CN108955626A - The detected with high accuracy system and position angle detection method of sub-micrometer scale - Google Patents

The detected with high accuracy system and position angle detection method of sub-micrometer scale Download PDF

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Publication number
CN108955626A
CN108955626A CN201810371395.4A CN201810371395A CN108955626A CN 108955626 A CN108955626 A CN 108955626A CN 201810371395 A CN201810371395 A CN 201810371395A CN 108955626 A CN108955626 A CN 108955626A
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China
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psd
angle
prism
lens
position sensing
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申景诗
呼夏苗
曹长庆
吴晓鹏
冯喆珺
曾晓东
王婷
陈堃
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Xidian University
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Xidian University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00—Measuring angles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G01C15/002—Active optical surveying means

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention proposes a kind of detected with high accuracy system of sub-micrometer scale and position angle detection methods, mainly solve the problems, such as that existing position and angle detection the measuring precision are low, system bulk is big, expensive comprising: optical path unit (1), probe unit (2) and information process unit (3).Wherein, probe unit (2) has used two position sensing detection chips independent measurement position and angle information simultaneously.External analog light source collimation reaches probe unit by optical path unit, and the information of voltage of acquisition is transmitted to information process unit by probe unit, and information process unit is by the position being calculated and angle value real-time display on the program page of host computer.This invention simplifies system structures, reduce system bulk, improve the sensitivity of detection process and the reliability of testing result, suitable for the target acquisition and Interference Detection to sub-micro magnitude.

Description

The detected with high accuracy system and position angle detection method of sub-micrometer scale
Technical field
The invention belongs to photodetection field, in particular to a kind of position sensing detection system can be used for target detection.
Background technique
Target detection occupies consequence in the epoch of information-based high speed development, to the distance and bearing angle of testee Detection Techniques be increasingly becoming hot spot concerned by people.Current measurement method mainly has contact and two kinds contactless. Contact type measurement has that speed is slow, may damage measured object, collide and cause additional maintenance to protect due to abrasive action Form this disadvantages of.In contrast, non-contact measurement has that measurement range is wide, speed is fast, range since there is no contact force The advantages that big, is increasingly becoming the main direction of development of precise detection technology.
Position-Sensitive Detector PSD is as a kind of photodetector, by the high-responsivity of its own, high-resolution, letter The features such as number processing is simple, shows wide in displacement measurement, three-dimensional motion measurement, tiny angle measurement and the measurement of paralleism Wealthy application prospect is favored extensively in range-measurement system.
Relative to other kinds of photoelectric sensor, the major advantage of PSD is that it is the continuity device of non-blind area, and And the measuring system of large area can be made into the case where being not necessarily to additional devices.Nowadays, PSD has been widely used in demand In the commercial and industrial application of low cost or high speed position detection, such as contactless range measurement, laser beam collimation and object The occasions such as the photoelectric tracking of body are also applied to precision optics collimation aspect, such as biomedical application, robot, process control With location information system etc..
Nowadays, the developed countries such as the U.S., Japan, Britain are studied in PSD and manufacture view has had quite high level, Its properties of product becomes better and approaching perfection day by day.Mainly focus on the research of PSD characteristic the fifties to the eighties and is converted into product from experimental study The stage of exploitation.Therefore the past application it is upper not as good as charge coupled device ccd device it is extensive.Compared to photodiode array With the progressive scan of CCD, PSD has ignored light spot shape details, directly gives hot spot position of centre of gravity, efficient and quick.Japanese pine Under, the peacekeeping Two-dimensional PSD series of products that have developed plurality of specifications, be able to satisfy different requirements such as Sweden Sitek and U.S. UDT And corresponding processing circuit, but it is expensive.Currently, the position for utilizing PSD detection chip to realize at home and angle measurement system System haves the shortcomings that big small product size, system complex, measurement accuracy are low.
Summary of the invention
PSD precision is low, size is big, complicated defect it is an object of the invention to overcoming currently on the market, provides one The detected with high accuracy system and position angle detection method of kind of sub-micrometer scale obtain position and angle with better simply structure Detected with high accuracy.
To achieve the above object, system of the invention includes: optical path unit, probe unit and information process unit, spy Sign is:
The optical path unit, including lens, Amici prism and 3 right-angle prisms；
The probe unit, including position sensing chip PSDBWith angle detection chip PSDA；
The Amici prism and position sensing chip PSDBOn the focal plane of lens, i.e., at 175mm after lens, Angle detection chip PSDAAt the position 83.5mm after lens；
Laser is beaten by lens is divided into two beams on Amici prism, a branch of to be reflected into position sensing chip PSDB, another beam After reaching the first right-angle prism through Amici prism, then it is successively totally reflected to the second right-angle prism and third right-angle prism, reached Angle detection chip PSDA。
Further, information process unit includes:
Data acquisition module is used for acquisition position detection chip PSDBWith angle detection chip PSDAVoltage value on electrode；
Position and angle value is calculated for that will acquire collected voltage value in data module in data processing module；
Data disaply moudle, for the position being calculated in data module will to be handled and angle value is shown in host computer On the program page.
To achieve the above object, the present invention carries out the detection method of position and angle using above system, including walks as follows It is rapid:
1) being irradiated to focal length with the beam collimation of the red light semiconductor laser of 632.8nm is to pass through on the lens of 175mm It is divided into two beams after Amici prism: a branch of to be reflected into position sensing chip PSDB, another beam, which penetrates, reaches the first right-angle prism, arrives Up to the light total reflection of the first right-angle prism to the second right-angle prism, angle detection chip is totally reflected to using third right-angle prism PSDA；
2) it collects light beam and is irradiated to position sensing chip PSDBThe voltage value V of upper four electrodesX1、VX2、VY1、VY1, thus count Calculate the horizontal direction position B of light beamxWith vertical position By；
3) it collects light beam and is irradiated to position sensing chip PSDAThe voltage value V ' of upper four electrodesX1、V′X2、V′Y1、V′Y1, and The horizontal direction included angle A of light beam is calculated according to the focal length of lens in systemxWith vertical direction included angle Ay；
4) position coordinates B is realized in programming on host computerx, ByWith angle value AxAnd AyReal-time display.
The present invention has the advantage that compared with prior art
First, the present invention is using two position sensing detection chips while independent measurement position and angle information, so that being System detection high speed is sensitive, accurately and reliably.
Second, the present invention uses a kind of coaxial optical path of reentrant type auto-collimation, reduces system bulk, system dimension can reach To 110mm × 85mm × 45mm.
Third, the present invention use several common prisms and lens, and structure is simple, easy to operate, cheap.
The result of actual measurement shows that detection accuracy of the present invention reaches sub-micrometer scale, size can achieve 110mm × 85mm × 45mm。
Detailed description of the invention
Fig. 1 is system block diagram of the invention；
Fig. 2 is the optical path unit structural schematic diagram in present system；
Fig. 3 is measuring method flow chart of the invention；
Fig. 4 is the real-time display figure with the present invention to angles and positions measured value in host computer.
Specific embodiment
The present invention will be further described with reference to the accompanying drawing.
Referring to Fig.1, system of the invention includes: optical path unit 1, probe unit 2 and information process unit 3.External mould Quasi- light source collimation reaches probe unit 2 by optical path unit 1, and obtained information is transmitted to information process unit by probe unit 2 3, by the position being calculated and angle value real-time display on the program page of host computer.
The analog light source uses any laser of visible light wave range, this example is in order to improve lasing efficiency and reduction Laser volume, having selected wavelength is the red light semiconductor laser of 632.8nm.
The probe unit 2, including a position sensing chip PSDBA 21 and angle detection chip PSDA22.Angle Spend detection chip PSDA22 and position sensing chip PSDB21 size includes: 2mm × 2mm, 4mm × 4mm, 9mm × 9mm, 12mm Any one in these specifications of × 12mm.The present invention is in order to make laser power concentrate photosurface size suitable and can reach precision It is required that having chosen but being not limited to PSDBThe size of detection chip is 9mm × 9mm, PSDAThe size of detection chip is 4mm × 4mm.
The information process unit 3 includes: data acquisition module 31, data processing module 32 and data disaply moudle 33.
Data acquisition module 31 acquires external analog light source and is transmitted to the voltage value on information process unit, data processing mould Position and angle value is calculated according to voltage value in block 32, and data disaply moudle 33 shows the position being calculated and angle value On the program page of host computer, the real-time accurate detection to detection target position and angle is realized.
Referring to Fig. 2, the optical path unit 1 includes lens 11, Amici prism 12, right-angle prism 13, right-angle prism 14 and straight Angle prism 15.Wherein, Amici prism 12 is located at after lens 11 at 45mm, position sensing chip PSDB21 are located at 10mm above lens Place, the first right-angle prism 13 are located at after Amici prism 12 at 60mm, and the second right-angle prism 14 is located at below the first right-angle prism 13 At 27mm, third right-angle prism 15 is located at 14 right 50mm of the second right-angle prism, position sensing chip PSDA22 are located at lens At the 37mm of top, Amici prism 12 and position sensing chip PSDB21 are located on the focal plane of lens 11.Laser passes through lens 11 It beats and is divided into two beams on Amici prism 12, it is a branch of to be reflected into position sensing chip PSDB21, another beam is arrived through Amici prism 12 Up to after the first right-angle prism 13, then it is successively totally reflected to the second right-angle prism 14 and third right-angle prism 15, angle of arrival detection Chip PSDA22。
The lens 11 use any lens of visible light series, in order to reach realization the required accuracy while avoid volume inclined Greatly, the lens of focal length f=175nm have been selected；In order to reduce light intensity loss, the N-BK7 of selection plating 350nm-700nm anti-reflection film is bis- Convex lens；In order to receive whole hot spots, it is the full-size of 50.8mm that lens, which select diameter,.
It is 50% half-reflection and half-transmission prism that the Amici prism 12, which selects reflectivity, in order to guarantee that light all passes through, no Interception occurs, but avoid because it is oversized and caused by waste, this example selects but is not limited to right angle edge lengths and is 25.4mm, Amici prism；
It is 99.99% total reflection prism that three right-angle prisms 13,14,15, which select reflectivity, in order to prevent Optical energy loss makes laser have preferable transmissivity in visible light and near infrared spectrum part, meets requirement of system design The wavelength of 632.8nm, this example select but be not limited to bevel edge plating can part reflective semitransparent film K9 glass.
Referring to Fig. 3, the method for carrying out position and angle detection using the detection system of above-mentioned sub-micrometer scale realizes step It is rapid as follows:
Step 1: two detection chips receive external analog laser.
It is irradiated on the lens 11 that focal length is 175mm, is passed through with the beam collimation of the red light semiconductor laser of 632.8nm It is divided into two beams after Amici prism 12: a branch of to be reflected into position sensing chip PSDB21, another beam is through the first right-angled edge of arrival Mirror 13 reaches the light total reflection of the first right-angle prism 13 to the second right-angle prism 14, is totally reflected using third right-angle prism 15 To angle detection chip PSDA22。
Step 2: information process unit calculates the positional value of laser.
Data collecting module collected external analog light source is transmitted to the voltage value V on information process unitX1、VX2、VY1、VY1, Data processing module is according to Position-Sensitive Detector PSDBUpper four voltage values calculate the horizontal direction position B of light beamxWith vertical side To position By:
PSDBThe one kind for belonging to semiconductor light electric position sensor, using PN structure, the principle of work is based on non-equal Even lateral photo effect forms PN junction in semiconductor substrate surface diffusion or implanted dopant, and is formed in the side of diffusingsurface Electrode.When photosurface is penetrated by inhomogeneous illumination, due to non-homogeneous lateral photo effect, formed in the direction for being parallel to junction plane Potential difference, the potential difference are divided in diffusion layer, and the voltage exported after being collected by electrode is related to the position of centre of gravity of hot spot, root The position of centre of gravity of launching spot just can be obtained according to output voltage, calculation formula is as follows:
Wherein, BxIt is the horizontal direction position of light beam, ByIt is the vertical position of light beam；VX1、VX2、VY1、VY1It is respectively Position sensing chip PSDBThe output signal voltage of each electric grade；LXAnd LYIt is position sensing chip PSD respectivelyBIn level side To the side length with photosurface on vertical direction.
Step 3: information process unit calculates the angle value of laser.
3.1) external analog light source is irradiated to position sensing chip PSDAOn 22, data acquisition module collects on chip four The voltage value V ' that electrode obtainsX1、V′X2、V′Y1、V′Y1, and according to the angle value of the focal length calculating light beam of lens 11 in system；
3.2) light beam is calculated in angle detection chip PSDAThe positional value A of upper horizontal directionxnWith the positional value of vertical direction Ayn:
Wherein, V 'X1、V′X2、V′Y1、V′Y1It is position sensing chip PSD respectivelyBThe output signal voltage of each electric grade, L′XWith L 'YIt is position sensing chip PSD respectivelyAThe side length of photosurface in the horizontal and vertical directions；
3.3) according to step 3.2) as a result, calculating light beam in angle detection chip PSDAThe angle value A of upper horizontal directionx With the angle value A of vertical directiony:
Wherein, fPSDIt is the focal length of lens 11.
Step 4: to position coordinates Bx, ByWith angle value AxAnd AyCarry out real-time display.
With reference to Fig. 4, this step is implemented as follows:
4.1) position for finely tuning external analog light source, obtains the positional value of data disaply moudle on host computer, such as by mould Intend position of Light-source micro-regulation, the horizontal direction position coordinates B of simulated laser on host computer procedure interfacexNumerical value be- 8.2993mm horizontal direction position coordinates ByFor 0.1137mm, show that laser is located at (- 8.2993,0.1137) coordinate at this time, That is target is at the 8.2993mm of the x-axis left side, and above y-axis at 0.1137mm, from the point of view of this result, position coordinates show four small Number, i.e. precision are sub-micrometer scale；
4.2) angle for finely tuning external analog light source, obtains the angle value of data disaply moudle on host computer, such as by mould Intend low-angle of Light-source micro-regulation, the horizontal direction angle value A of simulated laser on host computer procedure interfacexNumerical value be- 22.9860mrad horizontal direction position coordinates AyFor 0.3040mrad, show that simulated laser is rotated down along x-axis at this time 22.9860mrad rotates to the left 0.3040mrad along y-axis, and from the point of view of this result, position coordinates show four decimals, i.e. precision For sub-micro radian magnitude.

Claims (7)

1. a kind of detection system of sub-micrometer scale, comprising: optical path unit (1), probe unit (2) and information process unit (3), It is characterized by:
The optical path unit (1), including lens (11), Amici prism (12) and 3 right-angle prisms (13,14,15)；
The probe unit (2), including position sensing chip PSDB(21) and angle detection chip PSDA(22)；
The Amici prism (12) and position sensing chip PSDB(21) on the focal plane of lens (11), that is, after being located at lens At 175mm, angle detection chip PSDA(22) at the position 83.5mm after lens (11)；
Laser is beaten on Amici prism (12) by lens (11) is divided into two beams, a branch of to be reflected into position sensing chip PSDB(21), Another beam through Amici prism (12) reach the first right-angle prism (13) after, then be successively totally reflected to the second right-angle prism (14) and Third right-angle prism (15), angle of arrival detection chip PSDA(22)。
2. system according to claim 1, which is characterized in that information process unit (3) includes:
Data acquisition module (31) is used for acquisition position detection chip PSDB(21) and angle detection chip PSDA(22) on electrode Voltage value；
Position and angle value is calculated for that will acquire collected voltage value in data module in data processing module (32)；
Data disaply moudle (33), for the position being calculated in data module will to be handled and angle value is shown in host computer On the program page.
3. system according to claim 1, which is characterized in that Amici prism (12) selects half anti-half that reflectivity is 50% Saturating prism；It is 99.99% total reflection prism that three right-angle prisms (13,14,15), which select reflectivity,.
4. system according to claim 1, which is characterized in that angle detection chip PSDA(22) and position sensing chip PSDB(21) size includes: 2mm × 2mm, 4mm × 4mm, 9mm × 9mm, any one in these specifications of 12mm × 12mm.
5. a kind of method for carrying out position and angle detection using system described in claims, includes the following steps:
1) being irradiated to focal length with the beam collimation of the red light semiconductor laser of 632.8nm is to pass through light splitting on the lens of 175mm It is divided into two beams after prism: a branch of to be reflected into position sensing chip PSDB, another beam reaches the through the first right-angle prism is reached The light total reflection of one right-angle prism is totally reflected to angle detection chip to the second right-angle prism, using third right-angle prism PSDA；
2) it collects analog light source and is irradiated to position sensing chip PSDBThe voltage value V of upper four electrodesX1、VX2、VY1、VY1, thus count Calculate the horizontal direction position B of light beamxWith vertical position By；
3) it collects light beam and is irradiated to position sensing chip PSDAThe voltage value V of upper four electrodesX′1、VX′2、VY′1、VY′1, and according to The focal length of lens calculates the horizontal direction included angle A of light beam in systemxWith vertical direction included angle Ay；
4) position coordinates B is realized in programming on host computerx, ByWith angle value AxAnd AyReal-time display.
6. according to the method described in claim 5, it is characterized in that, calculating light beam in step 2) in position detection chip PSDBOn Horizontal direction position BxWith vertical position By, it is calculated as follows:
Wherein, VX1、VX2、VY1、VY1It is position sensing chip PSD respectivelyBThe output signal voltage of each electric grade, LXAnd LYRespectively It is position sensing chip PSDBThe side length of photosurface in the horizontal and vertical directions.
7. according to the method described in claim 5, it is characterized in that, light beam is in angle detection chip PSD in step 3)AUpper level The included angle A in directionxWith the angle A of vertical directiony, it carries out as follows:
Light beam 3a) is calculated in angle detection chip PSDAThe positional value A of upper horizontal directionxnWith the positional value A of vertical directionyn:
Wherein, V 'X1、V′X2、V′Y1、V′Y1It is position sensing chip PSD respectivelyBThe output signal voltage of each electric grade, L 'XWith L′YIt is position sensing chip PSD respectivelyAThe side length of photosurface in the horizontal and vertical directions；
Light beam 3b) is calculated in angle detection chip PSDAThe angle value A of upper horizontal directionxWith the positional value A of vertical directiony:
Wherein, fPSDIt is the focal length of lens in optical path unit.
CN201810371395.4A 2018-04-24 2018-04-24 The detected with high accuracy system and position angle detection method of sub-micrometer scale Pending CN108955626A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1849524A (en) * 2003-09-12 2006-10-18 莱卡地球系统公开股份有限公司 Method for determination of the direction to an object for surveying
CN102102989A (en) * 2010-12-13 2011-06-22 浙江大学 Vortex phase plate-based laser beam reference calibration method and device
CN102226690A (en) * 2011-03-29 2011-10-26 浙江大学 Method and device for high-accuracy and small-angle measurement
CN103134468A (en) * 2012-08-30 2013-06-05 长春理工大学 Laser space corner correction method based on double phase-sensitive detectors (PSDs)
CN105277125A (en) * 2015-11-04 2016-01-27 宁波舜宇智能科技有限公司 System and method for measuring inclined angle and displacement
CN106382912A (en) * 2016-08-19 2017-02-08 西安电子科技大学 A tooth brushing angle detecting device based on double sensors and a detecting method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1849524A (en) * 2003-09-12 2006-10-18 莱卡地球系统公开股份有限公司 Method for determination of the direction to an object for surveying
CN102102989A (en) * 2010-12-13 2011-06-22 浙江大学 Vortex phase plate-based laser beam reference calibration method and device
CN102226690A (en) * 2011-03-29 2011-10-26 浙江大学 Method and device for high-accuracy and small-angle measurement
CN103134468A (en) * 2012-08-30 2013-06-05 长春理工大学 Laser space corner correction method based on double phase-sensitive detectors (PSDs)
CN105277125A (en) * 2015-11-04 2016-01-27 宁波舜宇智能科技有限公司 System and method for measuring inclined angle and displacement
CN106382912A (en) * 2016-08-19 2017-02-08 西安电子科技大学 A tooth brushing angle detecting device based on double sensors and a detecting method thereof

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Application publication date: 20181207