CN108827734A - A kind of sample preparation apparatus and working method - Google Patents
A kind of sample preparation apparatus and working method Download PDFInfo
- Publication number
- CN108827734A CN108827734A CN201810862641.6A CN201810862641A CN108827734A CN 108827734 A CN108827734 A CN 108827734A CN 201810862641 A CN201810862641 A CN 201810862641A CN 108827734 A CN108827734 A CN 108827734A
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- sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
- G01N2001/2873—Cutting or cleaving
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention proposes a kind of sample preparation apparatus and working method, and including platform part and the cutting part being fixed in platform part, sample includes exceptions area and non-exceptions area；Platform part includes for placing the article carrying platform of sample, the clamping device being located on article carrying platform and scale positioned at article carrying platform surface, and sample is fixed on article carrying platform by clamping device；Cutting part includes pedestal and the cutting member on pedestal；Cutting part clamps article carrying platform, and cutting member is mobile to be set on the base, and is cut to non-exceptions area.By increasing moveable cutting member, it is accurately positioned abnormal position, guarantees sliver cutter track diameter collimation, increases sample preparation success rate, improves bad analysis efficiency, more acurrate improve more quickly for product provides direction.
Description
Technical field
The invention belongs to the technical fields of panel jig, and in particular to a kind of sample preparation apparatus and working method.
Technical background
In TFT-LCD liquid crystal panel field, in the failure mode analysis method of product, fixed point point carries out defect mistake
Effect pattern analysis has vital effect.For fixed point location defect failure pattern analysis, focused ion beam is used at present
Cutting or scanning electron microscope analysis, major way are carried out in a manner of the manual sample preparation of personnel.By sliver knife in point to be observed
It is nearby cut, allows crack growth area by tested point；After cutting, tested point section is put into scanning electron microscope and carries out in next step
Analysis.
However limited sample size is analyzed for the tiny flaw in Display panel at present, sample size is other in the micron-scale,
There are difficulty for personnel's manual cutting；The manual sliver of personnel simultaneously cuts sample surfaces using sliver knife, will cause precision not
It is high；Using the ductility of crackle to abnormal fractograph analysis, personnel visually utilize sliver knife to cut, and it is logical not can guarantee crack growth area
Abnormal position is crossed, analysis success rate is low.
Summary of the invention
Technical solution provided by the invention is as follows：
A kind of sample preparation apparatus comprising platform part and the cutting part being fixed in the platform part, sample includes different
Normal area and non-exceptions area；The platform part includes for placing the article carrying platform of the sample, being located on the article carrying platform
Clamping device and scale positioned at the article carrying platform surface, the sample are fixed on article carrying platform by clamping device；
The cutting part includes pedestal and the cutting member on the pedestal；Wherein, the cutting part clamps article carrying platform, described
Cutting member is mobile to be set on the base, and is cut to the non-exceptions area.
Preferably, the scale is parallel with four sides of article carrying platform, and reference axis includes X-axis and Y-axis, wherein described different
Normal area is located at the central point of the reference axis, and the negative direction of the Y-axis is equipped with datum mark.
Preferably, the pedestal includes bayonet and displacement platform, and the cutting part is clamped on article carrying platform by bayonet, institute
Cutting member is stated to be contained in displacement platform and move along displacement platform.
Preferably, the cutting member include cuts main body, positioned at the cuts main body lower part scribing wheel, be located at it is described
The mobile bar of cuts main body side and pressing member positioned at the cuts main body top；Wherein, the mobile bar control cutting
The movement of break bar, the pressing member adjust the height of scribing wheel.
Preferably, the displacement platform also has chamber and is respectively communicated with the first channel and the second channel of the chamber,
The cuts main body accommodates in the chamber, and the scribing wheel is located at displacement platform lower outside, the pressing member and mobile bar
It is partially received in the first channel and the second channel respectively.
Preferably, the datum mark is the farthest contact point of scribing wheel and sample surfaces.
The present invention also provides a kind of working methods of sample preparation apparatus, include the following steps：
S1, the connection platform part and cutting part, adjust the height and position of the cutting part；
S2, the sample are placed on the article carrying platform of platform part, and the exceptions area is located at the central point of scale reference axis
Position, and the sample that is fixedly clamped；
S3, the cutting member are moved to reference point location；
S4, the mobile cutting member, cut the non-exceptions area；
S5, the sample is removed, divides the exceptions area.
Preferably, the S2 step is and described specifically, in the bayonet of the carrying platform insertion cutting part of the platform part
Cutting part is in the Y-axis negative direction of scale on carrying platform.
Preferably, the S3 step further comprises the steps：
S31, the distalmost end that cutting member is moved to displacement platform using the mobile bar, the center of the scribing wheel and mark
The datum mark of ruler is overlapped；
S32, pressing member control scribing wheel move down, the non-exceptions area table of the scribing wheel contact sample
Face.
Preferably, after the step S5 is specifically, remove the sample, the cutting road in the non-exceptions area of the sample is utilized
Diameter zones of extensibility is split preferably the exceptions area of the sample, and the article carrying platform further includes sensing device and scan line,
The sensing device is arranged on the first collet and the second collet, and the scan line is arranged on chain piece surface.
Compared with prior art, sample preparation apparatus of the invention and working method, by accurately controlling cutting member position,
It is accurately positioned abnormal position, guarantees sliver cutter track diameter collimation, increases sample preparation success rate, improves bad analysis efficiency.
Detailed description of the invention
Below by clearly understandable mode, preferred embodiment is described with reference to the drawings, the present invention is given furtherly
It is bright.
Fig. 1 show the structural schematic diagram of sample preparation apparatus of the present invention；
Fig. 2 show the structural schematic diagram of sample preparation apparatus platform part of the present invention；
Fig. 3 show the structural schematic diagram of sample preparation apparatus cutting part of the present invention；
Fig. 4 show the structural schematic diagram of sample preparation apparatus pedestal of the present invention；
Fig. 5 show the front view of sample preparation apparatus pedestal of the present invention；
Fig. 6 show the side view of sample preparation apparatus pedestal of the present invention；
Fig. 7 show the structural schematic diagram of sample preparation apparatus cutting member of the present invention；
Fig. 8 show the front view of sample preparation apparatus cutting member of the present invention；
Fig. 9 show the side view of sample preparation apparatus cutting member of the present invention.
Specific embodiment
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, Detailed description of the invention will be compareed below
A specific embodiment of the invention.It should be evident that drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing, and obtain other embodiments.
To make simplified form, part related to the present invention is only schematically shown in each figure, they are not represented
Its practical structures as product.In addition, there is identical structure or function in some figures so that simplified form is easy to understand
Component only symbolically depicts one of those, or has only marked one of those.Herein, "one" is not only indicated
" only this ", can also indicate the situation of " more than one ".
Technical solution of the present invention is discussed in detail with specific embodiment below.
Embodiment
Sample preparation apparatus of the invention, such as Fig. 1, including platform part 1 and the cutting part 2 being fixed in platform part 1, sample
10 are placed in platform part 1, and cutting part 2 is for being positioned and being cut to sample 10.
As shown in Fig. 2, platform part 1 includes for placing the article carrying platform 11 of sample 10, being arranged on article carrying platform 11
Clamping device 12 and scale 13 set on 11 surface of article carrying platform, sample 10 are fixed on article carrying platform 11 by clamping device 12
On, and scale 13 is used for the abnormal position of localizing sample 10.Sample 10 includes exceptions area 101 and non-exceptions area 102.
Wherein, article carrying platform 11 uses antistatic hardness material, convenient for providing good bearing capacity to sample 10, and carries
The surface of object platform 11 has good flatness, prevents from causing deep mixed cause when cutting sample 10.Clamping device
12 can use various ways, such as clamping strip, clamping card 121 or compactor etc., it is preferable that the present embodiment is using clamping
Card 121 is used as clamping device 12, and clamping card 121 uses antistatic material, and elongated cambered design, and presss from both sides
Hold one end of piece 121 is fixed on carrying platform 11, and the other end is free end.In use, the free end that card 121 will be clamped
It lifts, sample 10 is placed, so that sample 10 is fixed on carrying platform 11.Scale 13 is for sentencing the position of sample 10
It is disconnected, it is therefore preferable to which that white line can be significantly shown on article carrying platform 11.Also, with centimetre (cm) on scale 13
For the scale of unit, minimum scale precision is millimeter (mm)；In addition, scale 13 is parallel with four sides of article carrying platform 11 comprising X
Axis square, X-axis negative direction, Y-axis positive direction and Y-axis negative direction, for the determinating reference as collimation.Wherein, it is marking
On the Y-axis scale of ruler 13, it is equipped with datum mark at one, the cutting distalmost end as cutting part 2, it is preferable that datum mark is arranged in Y-axis
In negative direction, the scale overstriking at Y=-5cm.Preferably, clamping card 121 is parallel to the Y-axis setting of scale 13.
Specifically, sample 10 is placed on article carrying platform and adjusts position by scale 13, so that the exceptions area of sample 10
The center position that the 101 XY axis for being located at scale 13 cross.
As shown in figure 3, cutting part 2 includes pedestal 21 and the cutting member 22 on pedestal 21.Make for the ease of installation
With pedestal 21 and cutting member 22 are all made of hard material, it is preferable that pedestal 21 and cutting member 22 are all made of metal material.Pedestal
21 for carrying cutting member 22 and cutting part 2 being fixed on carrying platform 11, and cutting member 22 is used for cutting sample 10.
As shown in Figure 4-Figure 6, pedestal 21 includes bayonet 211 and displacement platform 212, and cutting part 2 is clamped in load by bayonet 211
On object platform 11.The height of the interior section of bayonet 211 and horizontal plane, bayonet 211 is identical as the thickness of carrying platform 11, holds
Carrying platform 11 is embedded into bayonet 211, so that cutting part 2 is fixedly connected with platform part 1.This outer frame 21 may include multiple
The structure of bayonet 211, each bayonet 211 is identical, so as to adjust clip position of the carrying platform 11 on pedestal 21, thus
It adjusts cutting member 22 and arrives the distance between sample 10.Preferably, pedestal 21 includes two bayonets 211, and carrying platform 11 is clamped in
In the bayonet 211 of the bottom of pedestal 21.In installation pedestal 21, according to the installation site of clamping card 121, it is preferable that protect
The main part for demonstrate,proving pedestal 21 is parallel with the Y direction of scale 13 on carrying platform 11, further, in displacement platform 212
Heart line is Chong Die with the Y-axis of scale 13.Cutting member 22 is contained in the displacement platform 212 of pedestal 21, and cutting member 22 is in displacement platform
Cutting position is movably adjusted in 212.Since displacement platform 212 is also parallel with the Y direction of scale 13, cutting member 22
Only mobile adjustment can be carried out in Y direction.Preferably, pedestal 21 is fixed on the Y-axis negative direction of carrying platform 11, cutting member 22
Only mobile adjustment can be carried out in Y-axis negative direction.
As shown in Fig. 5-Fig. 6, displacement platform 212 includes chamber 2121 and the first channel for being respectively communicated with chamber 2121
2122 and second channel 2123, the first channel 2122 is perpendicular to the upper surface of displacement platform 212, and the second channel 2123 is perpendicular to displacement
The side surface of platform 212, it is preferable that the second channel 2123 is the left-hand face setting opening in displacement platform 212.Chamber 2121,
First channel 2122 is identical with the length of the second channel 2123.
As shown in figs. 7 to 9, cutting member 22 includes cuts main body 221, the scribing wheel positioned at 221 lower part of cuts main body
222, the pressing member 224 positioned at the mobile bar 223 of 221 side of cuts main body and positioned at 221 top of cuts main body；Scribing wheel
222, mobile bar 223 and pressing member 224 are detachably arranged in cuts main body 221.Wherein, in order to ensure cutting member 22
Hardness, cuts main body 221 uses metal material, and shape is Upper cylindrical lower taper assembly shape, positioned at being contained in chamber
In room 2121；Scribing wheel 222 is fixed on the apex of 221 taper of cuts main body, and stretches out the lower surface of displacement platform 212,
Consequently facilitating sample 10 is cut and is observed, it is preferable that scribing wheel 222 uses MDI cutter head, can be used for glass panel
Cutting；Pressing member 224 is partially received in the first channel 2122, is used to control moving up and down for scribing wheel 222, thus
Adjust scribing wheel 222 height and position, when needing to cut sample 10, pressing member 224 control scribing wheel 222 to
Lower movement simultaneously touches 10 surface of sample, realizes cutting, and after the completion of cutting, pressing member 224 controls scribing wheel 222 to moving up
It is dynamic, it realizes and separates with 10 surface of sample.Preferably, pressing member 224 is to push screw, and pressing member 224 and scribing wheel 222 connect
It connects, pressing member 224 controls moving up and down for scribing wheel 222 by thread helix.Mobile bar 223 is partially received in the second channel
In 2123, since the length of mobile bar 223 is greater than the depth of the second channel 2123, can be controlled and be cut by mobile bar 223
Cutter member 22 moves on displacement platform 212, to control the cut coverage of scribing wheel 222.
Since the first channel 2122 of displacement platform 212 is mobile for depressing part 224, chamber 2121 is used for cuts main body 221
Mobile, the second channel 2123 is mobile for mobile bar 223, and the Y in the direction of displacement platform 212 and scale 13 on carrying platform 11
Axis direction is parallel, and therefore, cutting member 22 also moves in the Y-axis direction, to ensure that the displacement collimation of scribing wheel 222.
Preferably, when cutting member 22 is located at the extreme position of Y-axis negative direction distalmost end of displacement platform 212, scribing wheel 222 and sample 10
Contact point be scale datum mark, i.e. the center line of cutting part 2 is Chong Die with the Y-axis of scale 13, and cutting member 22 is in Y-axis negative direction
Upper movement.
As shown in figs. 1-9, the working method of sample preparation apparatus of the invention is as follows：
S1, connecting platform portion 1 and cutting part 2 adjust the height and position of cutting part 2；
S2, sample 10 are placed on the article carrying platform 11 of platform part 1, and the exceptions area 101 of sample 10 is located in scale 13
Heart point position, and the sample 10 that is fixedly clamped；
S3, cutting member 22 are moved to the reference point location of scale 13；
S4, cutting member 22 are mobile to the Y-axis negative direction of scale 13, cut non-exceptions area 102；
S5, sample 10 is removed, divides exceptions area 101.
Wherein, step S2 is specifically, the carrying platform 11 of platform part 1 is embedded in the bayonet 211 of cutting part 2, and cutting part 2
In the Y-axis negative direction of scale 13 on carrying platform 11.
By this step, can be cut in order to the non-exceptions area for controlling to sample 10.
Wherein, step S3 may further include following steps：
S31, cutting member 22 is moved to using mobile bar 223 pedestal 21 displacement platform 212 distalmost end, scribing wheel
222 center is Chong Die with the datum mark of scale 13；
S32, pressing member 224 control scribing wheel 222 and move down, and contact 102 surface of non-exceptions area of sample 10.
Through the above steps, the collimation of cutting, and the range of cutting be can control.
Wherein, step S5 is specifically, using the cutting path zones of extensibility in the non-exceptions area 102 of sample 10, to sample 10
Exceptions area 101 be split.
By this step, sample preparation success rate can be increased.
Sample preparation apparatus and working method of the invention passes through increasing for the low success rate of problem of sample is prepared manually
Add moveable cutting member, be accurately positioned abnormal position, guarantee sliver cutter track diameter collimation, increase sample preparation success rate, improves not
Good analysis efficiency, it is more acurrate to provide direction more quickly for product improvement.
It should be noted that above-described embodiment can be freely combined as needed.The above is only of the invention preferred
Embodiment, but the present invention is not limited to the specific details in the above embodiment, it is noted that for the art
For those of ordinary skill, within the scope of the technical concept of the present invention, without departing from the principle of the present invention, it can also do
Several improvements and modifications out carry out a variety of equivalents to technical solution of the present invention, these improvement, retouching and equivalents
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of sample preparation apparatus comprising place the platform part of sample and the cutting part being fixed in the platform part, institute
Stating sample includes exceptions area and non-exceptions area；It is characterized in that,
The platform part include article carrying platform, the clamping device being located on the article carrying platform and be located at the article carrying platform table
The scale in face, the sample are fixed on article carrying platform by clamping device；
The cutting part includes pedestal and the cutting member on the pedestal；
Wherein, the cutting part is clamped on article carrying platform, and the cutting member is mobile to be set on the base, and to the non-exception
It is cut in area.
2. sample preparation apparatus according to claim 1, which is characterized in that four sides of the scale and article carrying platform are flat
Row, reference axis includes X-axis and Y-axis, wherein the exceptions area is located at the central point of the reference axis, and in the Y of the scale
Axis negative direction is equipped with datum mark.
3. sample preparation apparatus according to claim 1, which is characterized in that the pedestal includes bayonet and displacement platform, institute
It states cutting part to be clamped on article carrying platform by bayonet, the cutting member is contained in displacement platform and moves along displacement platform.
4. sample preparation apparatus according to claim 3, which is characterized in that the cutting member includes cuts main body, is located at
The scribing wheel of the cuts main body lower part, positioned at the cuts main body side mobile bar and be located at the cuts main body on
The pressing member in portion；Wherein, the movement of the mobile bar control scribing wheel, the pressing member adjust the height of scribing wheel.
5. sample preparation apparatus according to claim 4, which is characterized in that the displacement platform also has chamber, Yi Jifen
It is not connected to the first channel and the second channel of the chamber, the cuts main body accommodates in the chamber, and the scribing wheel position
In displacement platform lower outside, the pressing member and mobile bar are partially received in respectively in the first channel and the second channel.
6. sample preparation apparatus according to claim 5, which is characterized in that the datum mark is scribing wheel and sample table
The farthest contact point in face.
7. a kind of working method of sample preparation apparatus as claimed in any one of claims 1 to 6, which is characterized in that including as follows
Step：
S1, the connection platform part and cutting part, adjust the height and position of the cutting part；
S2, the sample are placed on the article carrying platform of platform part, and the exceptions area is located at the center position of scale reference axis,
And the sample that is fixedly clamped；
S3, the cutting member are moved to reference point location；
S4, the mobile cutting member, cut the non-exceptions area；
S5, the sample is removed, divides the exceptions area.
8. working method according to claim 7, which is characterized in that the S2 step is specifically, the platform part is held
Carrying platform is embedded in the bayonet of cutting part, and the cutting part is in the Y-axis negative direction of scale on carrying platform.
9. working method according to claim 7, which is characterized in that the S3 step further comprises the steps：
S31, the distalmost end that cutting member is moved to displacement platform using the mobile bar, the center of the scribing wheel and scale
Datum mark overlapping；
S32, pressing member control scribing wheel move down, the non-exceptions area surface of the scribing wheel contact sample.
10. working method according to claim 7, which is characterized in that the step S5 is specifically, remove the sample
Afterwards, using the cutting path zones of extensibility in the non-exceptions area of the sample, the exceptions area of the sample is split.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810862641.6A CN108827734A (en) | 2018-08-01 | 2018-08-01 | A kind of sample preparation apparatus and working method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810862641.6A CN108827734A (en) | 2018-08-01 | 2018-08-01 | A kind of sample preparation apparatus and working method |
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| CN108827734A true CN108827734A (en) | 2018-11-16 |
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| CN201810862641.6A Pending CN108827734A (en) | 2018-08-01 | 2018-08-01 | A kind of sample preparation apparatus and working method |
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| CN106596609A (en) * | 2016-12-15 | 2017-04-26 | 武汉新芯集成电路制造有限公司 | Method for making transmission electron microscope samples |
| CN207189755U (en) * | 2017-09-18 | 2018-04-06 | 河北韩杉新型装饰材料有限公司 | Cut fixing device in a kind of SPC floors |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004343131A (en) * | 2004-06-07 | 2004-12-02 | Hitachi Ltd | Method and device for analyzing sample |
| CN102699944A (en) * | 2012-06-26 | 2012-10-03 | 金红叶纸业集团有限公司 | Cutting device and clamping device thereof |
| CN103871917A (en) * | 2012-12-07 | 2014-06-18 | 中芯国际集成电路制造(上海)有限公司 | Method for preparing semiconductor failure analysis sample |
| CN203357464U (en) * | 2013-06-23 | 2013-12-25 | 四川海普工控技术有限公司 | Single-arm movable type mechanical arm |
| CN203994265U (en) * | 2014-08-13 | 2014-12-10 | 许江永 | Manual ceramic-tile cutting device |
| CN204269445U (en) * | 2014-11-21 | 2015-04-15 | 西南交通大学 | A kind of fatigue testing specimen precrack device |
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Effective date of registration: 20200910 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Applicant after: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Address before: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Applicant before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Applicant before: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Applicant before: Nanjing East China Electronic Information Technology Co.,Ltd. |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181116 |