CN109002623B - Simulation method and device for metal mask plate - Google Patents
Simulation method and device for metal mask plate Download PDFInfo
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- CN109002623B CN109002623B CN201810834158.7A CN201810834158A CN109002623B CN 109002623 B CN109002623 B CN 109002623B CN 201810834158 A CN201810834158 A CN 201810834158A CN 109002623 B CN109002623 B CN 109002623B
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Abstract
The embodiment of the invention provides a simulation method and device of a metal mask plate. The simulation method of the metal mask plate comprises the following steps: dividing an evaporation area of the metal mask plate into n laminated plate-shaped models, wherein n is 2-6; and taking the n-layer plate-shaped model as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result. According to the invention, the metal mask plate is divided into a plurality of plate-shaped models, so that the constructed model fully considers the special-shaped structure of the opening on the metal mask plate, thus the real structure of the metal mask plate can be accurately simulated, the design cost is greatly saved, the product development period is shortened, the accurate simulation result can be obtained, and the method can be used for guiding the design of the metal mask plate and the net-opening process design.
Description
Technical Field
The invention relates to the technical field of display, in particular to a simulation method and device of a metal mask plate.
Background
In the process of manufacturing an organic light emitting diode (Organic Light Emitting, OLED) display panel, materials of each layer of OLED need to be evaporated onto a substrate, and a corresponding mask plate is used in the evaporation process. A Metal Mask (FMM) is a Mask used in an Electroluminescence (EL) evaporation process, and is mainly used for evaporating an organic luminescent material to form red R/green G/blue B pixels of a display panel. Fig. 1 is a schematic structural view of a metal mask, and fig. 2 is an enlarged view of a region B in fig. 1. As shown in fig. 1 and fig. 2, one metal mask plate is used for evaporating the effective display areas of a plurality of display panels, and each effective display area of each display panel comprises a plurality of pixels arranged in an array, so that one metal mask plate comprises a plurality of evaporation areas AA corresponding to the effective display areas of the display panels, and each evaporation area AA comprises a plurality of openings corresponding to the pixels in the effective display areas.
The metal mask plate is a metal thin plate with thousands of millions of micron-sized openings formed on the surface, the thickness of the metal mask plate is only 5-40 microns, and the extremely thin and porous characteristic of the metal mask plate makes the metal mask plate very sensitive to external force. In the EL evaporation process, a metal mask plate is required to be subjected to a net-stretching process, and a plurality of metal mask plates are assembled into a complete mask plate. In the screen-expanding process, the metal mask plate is very easy to wrinkle and deform under the action of tension. Once the wrinkles are deformed, the metal mask plate and the substrate are not tightly attached in the subsequent evaporation process, the effective evaporation area is reduced, the evaporation thickness is reduced, even the situation that materials cannot be deposited is caused, shadow defect occurs, the Shadow defect is one of important defects in the existing EL evaporation process of the display panel, and defects such as picture color mixing and the like can be caused in the display panel.
Therefore, understanding the performances such as stretching displacement of the metal mask plate in the net-stretching process is important to the design of the metal mask plate and the net-stretching process. However, the physical test mode can not only greatly increase the design cost, but also increase the development period.
Disclosure of Invention
The technical problem to be solved by the embodiment of the invention is to provide a simulation method and a simulation device for a metal mask plate, so as to save design cost and shorten development period.
In order to solve the above technical problems, an embodiment of the present invention provides a simulation method for a metal mask, including:
dividing an evaporation area of the metal mask plate into n laminated plate-shaped models, wherein n is 2-6;
and taking the n-layer plate-shaped model as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
Optionally, taking the n-layer plate model as a composite shell structure, and performing mechanical simulation through a finite element algorithm to obtain a simulation result, wherein the method comprises the following steps:
equivalent each plate-shaped model into an equivalent plate with uniform thickness and no opening;
and taking the n layers of equivalent plates as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
Alternatively, each plate-like model is equivalent to an equivalent plate with uniform thickness and no opening, and the method comprises the following steps:
the cavity percentage of each plate-shaped model is obtained, and the material attribute of each plate-shaped model is calculated according to the cavity percentage of each plate-shaped model;
and according to the material properties of each plate-shaped model, each plate-shaped model is equivalent to an equivalent plate with the same material properties, uniform thickness and no opening.
Optionally, the material property comprises an elastic modulus.
Optionally, in the cavity percentage of each layer of the plate-shaped model, the open area of the central position of each layer is taken as the calculated area of the cavity.
Optionally, taking the n-layer plate model as a composite shell structure, and performing mechanical simulation through a finite element algorithm to obtain a simulation result, wherein the method comprises the following steps:
modeling all openings of each plate model, and constructing a mathematical model of each plate model; and combining the n layers of the mathematical models, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
Optionally, the mechanical simulation comprises a tensile simulation, the simulation result comprises a tensile force and stress strain distribution of the expanded metal, and n is 4.
In order to solve the above technical problems, an embodiment of the present invention further provides a simulation device for a metal mask, including:
the dividing module is used for dividing the evaporation area of the metal mask plate into n laminated plate-shaped models, wherein n is 2-6;
and the simulation module is used for taking the n-layer plate-shaped model as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
Optionally, the simulation module includes:
the conversion unit is used for equivalent each plate-shaped model into an equivalent plate with uniform thickness and no opening;
and the simulation unit is used for taking the n layers of equivalent plates as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
Optionally, the conversion unit includes:
a calculating subunit, configured to obtain a void percentage of each layer of the layer-shaped model, and calculate a material property of each layer of the layer-shaped model according to the void percentage of each layer of the layer-shaped model;
and the conversion subunit is used for equivalent each plate-shaped model into an equivalent plate with the same material property, uniform thickness and no opening according to the material property of each plate-shaped model.
Optionally, the material property comprises an elastic modulus.
Optionally, in the cavity percentage of each layer of the plate-shaped model, the open area of the central position of each layer is taken as the calculated area of the cavity.
Optionally, the simulation module is specifically configured to model all the openings of each plate model, and construct a mathematical model of each plate model; and combining the n layers of the mathematical models, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
Optionally, the mechanical simulation comprises a tensile simulation, the simulation result comprises a tensile force and stress strain distribution of the expanded metal, and n is 4.
The embodiment of the invention also provides a medium, on which a computer program capable of running on a processor is stored, and the computer program realizes the steps of the simulation method of the metal mask plate when being executed by the processor.
The embodiment of the invention provides a simulation method and a simulation device for a metal mask, which are used for dividing an evaporation area of the metal mask into a plurality of plate-shaped models, so that the constructed models fully consider the special-shaped structure of an opening on the metal mask, and the real structure of the metal mask can be accurately simulated. Compared with a physical test mode, the simulation method can greatly save design cost and shorten product development period. Compared with the existing modeling mode, the simulation method can obtain accurate simulation results, and can be used for guiding the design of the metal mask plate and the design of the net-opening process.
Of course, it is not necessary for any one product or method of practicing the invention to achieve all of the advantages set forth above at the same time. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of embodiments of the invention may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate and do not limit the invention. The shapes and sizes of the various components in the drawings are not to scale, and are intended to illustrate the present invention only.
FIG. 1 is a schematic diagram of a metal mask;
FIG. 2 is an enlarged view of area B of FIG. 1;
FIG. 3 is a schematic view of an opening of a metal mask contacting a surface of a substrate;
FIG. 4 is a schematic view of an opening of a metal mask plate toward one side surface of an evaporation device;
FIG. 5 is a schematic view of a 3D model of a single opening of a metal mask;
FIG. 6 is a flow chart of a simulation method of a metal mask plate according to an embodiment of the present invention;
fig. 7 is a schematic diagram of multi-layer division of a metal mask plate according to an embodiment of the invention.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be arbitrarily combined with each other.
At present, a wet etching mode capable of realizing stable mass production is generally adopted for manufacturing the metal mask plate, the opening section of the opening formed by the wet etching process is trapezoid, and the thickness and the shape of the opening section are uneven. Wherein the opening cross section refers to a plane parallel to the opening axis. Fig. 3 is a schematic view of an opening of a metal mask contacting a surface of a substrate, and fig. 4 is a schematic view of an opening of a metal mask facing a surface of an evaporation device. As shown in fig. 3 and 4, in the manufactured metal mask plate, the surface of the metal mask plate, which contacts the substrate, presents small holes, and the surface of the metal mask plate, which faces the evaporation equipment, presents large holes, so that the opening is of a structure similar to a funnel shape. Fig. 5 is a schematic view of a 3D model of a single opening of a metal mask. As shown in fig. 5, since the number of openings in the metal mask plate is up to tens of millions, the actual opening cross section is shaped and not regular trapezoid.
Because the metal mask plate has the characteristics of fine opening, thinner thickness, easy damage and the like, and meanwhile, the metal mask plate has higher preparation cost and very high price, the design cost and the development period can be greatly increased by a physical test mode, and parameters required by design are difficult to obtain through multiple manufacturing and experiments. Although the related technology proposes to simulate the metal mask plate by adopting a modeling mode, the existing modeling method does not consider the special-shaped structure of the opening section, only simulates a planar structure, and the simulation result has larger difference from the actual situation, and cannot be used for guiding the design of the metal mask plate and the design of the screen-tensioning process.
Fig. 6 is a flowchart of a simulation method of a metal mask plate according to an embodiment of the present invention. As shown in fig. 6, the simulation method of the metal mask plate includes:
s1, dividing an evaporation area of a metal mask plate into n laminated plate-shaped models, wherein n is 2-6;
s2, taking the n-layer plate-shaped model as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
In the embodiment of the invention, one metal mask plate is used for evaporating the effective display areas of a plurality of display panels, each effective display area of the display panel comprises a plurality of pixels (R/G/B) which are arranged in an array, one metal mask plate comprises a plurality of evaporation areas AA corresponding to the effective display areas of the display panels, each evaporation area AA comprises a plurality of openings corresponding to each pixel in the effective display areas, and the evaporation areas in the embodiment of the invention refer to the areas with the openings of the pixels which are arranged in an array on the metal mask plate.
The embodiment of the invention provides a simulation method of a metal mask plate, which is characterized in that an evaporation area of the metal mask plate is divided into a plurality of plate-shaped models, so that the constructed models fully consider the special-shaped structure of an opening on the metal mask plate, and the real structure of the metal mask plate can be accurately simulated. Compared with a physical test mode, the simulation method can greatly save design cost and shorten product development period. Compared with the existing modeling mode, the simulation method can obtain accurate simulation results, and can be used for guiding the design of the metal mask plate and the design of the net-opening process.
In one embodiment, step S2 includes:
s21, equivalent each plate-shaped model into an equivalent plate with uniform thickness and no opening;
s22, taking the n layers of equivalent plates as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
Wherein, step S21 includes:
s211, acquiring the cavity percentage of each plate-shaped model, and calculating the material property of each plate-shaped model according to the cavity percentage of each plate-shaped model;
s212, according to the material properties of each plate-shaped model, each plate-shaped model is equivalent to an equivalent plate with the same material properties, uniform thickness and no opening.
In another embodiment, step S2 may include: modeling all openings of each plate model, and constructing a mathematical model of each plate model; and combining the n layers of the mathematical models, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
According to the simulation method of the metal mask plate, provided by the embodiment of the invention, the equivalent processing method of multi-layer division along the thickness direction of the metal mask plate is adopted, so that the model constructed for the evaporation area (the area with the array arrangement pixel openings on the metal mask plate) fully considers the special-shaped structure of the openings on the metal mask plate, the real structure of the metal mask plate can be accurately simulated, and the accurate simulation result can be obtained.
Fig. 7 is a schematic diagram of multi-layer division of a metal mask plate according to an embodiment of the invention. In the embodiment of the invention, the multi-layer division along the thickness direction of the metal mask plate is equivalent to the multi-layer structure division of the cross-section structure of a plurality of openings in the evaporation area, and a special-shaped cross-section structure is divided into n regular cross-section structures, so that each plate-shaped model can be used as a regular planar geometric model, and the cross-section shapes of all the openings on the regular planar geometric model are regular, thereby effectively simulating the special-shaped structure of the opening on the metal mask plate by the constructed model. According to the technical conception of the invention, the more the number of layers is divided, the finer the simulation of the special-shaped structure of the upper opening of the metal mask plate is, the more accurate the simulation of the real structure of the metal mask plate is, but the calculation amount is increased and the calculation time is prolonged. Therefore, it is necessary to make a comparison between the number of division layers and the calculation accuracy, calculation amount, calculation time. Through comparative analysis and calculation by the inventor of the application, the accuracy and calculation time of the simulation result can be ensured to meet the actual needs through the structural division of 2-6 layers. As shown in fig. 7, in the embodiment of the present invention, 4 layers are preferably divided along the thickness direction of the metal mask plate, wherein 1 layer is located on the side facing the evaporation device, 4 layers are located on the side contacting the substrate, and 2 layers and 3 layers are located between the two layers.
And after the multi-layer structure is divided, calculating the cavity percentage of each layer of plate-shaped model. In the embodiment of the invention, the cavity percentage refers to the ratio of the total area of the openings on the plate-shaped model to the area of the plate-shaped model. For 4-layer structure division, as the edge profile of the open pore section still has a certain inclination angle, when the cavity area is calculated, the open pore area at the central position of each layer is taken as the calculated area of the cavity. Thus, for any one opening, the opening area at each layer is different, and thus the percentage of voids per ply model is also different. After the cavity percentage of each layer of plate-shaped model is calculated, the material property of each layer of plate-shaped model can be calculated according to the cavity percentage of each layer of plate-shaped model. In the practice of the present invention, the material properties of each ply-like model include the modulus of elasticity of each ply-like model. The elastic modulus is generally regarded as an index for measuring the difficulty in generating elastic deformation of a material, and is expressed as N/m 2 The ratio of stress to corresponding strain when the ideal material has small deformation is defined as that the larger the elastic modulus value is, the larger the stress for causing the material to generate certain elastic deformation is, namely the larger the rigidity of the material is, or the material generates under the action of certain stressThe smaller the elastic deformation. In practical implementation, other suitable properties, such as shear modulus or compression modulus, may be added according to the application scenario, and the present invention is not limited in detail. In the implementation of the invention, the material properties of each layer of the layer-shaped model can be calculated in a mode of modeling each layer of the layer-shaped model. For example, when the material property is the elastic modulus, a layer of plate-shaped model is actually modeled, the material property of the layer of plate-shaped model is set as the material property of a metal raw material, the numerical values of a series of acting forces and the displacement variation of the plate-shaped model are solved through mechanical simulation, and the elastic modulus of the layer of plate-shaped model is obtained according to the formula e=fl/Δl×a. Wherein E is elastic modulus, F is acting force, L is original length of the laminate model, deltaL is length variation value of the laminate model, and A is sectional area of the laminate model. In actual implementation, modeling and mechanical simulation can be performed through finite element mechanical simulation software according to specific arrangement, size and shape of the holes on each plate-shaped model, and the finite element mechanical simulation software can adopt an ANSYS finite element algorithm or an ABAQUS finite element algorithm.
Table 1 shows the modulus of elasticity corresponding to the percentage of voids per ply model. Each laminate model comprises two areas, one is a metal material area and the other is an open area, and the ratio of the open area to the metal material area in each laminate model determines the elastic modulus of the laminate model. As shown in table 1, since layer 4 is the layer contacting the substrate side, the open pore size is the smallest, and thus the void percentage is the smallest, and the elastic modulus is the largest, i.e., the stiffness is the largest. And layer 1 is the layer towards the evaporation equipment side, and the aperture size is the biggest, therefore the cavity percentage is the biggest, and the modulus of elasticity is the minimum, i.e. rigidity is the minimum.
Table 1: elastic modulus corresponding to void percentage of plate-shaped model
| Percentage of voids | Modulus of elasticity | |
| Layer 1 | 95％ | 100 |
| Layer 2 | 70％ | 1.3E10 |
| Layer 3 | 48％ | 2.9E10 |
| Layer 4 | 38％ | 5E10 |
In modeling a metal mask plate, the embodiment of the invention provides two processing modes, namely a real model mode of opening holes and an equivalent processing model mode. The true model opening mode is to carry out true simulation on all openings of each plate model, construct mathematical models of each plate model, and combine the n layers of mathematical models to form a calculation model of the metal mask plate. In this way, each opening is actually simulated, so that the simulation accuracy is high, but the processing calculation amount is large. The equivalent processing model mode provided by the embodiment of the invention can be used for considering the calculation amount, the running time and other factors, and the simulation precision and the calculation amount can be considered. The equivalent processing model mode of the embodiment of the invention is to equivalent each layer of plate-shaped model with a plurality of holes into an equivalent plate with uniform thickness and no opening, and the material property (such as elastic modulus value) of the equivalent plate is equal to the material property (such as elastic modulus value) of the plate-shaped model with a plurality of holes, namely after the material property of each layer of plate-shaped model is calculated, each layer of plate-shaped model is equivalent to the equivalent plate with the same material property, uniform thickness and no opening according to the material property of each layer of plate-shaped model. In the embodiment of the invention, the equivalent concept means that the two materials have the same mechanical property and the same material property. For example, under the same force, the displacement variation of a plate-like model (with a plurality of openings) is the same as the displacement variation of an equivalent plate (without openings) equivalent to the displacement variation, i.e. the elastic modulus values presented by the plate-like model and the equivalent plate (without openings) equivalent to the displacement variation are the same. Thus, the metal mask plate was modeled as a composite shell structure comprising 4 layers of equivalent sheet material. Because the thickness of the metal mask plate is only 5-40 mu m, each plate-shaped model or equivalent plate belongs to a shell structure, and the n layers are combined to form the shell structure. And finally, taking the composite shell structure as a whole, and carrying out mechanical simulation by using an ANSYS finite element algorithm or an ABAQUS finite element algorithm to obtain a simulation result. In the embodiment of the invention, the mechanical simulation comprises tensile simulation, and the simulation results comprise tensile force of a net, stress strain distribution and the like. In practical implementation, other mechanical simulation, such as shear stress or shear strain, can be performed according to requirements, and the invention is not limited in detail.
The finite element analysis is a modern calculation method developed based on structural mechanics analysis, wherein an ANSYS finite element algorithm or an ABAQUS finite element algorithm is multipurpose algorithm software and can be used for solving problems of a structure and the like. In the embodiment of the invention, the process for simulating the composite shell structure formed by 4 layers of equivalent plates through an ANSYS finite element algorithm comprises the following steps: defining parameters of each layer of equivalent plate, such as geometric parameters, material properties and the like, establishing a geometric model of each layer of equivalent plate, meshing the geometric model, connecting each layer by adopting binding setting to form a whole composite shell structure, finally solving by a computer according to set boundary conditions (tensile loads), and processing solving data to obtain parameters such as tension of a metal mask plate under corresponding loads, stress strain distribution and the like. The specific processing of the simulation of the known structure by ANSYS finite element algorithm or ABAQUS finite element algorithm is well known to those skilled in the art and will not be described here in detail.
Table 2 shows the comparison of the simulation results of the open-cell real simulation and the equivalent process model. The true simulation of the open pores is to perform modeling of the true simulation on all open pores of each plate-shaped model, combine n layers of mathematical models after constructing the mathematical model of each plate-shaped model, and perform mechanical simulation through a finite element algorithm to obtain a simulation result. And (3) equivalent processing the model line to calculate the elastic modulus value of each plate-shaped model, equivalent each plate-shaped model to an equivalent plate with the same elastic modulus value, uniform thickness and no opening, and modeling the composite shell structure formed by n layers of equivalent plates. As shown in table 2, from the view of the displacement distribution in the tensile direction of the metal mask plate, the displacement distribution trend of the metal mask plate and the metal mask plate are completely matched, the displacement maximum value of the true simulation of the open pore is 0.438mm, the displacement maximum value of the equivalent processing model is 0.441mm, and the difference between the two is 3 mu m; the minimum displacement value of the true simulation of the open hole is 3.2E-19mm, and the minimum displacement value of the equivalent processing model is 2E-17mm, which are all close to 0. That is, the calculation accuracy of the equivalent processing model in the embodiment of the invention is less than 3 mu m, so that a more accurate simulation result can be obtained, the method can be used for guiding the design of the metal mask plate and the design of the screen-opening process, the simulation model of the metal mask plate is greatly simplified, the calculation amount is reduced, and the calculation time is shortened.
Table 2: elastic modulus corresponding to void percentage of plate-shaped model
| Open-pore real model | Equivalent processing model | |
| Maximum displacement | 0.438mm | 0.441mm |
| Minimum displacement | 3.2E-19mm | 2E-17mm |
Based on the technical conception of the invention, the embodiment of the invention also provides a simulation device of the metal mask plate. The simulation device of the metal mask plate comprises a dividing module and a simulation module, wherein the dividing module is used for dividing an evaporation area of the metal mask plate into n laminated plate-shaped models, and n is 2-6; and the simulation module is used for taking the n-layer plate-shaped model as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
In one embodiment, the simulation module comprises a conversion unit and a simulation unit, wherein the conversion unit is used for equivalent each plate-shaped model into an equivalent plate with uniform thickness and no opening; the simulation unit is used for taking the n layers of equivalent plates as a composite shell structure, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
The conversion unit comprises a calculation subunit and a conversion subunit, wherein the calculation subunit is used for obtaining the cavity percentage of each layer of plate-shaped model and calculating the material attribute of each layer of plate-shaped model according to the cavity percentage of each layer of plate-shaped model; the conversion subunit is used for equivalent each plate-shaped model into an equivalent plate with the same material property, uniform thickness and no opening according to the material property of each plate-shaped model.
Wherein the material property comprises an elastic modulus.
And taking the open area of the central position of each layer as the calculation area of the cavity in the cavity percentage of each layer of plate-shaped model.
In one embodiment, the simulation module is specifically configured to model all openings of each plate model, and construct a mathematical model of each plate model; and combining the n layers of the mathematical models, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
The mechanical simulation comprises stretching simulation, the simulation result comprises tension and stress strain distribution of the net, and n is 4.
The embodiment of the invention also provides a medium, on which a computer program capable of running on a processor is stored, and the computer program realizes the steps of the simulation method of the metal mask plate when being executed by the processor.
In the description of the embodiments of the present invention, it should be understood that the terms "middle," "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In describing embodiments of the present invention, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, magnetic disk storage, optical storage, and the like) having computer-usable program code embodied therein.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program requests. These computer program requests may be provided to a processor of a general purpose computer, special purpose computer, embedded processor or other programmable information processing apparatus to produce a machine, such that the requests, which are executed by the processor of the computer or other programmable information processing apparatus, produce a means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program requests may also be stored in a computer readable memory that can direct a computer or other programmable information processing apparatus to function in a particular manner, such that the requests stored in the computer readable memory produce an article of manufacture including request means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program requests may also be loaded onto a computer or other programmable information processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the requests which are executed on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
Although the embodiments of the present invention are described above, the embodiments are only used for facilitating understanding of the present invention, and are not intended to limit the present invention. Any person skilled in the art can make any modification and variation in form and detail without departing from the spirit and scope of the present disclosure, but the scope of the present disclosure is to be determined by the appended claims.
Claims (11)
1. The simulation method of the metal mask plate is characterized by comprising the following steps of:
dividing an evaporation area of the metal mask plate into n laminated plate-shaped models, wherein n is 2-6;
taking the n-layer plate-shaped model as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result, wherein the simulation result comprises the following steps: the cavity percentage of each plate-shaped model is obtained, and the material attribute of each plate-shaped model is calculated according to the cavity percentage of each plate-shaped model; according to the material properties of each plate-shaped model, each plate-shaped model is equivalent to an equivalent plate with the same material properties, uniform thickness and no opening; and taking the n layers of equivalent plates as a composite shell structure, and carrying out mechanical simulation through a finite element algorithm to obtain a simulation result.
2. The simulation method of claim 1, wherein the material property comprises an elastic modulus.
3. The simulation method according to claim 1, wherein the calculation area of the cavity is obtained by taking the open area of the center of each layer as the cavity calculation area in the cavity percentage of each layer of the plate-like model.
4. The simulation method according to claim 1, wherein the n-layer plate model is used as a composite shell structure, and the simulation result is obtained by performing mechanical simulation through a finite element algorithm, comprising:
modeling all openings of each plate model, and constructing a mathematical model of each plate model; and combining the n layers of the mathematical models, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
5. A simulation method according to any one of claims 1 to 4, wherein the mechanical simulation comprises a tensile simulation, the simulation result comprises a tension and stress strain distribution of the expanded metal, and n is 4.
6. The simulation device of the metal mask plate is characterized by comprising:
the dividing module is used for dividing the evaporation area of the metal mask plate into n laminated plate-shaped models, wherein n is 2-6;
the simulation module is used for taking the n-layer plate-shaped model as a composite shell structure, and performing mechanical simulation through a finite element algorithm to obtain a simulation result; the simulation module includes:
the conversion unit is used for equivalent each plate-shaped model into an equivalent plate with uniform thickness and no opening;
the simulation unit is used for taking the n layers of equivalent plates as a composite shell structure, and performing mechanical simulation through a finite element algorithm to obtain a simulation result;
the conversion unit includes:
a calculating subunit, configured to obtain a void percentage of each layer of the layer-shaped model, and calculate a material property of each layer of the layer-shaped model according to the void percentage of each layer of the layer-shaped model;
and the conversion subunit is used for equivalent each plate-shaped model into an equivalent plate with the same material property, uniform thickness and no opening according to the material property of each plate-shaped model.
7. The simulation device of claim 6 wherein the material property comprises an elastic modulus.
8. The simulation apparatus according to claim 6, wherein the calculation area of the void is obtained by taking the open area at the center of each layer as the void percentage of each layer of the layer-like model.
9. The simulation apparatus according to claim 6, wherein,
the simulation module is specifically used for modeling all the openings of each plate-shaped model and constructing a mathematical model of each plate-shaped model; and combining the n layers of the mathematical models, and performing mechanical simulation through a finite element algorithm to obtain a simulation result.
10. A simulation device according to any of claims 6-9, wherein the mechanical simulation comprises a tensile simulation, the simulation results comprising a tension and stress strain distribution of the expanded metal, and n is 4.
11. A medium having stored thereon a computer program executable on a processor, the computer program implementing the steps of the simulation method of a metal mask plate according to any of claims 1 to 5 when executed by the processor.
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| CN110257767B (en) * | 2019-05-06 | 2021-05-07 | 京东方科技集团股份有限公司 | Mask strip material attribute obtaining method and device and mask plate manufacturing method |
| CN110348134B (en) * | 2019-07-15 | 2023-07-21 | 京东方科技集团股份有限公司 | Design method and device for fine metal mask plate |
| WO2021072681A1 (en) * | 2019-10-16 | 2021-04-22 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method therefor, and manufacturing method for display substrate |
| CN111079261B (en) * | 2019-11-19 | 2023-12-01 | 京东方科技集团股份有限公司 | Simulation prediction method and system for mask Zhang Wangli and mask net-stretching equipment |
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