CN108805168B - 近红外光谱学和机器学习技术进行的制造过程的端点检测 - Google Patents

近红外光谱学和机器学习技术进行的制造过程的端点检测 Download PDF

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CN108805168B
CN108805168B CN201810419832.5A CN201810419832A CN108805168B CN 108805168 B CN108805168 B CN 108805168B CN 201810419832 A CN201810419832 A CN 201810419832A CN 108805168 B CN108805168 B CN 108805168B
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manufacturing process
steady state
classification model
spectral data
time
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CN108805168A (zh
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C.熊
P.邹
孙岚
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Viavi Solutions Inc
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2411—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on the proximity to a decision surface, e.g. support vector machines
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/04—Inference or reasoning models
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/10—Machine learning using kernel methods, e.g. support vector machines [SVM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/214—Generating training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/20—Ensemble learning

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  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
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  • General Engineering & Computer Science (AREA)
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  • Computing Systems (AREA)
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  • Medical Informatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
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  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computational Linguistics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • General Factory Administration (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
CN201810419832.5A 2017-05-04 2018-05-04 近红外光谱学和机器学习技术进行的制造过程的端点检测 Active CN108805168B (zh)

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US15/586,678 US10984334B2 (en) 2017-05-04 2017-05-04 Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques
US15/586,678 2017-05-04

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CN202311307168.2A Pending CN117290780A (zh) 2017-05-04 2018-05-04 近红外光谱学和机器学习技术进行的制造过程的端点检测

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US (2) US10984334B2 (https=)
EP (2) EP4553722A1 (https=)
JP (2) JP6968745B2 (https=)
KR (2) KR102305566B1 (https=)
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CA (1) CA3002340A1 (https=)
HK (1) HK1257428A1 (https=)
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JP7520107B2 (ja) * 2019-08-28 2024-07-22 ベンタナ メディカル システムズ， インコーポレイテッド 振動分光法を使用して検体固定の持続時間および品質を評価するためのシステムおよび方法
CN111650129B (zh) * 2020-03-05 2022-07-01 广东省科学院广州地理研究所 一种荔枝叶片钙含量预测方法及预测装置
GB202015861D0 (en) * 2020-10-07 2020-11-18 National Institute For Bioprocesisng Res And Training Method and system for predicting the performance for biopharmaceutical manufacturing processes
US20220397515A1 (en) * 2021-06-10 2022-12-15 Applied Materials, Inc. Obtaining substrate metrology measurement values using machine learning
US11965798B2 (en) 2021-06-10 2024-04-23 Applied Materials, Inc. Endpoint detection system for enhanced spectral data collection
US11920980B2 (en) * 2022-01-31 2024-03-05 Viavi Solutions Inc. Rolling principal component analysis for dynamic process monitoring and end point detection

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Publication number Publication date
TWI825490B (zh) 2023-12-11
TWI744518B (zh) 2021-11-01
KR102305566B1 (ko) 2021-10-07
EP3399472C0 (en) 2024-07-17
CA3002340A1 (en) 2018-11-04
CN108805168A (zh) 2018-11-13
EP3399472A1 (en) 2018-11-07
HK1257430A1 (zh) 2019-10-18
JP2018189638A (ja) 2018-11-29
HK1257428A1 (en) 2019-10-18
KR102576834B1 (ko) 2023-09-08
CN117290780A (zh) 2023-12-26
EP3399472B1 (en) 2024-07-17
US20180322399A1 (en) 2018-11-08
JP6968745B2 (ja) 2021-11-17
TW202318276A (zh) 2023-05-01
KR20210118029A (ko) 2021-09-29
TW201843600A (zh) 2018-12-16
US10984334B2 (en) 2021-04-20
TW202203098A (zh) 2022-01-16
JP7237124B2 (ja) 2023-03-10
US20210224672A1 (en) 2021-07-22
JP2022017405A (ja) 2022-01-25
KR20180122955A (ko) 2018-11-14
EP4553722A1 (en) 2025-05-14

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