CN108927713A - The polishing method of optical element - Google Patents
The polishing method of optical element Download PDFInfo
- Publication number
- CN108927713A CN108927713A CN201810747798.4A CN201810747798A CN108927713A CN 108927713 A CN108927713 A CN 108927713A CN 201810747798 A CN201810747798 A CN 201810747798A CN 108927713 A CN108927713 A CN 108927713A
- Authority
- CN
- China
- Prior art keywords
- optical element
- adhesive tape
- sealing wax
- protection face
- wax group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0055—Positioning of lenses; Marking of lenses
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention relates to a kind of polishing methods of optical element; the polishing method of optical element of the present invention replaces protective paint in the prior art using PET adhesive tape; PET adhesive tape is simple and easy to get; not only protect protection face; so that optical element is fixedly connected with rubber moulding; after polishing, PET adhesive tape is easily torn off without staying residue glue again, can be to avoid the smearing many technical problems of protective paint bring.
Description
Technical field
The present invention relates to a kind of optical element polishing field more particularly to a kind of polishing methods of optical element.
Background technique
For high-precision, diameter is extra small or the optical element of ultra-large type, is typically now thrown using classic polishing processes
Light.Classic polishing processes have following key step: upper disk, grinding, rough polishing, essence throwing, lower wall.Upper disk is a key of polishing
Process refers to and optical element is bonded on rubber moulding that upper disk process will guarantee that mechanical damage will not be generated to piece surface, also wants
There are enough adhesion strengths, the pressure and speed born when processing can be subjected to.Common upper disk mode is sealing wax group lacquer disk(-sc),
The fusing of sealing wax group is sticked on part at high temperature first, is then heated to that sealing wax group temperature can be melted by rubber moulding, at this time will
Glue film adheres in sealing wax group, to make optical element be fixed on glue film by sealing wax group.In this process in order to protect table
Face is not mechanically damaged or the influence of chemical action, and optical element should not be rolled into a ball with sealing wax and directly be contacted, general using in optics
Piece surface applies one layer of protective paint, and the presence of protective paint is avoided that optical element is directly contacted with sealing wax group, to realize to light
Learn the protection of part.
Our most-often used protective paints are shellac varnish (being commonly called as shellac), and shellac varnish only needs shellac alcohol is added
Middle dissolution can modulate to obtain, and the mass ratio of shellac and alcohol is usually 1:3.After being made into because of shellac varnish, have in shellac
Machine acid can be esterified with alcohol and generate ester, keep paint film tacky, and shellac varnish most multipotency saves half a year.And shellac varnish heat resistance is poor,
The range of disk temperature is limited during upper disk.In lacquering process, shellac varnish is coated in optical element surface using writing brush,
After the completion of polishing process, detecting again to the finish of protection face can find that finish is deteriorated.Because in lacquering process,
If brush writing skill pliability is not enough or operator is firmly excessive in painting process, it will lead to protection face and be scratched.
The method that surface applies protective paint haves the defects that the following aspects.
1, the high-temperature resistant result of protective paint is poor, is easy softening, so needing to control temperature in upper disk, cannot make temperature mistake
High or too low, if temperature is excessively high, protective paint softening is difficult to clean, if temperature is too low and sealing wax cannot be made to melt completely, fire
Paint and optical element bonding are loosely, in fact it could happen that the danger that optical element is moved or even fallen.
2, the surface smoothness of optical element burnishing surface is a very important index, but is needed in lacquering process
It smears to form one layer of uniform complete protective paint layer using writing brush, for the surface of polished completion, if undue force, meeting
So that brush writing skill forms scratch on burnishing surface surface, the finish of optical element burnishing surface is destroyed, optical element is caused to reprocess
Or even the case where waste paper.
3, the cleaning process of protective paint is more troublesome, needs for optical element to be repeatedly soaked in alcohol, be wiped repeatedly,
Also the yield rate of optical element can be reduced in operating process.
4, during using sealing wax, probably due to the thickness or uniformity smeared are inconsistent to cause optical element surface shape
It will use alcohol at seal, and during preparing protective paint, a certain proportion of moisture be mixed in alcohol, it may be
Optical element surface leaves the marking.
The object of the invention is to solve problem above, a kind of polishing method of optical element is proposed.
Summary of the invention
It is an object of the invention to propose a kind of a kind of polishing method of optical element that can substitute the prior art.
To realize foregoing purpose, the present invention adopts the following technical scheme: a kind of polishing method of optical element, for light
The burnishing surface for learning part is polished, and optical element includes opposite a burnishing surface and a protection face, and the polishing method includes
Following steps:
S1, the protection face of optical element is cleaned out, optical element is placed on a fixture fixed；
S2, the PET adhesive tape that proper width is selected according to the size of optical element, entire protection face is coated paste with PET adhesive tape
Layer protecting film is formed, extra PET adhesive tape is removed；
S3, upper disk: the protective film for posting the optical element of protective film is faced upward, and sealing wax group is then heated, in the effect of external force
Under, sealing wax group is adhered on the optical element of coated with protective film, removes external force until the cooling of sealing wax group cements rear；Then it heats
The glue film of high temperature is sticked in sealing wax group by glue film under external force, until sealing wax group and glue film it is cooling cement rear remove it is outer
Power, sealing wax group is fixedly connected with protective film, optical element, so that optical element be made to be fixed on glue film；
S4, burnishing surface is ground, rough polishing, essence throwing, then optical element lower wall；
After S5, lower wall, directly PET adhesive tape is removed, later by protection face wiped clean.
The polishing method of optical element of the present invention replaces protective paint in the prior art using PET adhesive tape, and PET adhesive tape is simple
Be easy to get, not only protect protection face so that optical element is fixedly connected with rubber moulding, after polishing, PET adhesive tape easily tear off again and
Residue glue is not stayed, it can be to avoid the smearing many technical problems of protective paint bring.
Specific embodiment
Technical solution is clearly and completely described below in conjunction with the embodiment of the present invention, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
Have the defects that in the polishing process of optical element for the prior art more.
The present invention proposes a kind of polishing method of optical element, polishes for the burnishing surface to optical element, optics
Part includes opposite a burnishing surface and a protection face, and the polishing method includes the following steps:
S1, the protection face of optical element is cleaned out, optical element is placed on a fixture fixed；
S2, the PET adhesive tape that proper width is selected according to the size of optical element, entire protection face is coated paste with PET adhesive tape
Layer protecting film is formed, extra PET adhesive tape is removed；
S3, upper disk: the protective film for posting the optical element of protective film is faced upward, and sealing wax group is then heated, in the effect of external force
Under, sealing wax group is adhered on the optical element of coated with protective film, removes external force until the cooling of sealing wax group cements rear；Then it heats
The glue film of high temperature is sticked in sealing wax group by glue film under external force, until sealing wax group and glue film it is cooling cement rear remove it is outer
Power, sealing wax group is fixedly connected with protective film, optical element, so that optical element be made to be fixed on glue film；
S4, burnishing surface is ground, rough polishing, essence throwing, then optical element lower wall；
After S5, lower wall, directly PET adhesive tape is removed, later by protection face wiped clean.
The PET adhesive tape is one-faced tapes, and the one side with glue is pasted with protection face.
The temperature that sealing wax group is heated in the S3 is 110-120 DEG C.
Wiping in the S5 specifically: dip alcohol wipe protection face using non-dust cloth.
The optical element includes germanium wafer, selenizing zinc metal sheet.
Because bubble can generate large effect to the adherence force between PET adhesive tape and protection face, it is pasted by PET adhesive tape
During protection face, notices that paste process slowly carries out, prevent bubble from generating.
PET is the abbreviation of polyethylene terephthalate, and the chemical formula of PET is [COC6H4COOCH2CH2O] n, by right
Rutgers exchange with glycol ester or first synthesize the double hydroxyl second of terephthalic acid (TPA) with terephthalic acid (TPA) and ethylene glycol esterification
Then ester carries out polycondensation reaction again and is made, belongs to crystal type saturated polyester, have the following advantages that.
1, resistance to diluted acid, diluted alkaline, resistance to most of solvents.
2, it with excellent high- and low-temperature resistance performance, can be used for a long time in 120 DEG C of temperature ranges, short-period used is resistant to 150
DEG C high temperature is resistant to -70 DEG C of low temperature, and influences very little to its mechanical performance when high and low temperature.
3, gas and vapor permeability are low, have excellent resistance gas and water, oil and peculiar smell performance.PET adhesive tape is poly-
Membrane of lipoprotein is coated with acrylic or silica gel glue, and protection face is pasted upper PET adhesive tape, after polished, easily tear off, do not stay it is residual
Scratch or scratch are not had when glue, removing, and protection face finish is still fine.
Embodiment 1.
Optical element to be processed: the germanium square piece of length, width and height 215*135*12mm, germanium square piece include opposite burnishing surface and guarantor
Mask cleans out the protection face of germanium square piece, burnishing surface, and germanium square piece, which is placed on a fixture, fixes it, according to polished silicon wafer
Size selects the PET single side blue adhesive tape of proper width, coats entire protection face with PET adhesive tape and pastes one layer of protection of formation
Film removes extra PET adhesive tape；Paste process slowly carries out, and prevents bubble from generating；Upper disk: the germanium side of protective film will be posted
The protective film of piece faces upward, and then heats sealing wax and rolls into a ball to 110 DEG C, under the effect of external force, sealing wax group is adhered to coated with protective film
Germanium square piece on, cement rear until sealing wax group is cooling and remove external force；Then glue film is heated, under external force, by high temperature
Glue film is sticked in sealing wax group, and until sealing wax group and the cooling rear that cements of glue film remove external force, sealing wax group and protective film, germanium square piece are solid
Fixed connection grinds burnishing surface, rough polishing, essence throwing, then germanium square piece lower wall so that germanium square piece be made to be fixed on glue film, under
After disk, directly PET adhesive tape is removed, it is clean by surface wipes to dip alcohol using non-dust cloth later, examines germanium square piece
Finish, meet the smoothness requirements of optical element.
Embodiment 2.
Optical element to be processed: the zinc selenide square piece of length, width and height 99*205*12mm, zinc selenide square piece include opposite polishing
Face and protection face clean out the protection face of zinc selenide square piece, burnishing surface, and zinc selenide square piece, which is placed on a fixture, consolidates it
It is fixed, the PET single side blue adhesive tape of proper width is selected according to polished silicon wafer size, and entire protection face is coated with PET adhesive tape and is pasted
Layer protecting film is formed, extra PET adhesive tape is removed；Paste process slowly carries out, and prevents bubble from generating；Upper disk: it will post
The protective film of the zinc selenide square piece of protective film faces upward, and then heats sealing wax and rolls into a ball to 115 DEG C, under the effect of external force, by sealing wax
Group adheres in the zinc selenide square piece of coated with protective film, removes external force until the cooling of sealing wax group cements rear；Then glue film is heated,
Under external force, the glue film of high temperature is sticked in sealing wax group, until sealing wax group and glue film cooling cement rear and remove external force, sealing wax
Group is fixedly connected with protective film, zinc selenide square piece, so that zinc selenide square piece be made to be fixed on glue film；Burnishing surface is ground,
Rough polishing, essence are thrown, then zinc selenide square piece lower wall；After lower wall, directly PET adhesive tape is removed, dips wine using non-dust cloth later
Essence is clean by surface wipes, examines the finish of zinc selenide square piece, meets the smoothness requirements of optical element.
Embodiment 3.
Optical element to be processed: the germanium square piece of length, width and height 185*134*10mm, germanium square piece include opposite burnishing surface and guarantor
Mask cleans out the protection face of germanium square piece, burnishing surface, and germanium square piece, which is placed on a fixture, fixes it, according to polished silicon wafer
Size selects the PET single side blue adhesive tape of proper width, coats entire protection face with PET adhesive tape and pastes one layer of protection of formation
Film removes extra PET adhesive tape；Paste process slowly carries out, and prevents bubble from generating；Upper disk: the germanium side of protective film will be posted
The protective film of piece faces upward, and then heats sealing wax and rolls into a ball to 120 DEG C, under the effect of external force, sealing wax group is adhered to coated with protective film
Germanium square piece on, cement rear until sealing wax group is cooling and remove external force；Then glue film is heated, under external force, by high temperature
Glue film is sticked in sealing wax group, and until sealing wax group and the cooling rear that cements of glue film remove external force, sealing wax group and protective film, germanium square piece are solid
Fixed connection, so that germanium square piece be made to be fixed on glue film；Burnishing surface is ground, rough polishing, essence throwing, then germanium square piece lower wall；Under
After disk, directly PET adhesive tape is removed, it is clean by surface wipes to dip alcohol using non-dust cloth later, examines germanium square piece
Finish, meet the smoothness requirements of optical element.
The polishing method of optical element of the present invention replaces protective paint in the prior art using PET adhesive tape, and PET adhesive tape is simple
Be easy to get, not only protect protection face so that optical element is fixedly connected with rubber moulding, after polishing, PET adhesive tape easily tear off again and
Residue glue is not stayed, it can be to avoid the smearing many technical problems of protective paint bring.
Although for illustrative purposes, the preferred embodiment of the present invention is had been disclosed, but the ordinary skill people of this field
Member will realize without departing from the scope and spirit of the invention as disclosed by the appended claims, various to change
Into, increase and replace be possible.
Claims (5)
1. a kind of polishing method of optical element, polishes for the burnishing surface to optical element, optical element includes opposite
A burnishing surface and a protection face, it is characterised in that: the polishing method includes the following steps:
S1, the protection face of optical element is cleaned out, optical element is placed on a fixture fixed；
S2, the PET adhesive tape that proper width is selected according to the size of optical element, entire protection face is coated paste with PET adhesive tape
Layer protecting film is formed, extra PET adhesive tape is removed；
S3, upper disk: the protective film for posting the optical element of protective film is faced upward, and sealing wax group is then heated, in the effect of external force
Under, sealing wax group is adhered on the optical element of coated with protective film, removes external force until the cooling of sealing wax group cements rear；Then it heats
The glue film of high temperature is sticked in sealing wax group by glue film under external force, until sealing wax group and glue film it is cooling cement rear remove it is outer
Power, sealing wax group is fixedly connected with protective film, optical element, so that optical element be made to be fixed on glue film；
S4, burnishing surface is ground, rough polishing, essence throwing, then optical element lower wall；
After S5, lower wall, directly PET adhesive tape is removed, later by protection face wiped clean.
2. the polishing method of the optical element according to claim 1, it is characterised in that: the PET adhesive tape is one side glue
Band, the one side with glue are pasted with protection face.
3. the polishing method of the optical element according to claim 1, it is characterised in that: heat sealing wax group in the S3
Temperature is 110-120 DEG C.
4. the polishing method of the optical element according to claim 1, it is characterised in that: the wiping in the S5 specifically:
Alcohol wipe protection face is dipped using non-dust cloth.
5. the polishing method of the optical element according to claim 1, it is characterised in that: the optical element include germanium wafer,
Selenizing zinc metal sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810747798.4A CN108927713A (en) | 2018-07-10 | 2018-07-10 | The polishing method of optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810747798.4A CN108927713A (en) | 2018-07-10 | 2018-07-10 | The polishing method of optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108927713A true CN108927713A (en) | 2018-12-04 |
Family
ID=64448025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810747798.4A Pending CN108927713A (en) | 2018-07-10 | 2018-07-10 | The polishing method of optical element |
Country Status (1)
| Country | Link |
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| CN (1) | CN108927713A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110549171A (en) * | 2019-10-11 | 2019-12-10 | 广东先导先进材料股份有限公司 | Clamp and method for polishing planar optical part |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6702652B2 (en) * | 2001-08-03 | 2004-03-09 | Disco Corporation | Method of grinding rear side of semiconductor wafer |
| CN102134458A (en) * | 2011-03-24 | 2011-07-27 | 昆山博益鑫成高分子材料有限公司 | PET (polyethylene terephthalate) protective film for preparing flat-panel display |
| CN103056737A (en) * | 2011-10-21 | 2013-04-24 | 株式会社迪思科 | Grinding method for sapphire substrate |
| CN105968741A (en) * | 2016-07-21 | 2016-09-28 | 苏州泰仑电子材料有限公司 | High-temperature-resistant low-residue protective film for glass lamination |
| CN107437493A (en) * | 2016-05-27 | 2017-12-05 | 上海馨晔电子科技有限公司 | A kind of surface protection glued membrane being thinned for wafer |
-
2018
- 2018-07-10 CN CN201810747798.4A patent/CN108927713A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6702652B2 (en) * | 2001-08-03 | 2004-03-09 | Disco Corporation | Method of grinding rear side of semiconductor wafer |
| CN102134458A (en) * | 2011-03-24 | 2011-07-27 | 昆山博益鑫成高分子材料有限公司 | PET (polyethylene terephthalate) protective film for preparing flat-panel display |
| CN103056737A (en) * | 2011-10-21 | 2013-04-24 | 株式会社迪思科 | Grinding method for sapphire substrate |
| CN107437493A (en) * | 2016-05-27 | 2017-12-05 | 上海馨晔电子科技有限公司 | A kind of surface protection glued membrane being thinned for wafer |
| CN105968741A (en) * | 2016-07-21 | 2016-09-28 | 苏州泰仑电子材料有限公司 | High-temperature-resistant low-residue protective film for glass lamination |
Non-Patent Citations (5)
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| H.E.毕勒（德）: "《合理的防腐蚀设计》", 30 June 1990, 化学工业出版社 * |
| 曹天宁: "《光学零件制造工艺学》", 31 January 1981, 机械工业出版社 * |
| 李景镇: "《光学手册下卷》", 31 July 2010, 陕西科学技术出版社 * |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110549171A (en) * | 2019-10-11 | 2019-12-10 | 广东先导先进材料股份有限公司 | Clamp and method for polishing planar optical part |
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Effective date of registration: 20200506 Address after: 239004 east of yongyang Road, west of Nanjing Road, north of Anqing road and south of Lu'an road in Langya Economic Development Zone, Langya District, Chuzhou City, Anhui Province Applicant after: Anhui Guangzhi Technology Co., Ltd Address before: 511517 Guangdong province Qingyuan Baijia Industrial Park 27-9B Applicant before: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. |
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