CN108724501B

CN108724501B - Bidirectional single crystal silicon rod cutting device

Info

Publication number: CN108724501B
Application number: CN201810919031.5A
Authority: CN
Inventors: 邱小永
Original assignee: Zhejiang Beisheng New Material Technology Co ltd
Current assignee: Zhejiang Beisheng New Material Technology Co ltd
Priority date: 2018-08-14
Filing date: 2018-08-14
Publication date: 2020-05-05
Anticipated expiration: 2038-08-14
Also published as: CN108724501A

Abstract

The invention discloses a bidirectional cutting device for a silicon single crystal rod, which comprises a fixed plate, wherein the middle part of the fixed plate is connected with a feeding device in a sliding manner; moving plates A are arranged on two sides of the feeding device, and tensioning wheels are arranged at two end parts of each moving plate A; each tensioning wheel is rotatably connected with a fixed shaft A and a threaded rod A; the middle part of each moving plate A is provided with two guide wheels; two ends of the feeding device are provided with wire winding cylinders, and a diamond cutting wire is connected between the two wire winding cylinders; each wire winding cylinder is connected with a fixed shaft C and a bearing, and each fixed shaft C is connected with a rotating wheel; moving rods are arranged at two ends of the feeding device, and a threaded rod B is in threaded connection with the middle of each moving rod; a conveyor belt and a motor C are arranged below the feeding device; and the fixed plate is connected with a PLC controller. The invention not only can improve the efficiency and make the operation more convenient, but also has the advantages of wide application range, better mechanism flexibility and better structure stability.

Description

Bidirectional single crystal silicon rod cutting device

Technical Field

The invention relates to a bidirectional type single crystal silicon rod cutting device in the single crystal silicon processing and manufacturing industry.

Background

The application of monocrystalline silicon is wide, and a monocrystalline silicon rod cutting device is required to cut the monocrystalline silicon rod into silicon wafers in the production process of the monocrystalline silicon, but the existing monocrystalline silicon rod cutting device generally uses a rotating diamond cutting line to saw from one side of the monocrystalline silicon rod to the other side when cutting the monocrystalline silicon rod, so that the speed is low, and the efficiency is low; and the operation of adjusting the tension wheel and the guide wheel on the single crystal silicon rod cutting device is complex, so that the single crystal silicon rod cutting device is only suitable for installing a diamond cutting line with a single specification, and the application range is small. Therefore, the existing single crystal silicon rod cutting device has the problems of low efficiency, complex operation and small application range.

Disclosure of Invention

The invention aims to provide a bidirectional single crystal silicon rod cutting device. The invention not only can improve the efficiency and make the operation more convenient, but also has the advantage of wider application range.

The technical scheme of the invention is as follows: a bidirectional silicon single crystal rod cutting device comprises a fixed plate, wherein the middle part of the fixed plate is connected with a feeding device in a sliding manner, and the feeding device is connected with a plurality of cylinders A; two sides of the feeding device are provided with moving plates A which are connected with the fixed plate in a sliding manner, and two end parts of each moving plate A are provided with tensioning wheels; each tensioning wheel is rotatably connected with a fixed shaft A which is in sliding connection with the moving plate A, and each fixed shaft A is connected with a threaded rod A which is in sliding connection with the moving plate A; one end of each threaded rod A is in threaded connection with a nut positioned on one side of the movable plate A, and a spring sleeved on the threaded rod A is connected between the nut and the movable plate A; the middle part of each moving plate A is provided with two guide wheels, and each guide wheel is rotatably connected with a fixed shaft B which is in sliding connection with the moving plate A; each fixed shaft B is connected with a connecting rod A, and one end of each connecting rod A is rotatably connected with a screw A in threaded connection with the movable plate A; one side of each moving plate A is connected with a plurality of cylinders B positioned on the fixed plate; two ends of the feeding device are provided with wire winding cylinders, and a diamond cutting wire is connected between the two wire winding cylinders; the diamond cutting line is connected with the tensioning wheel and the guide wheel, and a fixed shaft C is connected to each wire winding cylinder; each fixed shaft C is sleeved with a bearing which is in sliding connection with the fixed plate, and each fixed shaft C is connected with a belt; one end of each belt is connected with a rotating wheel, and each rotating wheel is connected with a motor A which is connected with the fixed plate in a sliding manner; moving rods connected with the fixed plate in a sliding manner are arranged at two ends of the feeding device, and two ends of each moving rod are respectively connected with the bearing and the motor A; the middle part of each movable rod is in threaded connection with a threaded rod B, and one end of each threaded rod B is connected with a motor B; a conveying belt is arranged below the feeding device, and a motor C is connected to the conveying belt; the fixed plate is connected with a PLC (programmable logic controller), and the air cylinder A, the air cylinder B, the motor A, the motor B and the motor C are electrically connected with the PLC; and a cooling liquid universal pipe fixed on the fixing plate is arranged below the feeding device.

In the bidirectional single crystal silicon rod cutting device, the feeding device comprises a moving plate B, and a through hole is formed in the middle of the moving plate B; two clamping tiles are arranged above the through hole, and each clamping tile is connected with an air cylinder C; two sides of the top end of the moving plate B are both connected with vertical plates, and a transverse plate is connected between the two vertical plates; the middle part of the transverse plate is connected with a vertical rod in a sliding way, the two sides of the vertical rod are respectively connected with a gear in a meshing way, and each gear is connected with a motor D; the bottom end part of the vertical rod is connected with a fastening ring positioned above the clamping tile, and the side wall of the fastening ring is in threaded connection with a plurality of screws B; the two sides of the bottom end part of the moving plate B are respectively provided with a sliding block A, and a sliding groove A is arranged at the position, corresponding to the sliding block A, on the fixed plate; the cylinder C and the motor D are both electrically connected with the PLC; and a notch C is formed in the position, corresponding to the feeding device, on the fixing plate.

In the bidirectional single crystal silicon rod cutting device, the PLC controller may control the expansion of the cylinder a, the expansion of the cylinder B, the rotation of the motor a, the rotation of the motor B, the rotation of the motor C, the expansion of the cylinder C, and the rotation of the motor D.

In the bidirectional single crystal silicon rod cutting device, a slot a is formed in the position, corresponding to the fixed shaft a, of the moving plate a, and sliding blocks B are arranged on two sides of the fixed shaft a; the two sides of the slot A are provided with sliding chutes B corresponding to the sliding blocks B, and the movable plate A is provided with holes corresponding to the threaded rod A; a slot B is formed in the position, corresponding to the fixed shaft B, of the moving plate A, and sliding blocks C are arranged on two sides of the fixed shaft B; the sliding grooves C are formed in the positions, corresponding to the sliding blocks C, of the two sides of the groove B, and threaded holes are formed in the positions, corresponding to the screws A, of the moving plate A; two sides of the bottom end of the moving plate A are provided with sliding blocks D, and sliding grooves D are formed in positions, corresponding to the sliding blocks D, on the fixed plate; a slot D is formed in the position, corresponding to the moving plate A, of the fixed plate, and a semi-slot A is formed in the position, corresponding to the feeding device, of the moving plate A; and a semi-open groove B is formed in the position, corresponding to the fixed shaft B, of the fixed plate.

In the bidirectional single crystal silicon rod cutting device, a fixed plate is provided with a notch E at a position corresponding to the bearing, two sides of the bearing are provided with sliding blocks E, and two sides of the notch E are provided with sliding grooves E at positions corresponding to the sliding blocks E; a slot F is arranged at the position, corresponding to the motor A, on the fixed plate, sliding blocks F are arranged on two sides of the motor A, and sliding grooves F are arranged at the positions, corresponding to the sliding blocks F, of the two sides of the slot F; a connecting rod B is connected between the moving rod and the bearing, and a connecting rod B is also connected between the moving rod and the motor A; the two ends of the movable rod are provided with sliding blocks G, and sliding grooves G are arranged on the fixed plate at positions corresponding to the sliding blocks G; a support is sleeved at one end, far away from the motor B, of the threaded rod B, and the belt is located above the support; and a threaded through hole is formed in the position, corresponding to the threaded rod B, of the movable rod.

In the bidirectional single crystal silicon rod cutting device, the two sides of the conveying belt are provided with the partition plates, two ends of the conveying belt are respectively connected with the driven wheel and the driving wheel, and the driving wheel is connected with the motor C.

In the bidirectional single crystal silicon rod cutting device, a round block is arranged at the position where the connecting rod a is connected with the screw a, and a round groove is arranged at the position where one end of the screw a corresponds to the round block.

In the bidirectional single crystal silicon rod cutting device, the bottom end of the fixing plate is connected with a plurality of vertical columns.

Compared with the prior art, the invention improves the existing single crystal silicon rod cutting device, after a single crystal silicon rod is fixed on a feeding device, a PLC controller controls a motor A to drive a rotating wheel to rotate so as to drive a wire winding barrel to rotate, after the wire winding barrel is matched with a tension wheel and a guide wheel, a diamond cutting line wound on the tension wheel, the guide wheel and the wire winding barrel rotates, then the PLC controller controls a cylinder B to extend so as to drive a moving plate A to move to one side of the single crystal silicon rod, the guide wheel and the tension wheel on the moving plate A also move to one side of the single crystal silicon rod, simultaneously the PLC controller also controls a screw rod B to drive the motor A and the wire winding barrel to move to one side far away from the single crystal silicon rod after the motor B rotates, the part of the diamond cutting line positioned below each silicon rod A is close to the single crystal silicon rod and cuts two sides of the single, The tensioning wheel and the diamond cutting line on the wire winding barrel are always in a tensioning state, then the PLC controller controls the cylinder A to extend and then drives the monocrystalline silicon rod on the cylinder A to move towards the moving plate A on one side through the feeding device, the diamond cutting line part below the moving plate A on one side cuts the uncut part in the middle of the monocrystalline silicon rod, so that silicon wafers are cut from the monocrystalline silicon rod, and the diamond cutting line simultaneously cuts the two sides of the monocrystalline silicon rod, so that the speed of cutting the monocrystalline silicon rod is increased, and the efficiency is higher; after the nut at one end of the threaded rod A is screwed, the compression degree of the spring is changed, the threaded rod A also moves on one side of the movable plate A, the fixed shaft A further drives the tensioning wheel to move, meanwhile, the screw A is screwed to move the screw A on the movable plate A, the screw A drives the fixed shaft B to move through the connecting rod A, the fixed shaft B further drives the guide wheel to move, further the tensioning wheel and the guide wheel are convenient to adjust, and the tensioning wheel and the guide wheel move to the same side, further the diamond cutting lines with different installation circumferences are installed, and further the application range of the diamond cutting line guide mechanism is widened. In addition, the clamping tile and the gear are arranged on the feeding device, after the clamping tile is loosened, the gear drives the vertical plate to move, the single crystal silicon rod on the fastening ring moves along with the vertical plate, then the single crystal silicon rod is clamped through the clamping tile, the feeding device finishes one-time conveying of the single crystal silicon rod, and the mechanism is flexible; the sliding block B and the sliding groove B are arranged, so that the fixed shaft A can move stably, the sliding block C and the sliding groove C are arranged, the fixed shaft B can move stably, the sliding block D and the sliding groove D are arranged, so that the moving plate A can move stably, and the structural stability of the invention is improved; connect from driving wheel and action wheel through conveyer belt both ends, set up circle piece and circular slot through the position department of being connected at connecting rod A and screw A, further improved the mechanism flexibility. Therefore, the invention not only can improve the efficiency and facilitate the operation, but also has the advantages of wide application range, better mechanism flexibility and better structure stability.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front view of the present invention;

FIG. 3 is a cross-sectional view taken at A-A of FIG. 2;

fig. 4 is a schematic structural view at the moving plate a;

FIG. 5 is a schematic view of the structure at the forming tube;

FIG. 6 is a top view of the feeding device;

FIG. 7 is a front view of the feeding device;

FIG. 8 is a front view of the travel bar;

FIG. 9 is a cross-sectional view at the round block;

fig. 10 is a sectional view at the conveyor belt.

The labels in the figures are: 1-fixed plate, 2-feeding device, 3-cylinder A, 4-moving plate A, 5-tension wheel, 6-fixed shaft A, 7-threaded rod A, 8-nut, 9-spring, 10-guide wheel, 11-fixed shaft B, 12-connecting rod A, 13-screw A, 14-cylinder B, 15-wire winding barrel, 16-fixed shaft C, 17-bearing, 18-belt, 19-rotating wheel, 20-motor A, 21-moving rod, 22-threaded rod B, 23-motor B, 24-belt, 25-motor C, 26-PLC controller, 27-moving plate B, 28-through hole, 29-clamping tile, 30-cylinder C, 31-vertical plate, 32-horizontal plate, 33-vertical rod, 34-gear, 35-motor D, 36-fastening ring, 37-screw B, 38-slide block A, 39-sliding groove A, 40-slotted A, 41-slide block B, 42-sliding groove B, 43-slotted B, 44-slide block C, 45-sliding groove C, 46-diamond cutting line, 47-slotted C, 48-slide block D, 49-sliding groove D, 50-slotted D, 51-half slotted A, 52-half slotted B, 53-cooling liquid universal pipe, 54-slotted E, 55-slide block E, 56-sliding groove E, 57-slotted F, 58-slide block F, 59-sliding groove F, 60-connecting rod B, 61-slide block G, 62-sliding groove G, 63-support and 64-partition plate, 65-driven wheel, 66-driving wheel, 67-upright post, 68-round block, 69-round groove and 70-thread through hole.

Detailed Description

The invention is further illustrated by the following figures and examples, which are not to be construed as limiting the invention.

Examples are given. A bidirectional type single crystal silicon rod cutting device is shown in figures 1 to 10 and comprises a fixing plate 1, wherein the middle part of the fixing plate 1 is connected with a feeding device 2 in a sliding mode, and the feeding device 2 is connected with a plurality of cylinders A3; two sides of the feeding device 2 are respectively provided with a moving plate A4 which is connected with the fixed plate 1 in a sliding way, and two ends of each moving plate A4 are respectively provided with a tensioning wheel 5; each tension wheel 5 is rotatably connected with a fixed shaft A6 which is in sliding connection with the moving plate A4, and each fixed shaft A6 is connected with a threaded rod A7 which is in sliding connection with the moving plate A4; one end of each threaded rod A7 is in threaded connection with a nut 8 positioned on one side of the moving plate A4, and a spring 9 sleeved on the threaded rod A7 is connected between the nut 8 and the moving plate A4; the middle part of each moving plate A4 is provided with two guide wheels 10, and each guide wheel 10 is rotatably connected with a fixed shaft B11 which is in sliding connection with the moving plate A4; each fixed shaft B11 is connected with a connecting rod A12, and one end of the connecting rod A12 is rotatably connected with a screw A13 in threaded connection with the moving plate A4; one side of each moving plate A4 is connected with a plurality of air cylinders B14 positioned on the fixed plate 1; two ends of the feeding device 2 are provided with wire winding cylinders 15, and a diamond cutting line 46 is connected between the two wire winding cylinders 15; the diamond cutting line 46 is connected with the tension wheel 5 and the guide wheel 10, and a fixed shaft C16 is connected on each wire winding tube 15; each fixed shaft C16 is sleeved with a bearing 17 which is in sliding connection with the fixed plate 1, and each fixed shaft C16 is connected with a belt 18; one end of each belt 18 is connected with a rotating wheel 19, and each rotating wheel 19 is connected with a motor A20 which is connected with the fixed plate 1 in a sliding way; both ends of the feeding device 2 are provided with moving rods 21 which are connected with the fixed plate 1 in a sliding manner, and both ends of each moving rod 21 are respectively connected with the bearing 17 and the motor A20; a threaded rod B22 is in threaded connection with the middle part of each moving rod 21, and one end of each threaded rod B22 is connected with a motor B23; a conveyor belt 24 is arranged below the feeding device 2, and a motor C25 is connected to the conveyor belt 24; the fixed plate 1 is connected with a PLC (programmable logic controller) 26, and the air cylinder A3, the air cylinder B14, the motor A20, the motor B23 and the motor C25 are all electrically connected with the PLC 26; and a cooling liquid universal pipe 53 fixed on the fixing plate 1 is arranged below the feeding device 2.

The feeding device 2 comprises a moving plate B27, and a through hole 28 is formed in the middle of the moving plate B27; two clamping tiles 29 are arranged above the through hole 28, and each clamping tile 29 is connected with an air cylinder C30; both sides of the top end part of the moving plate B27 are connected with vertical plates 31, and a transverse plate 32 is connected between the two vertical plates 31; the middle part of the transverse plate 32 is connected with a vertical rod 33 in a sliding way, two sides of the vertical rod 33 are connected with gears 34 in a meshing way, and each gear 34 is connected with a motor D35; the bottom end part of the vertical rod 33 is connected with a fastening ring 36 positioned above the clamping tile 29, and the side wall of the fastening ring 36 is in threaded connection with a plurality of screws B37; both sides of the bottom end of the moving plate B27 are provided with a slide block A38, and a slide groove A39 is arranged at the position, corresponding to the slide block A38, on the fixed plate 1; the cylinder C30 and the motor D35 are both electrically connected with the PLC 26; a slot C47 is formed in the position, corresponding to the feeding device 2, of the fixed plate 1; the PLC 26 can control the expansion and contraction of the air cylinder A3, the expansion and contraction of the air cylinder B14, the rotation of the motor A20, the rotation of the motor B23, the rotation of the motor C25, the expansion and contraction of the air cylinder C30 and the rotation of the motor D35; a slotted A40 is arranged on the moving plate A4 at a position corresponding to the fixed shaft A6, and sliding blocks B41 are arranged on two sides of the fixed shaft A6; a sliding groove B42 is arranged at the position, corresponding to the sliding block B41, of the two sides of the slot A40, and an opening is formed in the position, corresponding to the threaded rod A7, of the moving plate A4; a slotted B43 is arranged on the moving plate A4 at a position corresponding to the fixed shaft B11, and sliding blocks C44 are arranged on two sides of the fixed shaft B11; a sliding groove C45 is formed in the positions, corresponding to the sliding block C44, of the two sides of the groove B43, and a threaded hole is formed in the position, corresponding to the screw A13, of the moving plate A4; two sides of the bottom end of the moving plate A4 are both provided with a slide block D48, and a slide groove D49 is arranged at the position, corresponding to the slide block D48, on the fixed plate 1; a slot D50 is formed in the position, corresponding to the moving plate A4, of the fixed plate 1, and a half slot A51 is formed in the position, corresponding to the feeding device 2, of the moving plate A4; a semi-open slot B52 is formed in the position, corresponding to the fixed shaft B11, of the fixed plate 1; a slot E54 is arranged at the position, corresponding to the bearing 17, on the fixed plate 1, a sliding block E55 is arranged on each of two sides of the bearing 17, and a sliding groove E56 is arranged at the position, corresponding to the sliding block E55, on each of two sides of the slot E54; a slot F57 is arranged at the position, corresponding to the motor A20, of the fixing plate 1, sliding blocks F58 are arranged on two sides of the motor A20, and sliding grooves F59 are arranged at positions, corresponding to the sliding blocks F58, of two sides of the slot F57; a connecting rod B60 is connected between the moving rod 21 and the bearing 17, and a connecting rod B60 is also connected between the moving rod 21 and the motor A20; the two ends of the movable rod 21 are both provided with a slide block G61, and a slide groove G62 is arranged at the position corresponding to the slide block G61 on the fixed plate 1; a support 63 is sleeved on one end, far away from the motor B23, of the threaded rod B22, and the belt 18 is located above the support 63; a threaded through hole 70 is formed in the position, corresponding to the threaded rod B22, of the movable rod 21; the two sides of the conveyor belt 24 are provided with partition plates 64, the two ends of the conveyor belt 24 are respectively connected with a driven wheel 65 and a driving wheel 66, and the driving wheel 66 is connected with a motor C25; a round block 68 is arranged at the position where the connecting rod A12 is connected with the screw A13, and a round groove 69 is arranged at the position where one end of the screw A13 corresponds to the round block 68; a plurality of upright posts 67 are connected to the bottom end of the fixing plate 1.

The working principle is as follows: the PLC controller 26 is an electronic system of digital arithmetic operation, designed for application in an industrial environment, and employs a programmable memory for storing instructions of logical operations and sequence control, timing, counting, arithmetic operations, etc., and controlling various types of mechanical devices or manufacturing processes through digital or analog input (I) and output (O) interfaces; the diamond cutting line 46 is arranged in an annular shape connected end to end, the tension wheel 5 and the wire winding tube 15 are positioned on the inner side of the annular shape, and the guide wheel 10 is positioned on the outer side of the annular shape; in an initial state, a plurality of cylinders B14 connected to the moving plate A4 are in a contraction state, two moving plates A4 are both positioned at one end, far away from the feeding device 2, of a stroke path of the moving plates A4, and the tension wheel 5 and the guide wheel 10 on the moving plate A4 are also positioned at one end, far away from the feeding device 2, of the stroke path of the moving plates A4; the cylinder A3 connected to the feeding device 2 is also in a contraction state, and the cylinder C30 on the feeding device 2 is in a contraction state; the moving rod 21 is positioned at one end of the threaded rod B22 close to the feeding device 2, and the forming tube 15 is also positioned at one end of the stroke path close to the feeding device 2; and the diamond cutting wire 46 is in a state of being tensioned by the tensioning wheel 5, the guide wheel 10 and the wire winding tube 15.

During operation, one end of the single crystal silicon rod to be cut into silicon wafers penetrates through the through hole 28 of the moving plate B27 and then is sleeved into the fastening ring 36, then the screw B37 is screwed, so that the single crystal silicon rod is fixed in the fastening ring 36, and the downward end of the single crystal silicon rod is positioned on the plane where the diamond cutting line 46 is positioned and is lower than the plane by a certain height, wherein the height is the thickness of one silicon wafer cut from the single crystal silicon rod; then, one end of a cooling liquid universal pipe 53 is connected with cooling liquid, then the power supply of the invention is turned on, a PLC controller 26 controls two motors A20 to rotate according to a set program, a motor A20 drives a corresponding rotating wheel 19 to rotate, the rotating wheel 19 further drives a fixed shaft C16 to rotate on a bearing 17 through a belt 18, the fixed shaft C16 further drives a corresponding wire winding cylinder 15 to rotate, the two wire winding cylinders 15 drive diamond cutting lines 46 positioned on the wire winding cylinders to rotate, the diamond cutting lines 46 are wound on a plurality of tension wheels 5 and guide wheels 10, the tension wheels 5 and the guide wheels 10 are rotatably connected with the corresponding fixed shaft A6 and a fixed shaft B11, the diamond cutting lines 46 further rotate on the wire winding cylinders 15, the tension wheels 5 and the guide wheels 10, the PLC controller 26 controls a motor C25 to rotate, a motor C25 drives a driving wheel 66 to rotate, and the driving wheel 66 drives a conveyor belt 24 positioned on the driving wheel to rotate partially, the transmission belt 24 is wound between the driven wheel 65 and the driving wheel 66, and the transmission belt 24 can further rotate on the driven wheel 65 and the driving wheel 66; the PLC 26 controls the cylinders C30 positioned at two sides of the middle part of the single crystal silicon rod to extend, the cylinder C30 drives the two clamping shoes 29 to approach the single crystal silicon rod, and when the cylinder C30 extends to the maximum stroke range, the two clamping shoes 29 clamp the single crystal silicon rod.

Then the PLC controller 26 controls each cylinder B14 to extend, the multiple cylinders B14 further push the two moving plates a4 to move towards one side of the feeding device 2, the moving plate a4 further drives the corresponding fixed shaft a6 and the corresponding fixed shaft B11 to move towards one side of the feeding device 2, and the corresponding tension wheel 5 and the corresponding guide wheel 10 also move towards one side of the feeding device 2; the PLC 26 controls the motor B23 to rotate while the air cylinder B14 extends, the motor B23 further drives the threaded rod B22 to rotate, the threaded rod B22 drives the corresponding movable rod 21 to move towards the side far away from the feeding device 2, the sliding blocks G61 at the two ends of the movable rod 21 slide on the sliding groove G62, the movable rod 21 drives the bearing 17 and the motor A20 to move towards the side far away from the feeding device 2 through the connecting rod B60, the sliding blocks E55 at the two sides of the bearing 17 slide along the sliding groove E56, the sliding blocks F58 at the two sides of the motor A20 slide along the sliding groove F59, the bearing 17 and the motor A20 further drive the fixed shaft C16 and the rotating wheel 19 to move towards the side far away from the feeding device 2, and the wire winding barrel 15 connected to the fixed shaft C16 also moves towards the side far away from the feeding device.

After the two wire winding cylinders 15 move to the side far away from the feeding device 2, the part of the diamond cutting line 46 wound on the wire winding cylinders 15 also moves to the side far away from the single crystal silicon rod on the feeding device 2, and after the tensioning wheel 5 and the guide wheel 10 on each side move to the side near the feeding device 2, the part of the diamond cutting line 46 below the moving plate A4 moves to the side near the single crystal silicon rod on the feeding device 2; the part of the diamond cutting line 46, which is positioned on the tension wheel 5 and the guide wheel 10, approaches the silicon single crystal rod during moving along with the movement of the moving plate A4, the part of the diamond cutting line 46 gradually cuts the silicon single crystal rod until the piston rod on the cylinder B14 on the moving plate A4 on both sides of the silicon single crystal rod extends to the maximum length, the part of the diamond cutting line 46, which is positioned on the tension wheel 5 and the guide wheel 10, cuts off the two side parts, which are close to the feeding device 2, of the silicon single crystal rod during moving, at the same time, the moving rod 21 also moves to the end, which is far away from the feeding device 2, of the threaded rod B22 along with the movement of the motor B23, then the PLC controller 26 controls the motor B23 to stop rotating, the moving rod 21 also stops moving, and during the process that the wire winding drum 15 moves to the side far away from the feeding device 2 and the tension wheel 5, the diamond cutting line 46 is always in a state of being tensioned by the tensioning wheel 5, the guide wheel 10 and the wire winding tube 15; when the moving plate A4 approaches the feeding device 2 in the extension process of the cylinder B14, the width of the half-notch A51 on the moving plate A4 is larger than that of the feeding device 2, so that the moving plate A4 can keep away from the feeding device 2 through the half-notch A51 and continuously drive the part of the diamond cutting line 46 below the moving plate A4 to approach the single crystal silicon rod; the width of the central portion of the single crystal silicon rod not cut by the diamond cutting line 46 is the distance between the portions of the diamond cutting line 46 located below the moving plates a4 on both sides.

Then the PLC 26 controls the cylinder A3 to extend, the cylinder A3 drives the feeding device 2 to move to one side, the moving plate B27 on the feeding device 2 moves on the chute A39 through the slide block A38, the feeding device 2 drives the single crystal silicon rod clamped on the feeding device 2 to move to one side, the single crystal silicon rod is partially cut by the diamond cutting line 46 positioned below the moving plate A4 on one side in the process of moving to one side until the cylinder A3 extends to the maximum stroke range, and the range is larger than the width of the single crystal silicon rod which is not cut by the diamond cutting line 46 before, so that a piece of silicon wafer is cut on the single crystal silicon rod under the coordination of the movement of the diamond cutting line 46 and the movement of the feeding device 2, the cut silicon wafer falls onto the rotating conveyor belt 24 to be conveyed to be collected outside the invention, and the cutting speed of the single crystal silicon rod by the diamond cutting line 46 is improved in a bidirectional cutting way, the efficiency is higher; then the PLC 26 controls the cylinder A3 to contract again, the cylinder A3 drives the feeding device 2 and the single crystal silicon rod thereon to return to the original position, the PLC 26 also controls the cylinder B14 to contract, the cylinder B14 drives the corresponding movable plate A4 and the tensioning wheel 5 and the guide wheel 10 on the movable plate A4 to return to the original position, the tensioning wheel 5 and the guide wheel 10 move to the side far away from the feeding device 2, the PLC 26 controls the motor B23 to rotate reversely while the cylinder B14 contracts, the motor B23 further drives the wire winding barrel 15 to return to the original position through the movable rod 21, the wire winding barrel 15 moves to the side near the feeding device 2, the diamond cutting lines 46 wound on the tensioning wheel 5, the guide wheel 10 and the wire winding barrel 15 are always in a tensioning state, and the diamond cutting lines 46 part below the A4 move to the side far away from the single crystal silicon rod.

When a silicon wafer needs to be cut on the single crystal silicon rod, the PLC 26 controls the air cylinders C30 on the two sides of the middle part of the single crystal silicon rod to contract, the two clamping shoes 29 are further separated from the single crystal silicon rod, the PLC 26 controls the motor D35 to rotate by a tiny angle, the motor D35 drives the corresponding gear 34 to rotate by a tiny angle, the rotation directions of the two gears 34 are opposite, and the rotation of the two gears 34 can make the vertical rod 33 move downwards for a small distance, so that the vertical rod 33 further drives the fastening ring 36 and the single crystal silicon rod on the fastening ring 36 to move downwards for a small distance, the small distance is the thickness of the silicon wafer to be cut from the single crystal silicon rod, then the PLC 26 controls the motor D35 to stop rotating, the single crystal silicon rod stops moving downwards, the PLC 26 controls the cylinder C30 to extend, the cylinder C30 clamps the single crystal silicon rod through the clamping tile 29, and then the working steps are repeated.

When the position of the tension pulley 5 is adjusted, after the nut 8 at one end of the threaded rod A7 is screwed, when the nut 8 is screwed to the side far from the feeding device 2, the spring 9 pushes the nut 8 to the side far from the feeding device 2, the threaded rod A7 also moves to the side far from the feeding device 2 in the through hole corresponding to the moving plate a4, the sliding blocks B41 at both sides of the fixed shaft A6 move to the side far from the feeding device 2 along the sliding grooves B42, the fixed shaft A6 further drives the tension pulley 5 to move to the side far from the feeding device 2, simultaneously, the screw a13 is screwed again, so that the screw a13 also moves to the side far from the feeding device 2 in the corresponding threaded hole on the moving plate a4, the round block 68 on the connecting rod a12 rotates in the round groove 69 of the screw a13, the screw a13 drives the fixed shaft B11 to move to the side far from the feeding device 2 through the connecting rod a12 rotatably connected with the screw a13, and the sliding blocks C44, the fixed shaft B11 further drives the guide wheel 10 to move towards the side far away from the feeding device 2, so that after the tensioning wheel 5 and the guide wheel 10 both move towards the side far away from the feeding device 2, the diamond cutting line 46 can be tensioned to a firmer degree, and the invention can also be suitable for the diamond cutting line 46 with a longer circumference; on the contrary, when the nut 8 and the screw a13 are screwed reversely, and the tensioning wheel 5 and the guide wheel 10 are both moved to the side close to the feeding device 2, the invention can be applied to the diamond cutting line 46 with a shorter circumference, thereby improving the application range of the invention.

Claims

1. A bidirectional type single crystal silicon rod cutting device is characterized in that: the device comprises a fixed plate (1), wherein the middle part of the fixed plate (1) is connected with a feeding device (2) in a sliding manner, and the feeding device (2) is connected with a plurality of cylinders A (3); two sides of the feeding device (2) are respectively provided with a movable plate A (4) which is connected with the fixed plate (1) in a sliding way, and two end parts of each movable plate A (4) are respectively provided with a tensioning wheel (5); each tensioning wheel (5) is rotatably connected with a fixed shaft A (6) in sliding connection with the moving plate A (4), and each fixed shaft A (6) is connected with a threaded rod A (7) in sliding connection with the moving plate A (4); one end of each threaded rod A (7) is in threaded connection with a nut (8) positioned on one side of the moving plate A (4), and a spring (9) sleeved on the threaded rod A (7) is connected between the nut (8) and the moving plate A (4); two guide wheels (10) are arranged in the middle of each moving plate A (4), and a fixed shaft B (11) which is connected with the moving plate A (4) in a sliding manner is rotatably connected to each guide wheel (10); each fixed shaft B (11) is connected with a connecting rod A (12), and one end of each connecting rod A (12) is rotatably connected with a screw A (13) in threaded connection with the moving plate A (4); one side of each moving plate A (4) is connected with a plurality of cylinders B (14) positioned on the fixed plate (1); two ends of the feeding device (2) are provided with wire winding cylinders (15), and a diamond cutting wire (46) is connected between the two wire winding cylinders (15); the diamond cutting line (46) is connected with the tension wheel (5) and the guide wheel (10), and a fixed shaft C (16) is connected to each wire winding tube (15); each fixed shaft C (16) is sleeved with a bearing (17) which is in sliding connection with the fixed plate (1), and each fixed shaft C (16) is connected with a belt (18); one end of each belt (18) is connected with a rotating wheel (19), and each rotating wheel (19) is connected with a motor A (20) which is connected with the fixed plate (1) in a sliding manner; moving rods (21) which are connected with the fixed plate (1) in a sliding mode are arranged at two ends of the feeding device (2), and two ends of each moving rod (21) are connected with the bearing (17) and the motor A (20) respectively; a threaded rod B (22) is in threaded connection with the middle part of each moving rod (21), and one end of each threaded rod B (22) is connected with a motor B (23); a conveyor belt (24) is arranged below the feeding device (2), and a motor C (25) is connected to the conveyor belt (24); the fixing plate (1) is connected with a PLC (programmable logic controller) (26), and the air cylinder A (3), the air cylinder B (14), the motor A (20), the motor B (23) and the motor C (25) are electrically connected with the PLC (26); a cooling liquid universal pipe (53) fixed on the fixing plate (1) is arranged below the feeding device (2);

the feeding device (2) comprises a moving plate B (27), and a through hole (28) is formed in the middle of the moving plate B (27); two clamping tiles (29) are arranged above the through hole (28), and each clamping tile (29) is connected with a cylinder C (30); both sides of the top end part of the moving plate B (27) are connected with vertical plates (31), and a transverse plate (32) is connected between the two vertical plates (31); a vertical rod (33) is slidably connected to the middle of the transverse plate (32), gears (34) are respectively meshed with two sides of the vertical rod (33), and a motor D (35) is connected to each gear (34); the bottom end part of the vertical rod (33) is connected with a fastening ring (36) positioned above the clamping tile (29), and the side wall of the fastening ring (36) is in threaded connection with a plurality of screws B (37); two sides of the bottom end of the moving plate B (27) are respectively provided with a sliding block A (38), and a sliding groove A (39) is arranged at the position, corresponding to the sliding block A (38), on the fixed plate (1); the air cylinder C (30) and the motor D (35) are electrically connected with the PLC (26); a groove C (47) is formed in the position, corresponding to the feeding device (2), on the fixing plate (1);

a slot A (40) is formed in the position, corresponding to the fixed shaft A (6), of the moving plate A (4), and sliding blocks B (41) are arranged on two sides of the fixed shaft A (6); a sliding groove B (42) is arranged at the position of the two sides of the slot A (40) corresponding to the sliding block B (41), and a hole is formed in the position of the movable plate A (4) corresponding to the threaded rod A (7); a slot B (43) is formed in the position, corresponding to the fixed shaft B (11), of the moving plate A (4), and sliding blocks C (44) are arranged on two sides of the fixed shaft B (11); a chute C (45) is arranged at the position of the two sides of the slot B (43) corresponding to the slide block C (44), and a threaded hole is arranged at the position of the movable plate A (4) corresponding to the screw A (13); two sides of the bottom end part of the moving plate A (4) are respectively provided with a sliding block D (48), and a sliding groove D (49) is arranged at the position, corresponding to the sliding block D (48), on the fixed plate (1); a slot D (50) is formed in the position, corresponding to the moving plate A (4), of the fixed plate (1), and a semi-slot A (51) is formed in the position, corresponding to the feeding device (2), of the moving plate A (4); a semi-open groove B (52) is formed in the position, corresponding to the fixed shaft B (11), on the fixed plate (1);

a groove E (54) is formed in the position, corresponding to the bearing (17), of the fixing plate (1), sliding blocks E (55) are arranged on two sides of the bearing (17), and sliding grooves E (56) are formed in positions, corresponding to the sliding blocks E (55), of two sides of the groove E (54); a slot F (57) is formed in the position, corresponding to the motor A (20), of the fixing plate (1), sliding blocks F (58) are arranged on two sides of the motor A (20), and sliding grooves F (59) are formed in the positions, corresponding to the sliding blocks F (58), of two sides of the slot F (57); a connecting rod B (60) is connected between the moving rod (21) and the bearing (17), and a connecting rod B (60) is also connected between the moving rod (21) and the motor A (20); two ends of the movable rod (21) are provided with sliding blocks G (61), and a sliding groove G (62) is arranged on the fixed plate (1) at a position corresponding to the sliding blocks G (61); a support (63) is sleeved at one end, far away from the motor B (23), of the threaded rod B (22), and the belt (18) is located above the support (63); a threaded through hole (70) is formed in the position, corresponding to the threaded rod B (22), of the movable rod (21);

the connecting rod A (12) is provided with a round block (68) at the position connected with the screw A (13), and a round groove (69) is arranged at the position of one end of the screw A (13) corresponding to the round block (68).

2. The cutting device for the silicon single crystal rod as set forth in claim 1, wherein: the PLC controller (26) can control the expansion and contraction of the air cylinder A (3), the expansion and contraction of the air cylinder B (14), the rotation of the motor A (20), the rotation of the motor B (23), the rotation of the motor C (25), the expansion and contraction of the air cylinder C (30) and the rotation of the motor D (35).

3. The cutting device for the silicon single crystal rod as set forth in claim 1, wherein: both sides of the conveyor belt (24) are provided with partition plates (64), both ends of the conveyor belt (24) are respectively connected with a driven wheel (65) and a driving wheel (66), and the driving wheel (66) is connected with a motor C (25).

4. The apparatus as claimed in any one of claims 1 to 3, wherein: the bottom end part of the fixed plate (1) is connected with a plurality of upright posts (67).