CN108987417B - Display panel, manufacturing method thereof and display device - Google Patents

Display panel, manufacturing method thereof and display device Download PDF

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CN108987417B
CN108987417B CN201810835909.7A CN201810835909A CN108987417B CN 108987417 B CN108987417 B CN 108987417B CN 201810835909 A CN201810835909 A CN 201810835909A CN 108987417 B CN108987417 B CN 108987417B
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display
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induction
magnetic field
sensing
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CN108987417A (en
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李海旭
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BOE Technology Group Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259Multistep manufacturing methods

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Abstract

The invention discloses a display panel, a manufacturing method thereof and a display device, and belongs to the technical field of display. The display panel comprises a sensing assembly and a display assembly which are arranged in a stacked mode, the display assembly comprises a plurality of display units, the sensing assembly comprises a plurality of sensing units, and the sensing units are connected with the display units in a one-to-one corresponding mode; each induction unit is used for inducing an external magnetic field around the induction unit, superposing the induced external magnetic field and an initial magnetic field of the induction unit to obtain a superposed magnetic field, obtaining superposed induction voltage according to the superposed magnetic field and a reference current input to the induction unit, and inputting the superposed induction voltage to a corresponding display unit; the display units are used for emitting light according to the superposed induction voltage input by the corresponding induction units, and the change of the light emitting brightness of each display unit is used for representing the change of the initial magnetic field caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field. The invention simplifies the magnetic field display process.

Description

Display panel, manufacturing method thereof and display device
Technical Field
The invention relates to the technical field of display, in particular to a display panel, a manufacturing method of the display panel and a display device.
Background
With the development of display technology, display devices are increasingly widely used. Common display devices include smart phones, tablet computers, televisions, displays and the like.
The display device comprises a display panel and a driving circuit, wherein the driving circuit is connected with the display panel, and the display panel can display images according to driving signals input by the driving circuit. At present, a driving circuit of a display panel may be connected to a magnetic field measuring instrument, the magnetic field measuring instrument may measure a magnetic field of an environment where the magnetic field measuring instrument is located to obtain a magnetic field signal, and transmit the magnetic field signal to the driving circuit, so that the driving circuit inputs the magnetic field signal to the display panel, and the display panel displays the measured magnetic field according to the magnetic field signal. For example, in the medical field, the magnetic field measuring instrument may measure a biological magnetic field of a human body to obtain a biological magnetic field signal, and transmit the measured biological magnetic field signal to the driving circuit to input the biological magnetic field signal to the display panel by the driving circuit, and the display panel displays the biological magnetic field according to the biological magnetic field signal.
However, when the display panel displays a magnetic field, the display panel needs to be connected to a magnetic field measuring instrument, which complicates a magnetic field display process.
Disclosure of Invention
The invention provides a display panel, a manufacturing method thereof and a display device, which can solve the problem that the display process of a magnetic field is complex. The technical scheme of the invention is as follows:
in a first aspect, a display panel is provided, the display panel comprising:
the display assembly comprises a plurality of display units, the induction assembly comprises a plurality of induction units, and the induction units are connected with the display units in a one-to-one correspondence manner;
each sensing unit of the plurality of sensing units is configured to: inducing an external magnetic field around each induction unit, superposing the induced external magnetic field and the initial magnetic field of each induction unit to obtain a superposed magnetic field, obtaining superposed induction voltage according to the superposed magnetic field and the reference current input to each induction unit, and inputting the superposed induction voltage to a corresponding display unit;
each display unit of the plurality of display units is to: and enabling the display assembly to display images according to the light emission of the superposed induction voltage input by the corresponding induction unit, wherein the change of the light emission brightness of each display unit is used for representing the change of the initial magnetic field of the corresponding induction unit caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field of the corresponding induction unit.
Optionally, each sensing unit of the plurality of sensing units is further configured to: obtaining an initial induction voltage according to the initial magnetic field of each induction unit and the reference current input to each induction unit, and inputting the initial induction voltage to the corresponding display unit;
each display unit of the plurality of display units is further to: and emitting light according to the initial induction voltage input by the corresponding induction unit to enable the display assembly to display images, wherein the light emitting brightness of each display unit is used for representing the size of the initial magnetic field of the corresponding induction unit.
Optionally, each sensing unit of the plurality of sensing units comprises: the source and drain electrode layers comprise a source electrode, a drain electrode and an induction electrode, and the source electrode and the drain electrode are used for bearing reference current;
each of the plurality of display units includes: the grid electrode, the grid insulation layer, the active layer and the source drain electrode layer are sequentially arranged on the corresponding induction unit, and the source drain electrode layer comprises a source electrode and a drain electrode;
the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit.
Optionally, the display panel further comprises: the noise reduction layer is arranged between the induction assembly and the display assembly, a first through hole corresponding to each induction unit in the induction units is formed in the noise reduction layer, and a grid electrode of each display unit in the display units is connected with an induction electrode of the corresponding induction unit through the corresponding first through hole.
Optionally, the display panel further comprises: the middle insulating layer is arranged between the sensing assembly and the noise reduction layer, a second through hole corresponding to each sensing unit in the sensing units is formed in the middle insulating layer, the first through hole and the second through hole corresponding to each sensing unit are communicated, and the grid electrode of each display unit in the display units is connected with the sensing electrode of the corresponding sensing unit sequentially through the corresponding first through hole and the corresponding second through hole.
Optionally, the external magnetic field around each sensing unit is a biological magnetic field at a contact part of the living body and each sensing unit.
In a second aspect, there is provided a method of manufacturing a display panel, the method including:
forming a sensing assembly and a display assembly which are arranged in a stacked mode, wherein the display assembly comprises a plurality of display units, the sensing assembly comprises a plurality of sensing units, and the sensing units are connected with the display units in a one-to-one corresponding mode;
wherein each sensing unit of the plurality of sensing units is configured to: inducing an external magnetic field around each induction unit, superposing the induced external magnetic field and the initial magnetic field of each induction unit to obtain a superposed magnetic field, obtaining superposed induction voltage according to the superposed magnetic field and the reference current input to each induction unit, and inputting the superposed induction voltage to a corresponding display unit;
each display unit of the plurality of display units is to: and enabling the display assembly to display images according to the light emission of the superposed induction voltage input by the corresponding induction unit, wherein the change of the light emission brightness of each display unit is used for representing the change of the initial magnetic field of the corresponding induction unit caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field of the corresponding induction unit.
Optionally, a sensing assembly and a display assembly which are stacked are formed, the display assembly includes a plurality of display units, the sensing assembly includes a plurality of sensing units, the sensing units are connected with the display units in a one-to-one correspondence manner, and the method includes:
forming a plurality of induction units on a substrate, wherein each induction unit in the plurality of induction units comprises a magnet, a magnetic insulation layer, a grid electrode, a grid insulation layer, an active layer and a source drain layer which are sequentially arranged, the source drain layer comprises a source electrode, a drain electrode and an induction electrode, and the source electrode and the drain electrode are used for bearing reference current;
the method comprises the steps that a plurality of display units are formed on a substrate base plate formed with a plurality of induction units, each display unit in the plurality of display units comprises a grid electrode, a grid insulation layer, an active layer and a source drain layer which are sequentially arranged on the corresponding induction unit, the source drain layer comprises a source electrode and a drain electrode, and the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit.
Optionally, before forming a plurality of display units on the substrate on which the plurality of sensing units are formed, the method further includes:
forming an intermediate insulating layer on the substrate on which the plurality of sensing units are formed;
forming a noise reduction layer on the substrate base plate on which the intermediate insulating layer is formed;
processing the noise reduction layer and the intermediate insulating layer through a one-time composition process to form a first through hole corresponding to each sensing unit in the sensing units on the noise reduction layer, form a second through hole corresponding to each sensing unit in the sensing units on the intermediate insulating layer, and communicate the first through hole and the second through hole corresponding to each sensing unit;
forming a plurality of display cells on the substrate on which the plurality of sensing cells are formed, including:
and forming a plurality of display units on the substrate base plate on which the noise reduction layer is formed, wherein the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit through the corresponding first through hole and the corresponding second through hole.
In a third aspect, a display device is provided, which includes the display panel of the first aspect or any optional manner of the first aspect.
The technical scheme provided by the invention has the beneficial effects that:
the invention provides a display panel, a manufacturing method thereof and a display device, wherein each induction unit of the display panel can induce an external magnetic field around the induction unit, the induced external magnetic field and an initial magnetic field of the induction unit are superposed to obtain a superposed magnetic field, a superposed induction voltage is obtained according to the superposed magnetic field and a reference current input to the induction unit, the superposed induction voltage is input to a corresponding display unit, the display unit can emit light according to the superposed induction voltage input by the corresponding induction unit to enable a display component to display images, the change of the luminous brightness of each display unit is used for representing the change of the initial magnetic field caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field of the corresponding induction unit, namely, the display panel can indirectly display the external magnetic field, and the induction component is arranged in the display panel, so that the display panel is not required to be connected with a magnetic field measuring instrument, the method is favorable for solving the problem of complex display process of the magnetic field in the related technology and simplifying the display process of the magnetic field.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a display panel according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of another display panel according to an embodiment of the present invention;
FIG. 4 is a top view of an inductive component according to an embodiment of the present invention;
FIG. 5 is a cross-sectional view of an inductive component according to an embodiment of the present invention;
FIG. 6 is a graph of magnetic field versus induced voltage provided by an embodiment of the present invention;
FIG. 7 is a graph of gate voltage versus drain current for a TFT according to an embodiment of the present invention;
FIG. 8 is a flowchart illustrating a method of fabricating a display panel according to an embodiment of the present invention;
FIG. 9 is a schematic diagram illustrating a plurality of sensing units formed on a substrate according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of a substrate with a plurality of sensing units formed thereon after an intermediate insulating layer is formed thereon according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of a noise reduction layer formed on a substrate with an interlayer insulating layer formed thereon according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of a noise reduction layer and an interlayer insulating layer after forming a via hole according to an embodiment of the present invention;
fig. 13 is a schematic diagram of a substrate with a noise reduction layer formed thereon after a gate is formed thereon according to an embodiment of the present invention.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A biomagnetic field is a magnetic field that exists in an organism. Currently, the biological magnetic field most studied is a human body magnetic field, which is mainly generated by a current of a human body tissue, for example, a cardiac magnetic field generated by a cardiac current, a brain magnetic field generated by a brain current, and the like. In addition, the human body magnetic field may also be derived from a strong magnetic substance in human tissue, for example, a lung magnetic field generated by residual magnetism of a strong magnetic substance inhaled into the lung by asbestos workers and steel workers, and the like. The magnetic field of human body is lower than the earth magnetic field and the environment magnetic field (the environment magnetic field comprises the magnetic field generated by electromagnetic radiation in space and the magnetic field generated by household appliances), and the magnetic induction intensity of the human body magnetic field is about 10-5T (Tesla), the strength of induction of the ambient magnetic field is about 5 x 10-7Therefore, compared with the ambient magnetic field, the human body magnetic field is very weak, a detection instrument with extremely high sensitivity is required to be used for measurement, and the interference of the geomagnetic field and the ambient magnetic field needs to be eliminated in the measurement process.
In the related art, after a magnetic field signal is obtained by measuring a magnetic field by a magnetic field measuring instrument, the magnetic field signal is transmitted to a display device to be displayed by the display device. The method needs to connect the magnetic field measuring instrument with the display device, so the magnetic field display process is complicated. The display panel provided by the embodiment of the invention can induce and indirectly display an external magnetic field, and can simplify the magnetic field display process. The following embodiments are referred to for a detailed description of the display panel of the present invention.
Before describing in detail the solutions provided by the embodiments of the present invention, a brief description will be given of the principles involved in the present invention.
Fig. 1 is a schematic diagram of a semiconductor sample in a rectangular parallelepiped shape, in which a current I is applied in a horizontal direction of the semiconductor sample, a magnetic field B is applied in a vertical direction, charged particles (including electrons and holes) moving in the semiconductor sample are deflected by a lorentz force in the magnetic field B, the electrons and the holes are deflected in opposite directions, the electrons and the holes are finally collected on two sides of the semiconductor sample perpendicular to the current I and the magnetic field B after being deflected, and the electrons and the holes are collected on different surfaces to form additional transverse electric fields, so that the charged particles (the electrons or the holes) are subjected to a transverse electric field force, the electric field force prevents the charged particles from being further deflected, when the transverse electric field force applied to the charged particles is equal to the lorentz force applied to the charged particles, the charges accumulated on the two sides of the semiconductor sample reach equilibrium, a fixed voltage U is generated, which can be calculated using the following equation:
U=S×I×B;
Figure BDA0001744486980000061
wherein S is the current-dependent sensitivity of the device to which the current I is applied, and S is the structural factor G, the effective quantum depth t, and the Hall fine number r of the majority carrierHAnd carrier concentration q.
Referring to fig. 2, a schematic structural diagram of a display panel according to an embodiment of the present invention is shown, and referring to fig. 2, the display panel includes: the display assembly 20 comprises a plurality of display units 200, the sensing assembly 10 comprises a plurality of sensing units 100, and the plurality of sensing units 100 are connected with the plurality of display units 200 in a one-to-one correspondence manner.
Each sensing unit 100 of the plurality of sensing units 100 is configured to: inducing an external magnetic field around each induction unit 100, superposing the induced external magnetic field and the initial magnetic field of each induction unit 100 to obtain a superposed magnetic field, obtaining a superposed induction voltage according to the superposed magnetic field and a reference current input to each induction unit 100, and inputting the superposed induction voltage to the corresponding display unit 200;
each display unit 200 of the plurality of display units 200 is configured to: the display component 20 displays images according to the superimposed induced voltage input by the corresponding induction unit 100, and the change of the light emitting brightness of each display unit 200 is used for representing the change of the initial magnetic field of the corresponding induction unit 100 caused by the influence of the external magnetic field around the corresponding induction unit 100 on the initial magnetic field of the corresponding induction unit 100. Illustratively, the sensing unit a1 corresponds to the display unit a2, and the change of the light emitting brightness of the display unit a2 is used for representing the change of the initial magnetic field of the sensing unit a1 caused by the influence of the external magnetic field around the sensing unit a1 on the initial magnetic field of the sensing unit a 1.
In summary, in the display panel provided in the embodiment of the present invention, the change of the luminance of the display unit is used to represent the change of the initial magnetic field of the corresponding sensing unit caused by the influence of the external magnetic field around the corresponding sensing unit on the initial magnetic field of the corresponding sensing unit, so that the display component can indirectly display the external magnetic field, and the sensing component is disposed in the display panel, so that the display panel can sense and indirectly display the external magnetic field, which is helpful for solving the problem of complicated display process of the magnetic field and simplifying the magnetic field display process.
Alternatively, in the embodiment of the present invention, the external magnetic field may be a biological magnetic field, and specifically may be a biological magnetic field of a human body, and the external magnetic field around each sensing unit 100 may be a biological magnetic field at a contact portion of a living body with each sensing unit 100. For example, the external magnetic field around the sensing unit 100 may be a magnetic field of an arm or a heart of a human body, which is not limited in the embodiments of the present invention.
Optionally, each sensing unit 100 of the plurality of sensing units 100 is further configured to: obtaining an initial induced voltage according to the initial magnetic field of each induction unit 100 and the reference current input to each induction unit 100, and inputting the initial induced voltage to the corresponding display unit 200; each display unit 200 of the plurality of display units 200 is configured to: the display component 20 displays images according to the initial induced voltage input by the corresponding induction unit 100, and the brightness of each display unit 200 is used for representing the magnitude of the initial magnetic field of the corresponding induction unit 100. Illustratively, the sensing unit a1 corresponds to the display unit a2, and the light emitting brightness of the display unit a2 is used for representing the magnitude of the initial magnetic field of the sensing unit a 1.
Further, please refer to fig. 3, which shows a schematic structural diagram of another display panel according to an embodiment of the present invention, wherein fig. 3 illustrates an example in which the display assembly 20 includes a display unit 200, the sensing assembly 10 includes a sensing unit 100, and the sensing unit 100 corresponds to the display unit 200. Referring to fig. 2 and 3, each of the plurality of sensing units 100 includes: the Thin Film Transistor (TFT) comprises a magnet 101, a magnetic insulating layer 102, a Gate (Gate) 103, a Gate insulating layer (Gate Insulator) 104, an Active layer (Active) 105 and a source drain layer 106 which are sequentially arranged on a substrate 00, wherein the source drain layer 106 comprises a source 1061, a drain (not shown in FIG. 3) and an induction electrode 1062, the Gate 103, the source 1061 and the drain of each induction unit 100 form a Thin Film Transistor (TFT), and the source 1061 and the drain of the TFT are used for bearing reference current; each display unit 200 of the plurality of display units 200 includes: the gate 201, the gate insulating layer 202, the active layer 203 and the source drain layer 204 are sequentially arranged on the sensing unit 100 corresponding to the display unit 200, the source drain layer 204 comprises a source 2041 and a drain 2042, and the gate 201, the source 2041 and the drain 2042 of each display unit 200 form a TFT; the gate electrode 201 of each display cell 200 of the plurality of display cells 200 is connected to the sensing electrode 1062 of the corresponding sensing cell 100. It should be noted that, in the embodiment of the present invention, the source 1061, the drain and the sensing electrode 1062 of the sensing unit 100 are located in the same layer as an example, in practical applications, the source 1061 and the drain of the sensing unit 100 may be located in the same layer, and the sensing electrode 1062 and the source 1061 may be located in different layers, which is not limited in the embodiment of the present invention.
As shown in fig. 3, the Display module 20 further includes a Passivation layer (PVX) 205 disposed on the source/drain layer 204 and another film structure 206 disposed on the Passivation layer 205, where the other film structure 206 is different according to a difference of the Display module 20, for example, in a Liquid Crystal Display (LCD) Display module, the other film structure 206 may include a pixel electrode, a Liquid Crystal, a color filter substrate, and the like, and the color filter substrate includes a substrate and a common electrode, a color resistance layer, a black matrix, and the like disposed on the substrate; in an Organic Light-Emitting Diode (OLED) display module, the other film structure 206 may include an anode, an Organic Light-Emitting layer, a cathode, and the like, which are not described herein again.
Further, with continued reference to fig. 3, the display panel further includes: the noise reduction layer 30 is disposed between the sensing assembly 10 and the display assembly 20, a first through hole corresponding to each sensing unit 100 of the plurality of sensing units 100 is disposed on the noise reduction layer 30, and the gate 201 of each display unit 200 of the plurality of display units 200 is connected to the sensing electrode 1062 of the corresponding sensing unit 100 through the corresponding first through hole. As shown in fig. 3, each sensing unit 100 includes two sensing electrodes 1062, two first through holes corresponding to each sensing unit 100 are disposed on the noise reduction layer 30, and two ends of the gate 201 of each display unit 200 are connected to the two sensing electrodes 1062 of the corresponding sensing unit 100 through the two corresponding first through holes. In the embodiment of the present invention, the noise reduction layer 30 may be an organic layer formed by using an organic resin material, and the thickness of the noise reduction layer 30 may range from 1.5 micrometers to 2 micrometers. The noise reduction layer 30 can isolate the sensing assembly 10 from the display assembly 20, so that the sensing assembly 10 and the display assembly 20 have a larger distance, and signals of the sensing assembly 10 and signals of the display assembly 20 are prevented from interfering with each other; in addition, the noise reduction layer 30 may be disposed to planarize the surface of the sensing assembly 10 to provide a planar surface for the display assembly 20.
Further, with continued reference to fig. 3, the display panel further includes: the middle insulating layer 40 is disposed between the sensing assembly 10 and the noise reduction layer 30, a second through hole corresponding to each sensing unit 100 in the plurality of sensing units 100 is disposed on the middle insulating layer 40, the first through hole and the second through hole corresponding to each sensing unit 100 are communicated, and the gate 201 of each display unit 200 in the plurality of display units 200 is sequentially connected to the sensing electrode 1062 of the corresponding sensing unit 100 through the corresponding first through hole and the corresponding second through hole. As shown in fig. 3, two second through holes corresponding to each sensing unit 100 are formed in the middle insulating layer 40, two first through holes and two second through holes corresponding to each sensing unit 100 are in one-to-one correspondence communication, and two ends of the gate 201 of each display unit 200 are sequentially connected to two sensing electrodes 1062 of the corresponding sensing unit 100 through the corresponding first through hole and the corresponding second through hole. In the embodiment of the present invention, the intermediate insulating layer 40 may be formed of silicon nitride (SiN), silicon oxide (SiO), or a mixture thereof, and the intermediate insulating layer 40 may insulate the source 1061 and the drain of the sensing unit 100 and the gate 201 of the display unit 200 from each other, so as to prevent signals from affecting each other.
Fig. 4 is a top view of a sensing assembly 10 according to an embodiment of the present invention, fig. 5 is a cross-sectional view of a portion E-E of the sensing assembly 10 shown in fig. 4, and in conjunction with fig. 4 and 5, the sensing assembly 10 further includes: a gate line 103a connected to the gate electrode 103, a plurality of sensing units 100 (only one is shown in fig. 4 and 5) of the sensing assembly 10 are arranged on the substrate 00 in an array, and the plurality of sensing units 100 form a plurality of rows on the substrate 00, the sensing assembly 10 includes a plurality of gate lines 103a, and each gate line 103a is connected to the gate electrode 103 of one row of sensing units 100. The source 1061 of the TFT of each sensing cell 100 may be connected to a reference electrode line (not shown in fig. 4 and 5), and a reference current may be applied to the source 1061 of the TFT through the reference electrode line, and when the gate 103 of the TFT controls the TFT to be turned on, the reference current on the source 1061 of the TFT is transmitted to the drain 1063 of the TFT, so as to input the reference current to the sensing cell 100. It should be noted that, since the source 1061 and the drain 1063 of the TFT of the sensing cell 100 are used for carrying a reference current, in some scenarios, the source 1061 and the drain 1063 of the TFT of the sensing cell 100 may also be referred to as reference electrodes, which is not limited in this embodiment of the present invention.
The following describes an implementation principle of the display panel according to the embodiment of the present invention with reference to fig. 2 to 5.
The existence of the magnet 101 enables an initial magnetic field perpendicular to the plate surface of the substrate base plate 00 to exist around the magnet 101, when the induction unit 100 is not in contact with an organism or no environmental magnetic field exists around the induction unit 100, the magnetic field induced by the induction unit 100 is an initial magnetic field generated by the induction unit 100, when a reference current parallel to the plate surface of the substrate base plate 00 is input to the induction unit 100 through the source 1061 and the drain 1063 of the TFT of the induction unit 100, under the action of the initial magnetic field and the reference current, the induction unit 100 generates an induction electric field perpendicular to the initial magnetic field and the reference current, and finally an initial induction voltage is formed between the two induction electrodes 1062; the initial induced voltage is applied to two ends of the gate 201 of the TFT of the display unit 200 as a switching signal of the display unit 200, and when the initial induced voltage controls the TFT of the display unit 200 to be turned on, a data signal on the source 2041 of the TFT flows to the drain 2042 of the TFT through the active layer 203, and finally the display unit 200 emits light under the action of other film structures of the display assembly 20.
The existence of the magnet 101 enables an initial magnetic field perpendicular to the plate surface of the substrate base plate 00 to exist around the magnet 101, when the induction unit 100 is in contact with an organism or an environmental magnetic field exists around the induction unit 100, the magnetic field induced by the induction unit 100 is a superposed magnetic field of an external magnetic field (a biological magnetic field or an environmental magnetic field) and the initial magnetic field generated by the induction unit 100, when a reference current parallel to the plate surface of the substrate base plate 00 is input to the induction unit 100 through a source 1061 and a drain 1063 of a TFT of the induction unit 100, under the action of the superposed magnetic field and the reference current, the induction unit 100 generates an induced electric field perpendicular to the superposed magnetic field and the reference current, and finally a superposed induced voltage is formed between two induction electrodes 1062; the superimposed induced voltage is applied to two ends of the gate 201 of the TFT of the display unit 200 as a switching signal of the display unit 200, and when the superimposed induced voltage controls the TFT of the display unit 200 to be turned on, a data signal on the source 2041 of the TFT flows to the drain 2042 of the TFT through the active layer 203, and finally the display unit 200 emits light under the action of other film structures of the display module 20.
As can be seen from the above description, in the embodiment of the present invention, the induced voltage (including the initial induced voltage or the superimposed induced voltage) generated by the sensing unit 100 is used as the Gate voltage of the corresponding display unit 200, so that the Gate 201 of the display unit 200 does not need to be connected to other circuits, and the original Array substrate row driving (GOA) signal of the display unit 200 can be completely provided by the corresponding sensing unit 100. Further, the strength of the magnet 101 is an important factor determining the initial induced voltage, and the initial induced voltage can be controlled by controlling the strength of the magnet.
Fig. 6 is a graph showing a relationship between a magnetic field and an induced voltage according to an embodiment of the present invention, where fig. 6 illustrates an external magnetic field as a biological magnetic field, and when a magnetic field (a superimposed magnetic field or an initial magnetic field) sensed by the sensing unit 100 varies in a range of 0.00125 to 0.01375 (tesla) in conjunction with fig. 2 to 6, an induced voltage formed between two sensing electrodes 1062 of the sensing unit 100 is 0.0259 to 2.25 (volts), an induced voltage of a sensing unit formed of a currently used semiconductor material is concentrated between-2 to +2 (volts), an induced voltage formed by the sensing unit 100 according to an embodiment of the present invention is between 0.0259 to 2.25 and is greater than a current induced voltage range, and thus, a voltage induced by the sensing unit 100 according to an embodiment of the present invention can better satisfy a switching performance of a TFT of the display unit 200, such that a luminance of the corresponding display unit 200 has a significant variation, thereby obviously reflecting the change of the external magnetic field.
Fig. 7 is a graph of a relationship between a gate voltage (i.e., a gate voltage) and a drain current (i.e., a drain current) of a TFT of a display unit 200 according to an embodiment of the present invention, in an embodiment of the present invention, the gate voltage of the TFT of the display unit 200 (i.e., an induced voltage generated by the induction unit 100 corresponding to the display unit 200) is, in an actual production, the gate voltage of the TFT of the display unit 200 (i.e., an induced voltage generated by the induction unit 100 corresponding to the display unit 200) U can be controlled to be concentrated in a linear region shown in fig. 7, so that when the TFT of the display unit 200 is turned on, the drain current of the TFT can be changed according to a change of the gate voltage, and thus a light emitting luminance of the display unit 200 can be changed according to a change of the gate voltage of the TFT of the display unit 200, that is, a light emitting luminance of the display unit 200 can be changed according to an induced voltage, so that the change of the external magnetic field can be determined according to the change of the brightness of the image displayed by the display assembly 20, in other words, the display assembly 20 can indirectly display the external magnetic field.
In the embodiment of the present invention, the substrate 00 may be a transparent substrate, which may be a hard substrate made of a light-guiding and non-metallic material with a certain firmness, such as glass, quartz, or transparent resin, or the substrate 00 may be a flexible substrate made of a flexible material, such as Polyimide (PI). When the substrate 00 is a flexible substrate, the display panel may be a flexible display panel, and the display device including the display panel may be a flexible display device, and the flexible display device may be directly worn on an arm or a heart to monitor a biological magnetic field of a human body in real time. In addition, the sensing assembly 10 of the display panel can be attached to a specific position of a human body for a long time, and the display panel can monitor the biological magnetic field of the specific position in real time. In the embodiment of the present invention, each display unit 200 corresponds to one sensing unit 100, so the display panel has high monitoring sensitivity and wide signal loading. Optionally, in the embodiment of the present invention, the variation of the induced voltage caused by the external magnetic field may be enlarged by enhancing the initial magnetic field of the induction unit 100, enlarging the circuit, changing the film material, and the like, so as to enhance the induction accuracy and the display accuracy of the display panel.
The induction component 10 in the display panel provided by the embodiment of the invention can induce a biological magnetic field, which is essentially equivalent to a biosensor, the induction component 10 is arranged in the display panel, the noise reduction layer 30 is arranged to isolate the induction component 10 from the display component 20, so that mutual influence of circuits is avoided, the display panel can display the change of the biological magnetic field through the display component 20, monitor the change of the biological magnetic field in real time, visualize the biological magnetic field in real time, and is beneficial to health monitoring and protection. The biological magnetic field in the organism can be different under different physiological states and pathological states, and the invention can visualize the biological magnetic field in real time, and is convenient for the research of physiological and pathological aspects and the diagnosis of some diseases by utilizing the change of the biological magnetic field.
In summary, in the display panel provided in the embodiment of the present invention, the change of the luminance of the display unit is used to represent the change of the initial magnetic field of the corresponding sensing unit caused by the influence of the external magnetic field around the corresponding sensing unit on the initial magnetic field of the corresponding sensing unit, so that the display component can indirectly display the external magnetic field, and the sensing component is disposed in the display panel, so that the display panel can sense and indirectly display the external magnetic field, which is helpful for solving the problem of complicated display process of the magnetic field and simplifying the magnetic field display process.
The display panel provided by the embodiment of the invention can be applied to the following method, and the manufacturing method and the manufacturing principle of the display panel in the embodiment of the invention can be referred to the description in the following embodiments.
An embodiment of the present invention provides a method flowchart of a manufacturing method of a display panel, where the manufacturing method of the display panel may be used to manufacture the display panel shown in fig. 2 or fig. 3, and the method includes:
forming a sensing assembly and a display assembly which are arranged in a stacked mode, wherein the display assembly comprises a plurality of display units, the sensing assembly comprises a plurality of sensing units, and the sensing units are connected with the display units in a one-to-one corresponding mode;
wherein each sensing unit of the plurality of sensing units is configured to: inducing an external magnetic field around each induction unit, superposing the induced external magnetic field and the initial magnetic field of each induction unit to obtain a superposed magnetic field, obtaining superposed induction voltage according to the superposed magnetic field and the reference current input to each induction unit, and inputting the superposed induction voltage to the corresponding display unit;
each display unit of the plurality of display units is to: and emitting light according to the superposed induction voltage input by the corresponding induction unit to enable the display assembly to display images, wherein the change of the luminous brightness of each display unit is used for representing the change of the initial magnetic field of the corresponding induction unit caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field of the corresponding induction unit.
Optionally, form the response subassembly and the display module of range upon range of setting, the display module includes a plurality of display element, and the response subassembly includes a plurality of induction element, and a plurality of induction element are connected with a plurality of display element one-to-one, include:
forming a plurality of induction units on a substrate, wherein each induction unit in the plurality of induction units comprises a magnet, a magnetic insulation layer, a grid electrode, a grid insulation layer, an active layer and a source drain electrode layer which are sequentially arranged, the source drain electrode layer comprises a source electrode, a drain electrode and an induction electrode, and the source electrode and the drain electrode are used for bearing reference current;
the method comprises the steps that a plurality of display units are formed on a substrate base plate formed with a plurality of induction units, each display unit in the plurality of display units comprises a grid electrode, a grid insulation layer, an active layer and a source drain layer which are sequentially arranged on the corresponding induction unit, the source drain layer comprises a source electrode and a drain electrode, and the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit.
Optionally, before forming a plurality of display units on the substrate on which the plurality of sensing units are formed, the method further comprises:
forming an intermediate insulating layer on the substrate on which the plurality of sensing units are formed;
forming a noise reduction layer on the substrate base plate on which the intermediate insulating layer is formed;
processing the noise reduction layer and the middle insulating layer through a one-time composition process to form a first through hole corresponding to each sensing unit in the plurality of sensing units on the noise reduction layer, form a second through hole corresponding to each sensing unit in the plurality of sensing units on the middle insulating layer, and communicate the first through hole and the second through hole corresponding to each sensing unit;
forming a plurality of display cells on a substrate having a plurality of sensing cells formed thereon, comprising:
and forming a plurality of display units on the substrate base plate with the noise reduction layer, wherein the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit through the corresponding first through hole and the corresponding second through hole.
In summary, in the manufacturing method of the display panel provided by the embodiment of the invention, the change of the luminance of the display unit is used for representing the change of the initial magnetic field of the corresponding sensing unit caused by the influence of the external magnetic field around the corresponding sensing unit on the initial magnetic field of the corresponding sensing unit, so that the display component can indirectly display the external magnetic field, and the sensing component is arranged in the display panel, so that the display panel manufactured by the manufacturing method of the display panel can sense and indirectly display the external magnetic field, which is helpful for solving the problem that the display process of the magnetic field is complex, and simplifying the magnetic field display process.
Referring to fig. 8, a method flowchart of a method for manufacturing a display panel according to an embodiment of the present invention is provided, the method for manufacturing a display panel can be used for manufacturing the display panel shown in fig. 2 or fig. 3, and the embodiment of the present invention is described by taking manufacturing the display panel shown in fig. 3 as an example. Referring to fig. 8, the method includes:
step 801, forming a plurality of induction units on a substrate to obtain an induction assembly, where each induction unit in the plurality of induction units includes a magnet, a magnetic insulation layer, a gate insulation layer, an active layer, and a source drain layer, which are sequentially arranged, the source drain layer includes a source, a drain, and an induction electrode, and the source and the drain are used for bearing a reference current.
Referring to fig. 9, a schematic diagram of a substrate 00 after a plurality of sensing units 100 are formed thereon according to an embodiment of the present invention is shown, and fig. 9 illustrates one sensing unit 100 as an example. Referring to fig. 9, after forming a plurality of sensing units 100 on a substrate base plate 00, an induction assembly 10 is obtained, where each sensing unit 100 includes a magnet 101, a magnetic insulating layer 102, a gate 103, a gate insulating layer 104, an active layer 105, and a source drain layer 106, which are sequentially disposed, and in an embodiment of the present invention, forming a plurality of sensing units 100 on the substrate base plate 00 may include: a magnet 101, a magnetic insulating layer 102, a gate electrode 103, a gate insulating layer 104, an active layer 105, and a source-drain electrode layer 106 are sequentially formed on the substrate base 00. The substrate base plate 00 may be a transparent base plate, and specifically may be a hard base plate made of a light-guiding and non-metallic material having a certain firmness, such as glass, quartz, or transparent resin; alternatively, the substrate base 00 may be a flexible base formed using PI.
In the embodiment of the present invention, sequentially forming the magnet 101, the magnetic insulating layer 102, the gate 103, the gate insulating layer 104, the active layer 105, and the source drain layer 106 on the substrate 00 may include the following six steps:
step one, a magnet 101 is formed on a base substrate 00. Alternatively, the magnet 101 may be formed on the substrate base 00 by using a magnetic substance, or the finished magnet 101 may be adhered to the substrate base 00 by using a transparent optical adhesive, which is not limited in the embodiment of the present invention.
Step two, a magnetic insulating layer 102 is formed on the base substrate 00 on which the magnet 101 is formed. The magnetic insulation layer 102 may be formed of SiN, SiO, or a mixture thereof. Alternatively, a layer of SiO material with a certain thickness may be deposited on the substrate 00 on which the magnet 101 is formed by magnetron sputtering, thermal evaporation, or Plasma Enhanced Chemical Vapor Deposition (PECVD), so as to obtain a SiO material layer, and the SiO material layer is baked to obtain the magnetic insulation layer 102. In practical applications, when the magnetic insulation layer 102 includes a pattern, the magnetic insulation layer 102 may be formed by processing the SiO material layer through a one-step patterning process, which is not limited in the embodiment of the present invention.
And step three, forming a gate 103 on the substrate 00 on which the magnetic insulation layer 102 is formed. The gate electrode 103 may be formed of Mo (chinese: molybdenum), Cu (chinese: copper), Al (chinese: aluminum), or an alloy thereof. Alternatively, a layer of metal Mo with a certain thickness may be deposited on the substrate 00 on which the magnetic insulation layer 102 is formed by magnetron sputtering, thermal evaporation, or PECVD, to obtain a metal Mo material layer, and then the metal Mo material layer is processed by a one-step patterning process to obtain the gate 103. Wherein, once the picture composition technology includes: coating, exposing, developing, etching and stripping Photoresist (PR), so that the step of processing the Mo metal layer by a one-step composition process to obtain the gate 103 may include: coating the photoresist that the one deck has certain thickness on metal Mo material layer and forming the photoresist layer, adopt the mask version to expose the photoresist layer, make the photoresist layer form complete exposure area and non-exposure area, later adopt the development technology to handle, make the photoresist in complete exposure area get rid of completely, the photoresist in non-exposure area all remains, adopt the etching process to carry out the sculpture to the region that complete exposure area corresponds on the metal Mo material layer, later peel off the photoresist in non-exposure area, the regional formation grid 103 that corresponds in non-exposure area on the metal Mo material layer. It should be noted that, in the embodiment of the present invention, the gate 103 is formed by using a positive photoresist, and in practical applications, the gate 103 may also be formed by using a negative photoresist, which is not limited in the embodiment of the present invention. In addition, as can be seen from fig. 4, the gate line 103a is connected to the gate electrode 103, and the gate line 103a and the gate electrode 103 are located in the same layer, so that the gate line 103a connected to the gate electrode 103 can be formed at the same time as the gate electrode 103 is formed, which is not limited in the embodiment of the present invention.
Step four, forming a gate insulating layer 104 on the substrate 00 on which the gate electrode 103 is formed. The process of forming the gate insulating layer 104 is the same as or similar to the process of forming the magnetic insulating layer 102, and the embodiments of the present invention are not described herein again.
Step five, forming an active layer 105 on the substrate base plate 00 on which the gate insulating layer 104 is formed. The active layer 105 may be formed of a semiconductor material such as Low Temperature Polysilicon (LTPS) or Indium Gallium Zinc Oxide (IGZO). Alternatively, a layer of amorphous silicon may be deposited on the substrate 00 on which the gate insulating layer 104 is formed by magnetron sputtering, thermal evaporation, or PECVD, to obtain an amorphous silicon material layer, then the amorphous silicon material layer is annealed at a high temperature to convert the amorphous silicon into polysilicon, to obtain a polysilicon material layer, and then the polysilicon material layer is processed by a one-step composition process to obtain the active layer 105. The process of processing the polysilicon material layer by the one-step composition process may refer to the process of processing the metal Mo material layer by the one-step composition process, and the details of the embodiment of the present invention are not repeated herein.
And step six, forming a source drain layer 106 on the substrate base plate 00 with the active layer 105. As can be seen from fig. 4, the source drain layer 106 includes a source 1061, a drain 1063, and two sensing electrodes 1062, and a connection line between the source 1061 and the drain 1063 is perpendicular to a connection line between the two sensing electrodes 1062. The source/drain layer 106 may be formed of Mo, Cu, Al, or an alloy thereof. Alternatively, a layer of metal Mo with a certain thickness may be deposited on the substrate 00 on which the active layer 105 is formed by magnetron sputtering, thermal evaporation, or PECVD, to obtain a metal Mo material layer, and then the metal Mo material layer is processed by a one-step patterning process to obtain the source/drain layer 106. The third step may be referred to in the process of processing the metal Mo material layer by a one-step composition process, and this embodiment is not described herein again.
Referring to fig. 9, after a magnet 101, a magnetic insulating layer 102, a gate electrode 103, a gate insulating layer 104, an active layer 105, and a source drain layer 106 are sequentially formed on a substrate 00, a plurality of sensing cells 100 are obtained, and thus a sensing assembly 10 is obtained.
Step 802, forming an intermediate insulating layer on the substrate with the plurality of sensing units formed thereon.
Referring to fig. 10, a schematic diagram of a substrate 00 with a plurality of sensing units 100 formed thereon after forming an intermediate insulating layer 40 according to an embodiment of the invention is shown. The intermediate insulating layer 40 may be formed of SiN, SiO, or a mixture thereof. The formation process of the interlayer insulating layer 40 is similar to the formation process of the magnetic insulating layer 102, and the description of this embodiment is omitted here.
Step 803 is to form a noise reduction layer on the substrate with the interlayer insulating layer formed thereon.
Referring to fig. 11, a schematic diagram of a noise reduction layer 30 formed on a substrate 00 with an intermediate insulating layer 40 according to an embodiment of the present invention is shown. The noise reduction layer 30 may be an organic layer formed of an organic resin material, and the thickness of the noise reduction layer 30 may range from 1.5 micrometers to 2 micrometers. In the embodiment of the present invention, the noise reduction layer 30 is disposed to isolate the sensing element 10 from the display element 20 formed subsequently, so that the sensing element 10 and the display element 20 have a larger distance, and prevent signals of the sensing element 10 and signals of the display element 20 from interfering with each other, and on the other hand, the surface of the sensing element 10 can be planarized, so as to provide a planar surface for forming the display element 20. Alternatively, a layer of organic resin material may be deposited on the substrate base 00 on which the intermediate insulating layer 40 is formed by magnetron sputtering, thermal evaporation, or PECVD, and the like, the organic resin material may be formed, and the baking process may be performed to form the noise reduction layer 30.
Step 804, the noise reduction layer and the middle insulation layer are processed through a one-time composition process, so that a first through hole corresponding to each sensing unit in the plurality of sensing units is formed on the noise reduction layer, a second through hole corresponding to each sensing unit in the plurality of sensing units is formed on the middle insulation layer, and the first through hole and the second through hole corresponding to each sensing unit are communicated.
Referring to fig. 12, which shows a schematic diagram after the noise reduction layer 30 and the middle insulation layer 40 are processed by a single patterning process according to an embodiment of the present invention, referring to fig. 12, after the noise reduction layer 30 and the middle insulation layer 40 are processed by the single patterning process, two first through holes (not labeled in fig. 12) corresponding to each sensing unit 100 of the plurality of sensing units 100 are formed on the noise reduction layer 30, two second through holes (not labeled in fig. 12) corresponding to each sensing unit 100 of the plurality of sensing units 100 are formed on the middle insulation layer 40, and the first through hole and the second through hole corresponding to each sensing unit 100 are communicated to form a through hole K, that is, the two first through holes corresponding to the same sensing unit 100 are communicated with the two second through holes corresponding to the same sensing unit 100 in a one-to-one correspondence manner.
Alternatively, the process of processing the noise reduction layer 30 and the interlayer insulating layer 40 through a one-time patterning process includes: coating the photoresist that the one deck has certain thickness on the layer of making an uproar 30 of falling forms the photoresist layer, adopt the mask version to expose the photoresist layer, make the photoresist layer form complete exposure area and non-exposure area, later adopt the development technology to handle, make the photoresist in complete exposure area get rid of completely, the photoresist in non-exposure area all remains, adopt the etching process to fall the area that layer 30 and intermediate insulation layer 40 complete exposure area correspond of making an uproar and carry out the sculpture, in order to form first through-hole on the layer of making an uproar 30 of falling, form the second through-hole on intermediate insulation layer 40, and the first through-hole and the second through-hole intercommunication that correspond to same induction element, later peel off the photoresist in non-exposure area.
Step 805, forming a plurality of display units on the substrate with the noise reduction layer to obtain a display assembly, wherein the plurality of sensing units correspond to the plurality of display units one to one, each display unit in the plurality of display units comprises a gate, a gate insulation layer, an active layer and a source drain layer which are sequentially arranged on the corresponding sensing unit, the source drain layer comprises a source electrode and a drain electrode, and the gate of each display unit in the plurality of display units is connected with the sensing electrode of the corresponding sensing unit through the corresponding first through hole and the corresponding second through hole.
Referring to fig. 3, a schematic diagram of a plurality of display units 200 formed on a substrate 00 with a noise reduction layer 30 formed thereon according to an embodiment of the present invention is shown, and fig. 3 illustrates one display unit 200 as an example. Referring to fig. 3, after forming a plurality of display units 200 on the substrate 00 on which the noise reduction layer 30 is formed, a display assembly 20 is obtained, wherein the plurality of display units 200 of the display assembly 20 correspond to the plurality of sensing units 100 of the sensing assembly 10 one by one, and each display unit 200 includes: the gate 201, the gate insulating layer 202, the active layer 203, and the source drain layer 204 are sequentially disposed on the corresponding sensing unit 100, the source drain layer 204 includes a source 2041 and a drain 2042, and the gate 201 of each display unit 20 in the plurality of display units 200 is connected to the sensing electrode 1062 of the corresponding sensing unit 100 through the corresponding first via and second via.
In an embodiment of the present invention, forming the plurality of display units 200 on the substrate base 00 on which the noise reduction layer 30 is formed may include: a gate electrode 201, a gate insulating layer 202, an active layer 203, and a source/drain electrode layer 204 are sequentially formed on the substrate base 00 on which the noise reduction layer 30 is formed. Forming the plurality of display units 200 on the substrate base 00 on which the noise reduction layer 30 is formed may include the following four steps:
in step one, a gate electrode 201 is formed on a base substrate 00 on which a noise reduction layer 30 is formed. Fig. 13 is a schematic diagram of a gate 201 formed on a substrate 00 on which a noise reduction layer 30 is formed according to an embodiment of the present invention, and referring to fig. 13, each of two ends of the gate 201 is connected to a corresponding sensing electrode 1062 of the sensing unit 100 through a corresponding first through hole and a corresponding second through hole in sequence. The forming process of the gate 201 is similar to the forming process of the gate 103 in step 801, and the embodiment of the invention is not described herein again. However, since the switching signal of the TFT of the display unit 200 is derived from the sensing voltage of the corresponding sensing unit 100, it is not necessary to form a gate line connected to the gate electrode 201 in the process of forming the gate electrode 201.
Step two, a gate insulating layer 202 is formed on the substrate 00 on which the gate electrode 201 is formed.
Step three, forming an active layer 203 on the substrate base plate 00 on which the gate insulating layer 202 is formed.
Step four, forming a source drain layer 204 on the substrate base plate 00 on which the active layer 203 is formed, wherein the source drain layer 204 comprises a source 2041 and a drain 2042.
It should be noted that, the step 801 may be referred to in the forming process of the gate insulating layer 202, the forming process of the active layer 203, and the forming process of the source drain layer 204, and details are not described herein again in this embodiment.
Referring to fig. 3, in the embodiment of the present invention, the display module 20 further includes a passivation layer 205 formed on the source/drain layer 204 and another film layer structure 206 formed on the passivation layer 205, and therefore, after the source/drain layer 204 is formed on the substrate 00 on which the active layer 203 is formed, the method further includes:
and step five, forming a passivation layer 205 on the substrate 00 with the active drain layer 204 formed thereon.
The passivation layer 205 may be formed of SiN, SiO, or a mixture thereof. Alternatively, a layer of SiO material with a certain thickness may be deposited on the substrate 00 on which the active drain layer 204 is formed by magnetron sputtering, thermal evaporation, or PECVD, to obtain a SiO material layer, and then the SiO material layer is baked to obtain the passivation layer 205. In practical applications, when the passivation layer 205 includes a pattern, the passivation layer 205 may be formed by processing the SiO material layer through a one-step patterning process, which is not limited in the embodiment of the present invention.
And step six, forming other film layer structures 206 on the substrate base plate 00 with the passivation layer 205.
In the embodiment of the present invention, the other film structure 206 is different according to different display modules 20, for example, in an LCD display module, the other film structure 206 may include a pixel electrode, a liquid crystal, and a color filter substrate, where the color filter substrate includes a substrate and structures such as a common electrode, a color resist layer, and a black matrix disposed on the substrate; in an OLED display assembly, the other film layer structure 206 may include an anode, an organic light emitting layer, and a cathode. The formation process of the other film structure 206 may refer to related technologies, and the embodiment of the invention is not described herein again.
In the embodiment of the present invention, after the display module 20 is formed on the substrate base 00 on which the noise reduction layer 30 is formed, a display panel is obtained.
In summary, in the manufacturing method of the display panel provided by the embodiment of the invention, the change of the luminance of the display unit is used for representing the change of the initial magnetic field of the corresponding sensing unit caused by the influence of the external magnetic field around the corresponding sensing unit on the initial magnetic field of the corresponding sensing unit, so that the display component can indirectly display the external magnetic field, and the sensing component is arranged in the display panel, so that the display panel manufactured by the manufacturing method of the display panel can sense and indirectly display the external magnetic field, which is helpful for solving the problem that the display process of the magnetic field is complex, and simplifying the magnetic field display process.
An embodiment of the present invention further provides a display device, where the display device includes the display panel shown in fig. 2 or fig. 3, and the display device may be a wearable device such as a watch or a bracelet, or the display device may be any product or component with a display function such as electronic paper, a mobile phone, a tablet computer, a television, a notebook computer, a digital photo frame, or a navigator.
It will be understood by those skilled in the art that all or part of the steps for implementing the above embodiments may be implemented by hardware, or may be implemented by a program instructing relevant hardware, where the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, etc.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (10)

1. A display panel, comprising:
the display assembly comprises a plurality of display units, the induction assembly comprises a plurality of induction units, and the induction units are connected with the display units in a one-to-one correspondence manner;
each sensing unit of the plurality of sensing units is configured to: inducing an external magnetic field around each induction unit, superposing the induced external magnetic field and an initial magnetic field of each induction unit to obtain a superposed magnetic field, obtaining superposed induction voltage according to the superposed magnetic field and reference current input to each induction unit, and inputting the superposed induction voltage to a corresponding display unit, wherein the initial magnetic field is a magnetic field generated by a magnet in each induction unit;
each display unit of the plurality of display units is to: and enabling the display assembly to display images according to the light emission of the superposed induction voltage input by the corresponding induction unit, wherein the change of the light emission brightness of each display unit is used for representing the change of the initial magnetic field of the corresponding induction unit caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field of the corresponding induction unit.
2. The display panel according to claim 1,
each sensing unit of the plurality of sensing units is further configured to: obtaining an initial induction voltage according to the initial magnetic field of each induction unit and the reference current input to each induction unit, and inputting the initial induction voltage to the corresponding display unit;
each display unit of the plurality of display units is further to: and emitting light according to the initial induction voltage input by the corresponding induction unit to enable the display assembly to display images, wherein the light emitting brightness of each display unit is used for representing the size of the initial magnetic field of the corresponding induction unit.
3. The display panel according to claim 1,
each of the plurality of sensing units comprises: the source and drain electrode layers comprise a source electrode, a drain electrode and an induction electrode, and the source electrode and the drain electrode are used for bearing reference current;
each of the plurality of display units includes: the grid electrode, the grid insulation layer, the active layer and the source drain electrode layer are sequentially arranged on the corresponding induction unit, and the source drain electrode layer comprises a source electrode and a drain electrode;
the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit.
4. The display panel according to claim 3, characterized in that the display panel further comprises:
the noise reduction layer is arranged between the induction assembly and the display assembly, a first through hole corresponding to each induction unit in the induction units is formed in the noise reduction layer, and a grid electrode of each display unit in the display units is connected with an induction electrode of the corresponding induction unit through the corresponding first through hole.
5. The display panel according to claim 4, characterized in that the display panel further comprises:
the middle insulating layer is arranged between the sensing assembly and the noise reduction layer, a second through hole corresponding to each sensing unit in the sensing units is formed in the middle insulating layer, the first through hole and the second through hole corresponding to each sensing unit are communicated, and the grid electrode of each display unit in the display units is connected with the sensing electrode of the corresponding sensing unit sequentially through the corresponding first through hole and the corresponding second through hole.
6. The display panel according to any one of claims 1 to 5, wherein the external magnetic field around each sensing unit is a biological magnetic field at a contact portion of a living body with each sensing unit.
7. A method of manufacturing a display panel, the method comprising:
forming a sensing assembly and a display assembly which are arranged in a stacked mode, wherein the display assembly comprises a plurality of display units, the sensing assembly comprises a plurality of sensing units, and the sensing units are connected with the display units in a one-to-one corresponding mode;
wherein each sensing unit of the plurality of sensing units is configured to: inducing an external magnetic field around each induction unit, superposing the induced external magnetic field and an initial magnetic field of each induction unit to obtain a superposed magnetic field, obtaining superposed induction voltage according to the superposed magnetic field and reference current input to each induction unit, and inputting the superposed induction voltage to a corresponding display unit, wherein the initial magnetic field is a magnetic field generated by a magnet in each induction unit;
each display unit of the plurality of display units is to: and enabling the display assembly to display images according to the light emission of the superposed induction voltage input by the corresponding induction unit, wherein the change of the light emission brightness of each display unit is used for representing the change of the initial magnetic field of the corresponding induction unit caused by the influence of the external magnetic field around the corresponding induction unit on the initial magnetic field of the corresponding induction unit.
8. The method of claim 7, wherein forming a stacked sensing assembly and a display assembly, the display assembly comprising a plurality of display units, the sensing assembly comprising a plurality of sensing units, the plurality of sensing units being connected in a one-to-one correspondence with the plurality of display units comprises:
forming a plurality of induction units on a substrate, wherein each induction unit in the plurality of induction units comprises a magnet, a magnetic insulation layer, a grid electrode, a grid insulation layer, an active layer and a source drain layer which are sequentially arranged, the source drain layer comprises a source electrode, a drain electrode and an induction electrode, and the source electrode and the drain electrode are used for bearing reference current;
the method comprises the steps that a plurality of display units are formed on a substrate base plate formed with a plurality of induction units, each display unit in the plurality of display units comprises a grid electrode, a grid insulation layer, an active layer and a source drain layer which are sequentially arranged on the corresponding induction unit, the source drain layer comprises a source electrode and a drain electrode, and the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit.
9. The method of claim 8,
before forming a plurality of display cells on the substrate on which the plurality of sensing cells are formed, the method further includes:
forming an intermediate insulating layer on the substrate on which the plurality of sensing units are formed;
forming a noise reduction layer on the substrate base plate on which the intermediate insulating layer is formed;
processing the noise reduction layer and the intermediate insulating layer through a one-time composition process to form a first through hole corresponding to each sensing unit in the sensing units on the noise reduction layer, form a second through hole corresponding to each sensing unit in the sensing units on the intermediate insulating layer, and communicate the first through hole and the second through hole corresponding to each sensing unit;
forming a plurality of display cells on the substrate on which the plurality of sensing cells are formed, including:
and forming a plurality of display units on the substrate base plate on which the noise reduction layer is formed, wherein the grid electrode of each display unit in the plurality of display units is connected with the induction electrode of the corresponding induction unit through the corresponding first through hole and the corresponding second through hole.
10. A display device characterized by comprising the display panel according to any one of claims 1 to 6.
CN201810835909.7A 2018-07-26 2018-07-26 Display panel, manufacturing method thereof and display device Active CN108987417B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104571491A (en) * 2013-10-29 2015-04-29 美格纳半导体有限公司 Apparatus using Hall sensor
JP2016057181A (en) * 2014-09-10 2016-04-21 株式会社ダイヘン Magnetic detection device and display device
CN107644611A (en) * 2016-07-22 2018-01-30 京东方科技集团股份有限公司 OLED display and its pressure touch driving method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104571491A (en) * 2013-10-29 2015-04-29 美格纳半导体有限公司 Apparatus using Hall sensor
JP2016057181A (en) * 2014-09-10 2016-04-21 株式会社ダイヘン Magnetic detection device and display device
CN107644611A (en) * 2016-07-22 2018-01-30 京东方科技集团股份有限公司 OLED display and its pressure touch driving method

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