CN108950485A - Coating control method, system and the pulse laser depositing device of pulse laser depositing device - Google Patents
Coating control method, system and the pulse laser depositing device of pulse laser depositing device Download PDFInfo
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- CN108950485A CN108950485A CN201810677440.9A CN201810677440A CN108950485A CN 108950485 A CN108950485 A CN 108950485A CN 201810677440 A CN201810677440 A CN 201810677440A CN 108950485 A CN108950485 A CN 108950485A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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Abstract
The present invention relates to thin-film material manufacturing technology fields, disclose coating control method, system and the pulse laser depositing device of a kind of pulse laser depositing device.The coating control method of the pulse laser depositing device, comprising: when pulse laser beam carries out plated film, acquire the brightness plumage image in vacuum chamber in real time；Analyze position data of the focal beam spot brightness data, brightness plumage shape data and laser facula in the brightness plumage image acquired in real time on target；The focal beam spot brightness data analyzed, the position data of brightness plumage shape data and laser facula on target are matched with corresponding preset normal data；And judge whether the coating process of pulse laser depositing device is normal according to matching result.The present invention is accurate, conveniently and efficiently realizes the control of the real time monitoring of pulse laser depositing device coating process, improves the working efficiency and stability of pulse laser depositing device plated film.
Description
Technical field
The present invention relates to a kind of controls of the plated film of thin-film material manufacturing technology field more particularly to pulse laser depositing device
Method, system and pulse laser depositing device.
Background technique
It is pre- when meeting in existing pulse laser depositing device (Pulsed Laser Deposition, PLD) coating process
If the pulse laser beam that control laser issues passes through when preparation condition (for example intracavitary vacuum degree, substrate heat, are passed through gas)
Enter vacuum chamber away from converging after burnt mirror, and through transmissive window, pulse laser beam target centre focus so that target object
Matter ablation, ablation object preferentially transmit along the normal direction of target and form penniform brightness plumage (Plasma plume), final to burn
Erosion object, which deposits to, forms film on substrate.
In entire coating process, experimenter, which needs real-time and accurately to monitor pulsed laser energy state in vacuum chamber, is
Whether whether face target and transmissive window the status datas such as have a stain no up to standard, pulse laser, to interrupt in abnormality
Plated film task simultaneously analyzes abnormal failure.But in practical coating process, can only tentatively be judged by human eye plumage luminance and manually
Whether the pulse laser intensity outside operation laser energy meter test vacuum chamber meets preparation process demand, and can not obtain and directly take
The real-time power data of pulse laser in vacuum chamber, also effectively can not monitor and analyze transmissive window in long-time coating process
The influence that stain and pulse laser miss the target to the real-time power data of pulse laser in vacuum chamber, influences coating process system data
Consistency and stability, lead to not accurately analyze failure cause.
Summary of the invention
In consideration of it, coating control method, system and the pulse laser that the present invention provides a kind of pulse laser depositing device are heavy
Product equipment, solve in existing pulse laser depositing device coating process can not accurate real-time monitoring pulsed laser energy state whether
Whether whether face target and transmissive window the status datas such as have a stain and influence plated film real time planning up to standard, pulse laser
And the technical issues of accident analysis.
According to one embodiment of present invention, a kind of coating control method of pulse laser depositing device is provided, comprising:
When pulse laser beam carries out plated film, the brightness plumage image in vacuum chamber is acquired in real time；It analyzes poly- in the brightness plumage image acquired in real time
Burnt hot spot brightness data, the position data of brightness plumage shape data and laser facula on target；The focal beam spot analyzed is bright
Degree evidence, the position data of brightness plumage shape data and laser facula on target are matched with corresponding preset normal data；
And judge whether the coating process of pulse laser depositing device is normal according to matching result.
Preferably, described to judge whether the coating process of pulse laser depositing device is normal according to matching result, comprising: when
The focal beam spot brightness data that analyzes, the position data of brightness plumage shape data and laser facula on target with it is corresponding preset
When normal data matches, determine that the coating process of current PRF laser deposition equipment is normal；Otherwise, it is determined that current PRF laser
The coating process of depositing device is abnormal.
Preferably, described to judge whether the coating process of pulse laser depositing device is normal according to matching result, comprising: when
When the focal beam spot brightness data of analysis is mismatched with corresponding preset normal data, the laser of pulse laser depositing device is determined
Device operation irregularity；When the brightness plumage shape data of analysis is mismatched with corresponding preset normal data, pulse laser deposition is determined
The transmissive window of equipment has a stain；And when position data of the laser facula analyzed on target and corresponding preset normal data
When mismatch, determine that the pulse laser optical path of pulse laser depositing device deviates target.
Preferably, after whether the coating process for judging pulse laser depositing device according to matching result is normal,
Further include: when judging the coating process exception of pulse laser depositing device according to matching result, prompt corresponding in matching result
Abnormal data.
Preferably, the coating control method of the pulse laser depositing device, further includes: obtain the focusing light analyzed
The historical data of the position data of spot brightness data, brightness plumage shape data and laser facula on target；And analysis acquisition
Abnormal cause in coating process of the historical data to judge pulse laser depositing device.
According to another embodiment of the invention, a kind of plated film control system of pulse laser depositing device is also provided, is wrapped
It includes: image collecting device, for acquiring the brightness plumage image in vacuum chamber in real time when pulse laser beam carries out plated film；Image analysis
Device, for analyzing the focal beam spot brightness data in the brightness plumage image that described image acquisition device acquires in real time, brightness plumage shape
The position data of data and laser facula on target；Coalignment, focal beam spot brightness data, brightness plumage for will analyze
The position data of shape data and laser facula on target is matched with corresponding preset normal data；And judgement dress
It sets, judges whether the coating process of pulse laser depositing device is normal according to the matching result of the coalignment.
Preferably, the judgment means are used for the focusing light when the coalignment analyzes described image analytical equipment
Spot brightness data, the position data of brightness plumage shape data and laser facula on target are matched with corresponding preset normal data
When, determine that the coating process of current PRF laser deposition equipment is normal；Otherwise, it is determined that the plated film of current PRF laser deposition equipment
Process exception.
Preferably, the judgment means further comprise: the first determination module, for working as the coalignment for the figure
When mismatching as the focal beam spot brightness data of analytical equipment analysis with corresponding preset normal data, pulse laser deposition is determined
The laser works of equipment are abnormal；Second determination module, for analyze described image analytical equipment when the coalignment
When brightness plumage shape data is mismatched with corresponding preset normal data, determine that the transmissive window of pulse laser depositing device has a stain；
And third determination module, the laser facula for analyzing described image analytical equipment when the coalignment is on target
When position data is mismatched with corresponding preset normal data, determine that the pulse laser optical path of pulse laser depositing device deviates target
Material.
Preferably, the plated film control system of the pulse laser depositing device, further includes: abnormal prompt device is used for
When the judgment means judge the coating process exception of pulse laser depositing device according to the matching result of the coalignment,
Prompt corresponding abnormal data in matching result；And fail analysis device, for obtaining the focal beam spot brightness number analyzed
According to the historical data of the, position data of brightness plumage shape data and laser facula on target, and analyze the historical data of acquisition with
Judge the abnormal cause in the coating process of pulse laser depositing device.
According to still another embodiment of the invention, a kind of pulse laser depositing device, including laser, transmission are also provided
The plated film control system of window, vacuum chamber and above-mentioned pulse laser depositing device, the pulse laser of the laser pass through described
Target in vacuum chamber described in transmissive window face, the image collecting device of the plated film control system of the pulse laser depositing device
Through the target in cavity described in the vacuum chamber lateral opening hole face.
Coating control method, system and the pulse laser depositing device of pulse laser depositing device provided by the invention lead to
The intracavitary brightness plumage image of real-time acquisition pulse laser deposition equipment vacuum is crossed, the focal beam spot brightness number in brightness plumage image is analyzed
According to, the position data of brightness plumage shape data and laser facula on target, and by the brightness plumage image data analyzed with it is corresponding pre-
If normal data is matched, finally judge whether the coating process of pulse laser depositing device is normal according to matching result, it is quasi-
Really, the real time monitoring control for conveniently and efficiently realizing pulse laser depositing device coating process, improves pulse laser deposition
The working efficiency and stability of equipment plated film.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described.It should be evident that drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is the flow diagram of the coating control method of one embodiment of the invention middle arteries impulse light deposition equipment.
Fig. 2 be one embodiment of the invention according to matching result judge pulse laser depositing device coating process whether
Normal flow diagram.
Fig. 3 is the flow diagram of the coating control method of another embodiment of the present invention middle arteries impulse light deposition equipment.
Fig. 4 is the flow diagram of the coating control method of another embodiment middle arteries impulse light deposition equipment of the invention.
Fig. 5 is the structural schematic diagram of the plated film control system of one embodiment of the invention middle arteries impulse light deposition equipment.
Fig. 6 is the structural schematic diagram of judgment means in one embodiment of the invention.
Fig. 7 is the structural schematic diagram of the plated film control system of another embodiment of the present invention middle arteries impulse light deposition equipment.
Fig. 8 is the structural schematic diagram of further embodiment middle arteries impulse light deposition equipment of the present invention.
Specific embodiment
Further more detailed description is made to technical solution of the present invention with reference to the accompanying drawings and detailed description.It is aobvious
So, described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Based in the present invention
Embodiment, those of ordinary skill in the art's every other embodiment obtained without making creative work,
It all should belong to the scope of protection of the invention.
In the description of the present invention, it is to be understood that, term " first ", " second " etc. are used for description purposes only, without
It can be interpreted as indication or suggestion relative importance.In the description of the present invention, it should be noted that unless otherwise specific regulation
And restriction, term " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection,
Or it is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, intermediary can also be passed through
It is indirectly connected.For the ordinary skill in the art, above-mentioned term can be understood in the present invention in conjunction with concrete condition
Concrete meaning.In addition, in the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.
Fig. 1 is the flow diagram of the coating control method of one embodiment of the invention middle arteries impulse light deposition equipment.Such as
Shown in figure, the coating control method of the pulse laser depositing device, comprising:
Step S101: when pulse laser beam carries out plated film, the brightness plumage image in vacuum chamber is acquired in real time.
It is default when meeting in pulse laser depositing device (Pulsed Laser Deposition, PLD) coating process
When preparation condition (for example intracavitary vacuum degree, substrate heat, are passed through gas), the pulse laser beam that controllable laser issues passes through
Enter vacuum chamber away from converging after burnt mirror, and through transmissive window, pulse laser beam target centre focus so that target object
Matter ablation, ablation object preferentially transmit along the normal direction of target and form penniform brightness plumage (Plasma plume), final to burn
Erosion object, which deposits to, forms film on substrate.In the present embodiment, when pulse laser beam carries out coating process, by vacuum chamber
Inner or outer side configures image collecting device such as camera, acquires in real time and saves target material in vacuum chamber and burns and formed
Brightness plumage image.
Step S102: the focal beam spot brightness data in the brightness plumage image acquired in real time, brightness plumage shape data are analyzed and is swashed
Position data of the light hot spot on target.
In the present embodiment, it can be analyzed by computer image analysis processing technique in the brightness plumage image acquired in real time
The position data of focal beam spot brightness data, brightness plumage shape data and laser facula on target.The focal beam spot brightness number
Can correspond to according to height indicates that the energy of pulse laser in vacuum chamber is strong and weak, arteries and veins in the higher corresponding expression vacuum chamber of focal beam spot brightness
The energy of impulse light is stronger.Whether the pulse laser beam that the brightness plumage shape data can indicate that laser issues is dirty in transmissive window
Point, brightness plumage shape anomaly when there are stain.Position data of the laser facula on target can indicate to rush laser optical path just
Pair or deviate target state.
Step S103: by the focal beam spot brightness data analyzed, brightness plumage shape data and laser facula on target
Position data is matched with corresponding preset normal data.
In the present embodiment, it can be first passed through in advance by coating process of experimental test under the conditions of standard parameter in vacuum
Standard brightness plumage image under the such as camera acquisition standard plating film test of the inner or outer side configuration image collecting device of chamber, in turn
Standard focal beam spot brightness data, the standard brightness plumage in standard brightness plumage image are analyzed by computer image analysis processing technique
The standard position data of shape data and laser facula on target, using the canonical reference number controlled as subsequent coating process
According to.
In the present embodiment, after the data for analyzing brightness plumage image, by the focal beam spot brightness data analyzed, brightness plumage
The position data of shape data and laser facula on target and corresponding preset standard focal beam spot brightness data, standard brightness plumage
Shape data and standard position data are matched item by item, are sentenced when the two data degree of approximation of each is within the scope of default value
Determine successful match, otherwise determines that it fails to match.
Step S104: judge whether the coating process of pulse laser depositing device is normal according to matching result.
In the present embodiment, whether just the coating process of pulse laser depositing device further can be judged according to matching result
Often.Specifically, the position data when the focal beam spot brightness data, brightness plumage shape data and laser facula analyzed on target
When matching with corresponding preset normal data, determine that the coating process of current PRF laser deposition equipment is normal；Otherwise, it is determined that
The coating process of current PRF laser deposition equipment is abnormal.
In the coating control method of the pulse laser depositing device of the present embodiment, pass through real-time acquisition pulse laser deposition
The intracavitary brightness plumage image of equipment vacuum analyzes focal beam spot brightness data, brightness plumage shape data and laser light in brightness plumage image
Position data of the spot on target, and the brightness plumage image data analyzed is matched with corresponding preset standard data, finally
Judge whether the coating process of pulse laser depositing device is normal, accurately, conveniently and efficiently realizes pulse according to matching result
The real time monitoring of laser deposition equipment coating process controls, and improves the working efficiency and stabilization of pulse laser depositing device plated film
Property.
Referring to fig. 2, in another embodiment, described that pulse laser depositing device is judged according to matching result
Whether coating process is normal, comprising:
Step S201: when the focal beam spot brightness data of analysis is mismatched with corresponding preset normal data, determine arteries and veins
The laser works of impulse light deposition equipment are abnormal.
Step S202: when the brightness plumage shape data of analysis is mismatched with corresponding preset normal data, determine that pulse swashs
The transmissive window of light deposition equipment has a stain.
Step S203: when position data of the laser facula on target of analysis is mismatched with corresponding preset normal data
When, determine that the pulse laser optical path of pulse laser depositing device deviates target.
In the present embodiment, when the focal beam spot brightness data of analysis is mismatched with corresponding preset normal data, sentence
The laser works for determining pulse laser depositing device are abnormal.When analysis brightness plumage shape data and corresponding preset normal data not
When matching, determine that the transmissive window of pulse laser depositing device has a stain.When position data of the laser facula on target of analysis
When mismatching with corresponding preset normal data, determine that the pulse laser optical path of pulse laser depositing device deviates target.Pass through
Analysis matching brightness plumage image data, accurately, conveniently and efficiently determines pulse laser depositing device plated film abnormal failure reason.
Referring to Fig. 3, in another embodiment of the invention, the coating control method of the pulse laser depositing device, packet
It includes:
Step S301: when pulse laser beam carries out plated film, the brightness plumage image in vacuum chamber is acquired in real time.
Step S302: the focal beam spot brightness data in the brightness plumage image acquired in real time, brightness plumage shape data are analyzed and is swashed
Position data of the light hot spot on target.
Step S303: by the focal beam spot brightness data analyzed, brightness plumage shape data and laser facula on target
Position data is matched with corresponding preset normal data.
Step S304: judge whether the coating process of pulse laser depositing device is normal according to matching result.
Step S305: when judging the coating process exception of pulse laser depositing device according to matching result, matching is prompted
As a result corresponding abnormal data in.
It in the present embodiment, can when judging the coating process exception of pulse laser depositing device according to matching result
Further by voice, signal lamp, jump out the modes such as prompt and prompt corresponding abnormal data in matching result, such as laser
Device operation irregularity, transmissive window, which have a stain, deviates target lamp with pulse laser optical path, in time, conveniently and efficiently realizes failure exception
Prompting, corresponding troubleshooting is made according to abnormity prompt convenient for staff.
Referring to fig. 4, in further embodiment of the present invention, the coating control method of the pulse laser depositing device, packet
It includes:
Step S401: when pulse laser beam carries out plated film, the brightness plumage image in vacuum chamber is acquired in real time.
Step S402: the focal beam spot brightness data in the brightness plumage image acquired in real time, brightness plumage shape data are analyzed and is swashed
Position data of the light hot spot on target.
Step S403: by the focal beam spot brightness data analyzed, brightness plumage shape data and laser facula on target
Position data is matched with corresponding preset normal data.
Step S404: judge whether the coating process of pulse laser depositing device is normal according to matching result.
Step S405: the focal beam spot brightness data, brightness plumage shape data and laser facula that analyze are obtained on target
Position data historical data.
Step S406: the exception analyzed in coating process of the historical data of acquisition to judge pulse laser depositing device is former
Cause.
In the present embodiment, the focal beam spot brightness data, brightness plumage shape data and laser analyzed can further be obtained
The historical data of position data of the hot spot on target, and the historical data of acquisition is analyzed to judge pulse laser depositing device
Abnormal cause in coating process, the historical data by analyzing brightness plumage image can accurately, conveniently and efficiently judge that pulse swashs
Abnormal cause in the coating process of light deposition equipment makees corresponding troubleshooting according to abnormity prompt convenient for staff.
Based on above method embodiment, the present invention also provides a kind of plated film control systems of pulse laser depositing device.Ginseng
See Fig. 5, the plated film control system 100 of the pulse laser depositing device, including image collecting device 10, image analysis apparatus
20, coalignment 30 and judgment means 40.
It is default when meeting in pulse laser depositing device (Pulsed Laser Deposition, PLD) coating process
When preparation condition (for example intracavitary vacuum degree, substrate heat, are passed through gas), the pulse laser beam that controllable laser issues passes through
Enter vacuum chamber away from converging after burnt mirror, and through transmissive window, pulse laser beam target centre focus so that target object
Matter ablation, ablation object preferentially transmit along the normal direction of target and form penniform brightness plumage (Plasma plume), final to burn
Erosion object, which deposits to, forms film on substrate.In the present embodiment, when pulse laser beam carries out coating process, by vacuum chamber
Inner or outer side configures the such as camera of described image acquisition device 10, acquires in real time and saves target material in vacuum chamber and burns
And the brightness plumage image formed.
In the present embodiment, described image analytical equipment 20 can be analyzed described by computer image analysis processing technique
Focal beam spot brightness data, brightness plumage shape data and the laser facula in brightness plumage image that image collecting device 10 acquires in real time exist
Position data on target.The focal beam spot brightness data height, which can correspond to, indicates that the energy of pulse laser in vacuum chamber is strong
Weak, focal beam spot brightness is higher, and the corresponding energy for indicating pulse laser in vacuum chamber is stronger.The brightness plumage shape data can indicate
Laser issue pulse laser beam transmissive window whether stain, brightness plumage shape anomaly when there are stain.The laser facula
Position data on target can indicate to rush laser optical path face or deviate the state of target.
In the present embodiment, it can be first passed through in advance by coating process of experimental test under the conditions of standard parameter in vacuum
Standard brightness plumage figure under the such as camera acquisition standard plating film test of the inner or outer side configuration described image acquisition device 10 of chamber
Picture, and then described image analytical equipment 20 analyzes the standard in standard brightness plumage image by computer image analysis processing technique
The standard position data of focal beam spot brightness data, standard brightness plumage shape data and laser facula on target, using as subsequent
The standard reference data of coating process control.
In the present embodiment, after the data that described image analytical equipment 20 analyzes brightness plumage image, the coalignment
30 focal beam spot brightness data, brightness plumage shape data and the laser faculas for analyzing described image analytical equipment 20 are on target
Position data and corresponding preset standard focal beam spot brightness data, standard brightness plumage shape data and standard position data item by item
It is matched, determines successful match when the two data degree of approximation of each is within the scope of default value, otherwise determine that matching is lost
It loses.
In the present embodiment, the judgment means 40 further can judge arteries and veins according to the matching result of the coalignment 30
Whether the coating process of impulse light deposition equipment is normal.Specifically, when the coalignment 30 matched described image analysis dress
Set 20 analyze focal beam spot brightness data, the position data of brightness plumage shape data and laser facula on target with it is corresponding pre-
If normal data when matching, the judgment means 40 determine that the coating process of current PRF laser deposition equipment is normal；It is no
Then, the judgment means 40 determine that the coating process of current PRF laser deposition equipment is abnormal.
In the plated film control system 100 of the embodiment of the present invention pulse laser depositing device, acquired by described image
The intracavitary brightness plumage image of the real-time acquisition pulse laser deposition equipment vacuum of device 10, described image analytical equipment 20 analyze brightness plumage figure
The position data of focal beam spot brightness data, brightness plumage shape data and laser facula on target as in, the coalignment
30 match the brightness plumage image data that described image analytical equipment 20 analyzes with corresponding preset standard data, final described
Judgment means 40 judge whether the coating process of pulse laser depositing device is normal according to the matching result of the coalignment 30,
Accurately, the real time monitoring control for conveniently and efficiently realizing pulse laser depositing device coating process, it is heavy to improve pulse laser
The working efficiency and stability of product equipment plated film.
Referring to Fig. 6, in some embodiments, the judgment means 40 further comprise the first determination module 401, second sentence
Cover half block 402 and third determination module 403.In the present embodiment, when the coalignment 30 to focal beam spot brightness data with
When corresponding preset normal data mismatches, first determination module 401 determines the laser work of pulse laser depositing device
Make abnormal.When the coalignment 30 mismatches brightness plumage shape data with corresponding preset normal data, described second sentences
Cover half block 402 determines that the transmissive window of pulse laser depositing device has a stain.When the coalignment 30 to laser facula in target
On position data when being mismatched with corresponding preset normal data, third determination module 403 determines pulse laser depositing device
Pulse laser optical path deviate target.The judgment means 40 are by analysis matching brightness plumage image data, accurately, conveniently and efficiently
Determine pulse laser depositing device plated film abnormal failure reason.
Referring to Fig. 7, in yet another embodiment of the present invention, the plated film control system of the pulse laser depositing device
100 include image collecting device 10, image analysis apparatus 20, coalignment 30, judgment means 40, abnormal prompt device 50 and event
Hinder analytical equipment 60.
In the present embodiment, in the judgment means 40 when the plated film for judging pulse laser depositing device according to matching result
When process exception, the abnormal prompt device 50 can further by voice, signal lamp, jump out the modes such as prompt and prompt
With abnormal data corresponding in result, for example laser works are abnormal, transmissive window has a stain and pulse laser optical path deviation target
Lamp in time, conveniently and efficiently realizes the prompting of failure exception, is made at corresponding failure convenient for staff according to abnormity prompt
Reason.
The fail analysis device 60 can further obtain the focal beam spot brightness that described image analytical equipment 20 analyzes
The historical data of the position data of data, brightness plumage shape data and laser facula on target, and analyze the historical data of acquisition
The abnormal cause in coating process to judge pulse laser depositing device, the historical data by analyzing brightness plumage image can be quasi-
Really, the abnormal cause in the coating process of pulse laser depositing device is conveniently and efficiently judged, convenient for staff according to different
It often reminds and makees corresponding troubleshooting.
Fig. 8 is the structural schematic diagram of further embodiment middle arteries impulse light deposition equipment of the present invention.As shown, the arteries and veins
Impulse light deposition equipment, including the pulse laser depositing device in vacuum chamber 1, laser 2, transmissive window 3 and above-described embodiment
Plated film control system 100.
In the present embodiment, the laser 2 can produce pulse laser by the way that away from converging after burnt mirror, pulse laser passes through institute
State the target 4 in vacuum chamber described in 3 face of transmissive window, pulse laser beam the target 4 centre focus so that the target 4
Substance ablation, ablation object preferentially transmit along the normal direction of target and form penniform brightness plumage 5, and ablation object deposits to substrate 6
Above form film.
The image collecting device of the plated film control system 100 of the pulse laser depositing device penetrates 1 side of vacuum chamber
The plated film control system 100 of target 4 in cavity described in face aperture face, the pulse laser depositing device acquires vacuum in real time
The image data of brightness plumage 5 in chamber 1 analyzes focal beam spot brightness data, brightness plumage shape data and laser facula in brightness plumage image
Position data on target, and the brightness plumage image data analyzed is matched with corresponding preset standard data, final root
Judge whether the coating process of pulse laser depositing device is normal according to matching result, accurately, conveniently and efficiently realizes pulse and swash
The real time monitoring of light deposition equipment coating process controls, and improves the working efficiency and stabilization of pulse laser depositing device plated film
Property.
It should be appreciated that each section of the invention can be realized with hardware, software, firmware or their combination.Above-mentioned
In embodiment, software that multiple steps or method can be executed in memory and by suitable instruction execution system with storage
Or firmware is realized.It, and in another embodiment, can be under well known in the art for example, if realized with hardware
Any one of column technology or their combination are realized: having a logic gates for realizing logic function to data-signal
Discrete logic, with suitable combinational logic gate circuit specific integrated circuit, programmable gate array (PGA), scene
Programmable gate array (FPGA) etc..
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The descriptions such as example " or " some examples " mean particular features, structures, materials, or characteristics described in conjunction with this embodiment or example
It is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are different
Surely identical embodiment or example is referred to.Moreover, particular features, structures, materials, or characteristics described can be any
It can be combined in any suitable manner in one or more embodiment or examples.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not
A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where being detached from the principle of the present invention and objective, this
The range of invention is defined by the claims and their equivalents.
Claims (10)
1. a kind of coating control method of pulse laser depositing device characterized by comprising
When pulse laser beam carries out plated film, the brightness plumage image in vacuum chamber is acquired in real time；
Focal beam spot brightness data, brightness plumage shape data and the laser facula in the brightness plumage image acquired in real time are analyzed on target
Position data；
By the focal beam spot brightness data analyzed, the position data of brightness plumage shape data and laser facula on target with it is corresponding
Preset normal data is matched；And
Judge whether the coating process of pulse laser depositing device is normal according to matching result.
2. the coating control method of pulse laser depositing device according to claim 1, which is characterized in that the basis
Judge whether the coating process of pulse laser depositing device is normal with result, comprising:
When analyze focal beam spot brightness data, the position data of brightness plumage shape data and laser facula on target with it is corresponding
When preset normal data matches, determine that the coating process of current PRF laser deposition equipment is normal；Otherwise, it is determined that current arteries and veins
The coating process of impulse light deposition equipment is abnormal.
3. the coating control method of pulse laser depositing device according to claim 1, which is characterized in that the basis
Judge whether the coating process of pulse laser depositing device is normal with result, comprising:
When the focal beam spot brightness data of analysis is mismatched with corresponding preset normal data, pulse laser depositing device is determined
Laser works it is abnormal；
When the brightness plumage shape data of analysis is mismatched with corresponding preset normal data, the saturating of pulse laser depositing device is determined
Window is penetrated to have a stain；And
When position data of the laser facula of analysis on target is mismatched with corresponding preset normal data, determine that pulse swashs
The pulse laser optical path of light deposition equipment deviates target.
4. the coating control method of pulse laser depositing device according to claim 1, which is characterized in that in the basis
After matching result judges whether the coating process of pulse laser depositing device is normal, further includes:
When judging the coating process exception of pulse laser depositing device according to matching result, prompt corresponding different in matching result
Regular data.
5. the coating control method of pulse laser depositing device according to claim 1, which is characterized in that further include:
Obtain going through for the position data of the focal beam spot brightness data, brightness plumage shape data and laser facula that analyze on target
History data；And
Analyze the abnormal cause in coating process of the historical data obtained to judge pulse laser depositing device.
6. a kind of plated film control system of pulse laser depositing device characterized by comprising
Image collecting device, for acquiring the brightness plumage image in vacuum chamber in real time when pulse laser beam carries out plated film；
Image analysis apparatus, for analyzing the focal beam spot brightness number in the brightness plumage image that described image acquisition device acquires in real time
According to, the position data of brightness plumage shape data and laser facula on target；
Coalignment, the focal beam spot brightness data, brightness plumage shape data and laser facula for will analyze are on target
Position data is matched with corresponding preset normal data；And
Whether just judgment means judge the coating process of pulse laser depositing device according to the matching result of the coalignment
Often.
7. the plated film control system of pulse laser depositing device according to claim 6, which is characterized in that the judgement dress
Set focal beam spot brightness data for analyzing described image analytical equipment when the coalignment, brightness plumage shape data and
Laser facula determines that current PRF laser deposition is set when the position data on target is matched with corresponding preset normal data
Standby coating process is normal；Otherwise, it is determined that the coating process of current PRF laser deposition equipment is abnormal.
8. the plated film control system of pulse laser depositing device according to claim 6, which is characterized in that the judgement dress
It sets and further comprises:
First determination module, focal beam spot brightness data for analyzing described image analytical equipment when the coalignment with
When corresponding preset normal data mismatches, determine that the laser works of pulse laser depositing device are abnormal；
Second determination module, brightness plumage shape data for analyzing described image analytical equipment when the coalignment with it is corresponding
When preset normal data mismatches, determine that the transmissive window of pulse laser depositing device has a stain；And
Third determination module, the laser facula for analyzing described image analytical equipment when the coalignment is on target
When position data is mismatched with corresponding preset normal data, determine that the pulse laser optical path of pulse laser depositing device deviates target
Material.
9. the plated film control system of pulse laser depositing device according to claim 6, which is characterized in that further include:
Abnormal prompt device, for judging that pulse laser deposits according to the matching result of the coalignment when the judgment means
When the coating process exception of equipment, corresponding abnormal data in matching result is prompted；And
Fail analysis device, for obtaining the focal beam spot brightness data analyzed, brightness plumage shape data and laser facula in target
The historical data of position data on material, and the historical data of acquisition is analyzed to judge the coating process of pulse laser depositing device
In abnormal cause.
10. a kind of pulse laser depositing device, which is characterized in that including laser, transmissive window, vacuum chamber and such as claim 6
To the plated film control system of 9 described in any item pulse laser depositing devices, the pulse laser of the laser passes through described
The target in vacuum chamber described in window face is penetrated, the image collecting device of the plated film control system of the pulse laser depositing device is saturating
Cross the target in cavity described in the vacuum chamber lateral opening hole face.
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| CN2018105780436 | 2018-06-07 | ||
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