CN108873609A - Light blockage coating equipment - Google Patents
Light blockage coating equipment Download PDFInfo
- Publication number
- CN108873609A CN108873609A CN201810825008.XA CN201810825008A CN108873609A CN 108873609 A CN108873609 A CN 108873609A CN 201810825008 A CN201810825008 A CN 201810825008A CN 108873609 A CN108873609 A CN 108873609A
- Authority
- CN
- China
- Prior art keywords
- sliding block
- coating
- side wall
- wiping board
- light blockage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The present invention provides a kind of light blockage coating equipment, including light blockage coating mechanism and two photoresist residue removal structures；The light blockage coating mechanism includes photoresist memory and the coating assembly that is set on photoresist memory lower end surface, the coating assembly is in triangular prism shape, and a first side wall face of the coating assembly is connect with the photoresist memory, the coating assembly is provided with the coating pan of the middle vertical plane setting along the first side wall face, and two of the light blockage coating mechanism ontology are mutually inclined on second side wall surface of connection and are respectively arranged with sliding groove；The photoresist residue removal structure includes sliding block, wiping board, tuyere and spray nozzle, the sliding block is slidably disposed in the sliding groove, motor-driven mechanism is provided in the sliding block to drive the sliding block to slide automatically along the sliding groove, the wiping board is set on the sliding block and its medial surface is bonded with the part of second side wall surface, and the wiping board and tuyere are respectively arranged on the sliding block and are located at the wiping board two sides.
Description
Technical field
The present invention relates to material coating applications, and in particular to a kind of light blockage coating equipment.
Background technique
Light blockage coating equipment can remain some photoresists when being coated on photoresist to panel on the inclined surface of the applying structure,
When being coated with again, it is possible to photoresist residual can be made to contact with new photoresist, these photoresists residual will affect quality when coating,
There may be bad products.
Therefore, the prior art is defective, needs to improve.
Summary of the invention
The purpose of the embodiment of the present invention is that providing a kind of light blockage coating equipment, has and automatically remove the remaining effect of photoresist.
The present invention provides a kind of light blockage coating equipment, including it is light blockage coating mechanism, two photoresist residue removal structures, clear
Washing lotion tank and air-heater；
The light blockage coating mechanism includes photoresist memory and the coating assembly that is set on photoresist memory lower end surface,
The coating assembly is in prism-shaped, and a first side wall face of the coating assembly is connect with the bottom wall of the photoresist memory, the light
Hinder memory bottom wall on offer strip outlet, the coating assembly be provided with along the first side wall face middle vertical plane setting
With the coating pan of the strip outlet, which extends to the side opposite with the first side wall face from the first side wall face
At rib, and the incline is run through, the length of the coating pan is less than the length of the coating assembly and is equal to the length of strip outlet；
Two of the light blockage coating mechanism ontology are mutually inclined on second side wall surface of connection and are respectively arranged with sliding groove, the sliding
Slot extends along the length direction of the coating assembly；
Two photoresist residue removal structures are respectively arranged on two second side wall surfaces and can slide along the sliding groove；
The photoresist residue removal structure includes sliding block, wiping board, tuyere and spray nozzle, and the sliding block is slidably disposed in the cunning
In dynamic slot, motor-driven mechanism is provided in the sliding block to drive the sliding block to slide automatically along the sliding groove, which sets
It is placed on the sliding block and its medial surface is bonded with the part of second side wall surface, the wiping board and tuyere are respectively arranged at the sliding block
Above and it is located at the wiping board two sides；
The cleaning fluid tank is connected to by drain pipe with the spray nozzle, which is connected to by air-exhausting duct with the tuyere.
In light blockage coating equipment of the present invention, the width of the wiping board is the one of second side wall surface width
Half.
In light blockage coating equipment of the present invention, the wiping board can be sliding along the width direction of second side wall surface
It is set on the sliding block dynamicly, and is provided with retaining mechanism on the wiping board, so that the wiping board is fixed with respect to the sliding block when locking,
When unlock, which can slide with respect to the sliding block.
In light blockage coating equipment of the present invention, the one side setting with the second sidewall face contact of the wiping board
Elasticity layer.
In light blockage coating equipment of the present invention, the width of the wiping board is the width phase of second side wall surface
Together.
In light blockage coating equipment of the present invention, multiple use extended along width direction are offered on the side
In the diversion trench of guiding cleaning solution.
Further include control chip and battery component in light blockage coating equipment of the present invention, the control chip with
And battery component is all set in the sliding block, controls chip and battery component is connect with the motor-driven mechanism respectively.
The present invention passes through setting light blockage coating mechanism and two photoresist residue removal structures；Light blockage coating mechanism packet
The coating assembly for including photoresist memory and being set on photoresist memory lower end surface, the coating assembly are in triangular prism shape,
And a first side wall face of the coating assembly is connect with the photoresist memory, which is provided with along the first side wall
The coating pan of the middle vertical plane setting in face, the coating pan extend to the incline opposite with the first side wall face from the first side wall face
Place, and the incline is run through, the length of the coating pan is less than the length of the coating assembly；Two of the light blockage coating mechanism ontology
It is mutually inclined on second side wall surface of connection and is respectively arranged with sliding groove, which prolongs along the length direction of the coating assembly
It stretches；Two photoresist residue removal structures are respectively arranged on two second side wall surfaces and can slide along the sliding groove；
The photoresist residue removal structure includes sliding block, wiping board, tuyere and spray nozzle, and the sliding block is slidably disposed in the cunning
In dynamic slot, motor-driven mechanism is provided in the sliding block to drive the sliding block to slide automatically along the sliding groove, which sets
It is placed on the sliding block and its medial surface is bonded with the part of second side wall surface, the wiping board and tuyere are respectively arranged at the sliding block
Above and it is located at the wiping board two sides, while making it possible to realization coating photoresist, remaining photoresist can be cleared up automatically.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the light blockage coating equipment in the embodiment of the present invention.
Fig. 2 is a kind of structural schematic diagram of the photoresist residue removal structure of the light blockage coating equipment in the embodiment of the present invention.
Fig. 3 is the schematic block circuit diagram of the light blockage coating equipment in the embodiment of the present invention.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore be not considered as limiting the invention.In addition, term " first ", " second " are only used for
Purpose is described, relative importance is not understood to indicate or imply or implicitly indicates the quantity of indicated technical characteristic.
" first " is defined as a result, the feature of " second " can explicitly or implicitly include one or more feature.?
In description of the invention, the meaning of " plurality " is two or more, unless otherwise specifically defined.
Please referring to Fig. 1, Fig. 1 is one of one embodiment of the invention light blockage coating equipment, including light blockage coating mechanism 10,
Two photoresist residue removal structures 20, cleaning fluid tank 30 and air-heater 40；Two photoresist residue removal structures 20 are set to this
In light blockage coating mechanism 10.
The light blockage coating mechanism 10 includes photoresist memory 11 and is set on 11 lower end surface of photoresist memory
Coating assembly 12, which is in triangular prism shape, and a first side wall face 121 of the coating assembly and the photoresist store
The bottom wall of device 11 connects, and offers a shaped opening on the bottom wall of the bottom wall of photoresist memory 11, for being flowed out for photoresist, the coating
Component 12 is provided with the coating pan 123 of the middle vertical plane setting along the first side wall face 121, coating pan 123 and this shaped opening
Connection.The length of the coating pan is less than the length of the coating assembly and is equal to the length of strip outlet.
The coating pan 123 extends at the incline opposite with 121 face of the first side wall from the first side wall face 121, and
The incline is run through, the length of the coating pan 123 is less than the length of the coating assembly 12；The groove width of the coating pan 123 can root
It is set according to demand.Photoresist memory 11 is in substantially case shape, photoresist is stored with, in some embodiments, in order to keep light
The mobility of resistance, is inside additionally provided with heating device, prevents photoresist cooling solidification.Two of the coating assembly 10 are mutually inclined connection
Second side wall surface 122 on be respectively arranged with sliding groove 1221, the sliding groove 1221 along the coating assembly 10 length direction
Extend.
Two photoresist residue removal structures 20 are respectively arranged on two second side wall surfaces 122 and can be along the cunnings
Dynamic slot 123 slides.Each photoresist residue removal structure includes sliding block 21, wiping board 22, tuyere 23 and spray nozzle 24, the sliding block
21 are slidably disposed in the sliding groove 1221, are provided with motor-driven mechanism in the sliding block 21 to drive the sliding block 21
It is slided automatically along the sliding groove 1221, which is set on the sliding block 21 and its medial surface and second side wall surface 122
Part fitting, the wiping board 22 and tuyere are respectively arranged on the sliding block and are located at the wiping board two sides.Tuyere 23 and external wind
Machine connection dissolves residual so that for air-drying, which provides device with external cleaning solution and be connected to provide cleaning solution
Photoresist.
Cleaning fluid tank 30 is connected to by drain pipe with the spray nozzle 24, which is connected by air-exhausting duct and the tuyere 23
It is logical.
In some embodiments, it is additionally provided with flow control valve on the drain pipe, to control the flow of cleaning solution, multiple
Different flows is respectively adopted in cleaning to be cleaned.
Referring to figure 2., in light blockage coating equipment of the present invention, the width of the wiping board 22 is the second sidewall
The half of the width in face 122.Wiping board 22 can be slidingly arranged at the sliding block 21 along the width direction of second side wall surface 122
On, and it is provided with retaining mechanism 221 on the wiping board 22, so that the wiping board 22 is fixed with respect to the sliding block 21 when locking, when unlock,
The wiping board 22 can be slided with respect to the sliding block 21.
For example, sliding block 21 offers sliding slot 211 along the width direction of second side wall surface 122, the retaining mechanism 221
It can be adjusting nut, adjusting nut is installed on the wiping board 22 and its end is located in the sliding slot, when unlock, the adjusting nut
End be located at the bottom preset distance in the sliding slot and apart from the sliding slot 211, should when locking so that the wiping board 22 is slidably
The end of adjusting nut and the bottom wall of the sliding slot push against.
In further embodiments, the width of the wiping board 22 is equal to the width of second side wall surface, the wiping board 22 it is opposite with
The sliding block is fixed.
In some embodiments, the one side setting elasticity layer with the second sidewall face contact of wiping board 22.
In some embodiments, offered on second side wall surface it is multiple along width direction extend for guiding cleaning solution
Diversion trench, and the gap of multiple diversion trench is equal.
In some embodiments, light blockage coating equipment further includes control chip and battery component, the control chip and
Battery component is all set in the sliding block 21, controls chip and battery component is connect with the motor-driven mechanism respectively,
It is respectively used to control the motor-driven mechanism of the sliding block and power to the motor-driven mechanism.
When work, after the completion of light blockage coating, the control chip 50 is by control motor-driven mechanism 70 so that the control
It makes the sliding block 21 to slidably reciprocate along the sliding groove, and the solenoid valve 60 for controlling the cleaning fluid tank 30 is opened, thus by should
Spray nozzle 24 discharges cleaning solution, is sprayed on second side wall surface by spray nozzle 24 and is dissolved to photoresist residual, then passed through
Moving back and forth for the sliding block 21 allows the wiping board 22 to wipe dissolved photoresist residual, and this opens air-heater after being erased
40 carry out it is air-dried.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation
What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example
Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the invention.In this specification
In, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (5)
1. a kind of light blockage coating equipment, which is characterized in that including light blockage coating mechanism, two photoresist residue removal structures, cleaning
Flow container and air-heater；
The light blockage coating mechanism includes photoresist memory and the coating assembly that is set on photoresist memory lower end surface,
The coating assembly is in prism-shaped, and a first side wall face of the coating assembly is connect with the bottom wall of the photoresist memory, the light
Hinder memory bottom wall on offer strip outlet, the coating assembly be provided with along the first side wall face middle vertical plane setting
With the coating pan of the strip outlet, which extends to the side opposite with the first side wall face from the first side wall face
At rib, and the incline is run through, the length of the coating pan is less than the length of the coating assembly and is equal to the length of strip outlet；
Two of the light blockage coating mechanism ontology are mutually inclined on second side wall surface of connection and are respectively arranged with sliding groove, the sliding
Slot extends along the length direction of the coating assembly；
Two photoresist residue removal structures are respectively arranged on two second side wall surfaces and can slide along the sliding groove；
The photoresist residue removal structure includes sliding block, wiping board, tuyere and spray nozzle, and the sliding block is slidably disposed in the cunning
In dynamic slot, motor-driven mechanism is provided in the sliding block to drive the sliding block to slide automatically along the sliding groove, which sets
It is placed on the sliding block and its medial surface is bonded with the part of second side wall surface, the wiping board and tuyere are respectively arranged at the sliding block
Above and it is located at the wiping board two sides；
The cleaning fluid tank is connected to by drain pipe with the spray nozzle, which is connected to by air-exhausting duct with the tuyere；
It is provided with heating film on the inner sidewall of the coating pan, to prevent photoresist from condensing in coating pan；
Further include that control chip and battery component, the control chip and battery component are all set in the sliding block, controls
Chip and battery component are connect with the motor-driven mechanism respectively, and the control chip after the completion of coating for controlling the electricity
Machine driving mechanism drives the sliding block mobile；
It is connected between the sliding block and the sliding groove by roller-coaster, which connect with the motor-driven mechanism, which drives
Motivation structure is for driving the idler wheel to rotate and then driving the sliding block mobile.
2. light blockage coating equipment according to claim 1, which is characterized in that the wiping board can be along second side wall surface
Width direction be slidingly arranged on the sliding block, and retaining mechanism is provided on the wiping board, so that the wiping board is opposite when locking
The sliding block is fixed, and when unlock, which can slide with respect to the sliding block.
3. light blockage coating equipment according to claim 2, which is characterized in that the wiping board connects with second side wall surface
Elasticity layer is arranged in the one side of touching.
4. light blockage coating equipment according to claim 1, which is characterized in that the width of the wiping board is the second sidewall
Face it is of same size.
5. light blockage coating equipment according to claim 3, which is characterized in that offered on the side multiple along width
The diversion trench for being used to guide cleaning solution that direction extends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810825008.XA CN108873609A (en) | 2018-07-25 | 2018-07-25 | Light blockage coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810825008.XA CN108873609A (en) | 2018-07-25 | 2018-07-25 | Light blockage coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108873609A true CN108873609A (en) | 2018-11-23 |
Family
ID=64305263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810825008.XA Pending CN108873609A (en) | 2018-07-25 | 2018-07-25 | Light blockage coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108873609A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108957957A (en) * | 2018-08-04 | 2018-12-07 | 伍先春 | Light blockage coating device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101279315A (en) * | 2007-04-06 | 2008-10-08 | 中外炉工业株式会社 | Intermittent coating method and apparatus |
| CN102161028A (en) * | 2010-02-17 | 2011-08-24 | 东京毅力科创株式会社 | Cleaning device and coating device for slit nozzle |
| CN102527578A (en) * | 2012-01-11 | 2012-07-04 | 深圳市信宇人科技有限公司 | Novel slit type spray head and spray coating machine head |
-
2018
- 2018-07-25 CN CN201810825008.XA patent/CN108873609A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101279315A (en) * | 2007-04-06 | 2008-10-08 | 中外炉工业株式会社 | Intermittent coating method and apparatus |
| CN102161028A (en) * | 2010-02-17 | 2011-08-24 | 东京毅力科创株式会社 | Cleaning device and coating device for slit nozzle |
| CN102527578A (en) * | 2012-01-11 | 2012-07-04 | 深圳市信宇人科技有限公司 | Novel slit type spray head and spray coating machine head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108957957A (en) * | 2018-08-04 | 2018-12-07 | 伍先春 | Light blockage coating device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20181123 |