CN108940996A - High-accuracy integrated circuit eccentric cleaning equipment - Google Patents
High-accuracy integrated circuit eccentric cleaning equipment Download PDFInfo
- Publication number
- CN108940996A CN108940996A CN201810843399.8A CN201810843399A CN108940996A CN 108940996 A CN108940996 A CN 108940996A CN 201810843399 A CN201810843399 A CN 201810843399A CN 108940996 A CN108940996 A CN 108940996A
- Authority
- CN
- China
- Prior art keywords
- pipe
- inlet pipe
- purge chamber
- heat
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 82
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 238000010926 purge Methods 0.000 claims abstract description 39
- 239000012530 fluid Substances 0.000 claims abstract description 25
- 238000005119 centrifugation Methods 0.000 claims abstract description 11
- 230000006835 compression Effects 0.000 claims abstract description 4
- 238000007906 compression Methods 0.000 claims abstract description 4
- 230000008676 import Effects 0.000 claims abstract description 4
- 239000007788 liquid Substances 0.000 claims description 11
- 238000005086 pumping Methods 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims description 4
- 206010037660 Pyrexia Diseases 0.000 claims 1
- 239000006210 lotion Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 description 12
- 238000001035 drying Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008236 heating water Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/06—Controlling, e.g. regulating, parameters of gas supply
- F26B21/12—Velocity of flow; Quantity of flow, e.g. by varying fan speed, by modifying cross flow area
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/005—Treatment of dryer exhaust gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/007—Heating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0217—Use of a detergent in high pressure cleaners; arrangements for supplying the same
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of high-accuracy integrated circuit eccentric cleaning equipment, including purge chamber, cleaning fluid tank, nozzle, the first heat-generating pipe, the second heat-generating pipe, cleaning pipe is centrifuged shaft, drives the motor of centrifugation shaft rotation, the first air inlet pipe and the first water inlet pipe；The clamping element for clamping element to be washed is equipped in purge chamber, clamping element is fixedly connected with centrifugation shaft, and one end of the first water inlet pipe is connect with the second heat-generating pipe, and the other end is connect with nozzle, and nozzle protrudes into purge chamber；One end of first air inlet pipe is connect with the outlet of the first heat-generating pipe, and the other end is connected to the middle part of the first water inlet pipe, and the import of the first heat-generating pipe passes through the second air inlet pipe being equipped with and is air connected with external compression；One end of cleaning pipe is connect with cleaning fluid tank, and the other end protrudes into purge chamber.Its advantages are that cleaning solution and water successively clean element, due to element as eccentric shaft does eccentric motion in purge chamber, can be cleaned comprehensively to element, cleaning effect is good.
Description
Technical field
The present invention relates to cleaning machine, especially a kind of high-accuracy integrated circuit eccentric cleaning equipment.
Background technique
All multi-products such as printed board, electronic circuit component, precision component, medical instrument, wafer and flip-chip are being processed
It needs to clean after complete, existing cleaning machine can only clean a face of these products or some position, and other positions are difficult
Cleaning；The cleaning that existing cleaning machine can only be simple simultaneously, needs in addition to increase drying device to the product drying after cleaning, because
Structure is complicated for this.
Summary of the invention
Present invention aims to solve the deficiencies of the prior art, and provides a kind of a kind of high-accuracy integrated circuit eccentric cleaning equipment.
A kind of technical solution of the invention:
A kind of high-accuracy integrated circuit eccentric cleaning equipment, including purge chamber, cleaning fluid tank, nozzle, the first heat-generating pipe, the
Two heat-generating pipes, cleaning pipe are centrifuged shaft, drive the motor of centrifugation shaft rotation, the first air inlet pipe and the first water inlet pipe；Purge chamber
Interior to be equipped with the clamping element for clamping element to be washed, clamping element is fixedly connected with centrifugation shaft, one end of the first water inlet pipe and the second hair
Heat pipe connection, the other end are connect with nozzle, and nozzle protrudes into purge chamber；The outlet of one end of the first air inlet pipe and the first heat-generating pipe
Connection, the other end are connected to the middle part of the first water inlet pipe, and the import of the first heat-generating pipe passes through the second air inlet pipe being equipped with and outside
Compressed air connection；The bottom of purge chamber is equipped with drain pipe, and the top of purge chamber is equipped with exhaust pipe, one end of cleaning pipe and cleaning
Liquid case connection, the other end protrude into purge chamber.
One kind is Preferable scheme is that be equipped with ultrasonic wave shake plate in purge chamber.
One kind is Preferable scheme is that high-accuracy integrated circuit eccentric cleaning equipment further includes rinse tank, the liquid outlet of rinse tank
It is connect by the second water inlet pipe being equipped with the second heat-generating pipe, third heat-generating pipe is equipped in rinse tank.
One kind is Preferable scheme is that high-accuracy integrated circuit eccentric cleaning equipment further includes DI water tank and stoste cabinet, DI water
The liquid outlet of case and stoste cabinet is connect with cleaning fluid tank respectively, and the second water inlet pipe is connect by third water inlet pipe with DI water tank,
Second air inlet pipe is connect by third air inlet pipe with cleaning fluid tank, and third air inlet pipe protrudes into the bottom of cleaning fluid tank, cleaning solution
The 4th heat-generating pipe is equipped in case.
It is a kind of Preferable scheme is that cleaning pipe is successively arranged horizontal pumping from cleaning fluid tank end to purge chamber end, filter and
Pneumatic operated valve, filter are connected with normally close valve, are connected with normally open valve between horizontal pumping and filter, normally open valve be connected with pneumatically every
Membrane pump.
One kind is Preferable scheme is that be equipped with solenoid valve and speed governing valve in third air inlet pipe.
One kind is Preferable scheme is that be equipped with pneumatic operated valve and needle-valve, between the pneumatic operated valve and needle-valve in first air inlet pipe
Equipped with thermocouple.
In summary technical solution, beneficial effects of the present invention: cleaning solution and water successively clean element, due to element with
Eccentric shaft eccentric motion is done in purge chamber, therefore element can be cleaned comprehensively, cleaning effect is good；Cleaning, washing
It is all completed in purge chamber with drying, cleaning efficiency is high, and cleaning is continuous, and structure is simple；Second heat-generating pipe is to by the water in it
Heating, the water after heating flow to nozzle along the first water inlet pipe, and the water after heating washes original part, therefore water washing effect
It is good.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And it can be implemented in accordance with the contents of the specification, and in order to allow above and other objects, features and advantages of the invention can
It is clearer and more comprehensible, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.
Detailed description of the invention
Fig. 1 is perspective view one of the invention；
Fig. 2 is perspective view two of the invention；
Fig. 3 is piping diagram of the invention.
Specific embodiment
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The present invention is described further with reference to the accompanying drawing.
First embodiment, as shown in Figure 1 to Figure 3, a kind of high-accuracy integrated circuit eccentric cleaning equipment, including purge chamber
10, cleaning fluid tank 20, nozzle 11, the first heat-generating pipe 30, the second heat-generating pipe 40, cleaning pipe 26, centrifugation shaft, drive centrifugation shaft
The motor 70 of rotation, the first air inlet pipe 31 and the first water inlet pipe 32；The clamping element 71 for clamping element to be washed is equipped in purge chamber 10,
Clamping element 71 is fixedly connected with centrifugation shaft, and centrifugation shaft drives clamping element 71 to do centrifugal movement, one end of the first water inlet pipe 32
It is connect with the second heat-generating pipe 40, the other end is connect with nozzle 11, and nozzle 11 protrudes into purge chamber 10；One end of first air inlet pipe 31
It is connect with the outlet of the first heat-generating pipe 30, the other end is connected to the middle part of the first water inlet pipe 32, and the import of the first heat-generating pipe 30 is logical
Cross equipped with the second air inlet pipe 33 be air connected with external compression；The bottom of purge chamber 10 is equipped with drain pipe 12, purge chamber 10
Top is equipped with exhaust pipe 13, and one end of cleaning pipe 26 is connect with cleaning fluid tank 20, and the other end protrudes into purge chamber 10.Cleaning fluid tank
20 are provided with cleaning solution, and cleaning solution enters in purge chamber 10 along cleaning pipe 26 and cleans to the element to be washed in purge chamber 10,
Since centrifugation shaft drives clamping element 71 to do eccentric motion, element to be washed does eccentric motion, therefore energy with clamping element 71 together
Enough comprehensively to clean up element to be washed, cleaning solution is discharged from drain pipe 12；After cleaning solution has cleaned element to be washed, the
Two 40 pairs of heat-generating pipes are by the water heating in it, and the water after heating flows to nozzle 11 along the first water inlet pipe 32, the water after heating
Original part is washed, element does eccentric motion with clamping element 71 together at this time, element can be washed comprehensively comprehensively,
After having washed, water is discharged from drain pipe 12；After having washed, the first heat-generating pipe 30 heats the air flowed through in it, heating
Air afterwards flows in purge chamber 10 along the first air inlet pipe 31, and what element was heated in purge chamber 10 is air-dried, cleaning
Extra hot-air is discharged from exhaust pipe 13 in room 10, and exhaust pipe 13 is connected with cooler bin 14, the cooling liquid in cooler bin 14
It is cooling to hot-air.Element can complete cleaning, washing and drying in purge chamber 10, and structure is simple, and continuity is good, efficiency
It is high.Ultrasonic wave shake plate is equipped in purge chamber 10.Ultrasonic wave shake plate generates ultrasonic wave, and ultrasonic wave carries out the dirt of element surface clear
It washes, increases element cleaning effect.
Second embodiment, as shown in Figure 1 to Figure 3, high-accuracy integrated circuit eccentric cleaning equipment further include rinse tank 50, drift
The liquid outlet of tank-washer 50 passes through the second water inlet pipe 51 being equipped with and connect with the second heat-generating pipe 40, and third is equipped in rinse tank 50 and is generated heat
Pipe 52.Rinse tank 50 is provided with rinsing liquid, and the second heat-generating pipe 40 heats the rinsing liquid in the second water inlet pipe 51, after heating
Rinsing liquid flows to nozzle 11 along the second water inlet pipe 51 and the first water inlet pipe 32, finally sprays to element from nozzle 11, to element into
Row rinsing.
3rd embodiment, as shown in Figure 1 to Figure 3, high-accuracy integrated circuit eccentric cleaning equipment further include 61 He of DI water tank
The liquid outlet of stoste cabinet 62, DI water tank 61 and stoste cabinet 62 is connect with cleaning fluid tank 20 respectively, and the second water inlet pipe 51 passes through
Third water inlet pipe 63 is connect with DI water tank 61, and the second air inlet pipe 33 is connect by third air inlet pipe 21 with cleaning fluid tank 20, and the
Three air inlet pipe 21 protrude into the bottom of cleaning fluid tank 20, are equipped with the 4th heat-generating pipe 22 in cleaning fluid tank 20.DI water tank 61 is controlled respectively
The volume of stoste, can adjust out the stoste of different solubility in cleaning fluid tank 20 in the volume and stoste cabinet 62 of interior water,
4th heat-generating pipe 22 heats the stoste in cleaning fluid tank 20, and stoste after heating flows to purge chamber 10 and right along cleaning pipe 26
Element cleaning in it.
Specifically, as shown in Figure 1 to Figure 3, cleaning pipe 26 is successively arranged horizontal from 20 end of cleaning fluid tank to 10 end of purge chamber
Pumping 23, filter 24 and pneumatic operated valve 25, filter 24 are connected with normally close valve, are connected between horizontal pumping 23 and filter 24
Normally open valve, normally open valve are connected with pneumatic diaphragm pump.
As shown in Figure 1 to Figure 3, solenoid valve 29 and speed governing valve 28 are equipped in third air inlet pipe 21, the air of compression is along the
Two air inlet pipe 33 and third air inlet pipe 21 flow in cleaning fluid tank 20, to air-blowing in cleaning fluid tank 20.Solenoid valve 29 can close
Third air inlet pipe 21, speed governing valve 28 is adjustable to enter gas flow in cleaning fluid tank 20.
As shown in Figure 1 to Figure 3, be equipped with pneumatic operated valve 25 and needle-valve 27 in the first air inlet pipe 31, pneumatic operated valve 25 and needle-valve 27 it
Between be equipped with thermocouple 34.It is first shut off pneumatic operated valve 25 and needle-valve 27, the second 40 pairs of heat-generating pipe is by the water heating in it, after heating
Water flow to nozzle 11 along the first water inlet pipe 32, the water after heating washes original part, and element is with clamping element 71 at this time
Eccentric motion is done together, element can be washed comprehensively comprehensively, and after having washed, water is discharged from drain pipe 12；Open gas
Dynamic valve 25 and needle-valve 27, the first heat-generating pipe 30 heat the air flowed through in it, and the air after heating is along the first air inlet pipe 31
It flows in purge chamber 10, what element was heated in purge chamber 10 is air-dried.
It is a specific embodiment of the invention above, it is noted that for those skilled in the art,
Various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as this hair
Bright protection scope.
Claims (7)
1. a kind of high-accuracy integrated circuit eccentric cleaning equipment, which is characterized in that including purge chamber, cleaning fluid tank, nozzle, first
Heat-generating pipe, the second heat-generating pipe, cleaning pipe are centrifuged shaft, drive the motor of centrifugation shaft rotation, the first air inlet pipe and the first water inlet
Pipe；The clamping element for clamping element to be washed is equipped in the purge chamber, the clamping element is fixedly connected with centrifugation shaft, the first water inlet
One end of pipe is connect with the second heat-generating pipe, and the other end is connect with nozzle, and the nozzle protrudes into purge chamber；The one of first air inlet pipe
End is connect with the outlet of the first heat-generating pipe, and the other end is connected to the middle part of the first water inlet pipe, and the import of first heat-generating pipe is logical
Cross equipped with the second air inlet pipe be air connected with external compression；The bottom of the purge chamber is equipped with drain pipe, the purge chamber
Top is equipped with exhaust pipe, and one end of the cleaning pipe is connect with cleaning fluid tank, and the other end protrudes into purge chamber.
2. high-accuracy integrated circuit eccentric cleaning equipment according to claim 1, which is characterized in that set in the purge chamber
There is ultrasonic wave shake plate.
3. high-accuracy integrated circuit eccentric cleaning equipment according to claim 1, which is characterized in that described high-accuracy integrated
Circuit eccentric cleaning equipment further includes rinse tank, and the liquid outlet of the rinse tank passes through the second water inlet pipe being equipped with and the second fever
Pipe connection, the rinse tank is interior to be equipped with third heat-generating pipe.
4. high-accuracy integrated circuit eccentric cleaning equipment according to claim 3, which is characterized in that described high-accuracy integrated
Circuit eccentric cleaning equipment further includes DI water tank and stoste cabinet, the liquid outlet of the DI water tank and stoste cabinet respectively with cleaning
Liquid case connection, second water inlet pipe are connect by third water inlet pipe with DI water tank, and second air inlet pipe passes through third air inlet
Pipe is connect with cleaning fluid tank, and third air inlet pipe protrudes into the bottom of cleaning fluid tank, is equipped with the 4th heat-generating pipe in the cleaning fluid tank.
5. high-accuracy integrated circuit eccentric cleaning equipment according to claim 1, which is characterized in that the cleaning pipe is from clear
Washing lotion case end to purge chamber end is successively arranged horizontal pumping, filter and pneumatic operated valve, and the filter is connected with normally close valve, described
It is connected with normally open valve between horizontal pumping and filter, the normally open valve is connected with pneumatic diaphragm pump.
6. high-accuracy integrated circuit eccentric cleaning equipment according to claim 4, which is characterized in that the third air inlet pipe
It is interior to be equipped with solenoid valve and speed governing valve.
7. high-accuracy integrated circuit eccentric cleaning equipment according to claim 4, which is characterized in that first air inlet pipe
It is interior to be equipped with pneumatic operated valve and needle-valve, thermocouple is equipped between the pneumatic operated valve and needle-valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843399.8A CN108940996A (en) | 2018-07-27 | 2018-07-27 | High-accuracy integrated circuit eccentric cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843399.8A CN108940996A (en) | 2018-07-27 | 2018-07-27 | High-accuracy integrated circuit eccentric cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108940996A true CN108940996A (en) | 2018-12-07 |
Family
ID=64465645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810843399.8A Pending CN108940996A (en) | 2018-07-27 | 2018-07-27 | High-accuracy integrated circuit eccentric cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108940996A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5224503A (en) * | 1992-06-15 | 1993-07-06 | Semitool, Inc. | Centrifugal wafer carrier cleaning apparatus |
| WO2003006183A2 (en) * | 2001-07-12 | 2003-01-23 | Semitool, Inc. | Method and apparatus for cleaning semiconductor wafers and other flat media |
| CN101559428A (en) * | 2008-04-18 | 2009-10-21 | 株式会社迪思科 | Rotary washing device and processing device |
| CN102139270A (en) * | 2010-12-23 | 2011-08-03 | 西安隆基硅材料股份有限公司 | Silicon chip cleaning dryer and method for cleaning and drying broken wire silicon chip in multi-wire cutting |
| CN104889095A (en) * | 2015-05-11 | 2015-09-09 | 北京泰拓精密清洗设备有限公司 | Multifunctional cleaning mechanism, cleaning technology and modular combined type cleaning working station |
| CN107030055A (en) * | 2017-06-21 | 2017-08-11 | 苏州司达夫超声科技有限公司 | A kind of full-automatic multi-functional cleans all-in-one |
| CN208643458U (en) * | 2018-07-27 | 2019-03-26 | 深圳市凯尔迪光电科技有限公司 | High-accuracy integrated circuit eccentric cleaning equipment |
-
2018
- 2018-07-27 CN CN201810843399.8A patent/CN108940996A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5224503A (en) * | 1992-06-15 | 1993-07-06 | Semitool, Inc. | Centrifugal wafer carrier cleaning apparatus |
| WO2003006183A2 (en) * | 2001-07-12 | 2003-01-23 | Semitool, Inc. | Method and apparatus for cleaning semiconductor wafers and other flat media |
| CN101559428A (en) * | 2008-04-18 | 2009-10-21 | 株式会社迪思科 | Rotary washing device and processing device |
| CN102139270A (en) * | 2010-12-23 | 2011-08-03 | 西安隆基硅材料股份有限公司 | Silicon chip cleaning dryer and method for cleaning and drying broken wire silicon chip in multi-wire cutting |
| CN104889095A (en) * | 2015-05-11 | 2015-09-09 | 北京泰拓精密清洗设备有限公司 | Multifunctional cleaning mechanism, cleaning technology and modular combined type cleaning working station |
| CN107030055A (en) * | 2017-06-21 | 2017-08-11 | 苏州司达夫超声科技有限公司 | A kind of full-automatic multi-functional cleans all-in-one |
| CN208643458U (en) * | 2018-07-27 | 2019-03-26 | 深圳市凯尔迪光电科技有限公司 | High-accuracy integrated circuit eccentric cleaning equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200410 Address after: 523000 1st floor, building a, No. 16, huangjinhu Industrial Zone, songmushan village, Dalang Town, Dongguan City, Guangdong Province Applicant after: Guangdong keldi Cleaning Technology Co.,Ltd. Address before: 518000 Guangdong province Shenzhen Guangming New District Office of Gongming Tian Liao community of guangqiao road hi tech park first (Guangming hi tech Park West Area) third floor No. 1 Applicant before: SHENZHEN KED OPTICAL ELECTRIC TECHNOLOGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20221212 Address after: 523770 Room 101, No. 6, jinjinhu industrial 1st Road, songmushan, Dalang Town, Dongguan City, Guangdong Province Applicant after: Guangdong jinshilan Cleaning Technology Co.,Ltd. Address before: 523000 1st floor, building a, No.16, huangjinhu Industrial Zone, songmushan village, Dalang Town, Dongguan City, Guangdong Province Applicant before: Guangdong keldi Cleaning Technology Co.,Ltd. |
|
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181207 |