CN109030365A - A kind of spectrum detection instrument and method of universal type modular - Google Patents

A kind of spectrum detection instrument and method of universal type modular Download PDF

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Publication number
CN109030365A
CN109030365A CN201810945398.4A CN201810945398A CN109030365A CN 109030365 A CN109030365 A CN 109030365A CN 201810945398 A CN201810945398 A CN 201810945398A CN 109030365 A CN109030365 A CN 109030365A
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spectrum
light
circuit
light source
acousto
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何志平
徐睿
吴金才
王振动
郑海燕
舒嵘
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a kind of spectrum detection instrument of universal type modular and methods.The invention based on acousto-optic turnable filter or liquid crystal tunable filter etc. can automatically controlled light-splitting device light splitting function, it is converged on measured object using broad spectrum light source by condenser and light beam of light source reflecting mirror, the scattering light of measured object is collimated by collimation lens, acousto-optic turnable filter is recycled to carry out spectral filtering to the collimated light, to detect the spectral characteristic of scattering light, it is compared using the curve of spectrum of scattering light with the curve of spectrum of standard spectrum calibration plate, to analyze the compositional information of measured object.The invention is suitable for the fields such as spectral detection and analysis, which is modular universal equipment, and structure is simple, and spectrographic detection calibrating method is simple.

Description

A kind of spectrum detection instrument and method of universal type modular
Technical field
The present invention relates to a kind of spectrometric instruments, refer in particular to the spectrum detection instrument and method of a kind of universal type modular, The invention is suitable for spectral detection and analysis field, especially suitable for the ingredient analysis such as food, drug field.
Background technique
Spectral instrument has just play vital role since its appearance in the lab.All kinds of spectral analysis techniques It is used in the tasks such as process monitoring, compound identification, determination of chemical structure.In recent years, with local governments to environment/ Contamination monitoring policy it is increasingly severe so that the demand of monitoring instrument is continuously increased, the relieving of the following spectral instrument demand also at Trend of the times, wherein infrared spectrum detection is most widely used, and application field includes the food such as milk and grain Industry, pharmacy industry, biotechnology, cell analysis and plastics recycle industry.Compared with wet chemical and liquid chromatography technology, Near-infrared spectrum technique is considered as the ideal tools of quantitative analysis, can be used for process control, Quality Identification, detection original material With the quantitative chemical analysis of process by-products, mixture.
Infrared spectrometer also has special applications in terms of other are such as food production, as measured water and alcohol content in beer, The content and other food of oil and water in cheese.Other application includes process in plastics, fine chemicals, pharmacy and agricultural to survey Measure miscellaneous parameter.With the rapid economic development in our country, people's lives level is greatly improved, for food Nutrition, health care and the safety of product give more and more concerns.In recent years due to a series of chemical contamination of raw-food materials, poultry The application of antibiotic, the application of technique for gene engineering, keep food origin disease caused by food pollution in rising trend in animal husbandry.I State's Sanlu milk powder case melamine food safety accident in other words, even more to entire food service industry even to Chinese food and agriculture Product processing industry constitutes negative effect in worldwide quality reputation, then to physiology and menticide caused by consumer It can not make up.Near-infrared spectral analysis technology has been led in food such as meat, edible oil, dairy produce, drinks, beverages at present Domain supervision illegal retailer manufacture the fake it is adulterated, prevention food origin disease and prevention since the raw material of change, technology and technique may produce Raw safety problem etc. is got a lot of applications.Near-infrared composition analysis instrument main Types have: alcohol analyzer;Dairy products point Analyzer;Meat analyzer;Polymer analysis instrument;Near-infrared analyzer.Its application type includes: beverage, dairy products, meat products, is gathered Close object, candy, fruit, cosmetics, drug, chemicals.
The present invention is alternative using the wavelength of acousto-optic tunable filter, to realize the spectrographic detection to substance.Sound Optic tunable filter (Acousto-optic tunable filter, AOTF) is a kind of narrow-band tunable optical filter, it is According to light-splitting device made of acousto-optic interaction principle.By the frequency selection light splitting wave for changing the radio-frequency driven being applied on crystal It is long, to realize length scanning.The technology is widely used to non-imaged and imaging spectral instrument at present.
Summary of the invention
The object of the present invention is to provide a kind of spectrum detection instrument of universal type modular and method, which is based on acousto-optic Tunable optical filter etc. can automatically controlled light-splitting device light splitting function, reflected using broad spectrum light source through light source condenser and light beam of light source Mirror focuses on measured object surface and generates scattering light, and the scattering light of measured object is collimated by collimation lens, recycles the adjustable filter of acousto-optic Light device is directed at direct light and carries out spectral filtering, to detect the spectral characteristic of scattering light, utilizes the curve of spectrum and standard of scattering light The curve of spectrum of spectral calibration plate is compared, to analyze the compositional information of measured object.
The critical component of the invention is acousto-optic turnable filter, acousto-optic tunable filter (Acousto-optic Tunable filter, AOTF) it is a kind of narrow-band tunable optical filter, it is the optical splitter according to made of acousto-optic interaction principle Part.By changing the frequency selection light splitting wavelength for the radio-frequency driven being applied on crystal, to realize length scanning.The skill at present Art is widely used to non-imaged and imaging spectral instrument.The light splitting principle of acousto-optic turnable filter (AOTF): when a branch of secondary color When light passes through the crystal with Photoelasticity of a high-frequency vibration, the monochromatic light of a certain wavelength will be generated in crystals to spread out It penetrates, is transmitted from crystal at a certain angle, the polychromatic light that diffraction does not occur was then directly projected along the former light direction of propagation Thus crystal achievees the purpose that light splitting.When crystal vibration frequency changes, the monochromatic wavelength of transmissive also accordingly changes.
The present invention is a kind of spectrum detection instrument of universal type modular, it includes dust-proof antiglare module 1, spectral analysis module 2, data acquisition and control module 3;It is essentially characterized in that:
The dust-proof antiglare module 1 is instrument upper cover, is protected from dust pollution optical path and facilitates sample to be tested It places;Directly pass through on instrument the sample well reserved on lid when instrument detection sample is placed on objective table 205 and visits It surveys.
The spectral analysis module 2 is by broad spectrum light source 201, light source hood 202, light source condenser 203, light source light Beam steering mirror 204, objective table 205, sample beam reflecting mirror 206, collimation lens 207, to be polarized Glan prism 208, acousto-optic adjustable Optical filter 209, analyzing Glan prism 210, convergent lens 211, detector 212 and light path module bottom plate 213 form;Spectrographic detection When instrument works, determinand is placed on objective table 205, opens broad spectrum light source 201, the light that broad spectrum light source 201 is emitted Enter light source condenser 203 by light source hood 202 and carry out light beam focusing, focus on light beam passes through light beam of light source reflecting mirror 204 It converges on the determinand on objective table 205 upwards, generates scattering light, scattering light enters quasi- by sample beam reflecting mirror 206 Straight lens 207 collimate, and the light after collimation forms horizontal or vertical direction line polarisation after being polarized Glan prism 208, and the line is inclined Light using analyzing Glan prism 210, the direction of analyzing Glan prism 210 and is polarized lattice after acousto-optic turnable filter 209 The direction of blue prism 208 is orthogonal;When acousto-optic turnable filter 209 does not work, collimated light can not pass through analyzing Glan prism 210, when acousto-optic turnable filter 209 works under some rf frequency, diffraction, diffraction light can occur for the light of a certain wavelength Polarization direction it is consistent with the direction of analyzing Glan prism 210, the diffraction light pass through analyzing Glan prism 210, convergent lens 211 Enter detector 212 afterwards and carry out spectrographic detection, different wave length is detected to realize by changing the frequency of RF driving signal, from And complete the curve of spectrum detection of scattering light;Optical element is all fixed on light path module bottom plate 213.
Data acquisition and control module 3 by power supply and control circuit board 3-1, radio-frequency power amplifier 3-2, it is power autonomous and Interlock circuit 3-3, communication interface 3-4, power switch 3-5, power interface 3-6, radiator fan 3-7, connector fixing seat 3-8 and Fixed supporting module 3-9 composition, power supply and control circuit board 3-1 are by power circuit 311, FPGA circuitry 312, RF driving signal Circuit 313, light source adjusting control circuit 314, signal processing circuit 315, detector temperature control circuit 316, temperature information occurs to adopt Collector 317 and telecommunication circuit 318 form;Wherein power supply is converted secondary power supply by power circuit 311, meet data acquisition with The power demands of 3 each unit of control module;Instruction is received by telecommunication circuit 318, spectra collection system is controlled by FPGA circuitry 312 System work;FPGA circuitry 312 controls RF driving signal and the radiofrequency signal that circuit 313 generates required frequency occurs, and passes through radio frequency Power amplifier 3-2 amplification, is applied to acousto-optic turnable filter 209;FPGA circuitry 312 controls RF driving signal and circuit occurs 313, which generate radio-frequency channel selection signal, selects radiofrequency signal output channel to radio-frequency power amplifier 3-2, meets instrument spectral choosing The demand selected;FPGA circuitry 312 controls adjusting of the realization of light source adjusting control circuit 314 to the intensity of light source;FPGA circuitry 312 is controlled Signal processing circuit 315 handles and acquires the infrared spectroscopy signals from detector 212, and defeated by telecommunication circuit 318 Out;FPGA circuitry 312 controls the cryogenic temperature that detector temperature control circuit 316 stablizes detector 212;FPGA circuitry 312 controls temperature It spends information acquisition circuit 317 and temperature information collecting circuit 319 obtains the real time temperature of important component.Communication interface 3-4, power supply Switch 3-5, power interface 3-6, which pass through connector fixing seat 3-8, to be fixed, and spectral analysis module 2 and data acquire and control mould All elements are all fixed on fixed supporting module 3-9 in block 3, and fixed supporting module 3-9 is by optical flat and 4 rubber branch Support foot composition.
A kind of spectrum detection instrument of universal type modular, it is characterised in that method and step is as follows:
1) device power self-test
Power interface 3-6 connection power supply adaptor, communication interface 3-4 are connected to computer, press power switch 3-5 and provide for oneself Power supply and interlock circuit 3-3 power to power circuit 311, and power circuit 311 gives device power, radiator fan 3-7 work, FPGA Circuit 312 controls temperature information Acquisition Circuit 317 and works, and obtains the real time temperature of equipment key modules, and via telecommunication circuit 318 are transmitted to host computer.Other circuit modules are in standby;
2) equipment preheats, and prepares before working
2-1) light source adjusting control circuit 314 works, and opens broad spectrum light source 201 and sets the intensity of light source, the width on demand Spectroscopic light source 201 converges on objective table 205 through light source condenser 203 and light beam of light source reflecting mirror 204, whether checks convergent point It is abnormal;
Detector 212 2-2) is opened, detector temperature control circuit 316 works, control detector 212 refrigeration to operating temperature, Due to diffraction light-free at this time, while the direction of analyzing Glan prism 210 is orthogonal with the direction for being polarized Glan prism 208, unglazed letter Number enter detector 212, the black level of detector 212, and is recorded in the case of test broad spectrum light source 201 is opened;
Radiofrequency signal 2-3) is loaded on acousto-optic turnable filter 208, whether test probe 212 has response, and record is rung Answer result.
3) standard calibration plate is calibrated
3-1) when determinand is standard calibration plate, it is placed on objective table 205;
3-2) FPGA circuitry 312 controls RF driving signal generation circuit 313 and works, the radio frequency letter of frequency needed for generating Number, it is loaded onto acousto-optic turnable filter 209 after radio-frequency power amplifier 3-2 amplification, light is scattered to the different wave length of measured object Spectrum be scanned, diffracted light signals of the detection after acousto-optic turnable filter 209 of detector 212 are simultaneously transmitted at signal Circuit 315 is managed, is transmitted to host computer via telecommunication circuit 318;
3-3) by the relationship between the frequency and spectrum of calibration, scattering light is recorded and saved through acousto-optic turnable filter Diffracted light signals intensity after 209, the curve of spectrum are the benchmark curve of spectrum.
4) measured object spectra collection
4-1) when detection object, object is placed on objective table 205;
4-2) FPGA circuitry 312 controls RF driving signal generation circuit 313 and works, the radio frequency letter of the frequency needed for generating Number, acousto-optic turnable filter (209) are loaded onto after radio-frequency power amplifier (3-2) amplification, the different wave length of measured object is dissipated The spectrum for penetrating light is scanned, and detects the diffracted light signals intensity after acousto-optic turnable filter 209 by detector 212;
4-3) by the relationship between the frequency and spectrum of calibration, scattering light is recorded and saved through acousto-optic turnable filter Diffracted light signals intensity after 207, the curve of spectrum are the scattering spectrum curve of measured object.
5) data analysis and processing
5-1) by comparing the scattering spectrum curve of measured object and standard calibration plate, measured object is calculated to different wavelengths of light The scattered power in source;
5-2) by measured object wavelength dispersion rate relation curve, measured object substance is judged by being compared with master pattern Composition and content.
The characteristics of invention, is mainly reflected in:
A) the spectrum detection instrument structure is simple
B) the spectrographic detection calibrating method of the invention is simple, cheap
Detailed description of the invention
Fig. 1 is embodiment Instrumental schematic internal view.
Fig. 2 is embodiment Instrumental complete machine structure.
Fig. 3 is 2 schematic diagram of spectral analysis module in embodiment.
Fig. 4 is the spectral response curve of infrared tungsten light source in embodiment.
Fig. 5 is InGaAs photodiode spectral response curve in embodiment.
Fig. 6 is data acquisition and 3 schematic diagram of control module in embodiment.
Specific embodiment
The present invention is a kind of spectrum detection instrument of universal type modular, and the spectrum detection instrument is by dust-proof antiglare module 1, spectrum Analysis module 2, data acquisition are formed with control module 3, are carried out below in conjunction with embodiment of the attached drawing to the method for the present invention detailed Description.Main devices employed in the present invention are described as follows: the feature of the spectrum detection instrument and its optical spectrum detecting method exists In:
1) broad spectrum light source 201: the broad spectrum light source 201 of optical fiber output is steady using Thorlabs company in the present embodiment It is formed infrared tungsten light source, the optical fiber output light source of model SLS202L, spectral region 450-5500nm;
2) objective table 205: the sapphire in the present embodiment using twin polishing is as objective table, it is ensured that 900- The light source of 2500nm wavelength can illuminate testee, sapphire twin polishing face surface precision requirement by sapphire window It is less than the@of λ/10 632.8nm for RMS value;
3) light source condenser 203, collimation lens 207 and convergent lens 211: the collimation lens that is used in the present embodiment with Convergent lens is the component of designed, designed, the use of wave-length coverage is 900-2500nm, light source condenser 203 is by broad spectrum light source The light beam of 201 outgoing focuses, and focuses on the determinand on objective table 205 by light beam of light source reflecting mirror 207, collimation lens The scattering wide spectrum that 207 pairs of objects to be measured generate collimates, and parallel diffraction light is converged at detector 212 by convergent lens 211 Surface;
4) Glan prism 208, analyzing Glan prism 210 are polarized: using Thorlabs company in the present embodiment GL15Glan-Laser Calcite Polarizers, extinction ratio be better than 10000:1, spectral region 350nm-2300n m it Between, realize wide spectrum test;
5) acousto-optic turnable filter 209: the selection of acousto-optic turnable filter 209 China Electronics's science and technology collection used in the present embodiment The 26th research institute's customed product of group, the key technical indexes are as follows:
A) operation wavelength: 850nm-2400nm
B) spectral resolution: 2nm-12nm
C) level-one deflection angle: 2.6 turns
D) angle of departure: >=6.1:
E) diffraction efficiency: >=60%
F) size: 560mm*400mm*315mm
G) driving power :≤2W
H) driving frequency range: 37MHz-112MHz
6) detector 212: selecting Judson company J23TE2-66C type InGaAs infrared detector in the present embodiment, The key technical indexes are as follows: its photosensitive area isSpectral response range is 0.9~1.7 μm, and dark current maximum value is 1.0E-5A;Detectivity: 8.4E11cmHz1/2W-1, 2 grades of TEC refrigeration.
The present invention is a kind of spectrum detection instrument of universal type modular.The invention is suitable for spectral detection and analysis field, Especially suitable for fields such as the ingredient analysis such as food, drug, specific step is as follows for this method:
1) device power self-test
Power interface (3-6) connects power supply adaptor, and communication interface (3-4) is connected to computer, presses power switch (3- 5) power autonomous and interlock circuit (3-3) is powered to power circuit (311), and power circuit (311) gives device power, radiator fan (3-7) work, FPGA circuitry 312 control temperature information Acquisition Circuit 317 and work, and obtain the real time temperature of equipment key modules, And host computer is transmitted to via telecommunication circuit 318.Other circuit modules are in standby;
2) equipment preheats, and prepares before working
2-1) light source adjusting control circuit 314 works, and opens broad spectrum light source 201 and sets the intensity of light source, the width on demand Spectroscopic light source 201 converges on objective table 205 through light source condenser 203 and light beam of light source reflecting mirror 204, whether checks convergent point It is abnormal;
Detector 212 2-2) is opened, detector temperature control circuit 316 works, control detector 212 refrigeration to operating temperature, Due to diffraction light-free at this time, while the direction of analyzing Glan prism 210 is orthogonal with the direction for being polarized Glan prism 208, unglazed letter Number enter detector 212, the black level of detector 212, and is recorded in the case of test broad spectrum light source 201 is opened;
Radiofrequency signal 2-3) is loaded on acousto-optic turnable filter 208, whether test probe 212 has response, and record is rung Answer result.
3) standard calibration plate is calibrated
3-1) when determinand is standard calibration plate, it is placed on objective table 205;
3-2) FPGA circuitry 312 controls RF driving signal generation circuit 313 and works, the radio frequency letter of frequency needed for generating Number, acousto-optic turnable filter (209) are loaded onto after radio-frequency power amplifier (3-2) amplification, the different wave length of measured object is dissipated The spectrum for penetrating light is scanned, and detector 212 detects the diffracted light signals after acousto-optic turnable filter 209 and is transmitted to letter Number processing circuit 315, is transmitted to host computer via telecommunication circuit 318;
3-3) by the relationship between the frequency and spectrum of calibration, scattering light is recorded and saved through acousto-optic turnable filter Diffracted light signals intensity after 209, the curve of spectrum are the benchmark curve of spectrum.
4) measured object spectra collection
4-1) when detection object, it is placed on objective table 205 through object;
4-2) FPGA circuitry 312 controls RF driving signal generation circuit 313 and works, the radio frequency letter of frequency needed for generating Number, acousto-optic turnable filter (209) are loaded onto after radio-frequency power amplifier (3-2) amplification, the different wave length of measured object is dissipated The spectrum for penetrating light is scanned, and detects the diffracted light signals intensity after acousto-optic turnable filter 209 by detector 212;
4-3) by the relationship between the frequency and spectrum of calibration, scattering light is recorded and saved through acousto-optic turnable filter Diffracted light signals intensity after 207, the curve of spectrum are the scattering spectrum curve of measured object.
5) data analysis and processing
5-1) by comparing the scattering spectrum curve of measured object and standard calibration plate, measured object is calculated to different wavelengths of light The scattered power in source;
5-2) by measured object wavelength dispersion rate relation curve, measured object substance is judged by being compared with master pattern Composition and content.

Claims (8)

1. a kind of spectrum detection instrument of universal type modular, including dust-proof antiglare module (1), spectral analysis module (2), data are adopted Collection and control module (3);It is characterized by:
The dust-proof antiglare module (1) is instrument upper cover, has covered to be placed into sample on objective table (205) and detects Sample well;
The spectral analysis module (2) is by broad spectrum light source (201), light source hood (202), light source condenser (203), light Source beam reflecting mirror (204), sample beam reflecting mirror (206), collimation lens (207), is polarized Glan prism at objective table (205) (208), acousto-optic turnable filter (209), analyzing Glan prism (210), convergent lens (211), detector (212) and optical path mould Block bottom plate (213) composition;When spectrum detection instrument works, determinand is placed on objective table (205), opens broad spectrum light source (201), the light of broad spectrum light source (201) outgoing enters light source condenser (203) progress light beam by light source hood (202) It focuses, focus on light beam converges on the determinand on objective table (205) upwards by light beam of light source reflecting mirror (204), generates and dissipates Light is penetrated, scattering light is collimated by sample beam reflecting mirror (206) into collimation lens (207), and the light after collimation is by being polarized lattice Blue prism (208) forms horizontal or vertical direction line polarisation afterwards, the line polarisation after acousto-optic turnable filter (209) using Analyzing Glan prism (210), the direction of analyzing Glan prism (210) are orthogonal with the direction for being polarized Glan prism (208);Work as acousto-optic When tunable optical filter (209) does not work, collimated light can not be by analyzing Glan prism (210), when acousto-optic turnable filter (209) When working under some rf frequency, diffraction, the polarization direction of diffraction light and analyzing Glan rib can occur for the light of a certain wavelength The direction of mirror (210) is consistent, which enters detector after analyzing Glan prism (210), convergent lens (211) (212) spectrographic detection is carried out, realizes the detection to different wave length by changing the frequency of RF driving signal, to complete to dissipate Penetrate the curve of spectrum detection of light;Optical element is all fixed on light path module bottom plate (213);
The described data acquisition and control module (3) by power supply and control circuit board (3-1), radio-frequency power amplifier (3-2), from Stand-by power source and interlock circuit (3-3), communication interface (3-4), power switch (3-5), power interface (3-6), radiator fan (3- 7), connector fixing seat (3-8) and fixed supporting module (3-9) composition, power supply and control circuit board (3-1) are by power circuit (311), circuit (313), light source adjusting control circuit (314), signal processing occur for FPGA circuitry (312), RF driving signal Circuit (315), detector temperature control circuit (316), temperature information Acquisition Circuit (317) and telecommunication circuit (318) composition;It is wherein electric Power supply is converted secondary power supply by source circuit (311), meets the power demands of data acquisition and control module (3) each unit;By Telecommunication circuit (318) receives instruction and controls the work of spectra collection system by FPGA circuitry (312);FPGA circuitry (312) control The radiofrequency signal of frequency needed for circuit (313) generate occurs for RF driving signal, is amplified by radio-frequency power amplifier (3-2), It is applied to acousto-optic turnable filter (209);FPGA circuitry (312) controls RF driving signal and circuit (313) generation radio frequency occurs Channel selecting signal selects radiofrequency signal output channel to radio-frequency power amplifier (3-2), meets the needs of instrument spectral selection; FPGA circuitry (312) controls adjusting of light source adjusting control circuit (314) realization to the intensity of light source;FPGA circuitry (312) control Signal processing circuit (315) handles and acquires the infrared spectroscopy signals from detector (212), and passes through telecommunication circuit (318) it exports;FPGA circuitry (312) controls the cryogenic temperature that detector temperature control circuit (316) stablize detector (212);FPGA Circuit (312) controls temperature information Acquisition Circuit (317) and temperature information collecting circuit (319) obtains the real-time temperature of important component Degree.Communication interface (3-4), power switch (3-5), power interface (3-6) are all fixed by connector fixing seat (3-8), spectrum Analysis module (2) and data acquisition are all fixed on fixed supporting module (3-9) with element all in control module (3), Gu Determine supporting module (3-9) to be made of optical flat and 4 rubber feet.
2. a kind of spectrum detection instrument of universal type modular according to claim 1, it is characterised in that: the wide spectrum The light beam of light source (201) outgoing is wide spectrum wave band, and the curve of spectrum covers the wave-length coverage of spectrum to be measured.
3. a kind of spectrum detection instrument of universal type modular according to claim 1, it is characterised in that: the acousto-optic can The operating spectral of optical filter (209) is adjusted to cover the range of spectrum to be measured.
4. a kind of spectrum detection instrument of universal type modular according to claim 1, it is characterised in that: the detector (212) operating spectral covers the range of spectrum to be measured.
5. a kind of spectrum detection instrument of universal type modular according to claim 1, it is characterised in that: the objective table It (205) is transmissive glass window, which needs to cover the wave-length coverage of spectrum to be measured, loading The depth of parallelism of platform (205) is better than 10 ", light pass surface surface form deviation RMS value is better than the@of λ/10 632.8nm.
6. a kind of spectrum detection instrument of universal type modular according to claim 1, it is characterised in that: described is polarized lattice The wave-length coverage for being polarized spectral response range and covering spectrum to be measured of blue prism (208);Extinction ratio is polarized better than 1000:1.
7. a kind of spectrum detection instrument of universal type modular according to claim 1, it is characterised in that: the analyzing lattice The spectral response range of blue prism (210) covers the wave-length coverage of spectrum to be measured;Analyzing extinction ratio is better than 1000:1.
8. a kind of based on a kind of detection method of the spectrum detection instrument of universal type modular described in claim 1, feature exists It is as follows in method and step:
1) device power self-test
Power interface (3-6) connects power supply adaptor, and communication interface (3-4) is connected to computer, presses power switch (3-5) certainly Stand-by power source and interlock circuit (3-3) are powered to power circuit (311), and power circuit (311) gives device power, radiator fan (3- 7) it working, FPGA circuitry (312) controls temperature information Acquisition Circuit (317) work, the real time temperature of equipment key modules is obtained, And host computer is transmitted to via telecommunication circuit (318).Other circuit modules are in standby;
2) equipment preheats, and prepares before working
2-1) light source adjusting control circuit (314) works, and opens broad spectrum light source (201) and sets the intensity of light source, the width on demand Spectroscopic light source (201) converges on objective table (205) through light source condenser (203) and light beam of light source reflecting mirror (204), checks meeting Whether accumulation is abnormal;
Detector (212) 2-2) are opened, detector temperature control circuit (316) work, control detector (211) refrigeration to the temperature that works Degree, due to diffraction light-free at this time, while the direction of analyzing Glan prism (210) is orthogonal with the direction for being polarized Glan prism (209), No optical signal enters detector (212), and the black level of detector (212), goes forward side by side in the case of test broad spectrum light source (201) is opened Row record;
Radiofrequency signal 2-3) is loaded on acousto-optic turnable filter (209), whether test probe (212) has response, and record is rung Answer result.
3) standard calibration plate is calibrated
3-1) when determinand is standard calibration plate, it is placed on objective table (205);
3-2) circuit (313) work occurs for FPGA circuitry (312) control RF driving signal, the radio frequency letter of frequency needed for generating Number, acousto-optic turnable filter (209) are loaded onto after radio-frequency power amplifier (3-2) amplification, the different wave length of measured object is dissipated The spectrum for penetrating light is scanned, diffracted light signals and transmission of detector (212) detection after acousto-optic turnable filter (209) To signal processing circuit (315), host computer is transmitted to via telecommunication circuit (318);
3-3) by the relationship between the frequency and spectrum of calibration, scattering light is recorded and saved through acousto-optic turnable filter (207) Diffracted light signals intensity afterwards, the curve of spectrum are the benchmark curve of spectrum.
4) measured object spectra collection
4-1) when detection object, object is placed on objective table (205);FPGA circuitry (312) controls RF driving signal Circuit (313) work occurs, the radiofrequency signal of frequency needed for generating is loaded onto sound after radio-frequency power amplifier (3-2) amplification Light tunable optical filter (209) is scanned the spectrum of the different wave length scattering light of measured object, is detected by detector (212) Diffracted light signals intensity after acousto-optic turnable filter (209);
4-3) by the relationship between the frequency and spectrum of calibration, scattering light is recorded and saved through acousto-optic turnable filter (209) Diffracted light signals intensity afterwards, the curve of spectrum are the scattering spectrum curve of measured object;
5) data analysis and processing
5-1) by comparing the scattering spectrum curve of measured object and standard calibration plate, measured object is calculated to light sources with different wavelengths Scattered power;
5-2) by measured object wavelength dispersion rate relation curve, measured object Matter Composition is judged by being compared with master pattern And content.
CN201810945398.4A 2018-08-20 2018-08-20 A kind of spectrum detection instrument and method of universal type modular Pending CN109030365A (en)

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