CN108803693B - Electronegative gas injection device capable of maintaining dynamic pressure - Google Patents

Electronegative gas injection device capable of maintaining dynamic pressure Download PDF

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Publication number
CN108803693B
CN108803693B CN201810474988.3A CN201810474988A CN108803693B CN 108803693 B CN108803693 B CN 108803693B CN 201810474988 A CN201810474988 A CN 201810474988A CN 108803693 B CN108803693 B CN 108803693B
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China
Prior art keywords
gas
electronegative
bin
pressure maintaining
air
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CN201810474988.3A
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Chinese (zh)
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CN108803693A (en
Inventor
刘宇
雷久侯
曹金祥
余鹏程
李敏迟
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2006Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches

Abstract

The invention discloses an electronegative gas spraying device for maintaining dynamic pressure, which comprises a gas pressure maintaining bin, wherein a piston is arranged in the gas pressure maintaining bin, the piston is connected with a screw transmission device, the screw transmission device is connected with a stepping motor, the gas pressure maintaining bin is provided with a gas injection port, a gas outlet and a gas pressure meter, and the gas injection port and the gas outlet are respectively provided with electromagnetic valve control. The air pressure maintaining bin is provided with a piston position detecting device. The barometer, the electromagnetic valve control unit, the stepping motor control unit and the piston position detection device are respectively connected with the control system. The gas outlet is connected with a vacuum chamber for generating plasma, and the gas injection port is connected with an electronegative gas cylinder, so that the gas pressure can be dynamically maintained, the electronegative gas release speed is maintained to be stable, and the accuracy of a physical experiment result is ensured. Solves the problem that the air pressure is continuously reduced in the process of releasing the electronegative gas.

Description

Electronegative gas injection device capable of maintaining dynamic pressure
Technical Field
The present invention relates to a gas discharge and plasma generation technology, and more particularly, to an electronegative gas injection device for maintaining dynamic pressure.
Background
Electronegative gas release is an effective way of actively intervening in the plasma state, and is widely used in actively releasing interfering ionosphere and in neighboring spacecraft.
In the traditional electronegative gas release process, gas directly enters a plasma source through partial pressure of a high-pressure gas cylinder. Along with the continuous progress of the experiment, the pressure in the high-pressure gas cylinder is continuously reduced and is in an uncontrollable state. This can easily interfere with physical research and practical flight applications.
Disclosure of Invention
The invention aims to provide an electronegative gas injection device for maintaining dynamic pressure.
The invention aims at realizing the following technical scheme:
the invention discloses an electronegative gas spraying device for maintaining dynamic pressure, which comprises a gas pressure maintaining bin, wherein a piston is arranged in the gas pressure maintaining bin, the piston is connected with a screw transmission device, the screw transmission device is connected with a stepping motor, the gas pressure maintaining bin is provided with a gas injection port, a gas outlet and a gas pressure meter, and the gas injection port and the gas outlet are respectively provided with electromagnetic valve control.
According to the technical scheme provided by the invention, the electronegative gas injection device for maintaining the dynamic pressure can dynamically maintain the air pressure and maintain the release speed of electronegative gas to be stable, so that the accuracy of a physical experiment result is ensured. Solves the problem that the air pressure is continuously reduced in the process of releasing the electronegative gas.
Drawings
Fig. 1a, fig. 1b, and fig. 1c are schematic top, side, and end structures of an electronegative gas injection device for maintaining dynamic pressure according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an electronegative gas release apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of reducing electron density by various gas jets according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention will be described in further detail below. What is not described in detail in the embodiments of the present invention belongs to the prior art known to those skilled in the art.
The invention relates to an electronegative gas injection device for maintaining dynamic pressure, which comprises the following preferred specific embodiments:
the device comprises an air pressure maintaining bin, wherein a piston is arranged in the air pressure maintaining bin and connected with a screw transmission device, the screw transmission device is connected with a stepping motor, the air pressure maintaining bin is provided with an air injection port, an air outlet and an air pressure meter, and the air injection port and the air outlet are respectively provided with electromagnetic valve control.
The air pressure maintaining bin is provided with a piston position detecting device.
The gas outlet is connected with a vacuum chamber for generating plasma, and the gas injection port is connected with an electronegative gas cylinder.
The barometer, the electromagnetic valve control unit of the stepping motor and the piston position detection device are respectively connected with the control system.
The electronegative gas injection device for maintaining the dynamic pressure can dynamically maintain the air pressure and maintain the stable release speed of electronegative gas, thereby ensuring the accuracy of physical experiment results. Solves the problem that the air pressure is continuously reduced in the process of releasing the electronegative gas.
Specific examples:
fig. 1a, 1b, and 1c are block diagrams of a dynamic air pressure maintenance system. Wherein 1 is a stepping motor, 2 is a screw transmission device, 3 is an air pressure maintaining bin, which is an air cylinder, a piston is connected with the screw transmission device and can be moved by the stepping motor, 4 is an air injection port, 5 is an air outlet, all of which are controlled by independent electromagnetic valves, and 6 is an air pressure meter.
When the device is used, the air outlet is connected with the vacuum chamber for generating plasma, the electromagnetic valve is controlled to close the air outlet, and the stepping motor is controlled to push the piston so that the air pressure maintains the minimum volume of the bin. At the moment, the gas injection port is connected with the electronegative gas cylinder, electronegative gas is injected into the gas pressure maintaining bin, and the stepping motor is controlled to pull the piston open. When the air pressure maintaining bin is filled with the electronegative gas, the air pressure and the air bottle for storing the electronegative gas are kept at ordinary times, and the air injection port is closed. The compressed gas pressure maintains the chamber until the desired gas pressure is reached, and then the gas outlet is opened, at which time the electronegative gas begins to be injected into the plasma. The air pressure in the air pressure maintaining bin can be reduced, the control system converts the distance required to be moved by the piston according to the air pressure meter data and the current piston position, and then the stepping motor is controlled to maintain the air pressure stable. (as shown in FIG. 1a, FIG. 1b, FIG. 1c, FIG. 2)
The invention has the advantages and positive effects that:
compared with the traditional method, the method has the advantages that the electronegative gas is directly injected into the plasma through decompression, and the electronegative gas dynamic pressure maintaining device can maintain the electronegative gas release speed to be stable, so that the accuracy of a physical experiment result is ensured. Meanwhile, the device can carry out secondary pressurization on gas, thereby having application value on high-pressure plasmas such as wind tunnels.
The prototype uses a cylinder 200mm long and 100mm in diameter and screw drive for releasing electronegative gases such as tetrachloromethane and freon to study the influence of the electronegative gases on parameters such as plasma electron density. The device can obtain more accurate release flow. We have conducted release experiments in ECR plasma at the university of science and technology in china. At a plasma input power of 700W, multiple gases are used for testing, and as shown in fig. 3, each gas dynamic injection can well reduce electron density.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (4)

1. The electronegative gas spraying device for maintaining the dynamic pressure is characterized by comprising a gas pressure maintaining bin, wherein the gas pressure maintaining bin is provided with a gas injection port and a gas outlet, and the gas injection port and the gas outlet are respectively provided with electromagnetic valve control;
the gas injection port is connected with an electronegative gas cylinder to inject electronegative gas into the gas pressure maintaining bin;
the air outlet is connected with a vacuum chamber for generating plasma;
the pressure maintaining bin is used for injecting the electronegative gas into the plasma at a stable speed in the process of directly injecting the electronegative gas into the plasma through decompression;
the air pressure maintaining bin is internally provided with a piston, the piston is connected with a screw transmission device, the screw transmission device is connected with a stepping motor, and the air pressure maintaining bin is also provided with an air pressure gauge;
wherein, the use process of the air pressure maintaining bin comprises the following steps: when the air pressure maintaining bin is filled with the electronegative air and the air pressure of the air pressure maintaining bin is in normal time with the electronegative air bottle, closing the air injection port; if the pressure maintaining bin is compressed to reach the required pressure, the gas outlet is opened to inject the electronegative gas into the plasma; during the injection of the electronegative gas into the plasma, the distance the piston needs to move is determined based on barometer data and the current piston position to control a stepping motor to realize the reduction of the electron density of the plasma when the input power of the plasma is 700W.
2. The electronegative gas injection apparatus of claim 1 wherein said gas pressure maintenance chamber is provided with a piston position detection means.
3. The electronegative-gas injection apparatus for maintaining a dynamic pressure according to claim 2, wherein the piston position detection means employs a displacement sensor;
the electronegative gas comprises at least one of tetrachloromethane and freon.
4. The electronegative gas injection apparatus for maintaining a dynamic pressure according to claim 3, wherein the barometer, the solenoid valve control, the control unit of the stepper motor, and the piston position detection means are respectively connected to a control system.
CN201810474988.3A 2018-05-17 2018-05-17 Electronegative gas injection device capable of maintaining dynamic pressure Active CN108803693B (en)

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CN113625793A (en) * 2021-08-06 2021-11-09 成都博奥晶芯生物科技有限公司 Full-automatic air pressure control system and method based on PID control

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