CN108994455B - Efficient laser drilling and cleaning optical system - Google Patents

Efficient laser drilling and cleaning optical system Download PDF

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Publication number
CN108994455B
CN108994455B CN201810972165.3A CN201810972165A CN108994455B CN 108994455 B CN108994455 B CN 108994455B CN 201810972165 A CN201810972165 A CN 201810972165A CN 108994455 B CN108994455 B CN 108994455B
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CN
China
Prior art keywords
assembly
polygon mirror
laser
field lens
beam expander
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Active
Application number
CN201810972165.3A
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Chinese (zh)
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CN108994455A (en
Inventor
王炜
蔡道叶
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Zhejiang Junhua Smart Iot Technology Co ltd
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Zhejiang Junhua Smart Iot Technology Co ltd
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Priority to CN201810972165.3A priority Critical patent/CN108994455B/en
Publication of CN108994455A publication Critical patent/CN108994455A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

An efficient laser drilling and cleaning optical system belongs to the technical field of laser scanning. The invention comprises a shell, an upper cover, an optical fiber collimating coupler, a coupler flange, a field lens assembly, an electric connector, a beam expander assembly, a reflecting mirror assembly, a polygon mirror assembly, a motor assembly and a photoelectric switch assembly, wherein the optical fiber collimating coupler, the coupler flange, the field lens assembly and the electric connector are arranged outside the shell; the optical fiber collimating coupler is connected to the side surface of the shell through a coupler flange, the beam expander assembly is arranged in the laser incidence direction of the optical fiber collimating coupler, and the reflector assembly is arranged in the laser incidence direction of the beam expander assembly and reflects laser to the polygon mirror assembly; the motor component is connected with the polygon mirror component in a transmission way so as to drive the polygon mirror component to rotate, and the field mirror component is arranged in the laser reflection direction of the polygon mirror component. The invention can greatly improve the speed of laser scanning, thereby improving the efficiency of laser drilling or laser cleaning.

Description

Efficient laser drilling and cleaning optical system
Technical Field
The invention relates to the technical field of laser scanning, in particular to a high-efficiency laser drilling and cleaning optical system.
Background
Since the advent of the laser in the 60 s of the 20 th century, laser technology has evolved dramatically. Research has been conducted around the use of lasers, wherein the advent of high repetition rate and high peak power pulsed lasers has driven the development of laser drilling and laser cleaning applications as pulsed lasers evolve. However, the current laser drilling and laser cleaning mainly adopts a vibrating mirror to realize two-dimensional scanning of light beams, the maximum working angular speed of the vibrating mirror is limited, and the field lens matching with the focal length of 650mm is taken as an example, so that the current maximum scanning speed can only reach 10m/min, and the laser drilling and laser cleaning efficiency is restricted.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provide a high-efficiency laser drilling and cleaning optical system which can greatly improve the speed of laser scanning, thereby improving the efficiency of laser drilling or laser cleaning.
The invention aims at realizing the following technical scheme:
an efficient laser drilling and cleaning optical system comprises a shell, an upper cover, an optical fiber collimation coupler, a coupler flange, a field lens assembly, an electric connector, a beam expander assembly, a reflecting mirror assembly, a polygon mirror assembly, a motor assembly and a photoelectric switch assembly, wherein the optical fiber collimation coupler, the coupler flange, the field lens assembly and the electric connector are arranged on the outer side of the shell;
the optical fiber collimating coupler is connected to the side surface of the shell through the coupler flange, the beam expander component is arranged in the laser incidence direction of the optical fiber collimating coupler, and the reflector component is arranged in the laser incidence direction of the beam expander component and reflects laser to the polygon mirror component; the motor component is connected with the polygon mirror component in a transmission way so as to drive the polygon mirror component to rotate, and the field mirror component is arranged in the laser reflection direction of the polygon mirror component.
Preferably, the beam expander assembly comprises a beam expander bracket and a beam expander, wherein the beam expander bracket is arranged on the bottom surface of the shell, a threaded through hole is formed in the upper portion of the beam expander bracket, and the beam expander is connected in the threaded through hole.
As the preferable mode of the invention, the reflector component comprises a reflector bracket, a reflector and a reflector pressing ring, wherein the reflector bracket is arranged on the bottom surface of the shell, a counter bore is arranged at the upper part of the reflector bracket, an internal thread is arranged on the inner side wall of the counter bore, the reflector is arranged in the counter bore, and an external thread matched with the internal thread is arranged on the outer side of the reflector pressing ring.
Preferably, the motor assembly comprises a motor, a motor support, a synchronous pulley and a synchronous belt, wherein the motor support is connected to the shell, the motor is arranged on the motor support, the synchronous pulley is arranged at the output end of the motor, and the synchronous belt is sleeved on the synchronous pulley in a matched manner.
Preferably, the polygon mirror assembly comprises a polygon mirror base, a bearing arranged on the polygon mirror base, a transmission shaft arranged in an inner hole of the bearing, a synchronizing wheel arranged on the transmission shaft and a polygon mirror, wherein the synchronizing wheel is connected with the synchronous belt in a matching way.
Preferably, a blocking piece matched with the photoelectric switch component is arranged at the upper side edge of the polygon mirror.
Preferably, the photoelectric switch assembly comprises a photoelectric switch bracket and a photoelectric switch, wherein the photoelectric switch bracket is arranged on the bottom surface of the shell, and the photoelectric switch is arranged on the upper part of the photoelectric switch bracket.
Preferably, the field lens assembly comprises a field lens and a field lens flange, wherein the field lens flange is connected to the shell through screws, and the field lens is in threaded connection with the field lens flange.
Preferably, a sealing groove is arranged on the upper end face of the shell, and a sealing strip is arranged in the sealing groove.
Preferably, the edge of the upper cover is provided with a sealing boss.
The invention has the advantages that:
1. the polygon mirror is generally a hexahedral mirror or a seven-sided mirror to replace the traditional galvanometer, and the scanning speed is more than 2 times faster than that of the traditional galvanometer under the driving of the same motor. Therefore, the multi-sided scanning mirror is more suitable for the fields of large-scale simple array laser marking, laser cleaning and the like.
2. By adopting the polygon mirror, the scanning area can be increased. The traditional vibrating mirror is a special swinging motor, can not rotate like a common motor, and can only deflect. In most cases, the highest deflection angle mirror is 12.5 ° (±10° is often a safer range) and the angle of incidence cannot be biased to 45 °. However, after the traditional galvanometer is replaced by the polygon mirror, the polygon mirror is driven by a motor to rotate clockwise, so that the limitation of an incident angle is avoided, and the effective reflection area of the scanning mirror is greatly increased.
3. The multi-face scanning mirror is hollowed out, so that the quality of the device is reduced, and the characteristics of large and heavy traditional instruments are overcome by adopting compact light paths and mechanical design. The miniaturization and portability of the whole instrument are realized, and the method is widely applied to more scenes.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
fig. 2 is a schematic diagram of a scanning optical path according to the present invention.
1-an optical fiber collimating coupler; 2-coupler flanges; 3-beam expander assembly; 4-mirror assembly; 5-motor assembly; a 6-polygon mirror assembly; 7-field lens assembly; an 8-photoelectric switch assembly; 9-electrical connectors; 10-a housing; 31-a beam expander bracket; 32-beam expander; 41-mirror support; 43-mirror clamping ring; 51-a motor; 52-a motor bracket; 54-synchronous belt; 61-a polygon mirror mount; 65-a polygon mirror; 651-stop; 101-sealing groove.
Detailed Description
The invention will be described in further detail with reference to the drawings and the detailed description.
Example 1
An efficient laser drilling and cleaning optical system comprises a shell 10, an upper cover, an optical fiber collimating coupler 1, a coupler flange 2, a field lens assembly 7, an electrical connector 9, a beam expanding lens assembly 3, a reflecting mirror assembly 4, a polygon mirror assembly 6, a motor assembly 5 and a photoelectric switch assembly 8, wherein the optical fiber collimating coupler 1, the coupler flange 2, the field lens assembly 7 and the electrical connector 9 are arranged on the outer side of the shell 10; the optical fiber collimating coupler 1 is connected to the side surface of the shell 10 through the coupler flange 2, the beam expander assembly 3 is arranged in the laser incidence direction of the optical fiber collimating coupler 1, and the reflecting mirror assembly 4 is arranged in the laser incidence direction of the beam expander assembly 3 and reflects laser to the polygon mirror assembly 6; the motor assembly 5 is in transmission connection with the polygon mirror assembly 6 to drive the polygon mirror assembly 6 to rotate, and the field lens assembly 7 is arranged in the laser reflection direction of the polygon mirror assembly 6.
Working principle: the optical fiber collimating coupler 1 is connected with a pulse laser through an optical fiber so as to guide the pulse laser to the shell 10 through the coupler flange 2, then the pulse laser is amplified by the diameter of the beam expander assembly 3, then the pulse laser is reflected to the polygon mirror assembly 6 through the reflecting mirror assembly 4, the polygon mirror assembly 6 reflects the pulse laser to the field lens assembly 7, and finally the laser is focused on the focal plane of the laser through the field lens assembly 7. In addition, since the polygon mirror assembly 6 is driven by the motor assembly 5 to rotate, the angle of the mirror surface of the polygon mirror assembly into which the laser beam is incident continuously changes, that is, the angle of the laser beam reflected by the polygon mirror assembly to the field lens assembly also continuously changes, and the focal point of the laser beam continuously slides from one end to the other end along a straight line on the focal plane of the field lens assembly, thereby forming a continuous beam scanning.
Specifically, as shown in fig. 1 and 2, in a preferred embodiment, the polygon mirror assembly is a seven-sided mirror, and the specific rotation direction of the polygon mirror assembly is clockwise, and the laser light is reflected by the seven-sided mirror, and the scanning movement from right to left is repeated on the focusing plane through the focus of the field lens. The system greatly improves the speed of laser scanning, thereby improving the efficiency of laser drilling or laser cleaning.
Example 2
On the basis of embodiment 1, the beam expander assembly 3 includes a beam expander bracket 31 and a beam expander 32, the beam expander bracket 31 is disposed on the bottom surface of the housing 10, a threaded through hole is disposed on the upper portion of the beam expander bracket, and the beam expander 32 is connected in the threaded through hole. The structure is convenient for installation, disassembly and maintenance, wherein the main shaft of the beam expander 32 coincides with the optical axis of the laser, and the laser beam is expanded so as to obtain small-diameter light spots on the focal plane of the field lens.
The reflector assembly 4 comprises a reflector bracket 41, a reflector and a reflector pressing ring 43, wherein the reflector bracket 41 is arranged on the bottom surface of the shell 10, a counter bore is formed in the upper portion of the reflector bracket, an internal thread is formed in the inner side wall of the counter bore, the reflector is arranged in the counter bore, and an external thread matched with the internal thread is formed in the outer side of the reflector pressing ring 43. The reflector is stably positioned in the counter bore of the reflector bracket through the limiting function of the reflector pressing ring, and the stability of the whole structure is high. In addition, the reflector is generally made of glass or quartz, and one surface of the reflector is plated with a reflecting film with the same wavelength as the laser. In this embodiment, the mirror surface of the mirror is 45 degrees to the incident laser beam, and reflects the laser beam at an angle of 90 degrees.
The motor assembly 5 comprises a motor 51, a motor support 52, a synchronous pulley and a synchronous belt 54, wherein the motor support 52 is connected to the shell 10, the motor 51 is arranged on the motor support 52, the synchronous pulley is arranged at the output end of the motor 51, and the synchronous belt 54 is sleeved on the synchronous pulley in a matched mode. The motor assembly drives the synchronous pulley to rotate through the motor 51, and the synchronous pulley drives the polygon mirror assembly to rotate through the synchronous belt 54. The motor can be a motor with controllable rotating speed, such as a stepping motor, a direct current motor or a servo motor.
The polygon mirror assembly 6 comprises a polygon mirror base 61, a bearing arranged on the polygon mirror base 61, a transmission shaft arranged in an inner hole of the bearing, a synchronizing wheel arranged on the transmission shaft and a polygon mirror 65, wherein the synchronizing wheel is matched and connected with the synchronous belt 54. The two bearings are respectively arranged in the polygon mirror base 61 from the upper side and the lower side, then the transmission shaft is arranged in the bearing inner hole, meanwhile, the transmission shaft is in interference fit with the bearing inner hole, and the bearing is also in interference fit with the polygon mirror base. The synchronous wheel is sleeved on the transmission shaft, the polygon mirror is sleeved on the upper end of the transmission shaft and fixed by jackscrews, the synchronous wheel is connected with the synchronous belt in a matched mode, and the polygon mirror is driven to rotate through the synchronous belt by the motor. In addition, the polygon mirror is made of a lightweight material, and a plurality of through holes are provided on the polygon mirror to further reduce the weight. And a plurality of sides of the polygon mirror are glued with reflecting mirrors, the reflecting mirrors are made of glass or quartz, and reflecting films with the same wavelength as the laser are plated on the surfaces of the reflecting mirrors.
The upper side edge of the polygon mirror 65 is provided with a blocking piece 651 matched with the photoelectric switch assembly 8. So as to monitor the rotating speed and the working state of the polygon mirror.
The photoelectric switch assembly 8 comprises a photoelectric switch bracket and a photoelectric switch, the photoelectric switch bracket is arranged on the bottom surface of the shell 10, and the photoelectric switch is arranged on the upper part of the photoelectric switch bracket. The structure is also convenient for disassembly and maintenance, when the polygon mirror does not rotate for one circle, the baffle plate on the polygon mirror can sweep the photoelectric switch once, and the photoelectric switch immediately sends an electric signal which is transmitted to the control system through the electric connector 9 so as to conveniently detect the rotating speed and the working state of the polygon mirror.
The field lens assembly 7 comprises a field lens and a field lens flange, the field lens flange is connected to the shell 10 through screws, and the field lens is in threaded connection with the field lens flange. The structure is convenient to install, stable and reliable.
The upper end face of the shell 10 is provided with a sealing groove 101, and a sealing strip is arranged in the sealing groove 101. The sealing groove and the sealing strip are used for ensuring the tightness in the shell and avoiding external interference and internal laser emission. In addition, the housing is machined from a lightweight metal material such as an aluminum alloy. The upper cover is also processed by adopting a light metal material, and the edge of the upper cover is provided with a sealing boss which is used for being matched with a sealing groove of the shell so as to prevent internal laser scattered light from being directly emitted out through a gap between the shell and the upper cover.
The foregoing is merely a preferred embodiment of the present invention, which is based on one implementation of the overall concept of the present invention, and the scope of the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the technical scope of the present invention should be covered by the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (7)

1. The efficient laser drilling and cleaning optical system is characterized by comprising a shell (10), an upper cover, an optical fiber collimation coupler (1), a coupler flange (2), a field lens assembly (7), an electrical connector (9), a beam expander assembly (3), a reflecting mirror assembly (4), a polygon mirror assembly (6), a motor assembly (5) and a photoelectric switch assembly (8) which are arranged on the outer side of the shell (10);
the reflector assembly (4) comprises a reflector bracket (41), a reflector and a reflector pressing ring (43), wherein the reflector bracket (41) is arranged on the bottom surface of the shell (10), a counter bore is formed in the upper part of the reflector bracket, internal threads are formed in the inner side wall of the counter bore, the reflector is arranged in the counter bore, external threads matched with the internal threads are formed in the outer side of the reflector pressing ring (43), and the mirror surface of the reflector is 45 degrees with incident laser;
the motor assembly (5) comprises a motor (51), a motor support (52), a synchronous pulley and a synchronous belt (54), wherein the motor support (52) is connected to the shell (10), the motor (51) is arranged on the motor support (52), the synchronous pulley is arranged at the output end of the motor (51), and the synchronous belt (54) is sleeved on the synchronous pulley in a matched mode;
the polygon mirror assembly (6) comprises a polygon mirror base (61), a bearing arranged on the polygon mirror base (61), a transmission shaft arranged in an inner hole of the bearing, a synchronizing wheel arranged on the transmission shaft and a polygon mirror (65), wherein the synchronizing wheel is connected with the synchronous belt (54) in a matching way;
the optical fiber collimating coupler (1) is connected to the side surface of the shell (10) through the coupler flange (2), the beam expander assembly (3) is arranged in the laser incidence direction of the optical fiber collimating coupler (1), and the reflector assembly (4) is arranged in the laser incidence direction of the beam expander assembly (3) and reflects laser to the polygon mirror assembly (6); the motor assembly (5) is in transmission connection with the polygon mirror assembly (6) so as to drive the polygon mirror assembly (6) to rotate, the field lens assembly (7) is arranged in the laser reflection direction of the polygon mirror assembly (6), and laser is focused on a focal plane of the field lens assembly through the field lens assembly (7).
2. The efficient laser drilling and cleaning optical system according to claim 1, wherein the beam expander assembly (3) comprises a beam expander bracket (31) and a beam expander (32), the beam expander bracket (31) is arranged on the bottom surface of the shell (10), a threaded through hole is formed in the upper portion of the beam expander bracket, and the beam expander (32) is connected in the threaded through hole.
3. A high efficiency laser drilling and cleaning optical system according to claim 1, characterized in that the upper side edge of the polygon mirror (65) is provided with a stop tab (651) for cooperation with the optoelectronic switch assembly (8).
4. The efficient laser drilling and cleaning optical system according to claim 1, wherein the photoelectric switch assembly (8) comprises a photoelectric switch bracket and a photoelectric switch, the photoelectric switch bracket is arranged on the bottom surface of the shell (10), and the photoelectric switch is arranged on the upper part of the photoelectric switch bracket.
5. The efficient laser drilling and cleaning optical system according to claim 1, characterized in that the field lens assembly (7) comprises a field lens and a field lens flange, the field lens flange being screwed to the housing (10), the field lens being screwed to the field lens flange.
6. The efficient laser drilling and cleaning optical system according to claim 1, wherein a sealing groove (101) is arranged on the upper end face of the housing (10), and a sealing strip is arranged in the sealing groove (101).
7. The efficient laser drilling and cleaning optical system of claim 1, wherein the upper cover rim is provided with a sealing boss.
CN201810972165.3A 2018-08-24 2018-08-24 Efficient laser drilling and cleaning optical system Active CN108994455B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810972165.3A CN108994455B (en) 2018-08-24 2018-08-24 Efficient laser drilling and cleaning optical system

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Application Number Priority Date Filing Date Title
CN201810972165.3A CN108994455B (en) 2018-08-24 2018-08-24 Efficient laser drilling and cleaning optical system

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CN108994455B true CN108994455B (en) 2024-04-05

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112705841B (en) * 2020-12-18 2023-03-28 武汉理工大学 Ultrafast laser high-speed micro-nano processing system based on polygon scanning rotating mirror
CN113547238B (en) * 2021-09-23 2022-01-07 济南森峰激光科技股份有限公司 Method for increasing aperture of micro-hole of high-speed rotating mirror laser processing array
CN118455201A (en) * 2024-07-12 2024-08-09 山东产研强远激光科技有限公司 Multi-surface rotary prism type laser cleaning device and application method thereof

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CN103955061A (en) * 2014-04-22 2014-07-30 北京航天控制仪器研究所 Uniform light spot surface scanning device of laser cleaning machine
CN203941181U (en) * 2014-04-21 2014-11-12 江苏中烟工业有限责任公司 Drum rotation speed is measured and warning device
CN104971927A (en) * 2015-06-19 2015-10-14 湖州志英光电有限公司 Laser cleaning equipment based on fiber laser unit
CN206122270U (en) * 2016-08-23 2017-04-26 江苏启澜激光科技有限公司 Laser cleaning device
CN107234103A (en) * 2017-07-13 2017-10-10 长春德信光电技术有限公司 A kind of laser cleaning line scanning optics
CN107931258A (en) * 2017-12-29 2018-04-20 哈尔滨工业大学(威海) A kind of optical-fiber laser cleaning system Handheld laser output device
CN208758797U (en) * 2018-08-24 2019-04-19 浙江镭弘激光科技有限公司 A kind of efficient laser boring and cleaning optical system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102981016A (en) * 2012-12-14 2013-03-20 上海出入境检验检疫局机电产品检测技术中心 Processing system and method for detecting rotating speed of rotating object
CN203941181U (en) * 2014-04-21 2014-11-12 江苏中烟工业有限责任公司 Drum rotation speed is measured and warning device
CN103955061A (en) * 2014-04-22 2014-07-30 北京航天控制仪器研究所 Uniform light spot surface scanning device of laser cleaning machine
CN104971927A (en) * 2015-06-19 2015-10-14 湖州志英光电有限公司 Laser cleaning equipment based on fiber laser unit
CN206122270U (en) * 2016-08-23 2017-04-26 江苏启澜激光科技有限公司 Laser cleaning device
CN107234103A (en) * 2017-07-13 2017-10-10 长春德信光电技术有限公司 A kind of laser cleaning line scanning optics
CN107931258A (en) * 2017-12-29 2018-04-20 哈尔滨工业大学(威海) A kind of optical-fiber laser cleaning system Handheld laser output device
CN208758797U (en) * 2018-08-24 2019-04-19 浙江镭弘激光科技有限公司 A kind of efficient laser boring and cleaning optical system

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