CN108834296A - 一种微波等离子装置 - Google Patents
一种微波等离子装置 Download PDFInfo
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- CN108834296A CN108834296A CN201810678562.XA CN201810678562A CN108834296A CN 108834296 A CN108834296 A CN 108834296A CN 201810678562 A CN201810678562 A CN 201810678562A CN 108834296 A CN108834296 A CN 108834296A
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- microwave
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
Abstract
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Claims (9)
Priority Applications (1)
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CN201810678562.XA CN108834296B (zh) | 2018-06-27 | 2018-06-27 | 一种微波等离子装置 |
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CN201810678562.XA CN108834296B (zh) | 2018-06-27 | 2018-06-27 | 一种微波等离子装置 |
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CN108834296A true CN108834296A (zh) | 2018-11-16 |
CN108834296B CN108834296B (zh) | 2020-07-10 |
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4766287A (en) * | 1987-03-06 | 1988-08-23 | The Perkin-Elmer Corporation | Inductively coupled plasma torch with adjustable sample injector |
CN1556245A (zh) * | 2003-12-31 | 2004-12-22 | 北京工业大学 | 热丝辅助微波电子回旋共振化学气相沉积方法及装置 |
CN201114976Y (zh) * | 2007-08-30 | 2008-09-10 | 复旦大学 | 由介质棒引导的微波等离子体内壁处理机 |
CN102530859A (zh) * | 2011-12-29 | 2012-07-04 | 武汉凯迪工程技术研究总院有限公司 | 一种外热型微波等离子气化炉及合成气生产方法 |
CN102695356A (zh) * | 2012-03-30 | 2012-09-26 | 马鞍山市同力液压设备制造有限公司 | 脉冲射频双重点火的等离子体点火枪 |
CN103079329A (zh) * | 2012-12-26 | 2013-05-01 | 中国航天空气动力技术研究院 | 一种高压等离子点火装置 |
JP2015116561A (ja) * | 2013-11-18 | 2015-06-25 | パナソニックIpマネジメント株式会社 | 液体処理装置及び液体処理方法 |
CN205419766U (zh) * | 2015-11-19 | 2016-08-03 | 大连海事大学 | 直接耦合微波液相等离子体醇类制氢装置 |
CN106762330A (zh) * | 2016-12-27 | 2017-05-31 | 华中科技大学 | 一种可视化研究微波等离子体辅助点火的实验装置 |
CN107617320A (zh) * | 2017-10-23 | 2018-01-23 | 大连理工大学 | 一种利用微波等离子体处理废气的装置 |
-
2018
- 2018-06-27 CN CN201810678562.XA patent/CN108834296B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4766287A (en) * | 1987-03-06 | 1988-08-23 | The Perkin-Elmer Corporation | Inductively coupled plasma torch with adjustable sample injector |
CN1556245A (zh) * | 2003-12-31 | 2004-12-22 | 北京工业大学 | 热丝辅助微波电子回旋共振化学气相沉积方法及装置 |
CN201114976Y (zh) * | 2007-08-30 | 2008-09-10 | 复旦大学 | 由介质棒引导的微波等离子体内壁处理机 |
CN102530859A (zh) * | 2011-12-29 | 2012-07-04 | 武汉凯迪工程技术研究总院有限公司 | 一种外热型微波等离子气化炉及合成气生产方法 |
CN102695356A (zh) * | 2012-03-30 | 2012-09-26 | 马鞍山市同力液压设备制造有限公司 | 脉冲射频双重点火的等离子体点火枪 |
CN103079329A (zh) * | 2012-12-26 | 2013-05-01 | 中国航天空气动力技术研究院 | 一种高压等离子点火装置 |
JP2015116561A (ja) * | 2013-11-18 | 2015-06-25 | パナソニックIpマネジメント株式会社 | 液体処理装置及び液体処理方法 |
CN205419766U (zh) * | 2015-11-19 | 2016-08-03 | 大连海事大学 | 直接耦合微波液相等离子体醇类制氢装置 |
CN106762330A (zh) * | 2016-12-27 | 2017-05-31 | 华中科技大学 | 一种可视化研究微波等离子体辅助点火的实验装置 |
CN107617320A (zh) * | 2017-10-23 | 2018-01-23 | 大连理工大学 | 一种利用微波等离子体处理废气的装置 |
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CN108834296B (zh) | 2020-07-10 |
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Address after: 100144 room 805, 8 / F, building 1, yard 49, Badachu Road, Shijingshan District, Beijing Patentee after: Aerospace environmental protection (Beijing) Co.,Ltd. Address before: 100144 room 805, 8 / F, building 1, yard 49, Badachu Road, Shijingshan District, Beijing Patentee before: Aerospace Shenhe (Beijing) environmental protection Co.,Ltd. |
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