CN109002623A - The emulation mode and device of metal mask plate - Google Patents
The emulation mode and device of metal mask plate Download PDFInfo
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- CN109002623A CN109002623A CN201810834158.7A CN201810834158A CN109002623A CN 109002623 A CN109002623 A CN 109002623A CN 201810834158 A CN201810834158 A CN 201810834158A CN 109002623 A CN109002623 A CN 109002623A
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- G06F30/23—Design optimisation, verification or simulation using finite element methods [FEM] or finite difference methods [FDM]
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Abstract
The embodiment of the present invention provides the emulation mode and device of a kind of metal mask plate.The emulation mode of metal mask plate includes: by the stacked n-layer tabular molding set of the vapor deposition region division of metal mask plate, and n is 2~6；Using the n-layer tabular molding as a compound shell structure, mechanical simulation is carried out by finite element algorithm, obtains analog result.The present invention is by being divided into multiple tabular moldings for metal mask plate, so that constructed model fully takes into account the polymorphic structure of metal mask plate upper opening, it thus can accurately simulate the real structure of metal mask plate, design cost is greatly saved, shorten product development cycle, accurate analog result can be obtained, can be used for instructing metal mask plate design and technological design of throwing the net.
Description
Technical field
The present invention relates to field of display technology, and in particular to a kind of emulation mode and device of metal mask plate.
Background technique
During preparing Organic Light Emitting Diode (Organic Light Emitting, OLED) display panel, need
By on the layers of material vapor deposition to substrate of OLED, vapor deposition process will use corresponding mask plate.Metal mask plate (Fine Metal
Mask, FMM) it is mask plate used in electroluminescent (EL) evaporation process, it is mainly used for that luminous organic material is deposited, is formed aobvious
Show the green G/ indigo plant B pixel of the red R/ of panel.Fig. 1 is the structural schematic diagram of a metal mask plate, and Fig. 2 is the amplification of B area in Fig. 1
Figure.As depicted in figs. 1 and 2, a metal mask plate is used to be deposited the effective display area domain of multiple display panels, each display surface
The effective display area domain of plate includes the pixel of multiple array arrangements, therefore a metal mask plate includes multiple having with display panel
Imitate the corresponding vapor deposition region AA in display area, each vapor deposition region AA includes multiple with pixel phase each in effective display area domain
Corresponding aperture.
Metal mask plate is the sheet metal that a kind of surface is formed with millions upon millions of a micron order apertures, thickness is only 5 μm~
40 μm, metal mask plate is this very thin and porous characteristic keeps it very sensitive to external force.In EL evaporation process, metal is covered
Diaphragm plate carries out technique of throwing the net, and is assembled into a complete mask plate by a plurality of metal mask plate.In technique of throwing the net, Yin La
Power acts on so that metal mask plate is very easy to that Folding Deformation occurs.Once Folding Deformation occurs, subsequent vapor deposition is not only resulted in
Metal mask plate is bonded not close with substrate in the process, can also make vapor deposition effective area become smaller thinning with evaporation thickness, even
Appearance the case where material is not deposited, occur that shadow is bad, and Shadow bad is in current display panel EL evaporation process
It is important one of bad, it will lead to display panel and the defects of picture colour mixture occur.
Therefore, understand the performances such as stretching displacement of the metal mask plate in technique of throwing the net metal mask plate is designed and thrown the net
Technological design is most important.However, can not only increase considerably design cost by object test mode, but also it will increase exploitation
Period.
Summary of the invention
The embodiment of the present invention the technical problem to be solved is that, provide the emulation mode and device of a kind of metal mask plate,
To save design cost and shorten the development cycle.
In order to solve the above-mentioned technical problem, the embodiment of the invention provides a kind of emulation modes of metal mask plate, comprising:
By the stacked n-layer tabular molding set of the vapor deposition region division of metal mask plate, n is 2~6；
Using the n-layer tabular molding as a compound shell structure, mechanical simulation is carried out by finite element algorithm, obtains mould
Quasi- result.
Optionally, using the n-layer tabular molding as a compound shell structure, mechanics mould is carried out by finite element algorithm
It is quasi-, obtain analog result, comprising:
Every layer of tabular molding is equivalent to the equivalent plate that thickness is uniform, is not open；
Using the equivalent plate of the n-layer as a compound shell structure, mechanical simulation is carried out by finite element algorithm, obtains mould
Quasi- result.
Optionally, every layer of tabular molding is equivalent to the equivalent plate that thickness is uniform, is not open, comprising:
The empty percentage for obtaining every layer of tabular molding calculates every laminate shape according to the empty percentage of every layer of tabular molding
The material properties of model；
According to the material properties of every layer of tabular molding, by every layer of tabular molding be equivalent to material properties are identical, thickness uniformly,
The equivalent plate not being open.
Optionally, the material properties include elasticity modulus.
Optionally, in the empty percentage for obtaining every layer of tabular molding, using the perforated area of every layer of center as sky
The reference area in hole.
Optionally, using the n-layer tabular molding as a compound shell structure, mechanics mould is carried out by finite element algorithm
It is quasi-, obtain analog result, comprising:
All apertures of each tabular molding are modeled, the mathematical model of each tabular molding is constructed；By the n-layer
Mathematical model combination carries out mechanical simulation by finite element algorithm, obtains analog result.
Optionally, the mechanical simulation includes stretching simulation, and the analog result includes throw the net pulling force and ess-strain point
Cloth, the n are 4.
In order to solve the above-mentioned technical problem, the embodiment of the invention also provides a kind of simulator of metal mask plate, packets
It includes:
Division module, for by the stacked n-layer tabular molding set of the vapor deposition region division of metal mask plate, n to be 2~6；
Analog module, for carrying out power by finite element algorithm using the n-layer tabular molding as a compound shell structure
Simulation is learned, analog result is obtained.
Optionally, the analog module includes:
Converting unit, for every layer of tabular molding to be equivalent to the equivalent plate that thickness is uniform, is not open；
Analogue unit, for carrying out power by finite element algorithm using the equivalent plate of the n-layer as a compound shell structure
Simulation is learned, analog result is obtained.
Optionally, the converting unit includes:
Computation subunit, for obtaining the empty percentage of every layer of tabular molding, according to the cavity hundred of every layer of tabular molding
Divide the material properties than calculating every layer of tabular molding；
Every layer of tabular molding is equivalent to material category for the material properties according to every layer of tabular molding by conversion subunit
The equivalent plate that property is identical, thickness is uniform, is not open.
Optionally, the material properties include elasticity modulus.
Optionally, in the empty percentage for obtaining every layer of tabular molding, using the perforated area of every layer of center as sky
The reference area in hole.
Optionally, the analog module is specifically used for, and models to all apertures of each tabular molding, and building is each
The mathematical model of tabular molding；The n-layer mathematical model is combined, mechanical simulation is carried out by finite element algorithm, is simulated
As a result.
Optionally, the mechanical simulation includes stretching simulation, and the analog result includes throw the net pulling force and ess-strain point
Cloth, the n are 4.
The embodiment of the invention also provides a kind of medium, it is stored thereon with the computer program that can be run on a processor,
The step of emulation mode of aforementioned metal mask plate is realized when the computer program is executed by the processor.
The embodiment of the invention provides a kind of emulation mode of metal mask plate and device, by by the steaming of metal mask plate
Region division is plated at multiple tabular moldings, so that constructed model fully takes into account the abnormity knot of metal mask plate upper opening
Structure, it is thus possible to the accurately real structure of simulation metal mask plate.Compared with object test mode, emulation mode of the present invention can
Greatly to have saved design cost, product development cycle is shortened.Compared with existing modeling pattern, emulation mode energy of the present invention
Accurate analog result is accessed, can be used for instructing metal mask plate design and technological design of throwing the net.
Certainly, implement any of the products of the present invention or method it is not absolutely required at the same reach all the above excellent
Point.Other features and advantages of the present invention will illustrate in subsequent specification embodiment, also, partly implement from specification
It is become apparent in example, or understand through the implementation of the invention.The purpose of the embodiment of the present invention and other advantages can pass through
Specifically noted structure is achieved and obtained in the specification, claims and drawings.
Detailed description of the invention
Attached drawing is used to provide to further understand technical solution of the present invention, and constitutes part of specification, with this
The embodiment of application technical solution for explaining the present invention together, does not constitute the limitation to technical solution of the present invention.Attached drawing
In the shapes and sizes of each component do not reflect actual proportions, purpose is schematically illustrate the content of present invention.
Fig. 1 is the structural schematic diagram of a metal mask plate；
Fig. 2 is the enlarged drawing of B area in Fig. 1；
Fig. 3 is the opening schematic diagram that metal mask plate contacts one side surface of substrate；
Fig. 4 is opening schematic diagram of the metal mask plate towards one side surface of evaporated device；
Fig. 5 is the 3D model schematic of the single aperture of metal mask plate；
Fig. 6 is the flow chart of the emulation mode of metal mask plate of the embodiment of the present invention；
Fig. 7 is the schematic diagram that metal mask plate of embodiment of the present invention multilayer divides.
Specific embodiment
Specific embodiments of the present invention will be described in further detail with reference to the accompanying drawings and examples.Following embodiment
For illustrating the present invention, but it is not intended to limit the scope of the invention.It should be noted that in the absence of conflict, the application
In embodiment and embodiment in feature can mutual any combination.
Currently, the production of metal mask plate generallys use the wet etching mode that can be stably produced, and carved by wet process
Etching technique is formed by aperture, and opening section is trapezoidal, and the thickness of opening section and shape are all uneven.Wherein, it is open
Section refers to the plane for being parallel to opening axis.Fig. 3 is the opening schematic diagram that metal mask plate contacts one side surface of substrate, Fig. 4
It is metal mask plate towards the opening schematic diagram of one side surface of evaporated device.As shown in Figure 3 and Figure 4, the metal to complete is covered
In diaphragm plate, aperture is presented in the surface of contact substrate side, and macropore is presented towards the surface of evaporated device side, thus aperture is
One kind being similar to funnelform structure.Fig. 5 is the 3D model schematic of the single aperture of metal mask plate.As shown in figure 5, due to gold
Belong to the number of openings on mask plate and be up to millions, therefore actual opening section is abnormity, is not the trapezoidal of rule.
Since metal mask plate opening is fine, thinner thickness, is easily damaged etc. characteristics, while metal mask plate preparation cost
Higher, price is very expensive, therefore will lead to by object test mode and increase considerably design cost and development cycle, it is difficult to
The parameter of design is obtained by repeatedly making and testing.Metal is covered using modeling pattern although the relevant technologies are proposed
Diaphragm plate is emulated, but existing modeling method does not account for the polymorphic structure of opening section, only simulates planar structure, leads to mould
Quasi- result differs greatly with actual conditions, still cannot be used for instructing metal mask plate design and technological design of throwing the net.
Fig. 6 is the flow chart of the emulation mode of metal mask plate of the embodiment of the present invention.As shown in fig. 6, metal mask plate
Emulation mode includes:
S1, by the stacked n-layer tabular molding set of the vapor deposition region division of metal mask plate, n is 2~6；
S2, it is obtained using the n-layer tabular molding as a compound shell structure by finite element algorithm progress mechanical simulation
To analog result.
In the embodiment of the present invention, a metal mask plate is used to be deposited the effective display area domain of multiple display panels, each
The effective display area domain of display panel includes the pixel (R/G/B) of multiple array arrangements, a metal mask plate include it is multiple with
Display panel effective display area domain corresponding vapor deposition region AA, each vapor deposition region AA include it is multiple with effective display area domain in
The corresponding aperture of each pixel, vapor deposition region described in the embodiment of the present invention refer on metal mask plate with array arrangement
The region of pixel aperture.
The embodiment of the invention provides a kind of emulation mode of metal mask plate, by by the vapor deposition region of metal mask plate
Multiple tabular moldings are divided into, so that constructed model fully takes into account the polymorphic structure of metal mask plate upper opening, thus
The real structure of metal mask plate can accurately be simulated.Compared with object test mode, emulation mode of the present invention can be very big
Design cost has been saved on ground, shortens product development cycle.Compared with existing modeling pattern, emulation mode of the present invention can be obtained
Accurate analog result can be used for instructing metal mask plate design and technological design of throwing the net.
In one embodiment, step S2 includes:
S21, every layer of tabular molding is equivalent to the equivalent plate that thickness is uniform, is not open；
S22, it is obtained using the equivalent plate of the n-layer as a compound shell structure by finite element algorithm progress mechanical simulation
To analog result.
Wherein, step S21 includes:
S211, the empty percentage for obtaining every layer of tabular molding are calculated every according to the empty percentage of every layer of tabular molding
The material properties of layer tabular molding；
S212, according to the material properties of every layer of tabular molding, every layer of tabular molding be equivalent to material properties are identical, thickness
Uniformly, the equivalent plate not being open.
In another embodiment, step S2 may include: to model to all apertures of each tabular molding, building
The mathematical model of each tabular molding；The n-layer mathematical model is combined, mechanical simulation is carried out by finite element algorithm, is obtained
Analog result.
The emulation mode for the metal mask plate that the embodiment of the present invention is proposed, using along metal mask plate thickness direction multilayer
The equivalent way of division, so that for vapor deposition region (having the region of array arrangement pixel aperture on metal mask plate) institute
The model of building fully takes into account the polymorphic structure of metal mask plate upper opening, it is thus possible to accurately simulate metal mask plate
Real structure can obtain accurate analog result.
Fig. 7 is the schematic diagram that metal mask plate of embodiment of the present invention multilayer divides.In the embodiment of the present invention, along metal mask
Plate thickness direction carries out multilayer and divides the cross section structure progress multilayered structure division being equivalent to multiple apertures in vapor deposition region,
One special-shaped cross section structure is divided into the cross section structure of n rule, thus every layer of tabular molding can be used as a rule
Plane geometry model, the cross sectional shape of all apertures on the plane geometry model of the rule is regular shape, thus is made
Obtain the polymorphic structure that constructed model effectively simulates metal mask plate upper opening.Technical concept according to the invention divides
The number of plies it is more, will be more careful to the simulation of metal mask plate upper opening polymorphic structure, then to metal mask plate real structure
It is more accurate to simulate, but will lead to calculation amount and increase and calculate time extension.Therefore, it is necessary to divide the number of plies and computational accuracy, meter
Choice is compared between calculation amount, calculating time.Comparative analysis and calculating through present inventor, 2~6 layers of structure divide
It can guarantee the precision of analog result and calculate time satisfaction actual needs.As shown in fig. 7, in the embodiment of the present invention, preferably
4 layers of division are carried out using along metal mask plate thickness direction, are 1 layer towards evaporated device side, contact substrate side is 4 layers,
Between be respectively 2 layers and 3 layers.
After multilayered structure divides, empty percentage is carried out to every layer of tabular molding and is calculated.In the embodiment of the present invention, cavity hundred
Divide the area ratio than the gross area and tabular molding that refer to tabular molding upper opening.4 layers of structure are divided, since aperture is cut
The edge contour in face still has certain tilt angle, therefore when calculating cyst areas, takes the perforated area of every layer of center
Reference area as cavity.In this way, any one aperture is different in the opening area of each layer, thus every layer
The empty percentage of tabular molding is also different.After the empty percentage of every layer of tabular molding is calculated, it can according to
The empty percentage of every layer of tabular molding calculates the material properties of every layer of tabular molding.During the present invention is implemented, every layer of tabular molding
Material properties include every layer of tabular molding elasticity modulus.Elasticity modulus is typically considered to measure material generation flexible deformation difficulty or ease
The index of degree, unit N/m2, the ratio between the stress that is defined as ideal material when having small deformation and corresponding strain, elastic mould value
Bigger, the stress for making material that certain flexible deformation occur is also bigger, i.e., material stiffness is bigger, in other words in certain stress
Under, it is smaller that flexible deformation occurs.When actual implementation, other attributes appropriate can also be increased according to targeted application scenarios,
Such as modulus of shearing or compression modulus, the present invention are not specifically limited secondary.It, can be using to every laminate shape during the present invention is implemented
The mode that model is modeled calculates the material properties of every layer of tabular molding.For example, for when material properties are elasticity modulus, first
One layer of tabular molding is really modeled, the material properties of this layer of tabular molding are set as the material properties of metal former material, lead to
The numerical value for crossing a series of mechanics analog approach active forces and tabular molding displacement variable is obtained according to formula E=FL/ Δ L*A
The elasticity modulus of this layer of tabular molding.Wherein, E is elasticity modulus, and F is active force, and L is the original length of this layer of tabular molding,
Δ L is the length varying value of this layer of tabular molding, and A is the sectional area of this layer of tabular molding.It, can be according to every layer when actual implementation
The specific arrangement of aperture, size and shape, carry out modeling and mechanical simulation by finite element dynamics simulation softward on tabular molding,
Finite element dynamics simulation softward can use ANSYS finite element algorithm or ABAQUS finite element algorithm.
Table 1 is the corresponding elasticity modulus of every laminate shape model cavity percentage.Every layer of tabular molding includes two regions, and one
A is metal material region, and one is opening area, and the accounting in opening area and metal material region is closed in every layer of tabular molding
System will determine the elasticity modulus of this layer of tabular molding.As shown in table 1, since the 4th layer is the layer for contacting substrate side, bore size
Minimum, therefore empty percentage is minimum, elasticity modulus is maximum, i.e., rigidity is maximum.And the 1st layer is directed towards evaporated device side
Layer, bore size is maximum, therefore empty percent maximum, and elasticity modulus is minimum, i.e., rigidity is minimum.
Table 1: the corresponding elasticity modulus of tabular molding cavity percentage
| Empty percentage | Elasticity modulus | |
| 1st layer | 95% | 100 |
| 2nd layer | 70% | 1.3E10 |
| 3rd layer | 48% | 2.9E10 |
| 4th layer | 38% | 5E10 |
In the modeling to metal mask plate, both the embodiment of the present invention proposes processing mode, it is true that one is apertures
Model approach, another kind are equivalent process model approach.Aperture true model mode is all apertures to each tabular molding
Real simulation is carried out, the mathematical model of each tabular molding is constructed, the n-layer mathematical model is combined and constitutes metal mask plate
Computation model.Which is due to each aperture of real simulation, and simulation precision is higher, but computational processing is larger.From meter
The factors such as calculation amount and runing time consider that the equivalent process model approach that the embodiment of the present invention proposes can then take into account simulation precision
And calculation amount.Equivalent process model approach of the embodiment of the present invention is that every layer of tabular molding with multiple apertures is equivalent to one
Thickness uniformly, without any opening equivalent plate, and the material properties (such as elastic mould value) of the equivalent plate be equal to have
The material properties (such as elastic mould value) of the tabular molding of multiple apertures, i.e., in the material properties for calculating every layer of tabular molding
Afterwards, according to the material properties of every layer of tabular molding, by every layer of tabular molding be equivalent to material properties are identical, thickness uniformly, do not have
The equivalent plate of opening.In the embodiment of the present invention, equivalent concept both refers to identical, material category in the mechanical property shown
It is identical in property.For example, the displacement variable of one layer of tabular molding (with multiple openings) is equivalent with it under identical active force
The displacement variable of equivalent plate (not being open) out is identical, i.e. the elastic mould value of the two presentation is identical.In this way, metal is covered
Diaphragm plate be modeled as include 4 layers of equivalent plate compound shell structure.Since the thickness of metal mask plate is only 5 μm~40 μm, because
This every layer tabular molding or equivalent plate belong to shell structure, are still shell structure after n-layer combination.Finally, compound shell structure is made
For an entirety, mechanical simulation is carried out by ANSYS finite element algorithm or ABAQUS finite element algorithm, obtains analog result.This
In inventive embodiments, mechanical simulation includes stretching simulation, and analog result includes throw the net pulling force, Stress distribution etc..It is practical real
Shi Shi, can also carry out other mechanical simulations, such as shear stress or shear strain according to demand, and the present invention is not done specifically secondary
It limits.
Finite element analysis is a kind of modern computing method to be grown up based on structure mechanics analysis, and ANSYS therein has
It limits Meta algorithm or ABAQUS finite element algorithm is a kind of multiduty algorithm software, the problems such as solving structure can be used to.This hair
In bright embodiment, the process packet simulated by compound shell structure of the ANSYS finite element algorithm to 4 layers of equivalent plates composition
It includes: defining the parameter of every layer of equivalent plate, such as geometric parameter and material properties, establish the geometrical model of every layer of equivalent plate,
To the geometrical model carry out grid dividing, will between every layer using binding bonding setting be attached to be formed it is whole as one
The compound shell structure of body finally can carry out computer solving according to the boundary condition of setting (tensile load), to solution data
Carrying out processing can be obtained the parameters such as throw the net pulling force, Stress distribution of the metal mask plate under respective loads.Pass through ANSYS
The concrete processing procedure that finite element algorithm or ABAQUS finite element algorithm simulate known structure is those skilled in the art
Known to member, which is not described herein again.
Table 2 is the analog result comparison of aperture real simulation and equivalent process model.Aperture real simulation is to each plate
All apertures of shape model carry out the modeling of real simulation, after the mathematical model for constructing each tabular molding, by n-layer mathematical model
Combination carries out mechanical simulation by finite element algorithm, obtains analog result.Equivalent process model every layer of tabular molding of line computation
Every layer of tabular molding, is equivalent to that an elastic mould value is identical, thickness is equivalent uniformly, without any opening by elastic mould value
Plate, the compound shell structure formed to the equivalent plate of n-layer model.As shown in table 2, from the position of metal mask plate direction of pull
It moves from the point of view of distribution, the Displacements Distribution trend of the two exactly matches, and the displacement maximum value of aperture real simulation is 0.438mm, equivalent
The displacement maximum value for handling model is 0.441mm, and the two differs 3 μm；The displacement minimum value of aperture real simulation is 3.2E-
The displacement minimum value of 19mm, equivalent process model are 2E-17mm, all close to 0.That is, the equivalent place of the embodiment of the present invention
The computational accuracy of model is managed less than 3 μm, more accurate analog result is can not only obtain, can be used for instructing metal mask plate
Design and throw the net technological design, and greatly simplifies the simulation model of metal mask plate, reduces calculation amount, shortens meter
Evaluation time.
Table 2: the corresponding elasticity modulus of tabular molding cavity percentage
| Aperture true model | Equivalent process model | |
| Maximum displacement | 0.438mm | 0.441mm |
| Least displacement | 3.2E-19mm | 2E-17mm |
Based on technical concept of the invention, the embodiment of the invention also provides a kind of simulators of metal mask plate.Tool
Body, the simulator of metal mask plate includes division module and analog module, wherein division module is used for metal mask plate
The stacked n-layer tabular molding set of vapor deposition region division, n be 2~6；Analog module, for using the n-layer tabular molding as
One compound shell structure carries out mechanical simulation by finite element algorithm, obtains analog result.
In one embodiment, analog module includes converting unit and analogue unit, wherein converting unit is used for every layer
Tabular molding is equivalent to the equivalent plate that thickness is uniform, is not open；Analogue unit is used for using the equivalent plate of the n-layer as one
A compound shell structure carries out mechanical simulation by finite element algorithm, obtains analog result.
Wherein, converting unit includes computation subunit and conversion subunit, wherein computation subunit is for obtaining every laminate
The empty percentage of shape model calculates the material properties of every layer of tabular molding according to the empty percentage of every layer of tabular molding；Turn
Subelement is changed for according to the material properties of every layer of tabular molding, every layer of tabular molding be equivalent to material properties are identical, thickness
Uniformly, the equivalent plate not being open.
Wherein, the material properties include elasticity modulus.
Wherein, in the empty percentage for obtaining every layer of tabular molding, using the perforated area of every layer of center as cavity
Reference area.
In one embodiment, analog module is specifically used for, and models to all apertures of each tabular molding, building
The mathematical model of each tabular molding；The n-layer mathematical model is combined, mechanical simulation is carried out by finite element algorithm, is obtained
Analog result.
Wherein, the mechanical simulation includes stretching simulation, and the analog result includes throw the net pulling force and Stress distribution,
The n is 4.
The embodiment of the invention also provides a kind of medium, it is stored thereon with the computer program that can be run on a processor,
The step of emulation mode of aforementioned metal mask plate is realized when the computer program is executed by the processor.
In the description of the embodiment of the present invention, it is to be understood that term " middle part ", "upper", "lower", "front", "rear",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "top", "bottom" "inner", "outside" be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In the description of the embodiment of the present invention, it should be noted that unless otherwise clearly defined and limited, term " peace
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
It should be understood by those skilled in the art that, the embodiment of the present invention can provide as method, system or computer program
Product.Therefore, complete hardware embodiment, complete software embodiment or reality combining software and hardware aspects can be used in the present invention
Apply the form of example.Moreover, it wherein includes the computer of computer usable program code that the present invention, which can be used in one or more,
The shape for the computer program product implemented in usable storage medium (including but not limited to magnetic disk storage and optical memory etc.)
Formula.
The present invention be referring to according to the method for the embodiment of the present invention, the flow chart of equipment and computer program product and/or
Block diagram describes.It should be understood that can be requested by computer program each process in implementation flow chart and/or block diagram and/or
The combination of process and/or box in box and flowchart and/or the block diagram.It can provide the request of these computer programs to arrive
General purpose computer, special purpose computer, Embedded Processor or other programmable information processing equipments processor to generate one
Machine, so that being generated by the request that computer or the processor of other programmable information processing equipments execute for realizing flowing
The device for the function of being specified in journey figure one process or multiple processes and/or block diagrams one box or multiple boxes.
The request of these computer programs, which may also be stored in, is able to guide computer or other programmable information processing equipments with spy
Determine in the computer-readable memory that mode works, so that it includes asking that request stored in the computer readable memory, which generates,
Seek the manufacture of device, the request unit realize in one box of one or more flows of the flowchart and/or block diagram or
The function of being specified in multiple boxes.
The request of these computer programs can also be loaded into computer or other programmable information processing equipments, so that counting
Series of operation steps are executed on calculation machine or other programmable devices to generate computer implemented processing, thus in computer or
The request executed on other programmable devices is provided for realizing in one or more flows of the flowchart and/or block diagram one
The step of function of being specified in a box or multiple boxes.
Although disclosed herein embodiment it is as above, the content only for ease of understanding the present invention and use
Embodiment is not intended to limit the invention.Technical staff in any fields of the present invention is taken off not departing from the present invention
Under the premise of the spirit and scope of dew, any modification and variation, but the present invention can be carried out in the form and details of implementation
Scope of patent protection, still should be subject to the scope of the claims as defined in the appended claims.
Claims (15)
1. a kind of emulation mode of metal mask plate characterized by comprising
By the stacked n-layer tabular molding set of the vapor deposition region division of metal mask plate, n is 2~6；
Using the n-layer tabular molding as a compound shell structure, mechanical simulation is carried out by finite element algorithm, obtains simulation knot
Fruit.
2. emulation mode according to claim 1, which is characterized in that using the n-layer tabular molding as a Composite Shell
Structure carries out mechanical simulation by finite element algorithm, obtains analog result, comprising:
Every layer of tabular molding is equivalent to the equivalent plate that thickness is uniform, is not open；
Using the equivalent plate of the n-layer as a compound shell structure, mechanical simulation is carried out by finite element algorithm, obtains simulation knot
Fruit.
3. emulation mode according to claim 2, which is characterized in that by every layer of tabular molding be equivalent to thickness uniformly, do not have
There is the equivalent plate of opening, comprising:
The empty percentage for obtaining every layer of tabular molding calculates every layer of tabular molding according to the empty percentage of every layer of tabular molding
Material properties；
According to the material properties of every layer of tabular molding, by every layer of tabular molding be equivalent to material properties are identical, thickness uniformly, do not have
The equivalent plate of opening.
4. emulation mode according to claim 3, which is characterized in that the material properties include elasticity modulus.
5. emulation mode according to claim 3, which is characterized in that in the empty percentage for obtaining every layer of tabular molding,
Using the perforated area of every layer of center as the reference area in cavity.
6. emulation mode according to claim 1, which is characterized in that using the n-layer tabular molding as a Composite Shell
Structure carries out mechanical simulation by finite element algorithm, obtains analog result, comprising:
All apertures of each tabular molding are modeled, the mathematical model of each tabular molding is constructed；By the n-layer mathematics
Model combination carries out mechanical simulation by finite element algorithm, obtains analog result.
7. any emulation mode according to claim 1~6, which is characterized in that the mechanical simulation includes stretching simulation,
The analog result includes throw the net pulling force and Stress distribution, and the n is 4.
8. a kind of simulator of metal mask plate characterized by comprising
Division module, for by the stacked n-layer tabular molding set of the vapor deposition region division of metal mask plate, n to be 2~6；
Analog module, for carrying out mechanics mould by finite element algorithm using the n-layer tabular molding as a compound shell structure
It is quasi-, obtain analog result.
9. simulator according to claim 8, which is characterized in that the analog module includes:
Converting unit, for every layer of tabular molding to be equivalent to the equivalent plate that thickness is uniform, is not open；
Analogue unit, for carrying out mechanics mould by finite element algorithm using the equivalent plate of the n-layer as a compound shell structure
It is quasi-, obtain analog result.
10. simulator according to claim 9, which is characterized in that the converting unit includes:
Computation subunit, for obtaining the empty percentage of every layer of tabular molding, according to the empty percentage of every layer of tabular molding
Calculate the material properties of every layer of tabular molding；
Every layer of tabular molding is equivalent to material properties phase for the material properties according to every layer of tabular molding by conversion subunit
Together, the equivalent plate that thickness is uniform, is not open.
11. simulator according to claim 10, which is characterized in that the material properties include elasticity modulus.
12. simulator according to claim 10, which is characterized in that obtain the empty percentage of every layer of tabular molding
In, using the perforated area of every layer of center as the reference area in cavity.
13. simulator according to claim 8, which is characterized in that
The analog module is specifically used for, and models to all apertures of each tabular molding, constructs each tabular molding
Mathematical model；The n-layer mathematical model is combined, mechanical simulation is carried out by finite element algorithm, obtains analog result.
14. according to any simulator of claim 8~13, which is characterized in that the mechanical simulation includes stretching die
Quasi-, the analog result includes throw the net pulling force and Stress distribution, and the n is 4.
15. a kind of medium, which is characterized in that be stored thereon with the computer program that can be run on a processor, the computer
The emulation mode for realizing the metal mask plate as described in any one of claims 1 to 7 when program is executed by the processor
Step.
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