CN109023238A - A kind of mask plate and evaporation coating device - Google Patents
A kind of mask plate and evaporation coating device Download PDFInfo
- Publication number
- CN109023238A CN109023238A CN201811002302.7A CN201811002302A CN109023238A CN 109023238 A CN109023238 A CN 109023238A CN 201811002302 A CN201811002302 A CN 201811002302A CN 109023238 A CN109023238 A CN 109023238A
- Authority
- CN
- China
- Prior art keywords
- mask plate
- frame
- opening
- mask
- item
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The present invention relates to display equipment technical fields, disclose a kind of mask plate and evaporation coating device, the mask plate includes with the frame being open and the covering opening and the mask plate ontology of the frame first side is fixed in stretching, wherein, the frame surrounds between the medial surface of the opening and the first side by connecting along the first side towards the gradually inclined inclined-plane that is open；The mask plate ontology and the opposite surface that is open are formed with sunk area.The mask plate can be such that mask plate ontology is gently bonded with glass substrate in frame openings edge, and mask plate ontology and being bonded for glass substrate can be made more smooth, in turn, so that mask plate ontology is bonded closely with glass substrate, when sub-pixel is deposited, so that sub-pixel position precision is high, pixel profile is clear, and it is bad colour mixture will not to occur.
Description
Technical field
The present invention relates to display equipment technical field, in particular to a kind of mask plate and evaporation coating device.
Background technique
Organic Light Emitting Diode (OLED) organic vapor deposition display technology, is that glass substrate is placed into vacuum chamber,
Middle glass substrate includes anode, and by vacuum chamber, high temperature deposition organic material sequentially forms luminescent layer and yin in substrate surface
Pole, anode and cathode effect, makes luminescent layer shine.Wherein luminescent layer includes: electron injecting layer, electron transfer layer, electroluminescence layer, sky
Cave transport layer, hole injection layer etc..Wherein, luminescent layer is to be precipitated on the glass substrate in vacuum chamber by high temperature deposition.
The sub-pixel of different colours, emitting layer material is different, so needing to be deposited respectively in different vapor deposition chambers, and is vaporized on not
Same location of pixels, wherein the jig for playing limit function is exactly high-precision metal mask plate (FMM).Metal mask version includes effective
Pixel aperture, so that luminescent layer evaporation material passes through metal mask version opening vapor deposition to the sub-pixel position of corresponding back-panel glass
Place.Different position apertures, forms the sub-pixel of different colours.Under the driving that substrate corresponds to anode position, luminescent layer shines.
Currently, the size of sub-pixel constantly reduces, the arrangement knot of sub-pixel as the resolution ratio of display product is continuously improved
Structure becomes close, and the distance of same pixel reduces, meanwhile, appearance, such as wrist-watch, bracelet for APP small size and special-shaped product etc.,
It is required that the product quantity arranged in same metal mask version increases.For high-precision metal mask plate, stretched by then passing through
The technique of welding makes, and material property limits, and the position of opening precision of metal mask version is all made to ensure that difficulty increases.It influences
The production yield of product.
For example, being arranged on metal mask item 02 as shown in Figure 1, metal mask plate includes frame 01 and metal mask item 02
There is the effective vent area for vapor deposition.Metal mask item 02 is welded on frame in sagging type, as shown in Figure 2.When vapor deposition, glass
Substrate is placed in metal mask plate surface, due to 02 edge region of metal mask item be it is inclined, so glass back plate and gold
It when belonging to the fitting of mask strip 02, can not fit closely, there are gap, sub-pixel position is deviated after vapor deposition, and pixel profile is unintelligible, meeting
It is bad that colour mixture occurs, product yield is caused to decline.
Summary of the invention
The present invention provides a kind of mask plate and evaporation coating device, above-mentioned mask plate can make sub-pixel position precision high, as
Element is clear-cut, and it is bad colour mixture will not to occur.
In order to achieve the above objectives, the present invention the following technical schemes are provided:
A kind of mask plate is fixed on the frame first including having the frame of opening and the covering opening and stretching
The mask plate ontology of side, wherein
The frame surrounds between the medial surface of the opening and the first side by along the first side direction
The opening gradually inclined inclined-plane connection；
The mask plate ontology and the opposite surface that is open are formed with sunk area.
In above-mentioned mask plate, since frame surrounds between the medial surface of opening and first side by along first side direction
Opening gradually inclined inclined-plane connection, i.e., be provided with inclined-plane between the first side and medial surface of frame, can make in vapor deposition
When glass substrate presses to mask plate body surface from above, gently it is bonded in frame openings edge；And due to mask plate
Ontology and the opposite surface that is open are formed with sunk area, and mask plate ontology can be made to reduce in the thickness of opening corresponding region,
And then mask plate ontology self-strength reduces, and mask plate ontology and being bonded for glass substrate can be made more smooth；In turn, so that
Mask plate ontology is bonded closely with glass substrate, and when sub-pixel is deposited, so that sub-pixel position precision is high, pixel wheel is cleaned up
It is clear, it is bad colour mixture will not to occur.
Preferably, the angle between the inclined-plane and the elongated surfaces of the first side is greater than 0 degree and is less than or equal to 20 degree.
Preferably, the mask plate ontology includes covering the opening and stretching is fixed on blocking for the first side and is covered
Diaphragm plate and mask plate is blocked away from the frame side and stretch positioned at described and be fixed on a plurality of metal of the first side
Mask strip, described block are formed with multiple vapor deposition openings corresponding with glass substrate region to be deposited, the metal on mask plate
The internal effective vent area with figure corresponding with vapor deposition pattern is formed in mask strip.
Preferably, each effective vent area at least covers the vapor deposition in the projection blocked on mask plate
Opening.
Preferably, the shape in the effective vent area is the rectangle along the metal mask draw direction or pros
The shape of shape, the vapor deposition opening is circle.
Preferably, described block is formed with the sunk area on mask plate and the opposite surface that is open.
Preferably, the depth of the sunk area blocks the 1/2 to 2/3 of exposure mask plate thickness to be described.
Preferably, distance of the sunk area away from the frame medial surface is 1mm.
Preferably, the frame, described block mask plate and the material of the metal mask item is identical.
The present invention also provides a kind of evaporation coating devices, including any one mask plate provided in above-mentioned technical proposal.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of metal mask plate in the prior art；
Fig. 2 is the structural schematic diagram of metal mask item in the prior art；
Fig. 3 is a kind of structural schematic diagram of mask plate provided in an embodiment of the present invention；
Fig. 4 is a kind of use state diagram of the mask plate provided in the embodiment of the present invention；
Fig. 5 is a kind of structural schematic diagram for blocking mask plate provided in an embodiment of the present invention；
Fig. 6 is a kind of structural schematic diagram of the metal mask item provided in the embodiment of the present invention.
Icon:
01- frame；02- metal mask item；021- effective vent area；
1- frame；The inclined-plane 11-；2- blocks mask plate；21- vapor deposition opening；22- sunk area；3- metal mask item；31-
Effective vent area；4- glass substrate.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 3 and Fig. 4, the present invention provides a kind of mask plate, including have opening frame 1 and covering opening and
Stretch the mask plate ontology for being fixed on 1 first side of frame, wherein
Frame 1 surrounds between the medial surface of opening and first side by gradually inclined oblique towards opening along first side
Face 11 connects；
Mask plate ontology and the opposite surface that is open are formed with sunk area 22.
In the mask plate that foregoing invention embodiment provides, since frame 1 surrounds between the medial surface of opening and first side
By the way that along first side, towards opening, gradually inclined inclined-plane 11 is connected, i.e., it is arranged between the first side and medial surface of frame 1
There is inclined-plane 11, when glass substrate 4 can be made to press to mask plate body surface from above in vapor deposition, in 1 open edge of frame
The gentle fitting in place；And since mask plate ontology and the opposite surface that is open are formed with sunk area 22, mask plate sheet can be made
Thickness of the body in opening corresponding region reduces, and then mask plate ontology self-strength reduces, and can make mask plate ontology and glass
The fitting of substrate 4 is more smooth；In turn, so that mask plate ontology is bonded closely with glass substrate 4, when sub-pixel is deposited, make
It is high to obtain sub-pixel position precision, pixel profile is clear, and it is bad colour mixture will not to occur.
In foregoing invention embodiment, the angle between inclined-plane 11 and the elongated surfaces of first side is preferably greater than 0 degree and is less than
Equal to 20 degree, glass substrate 4 can be made gently to be bonded at 1 open edge of frame when pressing to mask plate body surface.In reality
In the application of border, included angle between inclined-plane 11 and the elongated surfaces of first side according to the actual situation depending on, do not limit herein
System.
In the mask plate that foregoing invention embodiment provides, specifically, the size of frame 1 can be 800mm*900mm* (22
~23) mm.And maximum distance of the inclined-plane 11 away from first side elongated surfaces is preferably 0.2mm to 0.4mm, inclined-plane 11 is away from medial surface
Maximum distance is preferably 2mm to 4mm.In the application the specific size of frame 1 can according to the actual situation depending on, do not do herein
Limitation.
In foregoing invention embodiment, as shown in Figure 3 and Figure 4, mask plate ontology specifically includes covering opening and stretches and fixes
In first side block mask plate 2 and positioned at block mask plate 2 away from 1 side of frame and stretch be fixed on first side
A plurality of metal mask item 3；Such as Fig. 5 and Fig. 6, block be formed on mask plate 2 it is corresponding multiple with the region to be deposited of glass substrate 4
Opening 21 is deposited, the internal effective vent area 31 with figure corresponding with vapor deposition pattern is formed on metal mask item 3.Its
In, blocking mask plate 2 and can play the role of support limit to metal mask item 3 positioned at the lower section of metal mask item 3 can keep away
Exempt from that metal mask item 3 is sagging to lead to 31 deformation of effective vent area, and metal mask item 3 can also be made closely to paste with glass back plate
It closes.And the vapor deposition area to be formed on glass substrate 4 can be limited in vapor deposition by blocking the multiple vapor depositions opening 21 formed on mask plate 2
Domain, in vapor deposition, the vapor deposition opening 21 blocked on mask plate 2 cooperates with the figure in effective vent area 31 on metal mask item 3
Form the vapor deposition pattern in glass back plate.So when sub-pixel is deposited using the mask plate ontology in above-mentioned technical proposal, it can
Keep sub-pixel position precision high, pixel profile is clear, and it is bad colour mixture will not to occur.
In foregoing invention embodiment, specifically, each effective vent area 31 is at least covered blocking the projection on mask plate 2
One vapor deposition opening 21.Preferably, as shown in figure 3, each effective vent area 31 is blocking the projection on mask plate 2 to cover
Multiple vapor deposition openings 21, can reduce the number in the effective vent area 31 of metal mask item 3, structure is simple, and can make son
Location of pixels precision is high, and pixel profile is clear, and it is bad colour mixture will not to occur.
In foregoing invention embodiment, as shown in fig. 6, the shape in effective vent area 31 is along 3 draw direction of metal mask item
Rectangle or square, 31 deformation of effective vent area when can be avoided stretching welding, and optionally, the shape of vapor deposition opening 21
Shape can be circle.In practical application, the shape of vapor deposition opening 21 is depending on the shape in preset vapor deposition region, such as hand
The shape of table or bracelet, herein with no restrictions.
Foregoing invention embodiment, in specific embodiment, as shown in figure 3, mask plate ontology blocks mask plate 2 and opening
Sunk area 22 is formed on opposite surface.And sunk area 22 is located at and blocks mask plate 2 and the opposite whole surface of being open,
Reduce the integral thickness for blocking mask plate 2, and then reduce the self-strength for blocking mask plate 2, when glass substrate 4 is from above
When pressing to metal mask item 3, keep metal mask item 3 and being bonded for vapor deposition glass more smooth.
In foregoing invention embodiment, specifically, the depth of sunk area 22 is block 2 thickness of mask plate 1/2 to 2/3,
The self-strength for blocking mask plate 2 can preferably be reduced.
In foregoing invention embodiment, specifically, distance of the sunk area 22 away from 1 medial surface of frame is 1mm, makes sunk area
22 are uniformly formed in gear mask plate and the opposite whole surface that is open, and reduce the integral thickness for blocking mask plate 2, and then make
The self-strength for blocking mask plate 2 reduces, and keeps metal mask item 3 and being bonded for vapor deposition glass more smooth.
In foregoing invention embodiment, the manufacturing process of mask plate be can specifically include:
Firstly, on 1 surface of frame stretch welding block mask plate 2, block mask plate 2 with a thickness of 100 μm to 150 μ
M, sag of chain is 80 μm to 120 μm after stretching；
Then, to blocking mask plate 2 and the opposite surface of being open etch partially forming sunk area 22, the depth etched partially
Degree is to block the 1/2 to 2/3 of 2 thickness of mask plate；
Finally, metal mask item 3 is stretched to the side for being welded in and blocking mask plate 2 and deviating from frame 1, metal mask item 3
With a thickness of 20 μm to 40 μm, sag of chain is 150 μm to 250 μm after stretching.
In foregoing invention embodiment, it is preferable that frame 1 blocks mask plate 2 and the material of metal mask item 3 is identical, just
In to frame 1, block mask plate 2 and metal mask item 3 is welded to connect.For example, frame 1, blocking mask plate 2 and gold
The material for belonging to mask strip 3 is dilval or other metal materials, herein with no restrictions.
The embodiment of the present invention also provides a kind of evaporation coating device, including any one exposure mask provided in above-mentioned technical proposal
Plate.
Obviously, those skilled in the art can carry out various modification and variations without departing from this hair to the embodiment of the present invention
Bright spirit and scope.In this way, if these modifications and changes of the present invention belongs to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to include these modifications and variations.
Claims (10)
1. a kind of mask plate, which is characterized in that be fixed on institute including there is the frame of opening and the covering opening and stretch
State the mask plate ontology of frame first side, wherein
The frame surrounds between the medial surface of the opening and the first side by along described in the first side direction
Opening gradually inclined inclined-plane connection；
The mask plate ontology and the opposite surface that is open are formed with sunk area.
2. mask plate according to claim 1, which is characterized in that between the inclined-plane and the elongated surfaces of the first side
Angle be greater than 0 degree and less than or equal to 20 degree.
3. mask plate according to claim 1, which is characterized in that the mask plate ontology includes covering the opening and drawing
Stretch be fixed on the first side block mask plate and positioned at the mask plate that blocks away from the frame side and stretching
It is fixed on a plurality of metal mask item of the first side, described block is formed with and glass substrate region to be deposited on mask plate
Corresponding multiple vapor depositions are open, and internal effectively opening with figure corresponding with vapor deposition pattern is formed on the metal mask item
Mouth region.
4. mask plate according to claim 3, which is characterized in that block mask plate described in each effective vent area
On projection at least cover a vapor deposition opening.
5. mask plate according to claim 4, which is characterized in that the shape in the effective vent area is to cover along the metal
The shape of the rectangle or square of film draw direction, the vapor deposition opening is circle.
6. mask plate according to claim 3, which is characterized in that described to block mask plate and the opposite surface that is open
On be formed with the sunk area.
7. mask plate according to claim 6, which is characterized in that the depth of the sunk area blocks mask plate to be described
The 1/2 to 2/3 of thickness.
8. mask plate according to claim 7, which is characterized in that distance of the sunk area away from the frame medial surface
For 1mm.
9. according to the described in any item mask plates of claim 3-8, which is characterized in that the frame, it is described block mask plate with
And the material of the metal mask item is identical.
10. a kind of evaporation coating device, which is characterized in that including such as described in any item mask plates of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811002302.7A CN109023238B (en) | 2018-08-30 | 2018-08-30 | Mask plate and evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811002302.7A CN109023238B (en) | 2018-08-30 | 2018-08-30 | Mask plate and evaporation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109023238A true CN109023238A (en) | 2018-12-18 |
| CN109023238B CN109023238B (en) | 2021-01-22 |
Family
ID=64625646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811002302.7A Active CN109023238B (en) | 2018-08-30 | 2018-08-30 | Mask plate and evaporation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109023238B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111074204A (en) * | 2020-01-03 | 2020-04-28 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN111676446A (en) * | 2020-06-24 | 2020-09-18 | 京东方科技集团股份有限公司 | Mask plate, mask plate structure and mask plate manufacturing method |
| CN112662995A (en) * | 2020-12-24 | 2021-04-16 | 京东方科技集团股份有限公司 | Mask plate and mask plate manufacturing method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012052155A (en) * | 2010-08-31 | 2012-03-15 | Canon Inc | Mask unit for vacuum film deposition and vacuum film deposition apparatus with the same |
| US20140150721A1 (en) * | 2012-11-30 | 2014-06-05 | Samsung Display Co., Ltd. | Mask frame assembly for thin film deposition |
| CN205803576U (en) * | 2016-06-28 | 2016-12-14 | 鄂尔多斯市源盛光电有限责任公司 | Mask plate |
| CN106884138A (en) * | 2017-02-15 | 2017-06-23 | 武汉华星光电技术有限公司 | The repeated using method of mask assembly and mask assembly |
| CN107653435A (en) * | 2017-10-25 | 2018-02-02 | 信利（惠州）智能显示有限公司 | Mask device and its mask assembly, mask plate |
-
2018
- 2018-08-30 CN CN201811002302.7A patent/CN109023238B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012052155A (en) * | 2010-08-31 | 2012-03-15 | Canon Inc | Mask unit for vacuum film deposition and vacuum film deposition apparatus with the same |
| US20140150721A1 (en) * | 2012-11-30 | 2014-06-05 | Samsung Display Co., Ltd. | Mask frame assembly for thin film deposition |
| CN205803576U (en) * | 2016-06-28 | 2016-12-14 | 鄂尔多斯市源盛光电有限责任公司 | Mask plate |
| CN106884138A (en) * | 2017-02-15 | 2017-06-23 | 武汉华星光电技术有限公司 | The repeated using method of mask assembly and mask assembly |
| CN107653435A (en) * | 2017-10-25 | 2018-02-02 | 信利（惠州）智能显示有限公司 | Mask device and its mask assembly, mask plate |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111074204A (en) * | 2020-01-03 | 2020-04-28 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN111074204B (en) * | 2020-01-03 | 2022-01-14 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN111676446A (en) * | 2020-06-24 | 2020-09-18 | 京东方科技集团股份有限公司 | Mask plate, mask plate structure and mask plate manufacturing method |
| CN112662995A (en) * | 2020-12-24 | 2021-04-16 | 京东方科技集团股份有限公司 | Mask plate and mask plate manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109023238B (en) | 2021-01-22 |
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