CN108871633B - Signal conditioning circuit of pressure sensor - Google Patents
Signal conditioning circuit of pressure sensor Download PDFInfo
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- CN108871633B CN108871633B CN201710324073.XA CN201710324073A CN108871633B CN 108871633 B CN108871633 B CN 108871633B CN 201710324073 A CN201710324073 A CN 201710324073A CN 108871633 B CN108871633 B CN 108871633B
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- operational amplifier
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/025—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning with temperature compensating means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/02—Modifications of amplifiers to raise the efficiency, e.g. gliding Class A stages, use of an auxiliary oscillation
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/45—Differential amplifiers
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/68—Combinations of amplifiers, e.g. multi-channel amplifiers for stereophonics
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a signal conditioning circuit of a pressure sensor. The signal conditioning circuit of the pressure sensor comprises a pressure sensor core body (1), a first operational amplifier (2) and a second operational amplifier (3) which are connected in series, wherein a positive differential signal output end of the pressure sensor core body (1) is connected to a non-inverting input end of the first operational amplifier (2), a negative differential signal output end of the pressure sensor core body (1) is connected to a non-inverting input end of the second operational amplifier (3), an inverting input end of the first operational amplifier (2) is connected to a feedback end of the second operational amplifier (3), and an output end of the first operational amplifier (2) is a signal output end. According to the signal conditioning circuit of the pressure sensor, the problems of high cost, accuracy drift and high output ripple and noise caused by signal conditioning of a pressure signal through a digital ASIC in the prior art are solved.
Description
Technical Field
The invention relates to the field of pressure detection, in particular to a signal conditioning circuit of a pressure sensor.
Background
The pressure sensor needs to convert a pressure signal into an electric signal which is easy to transmit and process in the acquisition process, and a small signal output by the pressure sensor usually needs to be subjected to signal conditioning through a subsequent circuit, so that a pressure detection electric signal meeting the requirement can be obtained. The signal conditioning comprises the technologies of temperature error compensation, offset compensation, signal amplification, translation and the like. For example, most of the sensitive elements of the sensor are made of metal or semiconductor materials, the characteristics of the sensitive elements have a close relationship with the ambient temperature, the bridge resistance temperature drift coefficient of a general Micro-Electro-Mechanical System (MEMS) sensor is about 0.34%/degree centigrade, and in practical application, because the temperature change of the working environment of the pressure sensor is large, an error is brought to a measurement result, and temperature error compensation needs to be added to the pressure sensor.
In the prior art, as shown in fig. 1, an output signal of a sensor is transmitted to a Programmable amplifier (PGA) module of an ASIC chip for signal translation and pre-amplification, then transmitted to an ADC module through a Multiplexer (MUX) together with a temperature detection signal, the ADC module converts the Analog signal into a Digital quantity, a calibration processing module (CMC) reads a compensation parameter of an EEPROM (Electrically Erasable Programmable Read-Only Memory, EEPROM) and performs temperature error compensation and offset compensation and normalization on the signal through a Specific algorithm, and finally converted into an Analog voltage signal through a Digital-to-Analog Converter (DAC) and a Buffer amplifier (Buffer amplifier), BAMP) outputs a pressure sensing electrical signal. However, this approach requires the use of a dedicated pressure sensor ASIC chip, which adds significant cost to the process and is also subject to the supply cycle time of the chip manufacturer. Secondly, the ADC and DAC are used in the chip, and each conversion (ADC or DAC) loses precision, resulting in final output deviation. In addition, the final output voltage signal is obtained through the DAC of the ASIC, which increases output ripple and noise, and an additional filter circuit is required for a low ripple product.
Disclosure of Invention
The invention aims to provide a signal conditioning circuit of a pressure sensor, which aims to solve the problems of high cost, accuracy drift and higher output ripple and noise caused by signal conditioning of a digital ASIC in the prior art.
In order to solve the above technical problem, according to an aspect of the present invention, a signal conditioning circuit for a pressure sensor is provided, which includes a pressure sensor core and a first operational amplifier and a second operational amplifier connected in series, a positive differential signal output terminal of the pressure sensor core is connected to a non-inverting input terminal of the first operational amplifier, a negative differential signal output terminal of the pressure sensor core is connected to a non-inverting input terminal of the second operational amplifier, an inverting input terminal of the first operational amplifier is connected to a feedback terminal of the second operational amplifier, and an output terminal of the first operational amplifier is a signal output terminal.
The signal conditioning circuit of the pressure sensor directly amplifies and outputs the differential signal output by the pressure sensor through the operational amplifier, and secondary conversion of digital-to-analog is not performed in the middle, so that precision loss caused by conversion between digital-to-analog can be avoided, and the precision of signal output is improved. Meanwhile, because the differential signal information is not subjected to analog-to-digital or digital-to-analog conversion, the output ripple and noise generated in the digital-to-analog conversion process can be reduced, the signal accuracy is improved, and the output interference is reduced.
Drawings
FIG. 1 schematically illustrates a schematic block diagram of a signal conditioning circuit of a prior art pressure sensor;
FIG. 2 schematically illustrates a schematic block diagram of a signal conditioning circuit of a pressure sensor in accordance with an embodiment of the present invention;
fig. 3 schematically shows a circuit diagram of a signal conditioning circuit of a pressure sensor of an embodiment of the invention.
Reference numbers in the figures: 1. a pressure sensor core; 2. a first operational amplifier; 3. a second operational amplifier; 4. a first slide rheostat; 5. a first temperature compensation resistor; 6. a coupling resistor; 7. a first feedback circuit; 8. a second temperature compensation resistor; 9. a second feedback circuit; 10. a second slide rheostat; 11. a first feedback resistor; 12. a third feedback circuit; 13. a second feedback resistor.
Detailed Description
The following detailed description of embodiments of the invention, but the invention can be practiced in many different ways, as defined and covered by the claims.
Referring to fig. 1 to fig. 3, according to an embodiment of the present invention, a signal conditioning circuit of a pressure sensor includes a pressure sensor core 1 and a first operational amplifier 2 and a second operational amplifier 3 connected in series, a positive differential signal output terminal b of the pressure sensor core 1 is connected to a non-inverting input terminal of the first operational amplifier 2, a negative differential signal output terminal a of the pressure sensor core 1 is connected to a non-inverting input terminal of the second operational amplifier 3, an inverting input terminal of the first operational amplifier 2 is connected to a feedback terminal of the second operational amplifier 3, and an output terminal of the first operational amplifier 2 is a signal output terminal.
The signal conditioning circuit directly amplifies and outputs the differential signal output by the pressure sensor through the operational amplifier, and secondary conversion of digital-to-analog is not performed in the middle, so that precision loss caused by conversion between digital-to-analog can be avoided, and the precision of signal output is improved. Meanwhile, because the differential signal information is not subjected to analog-to-digital or digital-to-analog conversion, the output ripple and noise in the digital-to-analog conversion process can be reduced, the signal accuracy is improved, and the output interference is reduced.
Preferably, the inverting input terminal of the second operational amplifier 3 is further connected with a first sliding varistor 4 for performing zero output adjustment and a first temperature compensation resistor 5 for performing temperature offset compensation. One end of the first sliding rheostat 4 is connected with a power supply, zero output offset can be compensated, accuracy of output voltage of signals is guaranteed, one end of the first temperature compensation resistor 5 is grounded, temperature coefficient zero offset in output of the sensor can be compensated, accordingly, output bias voltage under the condition of zero voltage is changed under the condition of temperature change, and zero voltage offset of the sensor under different temperatures is compensated.
Preferably, the inverting input terminal of the second operational amplifier 3 is further connected with a first sliding rheostat 4 for zero output adjustment and a first temperature compensation resistor 5 for temperature offset compensation, and the first sliding rheostat 4 and the first temperature compensation resistor 5 are arranged in series. The first slide rheostat 4 and the first temperature compensation resistor 5 are arranged in the circuit at the same time, zero output offset of output voltage and zero offset of temperature coefficient can be compensated at the same time, and accuracy of the output voltage is improved.
The inverting input end of the second operational amplifier 3 is further connected with a coupling resistor 6, and the first slide rheostat 4 and the first temperature compensation resistor 5 are connected in parallel and then connected in series with the coupling resistor 6. The coupling resistor 6 can eliminate the influence of the compensation circuit including the first sliding resistor 4 and the first temperature compensation resistor 5 on the negative output terminal of the differential signal of the sensor, and directly superimpose the bias voltage of the compensation circuit on the final output signal, i.e., Vout1 (output voltage of the first operational amplifier) — amplification factor (positive output of the differential signal-negative output of the differential signal) + compensation voltage.
Preferably, a first feedback circuit 7 is connected between the output end and the inverting input end of the first operational amplifier 2, and a second temperature compensation resistor 8 for compensating for temperature coefficient sensitivity is connected in series to the first feedback circuit 7. The second temperature compensation resistor 8 can compensate for the temperature coefficient sensitivity in the sensor output, thereby ensuring the temperature sensitivity of the sensor at different temperatures.
Preferably, a second feedback circuit 9 is arranged between the output end and the inverting input end of the second operational amplifier 3, a second sliding rheostat 10 for full-scale sensitivity adjustment is arranged on the second feedback circuit 9, and the inverting input end of the first operational amplifier 2 is connected between the second sliding rheostat 10 and the output end of the second operational amplifier 3. The second sliding rheostat 10 can compensate the full-scale voltage sensitivity of the sensor, so that the accuracy of the output voltage of the sensor product can be effectively guaranteed when the core body of the sensor outputs full voltage.
Preferably, the second feedback circuit 9 is further provided with a first feedback resistor 11, the first feedback resistor 11 is arranged between the second sliding rheostat 10 and the output end of the second operational amplifier 3, and the inverting input end of the first operational amplifier 2 is connected between the second sliding rheostat 10 and the first feedback resistor 11. The first feedback resistor 11 can perform a signal amplification function, so that the accuracy of the voltage regulation of the sensor can be improved.
Preferably, a third feedback circuit 12 is further disposed between the output terminal and the inverting input terminal of the second operational amplifier 3, and a second feedback resistor 13 connected in parallel with the second sliding resistor 10 is disposed on the third feedback circuit 12. The second feedback resistor 13 can also perform a signal amplification function, so that the accuracy of the voltage regulation of the sensor can be further improved. The first feedback resistor 11 and the second feedback resistor 13 need to select resistors with the same type, and due to the introduction of the second operational amplifier 3, the output voltage of the second operational amplifier 3 is added to the final output voltage, and this voltage is an uncontrollable voltage, that is, Vout1 is the amplification factor (positive output of the differential signal-negative output of the differential signal) + compensation voltage + amplification factor K (amplification factor) Vout2 (output voltage of the second operational amplifier 3), and the introduction of the first feedback resistor 11 and the second feedback resistor 13 can erase this part of the voltage (amplification factor K × Vout2), thereby improving the accuracy and adjustability of the output voltage.
The scheme realizes the translation and amplification of signals through an operational amplifier and a feedback resistor; compensating zero output offset through the first sliding rheostat 4, and compensating full-scale sensitivity through the second sliding rheostat 10; the first temperature compensation resistor 5 is used for compensating zero offset of the temperature coefficient in the output of the sensor, and the second temperature compensation resistor 8 is used for compensating the sensitivity of the temperature coefficient in the output of the sensor. The first slide rheostat 4 and the first temperature compensation resistor 5 form a resistor offset network, the resistance value of the first slide rheostat 4 is adjusted under zero-voltage normal temperature (25 ℃), the offset voltage is superposed on the output voltage through the coupling resistor 6, the final output voltage is 0.5V, and the resistance value of the second slide rheostat 10 is adjusted under full-voltage normal temperature, so that the final output voltage is 4.5V. When the temperature changes, the resistance value of the first temperature compensation resistor 5 also changes, so that the output bias voltage under the condition of zero voltage is changed, and zero voltage offset of the sensor at different temperatures is compensated; the resistance value of the second temperature compensation resistor 8 changes along with the change of the temperature, and the change of the resistance can influence the amplification factor of the operational amplifier, so that the sensitivity of the sensor at different temperatures can be compensated.
In the above embodiments of the present invention, the whole circuit adopts analog circuit components, there is no digital noise interference inside, and for the operational amplifier, a characteristic Power Supply Rejection Ratio (PSRR) parameter is used, and ideally, 90dB attenuation is performed on power supply ripple and noise, so that output ripple and noise can be further reduced.
Under the condition of adopting 5V power supply, the consumption current of the digital ASIC chip in the prior art is about 5-6 mA (for example, the maximum consumption current of ZSC31150 is 5.5mA), and the total consumption current of the product is about 7-8 mA; compared with the digital ASIC solution, the operational amplifier in the embodiment of the invention generally consumes less than 1mA (e.g., MAX4246 maximum current consumption is 0.7mA (single operational amplifier)), the total current consumption of the product is about 3 to 4mA, and the power consumption can be reduced by one time.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. A signal conditioning circuit of a pressure sensor is characterized by comprising a pressure sensor core body (1) and a first operational amplifier (2) and a second operational amplifier (3) which are connected in series, wherein a positive differential signal output end of the pressure sensor core body (1) is connected to a non-inverting input end of the first operational amplifier (2), a negative differential signal output end of the pressure sensor core body (1) is connected to a non-inverting input end of the second operational amplifier (3), an inverting input end of the first operational amplifier (2) is connected to a feedback end of the second operational amplifier (3), an output end of the first operational amplifier (2) is a signal output end, wherein the inverting input end of the second operational amplifier (3) is further connected with a first slide rheostat (4) for zero output adjustment and a first temperature compensation resistor (5) for temperature offset compensation, the first slide rheostat (4) and the first temperature compensation resistor (5) are arranged in series; the reverse input end of the second operational amplifier (3) is also connected with a coupling resistor (6), and the coupling resistor (6) is connected between the reverse input end of the second operational amplifier (3) and a series node of a series circuit of the first slide rheostat (4) and the first temperature compensation resistor (5); a first feedback circuit (7) is connected between the output end and the inverting input end of the first operational amplifier (2), and a second temperature compensation resistor (8) for compensating the temperature coefficient sensitivity is connected in series on the first feedback circuit (7); a second feedback circuit (9) is arranged between the output end and the reverse input end of the second operational amplifier (3), a second sliding rheostat (10) used for adjusting the full-scale sensitivity is arranged on the second feedback circuit (9), the reverse input end of the first operational amplifier (2) is connected between the second sliding rheostat and the output end of the second operational amplifier (3), and the second sliding rheostat (10) compensates the full-scale voltage sensitivity of the pressure sensor.
2. The signal conditioning circuit according to claim 1, wherein a first feedback resistor (11) is further arranged on the second feedback circuit (9), the first feedback resistor (11) is arranged between the second sliding rheostat (10) and the output terminal of the second operational amplifier (3), and the inverting input terminal of the first operational amplifier (2) is connected between the second sliding rheostat (10) and the first feedback resistor (11).
3. The signal conditioning circuit according to claim 1, wherein a third feedback circuit (12) is further disposed between the output terminal and the inverting input terminal of the second operational amplifier (3), and a second feedback resistor (13) is disposed on the third feedback circuit (12) and connected in parallel with the second sliding rheostat (10).
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| CN201710324073.XA CN108871633B (en) | 2017-05-10 | 2017-05-10 | Signal conditioning circuit of pressure sensor |
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| CN201710324073.XA CN108871633B (en) | 2017-05-10 | 2017-05-10 | Signal conditioning circuit of pressure sensor |
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| CN108871633A CN108871633A (en) | 2018-11-23 |
| CN108871633B true CN108871633B (en) | 2021-11-30 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7297479B2 (en) * | 2019-03-15 | 2023-06-26 | エイブリック株式会社 | semiconductor equipment |
| CN110567616A (en) * | 2019-08-29 | 2019-12-13 | 北京自动化控制设备研究所 | Signal acquisition circuit for silicon piezoresistive pressure sensor unit |
| CN110954146B (en) * | 2019-12-18 | 2021-12-07 | 哈尔滨吉赫科技有限责任公司 | Method for improving sensitivity of sensor |
| CN112945459B (en) * | 2021-02-25 | 2023-04-14 | 中航电测仪器股份有限公司 | Zero-offset temperature compensation method of force signal conditioner |
| CN113203520B (en) * | 2021-05-27 | 2023-12-22 | 北京京城清达电子设备有限公司 | Pressure sensor debugging system and method |
| CN113904684B (en) * | 2021-12-08 | 2022-03-01 | 上海泰矽微电子有限公司 | Resistance network circuit for measuring ADC (analog to digital converter) |
| CN115628843B (en) * | 2022-11-10 | 2024-05-14 | 直川科技(上海)有限公司 | Pressure transmitter |
| CN115580248B (en) * | 2022-11-10 | 2023-11-28 | 江苏谷泰微电子有限公司 | Precise differential amplifier with adjustable output common mode |
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| CN102901549A (en) * | 2012-09-18 | 2013-01-30 | 北京航空航天大学 | Driving, signal conditioning and acquisition device for strain resistance type pressure sensor |
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| CN105973509A (en) * | 2016-05-06 | 2016-09-28 | 武汉航空仪表有限责任公司 | Pressure transducer circuit and commissioning method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI577978B (en) * | 2015-07-22 | 2017-04-11 | 旺玖科技股份有限公司 | Impedance sensor and electronic apparatus using the same |
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| EP1319935A3 (en) * | 2001-12-11 | 2005-08-03 | Parker Hannifin GmbH | Signal processing arrangement for a pressure switch or the like |
| CN102901549A (en) * | 2012-09-18 | 2013-01-30 | 北京航空航天大学 | Driving, signal conditioning and acquisition device for strain resistance type pressure sensor |
| CN104568242A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale resonance cylinder pressure sensor signal conditioning circuit excitated by piezoelectricity |
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Effective date of registration: 20220208 Address after: 311800 Diankou Industrial Zone, Zhuji City, Shaoxing City, Zhejiang Province Patentee after: ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT Co.,Ltd. Address before: 310053 Dian Kou Zhen DUN'AN Road, Zhuji City, Shaoxing City, Zhejiang Province Patentee before: DUNAN SENSING TECHNOLOGY Co.,Ltd. |
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