CN108917655B - Rotating platform and multi-range planar interference angle measuring system - Google Patents
Rotating platform and multi-range planar interference angle measuring system Download PDFInfo
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- CN108917655B CN108917655B CN201810818139.5A CN201810818139A CN108917655B CN 108917655 B CN108917655 B CN 108917655B CN 201810818139 A CN201810818139 A CN 201810818139A CN 108917655 B CN108917655 B CN 108917655B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The invention discloses a rotary platform, which comprises a fixed base, a rotary table and two drivers, wherein the upper surface of the fixed base is provided with a groove matched with the shape of the rotary table; the turntable comprises a central circular rotor, two rotating arms are symmetrically arranged on two sides of the central circular rotor, two drivers are distributed in a central symmetry mode by taking the circle center of the central circular rotor as the center, and the two drivers are used for driving the two rotating arms to rotate in the same direction; the rotary platform can avoid the center from generating translation when rotating. The invention also provides a multi-range planar interference angle measuring system which is compact in structure, small in environmental influence and high in angular resolution, and comprises the rotating platform, the plane mirror to be measured and the angle measuring interferometer, wherein the plane mirror to be measured is placed on the upper surface of the central circular rotor, and the angle measuring interferometer is arranged on one side of the rotating platform.
Description
Technical Field
The invention relates to the field of optical precision measurement, in particular to a rotary platform and a multi-path plane interference angle measurement system.
Background
High-precision angle control and measurement are key technologies of optical precision measuring instruments, and are widely applied to the precision measuring fields of optical instruments, diffractometers and the like. The current small-angle revolving stage is lever mode, and swinging boom one end uses the hinge as supporting shaft, and the other end revolutes the pivot and produces the angular rotation under the promotion of drivers such as motor or piezoceramics, and when being surveyed the piece and placing measurationly on this revolving stage, because this kind of revolving stage takes place the translation easily when rotatory, the orbit that can't guarantee by the driver part is rotating around the axle center, often can influence the precision to being surveyed a regulation and control of piece angle.
In addition, the lever-type small-angle rotary table is often used together with a laser interferometer to measure the angle deflection of a measured part on the rotary table, light beams emitted by the laser interferometer are split and respectively incident on two right-angle prisms, the two lasers are respectively reflected by the right-angle prisms and then coincide again, however, the optical path difference of the two lasers is changed due to the fact that the measured part rotates in the angle generated on the lever-type small-angle rotary table, interference signals are changed, and the detector receives the interference signals, so that the measurement of the angle deflection of the measured part is achieved. However, the optical path of the existing laser interferometer is generally single reflection, the resolution is low, and in order to improve the measurement resolution, the distance between the laser beams is often increased, so that the distance between two reflecting mirrors in the whole device is large, the structure is large, and the laser interferometer is easily influenced by the change of temperature and air refractive index.
Disclosure of Invention
The invention aims to provide a rotating platform and a multi-range plane interference angle measuring system, wherein the rotating platform is used for ensuring that the rotating track of a plane mirror to be measured rotates by taking the rotating center of the rotating platform as an axis, so that the angle regulation and control precision of the plane mirror to be measured is improved, and the measuring precision of the multi-range plane interference angle measuring system is favorably improved.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a rotary platform, which comprises a fixed base, a rotary table and two drivers, wherein the upper surface of the fixed base is provided with a groove matched with the shape of the rotary table, and the rotary table is rotatably embedded and installed in the groove; the turntable comprises a central circular rotor, two rotating arms are symmetrically arranged on two sides of the central circular rotor, the two drivers are distributed in a central symmetry mode by taking the circle center of the central circular rotor as the center, the output end of each driver is embedded in the upper surface of each rotating arm, and the other end of each driver is embedded in the upper surface of the fixed base; the two drivers are used for simultaneously driving the two rotating arms to rotate in the same direction.
Optionally, central circular rotor and two the swinging boom integrated into one piece, every the outer end of swinging boom with the periphery of central circular rotor all through flexible hinge with the interior wall connection of recess, central circular rotor the swinging boom fixed baseplate and flexible hinge is wire-electrode cutting integrated into one piece.
Optionally, the swinging boom with the circular rotor in center is outside radial as the center, every the top of swinging boom all is through two flexible hinge with the inner wall connection of recess, the periphery of the circular rotor in center is through evenly distributed's six flexible hinge with the inner wall connection of recess.
Optionally, the driver is a piezoelectric ceramic stack, the top end of each piezoelectric ceramic stack is used for pushing the rotating arm to rotate, and the tail end of each piezoelectric ceramic stack is fixed on the fixed base through a bolt.
The invention also provides a multi-range plane interference angle measuring system which comprises an angle measuring interferometer and the rotating platform, wherein the upper surface of the central circular rotor is used for placing the plane mirror to be measured, and the angle measuring interferometer is arranged on one side of the rotating platform.
Optionally, the angle measuring interferometer includes a first polarization beam splitter, the first polarization beam splitter includes two first right-angle prisms, the two first right-angle prisms are spliced to form a rectangular polarization beam splitter, an 1/4 wave plate is laid on a front end face of the rectangular polarization beam splitter, and the 1/4 wave plate is used for being placed in parallel with a measured surface of the measured plane mirror; two second right-angle prisms are arranged at the rear end of the rectangular polarization spectroscope side by side, and the plane with the largest area of the two second right-angle prisms is parallel to the rear end face of the rectangular polarization spectroscope; one side of the rectangular polarization spectroscope is provided with a second polarization spectroscope and two third right-angle prisms, the second polarization spectroscope comprises a fourth right-angle prism and a parallelogram prism, the maximum plane of the fourth right-angle prism is in butt joint with an inclined plane of the parallelogram prism, the fourth right-angle prism and the parallelogram prism are spliced into a right-angle trapezoidal polarization spectroscope, the long bottom surface of the right-angle trapezoidal polarization spectroscope is close to and parallel to the side end surface of the rectangular polarization spectroscope, the two third right-angle prisms are symmetrically distributed on two sides of the second polarization spectroscope, and the maximum plane of the area of the two third right-angle prisms is close to and parallel to the side end surface of the rectangular polarization spectroscope.
Optionally, the number of the right-angle trapezoidal polarization beam splitters is two, the long bottom surfaces of the two right-angle trapezoidal polarization beam splitters are close to and parallel to the side end surface of the rectangular polarization beam splitter, and the two right-angle trapezoidal polarization beam splitters are arranged in a reverse overlapping manner along the height direction of the rectangular polarization beam splitter; half-wave plates are laid on the long bottom surfaces of the two right-angle trapezoidal polarization spectroscopes and are arranged on the parallelogram prism.
Optionally, the first right-angle prism, the second right-angle prism, the third right-angle prism, and the fourth right-angle prism are all isosceles right-angle prisms, the height of each second right-angle prism is equal to the height of the rectangular polarization beam splitter, the width of the largest plane of the area of each second right-angle prism is equal to half of the length of the rear end surface of the rectangular polarization beam splitter, and the side edges of the second right-angle prisms are parallel to the side edges of the first right-angle prisms; the sum of the length of the long bottom surface of the right-angle trapezoidal polarization spectroscope and the heights of the two third right-angle prisms is equal to the length of the side surface of the rectangular polarization spectroscope, and the side edge of the third right-angle prism is perpendicular to the side edge of the first right-angle prism.
Optionally, the two second right-angle prisms are both arranged at intervals with the rear end surface of the rectangular polarization beam splitter; the two third right-angle prisms and the two right-angle trapezoidal polarization beam splitters are arranged at intervals with the side faces of the rectangular polarization beam splitter.
Optionally, the two second right-angle prisms are both bonded to the rear end surface of the rectangular polarizing beam splitter; the two third right-angle prisms and the two right-angle trapezoidal polarization beam splitters are bonded to the side faces of the rectangular polarization beam splitter.
Compared with the prior art, the invention has the following technical effects:
according to the rotary platform provided by the invention, the drivers are simultaneously installed on the two rotary arms, and the central circular rotor and the rotary arms are connected with the fixed base through the flexible hinges and simultaneously drive the two drivers. The turntable can only generate rotation moment, the table top of the turntable is prevented from translating, and the rotation axis of the plane mirror to be measured is ensured to be concentric with the rotation axis of the turntable.
In addition, in the multi-range planar interference angle measuring system, the angle measuring interferometer has a simple structure, four reflections can be realized by utilizing the planar reflector, the angle resolution is improved by 4 times, the angle resolution is high, and the use of the angle measuring interferometer is slightly influenced by the environment; meanwhile, the angle measuring interferometer is matched with the rotating platform to generate a stable platform for measuring the angular deviation of the plane mirror to be measured, so that the measurement precision of the angle measuring interferometer for measuring the angular deviation of the plane mirror to be measured can be effectively improved, and the multi-range plane mirror angle measurement effect is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic structural view of a rotary platform according to the present invention;
FIG. 2 is a schematic structural diagram of a multi-range planar interferometric angle measuring system according to the present invention;
FIG. 3 is a schematic structural diagram of a first dual-frequency laser interference-based angle measurement interferometer in the present invention;
FIG. 4 is a schematic structural diagram of a second dual-frequency laser interference-based angle measurement interferometer according to the present invention;
FIG. 5 is a schematic structural diagram of an angle measuring interferometer based on single-frequency laser interference according to the present invention;
wherein, the reference number is 1, fixing the base; 2. a central circular rotor; 3. a rotating arm; 4. a flexible hinge; 5. a driver; 6. a plane mirror to be measured; 7. a bolt; 8. an angle measurement interferometer; 9. a first polarizing beam splitter; 9-1, a first right-angle prism a; 9-2, a first right-angle prism b; 10. a second right-angle prism a; 11. a second right-angle prism b; 12. a third right-angle prism a; 13. a third right-angle prism b; 14. a first right-angle trapezoidal polarizing beamsplitter; 15. a second right angle trapezoidal polarizing beamsplitter; 16. 1/4 a wave plate; 17. a first half wave plate; 18. a second half-wave plate; 19. a reference laser beam; 20. the laser beam is measured.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a rotary platform with a non-translational center during rotation and a multi-range planar interference angle measuring system with compact structure, small environmental influence and high angular resolution.
Based on the above, the invention provides a rotary platform, which comprises a fixed base, a rotary table and two drivers, wherein the upper surface of the fixed base is provided with a groove matched with the shape of the rotary table, and the rotary table is rotatably embedded and installed in the groove; the turntable comprises a central circular rotor, two rotating arms are symmetrically arranged on two sides of the central circular rotor, two drivers are distributed in a central symmetry mode by taking the circle center of the central circular rotor as the center, the output end of each driver is embedded in the upper surface of each rotating arm, and the other end of each driver is embedded in the upper surface of the fixed base; the two drivers are used for simultaneously driving the two rotating arms to rotate in the same direction.
The invention also provides a multi-range plane interference angle measuring system, which comprises a plane mirror to be measured, an angle measuring interferometer and the rotating platform, wherein the plane mirror to be measured is arranged on the upper surface of the central circular rotor, and the angle measuring interferometer is arranged on one side of the rotating platform; the angle measurement interferometer comprises a first polarizing beam splitter, the first polarizing beam splitter comprises two first right-angle prisms, the two first right-angle prisms are spliced to form a rectangular polarizing beam splitter, 1/4 wave plates are laid on the front end face of the rectangular polarizing beam splitter, and 1/4 wave plates are used for being placed in parallel with the measured surface of the measured plane mirror; two second right-angle prisms are arranged at the rear end of the rectangular polarization spectroscope side by side, and the plane with the largest area of the two second right-angle prisms is arranged in parallel to the rear end face of the rectangular polarization spectroscope; the second polarization spectroscope and two third right-angle prisms are arranged on one side of the rectangular polarization spectroscope, the second polarization spectroscope comprises a fourth right-angle prism and a parallelogram prism, the maximum plane of the fourth right-angle prism is in butt joint with an inclined plane of the parallelogram prism, the fourth right-angle prism and the parallelogram prism are spliced into a right-angle trapezoidal polarization spectroscope, the long bottom surface of the right-angle trapezoidal polarization spectroscope is close to and parallel to the side end surface of the rectangular polarization spectroscope, the two third right-angle prisms are symmetrically distributed on the two sides of the second polarization spectroscope, and the maximum plane of the area of the two third right-angle prisms is close to and parallel to the side end surface of the rectangular polarization spectroscope.
According to the rotary platform provided by the invention, the drivers are simultaneously installed on the two rotary arms, and the central circular rotor and the rotary arms are connected with the fixed base through the flexible hinges and simultaneously drive the two drivers. The turntable can only generate rotation moment, the table top of the turntable is prevented from translating, and the rotation axis of the plane mirror to be measured is ensured to be concentric with the rotation axis of the turntable.
In addition, in the multi-range planar interference angle measuring system, the angle measuring interferometer has a simple structure, four reflections can be realized by utilizing the planar reflector, the angle resolution is improved by 4 times, the angle resolution is high, and the use of the angle measuring interferometer is slightly influenced by the environment; meanwhile, the angle measuring interferometer is matched with the rotating platform to generate a stable platform for measuring the angular deviation of the plane mirror to be measured, so that the measurement precision of the angle measuring interferometer for measuring the angular deviation of the plane mirror to be measured can be effectively improved, and the multi-range plane mirror angle measurement effect is realized.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The first embodiment is as follows:
as shown in fig. 1, the embodiment provides a rotary platform, which includes a fixed base 1, a turntable and two drivers 5, wherein a groove matched with the shape of the turntable is formed on the upper surface of the fixed base 1, and the turntable is rotatably embedded and installed in the groove; the turntable comprises a central circular rotor 2, two rotating arms 3 are symmetrically arranged on two sides of the central circular rotor 2, two drivers 5 are distributed in a central symmetry mode by taking the circle center of the central circular rotor 2 as the center, the output end of each driver 5 is embedded in the upper surface of each rotating arm 3, and the other end of each driver 5 is embedded in the upper surface of the fixed base 1; the two drivers 5 are used for simultaneously driving the two rotating arms 3 to rotate in the same direction.
In this embodiment, as shown in fig. 1, the central circular rotor 2 and the two rotating arms 3 are integrally formed, the outer end of each rotating arm 3 and the outer periphery of the central circular rotor 2 are connected to the inner wall of the groove through a flexible hinge 4, a rotating gap is left between the outer periphery of the rotating arm 3 and the outer periphery of the central circular rotor 2 and the inner wall of the groove, and the central circular rotor 2, the rotating arms 3, the fixed base 1 and the flexible hinges 4 are integrally formed by wire cutting.
Further, as shown in fig. 1, the rotating arms 3 are outward radial around the central circular rotor 2, the top end of each rotating arm 3 is connected with the inner wall of the groove through two flexible hinges 4, and the periphery of the central circular rotor 2 is connected with the inner wall of the groove through six flexible hinges 4 which are uniformly distributed.
Further, as shown in fig. 1, the driver 5 is a piezoelectric ceramic stack, a top end of each piezoelectric ceramic stack is used for pushing the rotating arm 3 to rotate, and a tail end of each piezoelectric ceramic stack is fixed on the fixed base 1 through a bolt 7.
According to the rotary platform provided by the invention, the drivers are simultaneously installed on the two rotary arms, the central circular rotor and the rotary arms are both connected with the fixed base through the flexible hinges, and the two drivers are simultaneously driven, so that the rotary platform only generates a rotation moment, the table top of the rotary platform is prevented from translating, and the rotation axis of the plane mirror to be measured is ensured to be concentric with the rotation axis of the rotary platform.
Example two:
as shown in fig. 2 to 3, the present embodiment provides a multi-path planar interferometric angle measuring system, which includes a plane mirror 6 to be measured, an angle interferometer 8 and a rotating platform in the first embodiment, wherein the plane mirror 6 to be measured is configured to be placed on the upper surface of the central circular rotor 2, and the angle interferometer 8 is configured to be disposed on one side of the rotating platform; the angle measuring interferometer 8 comprises a first polarizing beam splitter 9, the first polarizing beam splitter 9 comprises two first right-angle prisms, for the convenience of distinguishing, the two first right-angle prisms are divided into a first right-angle prism a9-1 and a first right-angle prism b9-2, as shown in fig. 2-4, the first right-angle prism a9-1 and the first right-angle prism b9-2 are spliced to form a rectangular polarizing beam splitter, namely the first polarizing beam splitter 9 is a rectangular polarizing beam splitter, 1/4 wave plates 16 and 1/4 wave plates 16 are laid on the front end face of the rectangular polarizing beam splitter and are used for being placed in parallel with the measured surface of the measured plane mirror 6; two second right-angle prisms are arranged at the rear end of the rectangular polarization beam splitter side by side, the plane with the largest area of the two second right-angle prisms is parallel to the rear end face of the rectangular polarization beam splitter, and for convenience of distinguishing, the two second right-angle prisms are divided into a second right-angle prism a10 and a second right-angle prism b 11; one side of the rectangular polarizing beam splitter is provided with a second polarizing beam splitter and two third right-angle prisms, which are now divided into a third right-angle prism a12 and a third right-angle prism b 13 for easy distinction, as shown in fig. 2 to 4, the second pbs includes a fourth right-angle prism and a parallelogram prism, a maximum plane of the fourth right-angle prism is butted with an inclined plane of the parallelogram prism, the fourth right-angle prism and the parallelogram prism are spliced into a right-angle trapezoidal polarizing beamsplitter, a long bottom surface of the right-angle trapezoidal polarizing beamsplitter is disposed close to and parallel to a side end surface of the rectangular polarizing beamsplitter, the third right-angle prism a12 and the third right-angle prism b 13 are symmetrically distributed on two sides of the second pbs, and the third right-angle prism a12 and the third right-angle prism b 13 are both disposed close to and parallel to the side end surface of the rectangular polarizing beamsplitter with a maximum area plane.
In this embodiment, as shown in fig. 2 to 3, two right-angle trapezoidal polarization beam splitters are provided, and for the convenience of distinguishing, the right-angle trapezoidal polarization beam splitter is now divided into a first right-angle trapezoidal polarization beam splitter 14 and a second right-angle trapezoidal polarization beam splitter 15, the two right-angle trapezoidal polarization beam splitters are both arranged with long bottom surfaces close to and parallel to the side end surfaces of the rectangular polarization beam splitter, and the two right-angle trapezoidal polarization beam splitters are arranged in a reverse superposition manner along the height direction of the rectangular polarization beam splitter; half-wave plates are laid on the long bottom surfaces of the two right-angle trapezoidal polarization beam splitters, the half-wave plates are arranged on the parallelogram prisms, in order to facilitate distinguishing, a first half-wave plate 17 is arranged on the first right-angle trapezoidal polarization beam splitter 14, and a second half-wave plate 18 is arranged on the second right-angle trapezoidal polarization beam splitter 15.
Further, as shown in fig. 2 to 3, the first right-angle prism a9-1, the first right-angle prism b9-2, the second right-angle prism a10, the second right-angle prism b11, the third right-angle prism a12, the third right-angle prism b 13 and the fourth right-angle prism are all isosceles right-angle prisms, wherein the first right-angle prism a9-1 and the first right-angle prism b9-2, the second right-angle prism a10 and the second right-angle prism b11, and the third right-angle prism a12 and the third right-angle prism b 13 are all identical in two-two structure size. The heights of the second right-angle prism a10 and the second right-angle prism b11 are equal to the height of the rectangular polarization beam splitter, the widths of the planes with the largest areas of the second right-angle prism a10 and the second right-angle prism b11 are both equal to half of the length of the rear end face of the rectangular polarization beam splitter, and the axes of the second right-angle prism a10 and the second right-angle prism b11 are both parallel to the axis of the first right-angle prism; the sum of the length of the long bottom surface of each right-angle trapezoidal polarization beam splitter, the height of the third right-angle prism a12 and the height of the third right-angle prism b 13 is equal to the length of the side surface of the rectangular polarization beam splitter, and the axes of the third right-angle prism a12 and the third right-angle prism b 13 are perpendicular to the axis of the first right-angle prism.
Further, as shown in fig. 2 to 3, a second right-angle prism a10 and a second right-angle prism b11 are both arranged at an interval with the rear end surface of the rectangular polarization beam splitter; the third right-angle prism a12 and the third right-angle prism b 13, and the first right-angle trapezoidal polarizing beam splitter 14 and the second right-angle trapezoidal polarizing beam splitter 15 are disposed at intervals from the side surface of the rectangular polarizing beam splitter. The specific space size needs to be adaptively adjusted according to actual conditions.
The following describes a specific use of the multi-path planar interferometric angle measuring system of the present embodiment, wherein the incident light is a dual-frequency laser beam.
When the multi-range planar interference angle measuring system of the present embodiment is used to measure the planar interference angle of the plane mirror 6 to be measured, the plane mirror 6 to be measured is first placed on the upper surface of the central circular rotor 2, and the surface to be measured of the plane mirror 6 to be measured is directly opposite to the 1/4 wave plate 16 on the side surface of the rectangular polarization beam splitter 9.
The dual-frequency laser beam is split into two beams of horizontally polarized light and vertically polarized light after entering from the first right-angle trapezoidal polarization beam splitter 14. The horizontal polarized light enters the first polarization beam splitter 9 as a reference laser beam 19 after passing through the first half-wave plate 17, is reflected by a splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, then exits from the 1/4 wave plate 16 and is emitted onto the plane mirror 6 to be measured, and then the light is reflected by the plane mirror 6 to be measured back to the first polarization beam splitter 9 and directly reaches the second right-angle prism b11 and then is refracted by the second right-angle prism b11 and returns to the first polarization beam splitter 9; then, the light rays are emitted from the 1/4 wave plate 16 for the second time, the emergent light is reflected back to the first polarization spectroscope 9 by the measured plane mirror 6 for the second time, and after being reflected by a light splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, the light rays are reflected for the third time to return to the first polarization spectroscope 9 after reaching the third right-angle prism a 12; then, the light is reflected by the splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, then exits from the 1/4 wave plate 16, and is incident on the measured plane mirror 6, is reflected by the measured plane mirror 6 for the third time back to the first polarization beam splitter 9, and directly reaches the second right-angle prism b11, and is then reflected by the second right-angle prism b11 back to the first polarization beam splitter 9, and then the light is emitted from the 1/4 wave plate 16, and the emergent light is reflected by the measured plane mirror 6 for the fourth time back to the first polarization beam splitter 9, and is then reflected by the splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, and then is emitted by the second right-angle trapezoidal polarization beam splitter 15, thereby completing the path of the reference laser beam.
Meanwhile, vertical polarized light serving as a measuring laser beam 20 enters the first polarizing beam splitter 9 after being incident from the first right-angle trapezoidal polarizing beam splitter 14 and reflected by the inclined plane of the first right-angle trapezoidal polarizing beam splitter 14, is reflected by a splitting plane between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, then exits from the 1/4 wave plate 16 and is emitted onto the plane mirror 6 to be measured, and then the light is reflected back to the first polarizing beam splitter 9 by the plane mirror 6 to be measured and is directly reflected back to the second right-angle prism a10 and then is refracted back to the first polarizing beam splitter 9 by the second right-angle prism a 10; then, the light rays are emitted from the 1/4 wave plate 16 for the second time, the emergent light is reflected back to the first polarization spectroscope 9 by the measured plane mirror 6 for the second time, and after being reflected by a light splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, the light rays are reflected for the third time to return to the first polarization spectroscope 9 after reaching the third right-angle prism b 13; then, the light is reflected by the splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, then exits from the 1/4 wave plate 16, and is incident on the measured plane mirror 6, is reflected by the measured plane mirror 6 for the third time to the first polarization beam splitter 9, and directly reaches the second right-angle prism a10, then is refracted by the second right-angle prism a10 to return to the first polarization beam splitter 9, and then the light is emitted from the 1/4 wave plate 16, and the emergent light is reflected by the measured plane mirror 6 for the fourth time to the first polarization beam splitter 9, then is reflected by the splitting surface between the first right-angle prism a9-1 and the first right-angle prism b9-2 for 90 degrees, and then is emitted by the second right-angle trapezoidal polarization beam splitter 15, thereby completing the path of the measuring laser beam 20.
The reference laser beam 19 and the measuring laser beam 20 are converged into one path after being emitted from the second right-angle trapezoidal polarization beam splitter 15; when the measured plane mirror 6 rotates on the rotating platform, the distances from the measuring laser beam 20 and the reference laser beam 19 to the measured plane mirror 6 change, and after the measuring laser beam 20 and the reference laser beam 19 exit from the second right-angle trapezoidal polarization beam splitter 15, the optical path difference between the measuring laser beam 20 and the reference laser beam 19 changes to cause the change of interference signals, so that the purpose of measuring the angle of the measured plane mirror 6 is achieved.
Therefore, in the multi-range planar interference angle measuring system, the angle measuring interferometer has a simple structure, four reflections can be realized by utilizing the planar reflector, the angle resolution is improved by 4 times, the angle resolution is high, and the use of the angle measuring interferometer is slightly influenced by the environment; meanwhile, the angle measuring interferometer is matched with the rotating platform to generate a stable platform for measuring the angular deviation of the plane mirror to be measured, so that the measurement precision of the angle measuring interferometer for measuring the angular deviation of the plane mirror to be measured can be effectively improved, and the multi-range plane mirror angle measurement effect is realized.
Example three:
as shown in fig. 4, the present embodiment provides a second kind of angle measuring interferometer based on dual-frequency laser interference, and the present embodiment is different from the angle measuring interferometer in the second embodiment only in that: in the embodiment, the second right-angle prism a10 and the second right-angle prism b11 are both adhered to the rear end surface of the first polarizing beam splitter 9; a third right-angle prism a12, a third right-angle prism b 13, a first right-angle trapezoidal polarizing beam splitter 14, and a second right-angle trapezoidal polarizing beam splitter 15 are also attached to the side surface of the first polarizing beam splitter 9. Half-wave plates are laid between the first right-angle trapezoidal polarization beam splitter 14 and the second right-angle trapezoidal polarization beam splitter 15 and the side surface of the first polarization beam splitter 9, wherein a first half-wave plate 17 is bonded between the parallelogram prism of the first right-angle trapezoidal polarization beam splitter 14 and the first polarization beam splitter 9, and a second half-wave plate 18 is bonded between the parallelogram prism of the second right-angle trapezoidal polarization beam splitter 15 and the first polarization beam splitter 9. The angle measurement interferometer of the present embodiment is also applicable to dual-frequency incident light, except for the above differences, the using method, the light direction and the measurement effect that can be achieved of the angle measurement interferometer of the present embodiment and the second embodiment are completely the same, and are not described herein again.
Example four:
as shown in fig. 5, the present embodiment provides an angle measuring interferometer based on single-frequency laser beam incidence, and compared with the second embodiment, the difference is that no half-wave plate is disposed between the first right-angle trapezoidal polarization beam splitter 14 and the second right-angle trapezoidal polarization beam splitter 15 in the present embodiment and the side surface of the first polarization beam splitter 9. The single-frequency laser beam is vertically polarized and is directly split into two beams after being incident by the first right-angle trapezoidal polarization beam splitter 14 without arranging a half-wave plate. The path of the polarized light after the light splitting in the angle measuring interferometer and the measurement effect that can be achieved are completely the same as those of the second embodiment, and are not described herein again.
In addition, in the angle measuring interferometer based on single-frequency laser beam incidence, the arrangement manner shown in the third embodiment in which the second right-angle prism a10 and the second right-angle prism b11 are both bonded to the rear end surface of the first polarization beam splitter 9, and the third right-angle prism a12, the third right-angle prism b 13, the first right-angle trapezoidal polarization beam splitter 14 and the second right-angle trapezoidal polarization beam splitter 15 are also all bonded to the side surface of the first polarization beam splitter 9 may be adopted, and compared with the third embodiment, the difference is only that no half-wave plate is provided between the first right-angle trapezoidal polarization beam splitter 14 and the second right-angle trapezoidal polarization beam splitter 15 and the side surface of the first polarization beam splitter 9. The single-frequency laser beam is directly split into two beams after being incident through the first right-angle trapezoidal polarization beam splitter 14, and a half-wave plate is not needed to be arranged. The paths of the split horizontal polarized light and vertical polarized light in the angle measuring interferometer and the measurement effect that can be achieved are completely the same as those in the second embodiment, and are not described again here.
Therefore, the angle measurement interferometer of the embodiment has a simple structure, can realize four-time reflection by utilizing the plane reflector, improves the angle resolution by 4 times, has high angle resolution, and is little influenced by the environment when used; meanwhile, the angle measuring interferometer is matched with the rotating platform to generate a stable platform for measuring the angular deviation of the plane mirror to be measured, so that the measurement precision of the angle measuring interferometer for measuring the angular deviation of the plane mirror to be measured can be effectively improved, and the multi-range plane mirror angle measurement effect is realized.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A rotary platform, characterized by: the turntable comprises a fixed base, a turntable and two drivers, wherein a groove matched with the turntable in shape is formed in the upper surface of the fixed base, and the turntable is embedded in the groove in a rotatable mode; the turntable comprises a central circular rotor, two rotating arms are symmetrically arranged on two sides of the central circular rotor, the two drivers are distributed in a central symmetry mode by taking the circle center of the central circular rotor as the center, the output end of each driver is embedded in the upper surface of each rotating arm, and the other end of each driver is embedded in the upper surface of the fixed base; the two drivers are used for simultaneously driving the two rotating arms to rotate in the same direction.
2. The rotary platform of claim 1, wherein: the circular rotor in center and two swinging boom integrated into one piece, every the outer end of swinging boom with the periphery of the circular rotor in center all through flexible hinge with the interior wall connection of recess, the circular rotor in center the swinging boom fixed baseplate and flexible hinge is wire-electrode cutting integrated into one piece.
3. The rotary platform of claim 2, wherein: the swinging boom with the circular rotor in center is outside radial, every the top of swinging boom all is through two flexible hinge with the inner wall connection of recess, the periphery of the circular rotor in center is through evenly distributed's six flexible hinge with the inner wall connection of recess.
4. The rotary platform of claim 3, wherein: the driver is a piezoelectric ceramic stack, the top end of each piezoelectric ceramic stack is used for pushing the rotating arm to rotate, and the tail end of each piezoelectric ceramic stack is fixed on the fixed base through a bolt.
5. A multiple-path plane interference angle measuring system is characterized in that: the rotary platform comprises an angle measuring interferometer and the rotary platform according to any one of claims 1 to 4, wherein the upper surface of the central circular rotor is used for placing a plane mirror to be measured, and the angle measuring interferometer is arranged on one side of the rotary platform.
6. The multi-path planar interferometric angle measuring system of claim 5, wherein: the angle measuring interferometer comprises a first polarizing beam splitter, the first polarizing beam splitter comprises two first right-angle prisms, the two first right-angle prisms are spliced to form a rectangular polarizing beam splitter, an 1/4 wave plate is laid on the front end face of the rectangular polarizing beam splitter, and the 1/4 wave plate is used for being placed in parallel with the measured surface of the measured plane mirror; two second right-angle prisms are arranged at the rear end of the rectangular polarization spectroscope side by side, and the plane with the largest area of the two second right-angle prisms is parallel to the rear end face of the rectangular polarization spectroscope; one side of the rectangular polarization spectroscope is provided with a second polarization spectroscope and two third right-angle prisms, the second polarization spectroscope comprises a fourth right-angle prism and a parallelogram prism, the maximum plane of the fourth right-angle prism is in butt joint with an inclined plane of the parallelogram prism, the fourth right-angle prism and the parallelogram prism are spliced into a right-angle trapezoidal polarization spectroscope, the long bottom surface of the right-angle trapezoidal polarization spectroscope is close to and parallel to the side end surface of the rectangular polarization spectroscope, the two third right-angle prisms are symmetrically distributed on two sides of the second polarization spectroscope, and the maximum plane of the area of the two third right-angle prisms is close to and parallel to the side end surface of the rectangular polarization spectroscope.
7. The multi-path planar interferometric angle measuring system of claim 6, wherein: the number of the right-angle trapezoidal polarization spectroscopes is two, the long bottom surfaces of the two right-angle trapezoidal polarization spectroscopes are close to and parallel to the side end surface of the rectangular polarization spectroscope, and the two right-angle trapezoidal polarization spectroscopes are reversely overlapped along the height direction of the rectangular polarization spectroscope; half-wave plates are laid on the long bottom surfaces of the two right-angle trapezoidal polarization spectroscopes.
8. The multi-path planar interferometric angle measuring system of claim 7, wherein: the first right-angle prism, the second right-angle prism, the third right-angle prism and the fourth right-angle prism are all isosceles right-angle prisms, the height of each second right-angle prism is equal to the height of the rectangular polarization beam splitter, the width of the plane with the largest area of each second right-angle prism is equal to half of the length of the rear end face of the rectangular polarization beam splitter, and the side edges of the second right-angle prisms are parallel to the side edges of the first right-angle prisms; the sum of the length of the long bottom surface of the right-angle trapezoidal polarization spectroscope and the heights of the two third right-angle prisms is equal to the length of the side surface of the rectangular polarization spectroscope, and the side edge of the third right-angle prism is perpendicular to the side edge of the first right-angle prism.
9. The multi-path planar interferometric angle measuring system of claim 8, wherein: the two second right-angle prisms are arranged at intervals with the rear end face of the rectangular polarization spectroscope; the two third right-angle prisms and the two right-angle trapezoidal polarization beam splitters are arranged at intervals with the side faces of the rectangular polarization beam splitter.
10. The multi-path planar interferometric angle measuring system of claim 8, wherein: the two second right-angle prisms are bonded to the rear end face of the rectangular polarizing beam splitter; the two third right-angle prisms and the two right-angle trapezoidal polarization beam splitters are bonded to the side faces of the rectangular polarization beam splitter.
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| CN201810818139.5A CN108917655B (en) | 2018-07-24 | 2018-07-24 | Rotating platform and multi-range planar interference angle measuring system |
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| TWI522597B (en) * | 2010-12-22 | 2016-02-21 | Metal Ind Res & Dev Ct | Angle measurement system |
| CN104567731A (en) * | 2013-10-14 | 2015-04-29 | 北京航天计量测试技术研究所 | Vertical shaft type laser small-angle measuring device |
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