CA3002340A1 - Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques - Google Patents

Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques Download PDF

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Publication number
CA3002340A1
CA3002340A1 CA3002340A CA3002340A CA3002340A1 CA 3002340 A1 CA3002340 A1 CA 3002340A1 CA 3002340 A CA3002340 A CA 3002340A CA 3002340 A CA3002340 A CA 3002340A CA 3002340 A1 CA3002340 A1 CA 3002340A1
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Prior art keywords
manufacturing process
steady state
classification model
spectral data
svm classification
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Pending
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CA3002340A
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English (en)
French (fr)
Inventor
Changmeng HSIUNG
Peng Zou
Lan SUN
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Viavi Solutions Inc
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Viavi Solutions Inc
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Publication of CA3002340A1 publication Critical patent/CA3002340A1/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2411—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on the proximity to a decision surface, e.g. support vector machines
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/04—Inference or reasoning models
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/10—Machine learning using kernel methods, e.g. support vector machines [SVM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/214—Generating training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/20—Ensemble learning

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Medical Informatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computational Linguistics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • General Factory Administration (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
CA3002340A 2017-05-04 2018-04-23 Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques Pending CA3002340A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/586,678 US10984334B2 (en) 2017-05-04 2017-05-04 Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques
US15/586,678 2017-05-04

Publications (1)

Publication Number Publication Date
CA3002340A1 true CA3002340A1 (en) 2018-11-04

Family

ID=62196310

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3002340A Pending CA3002340A1 (en) 2017-05-04 2018-04-23 Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques

Country Status (8)

Country Link
US (2) US10984334B2 (https=)
EP (2) EP4553722A1 (https=)
JP (2) JP6968745B2 (https=)
KR (2) KR102305566B1 (https=)
CN (2) CN108805168B (https=)
CA (1) CA3002340A1 (https=)
HK (1) HK1257428A1 (https=)
TW (3) TWI825490B (https=)

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US20220397515A1 (en) * 2021-06-10 2022-12-15 Applied Materials, Inc. Obtaining substrate metrology measurement values using machine learning
US11965798B2 (en) 2021-06-10 2024-04-23 Applied Materials, Inc. Endpoint detection system for enhanced spectral data collection
US11920980B2 (en) * 2022-01-31 2024-03-05 Viavi Solutions Inc. Rolling principal component analysis for dynamic process monitoring and end point detection

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Also Published As

Publication number Publication date
TWI825490B (zh) 2023-12-11
TWI744518B (zh) 2021-11-01
KR102305566B1 (ko) 2021-10-07
EP3399472C0 (en) 2024-07-17
CN108805168B (zh) 2023-10-13
CN108805168A (zh) 2018-11-13
EP3399472A1 (en) 2018-11-07
HK1257430A1 (zh) 2019-10-18
JP2018189638A (ja) 2018-11-29
HK1257428A1 (en) 2019-10-18
KR102576834B1 (ko) 2023-09-08
CN117290780A (zh) 2023-12-26
EP3399472B1 (en) 2024-07-17
US20180322399A1 (en) 2018-11-08
JP6968745B2 (ja) 2021-11-17
TW202318276A (zh) 2023-05-01
KR20210118029A (ko) 2021-09-29
TW201843600A (zh) 2018-12-16
US10984334B2 (en) 2021-04-20
TW202203098A (zh) 2022-01-16
JP7237124B2 (ja) 2023-03-10
US20210224672A1 (en) 2021-07-22
JP2022017405A (ja) 2022-01-25
KR20180122955A (ko) 2018-11-14
EP4553722A1 (en) 2025-05-14

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