CN108802591A - A kind of semiconductor element accelerated ageing test system - Google Patents
A kind of semiconductor element accelerated ageing test system Download PDFInfo
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- CN108802591A CN108802591A CN201810847060.5A CN201810847060A CN108802591A CN 108802591 A CN108802591 A CN 108802591A CN 201810847060 A CN201810847060 A CN 201810847060A CN 108802591 A CN108802591 A CN 108802591A
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- 238000012360 testing method Methods 0.000 title claims abstract description 50
- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 230000032683 aging Effects 0.000 title claims abstract description 11
- 230000006978 adaptation Effects 0.000 claims abstract description 10
- 230000008054 signal transmission Effects 0.000 claims description 3
- 230000003993 interaction Effects 0.000 claims description 2
- 238000002474 experimental method Methods 0.000 abstract description 16
- 238000004458 analytical method Methods 0.000 abstract description 5
- 230000018109 developmental process Effects 0.000 abstract description 5
- 238000003466 welding Methods 0.000 abstract description 5
- 238000011161 development Methods 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000005538 encapsulation Methods 0.000 abstract description 2
- 238000007689 inspection Methods 0.000 abstract description 2
- 238000004088 simulation Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- WKVZMKDXJFCMMD-UVWUDEKDSA-L (5ar,8ar,9r)-5-[[(2r,4ar,6r,7r,8r,8as)-7,8-dihydroxy-2-methyl-4,4a,6,7,8,8a-hexahydropyrano[3,2-d][1,3]dioxin-6-yl]oxy]-9-(4-hydroxy-3,5-dimethoxyphenyl)-5a,6,8a,9-tetrahydro-5h-[2]benzofuro[6,5-f][1,3]benzodioxol-8-one;azanide;n,3-bis(2-chloroethyl)-2-ox Chemical compound [NH2-].[NH2-].Cl[Pt+2]Cl.ClCCNP1(=O)OCCCN1CCCl.COC1=C(O)C(OC)=CC([C@@H]2C3=CC=4OCOC=4C=C3C(O[C@H]3[C@@H]([C@@H](O)[C@@H]4O[C@H](C)OC[C@H]4O3)O)[C@@H]3[C@@H]2C(OC3)=O)=C1 WKVZMKDXJFCMMD-UVWUDEKDSA-L 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention discloses a kind of semiconductor element accelerated ageing test system, the HAST experimental boxs and Multichannel data acquisition module of connection are communicated including middle control module and by general controls bus respectively, the HAST chambers include tropicalization test case and its element under test support plate of inside, element under test is welded on support plate, cooperation HAST experimental box signals are exported to multichannel signal adaptation plate, and Multichannel data acquisition module is connected by multiple signals adaptation board.This system is suitable for the HAST testing inspection reliability testing experiments of classes of semiconductors element, can be verified to service life under the conditions of patch encapsulation and interconnecting devices simulation actual welding.The independent development control program of middle control module can set HAST chamber humiture experiment conditions, can also set power module load semiconductor element to be measured voltage, the data of instant record Multichannel data acquisition module transmission, can data be carried out with analysis export C-V characteristic icon simultaneously, so that experiment technical personnel is analysed and compared.
Description
Technical field
The present invention relates to reliability tests, and can a variety of semiconductor elements be carried out with a kind of semiconductor element of accelerated aging tests
System is tested in part accelerated ageing.
Background technology
Reliability test is defined as detection product under prescribed conditions, and it is long to complete predetermined function institute's retainable time
Short, the time is longer, and reliability is higher.The standby industry of space national defence troops of the reliability test originating from Cold War period, with the knot of cold war
Beam, the application field of reliability test gradually expand to general civil use industry, industrial automation product, science by space national defence
Instrument, medical equipment, auto industry, modern commerce application product.Especially industrial automation product, communication network, development god
Speed, function is complicated and changeable, and the chance to fail increases, and usage time lengthens, and further requirement is proposed to reliability.
With the rapid development of electronic technology.Semiconductor components and devices is as the core element for forming various electronic circuits, no
It is disconnected to be applied to various harsh rugged environments.Previous manufacturer examines the reliability of semiconductor element with ICE standard testings, but by
It is long in the testing time（>1000Hrs）With the tracing and monitoring of element electrical characteristic can not be limited, need a kind of increasing stress, mould
Intend more harsh condition to shorten the method for test period and instant electrical characteristic tracing and monitoring.Patent of the present invention is exactly base
Test system is discharged in the accelerated stress of this demand, exploitation.Whole system coordinates tropicalization test case and element under test to carry
Board group at HAST experimental boxs, module, Multichannel data acquisition module, power module and multiple signal branch board group are controlled in cooperation
At.Central module program containing autonomous control and processor, by general controls bus and HAST chambers and remaining module communication,
Set and control entire test session.Element under test, which is welded on support plate, coordinates HAST experimental boxs signal output terminal to multiple letter
Number plate links Multichannel data acquisition module by multiple signals branch plate and power module carries out signal transmission and to element under test
Power supply.
To the certificate authenticity of electronic product, the guarantee in analysis and use, none does not consider that environment influences product.Its
In main and intuitive index be exactly humiture variation, humidity will produce huge stress to electronic device, according to big data
The main failure of statistics semiconductor element completely is caused by humidity, and it is that humidity causes to account for about 40% bad.The cities Tu1Wei
The existing warm and humid change chamber structural schematic diagram of standard on field, including switchgear house 1, evaporator 2, operating room 3, air inlet 4, outlet air
Mouth 5, door lock 6, glove track 7, heater 8, controller 9, Temperature Humidity Sensor 10 and power supply 11.
The humidity of simulated environment changes, test product effect caused by these stress, is lacked in detection production design
It falls into, takes protection and precautionary measures in time.Previous semiconductor manufacturer is according to ICE standards（85 DEG C of thermal environments of 85%rh relative humidity）
Semiconductor element is carried out for a long time（>1000hrs）Static burn in makes the acceleration of its invalidation period show.It is surveyed later by powering up
Measure its C-V characteristic, service life index of the evaluation element under high humidity high humidity environment.
With the demand growth of semiconductor photovoltaic industry, humidity aged assessment of major semiconductor manufacturer to ICE standards
Standard is increasingly unsatisfactory for.The experimental period of its overlength, support surface attachment process, not electrical to element in whole experiment process
The detection of property.Determine no matter ICE sentences from the stability of the compatibility or even product of productivity or new process in service life
It is fixed, it can not all continue to support.The appearance of HAST standards proposes scheme, the outer manufacturer of domestic chamber to problem above is solved
It is for selection to provide multiple product.But the environment and semiconductor element of template surface attachment process are during the experiment
The tracing and monitoring of dynamic indicator never has ready-made solution.So that the experimental program of HAST standards has been limited to shell
The ageing stability of encapsulation and mechanical structured member is verified
Current HAST chambers all can ensure that relative humidity are 85% 120,130 times 110, but do not have data acquisition and
Ability to communicate.It must the targetedly fixture of contrived experiment object needs and data acquisition if executing HAST completely
Analytic function, while ensureing transmission and the signal filtering of data.Although domestic and foreign manufacturers can provide complete data acquisition and
Communication transfer scheme, but integrate HAST chambers and carry out complete HAST experiments ready-made product case not yet.Due to relating to
And integrated to equipment, communications protocol is unified, and the maintenance of database, human interface is write, and exploitation input is huge, large-scale real
The scheme for testing room is professional too strong, and attended operation is inconvenient.One strong practicality of wide usage is automatically brought into operation the HAST experiments of maintenance
System will be the important breakthrough of hydrothermal aging experimental field.
Invention content
Purpose of the present invention is to：A kind of simple and convenient operation and maintenance is provided, can a variety of semiconductor elements be carried out with effectively complete HAST
Damp and hot accelerated aging tests system.
The technical scheme is that：
System is tested in a kind of semiconductor element accelerated ageing, including middle control module and is communicated respectively by general controls bus
The HAST experimental boxs and Multichannel data acquisition module of connection, the HAST chambers include tropicalization test case and its inside
Element under test support plate, element under test are welded on support plate, and cooperation HAST experimental box signals are exported to multichannel signal adaptation plate, by more
Road signal adaptation plate connects Multichannel data acquisition module；The middle control module sets and controls entire test session；System is also wrapped
Include the power supply that power module carries out signal transmission and each module.
Preferably, the middle control module includes control processor and test control program, and the test control program carries
Human-computer interaction interface.
Preferably, the complete analog element actual service conditions of the element under test support plate, tropicalization test case can be 110
Opposite 85% humidity is kept at a temperature of ~ 130 degree.
Preferably, the Multichannel data acquisition module maximum can acquire 300 parameters simultaneously.
Preferably, the power module provides 4 half Dynamic High-accuracy output.
Preferably, the power module is that element under test is powered in chamber by multiple signals adaptation board, multiple signals
Adaptation board matches the output of element under test signal, and filtering is arranged and protects circuit pre- anti-tampering and current surge impact.
Preferably, the control processor controls correlation module using GPIB general controls buses.
It is an advantage of the invention that：
1. this system be suitable for classes of semiconductors element HAST testing inspection reliability testing experiments, can to patch encapsulate and
Service life is verified under the conditions of interconnecting devices simulation actual welding.The independent development control program of middle control module can be set
HAST chamber humiture experiment conditions can also set power module load in the voltage of semiconductor element to be measured, instant note
The data of Multichannel data acquisition module transmission are recorded, while can data be carried out with analysis export C-V characteristic icon, to test skill
Art personnel analyse and compare.
2. HAST experiments can be carried out to almost all of semiconductor or photovoltaic element using this system, as a result of
Multiple signals sample, and can simultaneously multiple samples be carried out with the experiment of unified standardization.And when only needing the test of ICE 1/10th
Between just can reach same experiment effect.
3. this system devises multiple signal branch plate in data acquisition signal, filtering device and the guarantor of exploitation are carried
Protection circuit, can be filtered the noise of system and surge protection, prevent instrument and equipment damage and signal pure.
Description of the drawings
Following accompanying drawings is the real case of the present invention：
Fig. 1 is the warm and humid change chamber structural schematic diagram of existing standard in the market；
Fig. 2 is the structure diagram of present system.
Specific implementation mode
Embodiment：Now by taking most common semiconductor element diode as an example, cooperation this system carries out a HAST experiment to carry out
Introduce explanation.
It, can be with simulating diode in the product of real work first by welding diode to be tested on experimental line plate
Working environment, be loaded on the special fixture in HAST chambers.It is loaded by the control program setting of central control module
To the voltage change curve and humiture change curve of diode.HAS chamber temperature changes are set 25；85；125, three
Temperature dot cycle, constant 10 minutes of each temperature spot, and relative humidity 85% is kept, 100 recycle altogether.By controlling program
Each constant point of temperature gives diode forward 0 ~ 0.6V of on-load voltage, then 0 ~ 25V of Opposite side loading voltage.Data acquisition module meeting
Instant current sample is carried out to each element under test, and sends analog signal conversion digital signal to control module.Control
The data collection being collected into included database is waited for that entire off-test can generate the volt-ampere spy of each temperature cycles by program
Property chart, can analyze and judge diode design service life in stability.
This system relies on the existing instrument and equipment in market, coordinate independent development software platform and splitter by modules
It integrates, forms a complete HAST experimental system.Gather unique Welding experiment wiring board, the actual welding ring of analog element
Border.Autonomous control program not only automatic execute can complete long period of experiments project after having set, and can also divide data
It analyses and draws icon.It has been truly realized intelligence, multipurpose, design standard with a high credibility.
Certainly the above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow be familiar with technique
People can understand the content of the present invention and implement it accordingly, it is not intended to limit the scope of the present invention.It is all according to this hair
The modification that the Spirit Essence of bright main technical schemes is done, should be covered by the protection scope of the present invention.
Claims (7)
1. system is tested in a kind of semiconductor element accelerated ageing, it is characterised in that：Pass through including middle control module and respectively general control
Bus processed communicates the HAST experimental boxs and Multichannel data acquisition module of connection, and the HAST chambers include high humiture examination
The element under test support plate of tryoff and its inside, element under test are welded on support plate, and cooperation HAST experimental box signals are exported to multichannel
Signal adaptation plate connects Multichannel data acquisition module by multiple signals adaptation board；The middle control module setting and the entire survey of control
Test ring section；System further includes the power supply that power module carries out signal transmission and each module.
2. system is tested in semiconductor element accelerated ageing according to claim 1, it is characterised in that：The middle control module packet
Control processor and test control program are included, the test control program carries human-computer interaction interface.
3. automatic humidity regulation and control system according to claim 1, it is characterised in that：The element under test support plate is complete
Analog element actual service conditions, tropicalization test case can keep opposite 85% humidity at a temperature of 110 ~ 130 degree.
4. automatic humidity regulation and control system according to claim 1, it is characterised in that：The Multichannel data acquisition module
Maximum can acquire 300 parameters simultaneously.
5. automatic humidity regulation and control system according to claim 1, it is characterised in that：The power module provides 4
Half Dynamic High-accuracy output.
6. automatic humidity regulation and control system according to claim 1, it is characterised in that：The power module passes through multichannel
Signal adaptation plate is that element under test is powered in chamber, and multiple signals adaptation board matches the output of element under test signal, and filter is arranged
Wave and protection circuit are pre- anti-tampering and current surge impacts.
7. automatic humidity regulation and control system according to claim 2, it is characterised in that：The control processor uses
GPIB general controls buses control correlation module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810847060.5A CN108802591A (en) | 2018-07-27 | 2018-07-27 | A kind of semiconductor element accelerated ageing test system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810847060.5A CN108802591A (en) | 2018-07-27 | 2018-07-27 | A kind of semiconductor element accelerated ageing test system |
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| CN108802591A true CN108802591A (en) | 2018-11-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112904179A (en) * | 2021-01-22 | 2021-06-04 | 长鑫存储技术有限公司 | Chip testing method and device and electronic equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001330645A (en) * | 2000-05-18 | 2001-11-30 | Ando Electric Co Ltd | Burn-in test system |
| CN201096866Y (en) * | 2007-08-31 | 2008-08-06 | 比亚迪股份有限公司 | A diode life tester |
| US20150015266A1 (en) * | 2013-07-15 | 2015-01-15 | Institute Of Semiconductors, Chinese Academy Science | Multi-functional online testing system for semiconductor light-emitting devices or modules and method thereof |
| CN104614687A (en) * | 2015-01-29 | 2015-05-13 | 中科科隆光电仪器设备无锡有限公司 | Light emitting diode (LED) environmental test chamber and test method |
-
2018
- 2018-07-27 CN CN201810847060.5A patent/CN108802591A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001330645A (en) * | 2000-05-18 | 2001-11-30 | Ando Electric Co Ltd | Burn-in test system |
| CN201096866Y (en) * | 2007-08-31 | 2008-08-06 | 比亚迪股份有限公司 | A diode life tester |
| US20150015266A1 (en) * | 2013-07-15 | 2015-01-15 | Institute Of Semiconductors, Chinese Academy Science | Multi-functional online testing system for semiconductor light-emitting devices or modules and method thereof |
| CN104614687A (en) * | 2015-01-29 | 2015-05-13 | 中科科隆光电仪器设备无锡有限公司 | Light emitting diode (LED) environmental test chamber and test method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112904179A (en) * | 2021-01-22 | 2021-06-04 | 长鑫存储技术有限公司 | Chip testing method and device and electronic equipment |
| CN112904179B (en) * | 2021-01-22 | 2022-04-26 | 长鑫存储技术有限公司 | Chip testing method and device and electronic equipment |
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