CN108831589A - Conductor structure, display device and conductor structure preparation method - Google Patents
Conductor structure, display device and conductor structure preparation method Download PDFInfo
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- CN108831589A CN108831589A CN201810679352.2A CN201810679352A CN108831589A CN 108831589 A CN108831589 A CN 108831589A CN 201810679352 A CN201810679352 A CN 201810679352A CN 108831589 A CN108831589 A CN 108831589A
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- Prior art keywords
- protrusion
- conductor structure
- conductor
- lead unit
- layer
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/008—Apparatus or processes specially adapted for manufacturing conductors or cables for manufacturing extensible conductors or cables
Abstract
The embodiment of the invention provides a kind of conductor structure, display device and conductor structure preparation method, which includes lead unit, and lead unit includes protrusion, mutually nested and flexible connection between the protrusion of adjacent wires unit.Conductor structure provided in an embodiment of the present invention is by being arranged multiple lead units, and it sets each lead unit and respectively includes multiple protrusions, and each lead unit of setting protrusion is mutually nested with the protrusion of lead unit adjacent thereto and the mode that is flexibly connected, so that conductor structure is had good bending and telescopicing performance, provides precondition for the subsequent three-dimensional conformal or conformal display for realizing flexible display apparatus.
Description
Technical field
The present invention relates to field of display technology, and in particular to a kind of conductor structure, display device and conductor structure preparation side
Method.
Background technique
Currently, flexible display apparatus is increasingly subject to extensive concern by the characteristic of its flexible.But due to itself
The limitation of structure, existing flexible display apparatus can not achieve hyperboloid bending.That is, existing flexible display apparatus can only edge
X-axis or Y-axis etc. carry out uniaxial bending operation, can not achieve multiaxis or at any angle bending operation, especially can not achieve flexibility
The 3D of display device is conformal or conformal display.
Summary of the invention
In view of this, the embodiment of the present invention is dedicated to providing a kind of conductor structure, display device and conductor structure preparation side
Method, overbending direction to solve conductor structure in existing flexible display apparatus is single, flexible display apparatus can not achieve it is conformal or
The problem of conformal display.
In a first aspect, one embodiment of the invention provides a kind of conductor structure, which includes lead unit, conducting wire list
Member includes protrusion, mutually nested and flexible connection between the protrusion of adjacent wires unit.
In an embodiment of the present invention, the quantity for the protrusion that lead unit includes is multiple, and protrusion is item
Shape structure, multiple protrusions parallel arrangement at equal intervals.
In an embodiment of the present invention, the end in the extension direction of protrusion is provided with positive stop strip.
In an embodiment of the present invention, lead unit further comprises centerbody, and protrusion is connected to the centerbody.
In an embodiment of the present invention, the thickness of centerbody be greater than protrusion, wherein the extending direction of thickness be perpendicular to
The direction of extended planar where protrusion.
Second aspect, another embodiment of the present invention also provide a kind of display device, which includes any of the above-described reality
Apply conductor structure described in example.
The third aspect, another embodiment of the present invention also provide a kind of conductor structure preparation method, and this method is included in substrate
Upper deposited sacrificial layer；Sacrificial layer is patterned processing；Conductor layer is deposited on sacrificial layer after graphical treatment, wherein
The conductor layer that deposition is formed includes the lead unit with protrusion, and realizes phase using protrusion between adjacent wires unit
Connection relationship that is mutually nested and being flexibly connected；Remove sacrificial layer.
In an embodiment of the present invention, substrate is stretchable substrate, and conductor layer is partly vacantly set to stretchable substrate, is removed
It further comprise the crooked process radius for obtaining conductor layer after the sacrificial layer step；Based on crooked process radius and stretchable substrate to conducting wire
Layer carries out deformation fixed operation.
In an embodiment of the present invention, deformation fixed operation is carried out using heating.
In an embodiment of the present invention, the material of sacrificial layer is silica, silicon nitride, any one in polyimides.
Conductor structure provided in an embodiment of the present invention sets each lead unit and wraps respectively by the way that multiple lead units are arranged
Include multiple protrusions, and each lead unit of setting protrusion it is mutually nested with the protrusion of lead unit adjacent thereto and
The mode of flexible connection makes conductor structure have good bending and telescopicing performance, for subsequent realization flexible display apparatus
Three-dimensional conformal or conformal display provides precondition.
Detailed description of the invention
Fig. 1 show the overlooking structure diagram of the compressive state of the conductor structure of first embodiment of the invention offer.
Fig. 2 show the overlooking structure diagram of the tensional state of the conductor structure of first embodiment of the invention offer.
Fig. 3 show the overlooking structure diagram of the compressive state of the conductor structure of second embodiment of the invention offer.
Fig. 4 show the overlooking structure diagram of the compressive state of the conductor structure of third embodiment of the invention offer.
Fig. 5 a to Fig. 5 d show the cross section structure in the preparation process of the conductor structure of fourth embodiment of the invention offer
Schematic diagram.
Fig. 6 show the flow diagram of the conductor structure preparation method of fifth embodiment of the invention offer.
Fig. 7 show the flow diagram of the conductor structure preparation method of sixth embodiment of the invention offer.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that the described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Fig. 1 show the overlooking structure diagram of the compressive state of the conductor structure of first embodiment of the invention offer.Such as
Shown in Fig. 1, the conductor structure 1 that first embodiment of the invention provides includes the first lead unit 11 and the second lead unit 12, the
One lead unit 11 includes the first centerbody 111 and is set to 111 left and right ends of the first centerbody (left side in orientation as shown in Figure 1
Right both ends) multiple first protrusions 112, wherein the first centerbody 111 be cube, the first protrusion 112 be plate it is long
Item, (i.e. the one of the first centerbody 111 is opposite in the left and right ends of the first centerbody 111 for multiple first protrusion, 112 parallel arrangements
Both ends), and the protrusion of lead unit adjacent thereto can be accommodated between adjacent first protrusion 112 in the same side
Portion.
In addition, the second lead unit 12 includes the second centerbody 121 and is set to 121 left and right ends of the second centerbody (such as
The left and right ends in orientation shown in Fig. 1) multiple second protrusions 122, wherein the second centerbody 121 be cube, second protrusion
Portion 122 is plate strip, and multiple second protrusion, 122 parallel arrangements are in left and right ends (i.e. the second center of the second centerbody 121
One opposite end of body 121), also, in the abutting end of the second lead unit 12 and the first lead unit 11, the second lead unit
12 the second protrusion 122 is mutually nested with the first protrusion 112 of the first lead unit 11 and is flexibly connected.
Note that connection relationship that is mutually nested mentioned by the embodiment of the present invention and being flexibly connected, refers to lead unit
Connected by means of the arrangement realization activity that successively overlaps between the multiple protrusions of itself and multiple protrusions of adjacent wires unit
It connects.Preferably, mutually nested be appreciated that etc. is all that both hands finger successively overlaps arrangement relationship；Also, it is flexibly connected available two
Kind of state embodies, and specifically, the engagement connection status and left and right discrete state of the protrusion including adjacent wires unit are (as schemed
The left and right directions in orientation shown in 1).
Note that the side that the protrusion that protrusion is set as strip structure, and sets multiple strips is arranged mutually parallel
Formula can make protrusion being more uniformly stressed in bending telescopic process, and then make the flexible or bending operation of conductor structure
It is more smooth, thus the case where lead unit caused by being avoided as far as possible because of protrusion unbalance stress can not carry out scaling operation.
It should be noted that protrusion can be not only strip structure, it can also be bump structure, arcuate structure, spiral
At least one of structure, as long as can guarantee to be capable of forming connection that is mutually nested and being flexibly connected between adjacent protrusion
Relationship, the embodiment of the present invention limit this without unified.
It should be appreciated that Fig. 1 show a part of the conductor structure of interception, whole conductor structure is by successively alternately arranging
What the first lead unit 11 of cloth and the second lead unit 12 formed.That is, conductor structure shown in FIG. 1 is can be along a left side
What right two directions (left and right directions in orientation shown in Fig. 1) were extended.
In addition, it should be understood that the specific length of protrusion, concrete shape of centerbody etc. can roots in above-mentioned lead unit
According to actual conditions sets itself, it only need to ensure to can be realized connection that is mutually nested and being flexibly connected between adjacent wires unit and close
System.That is, in order to improve the adaptability of conductor structure provided in an embodiment of the present invention and widespread popularity, this hair
Bright embodiment limits the concrete shape of lead unit without unified.
Fig. 2 show the overlooking structure diagram of the tensional state of the conductor structure of first embodiment of the invention offer.Such as
Shown in Fig. 2, in actual application process, can in left-right direction (left and right directions that left and right directions is orientation shown in Fig. 2) to leading
Cable architecture carries out stretched operation.It should be appreciated that conductor structure provided in an embodiment of the present invention can not only be realized in left-right direction
Stretched operation, and can realize that (front-rear direction is orientation shown in Fig. 2 along the longitudinal direction by the flexible of lead unit itself
Front-rear direction) bending operation.
It should be appreciated that the first lead unit 11 and the second lead unit 12 can also (orientation as shown in Figure 2 along the longitudinal direction
Front-rear direction) extend arrangement.The conductor structure for extending arrangement along the longitudinal direction can not only realize front-rear direction (such as Fig. 2 institute
Show the front-rear direction in orientation) stretched operation, and can realize left and right directions (such as Fig. 2 by the flexible of lead unit itself
The left and right directions in shown orientation) bending operation.
In an embodiment of the present invention, conductor structure had both included 11 He of the first lead unit for extending arrangement along the longitudinal direction
Second lead unit 12, and the first lead unit 11 and the second lead unit 12 including extending arrangement in left-right direction.It should
Understand, the conductor structure in the embodiment of the present invention includes extension arrangement along the longitudinal direction by setting and extends row in left-right direction
The mode of the lead unit of cloth makes conductor structure have the speciality that multi-direction bending stretches.
The conductor structure that first embodiment of the invention provides sets each lead unit point by the way that multiple lead units are arranged
Not Bao Kuo multiple protrusions, and the protrusion of each lead unit of setting and the protrusion of lead unit adjacent thereto it is mutually embedding
Set and the mode being flexibly connected, make conductor structure have good bending and telescopicing performance, fill for subsequent realization Flexible Displays
The three-dimensional set is conformal or conformal show provides precondition.
In an embodiment of the present invention, conductor structure the above embodiment of the present invention provided is applied to needs and realizes three-dimensional
The flexible display apparatus of conformal or conformal display, to realize the three-dimensional conformal or conformal display of flexible display apparatus.It should manage
Solution, three-dimensional conformal or conformal display refer to flexible display screen can show according to actual needs three-dimension curved surface solid it is aobvious
Show.
In an alternative embodiment of the invention, the centerbody of lead unit is cube, is all provided in the circumferential periphery of centerbody
It is equipped with protrusion.It should be appreciated that with only in the left and right ends (left and right ends as shown in Figure 2) of lead unit centerbody or front and back
Both ends (rear and front end as shown in Figure 2) setting protrusion is compared, and the circumferential periphery of lead unit centerbody is respectively provided with protrusion
The mode in portion can further increase the extension ability of lead unit, conformal or conformal aobvious for the subsequent three-dimensional for realizing conductor structure
Show and provides convenience.That is, the connection that the centerbody of lead unit can not only improve between lead unit protrusion is steady
It is qualitative, and can be improved the extension ability of lead unit.
In an alternative embodiment of the invention, lead unit does not have centerbody structures, and lead unit only includes protrusion, that is, leads
Line unit realizes connection relationship that is mutually nested with the protrusion of adjacent wires unit and being flexibly connected i.e. only by means of protrusion
It can.It should be appreciated that conductor structure provided in an embodiment of the present invention can be further increased by only including the lead unit of protrusion
Adaptability.
Preferably, the spatial volume set between lead unit protrusion is slightly less than or equal to the adjacent wires to be accommodated
The volume of the protrusion of unit, to guarantee that there is electric conductivity well between adjacent wires unit.
In an embodiment of the present invention, mutually nested and be flexibly connected protrusion adjacent surface on be provided with zigzag or
Waveform texture.It should be appreciated that protrusion adjacent surface be arranged zigzag or waveform texture can sufficiently improve it is mutually embedding
The stability of set and movable connection structure.
Fig. 3 show the overlooking structure diagram of the compressive state of the conductor structure of second embodiment of the invention offer.?
Extend second embodiment of the invention, second embodiment of the invention and first embodiment base on the basis of first embodiment of the invention
This is identical, and narration difference, something in common repeat no more emphatically below.
As shown in figure 3, the conductor structure that second embodiment of the invention provides is arranged in protrusion far from the end of centerbody
Positive stop strip, that is to say, that the end in the extension direction of protrusion is provided with positive stop strip.Specifically, remote in the first protrusion 112
End from the first centerbody 111 is provided with the first positive stop strip 1120, in the second protrusion 122 far from the second centerbody 121
End is provided with the second positive stop strip 1220.Wherein, the width of the first positive stop strip 1120 is greater than the width of the first protrusion 112, the
The width of two positive stop strips 1220 is greater than the second protrusion 122, and positive stop strip set by the end of each protrusion can be in its correspondence
Protrusion accommodate gap between slide, and with formed the receiving gap two protrusions contact.
Specifically, as shown in figure 3, being provided with the first receiving gap between the first adjacent protrusion 112, first receiving
Gap is used to accommodate and the first receiving gap corresponding second protrusion 122 on spatial position, and second accommodated
Protrusion 122 can slide in the first receiving gap, and the end of the second protrusion 122 accommodated is provided with the second limit
Item 1220, the second positive stop strip 1220 can Elastic Contact be fastened on this first accommodate gap in, and the second protrusion 122 by
The contact connectio with the first protrusion 112 is realized in the second positive stop strip 1220.
Gap is accommodated in addition, being also provided between the second adjacent protrusion 122, accommodates gap for second, second appearance
Receive gap for accommodate with the second receiving gap corresponding first protrusion 112 on spatial position, and the accommodated
One protrusion 112 can slide in the second receiving gap, and the end of the first protrusion 112 accommodated is provided with the first limit
Position item 1120, the first positive stop strip 1120 can Elastic Contact be fastened on this and second accommodate in gap, and the first protrusion 112 is borrowed
Help the contact connectio of the first positive stop strip 1120 realization and the second protrusion 122.
It should be appreciated that positive stop strip is conductive material, i.e. adjacent conductive unit realizes mutual conduction by positive stop strip
Contact, to finally realize the electric conductivity of conductor structure.
Side of the conductor structure that second embodiment of the invention provides by the protrusion in lead unit far from centerbody
The mode of positive stop strip is set, is effectively prevented in actual bending drawing process, protrusion is detached between the receiving corresponding to it
The generation of the phenomenon that gap space, and then improve the stability of conductor structure.
Fig. 4 show the overlooking structure diagram of the compressive state of the conductor structure of third embodiment of the invention offer.Such as
Shown in Fig. 4, the conductor structure 2 that third embodiment of the invention provides includes privates unit 21 and is set to privates unit
The privates units 22 of 21 peripheries, privates unit 21 include cylindrical third centerbody 211 and uniform arc to setting
Multiple third protrusions 212 in 211 periphery of third centerbody, wherein third protrusion 212 is the plate of acute angle isosceles triangle
Shape structure, and the apex angle of protrusion 212 and third centerbody 211 connect, can be accommodated between adjacent tabs 212 with
Adjacent lead unit protrusion, thus realize the mutually nested of adjacent wires unit and be flexibly connected connection relationship.
In addition, privates unit 22 includes the 4th centerbody 221 of at least one arcuation, is set to the 4th centerbody
4th protrusion 222 of multiple parallel arrangements of 221 outer arc ends and it is set to the multiple of 221 inner arc end of the 4th centerbody
5th protrusion 223.Wherein, the 4th protrusion 222 is bar shaped plate structure, can be held between the 4th adjacent protrusion 222
Receive the protrusion of lead unit (not shown) adjacent thereto；5th protrusion 223 is triangle plate structure, and the
Five protrusions 223 can be just between the adjacent third protrusion 212 of privates unit 21.
It should be appreciated that the arcuation size of the 4th centerbody 221 in privates unit 22 and the set the 4th convex
Out portion 222 and particular number, the position of the 5th protrusion 223 etc. can sets itself according to the actual situation, need to only guarantee set
The 4th protrusion 222 set and the 5th protrusion 223 can be mutually nested and movable with the realization of the protrusion of adjacent wires unit
The connection relationship of connection.
In addition, it should be understood that Fig. 3 show a part of the conductor structure of interception, whole conductor structure is by alternately
Privates unit 21 and privates unit 22 composition of arrangement.It certainly, can also further comprise it in conductor structure
This is no longer described in detail in the lead unit of his shape, the embodiment of the present invention.
Preferably, privates unit 21 is set as flexible conducting material, so as to during stretching, privates list
Member 21 can be servo-actuated in privates unit 22.
The conductor structure that third embodiment of the invention provides is by being arranged multiple lead units, and by by lead unit
Centerbody is set as arc and circular mode, realizes the purpose for making lead unit carry out arcuation extension, and then improve and lead
Cable architecture bends the direction arbitrariness of scaling operation, and the three-dimensional to advanced optimize flexible display apparatus is conformal or conformal show mentions
Precondition is supplied.
In an embodiment of the present invention, a kind of display device is provided, which includes that any of the above-described embodiment is mentioned
The conductor structure of confession.
Fig. 5 a to Fig. 5 d show the cross section structure in the preparation process of the conductor structure of fourth embodiment of the invention offer
Schematic diagram.As shown in Fig. 5 a to Fig. 5 d, the Main Stage for the conductor structure preparation process that fourth embodiment of the invention provides is：
First stage：As shown in Figure 5 a, a stretchable substrate 4 is stacked on underlay substrate 3 first, then can drawn
Stretch deposited sacrificial layer 5 on substrate 4.
Preferably, underlay substrate 3 is glass substrate, is mainly used for carrying the structures such as stretchable substrate 4 and sacrificial layer 5,
To facilitate subsequent technique to realize.
Preferably, the material of sacrificial layer 5 is silica, silicon nitride, any one in polyimides.It should be appreciated that sacrificial
Domestic animal layer 5 is for making the protrusion of conductor layer 6 be suspended on stretchable substrate 4, thus for the final stretching bending for realizing conductor structure
Operation provides structure basis.Further, since the materials such as silica, silicon nitride, polyimides have excellent electrical insulation capability, because
This by sacrificial layer 5 be set as the materials such as silica, silicon nitride, polyimides can be substantially prevented from the protrusion of conductor layer 6 with can
There is adhesion situation in stretching substrate 4, easily to realize that the bending scaling operation of conductor structure provides advantageous premise, thus finally
Realize the purpose for improving product yield.
Second stage：As shown in Figure 5 b, processing is patterned to the sacrificial layer of deposition 5.
It should be appreciated that the graphical treatment carried out to sacrificial layer 5 is the specific structure based on the conductor layer 6 wanted to set up
It carries out.
In an embodiment of the present invention, using operations such as exposure development etchings to 5 graphical treatment of sacrificial layer, formation makes institute
State the structure that sacrificial layer 5 has through hole.Since exposure development operates accuracy with higher, grasped using exposure development
Work can effectively improve the accuracy of 5 graphical treatment of sacrificial layer.
Phase III：As shown in Figure 5 c, conductive material is deposited on the sacrificial layer 5 after graphical treatment, is led to be formed
Line layer 6, the conductive layer 6 are contacted by the through hole with the stretchable substrate 4.
In an embodiment of the present invention, on sacrificial layer 5 deposit conductive material after, to the conductive material deposited again into
Row etching operation, to enable deposited conductive material to ultimately form specific conductor structure (i.e. conductor layer 6), thus most
The purpose of the adaptability and widespread popularity that improve conductor structure provided in an embodiment of the present invention is realized eventually.
Fourth stage：As fig 5d, remove underlay substrate 3 and sacrificial layer 5, be in conductor layer 6 and be partly suspended on and can draw
The state of substrate 4 is stretched, and flexible bending operation is carried out to conductor layer 6 based on stretchable substrate 4 according to the actual situation.
It should be appreciated that half vacant state of conductor layer 6, refers to that the part that conductor layer 6 is contacted with stretchable substrate 4 is to lead
The centerbody of cable architecture, overhanging portion are the protrusion of conductor structure, i.e. the certain parts of conductor layer 6 are contacted with stretchable substrate 4,
Rest part is not contacted with stretchable substrate 4.That is, in conductor layer 6, the thickness for the centerbody that lead unit is included
Greater than the thickness of protrusion, and in the side adjacent with stretchable substrate 4, centerbody protrudes from protrusion, conductor layer 6 by
The contact connectio with stretchable substrate 4 is realized in centerbody, to realize conducting wire by means of centerbody and stretchable substrate 4
The bending scaling operation of layer 6.Wherein, the extending direction of center body thickness is the direction perpendicular to extended planar where protrusion.
It should be appreciated that being realized that the bending of conductor layer 6 is flexible by means of the contact connectio between centerbody and stretchable substrate 4
The mode of operation can sufficiently improve stress homogeneity of lead unit during bending scaling operation, and then prevent
Lead unit stretches insufficient phenomenon, to promote the stability in product use process.
The conductor structure preparation process that fourth embodiment of the invention provides passes through the deposited sacrificial on stretchable substrate
Layer, is patterned processing to the sacrificial layer of deposition, and conductive material is deposited on the sacrificial layer after graphical treatment to be formed
The mode of conductor layer realizes the precision preparation of conductor structure, thus for the multi-direction bending of conductor structure is better achieved
It stretches and the conformal or conformal display of flexible display apparatus provides structure premise.
Fig. 6 show the flow diagram of the conductor structure preparation method of fifth embodiment of the invention offer.Such as Fig. 6 institute
Show, the conductor structure preparation method that fifth embodiment of the invention provides includes：
Step S1：The deposited sacrificial layer on substrate.
Preferably, substrate is stretchable substrate.Since stretchable substrate has bending expansion performance, in stretchable base
The flexibility of preparation can be greatly improved in the preparation of the enterprising row conductor structure of plate, and in the enterprising row conductor structure of stretchable substrate
Preparation can provide precondition for the subsequent purpose for realizing that conductor layer be servo-actuated in substrate.
In an embodiment of the present invention, substrate is with the Die and mould plate with final products same shape.
Step S2：Sacrificial layer is patterned processing.
Step S3：Conductor layer is deposited on sacrificial layer after graphical treatment, wherein the conductor layer for depositing formation includes tool
There is the lead unit of protrusion, and realizes connection that is mutually nested and being flexibly connected using protrusion between adjacent wires unit
Relationship.
Step S4：Remove sacrificial layer.
In actual application process, one layer of sacrificial layer, the knot based on conductor layer to be prepared are deposited first on substrate
Structure is patterned processing to sacrificial layer, conductive material is deposited on the sacrificial layer after graphical treatment then to form conducting wire
Layer, wherein being formed by conductor layer includes realizing mutually between multiple lead units and adjacent wires unit by protrusion
Connection relationship that is nested and being flexibly connected, finally gets rid of sacrificial layer.
The conductor structure preparation method that fifth embodiment of the invention provides by means of patterned sacrificial layer by being led
The mode of the deposition preparation of line layer, realizing preparation has multiple lead units, and is mutually embedding between adjacent wires unit
Set and be flexibly connected conductor structure purpose, and then realize enable prepared conductor structure neatly carry out bending stretch
Contract the purpose operated.
Fig. 7 show the flow diagram of the conductor structure preparation method of sixth embodiment of the invention offer.In the present invention
Extend sixth embodiment of the invention, sixth embodiment of the invention and the 5th basic phase of embodiment on the basis of 5th embodiment
Together, narration difference, something in common repeat no more emphatically below.In the conductor structure preparation that sixth embodiment of the invention provides
In method, substrate is stretchable substrate, and conductor layer is partly vacantly set to the stretchable substrate (i.e. in conductor layer in lead unit
Heart body and stretchable substrate connect, and the protrusion of lead unit is suspended on stretchable substrate).
As shown in fig. 7, the conductor structure preparation method that sixth embodiment of the invention provides is in step compared with the 5th embodiment
Further comprise after rapid S4：
Step S5：Obtain the crooked process radius of conductor layer.
In an embodiment of the present invention, the crooked process radius of conductor layer is mainly the shape and protrusion according to each lead unit
What the parameters such as the protrusion length in portion were set.During actual setting, it shall be guaranteed that set crooked process radius will not
Protrusion that is mutually nested and being flexibly connected is set to occur being detached from situation.
In an alternative embodiment of the invention, the crooked process radius of conductor layer is mainly carried out according to the actual requirement of final products
Setting.For example, final products are the vehicle-carrying display screen of biaxial bending, then then needing the actual size according to vehicle-carrying display screen
And the parameters such as bending radian carry out the setting of crooked process radius.
Step S6：Deformation fixed operation is carried out to conductor layer based on crooked process radius and stretchable substrate.
It should be appreciated that due in conductor layer the centerbody of lead unit and stretchable substrate be to contact to be fixedly connected,
During carrying out bending stretched operation (i.e. deformation operation) to stretchable substrate, contacts with stretchable substrate and to be fixedly connected
The centerbody of lead unit can be such that conductor layer is servo-actuated in stretchable substrate, therefore, can be based on stretchable substrate to conductor layer
Carry out bending stretched operation.
In an embodiment of the present invention, the fixed operation of conductor layer is carried out using heating.The specific implementation of heating
Process is：When conductor layer bending is stretched to state actually required, heating operation is carried out to conductor layer.It should be appreciated that bending
Conductor layer after stretching can contact at high temperature it is even closer, it is especially mutually nested and be flexibly connected protrusion between, by
Contact resistance, therefore the side of the fixed operation using heating realization conductor layer can be greatly reduced in the conductor layer of close contact
Formula keeps the conductive connection between protrusion that is mutually nested and being flexibly connected more stable, to finally realize enhancing conductor layer
The effect of conductive stability.
In actual application, the crooked process radius data for obtaining conductor layer first, are then based on the crooked process radius of acquisition
Data and stretchable substrate carry out bending stretched operation to conductor layer, stop when conductor layer bending is stretched to state actually required
Stretched operation is only bent, and conductor layer is fixed.
The conductor structure preparation method that sixth embodiment of the invention provides is based on by obtaining the crooked process radius of conductor layer
Acquired crooked process radius and stretchable substrate carry out the mode of deformation fixed operation to conductor layer, realize fixed deformed state
Conductor structure preparation, to make for conductor structure to be applied to become possibility with the final products of fixed bending form.
In addition, can greatly enhance the contact compactness between lead unit, in turn when carrying out the fixation of conductor layer using heating
Realize the purpose of the conductive stability of enhancing conductor layer.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, made any modification, equivalent replacement etc. be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of conductor structure, which is characterized in that including lead unit, the lead unit includes protrusion, adjacent described to lead
Mutually nested and flexible connection between the protrusion of line unit.
2. conductor structure according to claim 1, which is characterized in that the number for the protrusion that the lead unit includes
Amount be it is multiple, and the protrusion is strip structure, multiple protrusions parallel arrangement at equal intervals.
3. conductor structure according to claim 1, which is characterized in that the end in the extension direction of the protrusion is provided with
Positive stop strip.
4. conductor structure according to claim 1, which is characterized in that the lead unit further comprises centerbody, institute
It states protrusion and is connected to the centerbody.
5. conductor structure according to claim 4, which is characterized in that the thickness of the centerbody is greater than the protrusion,
Wherein, the extending direction of the thickness is the direction perpendicular to extended planar where the protrusion.
6. a kind of display device, which is characterized in that including conductor structure as claimed in claim 1 to 5.
7. a kind of conductor structure preparation method, which is characterized in that including：
The deposited sacrificial layer on substrate；
The sacrificial layer is patterned processing；
Conductor layer is deposited on the sacrificial layer after graphical treatment, wherein the conductor layer for depositing formation includes having
The lead unit of protrusion, and realize mutually nested using the protrusion between the adjacent lead unit and be flexibly connected
Connection relationship；
Remove the sacrificial layer.
8. conductor structure preparation method according to claim 7, which is characterized in that the substrate is stretchable substrate, institute
It states conductor layer and is partly vacantly set to the stretchable substrate, further comprise after the removal sacrificial layer step：
Obtain the crooked process radius of the conductor layer；
Deformation fixed operation is carried out to the conductor layer based on the crooked process radius and the stretchable substrate.
9. conductor structure preparation method according to claim 8, which is characterized in that the deformation fixed operation is using heating
Method carries out.
10. conductor structure preparation method according to claim 7, which is characterized in that the material of the sacrificial layer is oxidation
Silicon, silicon nitride, any one in polyimides.
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