CN108957765A - A kind of method and device changing laser focal beam spot direction in space - Google Patents
A kind of method and device changing laser focal beam spot direction in space Download PDFInfo
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- CN108957765A CN108957765A CN201810977715.0A CN201810977715A CN108957765A CN 108957765 A CN108957765 A CN 108957765A CN 201810977715 A CN201810977715 A CN 201810977715A CN 108957765 A CN108957765 A CN 108957765A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1086—Beam splitting or combining systems operating by diffraction only
- G02B27/1093—Beam splitting or combining systems operating by diffraction only for use with monochromatic radiation only, e.g. devices for splitting a single laser source
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
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Abstract
The invention discloses a kind of method and devices for changing laser focal beam spot direction in space, belong to Materialbearbeitung mit Laserlicht field, this method first carries out space chirp to it before to laser beam focusing, the inclined angle of focal beam spot is controlled by changing light beam aspect ratio, the direction by controlling light beam space chirp changes the inclined direction of focal beam spot.And disclose a kind of device for realizing this method.The present invention manipulates the two spaces direction of laser focal beam spot by the space chirp direction and light beam aspect ratio for changing light beam, thus the technical issues of being unable to accurately control focus optical field distribution is solved, is had broad application prospects in the precise and tiny manufacture field of laser.
Description
Technical field
The invention belongs to Materialbearbeitung mit Laserlicht field, it is related to changing laser focal beam spot using the principle of synchronizing focus when sky
The method and device of direction in space, more particularly, to a kind of method and device for changing laser focal beam spot direction in space.
Background technique
In in the past few decades, Three-dimension process is carried out in transparent material using femtosecond laser and has developed into laser material
Expect an important branch in processing technique field.This method is not only capable of processing various optical devices, such as optical waveguide, polarization
Optical element etc., it may also be used for manufacture microfluidic system and optofluidic system etc..The interaction of laser and transparent material and material
That expects is related to the non-linear absorption properties of photon, and the zone of action of laser and material is influenced by focal point light distribution.
In recent years, synchronizing focus (SSTF) method is used in femtosecond laser in the process of transparent material when empty, it
It can reduce the axial dimension of focus spot, therefore be mainly used for improving the axial resolution of laser processing.For example, in the Chinese Academy of Sciences
What winged equal axial length that focus is controlled by SSTF method of extra large optical precision optical machinery research institute, is manufactured that cross section to justify
The microfluidic channel of shape.
Material is processed along laser light incident direction currently, traditional laser processing can only all be realized, is limited
The flexibility of laser processing technology application.Therefore, in order to improve the precision that 3D is processed, complicated structure is manufactured, is needed accurately
Control the optical field distribution of focus.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of change laser focal beam spot spaces
The method and device in direction, it is intended that the space chirp direction and light beam aspect ratio by changing light beam focus laser
The two spaces direction of hot spot is manipulated, and the technical issues of being unable to accurately control focus optical field distribution is thus solved.
To achieve the above object, according to one aspect of the present invention, a kind of change laser focal beam spot space side is provided
To method:
A method of changing laser focal beam spot direction in space, the focal beam spot that laser is focused through object lens has space side
To the direction in space includes focal beam spot inclined direction θ and tilt angleIt is characterized in that,
To space chirp is first carried out to it before laser beam focusing, the space chirp, which refers to, exists different spectral components
Space is separated, direction α and light beam aspect ratio the β characterization of the parameter space chirp of the space chirp；The light beam is vertical
The ratio between width of light beam before the horizontal width of light beam and space chirp compared after referring to space chirp；Specifically,
Light beam aspect ratio β and focal beam spot tilt angle are obtained with experiment by emulationBetween mapping relations g；
The mapping relations between the direction α of light beam space chirp and focal beam spot inclined direction θ are obtained by emulating and testing
f；
Take determine focal beam spot direction in space valued combinations (θ,), according to the mapping relations g and the mapping relationship f
The value for determining the parameter (α, β) of space chirp focuses after carrying out space chirp to laser beam using the value of (α, the β),
Obtaining direction in space is the focal beam spot for taking definite value, realizes the accurate control to focal beam spot direction in space.
Preferably, circular grating is used when space chirp, when round light beam passes through grating with vertical incidence angle, light beam is produced
Add lustre to scattered, the light of different wave length is projected with different refraction angles, and on outgoing beam cross section, the light distribution of different wave length is not
With on the annulus of radius.
Preferably, by changing the different circular grating of the parameter or switching of the circular grating, change the refraction of light beam
Angle, to control the aspect ratio of light beam.
Preferably, the light beam in space chirp direction needed for being selected when space chirp using rotatable slit passes through slit,
Stop unwanted light beam, to control the direction of light beam space chirp.
It is another aspect of this invention to provide that providing a kind of device for realizing the above method, including sequentially coaxially set
Circular grating, the first lens, rotatable slit component and the second lens set, wherein
The periodic structure of grating arranges in concentric circles in the circular grating, when work, when round light beam is to hang down
When straight incidence angle passes through grating, light beam generates dispersion, and the light of different wave length is projected with different refraction angles, transversal in outgoing beam
On face, the light distribution of different wave length is on the annulus of different radii；
First lens are used to convert collimated light beam for the outgoing beam of the circular grating, are incident to the slit
Component；
The slit component is used for the light beam in space chirp direction needed for selecting by rotation by slit, stops not needing
Light beam；
Second lens are for being focused the light beam by the slit component.
Preferably, the described device circular grating different by the parameter or switching that change the circular grating, changes light
The refraction angle of beam, to change the aspect ratio of light beam.
Preferably, first lens are axicon lens or spatial light modulator.
Preferably, second lens are spherical lens.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
1, the method for the present invention is by the space chirp direction and light beam aspect ratio of control light beam to the two of laser focal beam spot
A direction in space is manipulated, and the optical field distribution of focus is accurately controlled, and is advantageously implemented the processing of labyrinth, improves laser
The precision and application range of 3D processing；
2, apparatus of the present invention carry out space chirp to light beam by circular grating, by changing the parameter of circular grating or cutting
Change different circular gratings, thus it is possible to vary the refraction angle of light beam, to change the aspect ratio of light beam, realization inclines to focal beam spot
The manipulation of rake angle；By selectable slit component to the light beam for selecting required space chirp direction, stop unwanted
Light beam realizes the manipulation to focal beam spot inclined direction, the optical field distribution of focus is accurately controlled, in the precise and tiny manufacture field of laser
It has broad application prospects.
Detailed description of the invention
Fig. 1 is the schematic device for changing laser focal beam spot direction in space in present pre-ferred embodiments.
In all the drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1, circular grating；2, the first lens；3, slit component；4, the second lens.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The method of the present invention manipulates the direction in space of focal beam spot using synchronizing focus (SSTF) method when sky.It is different from
Common to focus, there are certain inclination, the inclinations will affect the space of focal point light field for the focal plane that SSTF method focuses
Distribution.Inclined direction is related with the preceding space chirp direction of light beam is focused, and inclined angle is related with light beam aspect ratio.Pass through
The inclined direction and tilt angle that control focal plane can change the direction in space of focal beam spot, to realize to focal beam spot shape
The Three dimensional steerable of shape.Light beam is into crossing after space chirp before width of light beam and space chirp after space stretching, space chirp
The ratio between width of light beam is defined as light beam aspect ratio (BAR).
The embodiment of the present invention provides a kind of method for changing laser focal beam spot direction in space:
A method of changing laser focal beam spot direction in space, the focal beam spot that laser is focused through object lens has space side
To the direction in space includes focal beam spot inclined direction θ and tilt angleIt is characterized in that,
To space chirp is first carried out to it before laser beam focusing, the space chirp, which refers to, exists different spectral components
Space is separated, direction α and light beam aspect ratio the β characterization of the parameter space chirp of the space chirp；The light beam is vertical
The ratio between width of light beam before the horizontal width of light beam and space chirp compared after referring to space chirp；Specifically,
Light beam aspect ratio β and focal beam spot tilt angle are obtained with experiment by emulationBetween mapping relations g；
The mapping relations between the direction α of light beam space chirp and focal beam spot inclined direction θ are obtained by emulating and testing
f；
Take determine focal beam spot direction in space valued combinations (θ,), according to the mapping relations g and the mapping relationship f
The value for determining the parameter (α, β) of space chirp focuses after carrying out space chirp to laser beam using the value of (α, the β),
Obtaining direction in space is the focal beam spot for taking definite value, realizes the accurate control to focal beam spot direction in space.
As an alternative embodiment, circular grating is used when space chirp, when round light beam is with vertical incidence angle
When passing through grating, light beam generates dispersion, and the light of different wave length is projected with different refraction angles, on outgoing beam cross section, no
The light distribution of co-wavelength is on the annulus of different radii.
As an alternative embodiment, the circular light different by the parameter of the change circular grating or switching
Grid, change the refraction angle of light beam, to change the aspect ratio of light beam.
As an alternative embodiment, space chirp direction needed for being selected when space chirp using rotatable slit
Light beam by slit, stop unwanted light beam, to control the direction of light beam space chirp.In the embodiment of the present invention,
The core of SSTF is that different spectral components are separated (i.e. space chirp) in space before light beam enters object lens.There is time domain
Focusing is because different spectral components only just generate overlapping near focal point, in the available shortest arteries and veins of focal point
Rush length and maximum peak light intensity.Another characteristic of SSTF is that there are intrinsic pulse front edges to tilt (PFT) for focal beam spot,
Leading to the light distribution of focal beam spot, there are certain directions.The direction of PFT is related with the preceding space chirp direction of light beam is focused,
The angle of PFT and light beam aspect ratio the ratio between (after space chirp with width of light beam before space chirp) are related.The method of the invention
To first space chirp is carried out to it before laser beam focusing, by the space chirp direction and the light beam aspect ratio pair that control light beam
The inclined direction of laser focal beam spot and angle are accurately controlled, to realize the two spaces to laser focal beam spot
Direction is manipulated, and realizes the processing to labyrinth.
The embodiment of the present invention also provides a kind of device for realizing the above method.Device includes: circular grating 1, the first lens
2, rotatable slit component 3 and the second lens 4.
Grating in circular grating 1 is a series of concentric structures composition, to justify symmetrical structure, when round beam orthogonal
When being incident on circular grating, spatial dispersion can occur for light beam.The light component of different wave length reflects at different angles, is being emitted
On beam cross-section, the light distribution of different wave length is on the annulus of different radii, and therefore, the spatial distribution of outgoing beam also should be
Circle is symmetrical.By changing the parameter of circular grating or switching different circular gratings, thus it is possible to vary the refraction angle of light beam, from
And change the aspect ratio of light beam, realize the manipulation to focal beam spot tilt angle.The outgoing beam of circular grating 1 is incident to first
Lens 2.
First lens 2 are used to convert collimated light beam for incident dispersed light beam, it can be axicon lens shown in figure,
It is also possible to the optical device of the achievable said function such as other kinds of lens or spatial light modulator.
Slit component 3 has the slit of a light transmission, and can rotate to any angle under the control of motor.Its function
It can be the light beam for selecting required space chirp direction, pass it through slit, and stop unwanted light beam, thus realization pair
The manipulation of focal beam spot inclined direction.
Second lens 4 obtain required space for being focused to by the space chirp light beam of slit for focusing objective len
The focal beam spot in direction.The lens can be spherical lens shown in figure, can also be other classes of achievable said function
Type lens or optical device.
The direction in space of focus spot and the characteristic of incident beam are related.Apparatus of the present invention are by circular grating 1 to light beam
Carry out space chirp；By changing the parameter of circular grating or switching different circular gratings, thus it is possible to vary the refraction angle of light beam
Degree realizes the manipulation to focal beam spot tilt angle to change the aspect ratio of light beam；First lens 2 are used for incident color
Spreading beam is converted into collimated light beam；The light beam in required space chirp direction is selected by slit component 3, is realized to focal beam spot
The manipulation of inclined direction；It is focused by the second lens 4, the focal beam spot of required direction in space can be obtained.
Method and device provided by the invention can change the direction in space of focal beam spot, have in the precise and tiny manufacture field of laser
Wide application prospect.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (8)
1. a kind of method for changing laser focal beam spot direction in space, the focal beam spot that laser is focused through object lens have space side
To the direction in space includes focal beam spot inclined direction θ and tilt angleIt is characterized in that,
To space chirp is first carried out to it before laser beam focusing, the space chirp refers to different spectral components in space
It is separated, direction α and light beam aspect ratio the β characterization of the parameter space chirp of the space chirp；The light beam aspect ratio
The ratio between the width of light beam before width of light beam and space chirp after referring to space chirp；Specifically,
Light beam aspect ratio β and focal beam spot tilt angle are obtained with experiment by emulationBetween mapping relations g；
The mapping relationship f between the direction α of light beam space chirp and focal beam spot inclined direction θ is obtained by emulating and testing；
Take the direction in space valued combinations for determining focal beam spotAccording to the mapping relations g and the mapping relationship f
The value for determining the parameter (α, β) of space chirp focuses after carrying out space chirp to laser beam using the value of (α, the β),
Obtaining direction in space is the focal beam spot for taking definite value, realizes the accurate control to focal beam spot direction in space.
2. a kind of method for changing laser focal beam spot direction in space according to claim 1, which is characterized in that space Zhou
Circular grating is used when singing, when round light beam passes through grating with vertical incidence angle, light beam generates dispersion, the light of different wave length with
Different refraction angles is projected, and on outgoing beam cross section, the light distribution of different wave length is on the annulus of different radii.
3. a kind of method for changing laser focal beam spot direction in space according to claim 2, which is characterized in that by changing
Become the parameter of the circular grating or the circular grating that switching is different, change the refraction angle of light beam, to control the vertical of light beam
Horizontal ratio.
4. a kind of method for changing laser focal beam spot direction in space according to claim 2 or 3, which is characterized in that empty
Between chirp when selected using rotatable slit needed for space chirp direction light beam by slit, stop unwanted light beam,
To control the direction of light beam space chirp.
5. for realizing the device of claim 1-4 the method, which is characterized in that including the circular light being sequentially coaxially arranged
Grid, the first lens, rotatable slit component and the second lens, wherein
The periodic structure of grating arranges in concentric circles in the circular grating, when work, when round light beam is vertically to enter
When firing angle passes through grating, light beam generates dispersion, and the light of different wave length is projected with different refraction angles, in outgoing beam cross section
On, the light distribution of different wave length is on the annulus of different radii；
First lens are used to convert collimated light beam for the outgoing beam of the circular grating, are incident to the slot set
Part；
The slit component is used for the light beam in space chirp direction needed for selecting by rotation by slit, stops unwanted light
Beam；
Second lens are for being focused the light beam by the slit component.
6. device according to claim 5, which is characterized in that different by the parameter or switching that change the circular grating
Circular grating, change the refraction angle of light beam, to change the aspect ratio of light beam.
7. device according to claim 5 or 6, which is characterized in that first lens are axicon lens or spatial light tune
Device processed.
8. device according to claim 5 or 6, which is characterized in that second lens are spherical lens.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810977715.0A CN108957765B (en) | 2018-08-27 | 2018-08-27 | Method and device for changing space direction of laser focusing light spot |
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| CN201810977715.0A CN108957765B (en) | 2018-08-27 | 2018-08-27 | Method and device for changing space direction of laser focusing light spot |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111596464A (en) * | 2020-05-28 | 2020-08-28 | 华中科技大学 | Device and method for regulating and controlling three-dimensional direction intensity of focused light spot |
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