CN108754416B - Low-wear guide rod applied to pneumatic actuator and surface process thereof - Google Patents
Low-wear guide rod applied to pneumatic actuator and surface process thereof Download PDFInfo
- Publication number
- CN108754416B CN108754416B CN201810526266.8A CN201810526266A CN108754416B CN 108754416 B CN108754416 B CN 108754416B CN 201810526266 A CN201810526266 A CN 201810526266A CN 108754416 B CN108754416 B CN 108754416B
- Authority
- CN
- China
- Prior art keywords
- guide rod
- base material
- pneumatic actuator
- low
- carbon steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title abstract description 18
- 230000008569 process Effects 0.000 title abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 239000000463 material Substances 0.000 claims abstract description 47
- 229910000975 Carbon steel Inorganic materials 0.000 claims abstract description 30
- 239000010962 carbon steel Substances 0.000 claims abstract description 30
- 230000008021 deposition Effects 0.000 claims abstract description 24
- 238000005406 washing Methods 0.000 claims abstract description 20
- 238000001914 filtration Methods 0.000 claims abstract description 17
- 238000005299 abrasion Methods 0.000 claims abstract description 15
- 238000005516 engineering process Methods 0.000 claims abstract description 15
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 239000002253 acid Substances 0.000 claims abstract description 10
- 238000001035 drying Methods 0.000 claims abstract description 10
- 239000007787 solid Substances 0.000 claims abstract description 10
- 238000005498 polishing Methods 0.000 claims abstract description 9
- 238000004080 punching Methods 0.000 claims abstract description 9
- 229910052961 molybdenite Inorganic materials 0.000 claims abstract description 7
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims abstract description 5
- 238000000151 deposition Methods 0.000 claims description 27
- 238000002360 preparation method Methods 0.000 claims description 19
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 18
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 16
- 239000000243 solution Substances 0.000 claims description 11
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 239000003929 acidic solution Substances 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000005260 corrosion Methods 0.000 abstract description 12
- 230000007797 corrosion Effects 0.000 abstract description 12
- 230000000052 comparative effect Effects 0.000 description 14
- 150000002500 ions Chemical class 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000007747 plating Methods 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 229910007948 ZrB2 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 238000005272 metallurgy Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a low-abrasion guide rod applied to a pneumatic actuator and a surface process thereof, and the low-abrasion guide rod comprises the following steps of (1) providing a carbon steel substrate of the guide rod, polishing the surface of the carbon steel substrate, placing the carbon steel substrate in an acid solution, washing, and then washing and drying; step (2), performing gas bombardment on the pretreated base material by using a Hall gas ion source to strengthen the surface of the base material, and step (3) punching round holes on the surface of the base material by using an Nd, YAG pulse laser puncher; step (4), ZrB is respectively deposited on the surface of the base material by adopting a magnetic filtration deposition technology2Target and MoS2And the target is used for forming a solid coating coated on the surface of the base material so as to obtain the guide rod after surface processing. The guide rod applied to the pneumatic actuator prepared by the invention has excellent wear resistance, excellent corrosion resistance, self-lubricating property and good hardness.
Description
Technical Field
The invention relates to the technical field of guide rod materials applied to a pneumatic actuator, in particular to a low-abrasion guide rod applied to the pneumatic actuator and a surface process thereof.
Background
The actuators can be classified into pneumatic, electric and hydraulic according to the energy sources used by the actuators. The pneumatic actuator is an actuator taking compressed air as power and has the advantages of simple structure, reliable action, stable performance, large output force, convenience in maintenance, fire prevention, explosion prevention and the like. The device not only can be matched with a pneumatic unit combination instrument for use, but also can be matched with an electric combination instrument and a computer for use through an electric-pneumatic converter or an electric-pneumatic valve positioner. Therefore, it is widely applied to industrial control processes of chemical industry, petroleum, metallurgy, electric power and the like.
Pneumatic actuators are mainly divided into two main categories: membrane and piston type. They are composed of a control element and an actuator. The basic mechanism of a common QZ type pneumatic actuator comprises a cylinder, a piston rod, a connecting rod, an output shaft and a force arm. In the improved pneumatic actuator, a guide rod structure is further arranged, and the guide rod can bear the transverse force caused by the angle change between the surface of the sliding object and the vertical direction of the piston rod, so that the piston rod is supported. The piston rod is supported by the guide rod, so that the side load of the piston is counteracted, the abrasion of the piston rod, the bearing and the sealing element is reduced, and the service life is prolonged. The guide rod is generally made of carbon steel plated with hard chromium as a main base material to ensure sufficient hardness and wear resistance. However, the hard chromium plating process has high price and high cost of non-bright plating, and the hard chromium plating process needs to be reprocessed after plating; the thickness of the plating layer is too thin, generally about 0.05-0.15 mm, and the wear resistance and corrosion resistance of the material are influenced; the coating has limited lubricity and poor self-lubricating effect; in addition, the hard chromium plating process has higher requirements on the smoothness of the surface of the part.
With the increasingly wide application of the pneumatic actuator in industries such as petrifaction, electric power and metallurgy, the harsh use environment and operation condition put higher demands on the performance and service life of parts in the pneumatic actuator. The ideal materials of parts such as guide rods, piston rods and the like need to have excellent wear resistance, excellent corrosion resistance, self-lubrication and good hardness, and how to obtain the materials of parts such as guide rods, piston rods and the like with ideal performance through a certain preparation process is an important subject to be solved and overcome at present.
Disclosure of Invention
Aiming at the problems existing in the materials of the parts of the guide rod at present, the invention provides a low-abrasion guide rod applied to a pneumatic actuator and a surface process thereof. The guide rod applied to the pneumatic actuator is prepared, and the prepared guide rod has excellent wear resistance, excellent corrosion resistance, self-lubricating property and good hardness through a series of surface treatment processes.
The invention discloses a preparation process of a low-abrasion guide rod applied to a pneumatic actuator, which comprises the following steps:
step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution, fully washing and taking out the substrate, and then washing and drying the substrate to obtain a pretreated substrate;
step (2), performing gas bombardment on the base material by using a Hall gas ion source to strengthen the surface of the pretreated base material, wherein the working voltage of the Hall source is 500-1800V, the bombardment environment temperature is 600-800 ℃, and the bombardment time is 2-3 h;
and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface;
step (4), ZrB is respectively deposited on the surface of the substrate with the textured surface by adopting a magnetic filtration deposition technology (FCVA)2Target and MoS2And the target is used for forming a solid coating coated on the surface of the base material so as to obtain the guide rod after surface processing.
Preferably, the acidic solution in the step (1) is a solution containing 1-2 mol/L of sulfuric acid and 0.5-1 mol/L of hydrofluoric acid.
Preferably, the gas in step (2) is helium or argon.
Preferably, ZrB described in step (4)2The mass percentage of the target is 30-65%, and the MoS2The mass percentage of the target is 35-70%.
Preferably, the magnetic filtration deposition technology in the step (4) adopts 90-120A of arcing current, 2.0-4.0A of bent pipe magnetic field and 200-800 mA of beam current, and negative pressure of-800V-300V is adopted for deposition.
The invention also discloses a low-abrasion guide rod applied to the pneumatic actuator, and the guide rod is prepared by the preparation process.
After the technical scheme is adopted, the invention has the following beneficial effects:
1. in the preparation process, the Hall gas ion source is used for carrying out gas bombardment on the base material, and the preparation process has the advantages that: 1) the surface density is improved; 2) capable of activating the substrate surface; 3) the gas enters the subsurface to form chemical bonds to improve the surface strength, thereby strengthening the surface of the substrate.
2. Compared with PVD (physical vapor deposition) deposition methods such as magnetron sputtering and electron beam evaporation, the preparation process disclosed by the invention has the advantage that the atom ionization rate of the magnetic filtering arc deposition equipment adopted is very high. Because of high atom ionization rate, the plasma density can be increased, and large particles are reduced during film formation, which is beneficial to improving the hardness, wear resistance, compactness, film-substrate binding force and the like of the film.
3. The solid coating prepared by the invention has higher hardness and good lubricating property, and the preparation process is simple, and can be used as a wear-resistant lubricating coating on the surfaces of various matrixes or workpieces.
4. The guide rod applied to the pneumatic actuator prepared by the invention has excellent wear resistance, excellent corrosion resistance, self-lubricating property and good hardness through a series of surface treatment processes.
5. The preparation process has the characteristics of simple process steps, strong operability, good controllability and easy industrial production, and has better economic benefit and commercial prospect.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto. The results of the performance test of all examples and comparative examples were measured by the following method.
Hardness test of the coating: performed on an MTS Nano G200 nanoindenter tester. Wherein the testing pressure head adopts a diamond Berkovich pressure head, and the maximum pressing depth is 200nm (within 15% of the film thickness) in order to eliminate the substrate effect. 6 points were measured for each sample and averaged.
And (3) wear resistance test: the test was carried out on a UMT-2 multifunctional frictional wear tester, sliding reciprocally by means of ball/plane contact, the upper test specimen being a 9.525mm diameter steel ball GCr15 (hardness HV766), the lower test specimen being the samples of the examples and comparative examples, and the sample size being 25mm × 12mm × 6 mm.
And (3) testing the corrosion resistance: the guide rod test samples are respectively soaked in concentrated nitric acid with the concentration of 65%, the soaking time is 18 hours in total, and the corrosion condition of the surfaces of the samples is observed so as to represent the corrosion resistance of the samples.
Example 1
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water and drying to obtain a pretreated substrate; step (2), pretreating by using a Hall gas ion sourceThe base material is bombarded by helium to strengthen the surface of the base material, the working voltage of a Hall source is 1000V, the temperature of a bombarding environment is 700 ℃, and the bombarding time is 2 h; and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface; step (4), ZrB with the mass percent of 30% is respectively deposited on the surface of the substrate with the textured surface by adopting a magnetic filtration deposition technology2Target and 70% MoS by mass2The magnetic filtration deposition technology adopts 100A of arcing current, 3.0A of a bent pipe magnetic field and 500mA of beam current, and adopts negative pressure-500V for deposition to form a solid coating coated on the surface of a base material, so that the guide rod after surface process treatment is obtained.
Example 2
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water, and drying to obtain a pretreated substrate; step (2), performing helium bombardment on the pretreated substrate by using a Hall gas ion source to strengthen the surface of the substrate, wherein the working voltage of the Hall source is 1000V, the bombardment environment temperature is 700 ℃, and the bombardment time is 2 h; and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface; step (4), ZrB with the mass percent of 45% is respectively deposited on the surface of the base material with the textured surface by adopting a magnetic filtration deposition technology2Target and 55% MoS by mass2The magnetic filtration deposition technology adopts 100A of arcing current, 3.0A of a bent pipe magnetic field and 500mA of beam current, and adopts negative pressure-500V for deposition to form a solid coating coated on the surface of a base material, so that the guide rod after surface process treatment is obtained.
Example 3
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: step (1) of providing a guide barPolishing the surface of a carbon steel substrate, placing the polished carbon steel substrate in an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water and drying to obtain a pretreated substrate; step (2), performing helium bombardment on the pretreated substrate by using a Hall gas ion source to strengthen the surface of the substrate, wherein the working voltage of the Hall source is 1000V, the bombardment environment temperature is 700 ℃, and the bombardment time is 2 h; and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface; step (4), ZrB with the mass percent of 55% is respectively deposited on the surface of the base material with the textured surface by adopting a magnetic filtration deposition technology2Target and MoS 45% by mass2The magnetic filtration deposition technology adopts 100A of arcing current, 3.0A of a bent pipe magnetic field and 500mA of beam current, and adopts negative pressure-500V for deposition to form a solid coating coated on the surface of a base material, so that the guide rod after surface process treatment is obtained.
Example 4
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water, and drying to obtain a pretreated substrate; step (2), performing helium bombardment on the pretreated substrate by using a Hall gas ion source to strengthen the surface of the substrate, wherein the working voltage of the Hall source is 1000V, the bombardment environment temperature is 700 ℃, and the bombardment time is 2 h; and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface; step (4), ZrB with the mass percent of 65% is respectively deposited on the surface of the substrate with the textured surface by adopting a magnetic filtration deposition technology2Target and 35% MoS by mass2The magnetic filtration deposition technology adopts 100A of arcing current, 3.0A of bent pipe magnetic field and 500mA of beam current, and adopts negative pressure-500V to carry out deposition to form a solid coated on the surface of a substrateAnd coating the body to obtain the guide rod after surface processing.
Comparative example 1
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water, and drying to obtain a pretreated substrate; and (2) adopting Nd: punching round holes on the surface of the base material treated in the step (1) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area ratio is 10% -25%, so as to obtain a base material with a textured surface; step (3) respectively depositing ZrB with the mass percent of 45% on the surface of the base material with the textured surface by adopting a magnetic filtration deposition technology2Target and 55% MoS by mass2The magnetic filtration deposition technology adopts 100A of arcing current, 3.0A of a bent pipe magnetic field and 500mA of beam current, and adopts negative pressure-500V for deposition to form a solid coating coated on the surface of a base material, so that the guide rod after surface process treatment is obtained.
Comparative example 2
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water, and drying to obtain a pretreated substrate; step (2), performing helium bombardment on the pretreated substrate by using a Hall gas ion source to strengthen the surface of the substrate, wherein the working voltage of the Hall source is 1000V, the bombardment environment temperature is 700 ℃, and the bombardment time is 2 h; and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface; step (4), respectively depositing ZrB with the mass percent of 45% on the surface of the substrate by adopting a magnetron sputtering method2Target and 55% MoS by mass2Target of which ZrB2The target sputtering power density is: 4.3W/cm2，MoS2Target sputtering power densityThe degree is as follows: 0.5W/cm2And forming a solid coating coated on the surface of the base material, and further obtaining the guide rod after surface processing.
Comparative example 3
The preparation method of the low-abrasion guide rod applied to the pneumatic actuator comprises the following steps: and (1) providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, putting the polished carbon steel substrate into an acid solution containing 1mol/L sulfuric acid and 0.5mol/L hydrofluoric acid, fully washing, taking out, washing with water, and drying to obtain a pretreated substrate, thereby obtaining the guide rod.
The results of the performance test of the guide bars of examples 1 to 4 and comparative examples 1 to 3 are shown in Table 1
TABLE 1
| Serial number | Hardness (GPa) | Wear rate (m)3/N·m) | Coefficient of friction | Corrosion effect |
| Example 1 | 31 | 1.6×10-17 | 0.2 | Is not obvious |
| Example 2 | 36 | 6.7×10-17 | 0.2 | Is not obvious |
| Example 3 | 40 | 1.5×10-16 | 0.3 | Is not obvious |
| Example 4 | 45 | 5.2×10-16 | 0.3 | Is not obvious |
| Comparative example 1 | 30 | 1.4×10-16 | 0.2 | Is obvious |
| Comparative example 2 | 33 | 2.5×10-16 | 0.3 | Is not obvious |
| Comparative example 3 | 7 | 7.8×10-12 | 0.9 | Is obvious |
From the results shown in Table 1, it can be seen from examples 1 to 4 that,with MoS2Is increased in mass percent, ZrB2The hardness of the guide rod is gradually reduced, and the wear rate and the friction coefficient are gradually reduced. The guide rod prepared in the embodiment 1-4 has the hardness of more than 30GPa and the wear rate of less than 5.2 multiplied by 10-16The friction coefficient is less than 0.2, the corrosion effect is not obvious, and the wear resistance, the corrosion resistance, the self-lubricating property and the hardness are excellent.
Comparing example 2 with comparative example 1, it was found that the surface of the base material can be strengthened by gas bombardment of the base material with a hall gas ion source, the hardness and wear rate of the guide bar can be increased, and the corrosion resistance thereof can be improved. Further comparing example 2 with comparative example 2, it was found that the guide bar in example 2 had higher hardness than comparative example 2, lower wear rate than comparative example 2, and better lubricity than comparative example 2. Compared with the deposition method of magnetron sputtering, the magnetic filtration arc deposition adopted in the preparation process can increase the plasma density and reduce large particles during film formation, thereby being beneficial to improving the hardness, wear resistance, compactness, film-substrate binding force and the like of the film.
It should be noted that the above-mentioned embodiments are only used for illustrating the present invention and not for limiting the scope of the present invention, and those skilled in the art should understand that the modifications or equivalent substitutions made on the present invention without departing from the spirit and scope of the present invention should be covered within the scope of the present invention. Furthermore, unless the context indicates otherwise, words that appear in the singular include the plural and vice versa. Additionally, all or a portion of any embodiment may be utilized with all or a portion of any other embodiment, unless stated otherwise.
Claims (6)
1. A preparation process of a low-abrasion guide rod applied to a pneumatic actuator is characterized by comprising the following steps of:
step (1), providing a carbon steel substrate of a guide rod, polishing the surface of the carbon steel substrate, placing the polished carbon steel substrate in an acid solution, fully washing and taking out the substrate, and then washing and drying the substrate to obtain a pretreated substrate;
step (2), performing gas bombardment on the base material by using a Hall gas ion source to strengthen the surface of the pretreated base material, wherein the working voltage of the Hall source is 500-1800V, the bombardment environment temperature is 600-800 ℃, and the bombardment time is 2-3 h;
and (3) adopting Nd: punching round holes on the surface of the base material treated in the step (2) by using a YAG pulse laser puncher, wherein the hole diameter is 0.06-0.1 mm, and the area rate is 10% -25%, so as to obtain a base material with a textured surface;
step (4), ZrB is respectively deposited on the surface of the base material with the textured surface by adopting a magnetic filtration deposition technology2Target and MoS2And the target is used for forming a solid coating coated on the surface of the base material so as to obtain the guide rod after surface processing.
2. The process for preparing a low-wear guide rod for a pneumatic actuator according to claim 1, wherein the acidic solution in step (1) is a solution containing 1-2 mol/L sulfuric acid and 0.5-1 mol/L hydrofluoric acid.
3. The process for preparing a low-wear guide rod for a pneumatic actuator according to claim 1, wherein the gas in step (2) is helium or argon.
4. The process for preparing a low-wear guide rod for a pneumatic actuator according to claim 1, wherein ZrB in the step (4) is used2The mass percentage of the target is 30-65%, and the MoS2The mass percentage of the target is 35-70%.
5. The preparation process of the low-wear guide rod applied to the pneumatic actuator according to claim 1, wherein the magnetic filtration deposition technology in the step (4) adopts an arc starting current of 90-120A, a bent pipe magnetic field of 2.0-4.0A and a beam current of 200-800 mA, and the deposition is carried out by adopting a negative pressure of-800V-300V.
6. A low-wear guide rod for a pneumatic actuator, wherein the guide rod is prepared by the preparation process according to any one of claims 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810526266.8A CN108754416B (en) | 2018-05-28 | 2018-05-28 | Low-wear guide rod applied to pneumatic actuator and surface process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810526266.8A CN108754416B (en) | 2018-05-28 | 2018-05-28 | Low-wear guide rod applied to pneumatic actuator and surface process thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108754416A CN108754416A (en) | 2018-11-06 |
| CN108754416B true CN108754416B (en) | 2020-12-18 |
Family
ID=64003098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810526266.8A Active CN108754416B (en) | 2018-05-28 | 2018-05-28 | Low-wear guide rod applied to pneumatic actuator and surface process thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108754416B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110735120B (en) * | 2019-10-31 | 2021-08-13 | 江苏科技大学 | NbN/MoSN/MoS2Hard self-lubricating nano-structure composite film and preparation method thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1826478A (en) * | 2003-06-11 | 2006-08-30 | 石川岛播磨重工业株式会社 | Rotating member, housing, bearing, gearbox, rotating machine, shaft structure, and surface treatment method |
| CN101201081A (en) * | 2006-08-02 | 2008-06-18 | 米巴·格来特来格有限公司 | Anti-friction layer for a bearing element |
| CN102059327A (en) * | 2010-12-20 | 2011-05-18 | 西安交通大学 | Method for preparing heat-conductive wear-resistant coating on surface of continuous casting mold |
| CN102187049A (en) * | 2008-08-20 | 2011-09-14 | 埃克森美孚研究工程公司 | Ultra-low friction coatings for drill stem assemblies |
| CN102362044A (en) * | 2009-02-17 | 2012-02-22 | 埃克森美孚研究工程公司 | Coated oil and gas well production devices |
| CN102859250A (en) * | 2010-02-22 | 2013-01-02 | 埃克森美孚研究工程公司 | Coated sleeved oil and gas well production devices |
| CN103014819A (en) * | 2011-09-27 | 2013-04-03 | 肖云捷 | Wearable compound layer material for machine parts and manufacturing method and equipment thereof |
| CN105209178A (en) * | 2013-03-15 | 2015-12-30 | 梅索涂层公司 | Ternary ceramic thermal spraying powder and coating method |
| CN107743527A (en) * | 2015-05-01 | 2018-02-27 | 梯尔镀层有限公司 | The base material of coating |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080093047A1 (en) * | 2006-10-18 | 2008-04-24 | Inframat Corporation | Casting molds coated for surface enhancement and methods of making |
| DE102008009487B4 (en) * | 2008-02-15 | 2022-09-22 | Walter Ag | Peened cutting insert and method |
-
2018
- 2018-05-28 CN CN201810526266.8A patent/CN108754416B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1826478A (en) * | 2003-06-11 | 2006-08-30 | 石川岛播磨重工业株式会社 | Rotating member, housing, bearing, gearbox, rotating machine, shaft structure, and surface treatment method |
| CN101201081A (en) * | 2006-08-02 | 2008-06-18 | 米巴·格来特来格有限公司 | Anti-friction layer for a bearing element |
| CN102187049A (en) * | 2008-08-20 | 2011-09-14 | 埃克森美孚研究工程公司 | Ultra-low friction coatings for drill stem assemblies |
| CN102362044A (en) * | 2009-02-17 | 2012-02-22 | 埃克森美孚研究工程公司 | Coated oil and gas well production devices |
| CN102859250A (en) * | 2010-02-22 | 2013-01-02 | 埃克森美孚研究工程公司 | Coated sleeved oil and gas well production devices |
| CN102059327A (en) * | 2010-12-20 | 2011-05-18 | 西安交通大学 | Method for preparing heat-conductive wear-resistant coating on surface of continuous casting mold |
| CN103014819A (en) * | 2011-09-27 | 2013-04-03 | 肖云捷 | Wearable compound layer material for machine parts and manufacturing method and equipment thereof |
| CN105209178A (en) * | 2013-03-15 | 2015-12-30 | 梅索涂层公司 | Ternary ceramic thermal spraying powder and coating method |
| CN107743527A (en) * | 2015-05-01 | 2018-02-27 | 梯尔镀层有限公司 | The base material of coating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108754416A (en) | 2018-11-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109023362B (en) | Impact-resistant wear-resistant lubricating composite coating on surface of hydraulic valve rod and preparation method thereof | |
| CN106884149A (en) | Water environment wear-resistant coating, its preparation method and application | |
| CN108690983A (en) | Wear-and corrosion-resistant Cr/CrAlSiN composite coatings, preparation method and application | |
| CN105239039A (en) | Stamping die for multilayer nano-composite coating, and preparation method thereof | |
| CN108754416B (en) | Low-wear guide rod applied to pneumatic actuator and surface process thereof | |
| CN110306181A (en) | Mg alloy surface composite coating and preparation method thereof | |
| CN109755592A (en) | A kind of metal double polar plates and preparation method thereof and fuel cell | |
| CN103046073B (en) | The novel composite electrode material of a kind of iron-based, copper transition layer and surface nitride coating and preparation method | |
| CN108456883B (en) | Preparation method of carbon-based antifriction and wear-resistant film on surface of substrate | |
| Mertgenç | Examination of wear and rockwell-C adhesion properties of Nitronic 50 steel coated with pack boriding method | |
| CN107142478B (en) | A kind of novel wear resistant corrosion-resistant finishes | |
| CN108611590B (en) | Method for preventing Ti alloy workpiece from being seized | |
| Oohira | Characteristics and Applications of DLC films | |
| CN113512710A (en) | 45 steel surface CrN-Cr gradient coating and preparation method and application thereof | |
| CN103448341B (en) | Resisting salt fog corrosion self-lubricating film for space operation part and preparation method thereof | |
| CN101397666B (en) | Zn/ZnS composite solid lubrication film and preparation method thereof | |
| JP2016540125A (en) | Molybdenum nitride with excellent sliding properties and appropriate hardness | |
| CN109055910B (en) | Wear-resistant, corrosion-resistant and anti-fouling integrated (Cr, Cu) -GLC composite coating and preparation method thereof | |
| CN108588692B (en) | Binary composite structure nickel-boron alloy coating and preparation method and application thereof | |
| Yang et al. | Tribological behavior of borocarburized layer on low-carbon steel treated by double glow plasma surface alloying | |
| CN110714182B (en) | Chromium nitride coating, preparation method and application thereof | |
| CN103290358A (en) | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof | |
| CN110387529B (en) | Composite coating for protecting surface of hydraulic valve rod and preparation method thereof | |
| CN114000147A (en) | Wear-resistant rubber material and preparation method thereof | |
| CN110592535A (en) | Carbon steel surface abrasion-resistant high-temperature protective coating and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201201 Address after: Room 23, 4 / F, building a, 88 Beijing East Road, Taicang Development Zone, Suzhou City, Jiangsu Province Applicant after: Suzhou ruilingke Information Technology Co., Ltd Address before: Room B8406-03, 4th floor, 818 Huayuan Road, Xiangcheng District, Suzhou City, Jiangsu Province Applicant before: SUZHOU QIXIAN INTELLIGENT TECHNOLOGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210707 Address after: 215400 78 beizhangjing Road, Chengxiang Town, Taicang City, Suzhou City, Jiangsu Province Patentee after: TAICANG CITY JUBEI PRECISION MACHINERY Co.,Ltd. Address before: 215400 No.23, 4th floor, building a, No.88, Beijing East Road, Taicang Development Zone, Suzhou City, Jiangsu Province Patentee before: Suzhou ruilingke Information Technology Co., Ltd |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211018 Address after: 215400 No.23, 4th floor, building a, No.88, Beijing East Road, Taicang Development Zone, Suzhou City, Jiangsu Province Patentee after: Suzhou ruilingke Information Technology Co., Ltd Address before: 215400 78 beizhangjing Road, Chengxiang Town, Taicang City, Suzhou City, Jiangsu Province Patentee before: TAICANG CITY JUBEI PRECISION MACHINERY Co.,Ltd. |
|
| TR01 | Transfer of patent right |