CN108844561A - Fabry-perot optical fiber bubble cavity sensor and preparation method thereof - Google Patents

Fabry-perot optical fiber bubble cavity sensor and preparation method thereof Download PDF

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Publication number
CN108844561A
CN108844561A CN201811016626.6A CN201811016626A CN108844561A CN 108844561 A CN108844561 A CN 108844561A CN 201811016626 A CN201811016626 A CN 201811016626A CN 108844561 A CN108844561 A CN 108844561A
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China
Prior art keywords
optical fiber
bubble
fabry
face
perot
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周坤
崔金明
黄运锋
李传峰
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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Priority to CN201811016626.6A priority Critical patent/CN108844561A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass

Abstract

The present invention discloses a kind of Fabry-perot optical fiber bubble cavity sensor and preparation method thereof, belongs to fiber optic sensor technology field.Wherein, Fabry-perot optical fiber bubble cavity sensor includes an optical fiber, a bubble is embedded in the inside of the optical fiber, the bubble constitutes Fabry-perot optical fiber air-chamber, wherein, it embeds bladdery fiber segment diameter and is less than the fiber segment diameter for not embedding bubble, the bladdery fiber segment of embedding is removed at least partly side wall.Fibre optical sensor with this design structure greatly improves the strain and stress measurement sensitivity of Fabry-perot optical fiber bubble cavity sensor since air-chamber has the characteristics that minimum cross-sectional area.

Description

Fabry-perot optical fiber bubble cavity sensor and preparation method thereof
Technical field
The invention belongs to technical field of optical fiber sensing, more particularly to a kind of Fabry-perot optical fiber bubble cavity sensor and its production Method.
Background technique
Fibre Optical Sensor has micromation, and electromagnetism interference is corrosion-resistant, can measure the feature more than physical quantity, in engineering technology It widely studies and applies with having in scientific research.Its measurement object has:Displacement, pressure, strain, electric current, voltage, gas, Vibration, acceleration etc..Sensor based on optical fiber is various, there is Fabry glass sieve sensor, Bragg grating sensor, Mach increases Dare interference sensor, and long-period fiber grating sensor etc. wherein has a type optical fiber in Fabry glass sieve sensor Method amber bubble cavity sensor, its feature is that have an air bubble in the covering of optical fiber, at two of the bubble of optical fiber axial direction Side forms a Fa-Po cavity, and such Fabry-perot optical fiber air-chamber is often used in two sensing stress, strain physical quantitys.And other Fibre optical sensor compare, in the sensing of stress and strain, the sensitivity with higher of Fabry-perot optical fiber bubble cavity sensor with And minimum Temperature cross-over sensitivity.
The production of traditional Fabry-perot optical fiber air-chamber mainly generates defect in fiber end face with various processing methods and melts again Two optical fiber are connect, either using special optical fiber or glass tube and fused fiber splice as photonic crystal, to prepare in inside Bubble out.Since the cross-sectional area of the side wall of the sensitivity and air-chamber of stress and strain is related, cross-sectional area is smaller, sensitivity It is higher, so traditional optical fiber is mainly to reduce cross-sectional area by increasing the inner sidewall diameter of air-chamber, and the ruler of outer wall Very little size can not regulate and control, so further decreasing for air-chamber lateral cross section product is limited, to limit stress, answer Become further increasing for sensing accuracy.
Summary of the invention
The purpose of the present invention is overcoming the above-mentioned prior art, provide a kind of Fabry-perot optical fiber bubble cavity sensor and its Production method.
According to an aspect of the present invention, a kind of Fabry-perot optical fiber bubble cavity sensor, including an optical fiber are provided, in the light Fine inside is embedded with a bubble, and the bubble constitutes Fabry-perot optical fiber air-chamber, wherein it is small to embed bladdery fiber segment diameter In the fiber segment diameter for not embedding bubble, the bladdery fiber segment of embedding is removed at least partly side wall.
In a further embodiment, the bubble is rectangular parallelepiped structure, spheroid structure or sphere structure.
In a further embodiment, the structure of the bubble is used to form two-beam interference.
In a further embodiment, the fiber segment section diameter for not embedding bubble be remove coat covering it is straight Diameter.
In a further embodiment, the optical fiber includes the first optical fiber and the second optical fiber, and the first optical fiber includes first End face, the second optical fiber include second end face, form the hollow bubble after the first end face and second end face docking.
In a further embodiment, the first end face and second end face at least partially have concave structure, with The hollow bubble is formed after docking.
In a further embodiment, first optical fiber and the second optical fiber respectively select:Single mode optical fiber, multimode light Fibre or photonic crystal fiber.
In a further embodiment, first optical fiber and the second optical fiber select identical optical fiber or different Optical fiber.
According to another aspect of the present invention, a kind of production method of Fabry-perot optical fiber bubble cavity sensor is provided, including:
The partial sidewall of the first optical fiber and the second optical fiber tail-end is removed respectively, the first optical fiber tail-end has first end face, the Two optical fiber tail-ends have second end face, and first end face and/or second end face are processed into the structure comprising concave surface;
Treated first end face and second end face are docked, Fabry-perot optical fiber air-chamber is formed.
In a further embodiment, the processing comprises at least one of the following:
Using laser processing, electron beam or ion beam etching and chemical attack.
In a further embodiment, the partial sidewall of removal first optical fiber and the second optical fiber tail-end uses Following at least one mode:
The entire outside of first optical fiber and the second optical fiber is all removed to the thickness of setting;
Or by the thickness of the portion outboard removal setting of optical fiber, so that the cross-sectional area of optical fiber tail-end part is reduced.
In a further embodiment, the structure of the concave surface comprises at least one of the following:
Cylindrical, cuboid or spheric, class spheric and antarafacial type;
Mirror surface of the concave structure as air-chamber.
In a further embodiment, the docking mode is:Laser welding, arc welding or bonding.This hair Bright beneficial effect is:Existing technology mainly reduces optical fiber air-chamber by the diameter of the inner wall of increase optical fiber air-chamber Cross-sectional area.And technology of the invention, on the basis of existing technology, while being also reduced by the outer diameter of optical fiber air-chamber Size, so that the sidewall cross-sectional area of optical fiber air-chamber substantially reduces, to improve the spirit of the stress and strain of optical fiber cavity Sensitivity.
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section for crossing optical fiber central axis line of the Fabry-perot optical fiber bubble cavity sensor of the embodiment of the present invention.Its In (a) be the first optical fiber (i.e. guiding optical cable), be (b) the second optical fiber, be (c) Fabry-perot optical fiber air-chamber.
Fig. 2 is the cross-sectional view of the air-chamber of sensor described in Fig. 1, wherein D1 be do not embed bubble fiber segment it is straight Diameter, the i.e. cladding diameter of optical fiber, D2 are that fibre cladding removes the diameter after outer wall thickness, and D3 is Fabry-perot optical fiber air-chamber Interior diameter.
Fig. 3 A and Fig. 3 B are the side wall construction diagrammatic cross-section and top view of the optical fiber tail-end in a kind of embodiment, wherein D1 is the fiber segment diameter for not embedding bubble, the i.e. diameter of fibre cladding, and D2 is the circular diameter in end face.
Fig. 4 A and Fig. 4 B are the concave spherical surface structural profile illustration and top view of the optical fiber tail-end in another embodiment, Wherein D1 is the fiber segment diameter for not embedding bubble, i.e. fibre cladding diameter, and D2 is the diameter of concave spherical surface circular groove.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference Attached drawing, the present invention is described in further detail.The present invention is done further specifically with reference to the accompanying drawings and examples It is bright.It is to illustrate embodiments of the present invention by specific embodiment below, those skilled in the art can be as disclosed in this specification Content other advantages and efficacy of the present invention can be easily understood.The present invention can also be subject to by other different specific embodiments It implements or application, the various details in this specification can also be for different viewpoints and application, under the spirit for not departing from this creation Carry out various modifications and change.
Secondly, the words such as ordinal number used in the present invention such as " first ", " second ", to modify involved in the application Component, itself be not intended to and represent the request component have it is any before ordinal number, do not represent a certain request component and another yet The sequence or the sequence in manufacturing method of one request component, the use of those ordinal numbers are only used to make one with certain name to ask Component is asked to be able to that clear differentiation can be made with another request component with identical name.
Basic conception according to the present invention provides a kind of Fabry-perot optical fiber bubble cavity sensor, including an optical fiber, described The inside of a piece optical fiber is embedded with a bubble, and the bubble constitutes Fabry-perot optical fiber air-chamber, wherein embeds bladdery fiber segment Diameter is less than the fiber segment diameter for not embedding bubble.Feature of the Fabry-perot optical fiber air-chamber in structure is the side wall of air-chamber Overall diameter be less than optical fiber diameter, that is to say, that by reduce air-chamber on the outside of diameter, reduce the cross-sectional area of air-chamber, To improve the sensing sensitivity of stress and strain.
The embodiment of the present invention provides a kind of Fabry-perot optical fiber bubble cavity sensor, as shown in Figure 1, being the light excessively of the sensor The cross-sectional view of fine central axes is (b) the second optical fiber, is (c) gas in optical fiber wherein (a) is the first optical fiber (i.e. guiding optical cable) Bubble.The second end face of the first end face of first optical fiber, bubble and the second optical fiber forms closed Fabry-perot optical fiber air-chamber Structure.The overall diameter of the side wall of the optical fiber air-chamber is less than the diameter of fibre cladding.As shown in Fig. 2, for the sensor The cross-sectional view of the lateral cross section of method amber air-chamber is crossed, wherein D1 is fiber segment diameter (the i.e. fibre cladding for not embedding bubble Diameter), D2 is the bladdery fiber segment diameter of embedding, and D3 is the interior diameter of the side wall of Fabry-perot optical fiber air-chamber.The air-chamber Side wall cross-sectional area be π (D22-D32)/4.And traditional air-chamber is not due to being removed place to the outer wall of air-chamber Reason, it is assumed that its fibre diameter is D1, and inner sidewall diameter D3, the cross-sectional area of side wall is π (D12-D32)/4.Obviously, described The cross-sectional area for removing the Fabry-perot optical fiber air-chamber of lateral wall is less than the cross-sectional area for not removing side wall.So, in stress In the measurement of strain, the Fabry-perot optical fiber air-chamber of the removal lateral wall has higher sensitivity.
In some embodiments, the bubble is rectangular parallelepiped structure, spheroid structure or sphere structure.It may be noted that It is that the structure of the bubble will be used to form two-beam interference.
In some embodiments, the first end face and second end face at least partially have concave structure, to dock The hollow bubble is formed afterwards.
In some embodiments, first optical fiber and the second optical fiber respectively select:Single mode optical fiber, multimode fibre or light Photonic crystal fiber.
In some embodiments, the material of first optical fiber and the second optical fiber can be different, can also be identical.
According to an embodiment of the invention, also providing a kind of production method of Fabry-perot optical fiber bubble cavity sensor, may include Following steps:The partial sidewall of the first optical fiber and the second optical fiber tail-end is removed respectively, the first optical fiber tail-end has first end face, the Two optical fiber tail-end tail ends have second end face, and first end face and/or second end face are processed into the structure comprising concave surface;It will pass through The first end face and second end face of processing are docked, and Fabry-perot optical fiber air-chamber is formed.
Specific step can be:
1) the first optical fiber and the coat of the second optical fiber tail-end are removed into a part, then with optical fiber cutter by the light Fine covering cutting, so that tail end exposes certain clad section, while obtaining smooth fiber end face.
2) first end face and second end face described in laser treatment, obtains the optical fiber tail-end of left side of dotted line as shown in Figure 1 Structure.The outside of the optical fiber certain thickness cylinder ring of removal processed, makes optical fiber tail-end become diameter D2's as shown in Figure 2 Cylinder;The cylindrical structure of the tail end center of optical fiber removal one processed obtains the cylinder that a diameter is D3 in optical fiber tail-end Connected in star.
Optionally, the sidewall treatment of optical fiber can also be obtained to the structure of rotary table as shown in Figure 3A and Figure 3B, D1 is light Fine overall diameter, D2 is the fiber end face i.e. diameter of rotary table upper surface.
Optionally, the concave structure of optical fiber tail-end can also be processed into the knot of concave spherical surface as shown in Figure 4 A and 4 B shown in FIG. Structure, D1 do not embed the fiber segment diameter namely fibre cladding diameter of bubble, and D2, which is that fiber end face is processed, obtains the straight of concave spherical surface Diameter.
Optionally, chemical attack can also be used, the methods of ion beam etching processes optical fiber, forms concave surface.
Optionally, the selection of optical fiber can be single mode optical fiber, multimode fibre, the special optical fibers such as photonic crystal fiber.
3) by the obtained two optical fiber optical fiber splicer welding of the side wall and end face processing, a Fiber Optic Sensor is obtained Amber bubble cavity sensor.
Optionally, the methods of laser welding, bonding can also be used.
Optionally, the processing that two optical fiber of docking can only have an optical fiber to pass through side wall and end face, obtained optical fiber Method amber air-chamber still conforms to require.
4) when two sides when extraneous stress or effects of strain in sensor, the chamber length of air-chamber will change, and pass through The spectrum of air-chamber will change, so that the sizes values of extraneous stress and strain are obtained, due to the bubble of the sensor Chamber has lesser cross-sectional area, will improve the sensing accuracy of stress and strain.
More than, Fabry-perot optical fiber bubble cavity sensor provided through the embodiment of the present invention and preparation method thereof, wherein sensing Device optical fiber of Fabry glass sieve air-chamber built in one is constituted, and dimensionally, the optical fiber comprising bubble cavity segment is straight Diameter is less than the fibre diameter of other parts.Into optical fiber light by forming two-beam interference after optical fiber Fabry glass sieve chamber, lead to The variation of measure spectrum is crossed to obtain the size of external physical quantity.In the production of the structure of the optical fiber air-chamber, by optical fiber one The side wall at end removes a part, while the end face of optical fiber being also processed into the structure of concave surface, by two optical fiber ends of the feature Face carries out alignment connection, and intermediate there are the air gaps, forms Fabry glass sieve chamber.Optical fiber with this design structure passes Sensor greatly improves answering for Fabry-perot optical fiber bubble cavity sensor since air-chamber has the characteristics that minimum cross-sectional area Become and stress measurement sensitivity.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention Within the scope of.

Claims (13)

1. a kind of Fabry-perot optical fiber bubble cavity sensor, which is characterized in that including an optical fiber, be embedded with one in the inside of the optical fiber A bubble, the bubble constitute Fabry-perot optical fiber air-chamber, wherein embed bladdery fiber segment diameter and are less than and do not embed bubble Fiber segment diameter, the bladdery fiber segment of embedding are removed at least partly side wall.
2. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the bubble is cuboid knot Structure, spheroid structure or sphere structure.
3. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the structure of the bubble is used for shape At two-beam interference.
4. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the optical fiber for not embedding bubble Section section diameter is the cladding diameter for removing coat.
5. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the optical fiber includes the first optical fiber With the second optical fiber, the first optical fiber includes first end face, and the second optical fiber includes second end face, the first end face and second end face pair The hollow bubble is formed after connecing.
6. Fabry-perot optical fiber bubble cavity sensor according to claim 5, which is characterized in that the first end face and second end Face at least partially has concave structure, to form the hollow bubble after docking.
7. Fabry-perot optical fiber bubble cavity sensor according to claim 5, which is characterized in that first optical fiber and the second light Fine respectively selection:Single mode optical fiber, multimode fibre or photonic crystal fiber.
8. Fabry-perot optical fiber bubble cavity sensor according to claim 7, which is characterized in that first optical fiber and the second light Fibre selects identical optical fiber or different optical fiber.
9. a kind of production method of Fabry-perot optical fiber bubble cavity sensor, which is characterized in that including:
The partial sidewall of the first optical fiber and the second optical fiber tail-end is removed respectively, and the first optical fiber tail-end has first end face, the second light Fine tail end has second end face, and first end face and/or second end face are processed into the structure comprising concave surface;
Treated first end face and second end face are docked, Fabry-perot optical fiber air-chamber is formed.
10. manufacturing method according to claim 9, which is characterized in that the processing comprises at least one of the following:
Using laser processing, electron beam or ion beam etching and chemical attack.
11. manufacturing method according to claim 9, which is characterized in that first optical fiber of removal and the second optical fiber tail The partial sidewall at end, using following at least one mode:
The entire outside of first optical fiber and the second optical fiber is all removed to the thickness of setting;
Or by the thickness of the portion outboard removal setting of optical fiber, so that the cross-sectional area of optical fiber tail-end part is reduced.
12. manufacturing method according to claim 9, which is characterized in that the structure of the concave surface includes following at least one Kind:
Cylindrical, cuboid or spheric, class spheric and antarafacial type;
Mirror surface of the concave structure as air-chamber.
13. manufacturing method according to claim 9, which is characterized in that the docking mode is:Laser welding, electric arc Welding or bonding.
CN201811016626.6A 2018-08-31 2018-08-31 Fabry-perot optical fiber bubble cavity sensor and preparation method thereof Pending CN108844561A (en)

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