CN108821565A - The preparation method of microchannel plate substrate for microarray - Google Patents
The preparation method of microchannel plate substrate for microarray Download PDFInfo
- Publication number
- CN108821565A CN108821565A CN201810510267.3A CN201810510267A CN108821565A CN 108821565 A CN108821565 A CN 108821565A CN 201810510267 A CN201810510267 A CN 201810510267A CN 108821565 A CN108821565 A CN 108821565A
- Authority
- CN
- China
- Prior art keywords
- glass
- multifilament
- stick
- microchannel plate
- plate substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
Abstract
The invention belongs to photoelectric materials and devices field, more particularly to a kind of preparation method of microchannel plate substrate for microarray, purpose is to improve the material composition of microchannel plate substrate, improve the consistency of pore size and the smoothness of inner wall, and then the performances such as gain, service life, noise that can greatly improve microchannel plate.The technical scheme is that：A kind of preparation method of microchannel plate substrate for microarray, capillary glass tube and capillary glass stick are drawn out using regular hexagon glass bar and glass tube first, capillary is lined up into hexagon multifilament stick, multifilament stick is pulled into a multifilament again, then a multifilament is lined up into secondary multifilament stick, secondary multifilament stick is pulled into secondary multifilament, secondary multifilament and capillary glass stick are lined up into multifilament stick three times, finally with fusion pressure furnace fusion pressure form, cut, polish after obtain microchannel plate substrate.
Description
Technical field
The invention belongs to photoelectric materials and devices field, and in particular to a kind of preparation side of microchannel plate substrate for microarray
Method.
Background technique
The function of microchannel plate is can to amplify to small-signal, is mainly used for the high energy grain such as X-ray, electronics, ion
The fields such as son detection, for example low-light level imaging and photon counting are carried out, it is widely applied in medical treatment, science and technology, national defence at present.
The microchannel plate of new generation based on technique for atomic layer deposition of American R & D, has the characteristics that service life length, high gain, noise are low,
The service life of navigation satellite was extended to 15 years by original 5 years by the time service atomic clock being successfully used on navigation satellite, was had huge
Big economic benefit.The microchannel plate of domestic goods is mainly two traditional generation microchannel plates at present, with new generation product phase
Than conventional microchannel plate has a long way to go on the key indexes such as service life, gain and noise, seriously constrains China's navigation satellite
Precision and service life.
Restrict the conventional microchannel plate service life, gain and noise key factor first is that the performance of microchannel plate substrate.It is first
First, conventional microchannel plate substrate is the microwell array substrate using acid extracting preparation.The micropore that its acid dissolution comes is tapered, aperture
Roundness is poor, and sour molten bore area is of poor quality.The low, noise using microchannel plate resolution ratio made from the microchannel substrate
Greatly, the service life is short.Secondly, microchannel plate substrate is glass material, traditional acid extracting will consider the molten rate of acid of material, therefore micro- logical
Lead and alkali metal are usually contained in the glass ingredient of guidance tape substrate, and alkali metal is usually accompanied by isotope, the decay of isotope
It is the another key restriction factors for generating noise, influencing service life.
Summary of the invention
It is an object of the invention to solve existing microchannel plate substrate to microchannel plate resolution ratio, noise and service life
Adverse effect, and a kind of preparation method of microchannel plate substrate is proposed, microchannel plate substrate inner wall light prepared by this method
Cunning, micropore size consistency are good, using technique for atomic layer deposition in microchannel plate substrate inner wall deposit functional layers, can prepare
The low microchannel plate of service life length, high gain, noise.
In order to complete above-mentioned purpose, technical solution proposed by the invention is：
A kind of preparation method of microchannel plate substrate for microarray, is characterized in that, includes the following steps：
1) by circumscribed circle diameter be 20-40mm regular hexagon glass bar and glass tube be drawn into circumscribed circle diameter respectively and be
The regular hexagon capillary glass stick and glass capillary of 0.5-2.5mm；
2) by the glass capillary drawn in step 1), close packed array is straight at circumscribed circle in hexagon row's silk mold
Diameter is the regular hexagon multifilament stick of 20-45mm；
3) multifilament stick is drawn into multifilament of regular hexagon that circumscribed circle diameter is 0.5-2.5mm；
4) by the multifilament regular hexagon that close-packed arrays are 10-25mm at circumscribed circle diameter in hexagon row's silk mold
Secondary multifilament stick；
5) secondary multifilament stick is drawn into the secondary multifilament of regular hexagon that circumscribed circle diameter is 0.5-2.5mm with wire-drawer-tower；
6) that the capillary glass stick drawn in step 1) and secondary multifilament are lined up circumscribed circle in hexagon row's silk mold is straight
Multifilament stick, the outside of the stick of multifilament three times are the capillary glass drawn in step 1) to the regular hexagon that diameter is 10-30mm three times
Stick, inside are secondary multifilament.
7) fusion pressure in fusion pressure furnace will be put by multifilament stick three times, regular hexagon molding multifilament stick, the fusion pressure is obtained after heat preservation
Fusion pressure temperature when furnace fusion pressure is 650-740 DEG C；
8) multifilament stick dicing will be formed, microchannel plate substrate is obtained after ground polishing.
Further, in the step 7) three times multifilament stick fusion pressure when soaking time be 10 hours.
Further, the material of the glass of the glass bar and glass tube is colouless optical glass.
Further, the material of the glass of the glass bar and glass tube is the colourless optics glass that moisture resistance stability is level-one
Glass.
Further, the glass material of the glass bar and glass tube is the colouless optical glass of not alkali metal containing.
Further, it is ZK4, ZK5, ZBaF1, ZBaF2 or ZBaF3 that the material of the glass bar and glass tube, which is the trade mark,
Optical glass.
Compared with the prior art, the advantages of the present invention are as follows：
1, microchannel plate substrate of the invention is accumulated by the wire drawing of regular hexagon glass bar and glass tube, micropore inwall
Smooth, aperture is unanimously good, overcomes the coarse defect with aperture roundness difference of substrate inner wall quality prepared by acid extracting, utilizes
Technique for atomic layer deposition can significantly improve the performance of microchannel plate in above-mentioned microchannel plate substrate inner wall deposit functional layers, preparation
The low microchannel plate of service life length, high gain, noise out.
2, acid molten rate of the present invention without considering material, selects moisture resistance stability for level-one, and the not nothing of alkali metal containing
Color glass will not generate isotope decay phenomenon as baseplate material, can further decrease the noise of microchannel plate, extend and use
Service life.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of microchannel plate substrate of the invention；
Fig. 2 is the flow chart of microchannel plate base plate preparation method of the invention；
Fig. 3 is the schematic diagram of microchannel plate substrate preparation of the invention；
Fig. 4 is the partial enlarged view of microchannel plate substrate prepared by the embodiment of the present invention one.
In figure：1- glass bar, 2- glass tube, 3- capillary glass stick, 4- glass capillary, 5- multifilament stick, multifilament of 6-,
Bis- multifilament sticks of 7-, bis- multifilament of 8-, 9- multifilament stick three times, 10- form multifilament stick, 11- microchannel plate substrate, 111- substrate,
The microchannel 112-.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in embodiment is clearly and completely described, the following examples are intended to illustrate the invention, but
It is not intended to limit the scope of the invention.
Fig. 1 shows microchannel plate substrate 11 provided by the invention, and multiple microchannels 112 are distributed on substrate 111, described
The preparation flow of microchannel plate substrate is referring to figs. 2 and 3.
Embodiment one
A kind of preparation method of microchannel plate substrate for microarray, includes the following steps：
1) ZK4 glass bar is processed by the regular hexagon glass bar 1 that circumscribed circle diameter is 20mm by cold machining process；It will
The glass tube of ZK4 is processed into that diameter of bore is 20mm, circumscribed circle diameter is 24mm regular hexagon glass tube 2.
2) the regular hexagon glass bar 1 of processing is drawn into the regular hexagon capillary glass that outer diameter is 1.87mm with wire-drawer-tower
The regular hexagon glass tube 2 of processing is drawn into the regular hexagon glass capillary 4 that outer diameter is 0.98mm by stick 3；
3) by the glass capillary of drawing 4, tightly packed circumscribed circle diameter of lining up is 30.5mm in hexagon row's silk mold
Regular hexagon multifilament stick 5；
4) multifilament stick 5 is drawn into multifilament 6 of regular hexagon that circumscribed circle diameter is 2mm with wire-drawer-tower；
5) multifilament 6 of drawing is lined up into the regular hexagon two that circumscribed circle diameter is 10mm in hexagon row's silk mold
Secondary multifilament stick 7；
6) secondary multifilament stick 7 is drawn into the secondary multifilament 8 that circumscribed circle diameter is 1.87mm with wire-drawer-tower；
7) that the capillary glass stick 3 drawn in secondary multifilament and step 2) is lined up circumscribed circle in hexagon row's silk mold is straight
The regular hexagon multifilament stick 9 three times that diameter is 20mm, wherein outermost 2 circle of multifilament stick 9 is the capillary glass drawn in step 2) three times
Glass stick 3, inside are the secondary multifilament 8 closely come in the middle part of capillary glass stick layer；
8) fusion pressure in fusion pressure furnace will be put by multifilament stick 9 three times, and will keep the temperature 10 hours at 730 DEG C, and obtain regular hexagon molding
Multifilament stick 10；
9) molding multifilament stick 10 is cut into the thin slice of 0.5mm thickness, microchannel plate substrate 11 is obtained after ground polishing.
Fig. 4 is the partial enlarged view of substrate manufactured in the present embodiment, it can be seen that micropore size is uniform, and array is neat, micro-
Bore dia is about 10 microns.
Embodiment two：
A kind of preparation method of microchannel plate substrate for microarray, includes the following steps：
1) ZBaF1 glass bar is processed by the regular hexagon glass bar 1 that circumscribed circle diameter is 20mm by cold machining process；
By the sharp processing of ZBaF1 glass tube at diameter of bore be 20mm, circumscribed circle diameter is 24mm regular hexagon glass tube 2.
2) the regular hexagon glass bar 1 of processing is drawn into the regular hexagon capillary glass stick that outer diameter is 1mm with wire-drawer-tower
3, the regular hexagon glass tube 2 of processing is drawn into the regular hexagon glass capillary 4 that outer diameter is 1.5mm；
3) by the glass capillary of drawing 4, tightly packed circumscribed circle diameter of lining up is 25mm's in hexagon row's silk mold
Regular hexagon multifilament stick 5；
4) multifilament stick 5 is drawn into the multifilament 6 that circumscribed circle diameter is 2mm with wire-drawer-tower；
5) multifilament 6 of drawing is lined up into the regular hexagon two that circumscribed circle diameter is 10mm in hexagon row's silk mold
Secondary multifilament stick 7；
6) secondary multifilament stick 7 is drawn into the secondary multifilament 8 that circumscribed circle diameter is 1mm with wire-drawer-tower；
7) that the capillary glass stick 3 drawn in secondary multifilament and step 2) is lined up circumscribed circle in hexagon row's silk mold is straight
The regular hexagon multifilament stick 9 three times that diameter is 25mm, wherein outermost 2 circle of multifilament stick 9 is the capillary glass drawn in step 2) three times
Glass stick 3, inside are the secondary multifilament 8 closely come in the middle part of capillary glass stick layer；
8) fusion pressure in fusion pressure furnace will be put by multifilament stick 9 three times, and will keep the temperature 10 hours at 690 DEG C, and obtain molding multifilament stick 10；
9) molding multifilament stick 10 is cut into the thin slice of 0.5mm thickness, microchannel plate substrate 11 is obtained after ground polishing.
The micro-pore diameter for the substrate that the present embodiment is prepared is about 10 microns, and partial enlarged view is similar to Fig. 4.
It should be noted that has been described above is only a preferred embodiment of the present invention, for those of ordinary skill in the art
For, without departing from the concept of the premise of the invention, various modifications and improvements can be made, these belong to the present invention
Protection scope.
Claims (6)
1. a kind of preparation method of microchannel plate substrate for microarray, which is characterized in that include the following steps：
1) regular hexagon glass bar (1) and glass tube (2) that circumscribed circle diameter is 20-40mm are drawn into circumscribed circle diameter respectively
For the regular hexagon capillary glass stick (3) and glass capillary (4) of 0.5-2.5mm；
2) by the glass capillary (4) drawn in step 1) in hexagon row's silk mold close packed array at circumscribed circle diameter
For the regular hexagon multifilament stick (5) of 20-45mm；
3) multifilament stick (5) is drawn into multifilament (6) of regular hexagon that circumscribed circle diameter is 0.5-2.5mm；
4) by a multifilament (6) regular hexagon that close-packed arrays are 10-25mm at circumscribed circle diameter in hexagon row's silk mold
Secondary multifilament stick (7)；
5) secondary multifilament stick (7) is drawn into the secondary multifilament of regular hexagon that circumscribed circle diameter is 0.5-2.5mm with wire-drawer-tower
(8)；
6) the capillary glass stick (3) drawn in step 1) and secondary multifilament (8) are lined up into circumscribed circle in hexagon row's silk mold
Multifilament stick (9), the outside of the stick of multifilament three times (9) are to draw in step 1) to the regular hexagon that diameter is 10-30mm three times
Capillary glass stick (3), inside are secondary multifilament (8)；
7) fusion pressure in fusion pressure furnace will be put by multifilament stick (9) three times, regular hexagon molding multifilament stick (10) is obtained after heat preservation, it is described molten
Pressing fusion pressure temperature when furnace fusion pressure is 650-740 DEG C；
8) multifilament stick (10) dicing will be formed, microchannel plate substrate (11) are obtained after ground polishing.
2. the preparation method of microchannel plate substrate for microarray according to claim 1, it is characterised in that：The step 7)
In three times multifilament stick (9) fusion pressure when soaking time be 10 hours.
3. the preparation method of microchannel plate substrate for microarray according to claim 1 or 2, it is characterised in that：The glass
The material of the glass of glass stick (1) and glass tube (2) is colouless optical glass.
4. the preparation method of microchannel plate substrate for microarray according to claim 3, it is characterised in that：The glass bar
(1) and the material of the glass of glass tube (2) is colouless optical glass that moisture resistance stability is level-one.
5. the preparation method of microchannel plate substrate for microarray according to claim 3, it is characterised in that：The glass bar
(1) and the glass material of glass tube (2) be not alkali metal containing colouless optical glass.
6. the preparation method of microchannel plate substrate for microarray according to claim 1 or 2, it is characterised in that：The glass
The material of glass stick (1) and glass tube (2) is the optical glass that the trade mark is ZK4, ZK5, ZBaF1, ZBaF2 or ZBaF3.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810510267.3A CN108821565A (en) | 2018-05-24 | 2018-05-24 | The preparation method of microchannel plate substrate for microarray |
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|---|---|---|---|
| CN201810510267.3A CN108821565A (en) | 2018-05-24 | 2018-05-24 | The preparation method of microchannel plate substrate for microarray |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110967729A (en) * | 2019-12-13 | 2020-04-07 | 山西长城微光器材股份有限公司 | Method for manufacturing micro-channel plate hollow array substrate by adopting hollow filament hot melting method |
| CN111128641A (en) * | 2019-12-16 | 2020-05-08 | 北方夜视技术股份有限公司 | Detection-grade microchannel plate with large size and small opening area ratio and preparation method thereof |
| CN111847873A (en) * | 2020-07-20 | 2020-10-30 | 南京恒芯光电科技有限公司 | Glass with high mechanical strength and manufacturing method thereof |
| CN112397215A (en) * | 2020-10-30 | 2021-02-23 | 中建材光芯科技有限公司 | High resolution X-ray anti-scatter grid and method of making same |
| CN114853331A (en) * | 2022-05-11 | 2022-08-05 | 中国建筑材料科学研究总院有限公司 | Glass micro-tube array with large specific surface area and preparation method and application thereof |
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| CN1758405A (en) * | 2005-09-20 | 2006-04-12 | 北方夜视技术股份有限公司 | Method for manufacturing micro-channel plate with solid edge |
| CN104749692A (en) * | 2015-03-18 | 2015-07-01 | 中国建筑材料科学研究总院 | Parallel light filter and preparation method thereof |
| CN106517083A (en) * | 2016-11-11 | 2017-03-22 | 中国建筑材料科学研究总院 | Micro-channel array and preparation method thereof |
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2018
- 2018-05-24 CN CN201810510267.3A patent/CN108821565A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1758405A (en) * | 2005-09-20 | 2006-04-12 | 北方夜视技术股份有限公司 | Method for manufacturing micro-channel plate with solid edge |
| CN104749692A (en) * | 2015-03-18 | 2015-07-01 | 中国建筑材料科学研究总院 | Parallel light filter and preparation method thereof |
| CN106517083A (en) * | 2016-11-11 | 2017-03-22 | 中国建筑材料科学研究总院 | Micro-channel array and preparation method thereof |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110967729A (en) * | 2019-12-13 | 2020-04-07 | 山西长城微光器材股份有限公司 | Method for manufacturing micro-channel plate hollow array substrate by adopting hollow filament hot melting method |
| CN111128641A (en) * | 2019-12-16 | 2020-05-08 | 北方夜视技术股份有限公司 | Detection-grade microchannel plate with large size and small opening area ratio and preparation method thereof |
| CN111128641B (en) * | 2019-12-16 | 2022-04-22 | 北方夜视技术股份有限公司 | Detection-grade microchannel plate with large size and small opening area ratio and preparation method thereof |
| CN111847873A (en) * | 2020-07-20 | 2020-10-30 | 南京恒芯光电科技有限公司 | Glass with high mechanical strength and manufacturing method thereof |
| CN111847873B (en) * | 2020-07-20 | 2022-06-03 | 南京恒芯光电科技有限公司 | Glass with high mechanical strength and manufacturing method thereof |
| CN112397215A (en) * | 2020-10-30 | 2021-02-23 | 中建材光芯科技有限公司 | High resolution X-ray anti-scatter grid and method of making same |
| CN112397215B (en) * | 2020-10-30 | 2023-02-28 | 中建材光芯科技有限公司 | High resolution X-ray anti-scatter grid and method of making same |
| CN114853331A (en) * | 2022-05-11 | 2022-08-05 | 中国建筑材料科学研究总院有限公司 | Glass micro-tube array with large specific surface area and preparation method and application thereof |
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Application publication date: 20181116 |