CN108871198B - Digital coaxial micro-holographic device and calibration method for recording distance and reproducing distance - Google Patents

Digital coaxial micro-holographic device and calibration method for recording distance and reproducing distance Download PDF

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CN108871198B
CN108871198B CN201810507400.XA CN201810507400A CN108871198B CN 108871198 B CN108871198 B CN 108871198B CN 201810507400 A CN201810507400 A CN 201810507400A CN 108871198 B CN108871198 B CN 108871198B
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CN108871198A (en
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李保生
余浩楠
陈林林
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Hefei University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils

Abstract

The invention belongs to the field of optical imaging, and particularly relates to a digital coaxial micro-holographic device, which comprises a laser light source, a collimating lens, a beam expanding lens, a resolution plate, a microobjective and a CCD camera which are sequentially arranged along the illumination direction; the CCD camera is connected with a computer; the collimating lens, the beam expanding lens, the resolution plate, the microscope objective and the CCD camera are all arranged on the translation table, and the central points of the collimating lens, the beam expanding lens, the resolution plate, the microscope objective and the CCD camera are all located on the same straight line. Correspondingly, the invention also provides a method for calibrating the recording distance and the reproduction distance by adopting the digital coaxial micro-holographic device. The device has the advantages of simple structure, good imaging effect and high control precision.

Description

Digital coaxial micro-holographic device and calibration method for recording distance and reproducing distance
Technical Field
The invention belongs to the field of optical distance calibration, and particularly relates to a digital coaxial micro-holographic device and a recording distance and reproduction distance calibration method.
Background
The digital coaxial micro-holographic device is a device formed by combining a holographic technology and an optical microscopic technology, the recording and reproducing processes and principles of the micro-holographic device and the traditional digital holographic device are approximately the same, and the key point is that a micro objective is added into a holographic light path, so that the resolution of the device is improved according to the magnification of the objective, and the holographic reproduction of a tiny object exceeding the maximum resolution of a CCD can be realized. However, the introduction of the microscope objective lens causes the CCD to actually receive diffraction information of the real image of the particle after the particle is enlarged through a certain distance, which causes the difference between the calculation of the reproduction distance and the calculation without the microscope objective lens, so that it is necessary to provide a calibration method for the recording distance and the reproduction distance to determine the mathematical relationship between the recording distance and the reproduction distance under the digital coaxial microscope apparatus.
Disclosure of Invention
According to the problems in the prior art, one of the purposes of the invention is to provide a digital coaxial micro-holographic device which has the advantages of simple structure, good imaging effect and high control precision.
The invention adopts the following technical scheme:
the digital coaxial micro-holographic device comprises a laser light source, a collimating lens, a beam expanding lens, a resolution plate, a micro objective lens and a CCD camera which are sequentially arranged along the illumination direction; the CCD camera is connected with a computer.
Preferably, the collimating lens, the beam expander, the resolution plate, the microscope objective and the CCD camera are all arranged on the translation stage, and the central points of the collimating lens, the beam expander, the resolution plate, the microscope objective and the CCD camera are all located on the same straight line.
Preferably, the laser source is a 445nm multimode fiber coupled laser of the electro-optical technology ltd, the collimating lens is a fiber collimating lens of the electro-optical technology ltd, the microscope objective is a fixed-power object space telecentric magnifying lens of the MORITEX company, the CCD camera is a large-target-surface industrial black-and-white camera of the FILR company, and the translation stage is a GCM-127 precision translation stage of the great-constant new era technology ltd.
Correspondingly, the invention also provides a method for calibrating the recording distance and the reproduction distance by adopting the digital coaxial micro-holographic device, which comprises the following steps:
s1, moving the resolution plate from the position close to the microscope objective to the position far away from the microscope objective along the illumination direction, wherein the holographic image recorded by the CCD camera and the displayed image on the computer have a process from gradually focusing to gradually defocusing, and calculating the average gradient of the displayed image
Figure BDA0001671872740000021
In which the mean gradient is the maximum value grad1maxThe scale H of the corresponding resolution board on the translation table is the zero point of the reproduction distance, and the display image of the resolution board on the computer is the clearest at the moment;
s2, moving the resolution plate to the position of the scale H of the translation stage, moving the resolution plate along the illumination direction by a set distance D from the direction far away from the microscope objective or the direction close to the microscope objective, wherein D is a recording distance, and recording the holographic image P by a CCD camera;
s3, setting a reproduction distance range (D-a, D + b) at the computer end, wherein a>0，b>0, calculating the average gradient of the reproduced image of the holographic image P at different reproduction distances by the step length a + b/N1
Figure BDA0001671872740000022
N1 is an integer of not less than 2, and there are N1 reproduced images in total in the reproduction distance range, wherein the average gradient of the reproduced images is a maximum value grad2maxThe corresponding reproduction distance is D1;
s4, resetting the reproduction distance range (D1-c, D1+ D) at the computer end according to the reproduction distance D1 in the step S3, wherein c>0，d>0, and c<a，d<b, calculating the average gradient of the reproduced image of the holographic image P at different reproduction distances by a step length c + d/N2
Figure BDA0001671872740000023
N2 is an integer of not less than 2, and there are N2 reproduced images in total in the reproduction distance range, wherein the average gradient of the reproduced images is a maximum value grad3maxThe corresponding reproduction distance is D2; repeating the above steps n times to obtain a reproduction distance Dn, and recording the data (D, Dn);
s5, repeating the steps S2-S4 to obtain the reproduction distance under different recording distances, namely obtaining N groups of data (D, Dn);
s6, linear fitting is performed on the N sets of data (D, Dn), that is, an equation of a line on which the N sets of recorded data (D, Dn) are located is obtained with the recording distance D as an abscissa and the reproducing distance Dn as an ordinate, and further, a relationship between the recording distance and the reproducing distance is obtained.
Preferably, in step S1, the scale L of the resolution plate on the translation stage when the display image is most clear by visual observation is recorded first, and the average gradient of the display image in the scale range (L-L1, L + L2) is calculated
Figure BDA0001671872740000024
L1>0，L2>0, where the average gradient is the maximum value grad1maxAnd the scale H of the corresponding resolution ratio plate on the translation table is the reproduction distance zero point.
The invention has the advantages and beneficial effects that:
1) the micro-holographic measuring device comprises a laser light source, a collimating lens, a beam expanding lens, a resolution plate, a micro objective and a CCD camera which are sequentially arranged along the illumination direction; the CCD camera is connected with a computer. The device has the advantages of simple structure, good imaging effect and high control precision.
2) According to the method for calibrating the recording distance and the reproducing distance, the corresponding reproducing distances when the recording distances are different are obtained, a plurality of groups of recording data of the recording distances and the reproducing distances are recorded, and the mathematical relation between the recording distances and the reproducing distances is obtained through linear fitting, so that the relation characteristic between the recording distances and the reproducing distances of the corresponding devices is obtained.
3) In the method for calibrating the recording distance and the reproducing distance, the calibration precision of the reproducing distance is improved by continuously reducing the set range of the reproducing distance.
Drawings
FIG. 1 is a schematic representation of a digital in-line micro-holographic device of the present invention.
FIG. 2 is a computer display image of a resolution board according to an embodiment of the present invention when reproducing a distance zero point.
Fig. 3 is a display image of the resolution board on the computer after the resolution board moves for the first time by the set distance according to the embodiment of the present invention.
FIG. 4 is a diagram of a linear fit of 20 sets of data according to an embodiment of the present invention.
Reference numerals:
10-a laser light source, 20-a collimating lens, 30-a beam expanding lens, 40-a resolution plate, 50-a microscope objective, 60-a CCD camera, 70-a computer and 80-a translation stage.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the digital coaxial micro-holographic device includes a laser light source 10, a collimating mirror 20, a beam expanding mirror 30, a resolution plate 40, a micro-objective 50 and a CCD camera 60, which are sequentially arranged along an illumination direction; the CCD camera 60 is connected to a computer 70.
The collimator lens 20, the beam expander lens 30, the resolution plate 40, the microscope objective lens 50 and the CCD camera 60 are all arranged on the translation stage 80, and the central points of the collimator lens 20, the beam expander lens 30, the resolution plate 40, the microscope objective lens 50 and the CCD camera 60 are all located on the same straight line.
The following describes in detail the method for calibrating the recording distance and the reproduction distance based on the digital coaxial micro-holographic device according to the present invention with reference to the specific working process and the accompanying drawings:
s1, moving the resolution plate 40 from the position close to the microscope objective 50 to the position far away from the microscope objective 50 along the illumination direction, wherein the holographic image recorded by the CCD camera 60 and the display image on the computer 70 have a process from gradually focusing to gradually defocusing, and calculating the average gradient of the display image
Figure BDA0001671872740000041
In which the mean gradient is the maximum value grad1maxThe scale H of the corresponding resolution board 40 on the translation stage 80 is the zero point of the reproduction distance, and the display image of the resolution board 40 on the computer 70 is the clearest at this time;
specifically, the scale L of the resolution board 40 on the translation stage 80 at which the display image is most clearly observed is recorded first, and the average gradient of the display image in the scale range (L-L1, L + L2) is calculated
Figure BDA0001671872740000042
L1>0，L2>0, average ladder thereinDegree is maximum grad1maxThe scale H of the corresponding resolution board 40 on the translation stage 80 is the reproduction distance zero point.
S2, moving the resolution plate 40 to the position of the scale H of the translation stage 80, moving the resolution plate 40 along the illumination direction by a set distance D from the direction far away from the microscope objective lens 50 or the direction close to the microscope objective lens 50, wherein D is a recording distance, and recording the holographic image P by the CCD;
s3, setting the reproduction distance range (D-a, D + b) at the computer 70 side, wherein a>0，b>0, calculating the average gradient of the reproduced image of the holographic image P at different reproduction distances by the step length a + b/N1
Figure BDA0001671872740000043
N1 is an integer of not less than 2, and there are N1 reproduced images in total in the reproduction distance range, wherein the average gradient of the reproduced images is a maximum value grad2maxThe corresponding reproduction distance is D1;
s4, the reproduction distance range (D1-c, D1+ D) is reset at the computer 70 side according to the reproduction distance D1 in the step S3, wherein c>0，d>0, and c<a，d<b, calculating the average gradient of the reproduced image of the holographic image P at different reproduction distances by a step length c + d/N2
Figure BDA0001671872740000044
N2 is an integer of not less than 2, and there are N2 reproduced images in total in the reproduction distance range, wherein the average gradient of the reproduced images is a maximum value grad3maxThe corresponding reproduction distance is D2; repeating the above steps n times to obtain a reproduction distance Dn, and recording the data (D, Dn);
s5, repeating the steps S2-S4 to obtain the reproduction distance under different recording distances, namely obtaining N groups of data (D, Dn);
s6, linear fitting is performed on the N sets of data (D, Dn), that is, an equation of a line on which the N sets of recorded data (D, Dn) are located is obtained with the recording distance D as an abscissa and the reproducing distance Dn as an ordinate, and further, a relationship between the recording distance and the reproducing distance is obtained.
The following describes the calibration method of recording distance and reproducing distance according to the present invention in detail with reference to the following embodiments and the accompanying drawings.
The laser source 10 of this embodiment adopts 445nm multimode fiber coupled laser of the Changchun radium electro-optical technology company, the collimating lens 20 adopts the fiber collimating lens of the electro-optical technology company, Shanghai Shang chess, the microscope objective lens 50 adopts the fixed-power object space telecentric magnifying lens of the MORIITEX company, the CCD camera 60 adopts the large-target-surface industrial black-and-white camera of the FILR company, and the translation stage 80 adopts the GCM-127 precision translation stage of the great-constant new era science and technology company.
In the embodiment of the present invention, except for the specific description of the model and the style of each device, the model and the style of other devices are not limited, as long as the device can perform the above functions.
1. Moving the resolution plate 40 from a position close to the microscope objective 50 to a position far away from the microscope objective 50 along a straight line along which the illumination direction is located, wherein the display image of the holographic image recorded by the CCD camera 60 on the computer 70 has a process from gradually focusing to gradually defocusing;
first, the scale L of the resolution board 40 on the translation stage 80, at which the display image is most clearly observed by visual observation, is recorded at 6.08cm, and the average gradient of the display image in the scale range (L-1.08, L +0.92) is calculated
Figure BDA0001671872740000051
When the average gradient is 0.048, the scale H of the corresponding resolution board 40 on the translation stage 80 is 6cm, and H is 6cm, which is the zero point of the reproduction distance, as shown in fig. 2;
2. moving the resolution plate 40 to a position 6cm away from the scale of the translation stage 80, moving the resolution plate 40 by a set distance of 0.001m along a straight line where the illumination direction is located in a direction away from the microscope objective 50, wherein 0.001m is a recording distance, and recording a holographic image by using a CCD (charge coupled device), as shown in FIG. 3;
3. setting the reconstruction distance range (0.001-0.0005,0.001+0.0035) at the computer 70 end, calculating the average gradient of the reconstruction image of the holographic image at different reconstruction distances by step size 0.0005+0.0035/20
Figure BDA0001671872740000052
The total number of 20 reproduced images in the reproduction distance range, wherein the reproduction distance corresponding to the average gradient of the reproduced images being 0.044 at the maximum value is 0.003825 m;
4. the reproduction distance range (0.003825-0.000025,0.003825+0.000075) is reset at the computer 70 side according to the reproduction distance 0.003825m in step S3, and the average gradient of the reproduction image of the hologram at different reproduction distances is calculated in steps of 0.000025+0.000075/40
Figure BDA0001671872740000053
40 reproduced images are totally included in the reproduction distance range, wherein the corresponding reproduction distance is 0.0039m when the average gradient of the reproduced images is 0.045 at the maximum value, and the embodiment only adopts a two-stage reproduction mode, so that data (0.001,0.0039) are recorded at the moment;
5. repeating the steps 2-4 to obtain the reproduction distances under different recording distances, namely obtaining 20 groups of data, as shown in table 1;
table 1: 20 sets of data of reproducing distance at different recording distances
Figure BDA0001671872740000061
6. The 20 sets of recorded data in table 1 were subjected to linear fitting, i.e., the recording distance D was used as the abscissa and the reproducing distance Dn was used as the ordinate, to obtain the line on which the 20 sets of recorded data are located, as shown in fig. 4.
As can be seen from fig. 4, the lines on which the 20 sets of recorded data are obtained are approximated to be a straight line, and k is 3.8523, and b is 0.085 according to the equation Dn is kD + b; the final formula Dn is 3.8523D +0.085, and the relationship between the recording distance D and the reproducing distance Dn is obtained.
In conclusion, the invention provides the digital coaxial micro-holographic device, which has the advantages of simple structure, good imaging effect and high control precision; correspondingly, the invention also provides a method for calibrating the recording distance and the reproduction distance by adopting the digital coaxial micro-holographic device.

Claims (2)

1. A recording distance and reproduction distance calibration method of a digital coaxial micro-holographic device is characterized in that the adopted digital coaxial micro-holographic device comprises a laser light source (10), a collimating lens (20), a beam expanding lens (30), a resolution plate (40), a micro-objective lens (50) and a CCD camera (60) which are sequentially arranged along an illumination direction; the CCD camera (60) is connected with a computer (70);
the collimating lens (20), the beam expander (30), the resolution plate (40), the microscope objective (50) and the CCD camera (60) are all arranged on the translation table (80), and the central points of the collimating lens (20), the beam expander (30), the resolution plate (40), the microscope objective (50) and the CCD camera (60) are all located on the same straight line;
the method comprises the following steps:
s1, moving the resolution plate (40) from the position close to the microscope objective (50) to the position far away from the microscope objective (50) along the illumination direction, in the process, the holographic image recorded by the CCD camera (60) and the display image on the computer (70) have a process from gradually focusing to gradually defocusing, and calculating the average gradient of the display image
Figure FDA0002301792370000011
In which the mean gradient is the maximum value grad1maxThe scale H of the corresponding resolution board (40) on the translation table (80) is the zero point of the reproduction distance, and the display image of the resolution board (40) on the computer (70) is the clearest at the moment;
s2, moving the resolution plate (40) to the position of the scale H of the translation stage (80), moving the resolution plate (40) along the illumination direction by a set distance D, wherein D is a recording distance, in the direction away from the microscope objective (50) or in the direction close to the microscope objective (50), and recording the holographic image P by the CCD camera (60);
s3, setting the reproduction distance range (D-a, D + b) at the computer (70), wherein a>0，b>0, calculating the average gradient of the reproduced image of the holographic image P at different reproduction distances by the step length a + b/N1
Figure FDA0002301792370000012
N1 is an integer of not less than 2, and there are N1 reproduced images in total in the reproduction distance range, wherein the average gradient of the reproduced images is a maximum value grad2maxThe corresponding reproduction distance is D1;
s4, resetting the reproduction distance range (D1-c, D1+ D) at the computer (70) side according to the reproduction distance D1 in the step S3, wherein c>0，d>0, and c<a，d<b, calculating the average gradient of the reproduced image of the holographic image P at different reproduction distances by a step length c + d/N2
Figure FDA0002301792370000013
N2 is an integer of not less than 2, and there are N2 reproduced images in total in the reproduction distance range, wherein the average gradient of the reproduced images is a maximum value grad3maxThe corresponding reproduction distance is D2;
s5, repeating the steps S2-S4 to obtain the reproduction distance under different recording distances, namely obtaining N groups of data (D, Dn);
s6, linear fitting is performed on the N sets of data (D, Dn), that is, an equation of a line on which the N sets of recorded data (D, Dn) are located is obtained with the recording distance D as an abscissa and the reproducing distance Dn as an ordinate, and further, a relationship between the recording distance and the reproducing distance is obtained.
2. The recording distance and reproduction distance calibration method according to claim 1, characterized in that: in step S1, the scale L of the resolution plate (40) on the translation stage (80) when the display image is most clear by visual observation is recorded, and the average gradient of the display image in the scale range (L-L1, L + L2) is calculated
Figure FDA0002301792370000021
L1>0，L2>0, where the average gradient is the maximum value grad1maxThe scale H of the corresponding resolution board (40) on the translation stage (80) is the reproduction distance zero point.
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