CN108732825A - It is a kind of can automatically controlled surface topography device and its preparation method and application - Google Patents

It is a kind of can automatically controlled surface topography device and its preparation method and application Download PDF

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Publication number
CN108732825A
CN108732825A CN201810290559.0A CN201810290559A CN108732825A CN 108732825 A CN108732825 A CN 108732825A CN 201810290559 A CN201810290559 A CN 201810290559A CN 108732825 A CN108732825 A CN 108732825A
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China
Prior art keywords
liquid crystal
elastic body
crystal elastic
perforated electrodes
electrode
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CN201810290559.0A
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Inventor
埃泽尔·阿金诺古
劳伦斯·德·哈恩
高进伟
周国富
金名亮
迈克尔·吉尔森
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Shenzhen Xingguohua Advanced Equipment Technology Co ltd
South China Normal University
Zhaoqing South China Normal University Optoelectronics Industry Research Institute
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Shenzhen Xingguohua Advanced Equipment Technology Co ltd
South China Normal University
Zhaoqing South China Normal University Optoelectronics Industry Research Institute
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Priority to CN201810290559.0A priority Critical patent/CN108732825A/en
Publication of CN108732825A publication Critical patent/CN108732825A/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/13439Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention discloses it is a kind of can automatically controlled surface topography device, including continuous electrode, perforated electrodes and liquid crystal elastic body;The liquid crystal elastic body is distributed between continuous electrode and perforated electrodes;Perforated electrodes are with netted or perforation structure conductive electrode.The present invention realizes that the principle of control surface pattern is:Under the applied field, liquid crystal elastic body generates deformation so that protrusion present in the netted or gap of perforated electrodes protrudes, to realize that surface regulates and controls.Device maximum perpendicular deformation height provided by the invention is up to 1 μm, corresponding to the thickness modulation of the device about 11% of vertical arrangement, platform vertical deformation outstanding is used as by the perforation in conductive network simultaneously, it is not determined by specific conductive electrode network spacing, under voltage or outer force effect deformation is generated with liquid crystal elastic body, realization deformation need not be specifically arranged, device provided by the invention can be more than the limit of Maxwell effect, have great application prospect.

Description

It is a kind of can automatically controlled surface topography device and its preparation method and application
Technical field
The invention belongs to liquid crystal elastic body device arts, more particularly, to it is a kind of can automatically controlled surface topography dress Set and its preparation method and application.
Background technology
Change in topology can be carried out on demand, and can generate the surface of stimuli responsive structure, while its surface can be utilized thick The device that rugosity is regulated and controled has various potential applications, such as response elastomer is exactly the material for having this potential application Material, and liquid crystal polymer needs to cause modification of surface morphology by stimulating as a kind of special response elastomer(For example, S order parameter by reducing molecules align is realized).For different stimulations, there is many research at present, for example, temperature, illumination, Chemical stimulation etc., the above stimulation mode reduce the S order parameter of single domain liquid crystal film by different working mechanisms.There is research in the recent period It has been shown that, current potential can also stimulate liquid crystal film and the pattern on farmland to change.For example, electric field can cause subtracting for S order parameter in liquid crystal cells It is few, cause the generation of free volume, while with generation relative to the contraction in material array direction and the deformation of expanded form.Example Such as existing research indicates in the face of liquid crystal film/electrode of side arrangement on the generation AC voltages that apply to generate electric field.When When alternating electric field is matched with liquid crystal network eigenfrequency, resonance effect can be caused, and promote the generation of free volume and deformation.
Further, since the generation of electromechanical effect, the poly- multidomain nematic elastomer of isotropism can show and apply Prodigious contraction strain on the equal line direction of electricity.In fact, in actuator research field, have to non-liquid crystal dielectric elastomeric For body as electric responsive material systematic research, most important one target is to induce big spot rather than pattern variation.? In these systems, dielectric elastomer is clipped among two electrodes, can be shunk when then applying voltage to it.Potential U Caused static pressureF/AIt can be by formula(1)It obtains:
F/A =ε0εrU2/d2 (1)
Electric constant ε0e0, dielectric constant er, the thickness d of elastomer.Deformation caused by applying stress can be provided by Hooke's law, be seen Formula(2)
(2)
Young's modulus E, modulation degree Dd/d0.Therefore the property E, ε of material itselfrThis max is determined with breakdown voltage U/d Wei Xiaoying.This system also be used to prepare the surface texture of switchable control.However, for isotropism origin multidomain to Row type elastomer, can to Maxwell effect generate bigger response, this is because the isotropism of multidomain LC films have it is special Direction of rotation and the flexibility that generates.
Such as application, it is not to change temperature, illumination and chemical stimulation come the purpose for realizing the variation of LC device topographies It corresponds to reality.Especially, temperature and chemical stimulation cannot be using the mechanism of this switchable device come with quickly alternate sequence It transmits.Although ultraviolet light stimulus can be provided with quickly alternate sequence, change so as to cause quick pattern, stimulation The actual use of property meeting limit device.For example, such device will need ultraviolet source, and cannot utilize this changeable The mechanism of device is transmitted with quickly alternate sequence.Although ultraviolet light stimulus can be provided with quickly alternate sequence, to The actual use for the property meeting limit device for causing quick pattern to change, but stimulating.For example, such device will need purple Outer light source, and cannot be used in the place there are a large amount of ultraviolet radioactives, such as the radiation from the sun.Modern technologies are very big Circuit engineering is depended in degree, it is not only device offer working power, but also is the most important medium of switching state. Therefore, a kind of most representative method of LC surface topographies is switched by electro photoluminescence.It can easily realize integration of equipments simultaneously It is developed further into more complicated product.The existing unique competitive technology in this field uses lateral electrodes design, and Have been achieved with the deformation of the changeable surface topography and relevant vertical LC films of LC.
But this method is along with some limitations and disadvantage:(1)The maximum perpendicular Deformation Height of system is 200nm, corresponding Thickness in about 6% tunes,(2)It needs just cause apparent pattern to change higher than the AC voltages of 600kHz to 1MhZ,(3)It hangs down The section that straight becomes is limited to the section of lower electrodes;(4)There is sharp peak value, side to decline rapidly for vertical deformation, no Platform pattern can be formed;(5)The extension of VERTICAL DEFORMATION depends on transverse electrode and arranges and its be spaced,(6)It needs single domain LC films Liquid crystal cells arrange the additional preparation steps of polymerization in advance.
With regard to the competitive aspect of material system:So far, the isotropism multidomain nematic between being clipped in perforated electrodes Change in topology is not yet observed in type elastomer.It is much like in other LC systems and non-LC dielectric elastomers, all lay particular emphasis on Design to actuator.For non-LC systems, the modulation constrained physical principle in Maxwell effect.Nearest research is base In obtaining the basic physical property with optimization, such as Young's modulus E relative quiescent permittivity εsrWith the material of breakdown voltage U/d To improve modulation/strain.However, the effect of material is still limited by the physical principle of Maxwell effect.
Invention content
For overcome the above Maxwell effect physical principle limitation, while realize it is good can dynamic regulation surface shape The function of looks, the present invention provides it is a kind of can automatically controlled surface topography device.
Another object of the present invention is to provide the preparation method of above-mentioned apparatus simultaneously.
Still a further object of the present invention is to provide the application of above-mentioned apparatus.
The above-mentioned technical purpose of the present invention is achieved through the following technical solutions:
It is a kind of can automatically controlled surface topography device, including continuous electrode, perforated electrodes and liquid crystal elastic body;The liquid crystal elastic body It is distributed between continuous electrode and perforated electrodes;Perforated electrodes are with netted or perforation structure conductive electrode;Continuous electrode For the ordinary electrode of non-network;Apply power supply effect under, liquid crystal elastic body generate deformation so that perforated electrodes it is netted Or protrusion present in perforation structure protrudes, to realize that surface regulates and controls.
Further, regular structure distribution is not needed in the netted or perforation structure of perforated electrodes of the invention, only needed There are protrusions to achieve that effect.
Preferably, liquid crystal elastic body is made using monomer, crosslinking agent and initiator of typical polymerization reaction.List of the present invention The raw material of conventional synthesis liquid crystal elastic body can be used in body, crosslinking agent and initiator etc..
As specific synthesis material, monomer is selected from 4- cyanophenols 4-(6- acryloxy hexyloxies)Benzoic ether; Crosslinking agent is diacrylate crosslinking agents;Initiator is 1- hydroxycyclohexylphenyls.
Preferably, liquid crystal elastic body is multidomain nematic elastomer.Under this elastomer, in addition to there are Maxwell effects Outside, other electroactive responses are not present, thus it becomes apparent the response effect on surface.
Preferably, the material of continuous electrode is conductive metal, conductive carbon or transparent conductive oxide.
Preferably, the thickness of continuous electrode is more than 50nm, and the thickness of perforated electrodes is 200nm to 30 μm, liquid crystal elastic body Thickness is more than 80nm.
Present invention simultaneously provides it is described can automatically controlled surface topography device preparation method, be included in continuous electrode and wear Mold is placed among pore electrod, the monomer, crosslinking agent and initiator that synthesize liquid crystal elastic body is positioned in mold, use is ultraviolet After light generation polymerisation to obtain the final product.
The present invention protect simultaneously it is described can automatically controlled surface topography device can dynamic control surface pattern, it is especially dynamic Application in state control surface roughness device.
The present invention compared with the existing technology, has the following advantages and effect:
Device maximum perpendicular deformation height provided by the invention is up to 1 μm, corresponds to the apparatus structure about 11% of vertical arrangement Thickness is modulated, while passing through wearing in conductive network as perforated electrodes in the vertical deformation of conductive network whole punched areas Hole as platform vertical deformation outstanding, what the adjustment of VERTICAL DEFORMATION was not determined by the spacing of conductive network(I.e. to specific Netted and perforation structure is without limitation), while can be operated together with multidomain LC films, without specific alignment step (That is the composition of device is simple, to assembling without strict demand).Importantly, compared with traditional non-liquid crystal dielectric elastomer, Device provided by the invention can be more than the limit of Maxwell effect, have great application prospect.
Description of the drawings
Fig. 1 is device manufacturing flow chart.
Fig. 2 is the concrete operations schematic diagram of element manufacturing.a)Uniform floor electrode on glass.b)Perforation top on glass Portion's electrode.c)Two electrodes faces are placed, and are separated by silicon dioxide spacer object.LC mixtures are filled into gap, and It is irradiated with UV polymerisation occurs in isotropic phase.d)Finally, top glass slide is removed, leaves perforated electrodes insertion LC On the surface layer of surface of elastomer.
Fig. 3 is the device operation principle schematic diagram with reversible switching state.a)Alive off-state and b are not applied) Apply alive open state.
Fig. 4 is to obtain three-dimensional appearance figure with optical profilometer.a)Device is closed, and applies electricity in open state Pressure is respectively b)150 V and c)250 V..
Specific implementation mode
Further illustrated the present invention below in conjunction with specific embodiments and the drawings, but embodiment the present invention is not done it is any The restriction of form.Unless stated otherwise, the present invention uses reagent, method and apparatus is the art conventional reagent, methods And equipment.
Unless stated otherwise, agents useful for same and material of the present invention are purchased in market.
Embodiment 1
The changeable surface topography on the surfaces LC is realized by the electric field perpendicular to membrane plane, wherein top electrodes are conductive metals Network.
The system is combined into a device by three individual components:(1)Continuous bottom electrode,(2)As top electricity The perforation conductive network of pole, and(3)It is clipped in(1)With(2)Between the liquid crystal elastic body of sandwich-like that constitutes.
1, continuous bottom electrode:
By physical vapour deposition (PVD) continuous bottom electrode is made in the silver of deposition on glass 300nm thickness.Before depositing Ag, Need adherency of the adhesive phase of the Cr of deposition 5nm thickness to improve glass to Ag.But continuous bottom electrode is not limited to these materials Material.Substantially, any continuous conduction material with flat surfaces and low surface roughness can be used.For example, metal, carbon is same Plain obform body, transparent conductive oxide and other conductive materials can be deposited as film on a planar substrate.In addition, polishing Conductive block materials and thin slice may also be used as this material.
2, perforated top electrode:
Top electrodes are used as using self-forming metalolic network.Electrode can be described as the metalolic network being coupled to each other or perforation Metallic film.It is the photoetching making on glass slide, and compared with other transparent metal conductors, has excellent conductance Rate and transmissivity, wherein transmissivity are that the score of perforation field directly obtains.Lithographic template can be by drying in gel film Crackle is formed in the process to obtain.Egg white and nail polish are the gels for being typically available to this purpose.It is solidifying to usually require spin coating application Glue.However, other technologies can also be used, including other skills such as the dispersion of dip coated or liquid in the spacer of limited bulk Art.Then, by metal(It is Ag in our case)It is deposited on by physical vapour deposition (PVD) and passes through the crack in template.When Other metal deposition techniques can also so be used.For example, having recently been developed and full liquid technology as this method class.I.e. Removing template is removed with organic solvent and distilled water, the metalolic network of interconnection is generated on glass, it appears that is crackle template Negative-appearing image.
Any discontinuous conductive material can be used in principle(Mean to can not be film, but there is trepanning knot The network of structure).Other than the scramble network that we use, it can also use and rule is prepared based on photoetching or self-assembling technique With irregular metal network.
3, liquid crystal elastic body
With " 4- cyanophenols 4-(6- acryloxy hexyloxies)Benzoic ether " is used as monomer, 2% diacrylate crosslinking agents " 1- hydroxycyclohexylphenyls are as UV photoinitiators with 2%.The mixture does not have liquid crystalline phase initially, but passes through polymerization Afterwards, nematic phase is can get in prodigious temperature range.When mixture polymerize in isotropic phase and is crosslinked simultaneously, finally Obtained material have it is smaller, be difficult to define multidomain structure.This is considered as a kind of nematic network of the isotropism origin cause of formation, with The nematic traditional material polymerizeing at 90 DEG C is compared, and has the characteristic for needing low-force quantitative change shape.The base of liquid crystal elastic body This requirement is that it is isotropism multidomain nematic crystal elastomer.Ideally, in order to can make to gather at a lower temperature It closes reaction in correct phase to occur, it usually needs use the lower similar LC elastomers of glass transition temperature.Material it is soft Softness is the relevant parameter with our device optimization, monomer, the selection of crosslinking agent and photoinitiator molecules and they Concentration can all influence the modulation of material softness degree.
The production process and concrete operations flow of device are seen figure 1 and figure 2, the uniform floor on glass well prepared in advance Electrode(Fig. 2 a)With perforated top electrode(Fig. 2 b).Then two electrodes faces are arranged, and is separated by particle spacer.Directly The spacer that 3 μm to 100 μm of diameter be normally based on silica but it is also possible to be based on polymer.Liquid crystal compound quilt In the free volume of filling between the electrodes, thickness is determined by spacer diameter.At 90 DEG C, liquid crystal compound be in it is each to In same sex phase.5-10 minutes are irradiated to start polymerisation by UV(Fig. 2 c).Finally, the glass slide for removing perforated electrodes, is stayed Lower perforated metal electrode, and it is embedded into isotropism multidomain nematic crystal surface of elastomer(Fig. 2 d).
Operating principle is as shown in Figure 3.Get out state as shown in Figure 3a, at the same in the case of no application current potential at In closed state.When applying DC potentials, perforated electrodes are drawn into LC elastomers, cause the perforation exposed from top electrodes prominent It rises.It is opening state shown in Fig. 3 b.Both states are reversible switchings, and can be adjusted by the voltage of application logical The height of electricity condition protrusion.
The three-D profile of these states is as shown in Figure 4.Shown data are to be collected with optical profilometer, and can show Its pattern.Difference in height is indicated using the color range of display.Closed state is shown in fig.4.There is no apparent difference in height It is different as it can be seen that but it will be apparent that ground distinguish perforated electrodes solid conductor.Fig. 4 b and Fig. 4 c respectively illustrate apply 150V and Two kinds of conducting states of 250V voltages.It is obvious that the apparent pattern variation of the platform-like projecting manner occurred from perforation.
By calculating, it is 250V that we, which realize applying voltage, when film thickness is 9 μm, obtains up to 1 μm of protrusion, right It should be in 11% modulation.It is expected that the extension of Maxwell effect can be approximated to be the region for being assumed to be electric wire and following uniform electricity Pole forms plane-parallel capacitor together.Use above formula and experiment determining Y=1.65MPa and e εr=1.92, calculating Theoretical value corresponds to the only difference in height of 70nm of 0.8% modulation.The film of 9 μ m-thicks and 27.8V/ μm of electric-field strength for shown in The value of degree, the device actual test made in of the invention is bigger than theoretical calculation, 9 μm=900nm, is 70nm in theoretical calculation, surpasses Go out more than 10 times, breached the limitation of Maxwell effect, has fabulous application prospect.

Claims (8)

1. it is a kind of can automatically controlled surface topography device, which is characterized in that including continuous electrode, perforated electrodes and liquid crystal elastic body; The liquid crystal elastic body is distributed between continuous electrode and perforated electrodes;Perforated electrodes are with netted or perforation structure conduction Electrode;Continuous electrode is the ordinary electrode of non-network;In the case where applying electric field action, liquid crystal elastic body generates deformation so that Protrusion present in the netted or perforation structure of perforated electrodes protrudes, to realize that surface regulates and controls.
2. the apparatus according to claim 1, which is characterized in that liquid crystal elastic body is adopted using monomer, crosslinking agent and initiator It is made of typical polymerization reaction.
3. device according to claim 1 or 2, which is characterized in that liquid crystal elastic body is multidomain nematic elastomer.
4. the apparatus of claim 2, which is characterized in that monomer is selected from 4- cyanophenols 4-(6- acryloxies oneself Oxygroup)Benzoic ether;Crosslinking agent is diacrylate crosslinking agents;Initiator is 1- hydroxycyclohexylphenyls.
5. the apparatus according to claim 1, which is characterized in that the material of continuous electrode is conductive metal, conductive carbon or saturating Bright conductive oxide.
6. the apparatus according to claim 1, which is characterized in that the thickness of continuous electrode is more than 50nm, the thickness of perforated electrodes Degree is 200nm to 30 μm, and liquid crystal elastic body thickness is more than 80nm.
7. it is a kind of it is described in claim 1 can automatically controlled surface topography device preparation method, which is characterized in that in continuous electrode With placement mold among perforated electrodes, the monomer, crosslinking agent and initiator that synthesize liquid crystal elastic body are positioned in mold, used After ultraviolet light generation polymerisation to obtain the final product.
8. described in any one of claim 1 to 6 can automatically controlled surface topography device can dynamic control surface pattern or Application in dynamic control surface roughness device.
CN201810290559.0A 2018-04-03 2018-04-03 It is a kind of can automatically controlled surface topography device and its preparation method and application Pending CN108732825A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009191117A (en) * 2008-02-13 2009-08-27 Tokai Rubber Ind Ltd Liquid crystal elastomer and actuator using the same
US20120133690A1 (en) * 2009-08-07 2012-05-31 Takashi Katayama Display element and electrical device
CN104375336A (en) * 2013-08-13 2015-02-25 天马微电子股份有限公司 Stereoscopic display
CN106711078A (en) * 2016-12-29 2017-05-24 昆山工研院新型平板显示技术中心有限公司 Flexible device manufacturing method
CN106883863A (en) * 2017-03-23 2017-06-23 清华大学 Liquid crystal elastic body driving element and preparation method thereof, and liquid crystal elastic body application
CN107564856A (en) * 2016-07-01 2018-01-09 上海和辉光电有限公司 A kind of stripping means of flexible base board

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009191117A (en) * 2008-02-13 2009-08-27 Tokai Rubber Ind Ltd Liquid crystal elastomer and actuator using the same
US20120133690A1 (en) * 2009-08-07 2012-05-31 Takashi Katayama Display element and electrical device
CN104375336A (en) * 2013-08-13 2015-02-25 天马微电子股份有限公司 Stereoscopic display
CN107564856A (en) * 2016-07-01 2018-01-09 上海和辉光电有限公司 A kind of stripping means of flexible base board
CN106711078A (en) * 2016-12-29 2017-05-24 昆山工研院新型平板显示技术中心有限公司 Flexible device manufacturing method
CN106883863A (en) * 2017-03-23 2017-06-23 清华大学 Liquid crystal elastic body driving element and preparation method thereof, and liquid crystal elastic body application

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Title
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