CN108750669B - Roller type high-precision glass substrate conveying device - Google Patents
Roller type high-precision glass substrate conveying device Download PDFInfo
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- CN108750669B CN108750669B CN201810428292.7A CN201810428292A CN108750669B CN 108750669 B CN108750669 B CN 108750669B CN 201810428292 A CN201810428292 A CN 201810428292A CN 108750669 B CN108750669 B CN 108750669B
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- 239000011521 glass Substances 0.000 title claims abstract description 85
- 239000000758 substrate Substances 0.000 title claims abstract description 79
- 230000007246 mechanism Effects 0.000 claims abstract description 31
- 238000005299 abrasion Methods 0.000 claims abstract description 4
- 230000001105 regulatory effect Effects 0.000 claims description 20
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 238000004378 air conditioning Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
The invention discloses a roller type high-precision glass substrate conveying device, which comprises a workbench, wherein the top surface of the workbench is fixedly connected with a first supporting vertical plate and a second supporting vertical plate, the inner sides of the first supporting vertical plate and the second supporting vertical plate are respectively provided with a plurality of first rollers and second rollers which are uniformly distributed, the outer side surfaces of the second rollers are respectively fixedly connected with a driven shaft, the end parts of the driven shafts are connected with the second supporting vertical plate through first rotating bearings, the first rollers are connected with the first supporting vertical plate through roller driving mechanisms, the tops of the first rollers and the second rollers are connected with a conveying plate through precise conveying mechanisms, the surface of the conveying plate is provided with square holes, an adjusting and fixing mechanism is arranged right above the conveying plate, and an anti-abrasion mechanism is arranged in each square hole, so that the glass substrate can be conveyed precisely under the premise of not influencing the quality of the glass substrate, meanwhile, the device can be timely adjusted according to the size of the glass substrate, so that the device is wider in application.
Description
Technical Field
The invention relates to the field of glass substrates, in particular to a roller type high-precision glass substrate conveying device.
Background
Glass substrates are one of the key basic materials for the flat panel display industry. The surface of the glass substrate is vapor-plated with an In2O3 or SnO2 transparent conductive layer, namely an ITO film layer. And photoetching to obtain transparent conductive pattern. These patterns are composed of a pixel pattern and an external wiring pattern. Therefore, the outer leads cannot be soldered conventionally, and can be connected only by a conductive rubber bar, a conductive tape, or the like. If scratched, severed or corroded, the device may be scrapped. Although this component accounts for only 17% of the total cost of the liquid crystal panel, it is most expensive, the transportation cost is very high, and the yield directly affects the yield of the components such as color filters of 5 generations or more, which is the most critical part of the panel production.
The glass substrates currently in commercial use are mainly 0.7mm and 0.5mm thick, and are going to be developed for thinner thickness processes. Basically, two glass substrates are used for one TFT-LCD panel, which are used as the bottom glass substrate and the bottom plate of the color filter, respectively. The ratio of the supply of glass substrates from the glass substrate manufacturer to the liquid crystal panel assembly plant and the color filter processing plant is about 1:1.1 to 1: 1.3. Glass substrates for LCD are classified into two types, i.e., alkali glass and alkali-free glass; the alkali glass comprises sodium glass and neutral borosilicate glass, is mostly applied to TN and STNLCD, and is mainly produced by a floating method; the alkali-free glass is mainly alkali-free aluminum silicate glass, the total content of alkali metal is below 1 percent, and the alkali-free glass is mainly used for TFT-LCD and is mainly produced by an overflow fusion method.
When glass substrates are produced, in order to transfer the glass substrates from one processing position to another processing position, a conveying device is needed, the existing conveying device for the glass substrates generally comprises a conveying belt or a conveying roller driven by a driving mechanism, and a fixing mechanism for fixing the glass substrates is arranged on the conveying belt or the conveying roller, so that the glass substrates to be processed can move under the driving of the driving mechanism after being fixed by the fixing mechanism.
However, the conventional glass substrate conveying device has the following defects:
(1) when the glass substrate is conveyed, because the surface of the glass substrate is smooth, the friction force between the glass substrate and the conveyor belt and between the glass substrate and the conveying rollers is small, and the actual conveying distance of the glass substrate is slightly smaller than the expected conveying distance;
(2) in order to accurately convey the glass substrate, the glass substrate is usually fixed by a fixing mechanism, but when the fixing mechanism clamps the glass substrate, the inner part of the glass substrate is easily broken or the surface of the glass substrate is easily abraded, so that the quality of the glass substrate is affected;
(3) the model and the usage of glass substrate are different, and the size also can be different, and current glass substrate conveyer can't adjust in good time according to the size of glass substrate for the application range of device receives the restriction.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the roller type high-precision glass substrate conveying device, which can accurately convey the glass substrate on the premise of not influencing the quality of the glass substrate, so that the using effect of the device is better and more guaranteed, meanwhile, the device can be timely adjusted according to the size of the glass substrate, the application of the device is wider, and the problems in the background art can be effectively solved.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a roller type high-precision glass substrate conveying device comprises a workbench, wherein a first supporting vertical plate and a second supporting vertical plate which are arranged in parallel are fixedly connected to the top surface of the workbench, a plurality of first rollers and a plurality of second rollers which are uniformly distributed are arranged on the inner sides of the first supporting vertical plate and the second supporting vertical plate respectively, driven shafts are fixedly connected to the outer side surfaces of the second rollers, the end portions of the driven shafts are connected with the second supporting vertical plate through first rotary bearings, and the first rollers are connected with the first supporting vertical plate through roller driving mechanisms;
the top of first gyro wheel and second gyro wheel is connected with the conveying board through accurate transport mechanism, and is provided with the quad slit on the surface of conveying board, be provided with directly over the conveying board and adjust fixed establishment, the inside of quad slit is provided with abrasionproof and decreases air supporting mechanism.
Further, the roller driving mechanism comprises a driving motor fixedly connected with the inner side face of the first supporting vertical plate, the output end of the driving motor is connected with a driving shaft, the outer side face of the first roller is fixedly connected with a driving shaft, the end portion of the driving shaft is connected with the first supporting vertical plate through a second rotating bearing, driving sprockets are sleeved on the surfaces of the driving shaft and the driving shaft, and a driving chain is sleeved on the outer portion of each driving sprocket.
Further, accurate transport mechanism includes the strip shaped plate with transport plate bottom surface both ends fixed connection, and is provided with first round of tooth group in the bottom surface of strip shaped plate.
Further, the surfaces of the first roller and the second roller are provided with annular grooves, and the surfaces of the annular grooves are provided with second gear tooth groups meshed with the first gear tooth groups.
Further, adjust fixed establishment including setting up the horizontal spout in conveying board surface both sides, and be provided with two parallel horizontal regulating plates directly over the conveying board, the bottom surface both ends of horizontal regulating plate all are provided with horizontal slider, and horizontal slider card respectively in the horizontal spout that corresponds.
Further, the medial surface of horizontal regulating plate all is provided with vertical spout, and is provided with the vertical slider of a plurality of in vertical spout, the bottom of vertical spout is connected with the side and presss from both sides the arch, the bottom of vertical slider all is provided with presss from both sides the protruding block groove that matches with the side, the medial surface of vertical slider all is provided with the jack, and all inserts in two jacks that correspond and is equipped with the inserted bar, the both sides side of inserted bar all is connected with the support arch, the protruding medial surface of side clamp all is provided with presss from both sides the groove, and the inner wall that presss from both sides the groove all is provided with the cushion.
Further, the surface of horizontal regulating plate all is provided with the fixed screw of being connected with vertical spout, and is equipped with clamping screw in the interpolation of fixed screw, clamping screw's top is connected with the nut, and is provided with two through-holes that run through on the surface of nut, be provided with fixed motor directly over the fixed screw, and fixed motor passes through the fixed bolster and is connected with horizontal regulating plate, fixed motor's output is connected with the fixed axle, and the bottom surface of fixed axle is provided with the inner groovy, the nut is located the inner groovy that corresponds respectively, the top surface of inner groovy all is connected with two pole settings, and the pole setting is inserted respectively and is established in the through-hole that corresponds.
Further, abrasionproof decreases air supporting mechanism is including being located the square box of square hole, and the side of square box all is provided with the direction arch, the side of square hole is provided with the guide way that matches with the direction arch, the bottom of conveying board is connected with the cylinder frame, and installs in the cylinder frame and drive actuating cylinder, the output that drives actuating cylinder is connected with the lift axle, and the top of lift axle and the bottom surface fixed connection of square box.
Further, be provided with evenly distributed's blast pipe in the square box, and be provided with the air cavity in the bottom of square box, the surface of blast pipe all is provided with the exhaust hole that switches on with the air cavity, the bottom surface fixed mounting of square box has the air pump, and the output of air pump passes through the gas-supply pipe and is connected with the air cavity.
Furthermore, the top surface of square box is provided with the elastic ring, the mouth of pipe of blast pipe all is provided with the solenoid valve.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention can ensure that the glass substrate is more accurately conveyed and is not influenced by the smooth surface of the glass substrate, thereby being beneficial to the processing of the glass substrate;
(2) the invention can avoid the damage of the glass substrate under the clamping force or the generation of grinding lines on the surface when the glass substrate is conveyed, and is beneficial to ensuring the quality of the glass substrate;
(3) the invention can be adjusted, so that the device can transmit glass substrates with different sizes, and the device has wider application range and stronger universality.
Drawings
FIG. 1 is a schematic top view of the present invention;
FIG. 2 is a schematic cross-sectional view of a transfer plate according to the present invention;
FIG. 3 is a cross-sectional view of the insert rod of the present invention;
FIG. 4 is a schematic top view of the square box of the present invention;
FIG. 5 is a schematic cross-sectional view of the square box of the present invention.
Reference numbers in the figures:
1-a workbench; 2-roller driving mechanism; 3-a precise conveying mechanism; 4-adjusting the fixing mechanism; 5-abrasion-proof air floating mechanism; 6-a first supporting vertical plate; 7-a second supporting riser; 8-a first roller; 9-a second roller; 10-a driven shaft; 11-a first rotational bearing; 12-a transfer plate; 13-square hole;
201-driving motor; 202-a drive shaft; 203-driving shaft; 204-a second rotational bearing; 205-a drive sprocket; 206-a drive chain;
301-strip shaped plate; 302-a first set of gear teeth; 303-an annular groove; 304-a second set of gear teeth;
401-transverse chute; 402-lateral adjustment plate; 403-transverse slider; 404-longitudinal sliding chute; 405-longitudinal slider; 406-side clip projection; 407-a clamping groove; 408-a jack; 409-inserting rod; 410-support protrusions; 411-a clamping slot; 412-a resilient pad; 413-fixing screw hole; 414-fixed screw; 415-a screw cap; 416-a via hole; 417 — a stationary motor; 418-fixing the bracket; 419-a fixed shaft; 420-inner grooves; 421-upright stanchion;
501-square box; 502-a guide projection; 503-a guide groove; 504-a cylinder frame; 505-a drive cylinder; 506-a lifting shaft; 507-an exhaust pipe; 508-an air cavity; 509-vent hole; 510-an air pump; 511-gas pipe; 512-elastic ring; 513-solenoid valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 5, the invention provides a roller type high-precision glass substrate conveying device, which comprises a workbench 1, wherein a first supporting vertical plate 6 and a second supporting vertical plate 7 which are arranged in parallel are fixedly connected to the top surface of the workbench 1, a plurality of first rollers 8 and second rollers 9 which are uniformly distributed are respectively arranged on the inner sides of the first supporting vertical plate 6 and the second supporting vertical plate 7, the first rollers 8 and the second rollers 9 can roll on the workbench 1 in situ and complete conveying and transportation of glass substrates, driven shafts 10 are fixedly connected to the outer side surfaces of the second rollers 9, the end parts of the driven shafts 10 are connected with the second supporting vertical plate 7 through first rotary bearings 11, and the first rollers 8 are connected with the first supporting vertical plate 6 through roller driving mechanisms 2.
When the driving motor 201 works, the driving shaft 202 can be rotated, the driving chain 206 is rotated in the rotating process, and the driving shaft 203 and the first roller 8 can both rotate due to the fact that the driving chain 206 is matched with each driving chain wheel 205, so that the conveying plate 12 can move on the first roller 8 and the second roller 9, and the glass substrate is conveyed.
The precise conveying mechanism 3 comprises a strip-shaped plate 301 fixedly connected with two ends of the bottom surface of the conveying plate 12, a first gear set 302 is arranged on the bottom surface of the strip-shaped plate 301, and the strip-shaped plate 301 enables the bottom surface of the conveying plate 12 to be farther away from the surface of the workbench 1 so as to place other structures at the bottom of the conveying plate 12.
The surfaces of the first roller 8 and the second roller 9 are provided with an annular groove 303, the surface of the annular groove 303 is provided with a second gear group 304 meshed with the first gear group 302, the strip-shaped plate 301 is connected with the first roller 8 and the second roller 9 through gears, and when the conveying plate 12 is driven by the first roller 8 and the second roller 9 to move, the moving accuracy is higher, and the deviation of the conveying position of the glass substrate is avoided.
The arrangement of the annular groove 303 enables the transfer plate 12 not to deviate during the movement and to move only in one direction, so that the transfer position of the glass substrate is more accurate.
The surface of conveying board 12 is provided with quad slit 13, the inside of quad slit 13 is provided with abrasionproof decreases air supporting mechanism 5, be provided with regulation fixed establishment 4 directly over conveying board 12, adjust fixed establishment 4 including setting up the horizontal spout 401 in conveying board 12 surface both sides, and be provided with two parallel horizontal regulating plate 402 directly over conveying board 12, horizontal spout 401 sets up with horizontal regulating plate 402 is perpendicular, the bottom surface both ends of horizontal regulating plate 402 all are provided with horizontal slider 403, and horizontal slider 403 blocks respectively in the horizontal spout 401 that corresponds, make two horizontal regulating plate 402 homoenergetic remove along horizontal spout 401, and the in-process that removes can make the distance change between two horizontal regulating plate 402.
The medial surface of horizontal regulating plate 402 all is provided with vertical spout 404, and be provided with the vertical slider 405 of a plurality of in vertical spout 404, make vertical slider 405 can remove along vertical spout 404, the bottom of vertical spout 404 is connected with the side and presss from both sides protruding 406, the bottom of vertical slider 405 all is provided with the block groove 407 that matches with the protruding 406 of side clamp, the side presss from both sides protruding 406 and is used for placing the glass substrate in quad slit 13 from the side centre gripping, block groove 407 can make the side press from both sides protruding 406 can not influence the removal of vertical slider 405.
The medial surface of vertical slider 405 all is provided with jack 408, and all insert in two jacks 408 that correspond and be equipped with inserted bar 409, the both sides side of inserted bar 409 all is connected with support protrusion 410, support protrusion 410 is used for supporting the glass substrate, jack 408 can make inserted bar 409 can not influence the removal of horizontal regulating plate 402, and can make inserted bar 409 remove along with the removal of vertical slider 405, the medial surface that the side pressed from both sides protruding 406 all is provided with presss from both sides groove 411, and the inner wall that presss from both sides groove 411 all is provided with cushion 412, it is used for spacing to press from both sides groove 411 to be used for the glass substrate, cushion 412 is by rubber, elastic material such as silica gel makes, be used for protecting the glass substrate.
The surface of horizontal regulating plate 402 all is provided with the fixed screw 413 of being connected with vertical spout 404, and be equipped with fixing screw 414 at the interpolation of fixed screw 413, fixing screw 414's top is connected with nut 415, and be provided with two through-holes 416 that run through on nut 415's surface, be provided with fixed motor 417 directly over fixed screw 413, and fixed motor 417 is connected with horizontal regulating plate 402 through fixed bolster 418, fixed motor 417's output is connected with fixed axle 419, and the bottom surface of fixed axle 419 is provided with inner groovy 420, nut 415 is located corresponding inner groovy 420 respectively, the top surface of inner groovy 420 all is connected with two pole settings 421, and pole setting 421 insert respectively and establish in corresponding through-hole 416.
When the fixed motor 417 works, the fixed screw 414 can be driven by the fixed shaft 419 and the upright 421 to rotate, and the longitudinal sliding block 405 is pressed downwards, so that the longitudinal sliding block 405 and the longitudinal sliding groove 404 can be in close contact, the transverse adjusting plate 402 cannot move transversely, the inserted link 409 cannot move longitudinally, the glass substrate can be fixed, and the fixed screw 414 is rotated by the fixed motor 417, which is more convenient and more efficient than manual rotation, and can reduce the workload of operators.
The step of placing the glass substrate to be transferred in the transfer plate 12 is:
(1) moving each of the insert rods 409 along the longitudinal sliding groove 404, placing each glass substrate between two adjacent insert rods 409 after the insert rods are moved to a proper position, and supporting the glass substrate by the support protrusions 410;
(2) the lateral adjusting plate 402 is moved inwards, so that two sides of the glass substrate can be just clamped in the clamping groove 411 of the lateral clamping protrusion 406, and it is noted that the lateral side of the glass substrate does not need to be in tight contact with the clamping groove 411, so that the glass substrate can be prevented from being damaged or protruding in the middle under the clamping force, and can also move up and down in the clamping groove 411, so that the anti-abrasion air floating mechanism 5 can play a role;
(3) place each glass substrate and accomplish, and horizontal regulating plate 402, inserted bar 409 all moves behind suitable position, start fixed motor 417, can make horizontal regulating plate 402, inserted bar 409 is fixed, avoid the in-process that removes at conveying board 12, horizontal regulating plate 402, inserted bar 409 automatic movement, be favorable to guaranteeing the firm of glass substrate, and simultaneously, because the horizontal regulating plate 402 of fixed glass substrate, inserted bar 409 can adjust, make the device can be used for conveying the glass substrate of not unidimensional size, make the application range of device wider.
Abrasionproof decreases air supporting mechanism 5 is including being located square box 501 in quad slit 13, and the side of square box 501 all is provided with the protruding 502 of direction, the side of quad slit 13 is provided with the guide way 503 that matches with the protruding 502 of direction, make square box 501 can reciprocate along guide way 503, the bottom of conveying board 12 is connected with cylinder frame 504, and install in the cylinder frame 504 and drive actuating cylinder 505, the output that drives actuating cylinder 505 is connected with lift axle 506, and the top of lift axle 506 and the bottom surface fixed connection of square box 501.
Drive actuating cylinder 505 during operation, can make square box 501 go up and down under the drive of lift axle 506, when glass substrate is fixed under the effect of adjusting fixed establishment 4, can be through driving actuating cylinder 505, make square box 501 rise, the bottom surface of the top contact conveying board 12 of square box 501, the top surface of square box 501 is provided with elastic ring 512, elastic ring 512 is made by elastic material such as rubber, silica gel, can make the contact of square box 501 with conveying board 12 inseparabler, and can prevent that the impact force that square box 501 removed is too big, make square box 501, conveying board 12 damages, simultaneously, elastic ring 512 can also make the bottom of quad 13 sealed.
The square box 501 is internally provided with exhaust pipes 507 which are uniformly distributed, the bottom of the square box 501 is provided with an air cavity 508, the surface of the exhaust pipes 507 is provided with exhaust holes 509 communicated with the air cavity 508, the bottom surface of the square box 501 is fixedly provided with an air pump 510, and the output end of the air pump 510 is connected with the air cavity 508 through an air conveying pipe 511.
Through the air pump 510, can fill into highly-compressed air in the air cavity 508, and finally through exhaust hole 509, discharge the air to the quad 13 in, because quad 13 bottom is sealed, the top is also blocked by horizontal regulating plate 402, the glass substrate, and the part quad 13 that does not use can also use other seal structure to seal, make the interior air current of quad 13 reveal very slowly, make the glass substrate can be lifted up under the effect of air current, make the top of glass substrate can with press from both sides the cushion 412 in the groove 411 in close contact with, make the glass substrate at the in-process of being fixed, can not take place the friction with the device, be favorable to protecting the glass substrate, prevent that the surface of glass substrate from producing wearing and tearing, can make the quality of glass substrate obtain the guarantee.
The nozzles of the exhaust pipes 507 are provided with electromagnetic valves 513, and the on-off and conduction conditions of the exhaust pipes 507 can be changed through the electromagnetic valves 513, so that the flow rate of the air flow discharged by the exhaust pipes 507 can be changed, and the most appropriate flow rate of the air flow can be selected.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (8)
1. A roller type high-precision glass substrate conveying device comprises a workbench (1), and is characterized in that: the top surface of the workbench (1) is fixedly connected with a first supporting vertical plate (6) and a second supporting vertical plate (7) which are arranged in parallel, the inner sides of the first supporting vertical plate (6) and the second supporting vertical plate (7) are respectively provided with a plurality of first idler wheels (8) and second idler wheels (9) which are uniformly distributed, the outer side surfaces of the second idler wheels (9) are respectively fixedly connected with a driven shaft (10), the end part of the driven shaft (10) is connected with the second supporting vertical plate (7) through a first rotating bearing (11), and the first idler wheels (8) are connected with the first supporting vertical plate (6) through a roller driving mechanism (2);
the top parts of the first roller (8) and the second roller (9) are connected with a conveying plate (12) through a precise conveying mechanism (3), a square hole (13) is formed in the surface of the conveying plate (12), an adjusting and fixing mechanism (4) is arranged right above the conveying plate (12), and an anti-abrasion air floating mechanism (5) is arranged inside the square hole (13); the adjusting and fixing mechanism (4) comprises transverse sliding grooves (401) arranged on two sides of the surface of the conveying plate (12), two parallel transverse adjusting plates (402) are arranged right above the conveying plate (12), transverse sliding blocks (403) are arranged at two ends of the bottom surface of each transverse adjusting plate (402), and the transverse sliding blocks (403) are respectively clamped in the corresponding transverse sliding grooves (401); the medial surface of horizontal regulating plate (402) all is provided with vertical spout (404), and is provided with the vertical slider (405) of a plurality of in vertical spout (404), the bottom of vertical spout (404) is connected with the side and presss from both sides protruding (406), the bottom of vertical slider (405) all is provided with presss from both sides block groove (407) that protruding (406) were matchd with the side, the medial surface of vertical slider (405) all is provided with jack (408), and all inserts in two corresponding jacks (408) and is equipped with inserted bar (409), the both sides side of inserted bar (409) all is connected with supporting protrusion (410), the medial surface that the side pressed from both sides protruding (406) all is provided with presss from both sides groove (411), and the inner wall that presss from both sides groove (411) all is provided with cushion (412).
2. The apparatus of claim 1, wherein: roller actuating mechanism (2) include with first support riser (6) medial surface fixed connection's driving motor (201), and the output of driving motor (201) is connected with drive shaft (202), the equal fixedly connected with driving shaft (203) of lateral surface of first gyro wheel (8), and the tip of driving shaft (203) all is connected with first support riser (6) through second swivel bearing (204), the surface of driving shaft (203) and drive shaft (202) all overlaps and is equipped with driving sprocket (205), and is equipped with driving chain (206) at the outside cover of driving sprocket (205).
3. The apparatus of claim 1, wherein: accurate transport mechanism (3) include with transport plate (12) bottom surface both ends fixed connection's strip shaped plate (301), and be provided with first round of tooth group (302) in the bottom surface of strip shaped plate (301).
4. The apparatus of claim 1, wherein: the surfaces of the first roller (8) and the second roller (9) are both provided with annular grooves (303), and the surfaces of the annular grooves (303) are both provided with second gear sets (304) meshed with the first gear sets (302).
5. The apparatus of claim 1, wherein: the surfaces of the transverse adjusting plates (402) are provided with fixing screw holes (413) connected with the longitudinal sliding grooves (404), a fixing screw (414) is inserted into the fixing screw hole (413), the top of the fixing screw (414) is connected with a screw cap (415), two through holes (416) are arranged on the surface of the screw cap (415), a fixed motor (417) is arranged right above the fixed screw hole (413), and the fixed motor (417) is connected with the transverse adjusting plate (402) through a fixed bracket (418), the output end of the fixed motor (417) is connected with a fixed shaft (419), and the bottom surface of the fixed shaft (419) is provided with an inner groove (420), the screw caps (415) are respectively positioned in the corresponding inner grooves (420), the top surface of the inner groove (420) is connected with two upright posts (421), and the upright posts (421) are respectively inserted into the corresponding through holes (416).
6. The apparatus of claim 1, wherein: the anti-abrasion air floating mechanism (5) comprises a square box (501) located in a square hole (13), a guide bulge (502) is arranged on the side face of the square box (501), a guide groove (503) matched with the guide bulge (502) is arranged on the side face of the square hole (13), the bottom end of the conveying plate (12) is connected with an air cylinder frame (504), a driving air cylinder (505) is installed in the air cylinder frame (504), the output end of the driving air cylinder (505) is connected with a lifting shaft (506), and the top end of the lifting shaft (506) is fixedly connected with the bottom face of the square box (501).
7. The apparatus for transferring a glass substrate with high precision of roller type according to claim 6, wherein: the air-conditioning box is characterized in that exhaust pipes (507) which are uniformly distributed are arranged in the square box (501), an air cavity (508) is arranged at the bottom of the square box (501), exhaust holes (509) which are communicated with the air cavity (508) are formed in the surface of each exhaust pipe (507), an air pump (510) is fixedly installed on the bottom surface of the square box (501), and the output end of the air pump (510) is connected with the air cavity (508) through an air conveying pipe (511).
8. The apparatus of claim 7, wherein: the top surface of square box (501) is provided with elasticity circle (512), the mouth of pipe of blast pipe (507) all is provided with solenoid valve (513).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810428292.7A CN108750669B (en) | 2018-05-07 | 2018-05-07 | Roller type high-precision glass substrate conveying device |
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| CN201810428292.7A CN108750669B (en) | 2018-05-07 | 2018-05-07 | Roller type high-precision glass substrate conveying device |
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| CN108750669B true CN108750669B (en) | 2020-04-24 |
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| CN1810608A (en) * | 2005-01-26 | 2006-08-02 | 三发机电有限公司 | Substrate transferring apparatus |
| JP4753313B2 (en) * | 2006-12-27 | 2011-08-24 | 東京エレクトロン株式会社 | Substrate processing equipment |
| CN203158816U (en) * | 2013-03-05 | 2013-08-28 | 郑州旭飞光电科技有限公司 | Device for conveying glass substrate |
| CN104051311B (en) * | 2014-07-08 | 2017-06-09 | 深圳市华星光电技术有限公司 | Base plate transfer device and the strong acid suitable for wet process or highly basic etching technics |
| CN206187893U (en) * | 2016-11-15 | 2017-05-24 | 马彦亭 | Unmanned aerial vehicle conveyer |
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Address after: 241000 the Pearl River Road, Wuhu Area, China (Anhui) Pilot Free Trade Zone, Wuhu Economic Development Zone, Anhui Province Patentee after: WUHU LIANGJIANG MACHINERY MANUFACTURING Co.,Ltd. Country or region after: China Address before: 241000 Factory Building No.1, Hongguang Road, Qiaobei Industrial Park, Jiujiang District, Wuhu City, Anhui Province, China Patentee before: WUHU LIANGJIANG MACHINERY MANUFACTURING Co.,Ltd. Country or region before: China |