CN108917927B

CN108917927B - Dispersion device and spectrometer

Info

Publication number: CN108917927B
Application number: CN201810844249.9A
Authority: CN
Inventors: 孟宪芹; 王维; 谭纪风; 孟宪东; 陈小川; 高健; 王方舟; 凌秋雨
Original assignee: BOE Technology Group Co Ltd
Current assignee: BOE Technology Group Co Ltd
Priority date: 2018-07-27
Filing date: 2018-07-27
Publication date: 2020-08-25
Anticipated expiration: 2038-07-27
Also published as: WO2020019711A1; CN108917927A

Abstract

The invention discloses a dispersion device and a spectrometer, wherein the dispersion device comprises: an optical substrate configured to transmit light; a plurality of collimated light sources disposed on one side of an optical substrate; a plurality of gratings, which are disposed on a surface of one side of the optical substrate in one-to-one correspondence with the plurality of collimated light sources, configured to disperse different wavelength bands of light from the respective collimated light sources, respectively, so that diffraction angles of first-order diffracted waves of all target wavelength light in the dispersed light beam are smaller than a total reflection angle between the optical substrate and air; and a light outlet provided on the surface of the other side of the optical substrate corresponding to the collimated light source, configured to extract first-order diffracted waves of all target-wavelength light in the dispersed light beam. In the chromatic dispersion device of the embodiment, the grating structure is simple, the collimated light sources and the gratings are arranged in a one-to-one correspondence mode, chromatic dispersion is achieved through the optical substrate directly at a time, and high light energy utilization rate can be achieved.

Description

Dispersion device and spectrometer

Technical Field

The invention relates to the field of optical detection, in particular to a dispersion device and a spectrometer.

Background

In the prior art, complicated structures are used for realizing dispersion, and particularly holographic gratings or Bragg gratings and the like have high processing difficulty. In the prior art, the color separation of the body glass is realized by using the body glass as the optical waveguide, but the light efficiency is too low in the mode.

Disclosure of Invention

In view of this, the embodiments of the present invention provide a dispersion device and a spectrometer, so as to solve the following problems in the prior art: the problems of complex grating structure, high processing difficulty and low light effect dispersion efficiency of realizing dispersion are solved.

In one aspect, an embodiment of the present invention provides a dispersion apparatus, including: an optical substrate configured to transmit light; a plurality of collimated light sources disposed on one side of the optical substrate; a plurality of gratings, disposed on a surface of the one side of the optical substrate in one-to-one correspondence with the plurality of collimated light sources, configured to disperse different wavelength bands of light from the respective collimated light sources, respectively, such that diffraction angles of first-order diffracted waves of all target wavelength light in the dispersed light beam are smaller than a total reflection angle between the optical substrate and air; a light exit port disposed on a surface of the other side of the optical substrate corresponding to the collimated light source, configured to extract first order diffracted waves of all target wavelength light in the dispersed light beam.

In some embodiments, the distance Δ D between the thickness t of the optical substrate and the maximum and minimum angles of the first order diffraction angles for all of the target wavelengths light satisfies the following equation: Δ D ═ tan θ_d-max-tanθ_d-min) T, wherein θ_d-maxMaximum angle of first order diffraction angle, theta, for all target wavelengths_d-minAnd deltaD is the minimum angle of the first-order diffraction angles of all the target wavelength light, and is the width of the light outlet.

In some embodiments, the dispersion device comprises: first black matrixes disposed at both sides of each light source, the width w1 of the first black matrix being:

w1＝2*tanθ_d-max*t。

in some embodiments, the dispersion apparatus further comprises: and the second black matrixes are arranged on the other side of the optical substrate in a one-to-one correspondence manner with the gratings, and at least cover the range from the orthographic projection point of the center of the grating on the optical substrate to one end, close to the light source, of the light outlet.

In some embodiments, the center of the second black matrix coincides with the center of the grating in a direction perpendicular to the optical substrate, and the width w2 of the second black matrix is:

w2＝2*tanθ_d-min*t。

in some embodiments, the period of each grating is determined according to the first order diffraction angle, the wavelength band of each collimated light source, and the refractive index of the optical substrate.

In some embodiments, the collimated light source is comprised of a light source and a collimating member that is a micro-nano structure or a light absorbing layer.

In some embodiments, the light outlets are disposed on both sides of the respective light sources to collectively extract light in the same wavelength range, and light of adjacent wavelengths is alternately extracted from the light outlets on both sides.

In some embodiments, the light source is a white light Micro-LED light source or a monochromatic Micro-LED light source.

In some embodiments, the light exit opening for the target wavelength light on the other side of the optical substrate is provided with a half wavelength grating structure.

In some embodiments, the diffracted light of the first order of the diffracted light is between 15-30% in intensity.

In another aspect, an embodiment of the present invention provides a spectrometer, including: the above-described dispersion device; an object channel to be measured disposed on the other side of the optical substrate of the dispersion device to receive the target wavelength light emitted therefrom; and the detection substrate is provided with a photosensitive sensor to detect the light emitted by the object channel to be detected.

In some embodiments, the analyte channel comprises a microfluidic channel formed by etching on a substrate, and the inner wall of the microfluidic channel is coated with a modified film layer.

In some embodiments, the object to be tested is connected to the liquid inlet tank at the upper end and connected to the waste liquid tank at the lower end, and the object to be tested is disposed in the second black matrix.

In some embodiments, the photosensitive sensor is disposed corresponding to a light outlet of the target wavelength light on the other side of the optical substrate.

In some embodiments, the photosensitive sensors are disposed in one-to-one correspondence with the target wavelength light emitted from the light outlet.

In some embodiments, at least one of the thickness of the optical substrate, the grating period, and the number of gratings is set according to the size of the photosensitive sensor and the required resolution of the spectrometer.

In the chromatic dispersion device of the embodiment, the grating structure is simple, the collimated light sources and the gratings are arranged in a one-to-one correspondence mode, chromatic dispersion is achieved through the optical substrate directly at a time, and high light energy utilization rate can be achieved.

Drawings

Fig. 1 is a schematic structural diagram of a dispersion apparatus according to a first embodiment of the present invention;

fig. 2 is a schematic structural diagram of a dispersion apparatus according to a first embodiment of the present invention;

FIG. 3 is a schematic diagram of a spectrometer according to a first embodiment of the present invention;

FIG. 4 is a schematic structural diagram of an analyte channel according to a second embodiment of the present invention;

FIG. 5a is a graph showing the first order diffraction angle distribution of Royal Blue and Blue Micro-LED after passing through a 500nm grating according to a second embodiment of the present invention;

FIG. 5b is a graph of distance from the center of the light source after the Royal Blue and Blue Micro-LED passes through the 500nm grating;

FIG. 5c is a graph of the first order diffraction intensity distribution of Royal Blue and Blue Micro-LED after passing through a 500nm grating according to a second embodiment of the present invention;

FIG. 6a is a graph showing the first order diffraction angle distribution after passing through a 500nm grating according to a second embodiment of the present invention;

FIG. 6b is a distance graph of each wavelength from the center of the light source after passing through the 500nm grating according to the second embodiment of the present invention;

FIG. 6c is a graph of the first order diffraction intensity distribution after passing through a 500nm grating according to a second embodiment of the present invention;

FIG. 7 is a schematic illustration of the +/-1st diffractor glass dispersion through the grating provided by the second embodiment of the present invention.

Detailed Description

For a better understanding of the technical aspects of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings. Embodiments of the present disclosure are described in further detail below with reference to the figures and the detailed description, but the present disclosure is not limited thereto.

The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element preceding the word covers the element listed after the word, and does not exclude the possibility that other elements are also covered. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.

In the present disclosure, when a specific device is described as being located between a first device and a second device, there may or may not be intervening devices between the specific device and the first device or the second device. When a particular device is described as being coupled to other devices, that particular device may be directly coupled to the other devices without intervening devices or may be directly coupled to the other devices with intervening devices.

All terms (including technical or scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs unless specifically defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.

The method is used for solving the following problems in the prior art: the problems of complex grating structure, high processing difficulty and low light effect dispersion efficiency for realizing dispersion

A first embodiment of the present invention provides a dispersion device, a configuration of which is schematically shown in fig. 1, including:

an optical substrate 0 configured to transmit light; a plurality of collimated light sources 1 disposed on one side of an optical substrate; a plurality of gratings 2, the plurality of gratings 2 being disposed on a surface of one side of the optical substrate 0 in one-to-one correspondence with the plurality of collimated light sources 1, configured to disperse different wavelength bands of light from the respective collimated light sources 1, respectively, so that diffraction angles of first order diffraction waves of all target wavelength light in the dispersed light beams are smaller than a total reflection angle between the optical substrate 0 and air; and a light exit port 3 provided on the surface of the other side of the optical substrate in correspondence with the collimated light source 1, configured to take out the first order diffracted waves of all the target wavelength light in the dispersed light beam.

In implementation, the collimated light source may be a light source with better collimation, or may be a light source composed of a common light source and a collimating member, and the collimating member may be a micro-nano structure or a light absorbing layer. Specifically, the light source can be made of an LED chip with a relatively wide collimation monochromatic spectrum, or can be a collimated white light Micro-LED light source, a monochromatic Micro-LED light source, or a laser light source, but is not limited to these types. In order to reduce costs, the embodiment prefers collimated Micro-LED chips as the light source.

The optical substrate may be a bulk glass substrate, a resin or a polyester compound having high stability may be used, or other base materials may be used. The material is determined according to actual requirements, and the thickness of the bulk glass substrate is required to have a certain thickness, so that when dispersed light is transmitted to the lower surface in bulk glass, a certain distance is reserved between adjacent resolution wavelengths, and the microfluidic channels and the photosensitive sensors which are right opposite to the lower surface can be conveniently in one-to-one correspondence with the sizes and the positions of the microfluidic channels and the photosensitive sensors.

The distance Δ D between the thickness t of the optical substrate and the maximum angle and the minimum angle of the first-order diffraction angles of all the target wavelength light satisfies the following formula: Δ D ═ tan θ_d-max-tanθ_d-min) T, wherein θ_d-maxMaximum angle of first order diffraction angle, theta_d-minΔ D is the light exit width, which can be determined according to the resolution of the spectrometer, the size of the photosensitive sensor and the size of the various wavelength bands of light. With this arrangement, even when the photosensor cannot be made small, the distance Δ D can be increased by changing the thickness of the variant glass.

The grating of this embodiment is a simple grating, wherein the period of the grating is determined by the wavelength of light to be emitted, the refractive index of the outgoing and incoming materials, the incoming light angle, and the designed outgoing light direction, and specifically, the period of each grating can be determined according to the first-order diffraction angle, the waveband of each collimated light source, and the refractive index of the optical substrate; the duty cycle of the grating is typically 0.5, but may deviate from this value in practical product design (e.g. for the purpose of adjusting the intensity of the light, balancing the brightness difference at different positions of the display panel, etc.). The height of the grating may be several hundred nanometers or micron level depending on the intensity of the light of a desired wavelength or wavelengths. If the structure is other filtering structure, the special structure is designed according to the requirements of special wavelength and light-emitting angle of filtering, and can be a built-in micro-mirror or other micro-structures.

The light outlet of the target wavelength light on the other side of the optical substrate is provided with a half-wavelength grating structure, so that light with each wavelength can be collimated and taken out.

In some embodiments, the collimating member may further include first black matrices 4 disposed at both sides of the respective light sources. The width w1 of the first black matrix 4 is determined according to the following equation:

w1＝2*tanθ_d-maxt. The first black matrix of the present embodiment is mainly used to absorb light incident at a target angle.

In some embodiments, the dispersion device may include a second black matrix 5 disposed on the other side of the optical substrate in one-to-one correspondence with the gratings 2. As shown in fig. 2, the second black matrix 5 covers at least a range from a point M where the orthographic projection of the center of the grating 2 on the optical substrate 0 is located to one end N of the light outlet 3 close to the light source 1. As further shown in fig. 3, the center of the second black matrix 5 coincides with the center of the grating 2 in the direction perpendicular to the optical substrate 0, and the width w2 of the second black matrix 5 is:

w2＝2*tanθ_d-mint. The second black matrix can reduce the interference of light with other wavelengths in the detection process and improve the measurement precision and the signal to noise ratio.

The first black matrix and the second black matrix can be made of black photoresist resin film or metal film (Cr/CrO), the thickness is about 100nm for absorbing non-target wavelength light.

In some embodiments, the light outlets are disposed on two sides of each light source to collectively extract light in the same wavelength range, and light of adjacent wavelengths is alternately extracted from the light outlets on the two sides. The embodiment can increase the distance between adjacent wavelengths by taking light at intervals on two sides, thereby making up the size limitation of the photosensitive sensor.

In some embodiments, the intensity of the first order of the diffracted light is set between 15-30%, which may reduce crosstalk with the larger order diffracted light.

A second embodiment of the present invention provides a spectrometer, which is schematically shown in fig. 3, and includes:

the dispersion device 11 in the first embodiment; an object channel 6 disposed on the other side of the optical substrate of the dispersion device to receive the target wavelength light emitted therefrom; and a detection substrate 7 on which a photosensitive sensor is arranged to detect light emitted from the object channel to be detected.

The width and the height of the microfluidic channel can be nanoscale channels or larger or smaller, and the microfluidic channel is designed according to practical application without special requirements on the size of the microfluidic channel. The microfluidic channel can be made on silicon, glass or polymer (such as PDMS or PMMA) by photoetching and etching methods, or can be made of other materials, and no special requirements are made on the material and formation of the microfluidic channel. According to actual requirements, the inner wall of the microfluidic channel is generally coated with a hydrophobic/hydrophilic film layer, so that the microfluid flows or is temporarily retained in the microfluidic channel according to experimental requirements, such as a Teflon-AF hydrophobic layer, and the microfluid can be enabled not to be adhered to the microfluidic channel as much as possible and flows according to requirements.

As shown in fig. 4, the upper end of the object channel 6 is connected to the liquid inlet tank 61, and the lower end is connected to the waste liquid tank 62, which is a schematic structural diagram of the object channel 6 disposed in the second black matrix 5.

The photosensitive sensor 72 is disposed on the lower substrate 71 corresponding to the light exit of the target wavelength light on the other side of the optical substrate, and specifically, the photosensitive sensor 71 is disposed in one-to-one correspondence with the target wavelength light emitted from the light exit. Since the photosensitive sensors and the light outlets are expected to correspond to each other, the distance between the photosensitive sensors and the light outlets depends on the precision of the light emitting direction of the light coupling structure (array) and the signal-to-noise ratio requirement of the light detector, so that the photosensitive sensors and the light outlets are in close fit (the middle of the photosensitive sensors can comprise a buffer film layer and the like). The photosensitive sensor type may be CCD, CMOS, PIN, etc.

During implementation, a micro fluid is divided into a plurality of nano-liter or pico-liter small droplets, the nano-liter or pico-liter small droplets enter different object channels to be detected, physical or chemical reaction is carried out on the micro fluid with specific wavelength, the micro fluid is detected by a photosensitive sensor below the object channel to be detected according to the change of information carried by the micro fluid before and after the physical or chemical reaction, and the object is detected. And (4) the waste liquid after detection enters a waste liquid pool.

In particular, the required resolution of the spectrometer can be achieved under the size limit of the photosensitive sensor by setting at least one parameter of the thickness of the optical substrate, the period of the grating, and the number of gratings.

The spectrometer provided by the embodiment can be applied to physics, chemistry and biological correlation, and can be used in the fields of spectral analysis, molecular diagnosis, food quarantine, bacterial classification and the like.

The principles and device selection of the spectrometer described above are described in detail below with reference to specific examples and the accompanying drawings.

(1) The basic composition of the device structure of this example

The basic device structure is an optical substrate + a microfluidic substrate + a sensing substrate. In the embodiment, a 2mm glass substrate is mainly used as an optical part substrate and is mainly responsible for dispersing white light; the microfluidic substrate can be a single substrate, the material can be PDMS or PMMA, or photoresist can be spun on the optical substrate, and the microfluidic channel is formed by exposing a specific area. The method is mainly used for the channel passing through microfluid or gas, spin-on photoresist is adopted in the embodiment, and then the microfluidic channel is directly processed on the upper surface of the optical substrate in an exposure mode. The micro-reaction tank and the waste liquid tank can be obtained by exposure in a mode of shielding by a mask plate. The sensor substrate is formed by integrating a photosensitive sensor on a sensing substrate, can be a glass substrate or a substrate made of other materials, is selected according to actual requirements, and mainly used for detecting optical signals passing through a micro-detector. For visual observation and tracking, the circuit of the photosensitive sensor can adopt a transparent electrode such as ITO or Al-doped ZnO.

(2) Light source selection

A: Micro-LED multicolor light source.

In the embodiment, a monochromatic Micro-LED with a wider spectrum is used as a light source, so that the purpose of dispersing through gratings in sub-bands is achieved.

After different Micro-LEDs are collimated, the light enters the grating area. The collimation treatment can be realized by using a micro-nano structure (such as a bullseye structure) or by using a black matrix to shield and absorb stray light so as to achieve the aim of collimation. The white light Micro-LED can also be used as a light source, different gratings are designed, different wave bands are dispersed, and high-precision spectral dispersion is achieved.

B, a monochromatic wide-spectrum Micro-LED light source.

If Royal Blue [440nm,460nm ] or Blue [460nm,480nm ] Micro-LEDs are chosen, a simple grating with a period of 500nm, a line width and a height of 250nm can be used, and the resulting diffraction angle, distance from the light source and first order diffraction intensity pairs are shown for example in

regions

1 and 2 of FIGS. 5a-5 c.

Other parameters of the grating may be used as long as the first order diffraction angle that satisfies the maximum wavelength is less than the critical angle from the optical medium to air (41 ° if the optical medium is glass). When the grating is designed, in order to maximize the delta D, more sensors or micro-flow channels are conveniently distributed in a limited delta D range, the precision of spectrum detection is reduced to be higher, and the larger the difference between the diffraction angles of the maximum wavelength and the minimum wavelength is, the better the difference is.

(3) Principle and description of Dispersion

The grating dispersion on the surface of the single Micro-LED passive glass realizes dispersion through the passive glass once so as to realize higher light energy utilization rate, and the following scheme can be adopted:

1. all the diffracted lights are dispersed in the first order as much as possible, so that the crosstalk caused by the diffracted lights of larger orders is reduced;

2. the diffraction angles of all first order diffraction wavelengths are less than the total reflection angle between glass and air

According to the diffraction formula:

wherein n is_iAnd theta_iRespectively, the incident space refractive index and the incident angle, m is the diffraction order, Λ is the grating period, lambda is the incident light wavelength, theta_dIs the angle between the direction of the diffracted light and the normal to the plane of the panel, n_dIs the equivalent refractive index of glass and air.

According to the formula (1), the grating is designed to transmit and disperse incident light, in order to reduce or avoid dispersion cross color of different diffraction orders, only one diffraction order exists after all wavelengths pass through the grating, and the target wavelength light can be sequentially separated by different diffraction angles of each diffraction order. However, it is difficult to realize that light in a wide spectrum, such as the range of 380-780nm, has only one diffraction order by using one grating, and therefore, a plurality of multicolor Micro-LEDs and simple gratings corresponding to the multicolor Micro-LEDs one to one are adopted to perform diffraction dispersion in different bands.

As shown in fig. 6a-6c, the first order diffraction angle distribution, the distance of each wavelength from the center of the light source, and the first order diffraction intensity distribution after passing through the 500nm grating are shown schematically.

The Distance (Distance) from the point where the orthographic projection of the central light source on the substrate is located after dispersion can be calculated by the formula (3):

Distance＝tanθ_d*t…(3)；

wherein is theta_dDiffraction angle (t) is the thickness of the bulk glass. In this case, the maximum and minimum diffraction angles can be calculated by the formula (2), and the distance (Δ D) between the maximum wavelength and the minimum wavelength after dispersion can be obtained:

ΔD＝(tanθ_d-max-tanθ_d-min)*t…(4)；

wherein, theta_d-maxAnd theta_d-minThe maximum and minimum angles of first order diffraction, and t is the bulk glass thickness. It can be seen from equations (3) - (4) that the thickness t of bulk glass plays a crucial role in the Distance between the wavelengths after dispersion, and the Distance after dispersion and the thickness t are in a direct proportional relationship, so that if the microfluidic channel or the sensor cannot be made very small, the Distance can be increased by changing the thickness of the bulk glass, so as to achieve a one-to-one correspondence relationship between the three.

The left side and the right side of the Micro-LED need black matrixes to isolate ambient light, and meanwhile, the black matrixes are used for absorbing light with a diffraction angle larger than a total reflection angle and reflecting the light to the upper surface by the lower surface of the glass. The width of the first black matrix on the left side and the right side of the Micro-LED is w1:

w1＝2*tanθ_d-max*t……(6)；

in the same formula (5), t is the thickness of the bulk glass, θ_d-maxIs the maximum of the first order diffraction angle.

The first black matrix serves to absorb light of a diffraction order greater than a total reflection angle.

In addition, due to the diffraction characteristics of the grating, when the surface light source is collimated to be vertically incident, the diffraction angles of +/-1st diffraction orders are the same after diffraction by the grating, namely, the diffraction intensities are the same when the diffraction angles are distributed in a normal symmetry mode (as shown in fig. 7). Based on this, Δ D can be changed to 2 times the original, and the resolution becomes half of the original.

As can be seen from fig. 7, the 1st diffraction patterns of the left and right sides having different wavelengths are distributed in a normal symmetry, and the Δ D is doubled since the light in the same wavelength range is extracted by the Δ D of the left and right sides. In consideration of the display of the sensor size, light can be taken at intervals on two sides of the color separation area, and the light can be taken at a single side of the color separation area_i,λ_i-2…) is arranged at the light-emitting position to form micro-channels, and the light is extracted at intervals of one wavelength, and the other symmetrical edge is expressed by (lambda)_i-1,λ_i-3…) to extract light of the corresponding wavelength. The distance delta D between the previous wavelength and the next wavelength is increased, and the defect that the sensor cannot achieve the target required size is overcome.

The Micro-LED light source and the simple glass grating after collimation are manufactured on the upper surface of the glass substrate, the Micro-flow channel is integrated on the lower glass substrate, the photosensitive sensor is integrated on the other glass substrate, the light-emitting wavelength of the upper glass substrate needs to correspond to the photosensitive detector of the lower glass substrate one by one, and signals penetrating through an object to be detected can be conveniently and accurately monitored.

During detection, the Micro-LED light source is lightened, and different wavelengths are emitted from different positions on the lower surface of the upper glass substrate after the Micro-LED light source is subjected to grating transmission dispersion. The micro-flow channel is processed on the lower surface of the upper glass, light with specific wavelength and an object to be detected carry out physical or chemical reaction through gas or liquid to be detected in the micro-flow channel, and a detector under the micro-flow channel receives a final optical signal and then transmits the final optical signal back to a data analysis system to complete calibration or detection of specific substances or gas, namely detection.

This embodiment adopts the simple grating of workable, utilizes the body glass as optical substrate, and the system of wide spectrum white light colour separation and miniflow detection is realized to the efficient, and this system also can be used to other little gas or other little detection areas.

While the embodiments of the present invention have been described in detail, the present invention is not limited to these specific embodiments, and those skilled in the art can make various modifications and modifications of the embodiments based on the concept of the present invention, which fall within the scope of the present invention as claimed.

Claims

1. A dispersion apparatus, comprising:

an optical substrate configured to transmit light;

a plurality of collimated light sources disposed on one side of the optical substrate;

a plurality of gratings, disposed on a surface of the one side of the optical substrate in one-to-one correspondence with the plurality of collimated light sources, configured to disperse different wavelength bands of light from the respective collimated light sources, respectively, such that diffraction angles of first-order diffracted waves of all target wavelength light in the dispersed light beam are smaller than a total reflection angle between the optical substrate and air;

a light exit port, which is arranged on the surface of the other side of the optical substrate corresponding to the collimated light source, and is configured to extract first-order diffracted waves of all target-wavelength light in the dispersed light beam, wherein the light exit port of the target-wavelength light on the other side of the optical substrate is provided with a half-wavelength grating structure;

and the second black matrixes are arranged on the other side of the optical substrate in a one-to-one correspondence manner with the gratings, and at least cover the range from the orthographic projection point of the center of the grating on the optical substrate to one end, close to the light source, of the light outlet.

2. The dispersing apparatus of claim 1,

the thickness t of the optical substrate and the distance Delta D of the maximum angle and the minimum angle of the first-order diffraction angles of all the target wavelength light satisfy the following formula: Δ D ═ tan θ_d-max-tanθ_d-min) T, wherein θ_d-maxMaximum angle of first order diffraction angle, theta, for all target wavelengths_d-minAnd deltaD is the minimum angle of the first-order diffraction angles of all the light with the target wavelength, and is the width of the light outlet.

3. The dispersion apparatus of claim 2 wherein the dispersion apparatus comprises:

first black matrixes disposed at both sides of each light source, the width w1 of the first black matrix being:

w1＝2*tanθ_d-max*t。

4. the dispersing apparatus of claim 1,

the center of the second black matrix coincides with the center of the grating in the direction perpendicular to the optical substrate, and the width w2 of the second black matrix is:

w2＝2*tanθ_d-min*t。

5. the dispersing apparatus of claim 1,

the period of each grating is determined by the first order diffraction angle, the wavelength band of each collimated light source, and the refractive index of the optical substrate.

6. The dispersing apparatus of claim 2, wherein the collimated light source is comprised of a light source and a collimating member, and the collimating member is a micro-nano structure or a light absorbing layer.

7. The dispersing apparatus of claim 6,

the light outlets are arranged on two sides of each corresponding light source to jointly take out light in the same wavelength range, and light with adjacent wavelengths is alternately taken out from the light outlets on the two sides.

8. The dispersing apparatus of claim 1,

the light source is a white light Micro light emitting diode Micro-LED light source or a monochromatic Micro-LED light source.

9. The dispersing apparatus of claim 1,

the diffraction intensity of the first order diffraction in the diffracted light is between 15 and 30 percent.

10. A spectrometer, comprising:

a dispersive device according to any one of claims 1 to 9;

an object channel to be measured disposed on the other side of the optical substrate of the dispersion device to receive the target wavelength light emitted therefrom; and

and the detection substrate is provided with a photosensitive sensor so as to detect the light emitted by the object channel to be detected.

11. The spectrometer of claim 10,

the object channel to be detected comprises a micro-flow channel which is formed by etching on a base material, and a modified film layer is coated on the inner wall of the micro-flow channel.

12. The spectrometer of claim 10,

the dispersion device comprises a second black matrix which is arranged on the other side of the optical substrate in a one-to-one correspondence mode with the gratings, the upper end of the object channel to be measured is communicated with a liquid inlet pool, the lower end of the object channel to be measured is communicated with a waste liquid pool, and the object channel to be measured is arranged in the second black matrix.

13. The spectrometer of claim 10,

the photosensitive sensor is arranged corresponding to a light outlet of the target wavelength light on the other side of the optical substrate.

14. The spectrometer of claim 13,

the photosensitive sensors are arranged in one-to-one correspondence with the target wavelength light emitted from the light outlet.

15. The spectrometer of claim 10,

at least one of the thickness of the optical substrate, the grating period, and the number of gratings is set according to the size of the photosensitive sensor and the desired resolution of the spectrometer.