CN108844561A - Fabry-perot optical fiber bubble cavity sensor and preparation method thereof - Google Patents
Fabry-perot optical fiber bubble cavity sensor and preparation method thereof Download PDFInfo
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- CN108844561A CN108844561A CN201811016626.6A CN201811016626A CN108844561A CN 108844561 A CN108844561 A CN 108844561A CN 201811016626 A CN201811016626 A CN 201811016626A CN 108844561 A CN108844561 A CN 108844561A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 153
- 238000002360 preparation method Methods 0.000 title abstract description 4
- 239000000835 fiber Substances 0.000 claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000005253 cladding Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 7
- 238000003032 molecular docking Methods 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 6
- 239000004038 photonic crystal Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000010891 electric arc Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
Abstract
The present invention discloses a kind of Fabry-perot optical fiber bubble cavity sensor and preparation method thereof, belongs to fiber optic sensor technology field.Wherein, Fabry-perot optical fiber bubble cavity sensor includes an optical fiber, a bubble is embedded in the inside of the optical fiber, the bubble constitutes Fabry-perot optical fiber air-chamber, wherein, it embeds bladdery fiber segment diameter and is less than the fiber segment diameter for not embedding bubble, the bladdery fiber segment of embedding is removed at least partly side wall.Fibre optical sensor with this design structure greatly improves the strain and stress measurement sensitivity of Fabry-perot optical fiber bubble cavity sensor since air-chamber has the characteristics that minimum cross-sectional area.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, more particularly to a kind of Fabry-perot optical fiber bubble cavity sensor and its production
Method.
Background technique
Fibre Optical Sensor has micromation, and electromagnetism interference is corrosion-resistant, can measure the feature more than physical quantity, in engineering technology
It widely studies and applies with having in scientific research.Its measurement object has:Displacement, pressure, strain, electric current, voltage, gas,
Vibration, acceleration etc..Sensor based on optical fiber is various, there is Fabry glass sieve sensor, Bragg grating sensor,
Mach increases Dare interference sensor, and long-period fiber grating sensor etc. wherein has a type optical fiber in Fabry glass sieve sensor
Method amber bubble cavity sensor, its feature is that have an air bubble in the covering of optical fiber, at two of the bubble of optical fiber axial direction
Side forms a Fa-Po cavity, and such Fabry-perot optical fiber air-chamber is often used in two sensing stress, strain physical quantitys.And other
Fibre optical sensor compare, in the sensing of stress and strain, the sensitivity with higher of Fabry-perot optical fiber bubble cavity sensor with
And minimum Temperature cross-over sensitivity.
The production of traditional Fabry-perot optical fiber air-chamber mainly generates defect in fiber end face with various processing methods and melts again
Two optical fiber are connect, either using special optical fiber or glass tube and fused fiber splice as photonic crystal, to prepare in inside
Bubble out.Since the cross-sectional area of the side wall of the sensitivity and air-chamber of stress and strain is related, cross-sectional area is smaller, sensitivity
It is higher, so traditional optical fiber is mainly to reduce cross-sectional area by increasing the inner sidewall diameter of air-chamber, and the ruler of outer wall
Very little size can not regulate and control, so further decreasing for air-chamber lateral cross section product is limited, to limit stress, answer
Become further increasing for sensing accuracy.
Summary of the invention
The purpose of the present invention is overcoming the above-mentioned prior art, provide a kind of Fabry-perot optical fiber bubble cavity sensor and its
Production method.
According to an aspect of the present invention, a kind of Fabry-perot optical fiber bubble cavity sensor, including an optical fiber are provided, in the light
Fine inside is embedded with a bubble, and the bubble constitutes Fabry-perot optical fiber air-chamber, wherein it is small to embed bladdery fiber segment diameter
In the fiber segment diameter for not embedding bubble, the bladdery fiber segment of embedding is removed at least partly side wall.
In a further embodiment, the bubble is rectangular parallelepiped structure, spheroid structure or sphere structure.
In a further embodiment, the structure of the bubble is used to form two-beam interference.
In a further embodiment, the fiber segment section diameter for not embedding bubble be remove coat covering it is straight
Diameter.
In a further embodiment, the optical fiber includes the first optical fiber and the second optical fiber, and the first optical fiber includes first
End face, the second optical fiber include second end face, form the hollow bubble after the first end face and second end face docking.
In a further embodiment, the first end face and second end face at least partially have concave structure, with
The hollow bubble is formed after docking.
In a further embodiment, first optical fiber and the second optical fiber respectively select:Single mode optical fiber, multimode light
Fibre or photonic crystal fiber.
In a further embodiment, first optical fiber and the second optical fiber select identical optical fiber or different
Optical fiber.
According to another aspect of the present invention, a kind of production method of Fabry-perot optical fiber bubble cavity sensor is provided, including:
The partial sidewall of the first optical fiber and the second optical fiber tail-end is removed respectively, the first optical fiber tail-end has first end face, the
Two optical fiber tail-ends have second end face, and first end face and/or second end face are processed into the structure comprising concave surface;
Treated first end face and second end face are docked, Fabry-perot optical fiber air-chamber is formed.
In a further embodiment, the processing comprises at least one of the following:
Using laser processing, electron beam or ion beam etching and chemical attack.
In a further embodiment, the partial sidewall of removal first optical fiber and the second optical fiber tail-end uses
Following at least one mode:
The entire outside of first optical fiber and the second optical fiber is all removed to the thickness of setting;
Or by the thickness of the portion outboard removal setting of optical fiber, so that the cross-sectional area of optical fiber tail-end part is reduced.
In a further embodiment, the structure of the concave surface comprises at least one of the following:
Cylindrical, cuboid or spheric, class spheric and antarafacial type;
Mirror surface of the concave structure as air-chamber.
In a further embodiment, the docking mode is:Laser welding, arc welding or bonding.This hair
Bright beneficial effect is:Existing technology mainly reduces optical fiber air-chamber by the diameter of the inner wall of increase optical fiber air-chamber
Cross-sectional area.And technology of the invention, on the basis of existing technology, while being also reduced by the outer diameter of optical fiber air-chamber
Size, so that the sidewall cross-sectional area of optical fiber air-chamber substantially reduces, to improve the spirit of the stress and strain of optical fiber cavity
Sensitivity.
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section for crossing optical fiber central axis line of the Fabry-perot optical fiber bubble cavity sensor of the embodiment of the present invention.Its
In (a) be the first optical fiber (i.e. guiding optical cable), be (b) the second optical fiber, be (c) Fabry-perot optical fiber air-chamber.
Fig. 2 is the cross-sectional view of the air-chamber of sensor described in Fig. 1, wherein D1 be do not embed bubble fiber segment it is straight
Diameter, the i.e. cladding diameter of optical fiber, D2 are that fibre cladding removes the diameter after outer wall thickness, and D3 is Fabry-perot optical fiber air-chamber
Interior diameter.
Fig. 3 A and Fig. 3 B are the side wall construction diagrammatic cross-section and top view of the optical fiber tail-end in a kind of embodiment, wherein
D1 is the fiber segment diameter for not embedding bubble, the i.e. diameter of fibre cladding, and D2 is the circular diameter in end face.
Fig. 4 A and Fig. 4 B are the concave spherical surface structural profile illustration and top view of the optical fiber tail-end in another embodiment,
Wherein D1 is the fiber segment diameter for not embedding bubble, i.e. fibre cladding diameter, and D2 is the diameter of concave spherical surface circular groove.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in further detail.The present invention is done further specifically with reference to the accompanying drawings and examples
It is bright.It is to illustrate embodiments of the present invention by specific embodiment below, those skilled in the art can be as disclosed in this specification
Content other advantages and efficacy of the present invention can be easily understood.The present invention can also be subject to by other different specific embodiments
It implements or application, the various details in this specification can also be for different viewpoints and application, under the spirit for not departing from this creation
Carry out various modifications and change.
Secondly, the words such as ordinal number used in the present invention such as " first ", " second ", to modify involved in the application
Component, itself be not intended to and represent the request component have it is any before ordinal number, do not represent a certain request component and another yet
The sequence or the sequence in manufacturing method of one request component, the use of those ordinal numbers are only used to make one with certain name to ask
Component is asked to be able to that clear differentiation can be made with another request component with identical name.
Basic conception according to the present invention provides a kind of Fabry-perot optical fiber bubble cavity sensor, including an optical fiber, described
The inside of a piece optical fiber is embedded with a bubble, and the bubble constitutes Fabry-perot optical fiber air-chamber, wherein embeds bladdery fiber segment
Diameter is less than the fiber segment diameter for not embedding bubble.Feature of the Fabry-perot optical fiber air-chamber in structure is the side wall of air-chamber
Overall diameter be less than optical fiber diameter, that is to say, that by reduce air-chamber on the outside of diameter, reduce the cross-sectional area of air-chamber,
To improve the sensing sensitivity of stress and strain.
The embodiment of the present invention provides a kind of Fabry-perot optical fiber bubble cavity sensor, as shown in Figure 1, being the light excessively of the sensor
The cross-sectional view of fine central axes is (b) the second optical fiber, is (c) gas in optical fiber wherein (a) is the first optical fiber (i.e. guiding optical cable)
Bubble.The second end face of the first end face of first optical fiber, bubble and the second optical fiber forms closed Fabry-perot optical fiber air-chamber
Structure.The overall diameter of the side wall of the optical fiber air-chamber is less than the diameter of fibre cladding.As shown in Fig. 2, for the sensor
The cross-sectional view of the lateral cross section of method amber air-chamber is crossed, wherein D1 is fiber segment diameter (the i.e. fibre cladding for not embedding bubble
Diameter), D2 is the bladdery fiber segment diameter of embedding, and D3 is the interior diameter of the side wall of Fabry-perot optical fiber air-chamber.The air-chamber
Side wall cross-sectional area be π (D22-D32)/4.And traditional air-chamber is not due to being removed place to the outer wall of air-chamber
Reason, it is assumed that its fibre diameter is D1, and inner sidewall diameter D3, the cross-sectional area of side wall is π (D12-D32)/4.Obviously, described
The cross-sectional area for removing the Fabry-perot optical fiber air-chamber of lateral wall is less than the cross-sectional area for not removing side wall.So, in stress
In the measurement of strain, the Fabry-perot optical fiber air-chamber of the removal lateral wall has higher sensitivity.
In some embodiments, the bubble is rectangular parallelepiped structure, spheroid structure or sphere structure.It may be noted that
It is that the structure of the bubble will be used to form two-beam interference.
In some embodiments, the first end face and second end face at least partially have concave structure, to dock
The hollow bubble is formed afterwards.
In some embodiments, first optical fiber and the second optical fiber respectively select:Single mode optical fiber, multimode fibre or light
Photonic crystal fiber.
In some embodiments, the material of first optical fiber and the second optical fiber can be different, can also be identical.
According to an embodiment of the invention, also providing a kind of production method of Fabry-perot optical fiber bubble cavity sensor, may include
Following steps:The partial sidewall of the first optical fiber and the second optical fiber tail-end is removed respectively, the first optical fiber tail-end has first end face, the
Two optical fiber tail-end tail ends have second end face, and first end face and/or second end face are processed into the structure comprising concave surface;It will pass through
The first end face and second end face of processing are docked, and Fabry-perot optical fiber air-chamber is formed.
Specific step can be:
1) the first optical fiber and the coat of the second optical fiber tail-end are removed into a part, then with optical fiber cutter by the light
Fine covering cutting, so that tail end exposes certain clad section, while obtaining smooth fiber end face.
2) first end face and second end face described in laser treatment, obtains the optical fiber tail-end of left side of dotted line as shown in Figure 1
Structure.The outside of the optical fiber certain thickness cylinder ring of removal processed, makes optical fiber tail-end become diameter D2's as shown in Figure 2
Cylinder;The cylindrical structure of the tail end center of optical fiber removal one processed obtains the cylinder that a diameter is D3 in optical fiber tail-end
Connected in star.
Optionally, the sidewall treatment of optical fiber can also be obtained to the structure of rotary table as shown in Figure 3A and Figure 3B, D1 is light
Fine overall diameter, D2 is the fiber end face i.e. diameter of rotary table upper surface.
Optionally, the concave structure of optical fiber tail-end can also be processed into the knot of concave spherical surface as shown in Figure 4 A and 4 B shown in FIG.
Structure, D1 do not embed the fiber segment diameter namely fibre cladding diameter of bubble, and D2, which is that fiber end face is processed, obtains the straight of concave spherical surface
Diameter.
Optionally, chemical attack can also be used, the methods of ion beam etching processes optical fiber, forms concave surface.
Optionally, the selection of optical fiber can be single mode optical fiber, multimode fibre, the special optical fibers such as photonic crystal fiber.
3) by the obtained two optical fiber optical fiber splicer welding of the side wall and end face processing, a Fiber Optic Sensor is obtained
Amber bubble cavity sensor.
Optionally, the methods of laser welding, bonding can also be used.
Optionally, the processing that two optical fiber of docking can only have an optical fiber to pass through side wall and end face, obtained optical fiber
Method amber air-chamber still conforms to require.
4) when two sides when extraneous stress or effects of strain in sensor, the chamber length of air-chamber will change, and pass through
The spectrum of air-chamber will change, so that the sizes values of extraneous stress and strain are obtained, due to the bubble of the sensor
Chamber has lesser cross-sectional area, will improve the sensing accuracy of stress and strain.
More than, Fabry-perot optical fiber bubble cavity sensor provided through the embodiment of the present invention and preparation method thereof, wherein sensing
Device optical fiber of Fabry glass sieve air-chamber built in one is constituted, and dimensionally, the optical fiber comprising bubble cavity segment is straight
Diameter is less than the fibre diameter of other parts.Into optical fiber light by forming two-beam interference after optical fiber Fabry glass sieve chamber, lead to
The variation of measure spectrum is crossed to obtain the size of external physical quantity.In the production of the structure of the optical fiber air-chamber, by optical fiber one
The side wall at end removes a part, while the end face of optical fiber being also processed into the structure of concave surface, by two optical fiber ends of the feature
Face carries out alignment connection, and intermediate there are the air gaps, forms Fabry glass sieve chamber.Optical fiber with this design structure passes
Sensor greatly improves answering for Fabry-perot optical fiber bubble cavity sensor since air-chamber has the characteristics that minimum cross-sectional area
Become and stress measurement sensitivity.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (13)
1. a kind of Fabry-perot optical fiber bubble cavity sensor, which is characterized in that including an optical fiber, be embedded with one in the inside of the optical fiber
A bubble, the bubble constitute Fabry-perot optical fiber air-chamber, wherein embed bladdery fiber segment diameter and are less than and do not embed bubble
Fiber segment diameter, the bladdery fiber segment of embedding are removed at least partly side wall.
2. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the bubble is cuboid knot
Structure, spheroid structure or sphere structure.
3. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the structure of the bubble is used for shape
At two-beam interference.
4. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the optical fiber for not embedding bubble
Section section diameter is the cladding diameter for removing coat.
5. Fabry-perot optical fiber bubble cavity sensor according to claim 1, which is characterized in that the optical fiber includes the first optical fiber
With the second optical fiber, the first optical fiber includes first end face, and the second optical fiber includes second end face, the first end face and second end face pair
The hollow bubble is formed after connecing.
6. Fabry-perot optical fiber bubble cavity sensor according to claim 5, which is characterized in that the first end face and second end
Face at least partially has concave structure, to form the hollow bubble after docking.
7. Fabry-perot optical fiber bubble cavity sensor according to claim 5, which is characterized in that first optical fiber and the second light
Fine respectively selection:Single mode optical fiber, multimode fibre or photonic crystal fiber.
8. Fabry-perot optical fiber bubble cavity sensor according to claim 7, which is characterized in that first optical fiber and the second light
Fibre selects identical optical fiber or different optical fiber.
9. a kind of production method of Fabry-perot optical fiber bubble cavity sensor, which is characterized in that including:
The partial sidewall of the first optical fiber and the second optical fiber tail-end is removed respectively, and the first optical fiber tail-end has first end face, the second light
Fine tail end has second end face, and first end face and/or second end face are processed into the structure comprising concave surface;
Treated first end face and second end face are docked, Fabry-perot optical fiber air-chamber is formed.
10. manufacturing method according to claim 9, which is characterized in that the processing comprises at least one of the following:
Using laser processing, electron beam or ion beam etching and chemical attack.
11. manufacturing method according to claim 9, which is characterized in that first optical fiber of removal and the second optical fiber tail
The partial sidewall at end, using following at least one mode:
The entire outside of first optical fiber and the second optical fiber is all removed to the thickness of setting;
Or by the thickness of the portion outboard removal setting of optical fiber, so that the cross-sectional area of optical fiber tail-end part is reduced.
12. manufacturing method according to claim 9, which is characterized in that the structure of the concave surface includes following at least one
Kind:
Cylindrical, cuboid or spheric, class spheric and antarafacial type;
Mirror surface of the concave structure as air-chamber.
13. manufacturing method according to claim 9, which is characterized in that the docking mode is:Laser welding, electric arc
Welding or bonding.
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Cited By (1)
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