CN108917927A - Dispersion means and spectrometer - Google Patents
Dispersion means and spectrometer Download PDFInfo
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- CN108917927A CN108917927A CN201810844249.9A CN201810844249A CN108917927A CN 108917927 A CN108917927 A CN 108917927A CN 201810844249 A CN201810844249 A CN 201810844249A CN 108917927 A CN108917927 A CN 108917927A
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1895—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using fiber Bragg gratings or gratings integrated in a waveguide
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- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/24—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order
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- G01J2003/104—Monochromatic plural sources
Abstract
The invention discloses a kind of dispersion means and spectrometer, dispersion means include：Optical substrate is configured to transmission light；The light source of multiple collimations, is arranged on the side of optical substrate；Multiple gratings, on the surface for the side that optical substrate is arranged in the light source of multiple gratings and multiple collimations correspondingly, it is configured to carry out dispersion to the different-waveband of the light from the light source accordingly collimated, so that the angle of diffraction of the first-order diffraction wave of all target wavelength light in dispersed light beam is both less than the angle of total reflection between optical substrate and air；Light-emitting window is arranged in correspondence on the surface of the other side of optical substrate with the light source of collimation, is configured as taking out the first-order diffraction wave of all target wavelength light in dispersed light beam.In the dispersion means of the present embodiment, optical grating construction is simple, and the light source and grating that collimate are arranged in a one-to-one correspondence, directly primary to realize dispersion by optical substrate, and the higher efficiency of light energy utilization may be implemented.
Description
Technical field
The present invention relates to light detection field, in particular to a kind of dispersion means and spectrometer.
Background technique
It in the prior art, is all that dispersion, especially holographic grating or Bragg grating etc., processing are realized with labyrinth
Difficulty is all bigger.There are also using body glass as optical waveguide realization body glass color separation, but this mode light in the prior art
It imitates too low.
Summary of the invention
In view of this, the embodiment of the present invention proposes a kind of dispersion means and spectrometer, to solve the prior art as
Lower problem：Realize the problem of optical grating construction of dispersion is more complex, difficulty of processing is big and light efficiency dispersion low efficiency.
On the one hand, the embodiment of the present invention proposes a kind of dispersion means, including：Optical substrate is configured to transmission light；It is more
The light source of a collimation is arranged on the side of the optical substrate；Multiple gratings, one by one with the light sources of multiple collimations
It is arranged in correspondence on the surface of the side of the optical substrate, is configured to from the light source accordingly collimated
The different-waveband of light carries out dispersion, so that the angle of diffraction of the first-order diffraction wave of all target wavelength light in dispersed light beam is both less than
The angle of total reflection between optical substrate and air；Light-emitting window is arranged in correspondence with the light source of the collimation in the optics base
On the surface of the other side of plate, it is configured as taking out the first-order diffraction wave of all target wavelength light in the dispersed light beam.
In some embodiments, the maximum at the first-order diffraction angle of the thickness t of the optical substrate and all target wavelength light
The distance, delta D of angle and minimum angles meets following formula：Δ D=(tan θd-max-tanθd-min) * t, wherein θd-maxIt is all
The maximum angle at the first-order diffraction angle of target wavelength light, θd-minFor the minimum angles at the first-order diffraction angle of all target wavelength light,
Δ D is the light-emitting window width.
In some embodiments, the dispersion means include：First black matrix of the two sides of each light source is set, it is described
The width w1 of first black matrix is:
W1=2*tan θd-max*t。
In some embodiments, the dispersion means further include：Second black matrix is set correspondingly with the grating
It sets on the other side of the optical substrate, second black matrix at least covers the center of the grating in the optics
Orthographic projection point on substrate is to the light-emitting window close to the range of described light source one end.
In some embodiments, the center of second black matrix and the center of the grating are perpendicular to the optics base
It is overlapped on the direction of plate, the width w2 of second black matrix is：
W2=2*tan θd-min*t。
In some embodiments, the period of each grating according to first-order diffraction angle, the light source of each collimation wave band and
The refractive index of the optical substrate determines.
In some embodiments, the light source of the collimation is made of light source and collimation component, and the collimation component is micro-nano
Structure or light-absorption layer.
In some embodiments, the two sides of corresponding each light source are arranged in the light-emitting window, taken out jointly with a wavelength
Light in range, and replace the light for taking out adjacent wavelength from the light-emitting window of the two sides.
In some embodiments, the light source is white light Micro-LED light source or monochrome Micro-LED light source.
In some embodiments, the light-emitting window of target wavelength light is equipped with half-wavelength on the other side of the optical substrate
Optical grating construction.
In some embodiments, in diffraction light the diffracted intensity of first-order diffraction between 15-30%.
On the other hand, the embodiment of the present invention proposes a kind of spectrometer, including：Above-mentioned dispersion means；Determinand channel,
On the other side of its described optical substrate that the dispersion means are arranged in, to receive the target wavelength light being emitted from it；
And detection substrate, it is provided with photosensitive sensor, is detected with the light being emitted to the determinand channel.
In some embodiments, the determinand channel includes microchannel, by etching on substrate, and in it
Modified film layer is coated on wall.
In some embodiments, the upper end in the determinand channel is communicated with feed liquor pond, and lower end is communicated with waste liquid pool, and institute
Determinand channel is stated to be arranged in the second above-mentioned black matrix.
In some embodiments, target wavelength light on the other side of the photosensitive sensor and the optical substrate
Light-emitting window is correspondingly arranged.
In some embodiments, the target wavelength light one-to-one correspondence that the photosensitive sensor is emitted with the light-emitting window is set
It sets.
In some embodiments, at least one of the thickness of the optical substrate, screen periods and raster count are joined
Number is arranged according to the size of photosensitive sensor and the resolution ratio of required spectrometer.
In the dispersion means of the present embodiment, optical grating construction is simple, and the light source and grating that collimate are arranged in a one-to-one correspondence, directly
It is primary that dispersion is realized by optical substrate, the higher efficiency of light energy utilization may be implemented.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the dispersion means that first embodiment of the invention provides；
Fig. 2 is the structural schematic diagram for the dispersion means that first embodiment of the invention provides；
Fig. 3 is the structural schematic diagram for the spectrometer that first embodiment of the invention provides；
Fig. 4 is the structural schematic diagram in the determinand channel that second embodiment of the invention provides；
Fig. 5 a is that Royal Blue and the Blue Micro-LED that second embodiment of the invention provides pass through after 500nm grating
First-order diffraction angular distribution figure；
Fig. 5 b is that Royal Blue and the Blue Micro-LED that second embodiment of the invention provides pass through after 500nm grating
(b) where the light source center distance map；
Fig. 5 c is that Royal Blue and the Blue Micro-LED that second embodiment of the invention provides pass through after 500nm grating
First-order diffraction intensity distribution；
Fig. 6 a be second embodiment of the invention provide by the first-order diffraction angular distribution figure after 500nm grating；
Fig. 6 b be second embodiment of the invention provide by where each wavelength distance light source after 500nm grating
The distance map of heart position；
Fig. 6 c be second embodiment of the invention provide by the first-order diffraction intensity distribution after 500nm grating；
Fig. 7 is the schematic diagram for the +/- 1st diffracting object glass dispersion by grating that second embodiment of the invention provides.
Specific embodiment
To make those skilled in the art better understand the technical solution of the disclosure, with reference to the accompanying drawing and specific embodiment party
Formula elaborates to the disclosure.Embodiment of the disclosure work is further retouched in detail in the following with reference to the drawings and specific embodiments
It states, but not as the restriction to the disclosure.
" first ", " second " used in the disclosure and similar word are not offered as any sequence, quantity or again
The property wanted, and be used only to distinguish different parts.The similar word such as " comprising " or "comprising" means the element before the word
Cover the element enumerated after the word, it is not excluded that be also covered by the possibility of other element."upper", "lower", "left", "right" etc. are only used
In indicating relative positional relationship, after the absolute position for being described object changes, then the relative positional relationship may also be correspondingly
Change.
In the disclosure, when being described to certain device between the first device and the second device, in the certain device
There may be devices between two parties between the first device or the second device, and device between two parties can also be not present.When being described to specific device
When part connects other devices, which can be directly connected to without device between two parties with the other devices, can also be with
It is not directly connected to the other devices and there is device between two parties.
All terms (including technical term or scientific term) that the disclosure uses are common with disclosure fields
The meaning that technical staff understands is identical, unless otherwise specifically defined.It is also understood that in term such as defined in the general dictionary
The meaning consistent with their meanings in the context of the relevant technologies should be interpreted as having, without application idealization or
The meaning of extremely formalization explains, unless being clearly defined herein.
Technology, method and apparatus known to person of ordinary skill in the relevant may be not discussed in detail, but suitable
In the case of, the technology, method and apparatus should be considered as part of specification.
To solve the problems, such as the as follows of the prior art：Realize that the optical grating construction of dispersion is more complex, difficulty of processing is big and light
The problem of imitating dispersion low efficiency
First embodiment of the invention provides a kind of dispersion means, and the structural representation of the dispersion means is as shown in Figure 1, packet
It includes：
Optical substrate 0 is configured to transmission light；The light source 1 of multiple collimations, is arranged on the side of optical substrate；It is more
On the surface for the side that optical substrate 0 is arranged in the light source 1 of a grating 2, multiple gratings 2 and multiple collimations correspondingly, quilt
It is configured to carry out dispersion to the different-waveband of the light from the light source 1 accordingly collimated respectively, so that all mesh in dispersed light beam
The angle of diffraction for marking the first-order diffraction wave of wavelength light is both less than the angle of total reflection between optical substrate 0 and air；Light-emitting window 3, with
The light source 1 of collimation is arranged in correspondence on the surface of the other side of optical substrate, is configured as taking out all in dispersed light beam
The first-order diffraction wave of target wavelength light.
When realization, the light source of above-mentioned collimation can be the relatively good light source of collimation, it is of course also possible to be ordinary light source
Add the light source of collimation component composition, collimation component can be micro-nano structure or light-absorption layer.Compared specifically, can be by collimation
The good wider LED chip of monochromatic spectrum is made, white light Micro-LED light source, monochrome Micro-LED light after can also collimating
Source or laser light source also but are not limited to these types.In order to reduce cost, the Micro-LED core that the present embodiment preferably collimates
Piece is as light source.
For optical substrate, body glass substrate can be set to, can also select the preferable resin of stability or poly-
Ester compounds can also use other substrates.Material is fixed according to actual needs, it is desirable that and the thickness of body glass substrate has certain thickness,
When being transferred to lower surface in body glass so as to the light after dispersion, there is certain distance between adjacent resolution wavelength, it is convenient under
The microchannel and photosensitive sensor size of surface face and position correspond.
The maximum angle at the first-order diffraction angle of optical substrate thickness t and all target wavelength light and the distance, delta of minimum angles
D meets following formula：Δ D=(tan θd-max-tanθd-min) * t, wherein θd-maxFor the maximum angle at first-order diffraction angle, θd-min
For the minimum angles at first-order diffraction angle, Δ D is light-emitting window width, can be according to the resolution ratio of spectrometer, photosensitive sensor
Size and each wavelength band size of light determine.By the setting, even if when photosensitive sensor cannot accomplish very little
It waits, distance, delta D can also be increased by changing the thickness of body glass.
The grating of the present embodiment is exactly simple grating, wherein the period of grating by the light for needing to be emitted wavelength, go out, enter
It penetrates the refractive index of material, enter angular and the light direction of design determines to codetermine, specifically, the period of each grating can be with
It is determined according to the refractive index at first-order diffraction angle, the wave band of the light source of each collimation and optical substrate；The duty ratio one of grating
As be 0.5, but this value can be deviateed in actual product design and (for example for the intensity for adjusting out light, balance display panel not
With position brightness difference the purpose of).The height of grating, according to requiring the intensity of the light of some wavelength or certain several wavelength to determine
It is fixed, it can be several hundred nanometers, be also possible to micron order.If it is other filtering structures, with the special wavelength and beam angle of optical filtering
Degree requires, and designs special construction, can be built-in micro-reflector or other micro-structures etc..
In the dispersion means of the present embodiment, optical grating construction is simple, and the light source and grating that collimate are arranged in a one-to-one correspondence, directly
It is primary that dispersion is realized by optical substrate, the higher efficiency of light energy utilization may be implemented.
The light-emitting window of target wavelength light is equipped with the optical grating construction of half-wavelength on the other side of above-mentioned optical substrate, and then can be with
Realize that collimation takes out the light of each wavelength.
In some embodiments, above-mentioned collimation component can also include the first black matrix 4, and the two of each light source are arranged in
Side.The width w1 of first black matrix 4 is determined according to following formula:
W1=2*tan θd-max*t.First black matrix of the present embodiment is mainly used to the light that absorption is not target angle incidence.
In some embodiments, above-mentioned dispersion means may include the second black matrix 5, set correspondingly with grating 2
It sets on the other side of optical substrate.As described in Figure 2, the second black matrix 5 at least covers the center of grating 2 on optical substrate 0
Orthographic projection point M to light-emitting window 3 lean on 1 one end N of close to sources range.Further as shown in figure 3, second black matrix 5
Center is overlapped on the direction perpendicular to optical substrate 0 with the center of grating 2, and the width w2 of the second black matrix 5 is：
W2=2*tan θd-min*t.The setting of second black matrix can reduce the interference of other wavelength lights in detection process,
Improve measurement accuracy and signal-to-noise ratio.
The material of above-mentioned first black matrix and the second black matrix may each be black photoresist resin film either metal foil
Film (Cr/CrO), thickness is for the purpose of absorbing non-targeted wavelength light, and thickness is in 100nm or so.
In some embodiments, the two sides of corresponding each light source are arranged in above-mentioned light-emitting window, taken out jointly with a wavelength
Light in range, and replace the light for taking out adjacent wavelength from the light-emitting window of two sides.The present embodiment takes light by two sides interval, can
Increase the spacing between adjacent wavelength, to make up the size limitation of photosensitive sensor.
In some embodiments, the diffracted intensity of first-order diffraction is arranged between 15-30% in diffraction light, which can be with
Reduce bigger level diffraction light bring crosstalk.
Second embodiment of the invention provides a kind of spectrometer, and the structural representation of the spectrometer is as shown in figure 3, include：
Dispersion means 11 in first embodiment；The another of the optical substrate of dispersion means is arranged in determinand channel 6
On side, to receive the target wavelength light being emitted from it；And detection substrate 7, it is provided with photosensitive sensor, to be measured
The light of object channel outgoing is detected.
Wherein, determinand channel includes microchannel, and the width and height of microchannel can be Nanoscale channels, can also
To be designed with specific reference to practical application, not do particular/special requirement to microchannel size than big or small.Microchannel can lead to
Cross photoetching, the method for etching is made in silicon, on glass or polymer (such as PDMS or PMMA), can also on other materials,
Material and formation to microchannel do not do particular/special requirement.The inner wall of miniflow channel is according to actual demand, generally in miniflow ditch
It is coated in road and dredges/hydrophilic membrane, make microfluid in microchannel according to the flowing of experiment demand or of short duration delay, such as Teflon
Dragon-AF hydrophobic layer, can be such that miniflow is not adhere in microchannel as far as possible, flow according to demand.
As shown in figure 4, for the structural schematic diagram in the determinand channel 6 being arranged in the second black matrix 5, determinand channel 6
Upper end be communicated with feed liquor pond 61, lower end is communicated with waste liquid pool 62.
The light-emitting window of above-mentioned photosensitive sensor 72 and target wavelength light on the other side of optical substrate is correspondingly arranged, and setting exists
On lower substrate 71, specifically, the target wavelength light that photosensitive sensor 71 is emitted with light-emitting window is arranged in a one-to-one correspondence.As it is desirable that light
Dependent sensor and light-emitting window correspond, precision between the two away from the light direction dependent on light coupling structure (array) and
The signal-to-noise ratio demand of optical detector fits closely preferably (centre may include buffering film layer etc.) with the two.Photosensitive sensor class
Type can be CCD, CMOS, PIN etc..
When realization, can be the droplet that a kind of microfluid is divided into numerous nanoliter or picoliters, into it is different to
Survey in object channel, with its specific wavelength occur physics perhaps chemical reaction according to microfluid before physics or chemical reaction
Information is carried afterwards to change, is detected by the photosensitive sensor below determinand channel, to mark, completes detection.After completing detection
Waste liquid enter waste liquid pool.
When specific implementation, at least one in the thickness, screen periods and raster count of setting optical substrate can be passed through
A parameter, to realize the resolution ratio of required spectrometer under the limitation of the size of photosensitive sensor.
Spectrometer provided in this embodiment can be applied to physics, chemistry, the biofacies Central Shanxi Plain, can be used for spectrum analysis,
The fields such as molecular diagnosis, food quarantine and division bacteria.
In the following, the principle of above-mentioned spectrometer and the selection of device are described in detail in conjunction with specific example and attached drawing.
(1) device architecture of the present embodiment forms substantially
Basic device structure is optical base-substrate+miniflow substrate+transducer.The present embodiment mainly uses the glass substrate of 2mm
As opticator substrate, it is mainly responsible for dialogue optical dispersion；Miniflow substrate can be an individual substrate, and material can be
PDMS is also possible to PMMA, is also possible to get rid of photoresist on optical base-substrate, and in specific region, the mode of exposure is realized, is done
Microchannel out.It is mainly used to the channel by microfluid or gas, the present embodiment uses spin-on photoresist, then uses
The mode of exposure directly processes microchannel in the upper surface of optical substrate.Micro reaction pool and waste liquid pool can be hidden with mask plate
The mode of gear exposes to obtain.Sensor substrate is that photosensitive sensor is integrated on transducer, can be glass substrate, can also
It to be the substrate of other materials, selects according to actual needs, main function is optical signalling of the detection by micro- detection object.In order to
The circuit of convenient intuitive observation and tracking, photosensitive sensor can be using the ZnO of transparent electrode such as ITO or Al doping.
(2) light source selects
A：Micro-LED polychromatic source.
The present embodiment selects the wider monochrome Micro-LED of spectrum as light source, realizes that subrane passes through grating dispersion
Purpose.
After different Micro-LED carry out collimation processing, grating region is entered.Collimation processing can use micro-nano structure
(such as buphthalmos structure) collimation can also block absorption stray light with black matrix and achieve the purpose that collimation.Also white light can be used
Micro-LED designs different gratings as light source, and the different wave band of dispersion realizes high-precision spectral dispersion.
B:Monochromatic wide spectrum Micro-LED light source.
If that select is the Micro-LED of Royal Blue [440nm, 460nm] or Blue [460nm, 480nm], can
To be 500nm with the period, line width and height are the simple grating of 250nm, obtained angle of diffraction, the distance apart from light source and one
Grade diffracted intensity comparison is as shown in 1 region and 2 regions of Fig. 5 a-5c.
The grating of other parameters can also be used, as long as the first-order diffraction angle for meeting maximum wavelength is less than optical medium to sky
The critical angle of gas (such as optical medium is glass, then critical angle is 41 °).When designing grating, in order to maximize Δ D, conveniently exist
Arrange within the scope of limited Δ D more sensors or microchannel, drop to the precision of spectral detection bigger, enable it is maximum and
The difference of the angle of diffraction of minimum wavelength is the bigger the better.
(3) chromatic dispersion principle and explanation
Single Micro-LED is by the grating dispersion of body glass surface, once to realize dispersion by body glass, with realize compared with
The high efficiency of light energy utilization can use following scheme：
1. all diffraction lights with first-order diffraction dispersion, reduce bigger level diffraction light bring crosstalk as far as possible；
2. the angle of diffraction of all first-order diffraction wavelength is both less than the angle of total reflection between glass and air
According to diffraction formula：
Wherein, niAnd θiRespectively incident spatial refractive index and incident angle, m are diffraction time, and Λ is screen periods, and λ is
Lambda1-wavelength, θdFor the angle between diffraction light direction and panel plane normal, ndFor the equivalent refractive index of glass and air.
According to formula (1), design dissipates incident light by grating transmitted colour, in order to reduce or avoid different diffraction time colors
Colour contamination is dissipated, makes all wavelength by only existing a diffraction time after grating, the angle of diffraction of each diffraction time is different,
Target wavelength light can successively be separated.However, it is difficult to realize the light within the scope of wide spectrum such as 380-780nm with a grating
All only one diffraction times therefore will be using multiple polychrome Micro-LED and its one-to-one simple grating, subrane
Diffraction dispersion.
As shown in fig. 6a-6c, to pass through the first-order diffraction angular distribution after 500nm grating, each wavelength distance light source
The distance of place center, the signal of first-order diffraction intensity distribution.
The distance (Distance) of point after dispersion where orthographic projection of each wavelength distance central light source on substrate can
To be calculated by formula (3)：
Distance=tan θd*t…(3)；
It wherein, is θdAngle of diffraction (Diffraction angle), t are the thickness of body glass.At this point, passing through formula (2)
Minimum and maximum angle of diffraction can be calculated, the distance between maximum wavelength and minimum wavelength after dispersion can be found out (Δ D):
Δ D=(tan θd-max-tanθd-min)*t…(4)；
Wherein, θd-maxAnd θd-minFor the minimum and maximum angle of first-order diffraction, t is body thickness of glass.From formula (3)-
(4) as can be seen that body thickness of glass t play the role of to the spacing between wavelength each after dispersion it is vital, and after dispersion
Distance and thickness t proportional, therefore, if microchannel or sensor cannot accomplish very little,
Distance can be increased by changing the thickness of body glass, to reach one-to-one relationship between three.
Micro-LED the right and left needs black matrix isolated environment light, while being greater than total reflection for absorbing angle of diffraction
The light at angle is reflected back upper surface by lower glass surface.The width of first black matrix of Micro-LED the right and left is w1:
W1=2*tan θd-max*t……(6)；
Same formula (5), t are body thickness of glass, θd-maxFor the maximum value of first-order diffraction angle.
First black matrix is used to absorb the light of the diffraction time greater than the angle of total reflection.
In addition, by diffraction properties, when area source collimates vertical incidence, after optical grating diffraction, +/- 1st
The angle of diffraction of diffraction time is identical, i.e., normal is symmetrical, and diffracted intensity is also identical (as shown in Figure 7).Based on this, Δ D can
Become original 2 times, then resolution ratio is changing to original half.
As seen in Figure 7, the 1st diffraction of the different wave length of the right and left is all that normal is symmetrical, and use is left and right
The Δ D on both sides takes out the light in same wave-length coverage jointly, so Δ D becomes original twice.In view of size sensor
It has been shown that, can take light at the region both sides interval of color separation, unilateral with (λi,λi-2...) position that goes out light opens microchannel, take out interval
The light of one wavelength, similarly, symmetrical another side is with (λi-1,λi-3...) exit positions take out corresponding wavelength light.Make one
Separation delta D between a wavelength and next wavelength becomes larger, and the defect of target call size cannot be accomplished by making up sensor.
Micro-LED light source and simple glass raster after the present embodiment collimation are prepared into glass substrate upper surface, lower glass
It is integrated with microchannel on glass substrate, the photosensitive sensor integrated in another glass substrate, top glass substrate goes out optical wavelength
It needs to correspond with the light-sensitive detector of lower glass substrate, convenient accurate monitoring penetrates the signal of determinand.
When detection, light Micro-LED light source, by grating transmit dispersion after, the lower surface of top glass substrate not
Different wave length is emitted with position.Upper lower glass surface is machined with microchannel, passes through under test gas or liquid in microchannel,
The light and determinand of specific wavelength carry out physics or chemical reaction, and the detector under microchannel receives final optical signalling,
Returned data analysis system again, complete to predetermined substance perhaps gas calibration or detection, that is, complete detection.
The present embodiment efficiently realizes wide spectrum using body glass as optical substrate using the simple grating of easy processing
The system of white light color separation and miniflow detection, the system can also use other micro- gases or other micro- detection fields.
Various embodiments of the present invention are described in detail above, but the present invention is not restricted to these specific embodiment,
Those skilled in the art can make a variety of variants and modifications embodiments on the basis of present inventive concept, these modifications and repair
Changing should all fall within scope of the present invention.
Claims (17)
1. a kind of dispersion means, which is characterized in that including：
Optical substrate is configured to transmission light；
The light source of multiple collimations is arranged on the side of the optical substrate；
The table of the side of the optical substrate is arranged in the light source of multiple collimations correspondingly for multiple gratings
On face, it is configured to carry out dispersion to the different-waveband of the light from the light source accordingly collimated, so that in dispersed light beam
The angle of diffraction of the first-order diffraction wave of all target wavelength light is both less than the angle of total reflection between optical substrate and air；
Light-emitting window is arranged in correspondence on the surface of the other side of the optical substrate with the light source of the collimation, is configured
For the first-order diffraction wave for taking out all target wavelength light in the dispersed light beam.
2. dispersion means as described in claim 1, which is characterized in that
The thickness t of the optical substrate is at a distance from the maximum angle at the first-order diffraction angle of all target wavelength light and minimum angles
Δ D meets following formula：Δ D=(tan θd-max-tanθd-min) * t, wherein θd-maxFor the first-order diffraction of all target wavelength light
The maximum angle at angle, θd-minFor the minimum angles at the first-order diffraction angle of all target wavelength light, Δ D is the width of the light-emitting window
Degree.
3. dispersion means as claimed in claim 2, which is characterized in that the dispersion means include：
First black matrix of the two sides of each light source is set, and the width w1 of first black matrix is：
W1=2*tan θd-max*t。
4. dispersion means as claimed in claim 2, which is characterized in that the dispersion means include：
Second black matrix is arranged on the other side of the optical substrate correspondingly with the grating, and described
It is close to the light-emitting window that two black matrix at least cover orthographic projection point of the center of the grating on the optical substrate
The range of described light source one end.
5. dispersion means as described in claim 1, which is characterized in that
The center of second black matrix is overlapped on the direction perpendicular to the optical substrate with the center of the grating, described
The width w2 of second black matrix is：
W2=2*tan θd-min*t。
6. dispersion means as described in claim 1, which is characterized in that
The period of each grating is according to first-order diffraction angle, the refractive index of the wave band of the light source of each collimation and the optical substrate
To determine.
7. dispersion means as claimed in claim 2, which is characterized in that the light source of the collimation is by light source and collimation component structure
At the collimation component is micro-nano structure or light-absorption layer.
8. dispersion means as claimed in claim 7, which is characterized in that
The two sides of corresponding each light source are arranged in the light-emitting window, taken out jointly with the light in wave-length coverage, and from described
The light-emitting window of two sides alternately takes out the light of adjacent wavelength.
9. dispersion means as described in claim 1, which is characterized in that
The light source is the micro-led Micro-LED light source of white light or monochrome Micro-LED light source.
10. dispersion means as described in claim 1, which is characterized in that
The light-emitting window of target wavelength light is equipped with the optical grating construction of half-wavelength on the other side of the optical substrate.
11. dispersion means as described in claim 1, which is characterized in that
The diffracted intensity of first-order diffraction is between 15-30% in diffraction light.
12. a kind of spectrometer, which is characterized in that including：
Dispersion means described in any one of -11 according to claim 1；
Determinand channel is arranged on the other side of the optical substrate of the dispersion means, to receive to go out from it
The target wavelength light penetrated；And
Substrate is detected, photosensitive sensor is provided with, is detected with the light being emitted to the determinand channel.
13. spectrometer as claimed in claim 12, which is characterized in that
The determinand channel includes microchannel, and modified film layer is coated by etching on substrate, and on its inner wall.
14. spectrometer as claimed in claim 12, which is characterized in that
The dispersion means include the second black matrix, are arranged in described in the optical substrate correspondingly with the grating
On the other side, the upper end in the determinand channel is communicated with feed liquor pond, and lower end is communicated with waste liquid pool, and the determinand channel is set
It sets in second black matrix.
15. spectrometer as claimed in claim 12, which is characterized in that
The light-emitting window of the photosensitive sensor and target wavelength light on the other side of the optical substrate is correspondingly arranged.
16. spectrometer as claimed in claim 15, which is characterized in that
The target wavelength light that the photosensitive sensor is emitted with the light-emitting window is arranged in a one-to-one correspondence.
17. spectrometer as claimed in claim 12, which is characterized in that
At least one parameter in the thickness of the optical substrate, screen periods and raster count is according to photosensitive sensor
Size and the setting of the resolution ratio of required spectrometer.
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