CN108890518A - It is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head - Google Patents
It is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head Download PDFInfo
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- CN108890518A CN108890518A CN201810782199.6A CN201810782199A CN108890518A CN 108890518 A CN108890518 A CN 108890518A CN 201810782199 A CN201810782199 A CN 201810782199A CN 108890518 A CN108890518 A CN 108890518A
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- ring
- clamp ring
- clamp
- hollow
- traction rope
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, its structure includes clamp ring, outer hydrophobic coating, internal drainage coating, annulus, the rounded structure of the shape of clamp ring, the outside wall surface of clamp ring is equipped with outer hydrophobic coating, the inner wall of clamp ring is fixed with one layer of uniform internal drainage coating, compared with prior art, the beneficial effects of the invention are as follows：The combination setting that the outside clamp ring passes through ring body, clamp ring regulating mechanism, rack and-pinion mechanism, clamp system and pulley blocks, has the function of diameter adjustment, it can be suitable for the carrier head of different size, and clamp system is provided with four groups to be clamped to four orientation of carrier head, clamping is more secured, and effectively preventing carrier head, there is a phenomenon where loosen.
Description
Technical field
It is specifically a kind of for chemically-mechanicapolish polishing the external folder of carrier head the present invention relates to clamp ring technical field
Ring.
Background technique
Chemically mechanical polishing is a kind of acceptable method of planarizing, and CMP typically requires that substrate to leave exposed base
The mode of the device side surface of plate is kept by carrier head.Substrate is mutually butted on rotating polishing pad positioning by carrier head.Carrier head exists
Controllable load is provided on substrate to push so that substrate is rotated against polishing pad.
The diameter of the external clamp ring of current carrier head is fixed, the function without diameter adjustment, for different rule
The carrier head of lattice needs the external clamp ring using different-diameter, and clamping degree is low, easily generation loose phenomenon.
Summary of the invention
It is a kind of for chemically-mechanicapolish polishing carrier head it is a primary object of the present invention to overcome the deficiencies of the prior art and provide
External clamp ring.
The present invention adopts the following technical scheme that realize：It is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head,
Structure includes clamp ring, outer hydrophobic coating, internal drainage coating, annulus, the rounded structure of the shape of the clamp ring, the clamp ring it is outer
Wall surface is equipped with outer hydrophobic coating, and the inner wall of the clamp ring is fixed with one layer of uniform internal drainage coating, the clamp ring it is upper and lower
Both ends are respectively connected with annulus, the clamp ring include ring body, clamp ring regulating mechanism, first pulley group, rack and-pinion mechanism,
Second pulley group, clamp system, third pulley blocks；
Be connected in the ring body clamp ring regulating mechanism, first pulley group, rack and-pinion mechanism, second pulley group,
Clamp system, third pulley blocks, the clamp ring regulating mechanism pass through first pulley group and connect with rack and-pinion mechanism, institute
It states rack and-pinion mechanism and is connected to second pulley group, the clamp system is laid with four groups and in being symmetrical arranged two-by-two, leans on
Two groups of clamp systems of nearly clamp ring regulating mechanism pass through third pulley blocks and connect with clamp ring regulating mechanism, adjust machine far from clamp ring
Two groups of clamp systems of structure are connected to second pulley group, the first pulley group, rack and-pinion mechanism, second pulley group,
Third pulley blocks are laid with two groups and are axis in mirror settings, the outer hydrophobic painting using the central horizontal line of clamp ring regulating mechanism
Layer is located at the outer wall of ring body, and the internal drainage coating is set to the inner wall of ring body.
As optimization, the ring body includes hollow outer ring, guide ring, movable mouth, hollow inner ring, inner cavity, through-hole, recessed
Slot, the through-hole are arranged in hollow inner ring, offer in four orientation of the hollow inner ring and be integrated therewith
Movable mouth, the hollow inner ring through in hollow outer ring and the two is concentric ring structure, the inner wall of the hollow outer ring with
Inner cavity is formed between the inner wall of hollow inner ring, the inner cavity is communicated with movable mouth, on the side center of the hollow outer ring
Open up fluted, the groove goes out to be equipped with the guide ring being fixedly connected with hollow outer ring, the guide ring and clamp ring regulating mechanism
It is flexibly connected, the clamp ring regulating mechanism is also attached to hollow inner ring, and the upper and lower ends of the hollow inner ring and hollow outer ring are equal
It is connected with annulus, the inner cavity is built-in with first pulley group, rack and-pinion mechanism, second pulley group, clamp system, third
The outer wall of hollow outer ring is arranged in pulley blocks, the outer hydrophobic coating, and the internal drainage coating is fixed on the outer wall of hollow inner ring.
As optimization, the clamp ring regulating mechanism includes guide groove, rotating disk, screw rod, pair of nut, fixed block, bearing
Seat, one end of the screw rod are equipped with bearing block, and the other end of the screw rod is vertically connected at the medial center of rotating disk, described
Guide groove is offered on the outer end face of rotating disk, and pair of nut, the pair of nut and silk are equipped between the rotating disk and bearing block
Bar is connected through a screw thread, and the upper and lower ends center of the pair of nut is vertically connected with fixed block, and the one of the fixed block
End is connect by first pulley group with rack and-pinion mechanism, and the other end of the fixed block passes through third pulley blocks and connects
It is connected to clamp system, the bearing block is embedded in hollow inner ring, the guide groove and guide pad carry out activity cooperation, the rotation
Turntable and hollow outer ring movable contact.
As optimization, the first pulley group includes the first leading block, the first traction rope, first leading block
Lay four and with the first traction rope movable contact, first leading block is mounted on interior intracavitary, first traction rope
One end be connected with fixed block, the other end of the fixed block is connected to rack and-pinion mechanism.
As optimization, the rack and-pinion mechanism include transmission gear, shaft, I-beam wheel, arcuate guide raised line,
Arcuate guide slide, the first spring, arc-shaped gear batten, it is convex that two outer end faces of the arc-shaped gear batten are respectively and fixedly provided with arcuate guide
The inner face sliding slot of item, the arcuate guide raised line and arcuate guide slide, which uses, to be slidably connected, the arc-shaped gear batten and arc
Shape guiding slide is gap-matched, and an inside of the arc-shaped gear batten is connected with one end of the first spring, and described first
The other end of spring is connected to arcuate guide raised line, and the arcuate guide raised line is equipped with therewith far from a upper side of the first spring
The transmission gear being meshed, the transmission gear are set to therewith in parallel as the dead astern of the I-beam wheel of concentric wheel construction, the biography
Moving gear and I-beam wheel are nested in shaft, and the arcuate guide raised line is connected with the first traction rope, the I-beam wheel with
The connection of second pulley group, two outer end areas of the shaft are flexibly connected with the inner face of annulus, the arcuate guide slide
Side far from transmission gear is fixedly connected with the inner wall of hollow outer ring.
As optimization, the second pulley group includes the second traction rope, the second leading block, second leading block
There are four laying and movable contact is in the second traction rope, and second leading block is located at interior intracavitary, second traction rope
One end be connected to I-beam wheel, the other end of second traction rope is connect with the clamp system far from pair of nut side.
As optimization, the clamp system includes PTFE base coating, curved splint, telescopic rod, hollow cylinder, the second bullet
Spring, pilot hole, the hollow cylinder bottom centre offer the pilot hole of circular configuration, the side of the pilot hole is equipped with and sky
The second spring of heart cylinder inner bottom surface connection, one end of the second spring are connect with telescopic rod, and the shape of the telescopic rod is T-shaped
Structure, the telescopic rod are gap-matched with hollow cylinder, and the one end of the telescopic rod far from second spring is through movable mouth
And connect with curved splint, the curved splint far from being fixed with PTFE base coating on the side of telescopic rod, the telescopic rod with
Movable mouth is gap-matched, and the hollow cylinder is set to interior intracavitary and is fixedly connected with annulus, and the hollow cylinder is pressed from both sides close to arc
The side of plate is also attached to the inner wall of hollow inner ring, and the telescopic rod is connect by third pulley blocks with fixed block.
As optimization, the third pulley blocks include third leading block, third traction rope, the third leading block
Lay there are three and with third traction rope movable contact, the third leading block is set to the inside of the first leading block,
One end of the third traction rope is connect with fixed block, and the other end of the third traction rope is through pilot hole, second spring
And it is connect with the bottom center of telescopic rod.
As optimization, one end of second traction rope through on the clamp system far from pair of nut pilot hole, the
Two springs and connect with telescopic rod.
As optimization, the setting of the clamp ring regulating mechanism can adjust the curved splint in four orientation and constitute difference greatly
Small diameter, applied widely so as to be suitable for different size of carrier head, the setting of the clamp system has flexible
The function of adjusting can be clamped carrier head, and clamping effect is good, relatively firm.
As optimization, the setting of the first pulley group can determine that I-beam wheel rotate forward also by clamp ring regulating mechanism
It is reversion, the first spring is provided in arc-shaped gear batten and can be resetted, arcuate guide raised line and arcuate guide slide
Setting, plays guide and limit to arc-shaped gear batten, effectively avoids arc-shaped gear batten stress and there is a phenomenon where deviations, makes
Rotation, the second traction rope and I-beam wheel can be normally carried out using wound clockwise setting by obtaining transmission gear, enable to I-shaped
Wheel discharges the second traction rope when being rotated clockwise.It is clamped to which curved splint is overhanging, I-beam wheel is revolved counterclockwise
The second traction rope is subjected to rope closing when turning, carries out clamping preceding adjusting so that curved splint inside contracts.
Beneficial effect
Of the invention is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, which can be suitable for different-diameter
The carrier head of size, when the diameter that the curved splint in less than four different directions of the bore of carrier head is constituted, then counterclockwise
Rotate rotating disk so that screw rod drives pair of nut mobile to bearing block direction, thus while fixed block is mobile with pair of nut
Release pulling force to telescopic rod under the effect of the guide and limit of third leading block and third traction rope so that second spring due to
It to be resetted by pulling-down and provide power to telescopic rod, so that telescopic rod drives curved splint overhanging to hollow cylinder, since third is led
The length of messenger is fixed and nonelastic, therefore length=fixed block displacement that overhanging distance=third traction rope is released,
At the same time, fixed block generates pulling force to arc-shaped gear batten under the guide and limit effect of the first leading block, the first traction rope,
So that arc-shaped gear batten stress and under the guiding role of arcuate guide raised line to outside guiding slide sliding, arcuate guide raised line
The transmission gear being meshed therewith is then driven to be rotated clockwise when to far from the movement of the first spring, so that shaft is with driving cog
I-beam wheel rotation is driven while wheel rotation, I-beam wheel rotation then discharges the second traction rope for using wound clockwise therewith, releases
The second traction rope put provides power for the first spring on the clamp system far from pair of nut, so that telescopic rod drives curved splint
It is overhanging to hollow cylinder, to be clamped to carrier head, otherwise can similarly obtain；
Compared with prior art, the beneficial effects of the invention are as follows：The outside clamp ring passes through ring body, clamp ring regulating mechanism, tooth
The combination setting of gear drive, clamp system and pulley blocks, has the function of diameter adjustment, can be suitable for different rule
The carrier head of lattice, and clamp system is provided with four groups to be clamped to four orientation of carrier head, clamping is more secured, effectively
The carrier head that prevents there is a phenomenon where loosen.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon：
Fig. 1 is that the present invention is a kind of for chemically-mechanicapolish polishing the structural schematic diagram of the external clamp ring of carrier head；
Fig. 2 is the structural schematic diagram of the first working condition of clamp ring of the invention；
Fig. 3 is the structural schematic diagram of second of working condition of clamp ring of the invention.
In figure：Clamp ring 1, outer hydrophobic coating 2, internal drainage coating 3, annulus 4, ring body 11, clamp ring regulating mechanism 12, first are sliding
Wheel group 13, second pulley group 15, clamp system 16, third pulley blocks 1, hollow outer ring 1101, is led at rack and-pinion mechanism 14
To ring 1102, movable mouth 1103, hollow inner ring 1104, inner cavity 1105, through-hole 1106, groove 1107, guide groove 1201, rotating disk
1202, screw rod 1203, pair of nut 1204, fixed block 1205, bearing block 1206, the first leading block 1301, the first traction rope
1302, transmission gear 1401, shaft 1402, I-beam wheel 1403, arcuate guide raised line 1404, arcuate guide slide 1405, first
Spring 1406, arc-shaped gear batten 1407, the second traction rope 1501, the second leading block 1502, PTFE base coating 1601, arc folder
Plate 1601, telescopic rod 1603, hollow cylinder 1604, second spring 1605, pilot hole 1606, third leading block 1701, third are led
Messenger 1702.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-3 is please referred to, the present invention provides a kind of for chemically-mechanicapolish polishing the external clamp ring technical solution of carrier head：Its
Structure includes clamp ring 1, outer hydrophobic coating 2, internal drainage coating 3, annulus 4, the rounded structure of shape of the clamp ring 1, the folder
The outside wall surface of ring 1 is equipped with outer hydrophobic coating 2, and the inner wall of the clamp ring 1 is fixed with one layer of uniform internal drainage coating 3, described
The upper and lower ends of clamp ring 1 are respectively connected with annulus 4, and the clamp ring 1 includes ring body 11, clamp ring regulating mechanism 12, first pulley group
13, rack and-pinion mechanism 14, second pulley group 15, clamp system 16, third pulley blocks 17；
Clamp ring regulating mechanism 12, first pulley group 13, rack and-pinion mechanism 14, second are connected in the ring body 11
Pulley blocks 15, clamp system 16, third pulley blocks 17, the clamp ring regulating mechanism 12 pass through first pulley group 13 and rack tooth
Wheel drive mechanism 14 connects, and the rack and-pinion mechanism 14 is connected to second pulley group 15, and the clamp system 16 is laid
Have four groups and in being symmetrical arranged two-by-two, close to clamp ring regulating mechanism 12 two groups of clamp systems 16 by third pulley blocks 17 with
Clamp ring regulating mechanism 12 connects, and two groups of clamp systems 16 far from clamp ring regulating mechanism 12 are connected to second pulley group 15, described
First pulley group 13, rack and-pinion mechanism 14, second pulley group 15, third pulley blocks 17 are laid with two groups and with clamp rings
The central horizontal line of regulating mechanism 12 is that axis is in mirror settings, and the outer hydrophobic coating 2 is located at the outer wall of ring body 11, described interior thin
Water coating 3 is set to the inner wall of ring body 11.
The ring body 11 includes hollow outer ring 1101, guide ring 1102, movable mouth 1103, hollow inner ring 1104, inner cavity
1105, through-hole 1106, groove 1107, the through-hole 1106 are arranged in hollow inner ring 1104, and the four of the hollow inner ring 1104
Offer the movable mouth 1103 being integrated therewith in a orientation, the hollow inner ring 1104 is through hollow outer ring
In 1101 and the two is concentric ring structure, between the inner wall of the hollow outer ring 1101 and the inner wall of hollow inner ring 1104 in formation
Chamber 1105, the inner cavity 1105 communicate with movable mouth 1103, offer on the side center of the hollow outer ring 1101 recessed
Slot 1107, the groove 1107, which goes out, is equipped with the guide ring 1102 that is fixedly connected with hollow outer ring 1101, the guide ring 1102 with
Clamp ring regulating mechanism 12 is flexibly connected, and the clamp ring regulating mechanism 12 is also attached to hollow inner ring 1104, the hollow inner ring
1104 and the upper and lower ends of hollow outer ring 110 be respectively connected with annulus 4, the inner cavity 1105 is built-in with first pulley group 13, rack gear
Gear drive 14, second pulley group 15, clamp system 16, third pulley blocks 17, the outer hydrophobic coating 2 are arranged hollow
The outer wall of outer ring 1101, the internal drainage coating 3 are fixed on the outer wall of hollow inner ring 1104.
The clamp ring regulating mechanism 12 includes guide groove 1201, rotating disk 1202, screw rod 1203, pair of nut 1204, consolidates
Determine block 1205, bearing block 1206, one end of the screw rod 1203 is equipped with bearing block 1206, and the other end of the screw rod 1203 hangs down
The direct-connected medial center for being connected to rotating disk 1202 offers guide groove 1201, the rotation on the outer end face of the rotating disk 1202
Pair of nut 1204 is equipped between turntable 1202 and bearing block 1206, the pair of nut 1204 is connected through a screw thread with screw rod 1203,
The upper and lower ends center of the pair of nut 1204 is vertically connected with fixed block 1205, and one end of the fixed block 1205 is equal
It is connect by first pulley group 13 with rack and-pinion mechanism 14, the other end of the fixed block 1205 passes through third pulley
Group 17 is connected to clamp system 16, and the bearing block 1206 is embedded in hollow inner ring 1104, the guide groove 1201 and guiding
1102 carry out activity cooperation of block, the rotating disk 1202 and hollow 1101 movable contact of outer ring.
The first pulley group 13 includes the first leading block 1301, the first traction rope 1302, and first guiding is slided
Wheel 1301 lays four and with 1302 movable contact of the first traction rope, and first leading block 1301 is mounted on inner cavity 1105
Interior, one end of first traction rope 1302 is connected with fixed block 1205, and the other end of the fixed block 1205 is connected to tooth
Gear drive 14.
The rack and-pinion mechanism 14 includes transmission gear 1401, shaft 1402, I-beam wheel 1403, arcuate guide
Raised line 1404, arcuate guide slide 1405, the first spring 1406, arc-shaped gear batten 1407, the two of the arc-shaped gear batten 1407
Outer end face is respectively and fixedly provided with arcuate guide raised line 1404, the inner face of the arcuate guide raised line 1404 and arcuate guide slide 1405
Sliding slot is using being slidably connected, and the arc-shaped gear batten 1407 is gap-matched with arcuate guide slide 1405, the arc-shaped gear
One inside of batten 1407 is connected with one end of the first spring 1406, and the other end of first spring 1406 is connected to arc
It is oriented to raised line 1404, the arcuate guide raised line 1404 is equipped with the biography being meshed therewith far from a upper side of the first spring 1406
Moving gear 1401, the transmission gear 1401 is set in parallel therewith for the dead astern of the I-beam wheel 1403 of concentric wheel construction, described
Transmission gear 1401 and I-beam wheel 1403 are nested in shaft 1402, the arcuate guide raised line 1404 and the first traction rope
1302 are connected, and the I-beam wheel 1403 is connect with second pulley group 15, two outer end areas of the shaft 1402 with annulus 4
Inner face be flexibly connected, in side of the arcuate guide slide 1405 far from transmission gear 1401 and hollow outer ring 1101
Wall is fixedly connected.
The second pulley group 15 includes the second traction rope 1501, the second leading block 1502, and second guiding is slided
There are four wheel 1502 is laid and movable contact is in the second traction rope 1501, and second leading block 1502 is located at inner cavity 1105
Interior, one end of second traction rope 1501 is connected to I-beam wheel 1403, the other end of second traction rope 1501 with it is separate
The clamp system 16 of 1204 side of pair of nut connects.
The clamp system 16 includes PTFE base coating 1601, curved splint 1601, telescopic rod 1603, hollow cylinder
1604, second spring 1605, pilot hole 1606, the hollow cylinder 1604 bottom centre offer the pilot hole of circular configuration
1606, the side of the pilot hole 1606 is equipped with the second spring 1605 connecting with 1604 inner bottom surface of hollow cylinder, second bullet
One end of spring 1605 is connect with telescopic rod 1603, the T-shaped structure of shape of the telescopic rod 1603, the telescopic rod 1603 and sky
Heart cylinder 1604 is gap-matched, the described one end of telescopic rod 1603 far from second spring 1605 through movable mouth 1103 and with
Curved splint 1601 connects, and is fixed with PTFE base coating 1601 on the side of the curved splint 1601 far from telescopic rod 1603,
The telescopic rod 1603 is gap-matched with movable mouth 1103, the hollow cylinder 1604 be set in inner cavity 1105 and with annulus 4
It is fixedly connected, the hollow cylinder 1604 is also attached to the inner wall of hollow inner ring 1104 close to the side of curved splint 1601, described
Telescopic rod 1603 is connect by third pulley blocks 17 with fixed block 1205.
The third pulley blocks 17 include third leading block 1701, third traction rope 1702, and the third guiding is slided
Wheel 1701 lay there are three and with 1702 movable contact of third traction rope, the third leading block 1701 is set to and first leads
To the inside of pulley 1301, one end of the third traction rope 1702 is connect with fixed block 1205, the third traction rope 1702
The other end through pilot hole 1606, second spring 1605 and connect with the bottom center of telescopic rod 1603.
One end of second traction rope 1501 through far from pair of nut 1204 clamp system 16 on pilot hole
1606, second spring 1605 and connect with telescopic rod 1603.
The setting of the clamp ring regulating mechanism 12 can adjust the curved splint 1602 in four orientation and constitute different size
Diameter, applied widely so as to be suitable for different size of carrier head, the setting of the clamp system 16 has flexible
The function of adjusting can be clamped carrier head, and clamping effect is good, relatively firm.
The setting of the first pulley group 13 can determine that I-beam wheel 1403 rotate forward also by clamp ring regulating mechanism 12
It is reversion, the first spring 1406 is provided in arc-shaped gear batten 1407 and can be resetted, arcuate guide raised line 1404 and arc
Shape is oriented to the setting of slide 1405, plays guide and limit to arc-shaped gear batten 1407, effectively avoids arc-shaped gear batten
1407 stress and there is a phenomenon where deviations, enable transmission gear 1401 to be normally carried out rotation, the second traction rope 1501 and work
Character wheel 1403 is arranged using wound clockwise, and I-beam wheel 1403 is enabled to discharge the second traction rope when being rotated clockwise
1501.It is clamped to which curved splint 1601 is overhanging, by the second traction rope 1501 when I-beam wheel 1403 is rotated counterclockwise
Rope closing is carried out, carries out clamping preceding adjusting so that curved splint 1601 inside contracts.
Working principle：The clamp ring can be suitable for the carrier head of different-diameter size, when the bore of carrier head is less than four
When the diameter that the curved splint 1601 in different direction is constituted, then rotating disk 1202 is rotated counterclockwise, so that screw rod 1203 drives
Pair of nut 1204 is mobile to 1206 direction of bearing block, to be oriented to while fixed block 1205 is mobile with pair of nut 1204 in third
The pulling force to telescopic rod 1603 is released under the effect of the guide and limit of pulley 1701 and third traction rope 1702, so that second spring
1605 provide power to telescopic rod 1603 due to be resetted by pulling-down, so that telescopic rod 1605 drives curved splint 1602 to sky
Heart cylinder 1604 is overhanging, since the length of third traction rope 1702 is fixed and nonelastic, therefore overhanging distance=third traction rope
The displacement of the 1702 length=fixed blocks 1205 being released, at the same time, fixed block 1205 is in the first leading block 1301,
One traction rope 1302 guide and limit effect under to arc-shaped gear batten 1407 generate pulling force so that arc-shaped gear batten 1407 by
Power and it is sliding to outside guiding slide 1405 under the guiding role of arcuate guide raised line 1404, arcuate guide raised line 1404 is to far from the
One spring 1406 then drives the transmission gear being meshed therewith 1401 to be rotated clockwise when mobile, so that shaft 1402 is with biography
I-beam wheel 1402 is driven to rotate while moving gear 1401 rotates, the rotation of I-beam wheel 1402 then discharges therewith using wound clockwise
The second traction rope 1501, the second traction rope 1501 of release is the first spring on the clamp system 16 far from pair of nut 1204
1605 provide power, so that telescopic rod 1604 drives curved splint 1602 overhanging to hollow cylinder 1604, to carry out to carrier head
Clamping, on the contrary it can similarly obtain.
The technological progress that the present invention obtains compared with the prior art is：The outside clamp ring passes through ring body, clamp ring regulating mechanism, tooth
The combination setting of gear drive, clamp system and pulley blocks, has the function of diameter adjustment, can be suitable for different rule
The carrier head of lattice, and clamp system is provided with four groups to be clamped to four orientation of carrier head, clamping is more secured, effectively
The carrier head that prevents there is a phenomenon where loosen.
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art,
It is still possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is carried out etc.
With replacement, all within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in this
Within the protection scope of invention.
Claims (9)
1. a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, structure includes clamp ring, outer hydrophobic coating, internal drainage painting
Layer, annulus, the rounded structure of the shape of the clamp ring, the outside wall surface of the clamp ring are equipped with outer hydrophobic coating, the clamp ring it is interior
Wall surface is fixed with one layer of uniform internal drainage coating, and the upper and lower ends of the clamp ring are respectively connected with annulus, it is characterised in that：
The clamp ring includes ring body, clamp ring regulating mechanism, first pulley group, rack and-pinion mechanism, second pulley group, folder
Tight mechanism, third pulley blocks；
It is connected with clamp ring regulating mechanism in the ring body, first pulley group, rack and-pinion mechanism, second pulley group, clamps
Mechanism, third pulley blocks, the clamp ring regulating mechanism pass through first pulley group and connect with rack and-pinion mechanism, the tooth
Gear drive is connected to second pulley group, and the clamp system is laid with four groups and in being symmetrical arranged two-by-two, close to folder
Two groups of clamp systems of ring regulating mechanism pass through third pulley blocks and connect with clamp ring regulating mechanism, far from clamp ring regulating mechanism
Two groups of clamp systems are connected to second pulley group, the first pulley group, rack and-pinion mechanism, second pulley group, third
Pulley blocks are laid with two groups and are axis in mirror settings using the central horizontal line of clamp ring regulating mechanism, and the outer hydrophobic coating is set
In the outer wall of ring body, the internal drainage coating is set to the inner wall of ring body.
2. according to claim 1 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：It is described
Ring body includes hollow outer ring, guide ring, movable mouth, hollow inner ring, inner cavity, through-hole, groove, and the through-hole is arranged hollow interior
On ring, the movable mouth being integrated therewith is offered in four orientation of the hollow inner ring, the hollow inner ring is passed through
It is through in hollow outer ring and the two is concentric ring structure, between the inner wall of the hollow outer ring and the inner wall of hollow inner ring in formation
Chamber, the inner cavity are communicated with movable mouth, open up fluted on the side center of the hollow outer ring, and the groove goes out to be equipped with
The guide ring being fixedly connected with hollow outer ring, the guide ring are flexibly connected with clamp ring regulating mechanism, the clamp ring regulating mechanism
It is also attached to hollow inner ring, the upper and lower ends of the hollow inner ring and hollow outer ring are respectively connected with annulus, and the inner cavity is built-in with
First pulley group, rack and-pinion mechanism, second pulley group, clamp system, third pulley blocks, the outer hydrophobic coating setting
In the outer wall of hollow outer ring, the internal drainage coating is fixed on the outer wall of hollow inner ring.
3. according to claim 1 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：It is described
Clamp ring regulating mechanism includes guide groove, rotating disk, screw rod, pair of nut, fixed block, bearing block, one end installation of the screw rod
There is bearing block, the other end of the screw rod is vertically connected at the medial center of rotating disk, opens up on the outer end face of the rotating disk
There is guide groove, pair of nut is equipped between the rotating disk and bearing block, the pair of nut is connected through a screw thread with screw rod, the spiral shell
Female secondary upper and lower ends center is vertically connected with fixed block, and one end of the fixed block passes through first pulley group and tooth
The connection of gear drive, the other end of the fixed block pass through third pulley blocks and are connected to clamp system, the bearing
Seat is embedded in hollow inner ring, and the guide groove and guide pad carry out activity cooperation, the rotating disk connect with hollow outer ring activity
Touching.
4. according to claim 1 or 3 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：
The first pulley group includes the first leading block, the first traction rope, and first leading block lays four and with the
One traction rope movable contact, first leading block are mounted on interior intracavitary, one end and the fixed block phase of first traction rope
Connection, the other end of the fixed block are connected to rack and-pinion mechanism.
5. according to claim 2 or 3 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：
The rack and-pinion mechanism includes transmission gear, shaft, I-beam wheel, arcuate guide raised line, arcuate guide slide, first
Spring, arc-shaped gear batten, two outer end faces of the arc-shaped gear batten are respectively and fixedly provided with arcuate guide raised line, the arcuate guide raised line
Inner face sliding slot with arcuate guide slide using being slidably connected, matched with arcuate guide slide using gap by the arc-shaped gear batten
It closes, an inside of the arc-shaped gear batten is connected with one end of the first spring, and the other end of first spring is connected to arc
Shape is oriented to raised line, and the arcuate guide raised line is equipped with the transmission gear being meshed therewith, institute far from a upper side of the first spring
It states transmission gear to be set in parallel therewith for the dead astern of the I-beam wheel of concentric wheel construction, the transmission gear and I-beam wheel are nested with
In shaft, the arcuate guide raised line is connected with the first traction rope, and the I-beam wheel is connect with second pulley group, and described turn
Two outer end areas of axis are flexibly connected with the inner face of annulus, and side of the arcuate guide slide far from transmission gear is in
The inner wall of empty outer ring is fixedly connected.
6. according to claim 2 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：It is described
Second pulley group includes the second traction rope, the second leading block, and there are four the second leading block layings and activity connects
It touches in the second traction rope, second leading block is located at interior intracavitary, and one end of second traction rope is connected to I-beam wheel, institute
The other end for stating the second traction rope is connect with the clamp system far from pair of nut side.
7. a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head according to claim 3 or 6, it is characterised in that：
The clamp system includes PTFE base coating, curved splint, telescopic rod, hollow cylinder, second spring, pilot hole, described hollow
The bottom centre of cylinder offers the pilot hole of circular configuration, and the side of the pilot hole is equipped with the connect with hollow cylinder inner bottom surface
One end of two springs, the second spring is connect with telescopic rod, the T-shaped structure of the shape of the telescopic rod, the telescopic rod with
Hollow cylinder is gap-matched, and the one end of the telescopic rod far from second spring is connect through movable mouth with curved splint,
The curved splint is matched with movable mouth using gap far from PTFE base coating, the telescopic rod is fixed on the side of telescopic rod
It closes, the hollow cylinder is set to interior intracavitary and is fixedly connected with annulus, and the hollow cylinder is also attached to close to the side of curved splint
The inner wall of hollow inner ring, the telescopic rod are connect by third pulley blocks with fixed block.
8. according to claim 1 or 2 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：
The third pulley blocks include third leading block, third traction rope, the third leading block lay there are three and with
Third traction rope movable contact, the third leading block are set to the inside of the first leading block, the third traction rope
One end is connect with fixed block, the other end of the third traction rope through pilot hole, second spring and with the bottom surface of telescopic rod
Center connection.
9. according to claim 6 a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head, it is characterised in that：It is described
One end of second traction rope is connect through pilot hole, the second spring on the clamp system far from pair of nut with telescopic rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810782199.6A CN108890518A (en) | 2018-07-17 | 2018-07-17 | It is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810782199.6A CN108890518A (en) | 2018-07-17 | 2018-07-17 | It is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head |
Publications (1)
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| CN108890518A true CN108890518A (en) | 2018-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810782199.6A Pending CN108890518A (en) | 2018-07-17 | 2018-07-17 | It is a kind of for chemically-mechanicapolish polishing the external clamp ring of carrier head |
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| CN (1) | CN108890518A (en) |
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| CN110907467A (en) * | 2019-12-02 | 2020-03-24 | 葛攀 | Crack detection equipment is used in elevator accessory production |
| CN112006486A (en) * | 2020-09-07 | 2020-12-01 | 刘占国 | Novel aluminum alloy workpiece display lamp bracket with collision protection function |
| CN112191950A (en) * | 2020-09-29 | 2021-01-08 | 重庆润跃机械有限公司 | Gear forming device |
| CN112222004A (en) * | 2020-09-25 | 2021-01-15 | 谢光辉 | Automatic sorting vehicle for logistics goods |
| CN112478012A (en) * | 2020-12-14 | 2021-03-12 | 中国科学院沈阳自动化研究所 | Crawling mechanism automatically adapting to shape of insulator |
| CN113080666A (en) * | 2021-04-20 | 2021-07-09 | 聊城大学东昌学院 | Anti-toppling all-dimensional display device for product outer package design |
| CN113231899A (en) * | 2021-05-15 | 2021-08-10 | 王利 | Grinding device with dust removal function |
| CN113287786A (en) * | 2021-06-10 | 2021-08-24 | 宁波依兰雅丝护肤品有限公司 | Adjustable locking mechanism and electronic equipment thereof |
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| CN113287786B (en) * | 2021-06-10 | 2024-04-09 | 宁波依兰雅丝护肤品有限公司 | Adjustable locking mechanism and electronic equipment thereof |
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Application publication date: 20181127 |