CN109013078B

CN109013078B - Nozzle and substrate cleaning device

Info

Publication number: CN109013078B
Application number: CN201811168796.6A
Authority: CN
Inventors: 徐敏
Original assignee: BOE Technology Group Co Ltd; Hefei Xinsheng Optoelectronics Technology Co Ltd
Current assignee: BOE Technology Group Co Ltd; Hefei Xinsheng Optoelectronics Technology Co Ltd
Priority date: 2018-10-08
Filing date: 2018-10-08
Publication date: 2020-07-24
Anticipated expiration: 2038-10-08
Also published as: CN109013078A

Abstract

The invention discloses a sprayer and a substrate cleaning device, and belongs to the technical field of display. This shower nozzle includes: a nozzle body and a baffle plate; a first channel and a second channel are arranged in the nozzle body; the inlet of the first channel and the inlet of the second channel are both used for connecting a pipeline, and the outlet of the second channel is communicated with the first channel; the baffle is arranged in the first channel and positioned between the inlet of the first channel and a communication part, and the communication part is the communication part of the first channel and the outlet of the second channel; one end of the baffle is rotatably connected with the side wall of the first channel and is used for isolating the inlet and the outlet of the first channel under the driving of the liquid introduced through the second channel. The invention can ensure the water spraying amount of the spray head, thereby ensuring the cleaning effect on the display substrate.

Description

Nozzle and substrate cleaning device

Technical Field

The invention relates to the technical field of display, in particular to a spray head and a substrate cleaning device.

Background

In the manufacturing process of the display substrate, after the display substrate is developed, the display substrate needs to be washed to remove the residual developing solution on the display substrate.

In the related art, an apparatus for rinsing a display substrate generally includes: the shower nozzle of pipeline and being connected with this pipeline. The pipeline can convey the cleaning liquid to each spray head, and each spray head can spray the cleaning liquid to the display substrate.

However, since the water outlet of the nozzle is generally narrow, it is easily blocked by foreign matters in the cleaning liquid, resulting in insufficient water amount sprayed from the nozzle and affecting the cleaning effect of the display substrate.

Disclosure of Invention

The embodiment of the invention provides a spray head and a substrate cleaning device, which can solve the problem that in the related art, the water outlet of the spray head is easily blocked by foreign matters in cleaning liquid, so that the water quantity sprayed by the spray head is insufficient, and the cleaning effect of a display substrate is influenced. The technical scheme is as follows:

in a first aspect, there is provided a spray head comprising: a nozzle body and a baffle plate;

a first channel and a second channel are arranged in the nozzle main body;

the inlet of the first channel and the inlet of the second channel are both used for connecting a pipeline, the pipeline is used for conveying liquid, and the outlet of the second channel is communicated with the first channel;

the baffle is arranged in the first channel and is positioned between an inlet of the first channel and a communication part, and the communication part is a communication part of the first channel and an outlet of the second channel;

one end of the baffle is rotatably connected with the side wall of the first channel and is used for isolating the inlet and the outlet of the first channel under the driving of liquid introduced through the second channel.

Optionally, the spray head further includes: the dredging component is arranged on one side of the baffle close to the outlet of the first channel;

the mediation subassembly includes: the dredging device comprises a driving part and a strip-shaped dredging part, wherein the length direction of the dredging part is parallel to the length direction of the first channel, and the driving part is used for driving the dredging part to move along the length direction of the first channel.

Optionally, the driving part includes: the device comprises a fixed rod, a rotary cylinder, a first elastic connecting piece and a magnetic driving block, wherein the first elastic connecting piece and the magnetic driving block are arranged in the rotary cylinder;

the dredging part is made of a magnetic material and is positioned in the rotary cylinder;

one end of the fixed rod is connected with the baffle, the other end of the fixed rod is rotatably connected with one end of the rotary cylinder, and the rotary cylinder is driven by liquid introduced through the second channel to rotate by taking the axis of the fixed rod as a shaft;

one end of the first elastic connecting piece is connected with the other end of the fixed rod, and the other end of the first elastic connecting piece is connected with the dredging part;

the magnetic driving block is arranged at the other end of the rotary cylinder, and the magnetic driving block attracts the dredging part to move along the direction close to the other end of the rotary cylinder when rotating;

the other end of the rotating cylinder is provided with a through hole, and when the first elastic connecting piece is in a stretching state, the dredging part extends out of the rotating cylinder from the through hole.

Optionally, the dredging part comprises: a connecting rod and a dredging needle;

one end of the connecting rod is connected with the first elastic connecting piece, and the other end of the connecting rod is connected with the dredging needle;

the part of the connecting rod close to the magnetic driving block is made of magnetic material.

Optionally, the driving part further includes: a plurality of blades;

the blades are arranged on the outer wall of the rotary cylinder, and each blade surface of each blade is not perpendicular to the axis of the fixed rod.

Optionally, the blade surface of each blade is parallel to the axis of the fixing rod.

Optionally, the driving part: comprises a motor and a driving rod;

one end of the motor is connected with the baffle, the other end of the motor is connected with one end of the driving rod, and the other end of the driving rod is connected with the dredging part;

the motor is used for driving the driving rod to move along the length direction of the first channel.

Optionally, the spray head further includes: the baffle is provided with a first channel, and the side of the baffle close to the outlet of the first channel is provided with a guide rail;

one end of the second elastic connecting piece is connected with one end of the baffle close to the outlet of the second channel, and the other end of the second elastic connecting piece is connected with the dredging component;

the pull through assembly is slidably coupled to the guide rail when the baffle isolates the inlet and outlet of the first passageway.

Optionally, the length of the guide rail is smaller than that of the baffle, and when the dredging component slides to one end of the guide rail far away from the outlet of the second channel, the axis of the dredging part is located in the first channel.

Optionally, the first channel includes an inlet section, a middle section and an outlet section, and an inner diameter of the middle section is greater than an inner diameter of the inlet section and greater than an inner diameter of the outlet section;

the outlet of the second channel is communicated with the middle section, the baffle is arranged at the junction of the middle section and the inlet section, and the baffle is used for isolating the inlet section from the middle section.

Optionally, the side wall of the outlet section of the first channel is made of an elastic material.

Optionally, the spray head further includes: a stopper;

the baffle plate is arranged at the junction of the middle section and the inlet section, and is opposite to one end of the baffle plate;

the orthographic projection of the stop block on the cross section perpendicular to the axial direction of the spray head is overlapped with the orthographic projection part of the baffle plate on the cross section.

Optionally, when the plate surface of the baffle is parallel to the length direction of the first channel, the baffle isolates the outlet of the first channel from the outlet of the second channel.

Optionally, the spray head further includes: a baffle and a controller;

the baffle plate is arranged on the side wall of the first channel close to the communication part;

the controller is electrically connected with the baffle plate and is used for controlling the baffle plate to isolate or conduct the outlets of the first channel and the second channel.

In a second aspect, there is provided a substrate cleaning apparatus, the apparatus comprising: a liquid drive assembly, a conduit for conveying liquid, and a spray head as described in the first aspect;

the sprayer comprises a sprayer main body, and a first channel and a second channel are arranged in the sprayer main body;

the liquid driving assembly is connected with one end of the pipeline, and the other end of the pipeline is connected with at least one of the inlet of the first channel and the inlet of the second channel.

Optionally, the pipeline includes a first pipeline, a second pipeline and a solenoid valve;

the other end of the first pipeline is connected with the inlet of the first channel, and the other end of the second pipeline is connected with the inlet of the second channel;

the electromagnetic valve is respectively connected with the liquid driving assembly, one end of the first pipeline and one end of the second pipeline and used for controlling the on-off of the liquid driving assembly and the first pipeline and the on-off of the liquid driving assembly and the second pipeline.

The technical scheme provided by the embodiment of the invention has the beneficial effects that at least:

the embodiment of the invention provides a spray head and a substrate cleaning device. When the first channel is blocked, liquid can be introduced into the second channel, and after the liquid flows into the second channel, the baffle can be driven to separate the inlet and the outlet of the first channel, so that foreign matters in the first channel can be discharged from the outlet of the first channel under the action of the liquid pressure. Therefore, the water spraying amount of the spray head is ensured, and the cleaning effect on the display substrate is ensured. In addition, after the sprayer provided by the embodiment of the invention is adopted, when the sprayer is blocked by foreign matters, the plurality of sprayers on the pipeline do not need to be detached and cleaned one by one, so that the dredging efficiency of the sprayers is improved, and the cleaning efficiency of the display substrate is further improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a schematic cross-sectional view of a showerhead according to an embodiment of the present invention;

FIG. 2 is a top view of a showerhead provided in accordance with an embodiment of the present invention;

FIG. 3 is a schematic cross-sectional view of the baffle shown in FIG. 1 isolating the first channel inlet from the outlet;

FIG. 4 is a schematic cross-sectional view of another showerhead provided in accordance with an embodiment of the present invention;

FIG. 5 is a schematic cross-sectional view of a pull through assembly provided by an embodiment of the present invention;

FIG. 6 is a top view of the drive section shown in FIG. 5;

FIG. 7 is a schematic cross-sectional view of the dredge shown in FIG. 5 extending outside the spin basket;

FIG. 8 is a schematic cross-sectional view of another deoccluding assembly provided in accordance with embodiments of the present invention;

FIG. 9 is a schematic cross-sectional view of yet another showerhead provided in accordance with an embodiment of the present invention;

FIG. 10 is a schematic cross-sectional view of a first channel provided by an embodiment of the present invention;

FIG. 11 is a schematic cross-sectional view of the outlet block shown in FIG. 10;

FIG. 12 is a top view of the outlet section shown in FIG. 13 undergoing deformation;

FIG. 13 is a schematic cross-sectional view of a baffle and deoccluding assembly in the absence of liquid in the second passage provided by embodiments of the present invention;

FIG. 14 is a schematic cross-sectional view of a baffle and deoccluding assembly according to an embodiment of the present invention, moved under fluid actuation;

FIG. 15 is a schematic cross-sectional view of a baffle plate separating the outlets of the first and second passageways in accordance with an embodiment of the present invention;

FIG. 16 is a schematic cross-sectional view of a baffle plate provided in accordance with an embodiment of the present invention for communicating the outlets of the first and second passages;

FIG. 17 is a schematic cross-sectional view of a baffle plate provided in accordance with an embodiment of the present invention for communicating the outlets of the first and second passages;

FIG. 18 is a schematic cross-sectional view of a substrate cleaning apparatus according to an embodiment of the present invention;

fig. 19 is a schematic cross-sectional view of another substrate cleaning apparatus according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In the related art, after the water outlet of the nozzle is blocked by the foreign matter, the worker needs to detach the plurality of nozzles installed on the pipeline one by one and clean the plurality of nozzles by using ultrasonic waves. And for the seriously blocked spray heads, a high-pressure air tank is needed to dredge the spray heads after ultrasonic cleaning, and finally the spray heads are installed on the pipeline again. Since the number of the nozzles installed on the pipe is large, a large amount of labor and time are required to be consumed, resulting in a low efficiency of cleaning the display substrate.

Fig. 1 is a schematic cross-sectional view of a showerhead according to an embodiment of the present invention. As shown in fig. 1, the showerhead may include a showerhead body 110 and a baffle 120. A first passage 111 and a second passage 112 are provided in the head body 110, an inlet of the first passage 111 and an inlet of the second passage 112 may be connected to a pipe (not shown in fig. 1) that may transfer liquid, and an outlet of the second passage 112 is communicated with the first passage 111. Alternatively, the liquid may be a cleaning liquid. The pipe may supply the first channel 111 with liquid when cleaning the display substrate. This line may supply liquid to the second passage 112 when the spray head is unclogged.

In the embodiment of the present invention, the nozzle may have a cylindrical structure, for example, a cylindrical structure, or a prismatic structure. The first passage 111 and the second passage 112 may be both circular passages or polygonal passages, and each passage may extend in a direction (i.e., a length direction) parallel to an axis of the head. For example, fig. 2 is a top view of a nozzle according to an embodiment of the present invention, as shown in fig. 2, the nozzle has a cylindrical structure, and the first channel 111 and the second channel 112 are both circular channels.

The baffle 120 is disposed in the first passage 111 between an inlet of the first passage 111 and a communication a, which may be a communication of the first passage 111 with an outlet of the second passage 112.

One end of the baffle 120 is rotatably connected to the sidewall of the first passage 111, and the other end is in a free state. As shown in fig. 3, the baffle 120 can isolate the inlet of the first channel 111 from the outlet of the first channel under the driving of the liquid introduced through the second channel 112, thereby preventing the liquid from entering the inlet of the first channel 111 and ensuring effective isolation of the inlet of the first channel 111 from the outlet of the first channel 111.

In summary, the embodiment of the present invention provides a nozzle, a first channel and a second channel are disposed in a nozzle main body of the nozzle, an outlet of the second channel is communicated with the first channel, a baffle is disposed in the first channel, and one end of the baffle is rotatably connected to a sidewall of the first channel. When the first channel is blocked, liquid can be introduced into the second channel, and after the liquid flows into the second channel, the baffle can be driven to separate the inlet and the outlet of the first channel, so that foreign matters in the first channel can be discharged from the outlet of the first channel under the action of the liquid pressure. Therefore, the water spraying amount of the spray head is ensured, and the cleaning effect on the display substrate is ensured.

In addition, after the sprayer provided by the embodiment of the invention is adopted, when the sprayer is blocked by foreign matters, the plurality of sprayers on the pipeline do not need to be disassembled and cleaned one by one, so that the dredging efficiency of the sprayers is improved, and the cleaning efficiency of the display substrate is further improved.

Fig. 4 is a schematic cross-sectional view of another showerhead provided in an embodiment of the present invention. As shown in fig. 4, the showerhead may further include a pull through assembly 130, the pull through assembly 130 being disposed on a side of the baffle 120 adjacent to the outlet of the first passage 111. As shown in fig. 4, the dredging assembly 130 may include a driving portion 131 and a bar-shaped dredging portion 132, for example, the dredging portion 132 may be a columnar structure. The dredging part 132 has a length direction parallel to the length direction X of the first passage 111, and the driving part 131 can drive the dredging part 132 to move along the length direction X of the first passage 111, thereby accelerating the discharge of the foreign matters.

In an alternative implementation, referring to fig. 5 and 6, the driving part 131 may include a fixing rod 1311, a rotation cylinder 1312, and a first elastic coupling 1313 and a magnetic driving block 1314 disposed inside the rotation cylinder 1312. Wherein the first elastic connection 1313 may be a spring.

The dredging part 132 may be made of a magnetic material and is located inside the rotary cylinder 1312. One end of the fixing rod 1311 is connected to the barrier 120, the other end of the fixing rod 1311 is rotatably connected to one end of a rotary cylinder 1312, and the rotary cylinder 1312 is capable of rotating around the axis of the fixing rod 1311 by the liquid introduced through the second channel 112.

One end of the first elastic connector 1313 is connected to the other end of the fixing rod 1311, and the other end of the first elastic connector 1313 is connected to the dredging part 132. A magnetic driving block 1314 is provided at the other end of the rotary cylinder 1312, i.e., the bottom of the rotary cylinder 1312.

The rotation cylinder 1312 rotates the magnetic driving block 1314, and the magnetic driving block 1314 rotates to attract the communicating part 132 to move in a direction close to the bottom of the rotation cylinder 1312. The bottom of the rotary cylinder 1312 is provided with a through hole (not shown in fig. 5). When the first elastic connection 1313 is in a stretched state, as shown in fig. 7, the opening 132 protrudes from the through hole to the outside of the rotary cylinder 1312. When the dredging part 132 is extended out of the rotary cylinder 1312, foreign matters in the first passage 111 can be dredged.

For example, referring to fig. 5, 6 and 7, the bottom of the rotary cylinder 1312 may be symmetrically provided with two magnetic driving blocks 1314.

Alternatively, referring to fig. 8, the dredging part 132 may include a connecting rod 1320 and a dredging needle 1321, the connecting rod 1320 is connected to the first elastic connector 1313 at one end and to the dredging needle 1321 at the other end. The portion of the connecting rod 1320 near the magnetic drive block 1314 may be made of a magnetic material. Alternatively, the connecting rods 1320 may be made of magnetic material.

In the embodiment of the present invention, the rotary cylinder 1312 may drive the magnetic driving block 1314 to rotate synchronously during the rotation process. The magnetic driving block 1314 and the part of the connecting rod 1320 close to the magnetic driving block 1314 generate magnetic alternation, so as to drive the connecting rod 1320 to move in the direction close to the bottom of the rotating cylinder 1312, and the dredging needle 1321 extends out of the bottom of the rotating cylinder 1312. When the connecting rod 1320 moves to a certain distance in a direction approaching the bottom of the rotary cylinder 1312, because the portion of the connecting rod 1320 far from the magnetic driving block 1314 is nonmagnetic, the connecting rod 1320 stops moving in the direction approaching the bottom of the rotary cylinder 1312 and moves in a direction far from the bottom of the rotary cylinder 1312 by the tensile force applied by the first elastic connection 1313, and returns to the initial position shown in fig. 5. Then, the magnetic driving block 1314 continues to generate magnetic alternation with the part of the connecting rod 1320 close to the magnetic driving block 1314 during the rotation process, the connecting rod 1320 moves in the direction close to the bottom of the rotating cylinder 1312 again, and thus the connecting rod 1320 drives the dredging needle 1321 to move back and forth along the length direction of the first channel 111, so as to dredge the foreign matters.

Alternatively, referring to fig. 5, 7 and 8, the driving part 131 may further include a plurality of blades 1315. The plurality of blades 1315 are disposed on an outer wall of the rotary cylinder 1312, and a blade surface of each blade 1315 is not perpendicular to an axis of the fixing rod 1311. The plurality of vanes 1315 accelerate the rotation of the rotary cylinder 1312 by the liquid introduced through the second channel 112.

For example, as shown in fig. 5, 7 and 8, the surface of each blade 1315 may be parallel to the axis of the fixing rod 1311, so that the rotational force applied to the blade by the liquid may be increased as much as possible.

In another alternative implementation, fig. 9 is a schematic cross-sectional view of another spray head provided in an embodiment of the invention. As shown in fig. 9, the driving part 131 may include a motor 1316 and a driving rod 1317. One end of the motor 1316 is connected to the flapper 120, the other end of the motor 1316 is connected to one end of a drive rod 1317, and the other end of the drive rod 1317 is connected to the pull through 132. The motor 1316 can drive the driving rod 1317 to move along the length direction X of the first channel 111, thereby dredging the foreign object.

Alternatively, referring to fig. 5, 7, 8 and 9, the head may further include a second elastic coupling member 140, and a guide rail 001 is provided on a side of the barrier 120 near the outlet of the first passage 111, and an extending direction (i.e., a guiding direction) of the guide rail 001 is perpendicular to an axis of the head. One end of the second elastic connector 140 is connected to one end of the baffle 120 near the outlet of the second channel 112, and the other end of the second elastic connector 140 is connected to the dredging assembly 130. The deoccluding assembly 130 is slidably coupled to the guide rail 001 while the shutter 120 isolates the inlet and outlet of the first passage 111. Illustratively, the second elastic connection 140 may be a spring.

In the embodiment of the present invention, referring to fig. 5, 7, 8 and 9, the length d1 of the guide rail 001 is smaller than the length d2 of the baffle 120, and when the dredging component 130 slides to the end of the guide rail 001 far away from the outlet of the second channel 112, the axis of the dredging part 132 is located in the first channel 111, so as to ensure that the dredging part 132 can effectively dredge foreign matters in the first channel 111.

Here, the length d1 of the guide rail 001 refers to the length of the guide rail 001 in the extending direction thereof. The length d2 of the baffle 120 may refer to the length of the baffle 120 in the extending direction of the guide rail 001. In the embodiment of the present invention, the shape of the plate surface of the baffle 120 may be a circle or a polygon (for example, a rectangle), and the embodiment of the present invention does not limit the shape of the plate surface of the baffle 120, and only needs to ensure that the baffle 120 can effectively isolate the inlet and the outlet of the first channel 111. When the plate surface is circular, the length d2 of the baffle 120 is the diameter of the circle. When the plate surface is polygonal, the length d2 of the baffle 120 is the maximum length of the polygon in the extending direction of the guide rail 001.

Alternatively, referring to fig. 10, the first passage 111 may include an inlet section 1a, a middle section 1b, and an outlet section 1c, the middle section 1b having an inner diameter greater than that of the inlet section 1a and greater than that of the outlet section 1 c. The outlet of the second channel 112 is communicated with the middle section 1b, the baffle 120 is arranged at the junction of the middle section 1b and the inlet section 1a, and the inlet section 1a and the middle section 1b can be isolated by the baffle 120 under the driving of the liquid introduced through the second channel 112, so that the liquid is prevented from entering the inlet section 1a of the first channel 111, the liquid pressure below the baffle 120 is increased, and the discharge of foreign matters is accelerated.

In the present embodiment, each of the inlet section 1a, the middle section 1b and the outlet section 1c may be a circular hole section or a polygonal hole section. When a polygonal bore section, the inner diameter of the bore section may refer to the diameter of the circle circumscribed by the polygon.

Alternatively, referring to fig. 11, the side wall of the outlet section 1c of the first passage 111 may be made of an elastic material. As shown in fig. 12, the outlet section 1c is deformed by the liquid pressure to increase the inner diameter thereof from R1 to R2, thereby making it possible to accelerate the discharge of foreign matter 002.

In an embodiment of the present invention, referring to fig. 10, the nozzle head may further include a stopper 150, and the stopper 150 is disposed at the intersection of the middle section 1b and the inlet section 1a and is opposite to one end of the baffle 120.

The orthographic projection of the stopper 150 on a cross section perpendicular to the axial direction of the head coincides with the orthographic projection of the baffle 120 on the cross section. Whereby a side of the baffle 120 near the inlet is in contact with a side of the stopper 150 away from the inlet when the baffle 120 separates the inlet and the outlet of the first passage 111. For example, as shown in FIG. 10, the distance d3 between the stop 150 and one end of the baffle 120 is less than the length d2 of the baffle 120. The other end of the baffle 120 can be prevented from moving up to the inlet section 1a of the first channel 111 by the stopper 150, so that the liquid is prevented from entering the inlet section 1a of the first channel 111, and the effective isolation between the inlet section 1a and the middle section 1b is ensured.

In the embodiment of the present invention, when the second channel 112 is not filled with liquid, as shown in fig. 13, the other end of the baffle 120 is in a free state, and the dredging member 130 is located at one end close to the outlet of the second channel 112. When the second channel 112 is filled with liquid, as shown in fig. 14, the other end of the baffle 120 moves towards the direction close to the inlet of the first channel 111 under the driving of the liquid, and the dredging assembly 130 slides along the guide rail 001 towards the direction close to the other end of the baffle 120. Referring to fig. 10, the other end of the baffle 120 moves up to the stop 150 under the drive of the liquid, isolating the inlet of the first channel 111 from the outlet of the first channel 111, and the pull through assembly 130 slides to the end of the rail 001 remote from the outlet of the second channel 112.

Optionally, referring to fig. 9, the nozzle may further include a fixing shaft 160, and one end of the baffle 120 is rotatably connected to the sidewall of the first passage 111 through the fixing shaft 160.

Alternatively, referring to fig. 1 and 13, when the plate surface of the baffle 120 is parallel to the length direction of the first passage 111, the other end of the baffle 120 contacts the sidewall near the outlet of the first passage 111, thereby isolating the first passage 111 from the outlet of the second passage 112. When the first channel 111 is filled with liquid, the baffle 120 can isolate the first channel 111 from the second channel 112, so as to prevent the liquid from entering the second channel 112.

Optionally, referring to fig. 1, 15 and 16, the spray head may further include a controller 171 and a shutter 172. The blocking plate 172 is disposed on the sidewall of the first passage 111 near the communication part a, the controller 171 may be disposed on the outer wall of the first passage 111 near the inlet of the second passage 112, and the controller 171 may be electrically connected to the blocking plate 172, for example, by a signal line (not shown). The controller 171 may control the baffle 172 to isolate or communicate the first passage 111 with the outlet of the second passage 112.

In an alternative way, referring to fig. 15 and 16, a guide rail 003 is provided on a side wall of the first passage 111 near the communication part a, and a length direction of the guide rail 003 is parallel to a length direction of the first passage 111. The stopper 172 is slidably connected to the guide rail 003, and the stopper 172 can slide relative to the guide rail 003 under the control of the controller 171. For example, when the controller 171 sends the first control signal to the flap 172, referring to fig. 15, the flap 172 slides in a direction approaching the outlet of the first channel 111 under the action of the first control signal, isolating the first channel 111 from the outlet of the second channel 112. When the controller 171 sends the second control signal to the flap 172, referring to fig. 16, the flap 172 slides in a direction approaching the inlet of the first channel 111 under the action of the second control signal, so as to conduct the first channel 111 with the outlet of the second channel 112.

In another alternative implementation, referring to fig. 1 and 17, the blocking piece 172 is a telescopic structure, one end of which is fixed to the side wall of the first passage 111 near the communication part a, and the other end of which is in a free state. When the controller 171 sends the first control signal to the flap 172, the other end of the flap 172 is extended in the direction of the outlet of the first channel 111 by the first control signal, isolating the first channel 111 from the outlet of the second channel 112. When the controller 171 sends the second control signal to the flap 172, the other end of the flap 172 is contracted in a direction approaching the inlet of the first channel 111 by the second control signal, so as to conduct the outlet of the first channel 111 and the outlet of the second channel 112.

In yet another alternative implementation, one end of the blocking piece 172 may be connected to the sidewall of the first channel 111 near the communication part a through a rotating shaft, and the controller 171 may control the blocking piece 172 to rotate in a direction approaching or moving away from the first channel 112, so as to isolate or communicate the first channel 111 with the outlet of the second channel 112.

In summary, the embodiment of the present invention provides a nozzle, a first channel and a second channel are disposed in a nozzle main body of the nozzle, an outlet of the second channel is communicated with the first channel, a baffle is disposed in the first channel, and one end of the baffle is rotatably connected to a sidewall of the first channel. When the first channel is blocked, liquid can be introduced into the second channel, and after the liquid flows into the second channel, the baffle can be driven to separate the inlet and the outlet of the first channel, so that foreign matters in the first channel can be discharged from the outlet of the first channel under the action of the liquid pressure. Therefore, the water spraying amount of the spray head is ensured, and the cleaning effect on the display substrate is ensured. In addition, after the sprayer provided by the embodiment of the invention is adopted, when the sprayer is blocked by foreign matters, the plurality of sprayers on the pipeline do not need to be detached and cleaned one by one, so that the dredging efficiency of the sprayers is improved, and the cleaning efficiency of the display substrate is further improved.

Fig. 18 is a schematic cross-sectional view of a substrate cleaning apparatus according to an embodiment of the present invention. As shown in fig. 18, the apparatus may include a liquid drive assembly 180, a conduit 190 for delivering liquid, and a spray head. The showerhead may be the showerhead shown in any one of fig. 1, 3, 4, 9, 10, 13 and 14.

The showerhead may include a showerhead body 110, with a first passage 111 and a second passage 112 disposed within the showerhead body 110. The liquid driving assembly 180 is connected to one end of a pipe 190, and the other end of the pipe 190 is connected to at least one of the inlet of the first passage 111 and the inlet of the second passage 112.

As an alternative implementation, referring to fig. 18, the pipeline 190 may include a first pipeline 191, a second pipeline 192, and a solenoid valve 193, the other end of the first pipeline 191 being connected to the inlet of the first passage 111, and the other end of the second pipeline 192 being connected to the inlet of the second passage 112. The electromagnetic valve 193 is connected to the liquid driving assembly 180, one end of the first pipeline 191 and one end of the second pipeline 192, respectively, and the electromagnetic valve 193 can control on/off of the liquid driving assembly 180 and the first pipeline 191 and on/off of the liquid driving assembly 180 and the second pipeline 192.

In the embodiment of the present invention, when it is required to dredge the foreign object at the outlet of the first channel 111, the solenoid valve 193 may control the liquid driving assembly 180 to be disconnected from the first pipeline 191 and communicate with the second pipeline 192, so that the liquid flows into the second channel 112 through the second pipeline 192, thereby dredging the foreign object.

When the display substrate needs to be cleaned, the solenoid valve 193 may control the liquid driving assembly 180 to communicate with the first pipeline 191 and to be disconnected from the second pipeline 192, so that the cleaning liquid flows into the first channel 111 through the first pipeline 191 and is sprayed to the display substrate through the outlet of the first channel 111.

As an alternative implementation, referring to fig. 19, the substrate cleaning apparatus may include only one pipe 190, and when the display substrate needs to be cleaned, an operator may connect an output end of the pipe 190 with an inlet of the first channel 111. When it is desired to unclog foreign objects at the outlet of the first passage 111, an operator may connect the output end of the pipeline 190 to the inlet of the second passage 112.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims

1. A spray head, comprising: a nozzle body and a baffle plate;

a first channel and a second channel are arranged in the nozzle main body;

the inlet of the first channel and the inlet of the second channel are both used for connecting a pipeline, and the outlet of the second channel is communicated with the first channel;

one end of the baffle is rotatably connected with the side wall of the first channel and is used for isolating the inlet and the outlet of the first channel under the driving of liquid introduced through the second channel;

the shower nozzle still includes: a pull through assembly disposed on a side of the baffle proximate an outlet of the first passageway, the pull through assembly comprising: the dredging device comprises a driving part and a strip-shaped dredging part, wherein the length direction of the dredging part is parallel to the length direction of the first channel, and the driving part is used for driving the dredging part to move along the length direction of the first channel.

2. The spray head of claim 1, wherein the drive portion comprises: the device comprises a fixed rod, a rotary cylinder, a first elastic connecting piece and a magnetic driving block, wherein the first elastic connecting piece and the magnetic driving block are arranged in the rotary cylinder;

3. The spray head of claim 2, wherein the vent comprises: a connecting rod and a dredging needle;

4. The spray head of claim 2, wherein the drive portion further comprises: a plurality of blades;

5. The spray head of claim 1, wherein the drive portion: comprises a motor and a driving rod;

6. The spray head of any of claims 1 to 5, further comprising: the baffle is provided with a first channel, and the side of the baffle close to the outlet of the first channel is provided with a guide rail;

7. The spray head of claim 6,

the length of the guide rail is smaller than that of the baffle, and when the dredging component slides to one end, away from the outlet of the second channel, of the guide rail, the axis of the dredging part is located in the first channel.

8. Spray head according to one of claims 1 to 5,

the first channel comprises an inlet section, a middle section and an outlet section, wherein the inner diameter of the middle section is larger than that of the inlet section and larger than that of the outlet section;

9. The spray head of claim 8 wherein the side walls of the outlet section of the first passageway are made of a resilient material.

10. The spray head of claim 8, further comprising: a stopper;

11. Spray head according to one of claims 1 to 5,

when the plate surface of the baffle is parallel to the length direction of the first channel, the baffle isolates the outlets of the first channel and the second channel.

12. The spray head of any of claims 1 to 5, further comprising: a baffle and a controller;

13. A substrate cleaning apparatus, comprising: a liquid drive assembly, a conduit for conveying a liquid and a spray head according to any one of claims 1 to 12;

14. The apparatus of claim 13, wherein the conduits comprise a first conduit, a second conduit, and a solenoid valve;