CN108792486A - A kind of universal straight line slide unit - Google Patents
A kind of universal straight line slide unit Download PDFInfo
- Publication number
- CN108792486A CN108792486A CN201810856336.6A CN201810856336A CN108792486A CN 108792486 A CN108792486 A CN 108792486A CN 201810856336 A CN201810856336 A CN 201810856336A CN 108792486 A CN108792486 A CN 108792486A
- Authority
- CN
- China
- Prior art keywords
- slide unit
- straight line
- guide rail
- synchronous belt
- belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/44—Belt or chain tensioning arrangements
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transmission Devices (AREA)
Abstract
The present invention discloses a kind of universal straight line slide unit, motor and driving wheel that the guide rail, sliding block and driving sliding block of motor fixing seat move are equipped with including one end, driving wheel is connect by synchronous belt with the driven wheel for being fixed on the guide rail other end, the shaft of driven wheel is connected with tightening regulator, and tightening regulator includes the driven wheeling support being fixed on guide rail, adjustable plate, spring supporting bar and the spring being set on spring supporting bar.The present invention makes driven wheel both sides force unbalance due to synchronous belt relaxation by tightening regulator; and then being adjusted to the position of driven wheel makes belt pre-tighten again automatically; without manually being pre-tightened after shutdown; it improves work efficiency; it avoids being driven the security risk for bringing operating personnel in non-preload and to the damage of synchronous belt itself because pre-tightening synchronous belt not in time; to slide block structure rationally design simultaneously keeps entire slide unit movement smooth; stable transmission; load capacity is strong, can be applied to the transmission of a variety of occasions.
Description
Technical field
The present invention relates to machinery fields, and in particular to a kind of universal straight line slide unit.
Background technology
Straight line slide unit be it is a kind of can provide linear motion mechanical structure, can either in a horizontal or vertical use, can also combine
It is used at specific motion, currently, straight line slide unit mainly uses following two forms：First, with the ball wire of precision drive
Bar slide unit, by stepper motor drive leading screw rotation, gap is embedded with steel ball between lead screw and sliding block, so as to by them it
Between sliding friction become rolling friction, to substantially reduce frictional force between the two, the rotary motion of motor is converted
For the linear motion of slide unit；Second is that using the rack-and-pinion slide unit module of rack and pinion mechanism, motor driven gear rotation, rack
It is fixed on bottom plate, rack and pinion engagement movement, since rack is fixed so gear while doing linear translational motion and rotation
Movement, but both the above mode has the following problems：Ball leading screw driving is to be widely used in industrial automation in method one
The basic transmission device of equipment, but use cost is higher；The kind of drive of two middle gear rack of mode is rigidly good, and load is big, the longevity
Life length, movement controllability is good, higher to the requirement on machining accuracy of parts, and jumbo is suitble to select.
And toothed belt transmission flexibility ratio is high, has unique advantage particularly with the occasion of narrow space, has at present not
Few producer drives slide unit movement using synchronous pulley and synchronous belt, drives and is fixed on synchronous belt when synchronous pulley rotates
Slide unit moves in a straight line, but toothed belt transmission needs to pre-tighten and is all that manual pre-tighten greatly reduces working efficiency, and due to
The service life for substantially reducing belt not in time is pre-tightened, use cost is increased.
Invention content
The purpose of the present invention is to provide a kind of transmission to stablize, load is big, sliding is smooth and can pre-tighten automatically universal
Straight line slide unit.
For this purpose, the present invention uses following technical scheme：
A kind of universal straight line slide unit, including one end are equipped with the guide rail and the matched cunning of the guide rail of motor fixing seat
The motor that block and the driving sliding block are moved along the guide rail, the motor fixing seat is arranged below to be connected with the motor coaxle
The driving wheel connect, the driving wheel is connect by synchronous belt with the driven wheel for being fixed on the guide rail other end, described driven
The shaft of wheel is connected with tightening regulator, and the tightening regulator includes the driven wheeling support being fixed on the guide rail, sets
In adjustable plate, spring supporting bar and the spring being set on the spring supporting bar on the driven wheeling support.As a result, when
Length, tightening regulator can provide synchronous belt outward under the reset response that spring provides after a period of use
One pulling force makes driven wheel move outward to pull open at a distance from driving wheel and play the role of pre-tightening automatically to synchronous belt.
Further, the driven wheeling support includes the first top plate for being fixed on the rail crown, is pushed up with described first
Foreboard, back plate and the first right panel of plate integrally connected, first top plate is equipped with interconnected and in the shape of a " convex " first
Several guide posts of opening and the second opening and position first opening and/or the second opening both sides, first right panel center
Offer the first circular hole；The adjustable plate includes the second top plate and the second right panel with the second top plate integrally connected, institute
State offer on the second top plate with first opposite second circular hole of opening and with the matched oval slot hole of the guide post,
Third circular hole is offered on second right panel；The shaft of the driven wheel sequentially passes through first opening and the from lower to upper
Two circular holes are bolted on second top plate, and described spring supporting bar one end sequentially passes through first circular hole and institute
It states third circular hole and is connected with caging bolt in end, the other end is arranged with the spring successively and end is connected with adjusting bolt, by
This, is to making spring be in compressive state close to slide unit side rotation adjusting bolt and make driven wheel just at Pre strained state, when
Synchronous belt stretched using a period of time it is elongated after, due to spring be in compressive state can be provided along guide rail outer end one it is outside
Pulling force, spring using the junction of third circular hole and caging bolt as stress point drive adjustable plate move outward, adjustable plate with
The junction of the shaft of second circular hole and driven wheel be stress point drive driven wheel along the first opening towards the second harness motion until
Synchronous belt reaches Pre strained state, the first opening and the second circular hole and plays guiding role, the second opening pair to the movement of driven wheel
The movement of second right panel play the guiding role, and it is linear movement that the two ensure that driven wheel pre-tightens process simultaneously, improves transmission
Precision.
Further, the guide rail both sides offer be interconnected and be in " ten " font horizontal groove and vertically it is recessed
Slot, the height of the vertical groove are more than the width of the synchronous belt, and the synchronous belt is in the vertical groove.By
This, synchronous belt can be always positioned at vertical groove in transmission process and ensure that the stability of transmission and be played to synchronous belt
Protective effect extends the service life of synchronous belt.
Further, the open height of the guide rail is equal with the height of the horizontal groove, the width of the synchronous belt
More than the height of the horizontal groove, the synchronous belt both sides have been respectively fixedly connected with matched with the horizontal groove degree
Interior grip block and the outer grip block being fixedly connected with the sliding block.Made as a result, by the connection of interior grip block and outer grip block
It is securely fixed on the outside of synchronous belt with slide unit is made.
Further, two insides of the sliding block are equipped with half-arc groove corresponding with the horizontal groove, the water
It is embedded with ball, the height of the diameter of the half-arc groove and the horizontal groove in the cavity that flat grooves and the half-arc groove are formed
Spend equal, two end faces of the half-arc groove are equipped with baffle, and the inside of ball is located to be located on the outside of horizontal groove and slide as a result,
In the half-arc groove of block, keep horizontal groove of the slide unit always along guide rail in moving process for linear motion, while ball again will
The sliding devil of slide unit switchs to rolling friction, improves the smoothness of slide unit movement, and baffle, which is arranged, can limit mounted in sliding block
Ball between horizontal groove rolls in cavity without skidding off.
Further, the matched end face of half-arc groove of the outer grip block and the sliding block is arc-shaped.Make as a result,
Outer grip block is more bonded closely with the fixation of sliding block.
Further, it is set in the half-arc groove of the sliding block both sides there are two the ball, two balls divide
Not Wei Yu in the both ends of outer grip block, being arranged with four balls altogether in the half-arc groove of sliding block as a result, makes sliding block lead
Movement on rail is more smooth, and the load capacity of slide unit can be improved.
Further, the synchronous belt is linear belt or endless-belt.It selects according to actual needs as a result, different
Synchronous belt.
Further, the belt is linear belt, and the junction at linear belt both ends passes through the outer grip block
It is fixed together with interior grip block, the interior grip block and the outer grip block clamping face opposite with the linear belt are all provided with
There is sawtooth, sawtooth increasing friction force allows synchronous belt to be secured firmly on sliding block as a result, while using linear belt
Synchronous belt can be pre-tightened manually by adjusting two pairs of positions at linear belt both ends, can be used as spare firmly beforehand means.
Further, the guide rail is made of aluminium alloy extrusions, aluminium alloy extrusions good appearance, the good, thermal deformation of rigidity
Small, feeding stability is high, easy to process and can keep available accuracy.
Universal straight line slide unit provided by the invention, has the advantages that：
1, tightening regulator is connected on the driven wheel of guide rail one end, because relaxation causes after synchronous belt load a period of time
Belt Length it is elongated, since stress is unequal at left and right sides of driven wheel, the spring in outside can automatically make driven wheel tension same
It walks belt to pre-tighten, without manually being pre-tightened after shutdown, ensure that the normal operation of slide unit, improve work efficiency, while
Synchronous belt is avoided to bring damage to belt because relaxation is driven when in non-Pre strained state, extend synchronous belt uses the longevity
Life；
2, half-arc groove and ball are equipped in sliding block, sliding friction when by sliding motion process switchs to rolling friction, protects
The smoothness for having demonstrate,proved sliding block movement, improves the load capacity of entire slide unit；
3, guide rail makes synchronous belt vertical recessed using the horizontal groove and vertical groove for being interconnected and be in " ten " font
It is driven in slot, and sliding block is also secured on horizontal groove and synchronous belt equipped with interior grip block and outer grip block, and inner clip
Interior Slideslip of the block along horizontal groove is held, ensures the Linear transmission of synchronous belt and sliding block, improves the stability of transmission.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, will make below to required in the embodiment of the present invention
Attached drawing is briefly described.It should be evident that drawings described below is only some embodiments of the present invention, for
For those of ordinary skill in the art, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing.
Fig. 1 is a kind of universal dimensional structure diagram of embodiment of straight line slide unit of the present invention；
Fig. 2 is the structural decomposition diagram of Fig. 1.
In figure：
1, motor fixing seat；2, guide rail；21, horizontal groove；22, vertical groove；3, sliding block；31, interior grip block；32, outer
Grip block；33, half-arc groove；34, ball；35, baffle；36, sawtooth；4, motor；5, driving wheel；6, synchronous belt；7, driven
Wheel；8, driven wheeling support；81, the first top plate；82, foreboard；83, back plate；84, the first right panel；85, the first opening；86, it second opens
Mouthful；87, guide post；88, the first circular hole；9, adjustable plate；91, the second top plate；92, the second right panel；93, the second circular hole；94, oval long
Hole；95, third circular hole；10, spring supporting bar；11, spring；12, caging bolt；13, adjusting bolt.
Specific implementation mode
Technical solution to further illustrate the present invention below with reference to the accompanying drawings and specific embodiments.
Wherein, the drawings are for illustrative purposes only and are merely schematic diagrams rather than pictorial diagram, should not be understood as to this
The limitation of patent；Embodiment in order to better illustrate the present invention, the certain components of attached drawing have omission, zoom in or out, not
Represent the size of actual product；It will be understood by those skilled in the art that certain known features and its explanation may be omitted and be in attached drawing
It is appreciated that.
The same or similar label correspond to the same or similar components in the attached drawing of the embodiment of the present invention；In retouching for the present invention
In stating, it is to be understood that closed if there is the orientation of the instructions such as term "upper", "lower", "left", "right", "inner", "outside" or position
System is merely for convenience of description of the present invention and simplification of the description to be based on the orientation or positional relationship shown in the drawings, rather than indicates
Or imply that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore retouched in attached drawing
The term for stating position relationship only for illustration, should not be understood as the limitation to this patent, for the common skill of this field
For art personnel, the concrete meaning of above-mentioned term can be understood as the case may be.
As depicted in figs. 1 and 2, a kind of universal straight line slide unit, including one end be equipped with motor fixing seat 1 guide rail 2, with lead
The motor 4 that 2 matched sliding block 3 of rail and driving sliding block 3 are moved along guide rail 2, motor fixing seat 1 are arranged below same with motor 4
The driving wheel 5 of axis connection, driving wheel 5 are connect by synchronous belt 6 with the driven wheel 7 for being fixed on 2 other end of guide rail, driven wheel 7
Shaft be connected with tightening regulator, tightening regulator includes the driven wheeling support 8 being fixed on guide rail 2, is set to driven wheel
Adjustable plate 9, spring supporting bar 10 on bearing 8 and the spring 11 being set on spring supporting bar 10.
Wherein, driven wheeling support 8 includes the first top plate 81 and 81 integrally connected of the first top plate for being fixed on 2 top of guide rail
Foreboard 82, back plate 83 and the first right panel 84, the first top plate 81 is equipped with interconnected and in the shape of a " convex " first opening 85
Four guide posts 87 with the second opening 86 and positioned at the first opening 85 and the second 86 both sides of opening, will can also lead as needed
The setting of column 87 is in the first opening 85 or the second 86 both sides of opening, and the quantity of guide post 87 can be two, six or eight, and first is right
84 center of plate offers the first circular hole 88；Adjustable plate 9 include the second top plate 91 and with 91 integrally connected of the second top plate second
Right panel 92, offer on the second top plate 91 second circular hole 93 opposite with the first opening 85 and with 87 matched ellipse of guide post
Slot hole 94 offers third circular hole 95 on second right panel 92, and the shaft of driven wheel 7 sequentially passes through 85 He of the first opening from lower to upper
Second circular hole 93 is bolted on the second top plate 91, and 10 one end of spring supporting bar sequentially passes through the first circular hole 88 from outside
With third circular hole 95 and caging bolt 12 is connected in end to be flexibly connected with adjustable plate 9, the other end be arranged with successively spring 11 and
End is connected with adjusting bolt 13, makes the spring 11 between adjusting bolt 13 and the second right panel 92 by rotating adjusting bolt 13
In compressive state pulling force is provided for the preload of synchronous belt 6.
In addition, 2 both sides of guide rail offer the horizontal groove 21 and vertical groove 22 for being interconnected and be in " ten " font, erect
The height of straight groove 22 is more than the width of synchronous belt 6, and synchronous belt 6 is in vertical groove 22.The open height and water of guide rail 2
The height of flat grooves 21 is equal, and the width of synchronous belt 6 is more than the height of horizontal groove 21, and 6 both sides of synchronous belt are fixed respectively
The outer grip block 32 for being connected with and horizontal groove 21 matched interior grip block 31 and being fixedly connected with sliding block 3.In order to make cunning
Block 3 can be along 2 straight-line rolling of guide rail, and two insides of sliding block 3 are equipped with half-arc groove 33 corresponding with horizontal groove 21, horizontal recessed
It is embedded with ball 34, the diameter of half-arc groove 33 and the height phase of horizontal groove 21 in the cavity that slot 21 and half-arc groove 33 are formed
Deng.
Wherein, outer grip block 32 and the 33 matched end face of half-arc groove of sliding block 3 are arc-shaped, in order to improve slide unit
Load capacity ensures the mobile smoothness of sliding block 3, if there are four ball 34, two are respectively provided in the half-arc groove 33 of 3 both sides of sliding block
A ball 34, two balls 34 are located at the both ends of outer grip block 32, are mounted between sliding block 3 and horizontal groove 21 to limit
Ball 34 rolled in cavity without skidding off, two end faces of half-arc groove 33 are equipped with baffle 35.
In addition, synchronous belt 6 is linear belt, the junction at linear belt both ends passes through outer grip block 32 and inner clip
It holds block 31 to be fixed together, interior grip block 31 and the clamping face opposite with linear belt of outer grip block 32 are equipped with sawtooth 36.Root
According to actual needs, endless-belt can also be selected, so that sliding block 3 is fixed on synchronous belt 6 by being punched on endless-belt.
In addition, for the ease of processing, good appearance is provided, the guide rail 2 that rigidity is good, thermal deformation is small and feeding stability is high,
Guide rail 2 is made of aluminium alloy extrusions.
When using universal straight line slide unit provided by the invention, adjusting the adjusting bolt 13 of right end makes spring 11 press
Contracting, the transmission group that driving wheel 5, driven wheel 7 and synchronous belt 6 are formed are in Pre strained state, start motor 4, and motor 4 drives actively
5 rotation of wheel, driving wheel 5 drive driven wheel 7 to rotate by synchronous belt 6 again, and synchronous belt 6 does straight line with movable slider 3 along guide rail 2
Movement, after running a period of time, synchronous belt 6 is elongated since long-time load starts to relax, the synchronization that 7 left side of driven wheel is subject to
The pulling force of belt 6 is less than the pulling force that right side adjustable plate 9 provides, and the spring 11 in compressive state will provide a reinstatement
Pulling force, drive adjustable plate 9 86 to be moved right along the second opening, adjustable plate 9 passes through the junction of the second circular hole 93 and driven wheel 7
The pulling force provided to the right drives driven wheel 7 to be moved towards the second opening 86 along the first opening 85, is led simultaneously because adjustable plate 9 is equipped with
Column 87 and oval slot hole 94 ensure driven wheel 7 to the right and are linear movement, driven wheel 7 increased during moving right with
The distance of driving wheel 5, loose synchronous belt 6 is tightened up again normally to be moved transmission belt movable slider 3, if synchronous belt 6
Go out relaxation, the above-mentioned preload process of automatic cycle again, until the second right panel 92 is in contact with the first right panel 84 of driven wheel pedestal 8
Entire tightening regulator can not again move right thus.
It is to be understood that above-mentioned specific implementation mode is only presently preferred embodiments of the present invention and institute's application technology principle,
In technical scope disclosed in this invention, variation or replace that any one skilled in the art is readily apparent that
It changes, should all cover within the scope of the present invention.
Claims (10)
1. a kind of universal straight line slide unit, which is characterized in that including one end be equipped with motor fixing seat guide rail, with the guide rail phase
The motor that the sliding block and the driving sliding block of cooperation are moved along the guide rail, the motor fixing seat are arranged below and the electricity
The coaxially connected driving wheel of machine, the driving wheel are connect by synchronous belt with the driven wheel for being fixed on the guide rail other end,
The shaft of the driven wheel is connected with tightening regulator, and the tightening regulator includes the driven wheel being fixed on the guide rail
Bearing, the adjustable plate on the driven wheeling support, spring supporting bar and the spring being set on the spring supporting bar.
2. universal straight line slide unit according to claim 1, which is characterized in that the driven wheeling support includes being fixed on institute
The first top plate, foreboard, back plate and the first right panel with the first top plate integrally connected for stating rail crown, first top plate
Equipped with interconnected and in the shape of a " convex " the first opening and the second opening and position first opening and/or the second opening
Several guide posts of both sides, first right panel center offer the first circular hole；
The adjustable plate includes the second top plate and the second right panel with the second top plate integrally connected, on second top plate
Offer with first opposite second circular hole of opening and with the matched oval slot hole of the guide post, second right panel
On offer third circular hole；
The shaft of the driven wheel sequentially passes through first opening from lower to upper and the second circular hole be bolted on it is described
On second top plate, described spring supporting bar one end sequentially passes through first circular hole and the third circular hole and is connected with limit in end
Position bolt, the other end is arranged with the spring successively and end is connected with adjusting bolt.
3. universal straight line slide unit according to claim 1, which is characterized in that the guide rail both sides, which offer, mutually to be interconnected
Horizontal groove and vertical groove logical and that be in " ten " font, the height of the vertical groove are more than the width of the synchronous belt,
The synchronous belt is in the vertical groove.
4. universal straight line slide unit according to claim 3, which is characterized in that the open height of the guide rail and the water
The height of flat grooves is equal, and the width of the synchronous belt is more than the height of the horizontal groove, the synchronous belt both sides point
The outer grip block for not being fixedly connected with and the horizontal groove matched interior grip block and being fixedly connected with the sliding block.
5. universal straight line slide unit according to claim 4, which is characterized in that two insides of the sliding block are equipped with and institute
The corresponding half-arc groove of horizontal groove is stated, ball, institute are embedded in the cavity that the horizontal groove and the half-arc groove are formed
The diameter for stating half-arc groove is equal with the height of the horizontal groove, and two end faces of the half-arc groove are equipped with baffle.
6. universal straight line slide unit according to claim 5, which is characterized in that the outer grip block and the half of the sliding block
The matched end face of arc groove is arc-shaped.
7. universal straight line slide unit according to claim 5, which is characterized in that the half-arc groove of the sliding block both sides
Inside set there are two the ball, two balls be located in the both ends of outer grip block.
8. universal straight line slide unit according to claim 5, which is characterized in that the synchronous belt be linear belt or
Endless-belt.
9. universal straight line slide unit according to claim 8, which is characterized in that the belt is linear belt, straight line
The junction at shape belt both ends is fixed together by the outer grip block and interior grip block, the interior grip block and the outer clip
It holds the block clamping face opposite with the linear belt and is equipped with sawtooth.
10. according to the universal straight line slide unit described in any one of claim 1~9 claim, which is characterized in that the guide rail
It is made of aluminium alloy extrusions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810856336.6A CN108792486A (en) | 2018-07-31 | 2018-07-31 | A kind of universal straight line slide unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810856336.6A CN108792486A (en) | 2018-07-31 | 2018-07-31 | A kind of universal straight line slide unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108792486A true CN108792486A (en) | 2018-11-13 |
Family
ID=64078667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810856336.6A Pending CN108792486A (en) | 2018-07-31 | 2018-07-31 | A kind of universal straight line slide unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108792486A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109664269A (en) * | 2018-12-03 | 2019-04-23 | 深圳威洛博机器人有限公司 | A kind of profile and slide unit mould group |
| CN112859527A (en) * | 2019-11-27 | 2021-05-28 | 上海微电子装备（集团）股份有限公司 | Double-sliding-table synchronous buffer mechanism and sealing door device |
| CN114988014A (en) * | 2022-06-20 | 2022-09-02 | 昆山同日工业自动化有限公司 | Vertical reciprocating carrying device |
| CN116727705A (en) * | 2023-05-11 | 2023-09-12 | 深圳市东方鼎盛科技有限公司 | Linear sliding table precise positioning device |
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| JP2008020022A (en) * | 2006-07-14 | 2008-01-31 | Itoki Corp | Tension device for chain type drive mechanism |
| CN204437207U (en) * | 2015-01-20 | 2015-07-01 | 广西金邦泰科技有限公司 | A kind of press filter plate drawing chain is from tension structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109664269A (en) * | 2018-12-03 | 2019-04-23 | 深圳威洛博机器人有限公司 | A kind of profile and slide unit mould group |
| CN112859527A (en) * | 2019-11-27 | 2021-05-28 | 上海微电子装备（集团）股份有限公司 | Double-sliding-table synchronous buffer mechanism and sealing door device |
| CN112859527B (en) * | 2019-11-27 | 2022-04-05 | 上海微电子装备（集团）股份有限公司 | Double-sliding-table synchronous buffer mechanism and sealing door device |
| CN114988014A (en) * | 2022-06-20 | 2022-09-02 | 昆山同日工业自动化有限公司 | Vertical reciprocating carrying device |
| CN116727705A (en) * | 2023-05-11 | 2023-09-12 | 深圳市东方鼎盛科技有限公司 | Linear sliding table precise positioning device |
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