CN108908767B - Diamond cutting line installation device for single crystal silicon rod cutting machine - Google Patents

Diamond cutting line installation device for single crystal silicon rod cutting machine Download PDF

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Publication number
CN108908767B
CN108908767B CN201810918992.4A CN201810918992A CN108908767B CN 108908767 B CN108908767 B CN 108908767B CN 201810918992 A CN201810918992 A CN 201810918992A CN 108908767 B CN108908767 B CN 108908767B
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rod
plate
sliding
fixed shaft
moving
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CN108908767A (en
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邱小永
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Zhejiang Beisheng New Material Technology Co ltd
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Zhejiang Beisheng New Material Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/042Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

The invention discloses a diamond cutting line mounting device for a single crystal silicon rod cutting machine, which comprises a fixing plate, wherein the middle part of the fixing plate is provided with a feeding hole; moving plates A are arranged on two sides of the feeding hole, and tensioning wheels are arranged at two end parts of each moving plate A; each tensioning wheel is connected with a fixed shaft A and a threaded rod A; the middle part of each moving plate A is provided with two guide wheels, and each guide wheel is rotatably connected with a fixed shaft B and a connecting rod A; two ends of the feeding hole are provided with wire winding cylinders, and a diamond cutting wire is connected between the two wire winding cylinders; each wire winding cylinder is connected with a fixed shaft C, and each fixed shaft C is connected with a belt and a rotating wheel; both ends of the feeding hole are provided with moving rods which are in sliding connection with the fixed plate; the middle part of each movable rod is in threaded connection with a threaded rod B. The invention not only can improve the efficiency and make the operation more convenient, but also has the advantages of better stability and flexibility of the mechanism structure.

Description

Diamond cutting line installation device for single crystal silicon rod cutting machine
Technical Field
The invention relates to a diamond cutting line mounting device for a single crystal silicon rod cutting machine in the single crystal silicon processing and manufacturing industry.
Background
The application of the monocrystalline silicon is wide, and the monocrystalline silicon rod needs to be cut into silicon wafers by a diamond cutting line on a monocrystalline silicon rod cutting machine in the production process of the monocrystalline silicon; the diamond cutting line mounting device is used for fixing a diamond cutting line and is an important component on the single crystal silicon rod cutting machine; however, when the existing diamond cutting line mounting device is used for mounting the diamond cutting line and then cutting the silicon single crystal rod, the diamond cutting line is sawed from one side of the silicon single crystal rod to the other side, so that the speed is low and the efficiency is low; and when the diamond cutting line needs to be adjusted, the operation of adjusting the tension wheel and the guide wheel on the diamond cutting line mounting device is complex. Therefore, the existing diamond-cutting wire installation device has the problems of low efficiency and complicated operation.
Disclosure of Invention
The invention aims to provide a diamond cutting wire mounting device for a single crystal silicon rod cutting machine. The invention can not only improve the efficiency, but also has the advantage of convenient operation.
The technical scheme of the invention is as follows: a diamond cutting line mounting device for a single crystal silicon rod cutting machine comprises a fixing plate, wherein a feeding hole is formed in the middle of the fixing plate; two sides of the feeding hole are provided with moving plates A which are connected with the fixed plate in a sliding way, and two end parts of each moving plate A are provided with tensioning wheels; each tensioning wheel is rotatably connected with a fixed shaft A which is in sliding connection with the moving plate A, and each fixed shaft A is connected with a threaded rod A which is in sliding connection with the moving plate A; one end of each threaded rod A is in threaded connection with a nut positioned on one side of the movable plate A, and a spring sleeved on the threaded rod A is connected between the nut and the movable plate A; the middle part of each moving plate A is provided with two guide wheels, and each guide wheel is rotatably connected with a fixed shaft B which is in sliding connection with the moving plate A; each fixed shaft B is connected with a connecting rod A, and one end of each connecting rod A is rotatably connected with a screw A in threaded connection with the movable plate A; one side of each moving plate A is connected with a plurality of cylinders B positioned on the fixed plate; two ends of the feeding hole are provided with wire winding cylinders, and a diamond cutting wire is connected between the two wire winding cylinders; the diamond cutting line is connected with the tensioning wheel and the guide wheel, and a fixed shaft C is connected to each wire winding cylinder; each fixed shaft C is sleeved with a bearing which is in sliding connection with the fixed plate, and each fixed shaft C is connected with a belt; one end of each belt is connected with a rotating wheel, and each rotating wheel is connected with a motor A which is connected with the fixed plate in a sliding manner; moving rods connected with the fixed plate in a sliding mode are arranged at two ends of the feeding hole, and two ends of each moving rod are connected with the bearing and the motor A respectively; the middle part of each movable rod is in threaded connection with a threaded rod B, and one end of each threaded rod B is connected with a motor B.
In the diamond cutting line mounting device for the single crystal silicon rod cutting machine, the position, corresponding to the fixed shaft A, of the moving plate A is provided with the notch A, and the two sides of the fixed shaft A are provided with the sliding blocks B; the two sides of the slot A are provided with sliding chutes B corresponding to the sliding blocks B, and the movable plate A is provided with holes corresponding to the threaded rod A; a slot B is formed in the position, corresponding to the fixed shaft B, of the moving plate A, and sliding blocks C are arranged on two sides of the fixed shaft B; the sliding grooves C are formed in the positions, corresponding to the sliding blocks C, of the two sides of the groove B, and threaded holes are formed in the positions, corresponding to the screws A, of the moving plate A; two sides of the bottom end of the moving plate A are provided with sliding blocks D, and sliding grooves D are formed in positions, corresponding to the sliding blocks D, on the fixed plate; a slot D is formed in the position, corresponding to the moving plate A, of the fixed plate, and a semi-slot A is formed in the position, corresponding to the feeding hole, of the moving plate A; and a semi-open groove B is formed in the position, corresponding to the fixed shaft B, of the fixed plate.
In the diamond cutting line installation device for the single crystal silicon rod cutting machine, the position, corresponding to the bearing, of the fixed plate is provided with the notch E, the two sides of the bearing are provided with the sliding blocks E, and the positions, corresponding to the sliding blocks E, of the two sides of the notch E are provided with the sliding grooves E; a slot F is arranged at the position, corresponding to the motor A, on the fixed plate, sliding blocks F are arranged on two sides of the motor A, and sliding grooves F are arranged at the positions, corresponding to the sliding blocks F, of the two sides of the slot F; a connecting rod B is connected between the moving rod and the bearing, and a connecting rod B is also connected between the moving rod and the motor A; the two ends of the movable rod are provided with sliding blocks G, and sliding grooves G are arranged on the fixed plate at positions corresponding to the sliding blocks G; a support is sleeved at one end, far away from the motor B, of the threaded rod B, and the belt is located above the support; and a threaded through hole is formed in the position, corresponding to the threaded rod B, of the movable rod.
In the diamond cutting line mounting device for the single crystal silicon rod cutting machine, a round block is arranged at the position where the connecting rod A is connected with the screw A, and a round groove is formed in the position, corresponding to the round block, of one end of the screw A.
Compared with the prior art, the invention improves the existing diamond cutting line installation device, after a single crystal silicon rod is fixed on a feeding hole, a motor A drives a rotating wheel to rotate so as to drive a wire winding barrel to rotate, after the wire winding barrel is matched with a tension wheel and a guide wheel, the diamond cutting line wound on the tension wheel, the guide wheel and the wire winding barrel rotates, then a control cylinder B extends to drive a moving plate A to move towards one side of the single crystal silicon rod, the guide wheel and the tension wheel on the moving plate A also move towards one side of the single crystal silicon rod, simultaneously, after the motor B rotates, the motor A and the wire winding barrel are driven by a threaded rod B to move towards one side far away from the single crystal silicon rod, a diamond cutting line part positioned below each moving plate A is close to the single crystal silicon rod and cuts two sides of the single crystal silicon rod into a certain depth, and the diamond cutting line wound on the guide wheel, then the single crystal silicon rod fixed on the feeding hole moves towards the moving plate A at one side, the diamond cutting line part below the moving plate A at one side cuts the uncut part in the middle of the single crystal silicon rod, and then the silicon wafer is cut from the single crystal silicon rod, and the two sides of the single crystal silicon rod are simultaneously cut through the diamond cutting line, so that the speed of cutting the single crystal silicon rod is improved, and the efficiency is higher; after the nut at one end of the threaded rod A is screwed, the compression degree of the spring is changed, the threaded rod A also moves on one side of the movable plate A, the fixed shaft A further drives the tensioning wheel to move, meanwhile, the screw A is screwed to move the screw A on the movable plate A, the screw A drives the fixed shaft B to move after passing through the connecting rod A, the fixed shaft B further drives the guide wheel to move, and therefore the operation of adjusting the tensioning wheel and the guide wheel is convenient. In addition, the sliding block B and the sliding groove B are arranged, so that the fixed shaft A can move stably, the sliding block C and the sliding groove C are arranged, the fixed shaft B can move stably, and the sliding block D and the sliding groove D are arranged, so that the moving plate A can move stably, and the structural stability of the invention is further improved; the round block and the round groove are arranged at the position where the connecting rod A is connected with the screw A, so that the flexibility of the mechanism is improved. Therefore, the invention not only can improve the efficiency and facilitate the operation, but also has the advantages of better stability and flexibility of the mechanism structure.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a top view of the present invention;
fig. 4 is a schematic structural view at the moving plate a;
FIG. 5 is a schematic view of the structure at the forming tube;
FIG. 6 is a front view of the travel bar;
fig. 7 is a cross-sectional view at the round block.
The labels in the figures are: 1-fixed plate, 2-feeding hole, 4-moving plate A, 5-tensioning wheel, 6-fixed shaft A, 7-threaded rod A, 8-nut, 9-spring, 10-guide wheel, 11-fixed shaft B, 12-connecting rod A, 13-screw A, 14-cylinder B, 15-wire winding barrel, 16-fixed shaft C, 17-bearing, 18-belt, 19-rotating wheel, 20-motor A, 21-moving rod, 22-threaded rod B, 23-motor B, 40-slot A, 41-sliding block B, 42-sliding block B, 43-slot B, 44-sliding block C, 45-sliding block C, 46-diamond cutting line, 48-sliding block D, 49-sliding block D, 50-slot D, 51-half slotted groove A, 52-half slotted groove B, 54-slotted groove E, 55-sliding block E, 56-sliding groove E, 57-slotted groove F, 58-sliding block F, 59-sliding groove F, 60-connecting rod B, 61-sliding block G, 62-sliding groove G, 63-support, 68-round block, 69-round groove and 70-threaded through hole.
Detailed Description
The invention is further illustrated by the following figures and examples, which are not to be construed as limiting the invention.
Examples are given. A diamond cutting line mounting device for a single crystal silicon rod cutting machine is shown in figures 1 to 7 and comprises a fixing plate 1, wherein a feeding hole 2 is formed in the middle of the fixing plate 1; two sides of the feeding hole 2 are respectively provided with a moving plate A4 which is connected with the fixed plate 1 in a sliding way, and two ends of each moving plate A4 are respectively provided with a tension wheel 5; each tension wheel 5 is rotatably connected with a fixed shaft A6 which is in sliding connection with the moving plate A4, and each fixed shaft A6 is connected with a threaded rod A7 which is in sliding connection with the moving plate A4; one end of each threaded rod A7 is in threaded connection with a nut 8 positioned on one side of the moving plate A4, and a spring 9 sleeved on the threaded rod A7 is connected between the nut 8 and the moving plate A4; the middle part of each moving plate A4 is provided with two guide wheels 10, and each guide wheel 10 is rotatably connected with a fixed shaft B11 which is in sliding connection with the moving plate A4; each fixed shaft B11 is connected with a connecting rod A12, and one end of the connecting rod A12 is rotatably connected with a screw A13 in threaded connection with the moving plate A4; one side of each moving plate A4 is connected with a plurality of air cylinders B14 positioned on the fixed plate 1; two ends of the feeding hole 2 are provided with wire winding cylinders 15, and a diamond cutting wire 46 is connected between the two wire winding cylinders 15; the diamond cutting line 46 is connected with the tension wheel 5 and the guide wheel 10, and a fixed shaft C16 is connected on each wire winding tube 15; each fixed shaft C16 is sleeved with a bearing 17 which is in sliding connection with the fixed plate 1, and each fixed shaft C16 is connected with a belt 18; one end of each belt 18 is connected with a rotating wheel 19, and each rotating wheel 19 is connected with a motor A20 which is connected with the fixed plate 1 in a sliding way; both ends of the feeding hole 2 are provided with moving rods 21 which are connected with the fixed plate 1 in a sliding way, and both ends of each moving rod 21 are respectively connected with a bearing 17 and a motor A20; a threaded rod B22 is in threaded connection with the middle of each moving rod 21, and a motor B23 is connected with one end of each threaded rod B22.
A slotted A40 is arranged on the moving plate A4 at a position corresponding to the fixed shaft A6, and sliding blocks B41 are arranged on two sides of the fixed shaft A6; a sliding groove B42 is arranged at the position, corresponding to the sliding block B41, of the two sides of the slot A40, and an opening is formed in the position, corresponding to the threaded rod A7, of the moving plate A4; a slotted B43 is arranged on the moving plate A4 at a position corresponding to the fixed shaft B11, and sliding blocks C44 are arranged on two sides of the fixed shaft B11; a sliding groove C45 is formed in the positions, corresponding to the sliding block C44, of the two sides of the groove B43, and a threaded hole is formed in the position, corresponding to the screw A13, of the moving plate A4; two sides of the bottom end of the moving plate A4 are both provided with a slide block D48, and a slide groove D49 is arranged at the position, corresponding to the slide block D48, on the fixed plate 1; a slot D50 is formed in the position, corresponding to the moving plate A4, of the fixed plate 1, and a half slot A51 is formed in the position, corresponding to the feeding hole 2, of the moving plate A4; a semi-open slot B52 is formed in the position, corresponding to the fixed shaft B11, of the fixed plate 1; a slot E54 is arranged at the position, corresponding to the bearing 17, on the fixed plate 1, a sliding block E55 is arranged on each of two sides of the bearing 17, and a sliding groove E56 is arranged at the position, corresponding to the sliding block E55, on each of two sides of the slot E54; a slot F57 is arranged at the position, corresponding to the motor A20, of the fixing plate 1, sliding blocks F58 are arranged on two sides of the motor A20, and sliding grooves F59 are arranged at positions, corresponding to the sliding blocks F58, of two sides of the slot F57; a connecting rod B60 is connected between the moving rod 21 and the bearing 17, and a connecting rod B60 is also connected between the moving rod 21 and the motor A20; the two ends of the movable rod 21 are both provided with a slide block G61, and a slide groove G62 is arranged at the position corresponding to the slide block G61 on the fixed plate 1; a support 63 is sleeved on one end, far away from the motor B23, of the threaded rod B22, and the belt 18 is located above the support 63; a threaded through hole 70 is formed in the position, corresponding to the threaded rod B22, of the movable rod 21; the connecting rod A12 is provided with a round block 68 at the position connected with the screw A13, and one end of the screw A13 is provided with a round groove 69 at the position corresponding to the round block 68.
The working principle is as follows: the diamond cutting line 46 is arranged in an annular shape connected end to end, the tension wheel 5 and the wire winding tube 15 are positioned on the inner side of the annular shape, and the guide wheel 10 is positioned on the outer side of the annular shape; in an initial state, a plurality of air cylinders B14 connected to the moving plate A4 are in a contraction state, two moving plates A4 are both positioned at one end, far away from the feeding hole 2, of a stroke path of the moving plates A4, and the tension wheel 5 and the guide wheel 10 on the moving plate A4 are also positioned at one end, far away from the feeding hole 2, of the stroke path of the moving plates A3578; the movable rod 21 is positioned at one end of the threaded rod B22 close to the feeding hole 2, and the forming tube 15 is also positioned at one end of the stroke path close to the feeding hole 2; and the diamond cutting wire 46 is in a state of being tensioned by the tensioning wheel 5, the guide wheel 10 and the wire winding tube 15.
During operation, after one end of the silicon single crystal rod to be cut into silicon wafers is fixed, the other end of the silicon single crystal rod passes through the feeding hole 2, and the downward end of the silicon single crystal rod is positioned on the plane where the diamond cutting line 46 is positioned and is lower than the plane by a certain height, wherein the height is the thickness of one silicon wafer cut from the silicon single crystal rod; then the power supply of the invention is turned on, the worker firstly controls the two motors A20 to rotate, the motor A20 drives the corresponding rotating wheel 19 to rotate, the rotating wheel 19 further drives the fixed shaft C16 to rotate on the bearing 17 through the belt 18, the fixed shaft C16 further drives the corresponding wire winding tube 15 to rotate, the two wire winding tubes 15 rotate to drive the diamond cutting line 46 positioned on the two wire winding tubes to rotate, the diamond cutting line 46 also winds the plurality of tension wheels 5 and the guide wheel 10, the tension wheels 5 and the guide wheel 10 are rotatably connected with the corresponding fixed shaft A6 and the fixed shaft B11, and the diamond cutting line 46 further rotates on the wire winding tubes 15, the tension wheels 5 and the guide wheel 10.
Then, the worker controls each air cylinder B14 to extend, the air cylinders B14 further push the two moving plates A4 to move towards one side of the feeding hole 2, the moving plates A4 further drive the corresponding fixed shafts A6 and B11 to move towards one side of the feeding hole 2, and the corresponding tension wheels 5 and the corresponding guide wheels 10 also move towards one side of the feeding hole 2; the cylinder B14 is extended while the staff also controls the motor B23 to rotate, the motor B23 further drives the threaded rod B22 to rotate, the threaded rod B22 drives the corresponding movable rod 21 to move towards one side far away from the feeding hole 2, the sliding blocks G61 at two ends of the movable rod 21 slide on the sliding groove G62, the movable rod 21 drives the bearing 17 and the motor A20 to move towards one side far away from the feeding hole 2 through the connecting rod B60, the sliding blocks E55 at two sides of the bearing 17 slide along the sliding groove E56, the sliding blocks F58 at two sides of the motor A20 slide along the sliding groove F59, the bearing 17 and the motor A20 further drive the fixed shaft C16 and the rotating wheel 19 to move towards one side far away from the feeding hole 2, and the wire winding barrel 15 connected to the fixed shaft C16 also moves towards one side far away from the feeding hole 2.
After the two wire winding cylinders 15 move to the side far away from the feeding hole 2, the part of the diamond cutting wire 46 wound on the wire winding cylinders 15 also moves to the side far away from the single crystal silicon rod on the feeding hole 2, and after the tension wheel 5 and the guide wheel 10 on each side move to the side near the feeding hole 2, the part of the diamond cutting wire 46 below the moving plate A4 moves to the side near the single crystal silicon rod on the feeding hole 2; the part of the diamond cutting line 46, which is positioned on the tension wheel 5 and the guide wheel 10, approaches the single crystal silicon rod during moving along with the movement of the moving plate A4, the part of the diamond cutting line 46 gradually cuts the single crystal silicon rod until the piston rod on the air cylinder B14 on the moving plate A4 on both sides of the single crystal silicon rod extends to the maximum length, the part of the diamond cutting line 46, which is positioned on the tension wheel 5 and the guide wheel 10, cuts two side parts, which are close to the feeding hole 2, of the single crystal silicon rod during moving, at the same time, the moving rod 21 also moves to one end, which is far away from the feeding hole 2, of the threaded rod B22 along with the movement of the motor B23, then the operator controls the motor B23 to stop rotating, the moving rod 21 also stops moving along with the movement, and during the process that the wire winding drum 15 moves to one side far away from the feeding hole 2 and the, the diamond cutting line 46 is always in a state of being tensioned by the tensioning wheel 5, the guide wheel 10 and the wire winding tube 15; when the moving plate A4 approaches to the feeding hole 2 in the extending process of the cylinder B14, the width of the half-notch A51 on the moving plate A4 is larger than that of the single crystal silicon rod fixed on the feeding hole 2, so that the moving plate A4 can keep away from the single crystal silicon rod through the half-notch A51 and continuously drive the part of the diamond cutting line 46 positioned below the moving plate A4 to approach to the single crystal silicon rod; the width of the central portion of the single crystal silicon rod not cut by the diamond cutting line 46 is the distance between the portions of the diamond cutting line 46 located below the moving plates a4 on both sides.
Then, the worker moves the single crystal silicon rod on the feeding hole 2 to move towards the moving plate A4 on one side, the single crystal silicon rod is partially cut by the diamond cutting line 46 positioned below the moving plate A4 on one side in the process of moving towards one side, and the moving distance of the single crystal silicon rod is larger than the width of the single crystal silicon rod which is not cut by the diamond cutting line 46, so that a silicon wafer is cut from the single crystal silicon rod under the matching of the movement of the diamond cutting line 46 and the movement of the worker, the cut silicon wafer is collected, the cutting speed of the single crystal silicon rod by the diamond cutting line 46 in a bidirectional mode is increased, and the efficiency is high; then the worker moves the single crystal silicon rod on the feeding hole 2 to return to the original position, the worker also controls the air cylinder B14 to contract, the air cylinder B14 drives the corresponding moving plate A4 and the tensioning wheel 5 and the guide wheel 10 on the moving plate A4 to return to the original position, the tensioning wheel 5 and the guide wheel 10 move to one side far away from the feeding hole 2, the PLC 26 controls the motor B23 to reversely rotate when the air cylinder B14 contracts, the motor B23 further drives the wire winding barrel 15 to return to the initial position through the moving rod 21, the wire winding barrel 15 moves to one side close to the feeding hole 2, the diamond cutting line 46 wound on the tensioning wheel 5, the guide wheel 10 and the wire winding barrel 15 is also in a tensioned state all the time, and the part of the diamond cutting line 46 positioned below the moving plate A4 moves to one side far away from the.
When the position of the tension pulley 5 is adjusted, after the nut 8 at one end of the threaded rod A7 is screwed, when the nut 8 is screwed to the side far from the feeding hole 2, the spring 9 pushes the nut 8 to the side far from the feeding hole 2, the threaded rod A7 also moves to the side far from the feeding hole 2 in the through hole corresponding to the moving plate A4, the sliding blocks B41 at both sides of the fixed shaft A6 move to the side far from the feeding hole 2 along the sliding groove B42, the fixed shaft A6 further drives the tension pulley 5 to move to the side far from the feeding hole 2, simultaneously, the screw A13 is screwed again, so that the screw A13 also moves to the side far from the feeding hole 2 in the corresponding threaded hole on the moving plate A4, the round block 68 on the connecting rod A12 rotates in the round groove 69 of the screw A13, the screw A13 drives the fixed shaft B11 to move to the side far from the feeding hole 2 through the connecting rod A12 which is rotatably connected with the screw A13, the sliding blocks C58, the fixed shaft B11 further drives the guide wheel 10 to move towards the side far away from the feeding hole 2, so that the diamond cutting line 46 can be tensioned to a firmer degree after the tensioning wheel 5 and the guide wheel 10 both move towards the side far away from the feeding hole 2; on the contrary, when the nut 8 and the screw a13 are screwed reversely, the operation of adjusting the tension wheel 5 and the guide wheel 10 is more convenient after the tension wheel 5 and the guide wheel 10 are both moved to the side close to the feeding hole 2.

Claims (1)

1. The utility model provides a diamond cutting line installation device that single crystal silicon rod cutting machine was used which characterized in that: comprises a fixed plate (1), wherein the middle part of the fixed plate (1) is provided with a feeding hole (2); two sides of the feeding hole (2) are respectively provided with a movable plate A (4) which is connected with the fixed plate (1) in a sliding way, and two end parts of each movable plate A (4) are respectively provided with a tensioning wheel (5); each tensioning wheel (5) is rotatably connected with a fixed shaft A (6) in sliding connection with the moving plate A (4), and each fixed shaft A (6) is connected with a threaded rod A (7) in sliding connection with the moving plate A (4); one end of each threaded rod A (7) is in threaded connection with a nut (8) positioned on one side of the moving plate A (4), and a spring (9) sleeved on the threaded rod A (7) is connected between the nut (8) and the moving plate A (4); two guide wheels (10) are arranged in the middle of each moving plate A (4), and a fixed shaft B (11) which is connected with the moving plate A (4) in a sliding manner is rotatably connected to each guide wheel (10); each fixed shaft B (11) is connected with a connecting rod A (12), and one end of each connecting rod A (12) is rotatably connected with a screw A (13) in threaded connection with the moving plate A (4); one side of each moving plate A (4) is connected with a plurality of cylinders B (14) positioned on the fixed plate (1); two ends of the feeding hole (2) are provided with wire winding cylinders (15), and a diamond cutting wire (46) is connected between the two wire winding cylinders (15); the diamond cutting line (46) is connected with the tension wheel (5) and the guide wheel (10), and a fixed shaft C (16) is connected to each wire winding tube (15); each fixed shaft C (16) is sleeved with a bearing (17) which is in sliding connection with the fixed plate (1), and each fixed shaft C (16) is connected with a belt (18); one end of each belt (18) is connected with a rotating wheel (19), and each rotating wheel (19) is connected with a motor A (20) which is connected with the fixed plate (1) in a sliding manner; moving rods (21) which are connected with the fixed plate (1) in a sliding mode are arranged at two ends of the feeding hole (2), and two ends of each moving rod (21) are connected with a bearing (17) and a motor A (20) respectively; a threaded rod B (22) is in threaded connection with the middle part of each moving rod (21), and one end of each threaded rod B (22) is connected with a motor B (23); a slot A (40) is formed in the position, corresponding to the fixed shaft A (6), of the moving plate A (4), and sliding blocks B (41) are arranged on two sides of the fixed shaft A (6); a sliding groove B (42) is arranged at the position of the two sides of the slot A (40) corresponding to the sliding block B (41), and a hole is formed in the position of the movable plate A (4) corresponding to the threaded rod A (7); a slot B (43) is formed in the position, corresponding to the fixed shaft B (11), of the moving plate A (4), and sliding blocks C (44) are arranged on two sides of the fixed shaft B (11); a chute C (45) is arranged at the position of the two sides of the slot B (43) corresponding to the slide block C (44), and a threaded hole is arranged at the position of the movable plate A (4) corresponding to the screw A (13); two sides of the bottom end part of the moving plate A (4) are respectively provided with a sliding block D (48), and a sliding groove D (49) is arranged at the position, corresponding to the sliding block D (48), on the fixed plate (1); a slot D (50) is formed in the position, corresponding to the moving plate A (4), of the fixed plate (1), and a semi-slot A (51) is formed in the position, corresponding to the feeding hole (2), of the moving plate A (4); a semi-open groove B (52) is formed in the position, corresponding to the fixed shaft B (11), on the fixed plate (1); a groove E (54) is formed in the position, corresponding to the bearing (17), of the fixing plate (1), sliding blocks E (55) are arranged on two sides of the bearing (17), and sliding grooves E (56) are formed in positions, corresponding to the sliding blocks E (55), of two sides of the groove E (54); a slot F (57) is formed in the position, corresponding to the motor A (20), of the fixing plate (1), sliding blocks F (58) are arranged on two sides of the motor A (20), and sliding grooves F (59) are formed in the positions, corresponding to the sliding blocks F (58), of two sides of the slot F (57); a connecting rod B (60) is connected between the moving rod (21) and the bearing (17), and a connecting rod B (60) is also connected between the moving rod (21) and the motor A (20); two ends of the movable rod (21) are provided with sliding blocks G (61), and a sliding groove G (62) is arranged on the fixed plate (1) at a position corresponding to the sliding blocks G (61); a support (63) is sleeved at one end, far away from the motor B (23), of the threaded rod B (22), and the belt (18) is located above the support (63); a threaded through hole (70) is formed in the position, corresponding to the threaded rod B (22), of the movable rod (21); the connecting rod A (12) is provided with a round block (68) at the position connected with the screw A (13), and a round groove (69) is arranged at the position of one end of the screw A (13) corresponding to the round block (68).
CN201810918992.4A 2018-08-14 2018-08-14 Diamond cutting line installation device for single crystal silicon rod cutting machine Expired - Fee Related CN108908767B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204867702U (en) * 2015-06-25 2015-12-16 安徽省振泉数控科技有限公司 Wire cut electrical discharge machining bed cutting wire's overspeed device tensioner
CN207256597U (en) * 2017-10-14 2018-04-20 昆山进荣中川五金有限公司 A kind of guide pulley for multi-wire saw
CN108326201A (en) * 2017-11-14 2018-07-27 惠安县威科电子科技有限公司 A kind of copper wire cutting equipment with propulsion functions

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204867702U (en) * 2015-06-25 2015-12-16 安徽省振泉数控科技有限公司 Wire cut electrical discharge machining bed cutting wire's overspeed device tensioner
CN207256597U (en) * 2017-10-14 2018-04-20 昆山进荣中川五金有限公司 A kind of guide pulley for multi-wire saw
CN108326201A (en) * 2017-11-14 2018-07-27 惠安县威科电子科技有限公司 A kind of copper wire cutting equipment with propulsion functions

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