will be protected after the completion, just added
The good rigid microcavity body structural member of work.
Ceramic material can also be used to prepare rigid microcavity body structural member, aluminium oxide ceramics or zirconium oxide can be used
Ceramics are used as main material, and preparation method can prepare ceramic embryo material using the tape casting, and twin grinding is to needs after sintering
Thickness, then using the method for laser cutting through-hole, the rigid microcavity body structural member finally just processed.
Plastic material can also be used to prepare rigid microcavity body structural member, usually using the method for injection molding.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement;And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of rigidity microcavity body structural member, which is characterized in that including using plate body made of rigid material, the bullet of the plate body
Property modulus > 2Gpa, array is provided with several through-holes or blind hole on the plate body, between the adjacent through-hole or blind hole of each column
Form supporting beam.
2. rigidity microcavity body structural member according to claim 1, which is characterized in that the plate body surface is equipped with front glue
Layer, the plate body bottom surface are equipped with back side glue-line.
3. rigidity microcavity body structural member according to claim 2, which is characterized in that the thickness < of the front glue-line
0.05mm, the thickness < 0.05mm of the back side glue-line.
4. rigidity microcavity body structural member according to claim 1, which is characterized in that the rigid material is ceramics, plastics
Or metal.
5. rigidity microcavity body structural member according to claim 4, which is characterized in that the rigid material is metal, is needed
A layer insulating is deposited on the plate body.
6. rigidity microcavity body structural member according to claim 5, which is characterized in that 5 μm of the thickness < of the insulating layer.
7. rigidity microcavity body structural member according to claim 4, which is characterized in that the ceramics are aluminium oxide ceramics or oxygen
Change zircon ceramic.
8. rigidity microcavity body structural member according to claim 1, which is characterized in that the through-hole or blind hole are rectangular, circle
Shape or polygon.
9. rigidity microcavity body structural member according to claim 8, which is characterized in that the through-hole or blind hole be it is rectangular,
Short side dimension < 0.8mm, the support cantilever thickness < 0.1mm.
10. rigidity microcavity body structural member according to claim 1, which is characterized in that the thickness < 0.2mm of the plate body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810911421.8A CN109060228A (en) | 2018-08-10 | 2018-08-10 | Rigid microcavity body structural member |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810911421.8A CN109060228A (en) | 2018-08-10 | 2018-08-10 | Rigid microcavity body structural member |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109060228A true CN109060228A (en) | 2018-12-21 |
Family
ID=64683529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810911421.8A Pending CN109060228A (en) | 2018-08-10 | 2018-08-10 | Rigid microcavity body structural member |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109060228A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114190909A (en) * | 2021-12-01 | 2022-03-18 | 上海平脉科技有限公司 | Pulse wave detection device and control method thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1042470A (en) * | 1989-10-02 | 1990-05-30 | 李实� | Sensing method for doctor's pulse-feeling |
CN103274351A (en) * | 2013-05-21 | 2013-09-04 | 中国科学院电子学研究所 | Electrochemistry geophone electrode sensitive core based on MEMS and manufacturing method thereof |
CN103696367A (en) * | 2014-01-14 | 2014-04-02 | 株洲时代新材料科技股份有限公司 | Composite material structural piece and manufacturing method thereof |
TW201615429A (en) * | 2014-10-28 | 2016-05-01 | 財團法人金屬工業研究發展中心 | Composite stencil |
CN206162960U (en) * | 2016-05-12 | 2017-05-10 | 北京梦之墨科技有限公司 | Bread board |
CN206833402U (en) * | 2017-06-07 | 2018-01-02 | 江苏日久光电股份有限公司 | Metal grill piece |
-
2018
- 2018-08-10 CN CN201810911421.8A patent/CN109060228A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1042470A (en) * | 1989-10-02 | 1990-05-30 | 李实� | Sensing method for doctor's pulse-feeling |
CN103274351A (en) * | 2013-05-21 | 2013-09-04 | 中国科学院电子学研究所 | Electrochemistry geophone electrode sensitive core based on MEMS and manufacturing method thereof |
CN103696367A (en) * | 2014-01-14 | 2014-04-02 | 株洲时代新材料科技股份有限公司 | Composite material structural piece and manufacturing method thereof |
TW201615429A (en) * | 2014-10-28 | 2016-05-01 | 財團法人金屬工業研究發展中心 | Composite stencil |
CN206162960U (en) * | 2016-05-12 | 2017-05-10 | 北京梦之墨科技有限公司 | Bread board |
CN206833402U (en) * | 2017-06-07 | 2018-01-02 | 江苏日久光电股份有限公司 | Metal grill piece |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114190909A (en) * | 2021-12-01 | 2022-03-18 | 上海平脉科技有限公司 | Pulse wave detection device and control method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Bilal et al. | Electro-discharge machining of ceramics: A review | |
Cheung et al. | Implantable multichannel electrode array based on SOI technology | |
CN109922909A (en) | Cutting head, cutting element and cutting system | |
CN109060228A (en) | Rigid microcavity body structural member | |
WO2015012955A1 (en) | Devices, systems and methods for high-throughput electrophysiology | |
Rajaraman et al. | Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array | |
JP6074874B2 (en) | Electrochemical measurement device | |
JP2005338053A (en) | Tactile sensor and manufacturing method thereof | |
EP0164473A2 (en) | Aggregometer electrode structures | |
Márton et al. | A silicon-based microelectrode array with a microdrive for monitoring brainstem regions of freely moving rats | |
JP6653490B2 (en) | Electrochemical measurement device | |
CN111595381A (en) | Bionic cilium capacitive micro-sensor with back lead and preparation method thereof | |
JP2007174990A (en) | Cellular electrophysiological sensor array and method for producing the same | |
KR20130120396A (en) | High-density mask for three-dimensional substrates and methods for making the same | |
CN109426397B (en) | Preparation method of touch structure and touch structure | |
JP4873174B2 (en) | Biosensor | |
CN110487168A (en) | Bend in one direction sensitive sensor and preparation method thereof | |
CN109115358A (en) | A kind of microelectromechanicsystems systems array formula platinum film temperature sensor and preparation method thereof | |
US11635404B2 (en) | Methods for manufacturing electrochemical sensors, and related electrochemical sensors | |
JP2011036360A (en) | Multifunctional electrode for nerve | |
TW201538973A (en) | Flexible dissolved oxygen sensor | |
CN109791122A (en) | Electrochemical determining device and converter | |
CN109725038B (en) | Method for depositing electrodes and electrolyte on MEMS electrochemical sensors | |
Zhang et al. | Numerical analysis and experimental study on fabrication of high aspect ratio tapered ultrafine holes by over-growth electroforming process | |
JP6983645B2 (en) | Laminated body assembly unit, laminated body, and method for manufacturing the laminated body |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181221 |
|
RJ01 | Rejection of invention patent application after publication |